CN106840030A - A kind of two-dimentional long-range profile detection means and detection method - Google Patents
A kind of two-dimentional long-range profile detection means and detection method Download PDFInfo
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- CN106840030A CN106840030A CN201710198456.7A CN201710198456A CN106840030A CN 106840030 A CN106840030 A CN 106840030A CN 201710198456 A CN201710198456 A CN 201710198456A CN 106840030 A CN106840030 A CN 106840030A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Abstract
The present invention provides a kind of two-dimentional long-range profile detection means, including monochromatic light source, two-dimensional array structure π phase boards, Amici prism, guide rail, the pentagonal prism being installed on guide rail, lens, right-angle prism module and planar array detector；The monochromatic light source is set to the light beam of outgoing one, the light beam incides the Amici prism through the two-dimensional array structure π phase boards, the pentagonal prism is incided after the Amici prism light splitting, the minute surface to be measured is incided after being reflected through the pentagonal prism, and after through the mirror-reflection to be measured return the pentagonal prism, the Amici prism, the lens and the right-angle prism module are sequentially passed through after being reflected through the pentagonal prism again and reaches the planar array detector, and measurement hot spot is formed on the planar array detector.The present invention obtains the two-dimensional signal of optical element surface by guide rail moving sweep, realizes the quality testing of large scale optical element surface and the detection of high accuracy bending mechanism.
Description
Technical field
The present invention relates to large scale high-precision optical element surface testing, more particularly to a kind of two-dimentional long-range profile detection dress
Put and detection method.
Background technology
The application of large scale optical surface is increasingly extensive, especially with synchrotron radiation light beam line engineering and high power laser system
Grazing incidence mirror be representative.The mirror length used on synchrotron radiation applications light beam line can reach 1500mm, and
Surface quality requirements are very high, and face type has from plane, cylinder to toroid.Because the wavelength of X-ray is extremely short, current optics material
Material can only operate in glancing incidence state, it is necessary to could arrive reflectivity higher using very big incidence angle (close to 90 °), therefore together
Walk the general strip of optical element of radiation.
Synchrotron radiation optical element is generally hard X ray wave band using wave band, because wavelength is very short, therefore to table mass surface
It is required that high.Third generation Synchrotron Radiation is less than 1 μ ard (RMS) to the surface slope error common demands of optical element, most
High request is less than 100nrad (RMS).The optical element working ability of such high accuracy large scale depends critically upon detectability,
Therefore high accuracy large scale optical detection problem is always grinding for international synchrotron radiation light educational circles and optical element manufacture field
Study carefully focus.
Meridian direction radius of curvature is often larger when synchrotron radiation optics element is collimated or focused on, usually using several kilometers very
It is at this moment many that meridian direction press-bending is carried out to speculum long using bending mechanism to bigger, form the shapes such as cylinder or elliptic cylinder.
Press-bending direction be divided into it is upward, lateral and downward three kinds, that is, bend when speculum minute surface direction may have three kinds of orientations.Bullodozer
Whether the detection of structure needs the radius of curvature and face shape slope error of testing the extrusion of press-bending system at various pressures up to standard, surveys
Examination process needs the various parameters of constantly adjustment bending mechanism, needs to detect whole speculum again after having adjusted every time,
Until radius of curvature and the slope error distribution of preferably being bent.
Existing surface testing means mainly have long-range profile instrument (Long trace profiler-LTP), interferometer to spell
Connect, the splicing of Shack-Hartmann (Shark-Hartmann) Wavefront sensor, interferometer oblique feeding method, arc measurement instrument of receiving
(Nanometer Optical component Measuring Machine-NOM) etc..LTP and NOM are one-dimensional scanning survey
Amount, is distinguished as the slope information that LTP obtains surface to be measured using the various light paths of designed, designed, and accuracy of detection can reach 0.2 μ
ard；NOM replaces the part light path in LTP with autocollimator, is similarly obtained the slope information on surface to be measured, and accuracy of detection can
Reach 50nrad.
Interferometer splices and Shark-Hartmann joining methods obtain large scale optical element using joining method
Surface information.What interferometer was obtained is apparent height distributed intelligence, and slope distribution can be obtained by carrying out differential to elevation information
Arrive；What Shark-Hartmann joining methods were obtained is the slope information of optical element surface, integrates and can obtain by result
To apparent height distributed intelligence.Joining method depends critically upon the kinematic accuracy of the stitching algorithm and motion guide rail for using, while
Scanning is often walked during splicing needs more than 80% area to overlap, therefore detection efficiency is low.
The method of interferometer oblique incidence is to carry out oblique incidence to surface to be measured using bigbore lasing area shape interferometer, with
Expand area to be measured.The method certainty of measurement depends on interferometer precision in itself, simultaneously because interferometer standard mirror during detection
With interferometer apart from excessive, it is impossible to obtain accuracy of detection high.Because the method cost is relatively low, detection time is shorter, is used for work
In factory's production detection, the speculum not high for detecting surface slope error requirements.
The problem that existing surface testing method is present mainly has, one-dimensional scanning detection method such as LTP and NOM, testing result
A surface information for line on mirror surface can only be reflected, it is impossible to obtain two-dimensional surface information.And of bending mechanism detection
Important indicator --- surface deflections, whether mirror surface is distorted when its reflection is bent, and this technical requirements is to surface information
Carrying out two-dimensional measurement can just draw.Interferometer and Shack-Hartmann methods are due to the reasons in structure of equipment of itself, it is difficult to examine
Bending mechanism is surveyed, the less on-plane surface optical element of surface curvature radius is not suitable for yet.
The content of the invention
The present invention is to overcome the shortcomings of above-mentioned existing detection technique, there is provided a kind of two-dimentional long-range profile detection means and detection
Method, to obtain the two-dimensional signal of optical element surface by guide rail moving sweep, realizes large scale optical element surface quality
Detection and the detection of high accuracy bending mechanism.
To achieve these goals, one aspect of the present invention provides a kind of two-dimentional long-range profile detection means, for realizing treating
The surface testing of minute surface is surveyed, it includes monochromatic light source, two-dimensional array structure π phase boards, Amici prism, guide rail, is installed in and leads
Pentagonal prism, lens, right-angle prism module and planar array detector on rail；
Wherein, the monochromatic light source is set to the light beam of outgoing one, and the light beam passes through the two-dimensional array structure π phase boards
The Amici prism is incided, the pentagonal prism is incided after the Amici prism light splitting, reflected through the pentagonal prism
After incide the minute surface to be measured, and after return the pentagonal prism through the mirror-reflection to be measured, again through the pentagonal prism
The Amici prism, the lens and the right-angle prism module are sequentially passed through after refraction and reaches the planar array detector, and
Measurement hot spot is formed on the planar array detector.
Preferably, the monochromatic light source is semiconductor laser or He-Ne laser.
Preferably, the two-dimensional array structure π phase boards are in yi word pattern or cross.
Preferably, the guide rail is mechanical guide or air-float guide rail.
Preferably, the lens are f- θ type lens.
Preferably, the right-angle prism module includes multiple right-angle prisms.
Preferably, the planar array detector ccd detector or CMOS-type detector.
Another aspect of the present invention provides a kind of two-dimentional long-range profile detection method, and the method utilizes foregoing two-dimentional long-range face
Shape detection means realizes the surface testing of minute surface to be measured, comprises the following steps：
Step S1, first by the light beam of monochromatic light source outgoing one, so that the light beam passes through the two-dimensional array knot
Structure π phase boards incide the Amici prism, and the pentagonal prism is incided after the Amici prism light splitting, through described five jiaos
Incide the minute surface to be measured after refraction by prism, and after return the pentagonal prism through the mirror-reflection to be measured, again through described
The Amici prism, the lens and the right-angle prism module are sequentially passed through after pentagonal prism refraction and reaches the face battle array detection
Device, and measurement hot spot is formed on the planar array detector, it is then determined that the measurement hot spot is on the planar array detector
Position；
Step S2, the guide rail is constantly moved along the minute surface to be measured, and often the once described guide rail of movement is then repeated
The once step S1 is performed, to obtain corresponding sports amount of the measurement hot spot on the planar array detector；And
Step S3, the slope coefficient that the amount of exercise of the measurement hot spot is multiplied by demarcation is obtained the slope of the minute surface to be measured
Distribution, and the height distribution of the minute surface to be measured is obtained by being integrated to the slope.
