CN106225715A - A kind of pentaprism scanning detection method for non-spherical reflector - Google Patents

A kind of pentaprism scanning detection method for non-spherical reflector Download PDF

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Publication number
CN106225715A
CN106225715A CN201610624066.7A CN201610624066A CN106225715A CN 106225715 A CN106225715 A CN 106225715A CN 201610624066 A CN201610624066 A CN 201610624066A CN 106225715 A CN106225715 A CN 106225715A
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scanning
pentaprism
spherical reflector
guide rail
hot spot
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CN201610624066.7A
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Inventor
张学军
戚二辉
薛栋林
罗霄
范镝
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201610624066.7A priority Critical patent/CN106225715A/en
Publication of CN106225715A publication Critical patent/CN106225715A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention discloses a kind of pentaprism scanning detection method for non-spherical reflector, and one, the required device of detection of purchasing；Two, the Scanning Detction of wall scroll bus；Three, after completing the scanning of wall scroll bus, non-spherical reflector anglec of rotation a is carried out again the Scanning Detction of next bus；Four, detection data process and matching；All of angle difference is converted to the slope value of the reflecting surface relevant position of non-spherical reflector, described slope value is fitted with Zernike gradient multinomial, obtaining the low order face shape error parameter of non-spherical reflector, the present invention can obtain the high accuracy low order face shape error parameter of reflecting mirror.

