CN2660653Y - Retarding curve measurer of piezoelectric ceramic tube - Google Patents
Retarding curve measurer of piezoelectric ceramic tube Download PDFInfo
- Publication number
- CN2660653Y CN2660653Y CNU2003201219403U CN200320121940U CN2660653Y CN 2660653 Y CN2660653 Y CN 2660653Y CN U2003201219403 U CNU2003201219403 U CN U2003201219403U CN 200320121940 U CN200320121940 U CN 200320121940U CN 2660653 Y CN2660653 Y CN 2660653Y
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- piezoelectric ceramic
- ceramic tube
- michelson interferometer
- measurement mechanism
- stroke
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Abstract
The utility model provides a piezoelectric ceramic tube hysteresis curve measuring device capable to eliminate the influence of nonorthogonality of a piezoelectric ceramic tube on hysteresis curve measurement so that to achieve accurate measurement data. The utility model comprises a piezoelectric ceramic tube support table and a Michelson interferometer for calculating the expansion quantity of the piezoelectric ceramic tube. The support table of the piezoelectric ceramic tube is a rotary table; a rotary graduated disc is arranged on the rotary table; the Michelson interferometer is connected to the expansion end of the tested piezoelectric ceramic tube through a sliding-contact structure.
Description
Technical field
The utility model relates to micro-measuring technique, is a kind of piezoelectric ceramic tube retardant curve measurement mechanism.
Background technology
The piezoelectric ceramics tube scanner is one of main motion parts of scanning probe microscopy, and it drives probe or sample carries out the motion of the scanner uni Z-direction of X, Y direction, thereby finishes the imaging of sample surfaces pattern.The piezoelectric ceramic tube that is used for scanner has following design feature: after inside surface and the outside surface metallization, by radial polarised, the outer wall metallic coating is separated into the scan electrode of four electrodes as horizontal X and vertical Y, and the inwall of whole pipe is as regulating needle point Z just to electrode.Because the intrinsic lagging characteristics of piezoelectric ceramic tube itself, its voltage and displacement relation curve present significantly non-linear, and be particularly when it carries out large area scanning, non-linear more serious.In addition, because problem such as the inhomogeneous and pipe thickness of outer wall dividing electrodes is inhomogeneous in the piezoelectric ceramic tube process makes piezoelectric ceramic tube have nonorthogonality, thereby cause that X is to the accurate quadrature of the motion of ordering about to voltage with Y.All these has had a strong impact on the operating characteristic of scanatron, can cause the distortion of scanning patter.Therefore to carry out non-linear and the nonorthogonality correction to piezoelectric ceramic tube, at first just must accurately measure the relation curve of its driving voltage and stroke.
Ideally, piezoelectric ceramic tube X to Y to complete quadrature, promptly as shown in Figure 2: X is vertical fully to electrode CD direction with Y to electrode A B direction; But in the reality, because the existence of some problems that piezoelectric ceramic tube is produced in process, will have situation as shown in Figure 2: Y to electrode in C ' D ' direction, so just make X to the accurate quadrature of the motion of ordering about to voltage with Y, it is inaccurate to cause measuring resulting data.In order to obtain measurement data accurately, just must make measurement mechanism can accurately find the flexible end of piezoelectric ceramic tube.Though disclosed various micrometer technical devices in the prior art, and all existed and to eliminate the piezoelectric ceramic tube nonorthogonality to surveying this technological deficiency that influences of its retardant curve based on the Michelson principle of interference.
The utility model content
The utility model is at the above-mentioned defective that exists in the prior art, provides a kind of piezoelectric ceramic tube nonorthogonality of can eliminating to surveying the influence of its retardant curve, thereby helps obtaining the piezoelectric ceramic tube retardant curve measurement mechanism of measurement data accurately.
The technical solution of the utility model is as follows:
Piezoelectric ceramic tube retardant curve measurement mechanism comprises piezoelectric ceramic tube brace table and the Michelson interferometer of calculating the piezoelectric ceramic tube stroke, and it is characterized in that: described piezoelectric ceramic tube brace table is a universal stage.
Described universal stage is provided with rotation scale.
Described Michelson interferometer is connected in the flexible end of tested piezoelectric ceramic tube by the structure of sliding contact.
The structure of described sliding contact comprises sliding stand, sliding shoe and connecting link, described sliding shoe is arranged in the chute of described sliding stand, described sliding shoe one end is fixedly connected on the catoptron of described Michelson interferometer, the other end is fixedly connected on described connecting link, the sliding contact of the flexible end of the other end of described connecting link and piezoelectric ceramic tube.
Described Michelson interferometer forms interference fringe by spectroscope, and the number of the photo-beat signal of described interference fringe is corresponding to the stroke of piezoelectric ceramic tube.
Technique effect of the present utility model is as follows:
Because the utility model piezoelectric ceramic tube retardant curve measurement mechanism, the piezoelectric ceramic tube brace table is set to the rotatable structure of universal stage, can drive piezoelectric ceramic tube by universal stage and do coaxial rotation, accurately find the flexible end of piezoelectric ceramic tube, thereby the nonorthogonality of eliminating piezoelectric ceramic tube helps obtaining measurement data piezoelectric ceramic tube retardant curve accurately to surveying the influence of its stroke and driving voltage relation curve.
