CN107238353B - A kind of rotation angle measuring method based on primary standard of curved surface part - Google Patents

A kind of rotation angle measuring method based on primary standard of curved surface part Download PDF

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CN107238353B
CN107238353B CN201710398102.7A CN201710398102A CN107238353B CN 107238353 B CN107238353 B CN 107238353B CN 201710398102 A CN201710398102 A CN 201710398102A CN 107238353 B CN107238353 B CN 107238353B
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curved surface
measurement point
optical
measuring head
primary standard
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CN107238353A (en
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李杏华
张震楠
房丰洲
黄银国
黄武
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Tianjin University
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Tianjin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a kind of rotation angle measuring methods based on primary standard of curved surface part, differential optical gauge head is installed on Z axis, primary standard of curved surface part is fixed in the rotary shaft parallel or coaxial with Z axis, the differential optical gauge head is located at the top of the primary standard of curved surface part, the differential optical gauge head is set there are two the identical optical measuring head of structure, curved surface I corresponding with two optical measuring heads and curved surface II are equipped on the primary standard of curved surface part, rotary shaft rotation drives primary standard of curved surface part from initial position AIIt is rotated in place AIIPlace, measurement point on two curved surfaces is subjected to displacement, the measurement of rotation angle is realized by the corresponding relationship between the displacement and rotation angle of measurement point, positioning to primary standard of curved surface part rotary shaft is avoided using the method that double optics gauge head is combined into difference gauge head, the rotation angle of rotary shaft can be obtained using this method, it is high-efficient, precision is high, it is at low cost, it is easy to operate, new method is provided for the rotation angle detection of rotary axis of machine tool.

Description

A kind of rotation angle measuring method based on primary standard of curved surface part
Technical field
The present invention relates to a kind of rotation angle measuring methods, more particularly to a kind of rotation angular measurement based on primary standard of curved surface part Method.
Background technique
There are laser interferometer and ball bar using relatively broad machine tool error detecting instrument at present, since itself detection is former Factor in reason, there are respective deficiencies in the error-detecting for being applied to multi-axis NC Machine Tools for these instruments: such as laser interference Instrument adjustment is complicated, and one-shot measurement can only obtain a parameter, high operation requirements, it is difficult to realize and automate, is rapid, and price Valuableness, general enterprises do not have;Ball bar can not arbitrarily planning survey path, be rotary shaft error identification measuring process design Difficulty is increased with theory decoupling algorithm research, and ball bar carries out contact type measurement with magnet base cooperation precision ball, needs Movement is difficult to adapt to rapid trend under low speed to guarantee measurement accuracy.
For the processing of complicated abnormal shape part, multiaxis NC maching technology is obtained by its flexible, efficient, high-precision feature It is widely applied and promotes, for the needs for meeting regular precision calibration, efficient machine tool error detection just becomes with discrimination method Urgent problem to be solved.
The geometric error detection project of multi-axis NC Machine Tools mainly includes the angular error, position error, straightness of each axis Error, error of perpendicularity etc., wherein the rotation angle error in angular error is to be most difficult to the parameter of measurement.At present both at home and abroad to machinery The detection of the rotation angle error of guide rail rotary shaft is also in a kind of research and exploratory stage.It is missed to detect the rotation angle of rotary shaft Difference, it is therefore desirable to propose more rotation angle measuring methods.
Summary of the invention
The present invention is to solve technical problem present in well-known technique and provide a kind of rotation angle based on primary standard of curved surface part Measurement method can measure the rotation angle of rotary shaft using this method.
