CN108828341B - Detection device and calculation method for hysteresis characteristic of piezoelectric ceramic under direct-current voltage - Google Patents

Detection device and calculation method for hysteresis characteristic of piezoelectric ceramic under direct-current voltage Download PDF

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CN108828341B
CN108828341B CN201810261804.5A CN201810261804A CN108828341B CN 108828341 B CN108828341 B CN 108828341B CN 201810261804 A CN201810261804 A CN 201810261804A CN 108828341 B CN108828341 B CN 108828341B
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张幼明
王树林
陈彩凤
薛振宇
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Abstract

The invention discloses a detection device and a calculation method for hysteresis characteristics of piezoelectric ceramics under direct-current voltage, and relates to the technical field of measurement, wherein the detection device comprises a digital display micrometer, a sensor, a direct-current driving power supply and a base; the piezoelectric ceramic and the sensor are fixed on the base; and the sensor interface is connected to the digital display micrometer; the positive electrode and the negative electrode of the direct current driving power supply are connected with the lead on the upper end face of the piezoelectric ceramic; the calculation method comprises the steps of firstly), welding leads on the front surface and the back surface of the piezoelectric ceramic with sintered silver electrodes; step two), fixing the piezoelectric ceramics welded with the wires in the step one) on a base, wherein the positive electrode of the piezoelectric ceramics faces upwards; step three), connecting a sensor interface into a channel of the digital display micrometer; step four), connecting a direct current driving power supply and debugging a detection device; step five), placing the debugged detection device in a quiet room; and step six) calculating the maximum hysteresis error and the instantaneous error by adopting the formula of the invention, and providing a reliable numerical basis for applying the piezoelectric ceramic to a driver.

Description

一种压电陶瓷直流电压下迟滞特性的检测装置及计算方法A detection device and calculation method for hysteresis characteristics of piezoelectric ceramics under DC voltage

技术领域technical field

本发明涉及测量技术领域，尤其涉及到一种压电陶瓷直流电压下迟滞特性的检测装置及计算方法。The invention relates to the technical field of measurement, in particular to a detection device and a calculation method for hysteresis characteristics of piezoelectric ceramics under DC voltage.

背景技术Background technique

微位移驱动装置是压电陶瓷应用的一个重要方面，迟滞特性一直是影响压电陶瓷驱动器精度的重要因素。迟滞特性是指压电陶瓷输出滞后于其输入，在电压-位移曲线图上，其主要体现是在同一个电压值下，下降曲线和上升曲线上的位移之间存在差值，差值的大小反应迟滞特性性能。Micro-displacement drives are an important aspect of piezoelectric ceramic applications, and hysteresis has always been an important factor affecting the accuracy of piezoelectric ceramic drives. The hysteresis characteristic means that the output of the piezoelectric ceramic lags behind its input. On the voltage-displacement curve, it is mainly reflected in the difference between the displacements on the falling curve and the rising curve under the same voltage value. Response hysteresis characteristic performance.

材料制备研究人员大都采用铁电测试仪测试S-E曲线，得到S-E蝴蝶应变曲线。但在实际应用中，由于迟滞机理复杂，压电陶瓷产生的实际位移与应变S-E曲线中的S并不相同。因此，铁电测试仪所测应变曲线无法准确预测迟滞，对于解决压电陶瓷驱动器的迟滞误差几乎不具有实践指导意义。Most of the researchers in material preparation use a ferroelectric tester to test the S-E curve to obtain the S-E butterfly strain curve. However, in practical applications, due to the complex hysteresis mechanism, the actual displacement generated by piezoelectric ceramics is not the same as S in the strain S-E curve. Therefore, the strain curve measured by the ferroelectric tester cannot accurately predict the hysteresis, and has little practical guiding significance for solving the hysteresis error of the piezoelectric ceramic driver.

目前，评价压电陶瓷迟滞特性都采用公式

Figure BDA0001610416880000011
进行计算，其中H是迟滞值，
Figure BDA0001610416880000012
是电场强度是最大电场强度一半时的降压和升压应变差，Smax是最大位移值。由于该公式中
Figure BDA0001610416880000013
并不一定是最大应变差，其只适合大概地描述压电陶瓷迟滞特性。当压电陶瓷应用于驱动器时，必须知道最大迟滞误差；当进行误差补偿时，必须知道瞬时误差。因此，该公式计算不能满足压电陶瓷在驱动器中的应用。At present, the hysteresis characteristics of piezoelectric ceramics are evaluated using the formula
Figure BDA0001610416880000011
Do the calculation, where H is the hysteresis value,
Figure BDA0001610416880000012
is the buck and boost strain difference when the electric field strength is half the maximum electric field strength, and S max is the maximum displacement value. Since this formula
Figure BDA0001610416880000013
It is not necessarily the maximum strain difference, which is only suitable for roughly describing the hysteresis characteristics of piezoelectric ceramics. When piezoelectric ceramics are used in a driver, the maximum hysteresis error must be known; when error compensation is performed, the instantaneous error must be known. Therefore, the calculation of this formula cannot satisfy the application of piezoelectric ceramics in the driver.

本发明采用检测装置对压电陶瓷迟滞特性进行测量，能够得到迟滞模型，直接用于驱动器的控制，所使用设备经济、简单，并且易于实施。The invention adopts the detection device to measure the hysteresis characteristic of the piezoelectric ceramics, and can obtain the hysteresis model, which can be directly used for the control of the driver, and the used equipment is economical, simple and easy to implement.

发明内容SUMMARY OF THE INVENTION

针对以上情况，本发明的目的在于提供一种压电陶瓷直流电压下迟滞特性的检测装置及计算方法，从而实现了压电陶瓷更好的应用于驱动器。In view of the above situation, the purpose of the present invention is to provide a detection device and a calculation method for the hysteresis characteristic of piezoelectric ceramics under DC voltage, so as to realize better application of piezoelectric ceramics to drivers.

本发明是通过如下技术方案得以实现的：The present invention is achieved through the following technical solutions:

一种压电陶瓷直流电压下迟滞特性的检测装置，包括数显测微仪、传感器、直流驱动电源和底座；所述压电陶瓷和传感器固定在底座上；并将传感器接口接到数显测微仪上；所述直流驱动电源的正极与压电陶瓷的上端面上的导线连接，负极与压电陶瓷的下端面上的导线连接。A detection device for hysteresis characteristics of piezoelectric ceramics under DC voltage, comprising a digital display micrometer, a sensor, a DC drive power supply and a base; the piezoelectric ceramics and the sensor are fixed on the base; the sensor interface is connected to the digital display measurement On the micrometer; the positive electrode of the DC drive power supply is connected to the wire on the upper end surface of the piezoelectric ceramic, and the negative electrode is connected to the wire on the lower end surface of the piezoelectric ceramic.

进一步的，所述压电陶瓷通过胶水与底座粘结在一起。Further, the piezoelectric ceramic is bonded with the base by glue.

进一步的，所述传感器通过万向节和磁力表座固定在底座上。Further, the sensor is fixed on the base through a universal joint and a magnetic meter seat.

基于一种压电陶瓷直流电压下迟滞特性的检测装置的计算方法，包括如下步骤：A calculation method based on a detection device for hysteresis characteristics of piezoelectric ceramics under DC voltage, comprising the following steps:

步骤一)将已经烧结银电极的压电陶瓷正面与反面均焊接上导线；Step 1) welding the front and back sides of the piezoelectric ceramics of the sintered silver electrodes with wires;

步骤二)将步骤一)中焊接好导线的压电陶瓷固定在底座上，正极朝上；Step 2) fixing the piezoelectric ceramic with the wire welded in step 1) on the base, with the positive pole facing upward;

步骤三)将传感器接口接入数显测微仪的通道；Step 3) Connect the sensor interface to the channel of the digital micrometer;

步骤四)连接直流驱动电源，调试检测装置；Step 4) Connect the DC drive power supply, and debug the detection device;

步骤五)将调试好的检测装置置于安静的室内，待传感器稳定后开始测试数据；手动调节直流驱动电源的电压上升，并记录对应位移数据作为升压位移Sr；待电压上升到压电陶瓷可承受最大值后，手动调节直流驱动电源的电压下降，并记录对应位移数据作为降压位移Sf；Step 5) place the debugged detection device in a quiet room, and start testing data after the sensor is stable; manually adjust the voltage rise of the DC drive power supply, and record the corresponding displacement data as the boost displacement S r ; wait for the voltage to rise to a piezoelectric After the ceramic can withstand the maximum value, manually adjust the voltage drop of the DC drive power supply, and record the corresponding displacement data as the step-down displacement S f ;

步骤六)对步骤五)中记录的位移数据进行分析，找到位移差值最大的位置，如果出现多处位移差值相同，取电压低处位置；将对应升压位移Sr和降压位移Smaxf的数据代入以下公式进行计算：Step 6) analyze the displacement data recorded in step 5), find the position with the largest displacement difference, if there are multiple places with the same displacement difference, take the position at the low voltage; the corresponding boost displacement S r and step down displacement S will be The data of maxf is substituted into the following formula for calculation:

Figure BDA0001610416880000021
Figure BDA0001610416880000021

其中，Hmax为最大迟滞；ΔDmax为最大应变差；Smaxf为降压位移Sf与升压位移Sr差值最大处的下降位移；该公式用来计算最大迟滞误差，对压电陶瓷制作的驱动器的误差进行评估；Among them, H max is the maximum hysteresis; ΔD max is the maximum strain difference; S maxf is the falling displacement where the difference between the step-down displacement S f and the step-up displacement S r is the largest; this formula is used to calculate the maximum hysteresis error. The error of the manufactured drive is evaluated;

Figure BDA0001610416880000022
Figure BDA0001610416880000022

其中，ΔD为任何位置应变差，Sf为对应降压位移；该公式用来计算瞬时误差，对由压电陶瓷制作的驱动器的误差进行补偿控制。Among them, ΔD is the strain difference at any position, and S f is the corresponding step-down displacement; this formula is used to calculate the instantaneous error, and to compensate and control the error of the driver made of piezoelectric ceramics.

进一步的，所述步骤四)中的直流驱动电源分辨率调至10v，将数显测微仪分辨率调至0.01μm。Further, in the step 4), the resolution of the DC drive power supply is adjusted to 10v, and the resolution of the digital micrometer is adjusted to 0.01 μm.

进一步的，所述数显测微仪的精度高于0.01μm。Further, the precision of the digital micrometer is higher than 0.01 μm.

进一步的，所述直流驱动电源的最大输出电压高于2000V，间隔小于10V。Further, the maximum output voltage of the DC drive power supply is higher than 2000V, and the interval is less than 10V.

进一步的，所述步骤六)中，ΔDmax＝Smaxf-Sr。Further, in the step 6), ΔD max =S maxf -S r .

有益效果：Beneficial effects:

1.采用数显测微仪与传感器组合装置测试压电陶瓷在直流电压下位移数据，接近压电陶瓷应用真实环境，所得数据对压电陶瓷应用更具实践指导意义。1. The digital micrometer and sensor combination device is used to test the displacement data of piezoelectric ceramics under DC voltage, which is close to the real application environment of piezoelectric ceramics, and the obtained data has more practical guiding significance for the application of piezoelectric ceramics.

2.为防止外界环境带来干扰，将样品和传感器固定在同一底座，使得在外界环境有振动时，样品和传感器随着底座一起振动，保持三者之间相对位移为0。2. In order to prevent interference from the external environment, fix the sample and the sensor on the same base, so that when there is vibration in the external environment, the sample and the sensor vibrate together with the base, keeping the relative displacement between the three at 0.

附图说明Description of drawings

图1为本发明涉及的压电陶瓷直流电压下迟滞特性的检测装置。FIG. 1 is a device for detecting hysteresis characteristics of piezoelectric ceramics according to the present invention under DC voltage.

具体实施方式Detailed ways

下面结合附图和具体实施实例，对本发明的具体实施方式作详细说明。The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings and specific implementation examples.

结合附图1，本发明中采用502胶水和磁力表座分别将压电陶瓷片和传感器固定在一方形钢块底座上进行测量，并以此数据为基础进行回归，得出迟滞特性图，使得其迟滞特性更为直观而且准确。为压电陶瓷应用于驱动器提供可靠的数值依据。操作步骤为：In conjunction with accompanying drawing 1, in the present invention, 502 glue and a magnetic meter base are used to fix the piezoelectric ceramic sheet and the sensor on a square steel block base respectively for measurement, and perform regression based on this data to obtain a hysteresis characteristic diagram, so that Its hysteresis characteristic is more intuitive and accurate. It provides a reliable numerical basis for piezoelectric ceramics to be used in drivers. The operation steps are:

步骤一)将已经烧结银电极的压电陶瓷正反面焊上导线；。Step 1) Weld wires on the front and back sides of the piezoelectric ceramics that have sintered silver electrodes;

步骤二)将焊好导线的压电陶瓷固定在底座上，注意正极朝上；Step 2) Fix the piezoelectric ceramic with the welded wire on the base, pay attention to the positive pole facing up;

步骤三)将传感器通过万向节和磁力表座固定在底座上；并将传感器接口接Step 3) Fix the sensor on the base through the universal joint and the magnetic meter seat; connect the sensor interface to the base;

入测试仪器相关通道；into the relevant channel of the test instrument;

步骤四)连接直流驱动电源，调试装置。将直流驱动电源分辨率调至10v，测试仪器分辨率调至0.01μm。Step 4) Connect the DC drive power supply and debug the device. Adjust the resolution of the DC drive power supply to 10v, and the resolution of the test instrument to 0.01μm.

步骤五)将调试好的检测装置置于安静的室内，待传感器稳定后开始测试数据；手动调节直流驱动电源的电压上升，并记录对应位移数据作为升压位移Sr；待电压上升到压电陶瓷可承受最大值后，手动调节直流驱动电源的电压下降，并记录对应位移数据作为降压位移Sf；Step 5) place the debugged detection device in a quiet room, and start testing data after the sensor is stable; manually adjust the voltage rise of the DC drive power supply, and record the corresponding displacement data as the boost displacement S r ; wait for the voltage to rise to a piezoelectric After the ceramic can withstand the maximum value, manually adjust the voltage drop of the DC drive power supply, and record the corresponding displacement data as the step-down displacement S f ;

传统上都采用公式

Figure BDA0001610416880000031
计算压电陶瓷迟滞误差，其是对平均误差的评估，但在驱动器应用中，往往需要控制最大误差。formulae
Figure BDA0001610416880000031
Calculate piezo hysteresis error, which is an estimate of the average error, but in driver applications, it is often necessary to control the maximum error.

本发明采用公式

Figure BDA0001610416880000041
计算最大误差，其中Hmax是最大迟滞。ΔDmax是最大应变差(如果出现应变差相同，取电压较低处相关数据计算)，Smaxf为出现最大应变差处对应位移。该公式可对驱动器最大误差进行评估。而且此公式可修正为
Figure BDA0001610416880000042
计算瞬时误差，其中ΔD为任何位置应变差，Sf为对应降压位移。可用于驱动器的瞬时误差补偿控制。The present invention adopts the formula
Figure BDA0001610416880000041
Calculate the maximum error, where H max is the maximum hysteresis. ΔD max is the maximum strain difference (if the strain difference is the same, take the relevant data at the lower voltage for calculation), and S maxf is the corresponding displacement at the maximum strain difference. This formula provides an estimate of the drive's maximum error. And this formula can be modified as
Figure BDA0001610416880000042
Calculate the instantaneous error, where ΔD is the strain difference at any position and S f is the corresponding buck displacement. It can be used for instantaneous error compensation control of the drive.

实施例Example

将已经烧结银电极的压电陶瓷样品1正反面焊上导线。将焊好导线的压电陶瓷固定在底座上。注意正极朝上。将传感器通过磁力表座固定在底座上。并将传感器接口接入数显测试仪相关通道，连接直流驱动电源，调试装置。将直流驱动电源分辨率调至10v，数显测试仪分辨率调至0.01μm。将调试好的设备置于较为安静室内，待传感器稳定后开始测试数据。手动调节电压，从0V-1800V逐渐增加电压，每隔100V记录一个位移数据；所得数据填在表1中实施实例升压位移对应位置。从1800V-0V逐渐降低电压，每隔100V记录一个位移数据。所得数据填在表1中实施实例降压位移对应位置。The front and back sides of the piezoelectric ceramic sample 1 with sintered silver electrodes were welded with wires. Fix the piezoelectric ceramic with the welded wire on the base. Note that the positive side is facing up. Fix the sensor on the base with the magnetic base. Connect the sensor interface to the relevant channel of the digital display tester, connect the DC drive power supply, and debug the device. Adjust the resolution of the DC drive power supply to 10v, and the resolution of the digital display tester to 0.01μm. Place the debugged device in a relatively quiet room, and start testing data after the sensor is stable. Manually adjust the voltage, gradually increase the voltage from 0V-1800V, and record a displacement data every 100V; The voltage is gradually decreased from 1800V-0V, and displacement data is recorded every 100V. The obtained data is filled in the corresponding position of the decompression displacement of the implementation example in Table 1.

表1 0-1800v直流电压电源位移关系表Table 1 0-1800v DC voltage power supply displacement relationship table

Figure BDA0001610416880000043
Figure BDA0001610416880000043

从表1可见，最大位移差值首先出现在电压为700v处，ΔDmax＝0.04，Smaxf＝0.12根据公式

Figure BDA0001610416880000044
It can be seen from Table 1 that the maximum displacement difference first appears at the voltage of 700v, ΔD max = 0.04, S maxf = 0.12 according to the formula
Figure BDA0001610416880000044

所述实施例为本发明的优选的实施方式，但本发明并不限于上述实施方式，在不背离本发明的实质内容的情况下，本领域技术人员能够做出的任何显而易见的改进、替换或变型均属于本发明的保护范围。The embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above-mentioned embodiments, and any obvious improvement, replacement or Modifications all belong to the protection scope of the present invention.

Claims (8)

1.一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，包括如下步骤：1. a calculation method of hysteresis characteristic under a piezoelectric ceramic DC voltage, is characterized in that, comprises the steps: 步骤一)将已经烧结银电极的压电陶瓷正面与反面均焊接上导线；Step 1) welding the front and back sides of the piezoelectric ceramics of the sintered silver electrodes with wires; 步骤二)将步骤一)中焊接好导线的压电陶瓷固定在底座上，正极朝上；Step 2) fixing the piezoelectric ceramic with the wire welded in step 1) on the base, with the positive pole facing upward; 步骤三)将传感器接口接入数显测微仪的通道；Step 3) Connect the sensor interface to the channel of the digital micrometer; 步骤四)连接直流驱动电源，调试检测装置；Step 4) Connect the DC drive power supply, and debug the detection device; 步骤五)将调试好的检测装置置于安静的室内，待传感器稳定后开始测试数据；手动调节直流驱动电源的电压上升，并记录对应位移数据作为升压位移Sr；待电压上升到压电陶瓷可承受最大值后，手动调节直流驱动电源的电压下降，并记录对应位移数据作为降压位移Sf；Step 5) place the debugged detection device in a quiet room, and start testing data after the sensor is stable; manually adjust the voltage rise of the DC drive power supply, and record the corresponding displacement data as the boost displacement S r ; wait for the voltage to rise to a piezoelectric After the ceramic can withstand the maximum value, manually adjust the voltage drop of the DC drive power supply, and record the corresponding displacement data as the step-down displacement S f ; 步骤六)将步骤五)中记录的对应升压位移Sr的最大降压位移Smaxf的数据代入以下公式进行计算：Step 6) Substitute the data of the maximum step-down displacement S maxf corresponding to the boost displacement S r recorded in the step 5) into the following formula for calculation:
Figure FDA0002393882070000011
Figure FDA0002393882070000011
 其中，Hmax为最大迟滞；ΔDmax为最大应变差；Smaxf为降压位移Sf与升压位移Sr差值最大处的电压下降时的位移；该公式用来计算最大误差，对压电陶瓷制作的驱动器的误差进行评估；Among them, H max is the maximum hysteresis; ΔD max is the maximum strain difference; S maxf is the displacement when the voltage drops at the maximum difference between the step-down displacement S f and the step-up displacement S r ; this formula is used to calculate the maximum error, the The error of the driver made of electric ceramics is evaluated;
Figure FDA0002393882070000012
Figure FDA0002393882070000012
 其中，ΔD为任何位置应变差，Sf为对应降压位移；该公式用来计算瞬时误差，对由压电陶瓷制作的驱动器的瞬时误差进行补偿控制。Among them, ΔD is the strain difference at any position, and S f is the corresponding step-down displacement; this formula is used to calculate the instantaneous error, and to compensate and control the instantaneous error of the driver made of piezoelectric ceramics. 2.根据权利要求1中所述的一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，所述步骤四)中的直流驱动电源分辨率调至10v，将数显测微仪分辨率调至0.01μm。2. according to the calculation method of hysteresis characteristic under a kind of piezoelectric ceramic DC voltage described in claim 1, it is characterized in that, the DC drive power resolution in described step 4) is adjusted to 10v, and the digital micrometer is The resolution was adjusted to 0.01 μm. 3.根据权利要求1中所述的一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，所述数显测微仪的精度高于0.01μm。3 . The method for calculating the hysteresis characteristic of piezoelectric ceramics under DC voltage according to claim 1 , wherein the precision of the digital micrometer is higher than 0.01 μm. 4 . 4.根据权利要求1中所述的一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，所述直流驱动电源的最大输出电压高于2000V，间隔小于10V。4 . The method for calculating hysteresis characteristics of piezoelectric ceramics under DC voltage according to claim 1 , wherein the maximum output voltage of the DC drive power supply is higher than 2000V, and the interval is less than 10V. 5 . 5.根据权利要求1中所述的一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，所述步骤六)中，ΔDmax＝Smaxf-Sr。5 . The method for calculating hysteresis characteristics of piezoelectric ceramics under DC voltage according to claim 1 , wherein, in the step 6), ΔD max =S maxf -S r . 6 . 6.根据权利要求1中所述的一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，计算方法采用的检测装置包括数显测微仪、传感器、直流驱动电源和底座；所述压电陶瓷和传感器固定在底座上；并将传感器接口接到数显测微仪上；所述直流驱动电源的正极与压电陶瓷的上端面上的导线连接，负极与压电陶瓷的下端面上的导线连接。6. The calculation method of hysteresis characteristic under a kind of piezoelectric ceramics DC voltage according to claim 1, is characterized in that, the detection device that the calculation method adopts comprises digital micrometer, sensor, DC drive power and base; The piezoelectric ceramic and the sensor are fixed on the base; the sensor interface is connected to the digital micrometer; the positive electrode of the DC drive power supply is connected to the wire on the upper end surface of the piezoelectric ceramic, and the negative electrode is connected to the lower end of the piezoelectric ceramic. Wire connections on the end face. 7.根据权利要求6所述的一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，所述压电陶瓷通过胶水与底座粘结在一起。7 . The method for calculating the hysteresis characteristic of piezoelectric ceramics under DC voltage according to claim 6 , wherein the piezoelectric ceramics are bonded to the base by glue. 8 . 8.根据权利要求6所述的一种压电陶瓷直流电压下迟滞特性的计算方法，其特征在于，所述传感器通过万向节和磁力表座固定在底座上。8 . The method for calculating hysteresis characteristics of piezoelectric ceramics under DC voltage according to claim 6 , wherein the sensor is fixed on the base through a universal joint and a magnetic meter base. 9 .
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