By this measurement mechanism, can record respectively piezoelectric ceramic tube X to and the relation curve of Y between driving voltage and stroke; In addition, also can record X to and Y to a nonorthogonality angle.
Because universal stage is provided with rotation scale, this has just brought facility to operation, helps control, and improves measuring accuracy.
Because Michelson interferometer is connected in the flexible end of tested piezoelectric ceramic tube by the structure of sliding contact, adopt sliding shoe to drive that plane mirror moves and the structure of connecting link and the sliding contact of the flexible end of piezoelectric ceramic tube, can avoid when piezoelectric ceramic tube and universal stage are coaxial to be rotated influence light path.
Because Michelson interferometer forms interference fringe by spectroscope, the number of the photo-beat signal of described interference fringe is corresponding to the stroke of piezoelectric ceramic tube, make this device have following characteristics: 1. because the two-beam that spectroscopical reflection and transmission form is separately far away, the light path (as moving one of them catoptron) of being convenient to change respectively two-beam is observed change of interference fringes.2. produce the bat signal of an interference of light according to the distance of the whenever mobile λ of plane mirror/2 (λ is an optical maser wavelength), the number by the photo-beat signal calculates the piezoelectric ceramic tube stroke.3. measuring principle and method are simple, are easy to realize.
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the cross-sectional structure synoptic diagram of piezoelectric ceramic tube;
Fig. 3 is the flexible end of piezoelectric ceramic tube sliding contact structural representation.
Mark lists as follows among the figure:
1. sliding stand; 2. piezoelectric ceramic tube; 3. universal stage; 4. connecting link; 5. sliding shoe; 6. laser tube S; 7. plane mirror M1; 8. plane mirror M2; 9. plane mirror M3; 10. plane mirror M4; 11. convex lens G1; 12. convex lens G2; 13. spectroscope N; 14. filter mirror F; 15. receiving screen P; 16. interference fringe; 17. moving interference fringes direction; 18. piezoelectric ceramic tube wall electrode metallic coating; 19. insulation course; 20. piezoelectric ceramics inside pipe wall electrode metal coating; 21. contact point K.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
As Fig. 1, Fig. 2 and shown in Figure 3, the stroke of the utility model piezoelectric ceramics tube scanner is measured and is used the Michelson interference device, wherein mark 6 is laser tube S, mark 7,8,9,10 are respectively plane mirror M1, M2, M3, M4, mark 11,12 are respectively convex lens G1, G2, mark 14 is filter mirror F, mark 13 is spectroscope N, mark 15 is receiving screen P, mark 16 is an interference fringe, mark 17 is the moving interference fringes direction, mark 18 is a piezoelectric ceramic tube outer wall metallic coating, and mark 19 is an insulation course, and mark 20 is a piezoelectric ceramics inside pipe wall metallic coating, mark 21 is contact point K, and sliding stand 1, piezoelectric ceramic tube 2, universal stage 3 and connecting link 4.Wherein require: piezoelectric ceramic tube 2 is fixed on the universal stage 3 and makes both coaxial; One end stationary mirror M4 of sliding shoe 5, the other end fix a connecting link 4 and pass through the flexible end sliding contact of this bar and piezoelectric ceramic tube 2.Its course of work is: the beam of laser of sending from laser tube S is thus lifted to certain altitude through plane mirror M1 and M2, more successively through G1, F with G2 focuses on, become directional light behind filtering and the expansion bundle.Be divided into two-beam (reflected light and transmitted light) behind this directional light process spectroscope N, wherein a branch of being mapped on the fixing mirror M 3, another beam is on the mirror M 4 that is fixed on the sliding shoe 5, two-beam respectively through after the reflection of M3 and M4 once more the transmission through spectroscope N form light and dark interference fringe 16 with the reflection back, it can be seen on the screen P accepting.Because in the ideal case, piezoelectric ceramic tube X to Y to being completely orthogonal, promptly as shown in Figure 2: X is vertical fully to electrode CD direction with Y to electrode A B direction; But in practice, exist the piezoelectric ceramic tube wall electrode to cut apart problems such as inhomogeneous and pipe thickness is inhomogeneous, will have situation as shown in Figure 2: Y to electrode in C ' D ' direction, so just make X to the accurate quadrature of the motion of ordering about to voltage with Y, therefore adopted the structure on Fig. 1 right side accurately to find the flexible end A (B) of piezoelectric ceramic tube actual state or C ' (D ') point.The measurement means of implementing is example to voltage survey X to stroke to apply X, concrete operations are as follows: when regulating whole optical path with attachment device contact point K is arranged on as far as possible near C (or D ') point near Y to (this can be definite by external power supply lead-in wire point of piezoelectric ceramics pipe electrode), progressively apply X to voltage for then piezoelectric ceramic tube 2, see whether interference fringe 16 moves, need to regulate universal stage 3 change contact point K if any moving, it is no longer mobile up to interference fringe to repeat said process repeatedly, at this moment the K point is certain overlaps with C (or D) point (AB to CD to complete vertical), and then universal stage accurately revolved clockwise or counterclockwise turn 90 degrees (degree of accuracy of rotation is by the decision of the index dial on the universal stage), that is to say that this moment, contact point K overlapped with A (or B), thereby guaranteed that measured serial corresponding data is that the X of piezoelectric ceramic tube 2 actual states concerns to stroke to driving voltage and X.Otherwise during to the stroke relation curve, method is as the same to driving voltage and Y for the Y of pressure measurement electroceramics pipe 2.Move when driving M4 when flexible under the driving of piezoelectric ceramic tube 2 at voltage, so interference fringe since the variation of optical path difference also will be moved.Distance according to the whenever mobile λ of Michelson interferometer M4/2 (λ is an optical maser wavelength) will produce the bat signal of an interference of light, therefore the piezoelectric ceramic tube stroke be can calculate according to the number of photo-beat signal, thereby the stroke of piezoelectric ceramic tube and the relation curve between its driving voltage obtained.