The technical scheme adopted by the present invention to solve the technical problems existing in the known art is that a kind of be based on curved surface base The rotation angle measuring method of quasi- part is installed differential optical gauge head on Z axis, is fixed in the rotary shaft parallel or coaxial with Z axis Primary standard of curved surface part, at least provided with curved surface I and curved surface II on the primary standard of curved surface part, the differential optical gauge head is equipped with a number According to processing module and the identical optical measuring head of two structures, two optical measuring heads are optical measuring head I and optical measuring head respectively II, the optical axis of the optical measuring head is parallel with Z axis, and the differential optical gauge head is located at the top of the primary standard of curved surface part, and two Being equidistant between distance and curved surface I between the optical measuring head optical axis and II center of curved surface;The optical measuring head includes laser Device, aperture diaphragm, reflecting mirror, Amici prism, imaging len and CCD camera, described in the collimated light beam warp that the laser issues Aperture diaphragm shortens thin collimated optical beam into, and thin collimated optical beam is incident in the Amici prism after the reflecting mirror, the reflection of 1/2 energy Light beam projects any point in curved surface, and the light beam of the point reflection is saturating by the imaging after Amici prism transmission Mirror is imaged in the CCD camera;The rotation angle of rotary shaft is measured using the differential optical gauge head and the primary standard of curved surface part, Specific step is as follows: 1) obtaining position coordinates O of the optical axis of optical measuring head I in the CCD camera of optical measuring head I by calibration1' (x'O1,y'O1), by demarcating position coordinates O' of the optical axis for obtaining optical measuring head II in the CCD camera of optical measuring head II2 (x'O2,y'O2);2) the primary standard of curved surface part is adjusted, is located at the curved surface I in the measurement range of optical measuring head I, the curved surface II is located in the measurement range of the optical measuring head II, and the optical axis of the center line of the curved surface I and the optical measuring head I is flat Row, the center line of the curved surface II are parallel with the optical axis of the optical measuring head II;Primary standard of curved surface part is located at first position A at this timeI Place, the corresponding measurement point of curved surface I are A1(x1,y1), the corresponding measurement point of curved surface II is A2(x2,y2);3) the data processing mould Block follows the steps below data processing: 3.1) obtaining measurement point A1(x1,y1) coordinate, specific steps are as follows: 3.1.1) obtain Imaging facula center position coordinates A in the CCD camera of optical measuring head I1'(x1',y1');3.1.2) by the hot spot in step 3.1) Center position coordinates A1'(x1',y1') be converted to distance s of the spot center apart from optical axis1x、s1y;3.1.3 measurement point A) is calculated1Tiltedly The corresponding angle of rate: ξx1=arctan (s1x/ f)/2, ξy1=arctan (s1y/ f)/2, in which: ξx1Represent measurement point A1In XOZ The angle of tangent line and X-direction in plane;ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane;s1x Represent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point;s1yRepresent first measurement Distance of the center of the imaging facula of point in Y direction system of distance optical axis;F represents the focal length of imaging len;3.1.4 it) calculates Measurement point A1(x1,y1) coordinate: x1=g (ξx1), y1=g (ξy1), in which: g (x) represents function of a single variable;3.2) at the data Module is managed according to the step identical as step 3.1), obtains measurement point A2(x2,y2) coordinate are as follows: x2=g (ξx2), y2=g (ξy2), in which: ξx2Represent measurement point A2The angle of tangent line and X-direction in XOZ plane;ξy2Represent measurement point A2In YOZ The angle of tangent line and Y direction in plane;4) rotary shaft is rotated, rotary shaft drives primary standard of curved surface part to rotate to second position AII Place, the corresponding measurement point of curved surface I is A at this time3(x3,y3), the corresponding measurement point of curved surface II is A4(x4,y4), the data processing Module carries out data processing according to the step identical as step 3), obtains measurement point A3(x3,y3) coordinate are as follows: x3=g (φx3), y3=g (φy3), in which: φx3Represent measurement point A3The angle of tangent line and X-direction in XOZ plane;φy3Represent measurement point A3The angle of tangent line and Y direction in YOZ plane;Obtain measurement point A4(x4,y4) coordinate are as follows: x4=g (φx4), y4=g (φy4), in which: φx4Represent measurement point A4The angle of tangent line and X-direction in XOZ plane;φy4Represent measurement point A4? The angle of tangent line and Y direction in YOZ plane;5) data processing module follows the steps below data processing, obtains The angle for taking primary standard of curved surface part to rotate: 5.1) calculating position A1(x1,y1) and position A3(x3,y3) the distance between:5.2) calculating position A2(x2,y2) and position A4(x4,y4) the distance between:5.3) angle of primary standard of curved surface part rotation: γ=arctan ((d is calculated1+d2)/d0), In: γ represents the angle of standard rotation;d0Represent the spacing of II optical axis of I optical axis of optical measuring head and optical measuring head.
The advantages and positive effects of the present invention are: being based on optical surface manufacturing technology, the rotation of primary standard of curved surface part is utilized One-to-one relationship on corner and two curved surfaces between the displacement of measurement point realizes the measurement of rotation angle, by using double optics The measurement method that gauge head is combined into difference gauge head avoids the positioning to primary standard of curved surface part rotary shaft, can be obtained using this method The rotation angle of rotary shaft, high-efficient, precision is high, at low cost, easy to operate, provides for the rotation angle detection of rotary axis of machine tool New method.
Detailed description of the invention
Fig. 1 is the overall structure diagram that the present invention applies;
Fig. 2 is the structural schematic diagram for the differential optical gauge head that the present invention uses;
Fig. 3 is the structural schematic diagram for the optical measuring head that the present invention uses;
Fig. 4 is the optical path schematic diagram that the present invention applies;
Fig. 5 is the measuring principle schematic diagram that the present invention applies.
In figure: 1, differential optical gauge head;1-1, optical measuring head I;1-2, optical measuring head II;2, primary standard of curved surface part;2-1, song Face I;2-2, curved surface II;3, laser;4, aperture diaphragm;5, reflecting mirror;6, Amici prism;7, imaging len;8, CCD camera.
Specific embodiment
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and cooperate attached drawing Detailed description are as follows:
Fig. 1 to Fig. 5 is please referred to, a kind of rotation angle measuring method based on primary standard of curved surface part installs differential optical on Z axis Gauge head 1, in the rotary shaft parallel or coaxial with Z axis fix primary standard of curved surface part 2, on the primary standard of curved surface part 2 at least provided with II 2-2 of I 2-1 of curved surface and curved surface, the differential optical gauge head 1 are equipped with a data processing module and the identical optics of two structures Gauge head, two optical measuring heads are II 1-2 of I 1-1 of optical measuring head and optical measuring head, the optical axis and Z of the optical measuring head respectively Axis is parallel, and the differential optical gauge head 1 is located at the top of the primary standard of curved surface part 2, between two optical measuring head optical axises away from From being equidistant between II center 2-2 I 2-1 of curved surface and curved surface.
The optical measuring head includes laser 3, aperture diaphragm 4, reflecting mirror 5, Amici prism 6, imaging len 7 and CCD phase Machine 8, the collimated light beam that the laser 3 issues shorten thin collimated optical beam into through the aperture diaphragm 4, and thin collimated optical beam is through the reflecting mirror It is incident on after 5 in the Amici prism 6, the reflected beams of 1/2 energy project any point in curved surface, the light of the point reflection After the transmission of Amici prism 6 described in Shu Jing, it is imaged in the CCD camera 8 by the imaging len 7.
Using the rotation angle of the differential optical gauge head 1 and the primary standard of curved surface part 2 measurement rotary shaft, specific steps are such as Under:
1) position coordinates of the optical axis of I 1-1 of optical measuring head in the CCD camera of I 1-1 of optical measuring head are obtained by calibration O1'(x'O1,y'O1), by demarcating position of the optical axis for obtaining II 1-2 of optical measuring head in the CCD camera of II 1-2 of optical measuring head Coordinate O'2(x'O2,y'O2)。
2) the primary standard of curved surface part 2 is adjusted, is located at I 2-1 of curved surface in the measurement range of I 1-1 of optical measuring head, it is described II 2-2 of curved surface is located in the measurement range of II 1-2 of optical measuring head, and the center line of I 2-1 of the curved surface and the optics are surveyed The optical axis of first I 1-1 is parallel, and the center line of II 2-2 of curved surface is parallel with the optical axis of II 1-2 of optical measuring head;Curved surface at this time Standard 2 is located at first position AILocate, corresponding measurement point is A on I 2-1 of curved surface1(x1,y1), corresponding survey on II 2-2 of curved surface Amount point is A2(x2,y2)。
3) data processing module follows the steps below data processing:
3.1) measurement point A is obtained1(x1,y1) coordinate, specific steps are as follows:
3.1.1 imaging facula center position coordinates A in the CCD camera of I 1-1 of optical measuring head) is obtained1'(x1',y1');
3.1.2) by the spot center position coordinates A in step 3.1)1'(x1',y1') spot center is converted to apart from optical axis Distance s1x、s1y
3.1.3 measurement point A) is calculated1The corresponding angle of slope:
ξx1=arctan (s1x/f)/2 (1)
ξy1=arctan (s1y/f)/2 (2)
Wherein: ξx1Represent measurement point A1The angle of tangent line and X-direction in XOZ plane;
ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane;
s1xRepresent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point;
s1yRepresent distance of the center in Y direction system of distance optical axis of the imaging facula of first measurement point;
F represents the focal length of imaging len 7;
3.1.4 measurement point A) is calculated1(x1,y1) coordinate:
x1=g (ξx1) (3)
y1=g (ξy1) (4)
Wherein: g (x) represents function of a single variable;
3.2) data processing module obtains measurement point A according to the step identical as step 3.1)2(x2,y2) coordinate Are as follows:
x2=g (ξx2) (5)
y2=g (ξy2) (6)
Wherein: ξx2Represent measurement point A2The angle of tangent line and X-direction in XOZ plane;
ξy2Represent measurement point A2The angle of tangent line and Y direction in YOZ plane;
4) rotary shaft is rotated, rotary shaft drives primary standard of curved surface part 2 to rotate to second position AIILocate, at this time I 2-1 Shang couple of curved surface The measurement point answered is A3(x3,y3), corresponding measurement point is A on II 2-2 of curved surface4(x4,y4), the data processing module according to The identical step of step 3) carries out data processing, obtains measurement point A3(x3,y3) coordinate are as follows:
x3=g (φx3) (7)
y3=g (φy3) (8)
Wherein: φx3Represent measurement point A3The angle of tangent line and X-direction in XOZ plane;
φy3Represent measurement point A3The angle of tangent line and Y direction in YOZ plane;
Obtain measurement point A4(x4,y4) coordinate are as follows:
x4=g (φx4) (9)
y4=g (φy4) (10)
Wherein: φx4Represent measurement point A4The angle of tangent line and X-direction in XOZ plane;
φy4Represent measurement point A4The angle of tangent line and Y direction in YOZ plane;
5) data processing module follows the steps below data processing, obtains the angle that primary standard of curved surface part 2 rotates:
5.1) calculating position A1(x1,y1) and position A3(x3,y3) the distance between:
5.2) calculating position A2(x2,y2) and position A4(x4,y4) the distance between:
5.3) angle that primary standard of curved surface part 2 rotates is calculated:
γ=arctan ((d1+d2)/d0) (13)
Wherein: γ represents the angle of the rotation of primary standard of curved surface part 2;
d0Represent the spacing of II 1-2 optical axis of I 1-1 optical axis of optical measuring head and optical measuring head.
Application example of the invention:
Differential optical gauge head 1 is installed on Z axis, primary standard of curved surface part 2 is fixed in the rotary shaft parallel or coaxial with Z axis, I 2-1 of this example mean camber is the paraboloid of revolution I and II 2-2 of curved surface is the paraboloid of revolution II, is measured using following steps:
1) position coordinates of the optical axis of I 1-1 of optical measuring head in the CCD camera of I 1-1 of optical measuring head are obtained by calibration O1'(x'O1,y'O1), by demarcating position of the optical axis for obtaining II 1-2 of optical measuring head in the CCD camera of II 1-2 of optical measuring head Coordinate O'2(x'O2,y'O2);
2) the primary standard of curved surface part 2 is adjusted, I 2-1 of the paraboloid of revolution is made to be located at the measurement range of I 1-1 of optical measuring head Interior, the paraboloid of revolution II is located in the measurement range of II 1-2 of optical measuring head, and the center of the paraboloid of revolution I Line is parallel with the optical axis of I 1-1 of optical measuring head, and the center line of the paraboloid of revolution II is with II 1-2's of optical measuring head Optical axis is parallel;Primary standard of curved surface part 2 is located at first position A at this timeILocate, corresponding measurement point is A on the paraboloid of revolution I1(x1,y1), Corresponding measurement point is A on the paraboloid of revolution II2(x2,y2);
3) data processing module follows the steps below data processing:
3.1) measurement point A is obtained1(x1,y1) coordinate, specific steps are as follows:
3.1.1 imaging facula center position coordinates A in the CCD camera of I 1-1 of optical measuring head) is obtained1'(x1',y1');
3.1.2) by the spot center position coordinates A in step 3.1)1'(x1',y1') spot center is converted to apart from optical axis Distance s1x、s1y
3.1.3 measurement point A) is calculated1The corresponding angle of slope:
ξx1=arctan (s1x/f)/2 (14)
ξy1=arctan (s1y/f)/2 (15)
Wherein: ξx1Represent measurement point A1The angle of tangent line and X-direction in XOZ plane;
ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane;
s1xRepresent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point;
s1yRepresent distance of the center in Y direction system of distance optical axis of the imaging facula of first measurement point;
F represents the focal length of imaging len 7;
Calculate measurement point A1Coordinate:
The face type formula of the ∵ paraboloid of revolution are as follows:
Wherein: a2For the characteristic parameter of the paraboloid of revolution;
To obtain the slope of any point on the paraboloid of revolution, first derivative is asked to (16) formula:
∴x1=a2tanξx1 (19)
y1=a2tanξy1 (20)
Wherein: ξx1Represent measurement point A1The angle of tangent line and X-direction in XOZ plane;
ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane;
Similarly, measurement A is calculated2The coordinate of point:
x2=a2tanξx2 (21)
y2=a2tanξy2 (22)
Wherein: ξx2Represent measurement point A2The angle of tangent line and X-direction in XOZ plane;
ξy2Represent measurement point A2The angle of tangent line and Y direction in YOZ plane;
4) rotary shaft is rotated, rotary shaft drives primary standard of curved surface part 2 to rotate to second position AIILocate, at this time the paraboloid of revolution I Upper corresponding measurement point is A3(x3,y3), corresponding measurement point is A on the paraboloid of revolution II4(x4,y4), the data processing mould Block carries out data processing according to the step identical as step 3), obtains measurement point A3(x3,y3) coordinate are as follows:
x3=a2tanφx3 (23)
y3=a2tanφy3 (24)
Wherein: φx3Represent measurement point A3The angle of tangent line and X-direction in XOZ plane;
φy3Represent measurement point A3The angle of tangent line and Y direction in YOZ plane;
Similarly, measurement point A is calculated4Coordinate:
x4=a2tanφx4 (25)
y4=a2tanφy4 (26)
Wherein: φx4Represent measurement point A4The angle of tangent line and X-direction in XOZ plane;
φy4Represent measurement point A4The angle of tangent line and Y direction in YOZ plane;
5) data processing module follows the steps below data processing, obtains the angle that primary standard of curved surface part 2 rotates:
5.1) calculating position A1(x1,y1) and position A3(x3,y3) the distance between:
5.2) calculating position A2(x2,y2) and position A4(x4,y4) the distance between:
5.3) angle that primary standard of curved surface part 2 rotates is calculated:
Wherein: γ represents the angle of primary standard of curved surface part rotation;
d0Represent the spacing of II 1-2 optical axis of I 1-1 optical axis of optical measuring head and optical measuring head.
The operation principle of the present invention is that:
Two light beams of optical measuring head I and optical measuring head II are thrown respectively along the central axial direction of curved surface in differential optical gauge head It is mapped to point A on primary standard of curved surface part1With point A2Place, two optical measuring heads measure point A respectively1With point A2Measurement on two curved surfaces rises Beginning position, when primary standard of curved surface part is around O0When rotating angle γ, incident point of two light beams on two curved surfaces will move respectively To point A3With point A4Place, and under different rotary angle two incident points displacement it is different, i.e. the displacement in two light beam incident points and rotation Gyration has one-to-one relationship, then can be found out according to the displacement in two light beam incident points and carry the rolling of primary standard of curved surface part The rotation angle of moving component.
Although the preferred embodiment of the present invention is described above in conjunction with attached drawing, the invention is not limited to upper The specific embodiment stated, the above mentioned embodiment is only schematical, be not it is restrictive, this field it is common Technical staff under the inspiration of the present invention, in the case where not departing from present inventive concept and scope of the claimed protection, goes back Many forms can be made, within these are all belonged to the scope of protection of the present invention.

Claims (1)

1. a kind of rotation angle measuring method based on primary standard of curved surface part, which is characterized in that differential optical gauge head is installed on Z axis, Primary standard of curved surface part is fixed in the rotary shaft parallel or coaxial with Z axis, at least provided with curved surface I and song on the primary standard of curved surface part Face II, the differential optical gauge head are equipped with a data processing module and the identical optical measuring head of two structures, two light Learning gauge head is optical measuring head I and optical measuring head II respectively, and the optical axis of the optical measuring head I and the optical axis of the optical measuring head II are equal Parallel with Z axis, the differential optical gauge head is located at the top of the primary standard of curved surface part, two optical measuring heads I and the light Being equidistant between II center of distance and curved surface I and curved surface between II optical axis of gauge head;
The optical measuring head I and the optical measuring head II include laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len And CCD camera, the collimated light beam that the laser issues shorten thin collimated optical beam into through the aperture diaphragm, thin collimated optical beam is through described anti- It is incident in the Amici prism after penetrating mirror, the reflected beams of 1/2 energy project any point in curved surface, the point reflection Light beam is imaged in the CCD camera after Amici prism transmission by the imaging len;
Using the rotation angle of the differential optical gauge head and primary standard of curved surface part measurement rotary shaft, the specific steps are as follows:
1) position coordinates O' of the optical axis of optical measuring head I in the CCD camera of optical measuring head I is obtained by calibration1(x'O1,y 'O1), by demarcating position coordinates O' of the optical axis for obtaining optical measuring head II in the CCD camera of optical measuring head II2(x'O2,y 'O2);
2) the primary standard of curved surface part is adjusted, is located at the curved surface I in the measurement range of optical measuring head I, the curved surface II is located at In the measurement range of the optical measuring head II, and the center line of the curved surface I is parallel with the optical axis of the optical measuring head I, described The center line of curved surface II is parallel with the optical axis of the optical measuring head II;Primary standard of curved surface part is located at first position A at this timeIPlace, curved surface I Upper corresponding measurement point is A1(x1,y1), corresponding measurement point is A on curved surface II2(x2,y2);
3) data processing module follows the steps below data processing:
3.1) measurement point A is obtained1(x1,y1) coordinate, specific steps are as follows:
3.1.1 imaging facula center position coordinates A' in the CCD camera of optical measuring head I) is obtained1(x'1,y'1);
3.1.2) by the spot center position coordinates A' in step 3.1)1(x'1,y'1) be converted to spot center apart from optical axis away from From s1x、s1y
3.1.3 measurement point A) is calculated1The corresponding angle of slope:
ξx1=arctan (s1x/f)/2
ξy1=arctan (s1y/f)/2
Wherein: ξx1Represent measurement point A1The angle of tangent line and X-direction in XOZ plane;
ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane;
s1xRepresent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point;
s1yRepresent distance of the center in Y direction system of distance optical axis of the imaging facula of first measurement point;
F represents the focal length of imaging len;
3.1.4 measurement point A) is calculated1(x1,y1) coordinate:
x1=g (ξx1)
y1=g (ξy1)
Wherein: g (x) represents function of a single variable;
3.2) data processing module obtains measurement point A according to the step identical as step 3.1)2(x2,y2) coordinate are as follows:
x2=g (ξx2)
y2=g (ξy2)
Wherein: ξx2Represent measurement point A2The angle of tangent line and X-direction in XOZ plane;
ξy2Represent measurement point A2The angle of tangent line and Y direction in YOZ plane;
4) rotary shaft is rotated, rotary shaft drives primary standard of curved surface part to rotate to second position AIIPlace, at this time corresponding measurement on curved surface I Point is A3(x3,y3), corresponding measurement point is A on curved surface II4(x4,y4), the data processing module is according to identical as step 3) The step of carry out data processing, obtain measurement point A3(x3,y3) coordinate are as follows:
x3=g (φx3)
y3=g (φy3)
Wherein: φx3Represent measurement point A3The angle of tangent line and X-direction in XOZ plane;
φy3Represent measurement point A3The angle of tangent line and Y direction in YOZ plane;
Obtain measurement point A4(x4,y4) coordinate are as follows:
x4=g (φx4)
y4=g (φy4)
Wherein: φx4Represent measurement point A4The angle of tangent line and X-direction in XOZ plane;
φy4Represent measurement point A4The angle of tangent line and Y direction in YOZ plane;
5) data processing module follows the steps below data processing, obtains the angle of primary standard of curved surface part rotation:
5.1) calculating position A1(x1,y1) and position A3(x3,y3) the distance between:
5.2) calculating position A2(x2,y2) and position A4(x4,y4) the distance between:
5.3) angle of primary standard of curved surface part rotation is calculated:
γ=arctan ((d1+d2)/d0)
Wherein: γ represents the angle of primary standard of curved surface part rotation;
d0Represent the spacing of II optical axis of I optical axis of optical measuring head and optical measuring head.
CN201710398102.7A 2017-05-31 2017-05-31 A kind of rotation angle measuring method based on primary standard of curved surface part Expired - Fee Related CN107238353B (en)

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CN108981612B (en) * 2018-05-04 2019-09-24 华中科技大学 A kind of lathe vertical axis rolling angle error measurement method based on bidifly optical interferometer

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104613897A (en) * 2015-02-12 2015-05-13 哈尔滨理工大学 Car outer cover part mold free-form surface self-adaption sampling device and measuring method
CN104848802A (en) * 2015-06-10 2015-08-19 中国计量科学研究院 Differential confocal aspheric surface measurement method and system of normal tracking type
CN105627947A (en) * 2015-12-23 2016-06-01 中国科学院长春光学精密机械与物理研究所 Measurement method of rotary symmetry unknown aspherical surface error and measurement device
CN205317160U (en) * 2015-11-23 2016-06-15 浙江大学舟山海洋研究中心 Non -contact curved surface scanning device
CN106225715A (en) * 2016-08-02 2016-12-14 中国科学院长春光学精密机械与物理研究所 A kind of pentaprism scanning detection method for non-spherical reflector

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004301826A (en) * 2003-03-14 2004-10-28 Omron Corp Optical encoder

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104613897A (en) * 2015-02-12 2015-05-13 哈尔滨理工大学 Car outer cover part mold free-form surface self-adaption sampling device and measuring method
CN104848802A (en) * 2015-06-10 2015-08-19 中国计量科学研究院 Differential confocal aspheric surface measurement method and system of normal tracking type
CN205317160U (en) * 2015-11-23 2016-06-15 浙江大学舟山海洋研究中心 Non -contact curved surface scanning device
CN105627947A (en) * 2015-12-23 2016-06-01 中国科学院长春光学精密机械与物理研究所 Measurement method of rotary symmetry unknown aspherical surface error and measurement device
CN106225715A (en) * 2016-08-02 2016-12-14 中国科学院长春光学精密机械与物理研究所 A kind of pentaprism scanning detection method for non-spherical reflector

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
《一种确定正交工作台型五轴机床加工旋转角的新方法》;吴陈燕;《组合机床与自动化加工技术》;20141216(第12期);第45-47页

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