Description

A kind of pentaprism scanning detection method for non-spherical reflector
Technical field
The invention belongs to the technical field of optical system detection, be specifically related to a kind of for the five of non-spherical reflector detection Prism scanning detection method.
Background technology
In optical system, use aspherical optical element, be possible not only to reduce size and the weight of optical system, reduce The complexity of system, and aberration can be corrected, improve picture element, thus increase substantially systematic function.Therefore, aspheric surface light Learn the core component that element is high performance optical systems military, civilian, in Aeronautics and Astronautics remote sensing, astronomical observation, survey of deep space And photoelectric tracking instrument, lithographic objective, many photoelectric instrument fields such as high-performance photograph (shooting) machine camera lens etc. have answers widely With.
But along with the development of space optics technology, people's specification to non-spherical reflector and the requirement of surface figure accuracy More and more higher, bore is widened to several meters from original hundreds of millimeter, surface figure accuracy from original RMS value 1/50 λ (λ= 632.8nm, for interferometer work wavelength) rise to 1/100 λ.And in order to make optical system have the highest resolution and very Big visual field, some aspheric bias (deviation between aspheric surface and its best-fit sphere) is the biggest, it will reach tens Micron even millimeter magnitude.This just brings a lot of difficulties, especially aperture aspherical to aspheric processing and detection High precision test, because it is basis and the foundation of High-precision aspheric definitiveness processing.
Design CGH compensator utilizes null compensator testing to measure aspheric surface, is still and detects non-spherical reflector at present One of face shape most common method.But the aspheric surface of deviator big for heavy caliber, especially just polishes the stage, due to the most anti- Penetrate mirror surface and be not up to the highest reflectance, it is impossible to meet the detection demand of the transmissive elements such as CGH, even if reflectance reaches reluctantly Detect demand to CGH, owing to this stage mirror surface surface figure accuracy is not the highest, add that bias is very big, regional area Face shape error has been over the resolution capability of laser interferometer, thus causes interference fringe localized loss, it is impossible to obtain full mouth The face shape information in footpath, as shown in Figure 1.Simultaneously along with the increase of reflecting mirror bore, traditional three-coordinate measuring method can not Meet the accuracy of detection demand in polishing stage.
Summary of the invention
In view of this, the invention provides a kind of pentaprism scanning detection method for non-spherical reflector, it is possible to obtain Take the high accuracy low order face shape error parameter of reflecting mirror.
A kind of pentaprism scanning detection method for non-spherical reflector, comprises the following steps:
Step one, the required device of detection of purchasing；
The required device of detection include generating laser, with reference to pentaprism, scanning pentaprism, guide rail, photoelectric detector with And it is movably connected on the slide block of guide rail；
Photoelectric detector is fixedly mounted at the center of curvature of non-spherical reflector, is being perpendicular to non-spherical reflector Optical axis direction guide rail is installed, generating laser, be sequentially arranged on guide rail, with reference to five ribs with reference to pentaprism and scanning pentaprism Mirror and scanning pentaprism are fixedly mounted on the slide block being movably connected on guide rail, and generating laser is fixedly mounted on guide rail away from light One end of axle；
Step 2, the Scanning Detction of wall scroll bus；
To fix with reference to pentaprism so that it is the generating laser hot spot turned back is radiated at the margin location of non-spherical reflector Putting, motion scan pentaprism, the hot spot making scanning pentaprism turn back skims over the reflection of whole non-spherical reflector along guide rail direction Face, often moves a position, obtains one group of reference hot spot and scanning light spot positional information on photodetector, by this position Information is converted to angle measurement, subtracts each other obtain angle difference by often organizing angle measurement, complete the Scanning Detction of wall scroll bus；
Step 3, non-spherical reflector anglec of rotation a is carried out again the Scanning Detction of next bus, until completing aspheric The Scanning Detction of the whole minute surface of face reflecting mirror；
Step 4, detection data process and matching；
All of angle difference is converted to the slope value of the reflecting surface relevant position of non-spherical reflector, utilizes Zernike gradient multinomial carries out least square fitting to the slope value of each bar bus, solves the coefficient of each low order aberration, Use this coefficient to reconstruct the face shape information of tested non-spherical reflector, obtain the low order face shape error parameter of non-spherical reflector.
Further, described is that the laser facula turned back with reference to pentaprism reflexes to light through non-spherical reflector with reference to hot spot Hot spot on electric explorer.
Further, described scanning light spot is that the laser facula that scanning pentaprism is turned back reflexes to light through non-spherical reflector Hot spot on electric explorer.
Further, in scanning pentaprism moving process, the pose change to scanning pentaprism is monitored and adjusts, Guaranteeing in whole scanning process, the pose of scanning pentaprism is consistent.
Beneficial effect:
The present invention makes full use of pentaprism can deflect the characteristic of 90 °, by entering aspheric bus by light beam perfection Row scanning survey, obtains the face shape slope information of reflecting mirror, is then passed through matching, obtains the high accuracy low terrace shape letter of reflecting mirror Breath.Due to the acquisition of pentaprism scanning survey is face shape slope information, in conjunction with corresponding size sensor, can obtain bigger Measurement dynamic range, pentaprism scanning technique is a kind of absolute sense technology simultaneously, and whole process need not the reference mirror of complexity Deng element, decrease error source, can reach the highest accuracy of detection, thus meet the stage that polishes at the beginning of large-diameter non-spherical reflecting mirror Detection range and accuracy requirement, may be implemented in simultaneously position detection, be greatly shortened the process-cycle of large-diameter non-spherical reflecting mirror.
Accompanying drawing explanation
Fig. 1 is the interference testing result of traditional method.
Fig. 2 is pentaprism operation principle schematic diagram.
Fig. 3 is that pentaprism of the present invention detects aspheric surface principle schematic.
Detailed description of the invention
Develop simultaneously embodiment below in conjunction with the accompanying drawings, describes the present invention.
As it is shown on figure 3, the invention provides a kind of pentaprism scanning detection method for non-spherical reflector, including with Lower step:
Step one, the required device of detection of purchasing；
The required device of detection include generating laser, with reference to pentaprism, scanning pentaprism, guide rail, photoelectric detector with And it is movably connected on the slide block of guide rail；The described pentaprism being routine with reference to pentaprism and scanning pentaprism.
Photoelectric detector is fixedly mounted at the center of curvature of non-spherical reflector, is being perpendicular to non-spherical reflector Optical axis direction guide rail is installed, generating laser, be sequentially arranged on guide rail, with reference to five ribs with reference to pentaprism and scanning pentaprism Mirror and scanning pentaprism are fixedly mounted on the slide block being movably connected on guide rail, and generating laser is fixedly mounted on guide rail away from light One end of axle.
Adjustment after guide rails assembling:
Utilizing laser tracker to monitor, complete the adjustment after guide rail, photoelectric detector installation, period uses Laser emission Device, it is ensured that pentaprism is when centre position, and laser beam can enter photoelectricity after pentaprism deflection and non-spherical reflector reflection The measurement scope of sensitive detection parts.Owing to laser tracker can set up three-dimensional system of coordinate, in the space determining non-spherical reflector In the case of coordinate, by certain debugging, guide rail and the installation of photoelectric detector and adjustment can be realized very easily.
Step 2, the Scanning Detction of wall scroll bus；
To fix with reference to pentaprism so that it is the generating laser hot spot turned back is radiated at the margin location of non-spherical reflector Putting, motion scan pentaprism, the hot spot making scanning pentaprism turn back skims over the reflection of whole non-spherical reflector along guide rail direction Face, often moves a position, obtains one group of reference hot spot and scanning light spot positional information on photodetector, by the two Positional information is respectively converted into angle measurement, subtracts each other obtain angle difference by often organizing angle measurement, complete wall scroll bus Scanning Detction；Described is that the laser facula turned back with reference to pentaprism reflexes to photodetector through non-spherical reflector with reference to hot spot On hot spot.Described scanning light spot is that the laser facula that scanning pentaprism is turned back reflexes to photodetector through non-spherical reflector On hot spot.
This detection device uses the mode of reference measure to realize slope detection, is i.e. fixed on guiding edge with reference to pentaprism and protects Holding motionless, scanning pentaprism moves along guide rail under the driving of motor, and then realizes the measuring beam measurement along scanning bus.Often Detect a position, then take the measurement difference of now reference beam and scanning light beam as measuring angle difference, obtain this with this and sweep Retouch bus face shape slope variation along scanning direction.
Step 3, reflecting mirror anglec of rotation a is carried out again the Scanning Detction of next bus；Generally the scanning of several buses is i.e. The aperture aspherical detection demand to low order face shape error can be met.In scanning pentaprism moving process, to scanning five ribs The pose change of mirror is monitored and adjusts, it is ensured that in whole scanning process, and the pose of scanning pentaprism is consistent.
Scanning process accurately adjusts scanning pentaprism pose
As in figure 2 it is shown, pentaprism has light beam perfection deflection 90 ° and the slight beat of pitch mode can not affected system The characteristic of system detection, therefore the degree of freedom in pitch direction can consider.Pentaprism yaw direction and the angle in roll direction The measurement of scanning direction can be caused single order and second order measurement error by beat respectively, therefore needs this variable during measuring It is controlled by.
Step 4, detection data process and matching；
After completing the scanning of all of bus, it is filtered processing to detection data, rejects the HFS easily affecting matching, Rejecting the slope information of non-spherical reflector minute surface itself, the angle difference of all wall scroll buses is non-spherical reflector simultaneously Slope variation under this bus coordinate, is converted to the reflecting surface relevant position of non-spherical reflector by all of angle difference Slope value, then use Zernike gradient multinomial the slope data of each bar bus is carried out least square fitting, ask Solve the coefficient of each low order aberration, use this coefficient to reconstruct the face shape information of tested non-spherical reflector, and then know further The course of processing.Detailed step is as follows:
First theoretical according to optical manufacturing, tested reflecting mirror error surface shape is expressed as the polynomial linear combination of Zernike Form:
S ( x , y ) = Σ j = 1 J x j · Z j ( x , y ) - - - ( 1 )
In formula (1), ZjFor the Zernike multinomial under cartesian coordinate system, xjBeing their coefficient, J is complete statement Face shape needs the Zernike item number used.S (x, y) is reflecting mirror surface shape expression formula, and the direction vector of measuring route is defined as:
i → c o s θ + j → s i n θ - - - ( 2 )
The most tested reflecting mirror surface shape slope just can be expressed as:
s ( x , y , θ ) = Σ j = 1 J x j · ▿ Z j ( x , y ) · ( i → c o s θ + j → s i n θ ) - - - ( 3 )
Z in formula (3)j(x, y) represents the polynomial gradient function of Zernike, itself and the point of measuring route direction vector The long-pending value that just can be expressed as Zernike multinomial space slope on measurement direction.Owing to metering system is discrete adopting Sample scanning survey, is converted into matrix form by (3) formula as follows:
A · x → = b → - - - ( 4 )
In formula (4), matrix A is the matrix of the Zernike multinomial slope value of m × n, and m is the number of scanning sample point, and n is The polynomial item number of Zernike that matching needs,Vector for the face shape slope composition that each scanning element is measured.For The vector of every coefficient composition in Zernike multinomial, such as: with Zernike polynomial lower term Z4-Z9Carry out matching face shape, Then matrix A can be expressed as:
A = ▿ Z 4 ( 1 ) ▿ Z 5 ( 1 ) ▿ Z 6 ( 1 ) ▿ Z 7 ( 1 ) ▿ Z 8 ( 1 ) ▿ Z 9 ( 1 ) ▿ Z 4 ( 2 ) ▿ Z 5 ( 2 ) ▿ Z 6 ( 2 ) ▿ Z 7 ( 2 ) ▿ Z 8 ( 2 ) ▿ Z 9 ( 2 ) . . . . . . . . . . . . . . . . . . ▿ Z 4 ( m ) ▿ Z 5 ( m ) ▿ Z 6 ( m ) ▿ Z 7 ( m ) ▿ Z 8 ( m ) ▿ Z 9 ( m ) - - - ( 5 )
Wherein ZnM () is the space slope of Zernike n-th m-th scanning element in a scanning direction, then can obtain The least square solution of formula (4) is:
x → = ( A T A ) - 1 A T b → - - - ( 6 )
MatrixIt is the vector of n × 1, comprises the n polynomial coefficient of item Zernike.Zernike multinomial coefficient is true After Ding, substitute into the formula (1) the error surface shape with regard to restructural tested surface, and then instruct the further course of processing.
Error and precision analysis；
Pentaprism Scanning Detction large-diameter non-spherical reflecting mirror is by compared with multifactor impact: the initial installation accuracy of pentaprism, light The initial installation accuracy of electric explorer, detector measuring accuracy, institutional adjustment precision and test environment etc. affect.Binding experiment Room existence conditions, uses pentaprism scanning technique to carry out Aspherical-surface testing, and its spot measurement uncertainty can reach 0.8 " rms。
As a example by existing 2m non-spherical reflector, its optical parametric is diameter D=2040mm, R=6040mm, K=-1, right It carries out pentaprism Scanning Detction, and system uses CCD a size of 1K × 1K, then the dynamic range theoretical value of system detection may be up to PV 200 μm, to the certainty of measurement of low order face shape error up to 100nm rms, meets large-diameter non-spherical reflecting mirror rough polishing light step The demand of section.
In sum, these are only presently preferred embodiments of the present invention, be not intended to limit protection scope of the present invention. All within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. made, should be included in the present invention's Within protection domain.

Claims (4)

1. the pentaprism scanning detection method for non-spherical reflector, it is characterised in that comprise the following steps:
Step one, the required device of detection of purchasing；
The required device of detection includes generating laser, with reference to pentaprism, scanning pentaprism, guide rail, photoelectric detector and work It is dynamically connected in the slide block of guide rail；
Photoelectric detector is fixedly mounted at the center of curvature of non-spherical reflector, is being perpendicular to the light of non-spherical reflector Direction of principal axis installs guide rail, generating laser, is sequentially arranged on guide rail with reference to pentaprism and scanning pentaprism, with reference to pentaprism and Scanning pentaprism is fixedly mounted on the slide block being movably connected on guide rail, and generating laser is fixedly mounted on guide rail away from optical axis One end；
Step 2, the Scanning Detction of wall scroll bus；
To fix with reference to pentaprism so that it is the generating laser hot spot turned back is radiated at the marginal position of non-spherical reflector, move Dynamic scanning pentaprism, the hot spot making scanning pentaprism turn back skims over the reflecting surface of whole non-spherical reflector, often along guide rail direction A mobile position, obtains one group of reference hot spot and scanning light spot positional information on photodetector, by this positional information Be converted to angle measurement, subtract each other obtain angle difference by often organizing angle measurement, complete the Scanning Detction of wall scroll bus；
Step 3, non-spherical reflector anglec of rotation a is carried out again the Scanning Detction of next bus, until it is anti-to complete aspheric surface Penetrate the Scanning Detction of the whole minute surface of mirror；
Step 4, detection data process and matching；
All of angle difference is converted to the slope value of the reflecting surface relevant position of non-spherical reflector, utilizes Zernike ladder Degree multinomial carries out least square fitting to the slope value of each bar bus, solves the coefficient of each low order aberration, uses this to be Number reconstructs the face shape information of tested non-spherical reflector, obtains the low order face shape error parameter of non-spherical reflector.
A kind of pentaprism scanning detection method for non-spherical reflector, it is characterised in that institute Stating with reference to hot spot is that the laser facula turned back with reference to pentaprism reflexes to the hot spot on photodetector through non-spherical reflector.
A kind of pentaprism scanning detection method for non-spherical reflector, it is characterised in that institute Stating scanning light spot is that the laser facula that scanning pentaprism is turned back reflexes to the hot spot on photodetector through non-spherical reflector.
A kind of pentaprism scanning detection method for non-spherical reflector, it is characterised in that In scanning pentaprism moving process, the pose change to scanning pentaprism is monitored and adjusts, it is ensured that in whole scanning process, The pose of scanning pentaprism is consistent.
CN201610624066.7A 2016-08-02 2016-08-02 A kind of pentaprism scanning detection method for non-spherical reflector Pending CN106225715A (en)

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Cited By (6)

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CN106840030A (en) * 2017-03-29 2017-06-13 中国科学院上海应用物理研究所 A kind of two-dimentional long-range profile detection means and detection method
CN107036559A (en) * 2017-05-31 2017-08-11 天津大学 A kind of measuring method of curved surface slope
CN107238353A (en) * 2017-05-31 2017-10-10 天津大学 A kind of rotation angle measuring method based on primary standard of curved surface part
CN109406402A (en) * 2018-09-05 2019-03-01 浙江省海洋水产研究所 A kind of general cuvette device of absorption fluorescence and measurement method
CN110617778A (en) * 2019-09-27 2019-12-27 广东工业大学 Large-scale aspheric surface morphology detection method based on complex beam angle sensor
CN115236868A (en) * 2022-09-22 2022-10-25 长春理工大学 High-resolution optical axis adjusting device and high-resolution optical axis adjusting method

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106840030A (en) * 2017-03-29 2017-06-13 中国科学院上海应用物理研究所 A kind of two-dimentional long-range profile detection means and detection method
CN106840030B (en) * 2017-03-29 2019-04-19 中国科学院上海应用物理研究所 A kind of two dimension long-range profile detection device and detection method
CN107036559A (en) * 2017-05-31 2017-08-11 天津大学 A kind of measuring method of curved surface slope
CN107238353A (en) * 2017-05-31 2017-10-10 天津大学 A kind of rotation angle measuring method based on primary standard of curved surface part
CN107238353B (en) * 2017-05-31 2019-05-24 天津大学 A kind of rotation angle measuring method based on primary standard of curved surface part
CN109406402A (en) * 2018-09-05 2019-03-01 浙江省海洋水产研究所 A kind of general cuvette device of absorption fluorescence and measurement method
CN109406402B (en) * 2018-09-05 2020-12-11 浙江省海洋水产研究所 Universal cuvette device for absorbing fluorescence and measurement method
CN110617778A (en) * 2019-09-27 2019-12-27 广东工业大学 Large-scale aspheric surface morphology detection method based on complex beam angle sensor
CN115236868A (en) * 2022-09-22 2022-10-25 长春理工大学 High-resolution optical axis adjusting device and high-resolution optical axis adjusting method
CN115236868B (en) * 2022-09-22 2022-11-29 长春理工大学 High-resolution optical axis adjusting device and high-resolution optical axis adjusting method

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Application publication date: 20161214