The above is a preferred implementation of the present utility model only, should be pointed out that for a person skilled in the art; according to principle of invention of the present utility model; can also make some changes and improvements, still, these all fall into protection domain of the present utility model.
Claims (5)
1. piezoelectric ceramic tube retardant curve measurement mechanism comprises piezoelectric ceramic tube brace table and the Michelson interferometer of calculating the piezoelectric ceramic tube stroke, and it is characterized in that: described piezoelectric ceramic tube brace table is a universal stage.
2. piezoelectric ceramic tube retardant curve measurement mechanism according to claim 1, it is characterized in that: described universal stage is provided with rotation scale.
3. piezoelectric ceramic tube retardant curve measurement mechanism according to claim 2 is characterized in that: described Michelson interferometer is connected in the flexible end of tested piezoelectric ceramic tube by the structure of sliding contact.
4. piezoelectric ceramic tube retardant curve measurement mechanism according to claim 3, it is characterized in that: the structure of described sliding contact comprises sliding stand, sliding shoe and the sliding contact connecting link in the flexible end of piezoelectric ceramic tube, described sliding shoe is arranged in the chute of described sliding stand, the catoptron of the fixedly connected described Michelson interferometer of described sliding shoe one end, the other end is fixedly connected on described connecting link.
5. according to the described piezoelectric ceramic tube retardant curve of one of claim 1-4 measurement mechanism, it is characterized in that: described Michelson interferometer forms interference fringe by spectroscope, and the number of the photo-beat signal of described interference fringe is corresponding to the stroke of piezoelectric ceramic tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2003201219403U CN2660653Y (en) | 2003-11-19 | 2003-11-19 | Retarding curve measurer of piezoelectric ceramic tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2003201219403U CN2660653Y (en) | 2003-11-19 | 2003-11-19 | Retarding curve measurer of piezoelectric ceramic tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2660653Y true CN2660653Y (en) | 2004-12-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2003201219403U Expired - Fee Related CN2660653Y (en) | 2003-11-19 | 2003-11-19 | Retarding curve measurer of piezoelectric ceramic tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2660653Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105032786A (en) * | 2015-07-24 | 2015-11-11 | 上海师范大学 | Intelligent screening method for piezoelectric ceramic actuators |
| CN105092988A (en) * | 2015-09-17 | 2015-11-25 | 天津港东科技发展股份有限公司 | Experiment device for measuring piezoelectric ceramic scaling property |
| CN105092987A (en) * | 2015-09-17 | 2015-11-25 | 天津港东科技发展股份有限公司 | Optical detection device and method |
| CN108828341A (en) * | 2018-03-28 | 2018-11-16 | 江苏大学 | The detection device and calculation method of lagging characteristics under a kind of piezoelectric ceramics DC voltage |
-
2003
- 2003-11-19 CN CNU2003201219403U patent/CN2660653Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105032786A (en) * | 2015-07-24 | 2015-11-11 | 上海师范大学 | Intelligent screening method for piezoelectric ceramic actuators |
| CN105032786B (en) * | 2015-07-24 | 2017-06-20 | 上海师范大学 | A kind of intelligent screening method of piezoelectric ceramic actuator |
| CN105092988A (en) * | 2015-09-17 | 2015-11-25 | 天津港东科技发展股份有限公司 | Experiment device for measuring piezoelectric ceramic scaling property |
| CN105092987A (en) * | 2015-09-17 | 2015-11-25 | 天津港东科技发展股份有限公司 | Optical detection device and method |
| CN108828341A (en) * | 2018-03-28 | 2018-11-16 | 江苏大学 | The detection device and calculation method of lagging characteristics under a kind of piezoelectric ceramics DC voltage |
| CN108828341B (en) * | 2018-03-28 | 2020-06-09 | 江苏大学 | Detection device and calculation method for hysteresis characteristic of piezoelectric ceramic under direct-current voltage |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |