1239385 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種穿透式光柵量測旋轉軸誤差之裝置，特 別是指一種利用繞射光量測計算旋轉軸角度傾斜量和旋轉軸 之轉動軌跡之量測裝置。 【先前技術】 數控工具機是國内製造業最普遍的應用機具，然而在最近 這裡年產業界和學術界相繼投入研究下，數值工具機的發展已_ 、左有了很大的犬破，因愈來愈講求的精密度，已經從基本的陽 春型轉為精密導向的機型，而控制器的發展也愈來愈進步。而 現在產業的趨勢為3D方向及奈米技術。故數控工具機除了功 能之外，相對的精確度的優劣也是決定工具機好壞的重要指 標。 而在檢測旋轉軸量測儀器上，大部分的量測儀器如量錶、 LVDT等，為接觸式量測，對待測物13產生較大的干擾，因此· 誤差多較不精確，而非接觸的儀器如雷射干涉儀、三角雷射、 渦電流及電容式移位計等，就需多組探頭量測才可量出旋轉軸 的旋轉位置和傾斜角度，不能使用較簡單的架構來量測旋轉 軸，而且多組設備誤差就越多，成本越高，而且使用上述儀器， 一定要用標準圓棒之配合使用，而這些標準圓棒（球）之不確 定度（uncertainty)有一定的極限，且難以持續保養、難以 1239385 架设，因此右此發展一套使用較少設備、低成本、高精度且多 自由度的旋轉軸量測系統，有助於精密量測以及更易達到精確 控制要求。 在目前的量測技術中，對圓度誤差的測量有迴轉軸法、三 點法、兩點法及投影法等，其離合器之種類分別如後所述·· (1)迴轉軸法：利用精密軸系中的軸迴轉一周所形成的圓軌 跡（理想圓）與被測圓比較，兩圓半徑上的差值由長度傳感器i i (如LVDT、渦電流探頭等··）轉換為電信號，經電腦訊號處理 後由顯示儀錶指示出圓度誤差，或由記錄器記錄出待測物i 3 圓輪廓圖形。請參閱圖一、圖二，其迴轉軸法有傳感器迴轉和 工作台迴轉兩種測量形式，前者適用於高精度圓度測量，後者 常用於測量小型工件。 (2 )二點法：請參閱圖三，為使用三點法測量真圓度，係常 將待測物13置於V形塊中進行測量。測量時，使待測物1 3在 V形塊中迴轉一周，從測量儀器12(測微儀）讀出最大示值和最 小示值，兩示值差之半即為被測工件外圓的圓度誤差。此法未 考慮形狀不均勻分佈之凸形工件之量測，因此誤差甚大。 (3) 兩點法：係以被測圓某一截面上各直徑間最大差值之半 作為此截面的圓度誤差。 (4) 投影法：將待測物13被測圓的輪廓影像與緣製在投影 屏上的兩極限圓14(請參閱圖四）比較，從而得到待測物13的 1239385 圓度誤差。 :用-種使用雷射二極體及四象儀檢測旋轉軸誤差之方 構成=我國公告第517150號專利案（下稱引證案），其主要 =為·係將雷射光源放置在任何旋轉軸上進行主軸旋 ^測旋轉軸誤差，其特徵：將雷射_極俨山Λ γ _ 體甘欠入旋轉軸♦，而 四象儀放置於相對的另一端平台上，亦或顧倒；而其構成上之 =缺點為：⑽讀，⑵⑻個職 、、3)渴電流單價太高，使之在接收的m要付出不少 的成本’⑷該渦電流探頭必須要架設在工具機旋轉軸的兩 旁，：架設時需非常接近旋轉軸，當旋轉軸在高速轉動的時 候’右有產生报大的偏心，極有可能會損壞到渦電流探頭。 ▲由此可見，上述習用物品仍有諸多缺失，實非一良善之設 計者，而亟待加以改良。 本案發月人鏗於上遠習用量測旋轉軸誤差裝置所衍生的 各項缺點’乃μ加以改良創新，並經多年苦心孤詣潛心研究 後、、、、於成功研發凡成纟件一種穿透式光拇量測旋轉輛誤差之 裝置。 【發明目的】 本發明之目的即在於提供一種穿透式光柵量測旋轉軸誤差 之裝置，能檢測旋轉軸的誤差，在運用場合上，不因銑床或車 床的單一限制，也能運用在較高階高轉速的工具機上面。 1239385 本發明之次一目的係在於提供一簡易夹置具將光源架設在 旋轉軸時’就算旋轉軸的偏心量再大，也不回損害任何量測裝 置’透過懸空在光栅兩端的四象儀去接收，即可達到量測多自 由度的一裝置。 本發明之另一目的係在於提供一種穿透式光柵量測旋轉 軸誤差之裝置，不但可量測到X方向及γ方向的誤差之外，還 可以量測到朝X方向及γ方向的偏搖度誤差。 【發明内容】 可達成上述發明目的之一種穿透式光栅量測旋轉軸誤差之 裝置，包括有： 一雷射二極體，係提供雷射光束入射至後述之穿透式光栅； 一穿透式光柵，係爲接收雷射光束後，使該光束能穿透光 栅以產生零階繞射光、正一階繞射光及負一階繞射光；以及 二雷射四象儀，係接收繞射光的位置變化，以產生電壓改 變量。 【實施方式】 / 1圖’、七，本發明所提供之一種穿透式光栅量測旋 轉轴誤差之裝置，主要包括有：-雷射二極體2卜-穿透式光 柵22以及三雷射四象儀。 為更詳盡說明本發明「請再參閱圖六、七」為本發明穿透 式光柵里測系統之架構圖，本發明係主要利用—雷射二極體以 1239385 之留射光束或可見光、微波、紅外光、紫外光及X射線入射至 穿透式光柵22，該雷射二極體21係固定於主軸，雷射二極體 21發出的光束可為單頻雷射光、雙頻雷射光及線性調頻半導體 雷射光’其光束會入射至垂直位置上的穿透式光栅22上，平 >ί亍光束由牙透式光拇22的作用被分成三道光束，為繞射的零 階繞射光、正一階繞射光及負一階繞射光，雷射四象儀a23接 收零階繞射光，測量出旋轉軸移動之軌跡，雷射四象儀b241、 雷射四象儀c242接收正、負一階繞射光，若旋轉軸有沿χγ方鲁 向的移動，即產生偏角6> X與0 y，則正、負一階繞射光的光點 沿雷射四象儀b241、雷射四象儀C242表面移動，將四象儀 b241、雷射四象儀c242輸出的位移移動量換算成角度，即可 求出0x與（9y，進而推出旋轉軸之誤差。 當Z軸旋轉時，由雷射四象儀a23接收零階繞射光，則四 象儀b241、雷射四象儀c242接收正一階繞射光與負一階繞射 光’且由雷射四象儀a23接收零階繞射光產生電壓變化經類比 ® /數位轉換卡（A/D卡）轉成數位訊號傳至電腦，使電腦得到旋 轉軸沿X、Y方向的平面位移誤差△ x與△ y，若旋轉軸有沿χγ 向移動’即產生偏角（9 X與0 y ;另正一階繞射光與負一階繞射 光會沿著四象儀b241與雷射四象儀c242的表面移動，使四象 儀b241、雷射四象儀C242能接收正一階繞射光與負一階繞射 光’以產生電壓變化經類比/數位轉換卡（A/D卡）轉成數位訊 1239385 唬傳至電腦以得知在四象儀b241與雷射四象儀c242的位移移 動量，再將四象儀b241與雷射四象儀c242輸出的位移移動量 換算成角度’即可求出θ X與Θ y，得到X、γ、z三軸的角度 定位誤差。 本發明需使用各項光學組件，現就各項組件加以說明： 1、雷射二極體21 (Laser Diode)，與一般的雷射一樣， 該光束具有高度的指向性與同調性，但是卻具有更小的體積與 更大的效率。 2、光柵（])iffraction Grating):光栅有反射式、穿透 式兩種，主要功能是讓光源經過光柵產生繞射現象，當雷射光 入射光柵時，若光柵有所變動時，繞射光隨之產生 移，繞射光栅的Doppler頻移與光柵的移動速度及繞射階數成 正比、與光栅常數成反比，而與入射光的波長與入射方向無關。 3 ㈣射四象儀（2D Position Sensor Detector):係接 收光的位置變化，產生電壓改變量，藉類比/數位轉換卡（A/D 卡）轉成數位訊號傳至電腦，藉此獲得位置變化。 【特點及功效】 本發明以雷射二極體搭配穿透式光柵利用光波繞射原理， 將入射光束藉由穿透式光栅的作用被分成三道光束，而量測到 x方向及γ方向的誤差之外，還可以量測的到朝X方向及γ方 向的偏搖度誤差，實在可視為量測技術上的一大突破，也可較 1239385 一般量測技術還精確且更細微。 上列詳細況明係針對本發明之一可行實施例之具體說明， 惟該實施例並㈣以限制本發明之專㈣圍，凡未脫離本發明 技藝精神所為之等效實施或變更，均應包含於本案之專利範圍 中。 【圖式簡單說明】 及其附 有關該 月，閱以下有關本發明一較佳實施例之詳細說明 :，將可進-步瞭解本發明之技術内容及其目的功效； 實施例之附圖為： 圖為習用肖測物迴轉量測圓度誤差之示意圖； 圖-為習用傳感器迴轉量測圓度誤差之示意圖； 圖三為習用三點法測量真圓度之示意圖； 圖四為I用投影法測量真圓度之示意圖； "為本發明於量測旋轉軸時之六個誤差示意圖；以及 w 、七為穿透式光栅量測系統之架構圖。 要部分代表符號】 11長度傳感器 12測量儀器 13待測物 14極限圓 1239385 (5 X沿著X軸向的位移誤差 (5 y沿著y軸向的位移誤差 5 z沿著z軸向的位移誤差 ε X沿著X軸向的旋轉誤差 ε y沿著y軸向的旋轉誤差 ε z沿著z軸向的旋轉誤差 21雷射二極體 22穿透式光柵 23雷射四象儀a 241雷射四象儀b 242雷射四象儀c1239385 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a device for measuring the rotation axis error of a penetrating grating, and particularly to a method for calculating the angle of rotation axis rotation and the rotation of the rotation axis using diffraction light measurement. Track measuring device. [Previous technology] NC machine tools are the most common application tools in the domestic manufacturing industry. However, in the recent years, the industry and academia have invested in research, and the development of numerical machine tools has been very difficult. Due to the increasingly demanding precision, the basic Yangchun model has been switched to a precision-oriented model, and the development of the controller has been more and more advanced. The current industry trends are 3D and nanotechnology. Therefore, in addition to the functions of CNC machine tools, the relative accuracy is also an important index that determines the quality of the machine tool. On the rotating shaft measuring instruments, most of the measuring instruments, such as scales and LVDTs, are contact-type measurements, which cause greater interference with the measured object 13. Therefore, the errors are more inaccurate, rather than contact. Instruments, such as laser interferometers, triangle lasers, eddy currents, and capacitive shift meters, require multiple sets of probes to measure the rotation position and tilt angle of the rotation axis. You cannot use a simpler structure to measure Measuring the rotation axis, and the more errors of multiple sets of equipment, the higher the cost, and the use of the above instruments must be used with standard round rods, and the uncertainty of these standard round rods (balls) has a certain degree of uncertainty. Extreme, and it is difficult to maintain and maintain 1239385. Therefore, the development of a rotating axis measurement system with less equipment, low cost, high precision and multiple degrees of freedom is helpful for precise measurement and easier to achieve precise control requirements. . In the current measurement technology, the measurement of roundness error includes the rotary shaft method, three-point method, two-point method, and projection method. The types of clutches are described below. (1) Rotary shaft method: use The circle trajectory (ideal circle) formed by one revolution of the shaft in the precision shafting system is compared with the measured circle. The difference in the radius of the two circles is converted into an electrical signal by the length sensor ii (such as LVDT, eddy current probe, etc.). After processing by the computer signal, the roundness error is indicated by the display instrument, or the i 3 circular contour of the object to be measured is recorded by the recorder. Please refer to Figure 1 and Figure 2. The rotary axis method has two types of measurement: sensor rotation and table rotation. The former is suitable for high-precision roundness measurement, and the latter is often used for measuring small workpieces. (2) Two-point method: Please refer to Figure 3. To use the three-point method to measure true roundness, the test object 13 is often placed in a V-shaped block for measurement. During the measurement, make the object to be measured rotate in the V-shaped block once, and read the maximum and minimum indication values from the measuring instrument 12 (micrometer). The difference between the two indication values is the outer circle of the measured workpiece. Roundness error. This method does not consider the measurement of convex workpieces with uneven shapes, so the error is very large. (3) Two-point method: The half of the maximum difference between the diameters on a section of the measured circle is taken as the roundness error of the section. (4) Projection method: Compare the contour image of the measured circle of the measured object 13 with the two limit circles 14 (see Figure 4) defined on the projection screen, so as to obtain the 1239385 roundness error of the measured object 13. : Using-a method of detecting the error of the rotation axis using a laser diode and a four imager = China Announcement No. 517150 patent case (hereinafter referred to as the citation case), its main = is to place the laser light source in any rotation The main shaft is rotated on the axis to measure the error of the rotation axis, which is characterized in that the laser _ pole 俨 Λ γ _ body is owed into the rotation axis ♦, and the four imager is placed on the opposite platform, or it may be down; The disadvantages of its composition are: read, read, post, and 3) the unit price of thirsty current is too high, so that it will pay a lot of cost in receiving m '⑷ the eddy current probe must be set up on a machine tool to rotate On both sides of the shaft, it must be very close to the rotating shaft when it is erected. When the rotating shaft rotates at high speed, there will be a large eccentricity on the right side, which may damage the eddy current probe. ▲ It can be seen that there are still many shortcomings in the above-mentioned custom items, and they are not a good designer, and they need to be improved. The people in this case were accustomed to the various shortcomings derived from the measurement of the rotating shaft error device by Shangyuan. They were improved and innovated, and after years of painstaking and meticulous research, they successfully developed a penetrating piece of Fancheng. A device for measuring the error of a rotating car with a light thumb. [Objective of the Invention] The purpose of the present invention is to provide a penetrating grating measuring device for measuring the error of a rotating shaft, which can detect the error of the rotating shaft. High order high speed machine tool. 1239385 The second purpose of the present invention is to provide a simple clamping device for arranging a light source on a rotating shaft. "Even if the eccentricity of the rotating shaft is large, it will not damage any measuring device." To receive, you can reach a device that measures multiple degrees of freedom. Another object of the present invention is to provide a device for measuring the rotation axis error of a penetrating grating, which can not only measure errors in the X direction and the γ direction, but also measure deviations in the X direction and the γ direction. Shake error. [Summary of the Invention] A device for measuring the rotation axis error of a penetrating grating that can achieve the above-mentioned object of the invention includes: a laser diode, which provides a laser beam incident on a penetrating grating described later; a penetrating Type grating, which is to receive the laser beam, so that the beam can penetrate the grating to produce zero-order diffraction light, positive first-order diffraction light and negative first-order diffraction light; and two laser four-imager, which receives the diffraction light. The position changes to produce the amount of voltage change. [Embodiment] / Fig. 1 and 7. A device for measuring the rotation axis error of a penetrating grating provided by the present invention mainly includes:-a laser diode 2b-a penetrating grating 22 and three lasers Shoot four images. For a more detailed explanation of the present invention "please refer to Figs. 6 and 7" again, this is the architecture diagram of the penetrating grating in-measurement system of the present invention. The present invention is mainly used-the laser diode uses the remaining beam of 1239385 or visible light and microwave. , Infrared light, ultraviolet light and X-ray are incident on the transmission grating 22, the laser diode 21 is fixed on the main shaft, and the light beam emitted by the laser diode 21 can be single-frequency laser light, dual-frequency laser light and The chirped semiconductor laser light 'beam will be incident on the transmissive grating 22 in a vertical position, and the flat beam will be divided into three beams by the action of the transmissive optical thumb 22, which is a zero-order diffraction of diffraction Laser light, positive first-order diffraction light, and negative first-order diffraction light. Laser four-imager a23 receives zero-order diffraction light and measures the trajectory of the rotation axis. Laser four-imager b241 and laser four-imager c242 receive positive, For negative first-order diffracted light, if the rotation axis moves in the χγ direction, that is, the deflection angles 6 > X and 0 y are generated, then the light points of the positive and negative first-order diffracted light follow the laser four imager b241, laser The surface of the four imager C242 is moved, and the output position of the four imager b241 and the laser four imager c242 When the amount of movement is converted into an angle, the error between 0x and (9y, and then the rotation axis can be calculated. When the Z axis rotates, the fourth-order laser imager a23 receives the zero-order diffraction light, and the four-imager b241 and the laser four Imager c242 receives positive first-order diffracted light and negative first-order diffracted light ', and the four-image laser a23 receives zero-order diffracted light to generate a voltage change, which is converted to digital signal by analogy / digital conversion card (A / D card) Go to the computer and make the computer get the plane displacement errors △ x and △ y of the rotation axis along the X and Y directions. If the rotation axis moves in the χγ direction ', a deflection angle (9 X and 0 y; another positive order diffraction light and Negative first-order diffracted light will move along the surface of four-imager b241 and laser four-imager c242, so that four-imager b241 and laser four-imager C242 can receive positive first-order diffracted light and negative first-order diffracted light. The generated voltage change is converted into digital information by analog / digital conversion card (A / D card) 1239385 and transmitted to the computer to learn the displacement of the four-imager b241 and the laser four-imager c242, and then the four-imager b241 It can be converted to the angle 'from the displacement of the laser four-imager c242, and θ X and θ y can be obtained. X, The angular positioning errors of the three axes of γ and z. The present invention requires the use of various optical components, and the components will now be described: 1. Laser diode 21, which is the same as a general laser. High degree of directivity and coherence, but it has smaller volume and greater efficiency. 2. Grating (]) iffraction Grating): There are two types of grating: reflective and transmissive. The main function is to let the light source pass through the grating to generate Diffraction phenomenon. When the laser light enters the grating, if the grating changes, the diffraction light will move accordingly. The Doppler frequency shift of the diffraction grating is proportional to the moving speed of the grating and the diffraction order, and is inversely proportional to the grating constant. , And has nothing to do with the wavelength of incident light and the direction of incidence. 3 2D Position Sensor Detector: The position change of the received light generates a voltage change amount. The analog / digital conversion card (A / D card) is converted into a digital signal and transmitted to the computer to obtain the position change. . [Features and effects] The present invention uses a laser diode with a transmissive grating to utilize the principle of light diffraction. The incident beam is divided into three beams by the action of the transmissive grating, and the x and γ directions are measured. In addition to the errors, you can also measure the yaw error in the X and γ directions. It can be regarded as a breakthrough in measurement technology, and it can also be more accurate and more detailed than the general measurement technology of 1239385. The above detailed description is specifically a description of a feasible embodiment of the present invention, but this embodiment is not intended to limit the scope of the present invention. Any equivalent implementation or change that does not depart from the technical spirit of the present invention should be It is included in the patent scope of this case. [Brief description of the drawings] and its related month, please read the following detailed description of a preferred embodiment of the present invention: you will further understand the technical content of the present invention and its purpose and effect; the drawings of the embodiment are: : The picture is a schematic diagram of the roundness error of the conventional Xiao measurement object rotation measurement; Figure-is the schematic diagram of the roundness error of the conventional sensor rotation measurement; Fig. 3 is a schematic diagram of the true three-point method for measuring true roundness; Fig. 4 is a projection for I Schematic diagram of measuring the roundness of the method; " Six schematic diagrams of the error when measuring the rotation axis of the present invention; and w, VII are the structural diagrams of the penetrating grating measuring system. The main part of the symbol] 11 length sensor 12 measuring instrument 13 test object 14 limit circle 1239385 (5 X displacement error along the X axis (5 y displacement error along the y axis 5 z displacement along the z axis Error ε X Rotation error along the X axis ε Rotation error along the y axis ε Rotation error along the z axis 21 Laser diode 22 Penetrating grating 23 Laser four imager a 241 Four Laser Imager b 242 Four Laser Imager c