Preferably, the step 1 determines position of the measurement hot spot on the planar array detector by projected outline's method
Put.
Preferably, the step 1 determines the measurement hot spot in face battle array with reference to projected outline's method and pixel subdivision method
Position on detector.
Had the advantages that compared with prior art by using above-mentioned technical proposal, the present invention：
First, the present invention produces far field cross concealed wire array using multiple two-dimensional array structure π phase boards, can be treated
Survey the two-dimensional signal of minute surface such that it is able to the quick two-dimension high-precision scanning survey realized to large scale high accuracy minute surface to be measured,
It is distributed and height distributed intelligence with the two-dimensional slope for obtaining surface to be measured；Secondly, the characteristic of the pentagonal prism that the present invention is used is
Make 90 ° of the light beam steering of incidence, the angle of emergent light, therefore this hair are not interfered with when the attitude of pentagonal prism changes yet
Bright insensitive to ambient vibration, certainty of measurement is little by influence of ambient vibration；Again, the present invention has self-correction ability, is not required to
Additionally to increase reference beam, the pentagonal prism that guide rail or ambient vibration cause can be eliminated and rock brought error；Finally,
By blocking the part phase structure of two-dimensional array structure π phase boards, it is set only to stay the phase structure of a unit, or pass through
The measuring beam shielding that software produces the phase structure of other units, makes it only stay the measuring beam of a unit, Ke Yishi
Existing High Precision One Dimensional scanning survey.
Brief description of the drawings
Fig. 1 is the optical texture schematic diagram of two dimension long-range profile detection means of the invention；
Fig. 2 is the structural representation of the two-dimensional array structure π phase boards in Fig. 1；
Fig. 3 is the far field design sketch of the two-dimensional array structure π phase boards in Fig. 1；
Fig. 4 is that the two-dimentional π phase boards in the present invention carry out the high accuracy result curve figure obtained during one-dimensional scanning.
Specific embodiment
1-4, provides presently preferred embodiments of the present invention below in conjunction with the accompanying drawings, and is described in detail, and makes to be better understood when
Function of the invention, feature.
As shown in figure 1, two-dimentional long-range profile detection means of the invention includes semiconductor laser 1, two-dimensional array structure π
Phase board 2, Amici prism 3, guide rail (not shown), the pentagonal prism 4 being installed on guide rail, lens 5, right-angle prism module and
Ccd detector 11.Wherein, ccd detector 11 can also using CMOS-type detector or other there is high-resolution face battle array to visit
Survey device；Semiconductor laser 1 can also use He-Ne laser 1 or other monochromatic light sources；Two-dimensional array structure π phase boards 2
" one " font, " ten " font or other types of geometry can be used；Lens 5 are for the specific of semiconductor laser 1
The f- θ types lens 5 of wavelength optimization；Right-angle prism module includes multiple right-angle prisms 6,7,8,9,10；Guide rail can be used
High-precision air-float guide rail, it would however also be possible to employ common mechanical guide rail, because the machining accuracy of pentagonal prism 4 is bowed to it enough
Face upward kinematic error insensitive.
The light path principle of above-mentioned detection device is：The collimated laser beam of the outgoing of semiconductor laser 1 is irradiated to two-dimensional array
It is the hot spot (see Fig. 3) of cross concealed wire on structure π phase boards 2, centered on its far-field intensity distribution；Then the light beam is through light splitting rib
After mirror 3, wherein on a branch of pentagonal prism 4 being irradiated on guide rail, mirror to be measured is irradiated to after being transferred via pentagonal prism 4
On face 12, and through minute surface to be measured 12 reflect after again pass by pentagonal prism 4 turnover be irradiated on Amici prism 3, then by saturating
After mirror 5, then ccd detector 11 is reached through right-angle prism 6,7,8,9,10.When guide rail drives pentagonal prism 4 to be swept along minute surface to be measured 12
When retouching measurement, measurement hot spot constantly moved on ccd detector 11, by measure measurement hot spot on ccd detector 11
Amount of exercise, and amount of exercise is multiplied by the slope coefficient of demarcation, you can the slope distribution of minute surface to be measured 12 is obtained, then by slope
Integration obtains the height distribution on surface to be measured.
Foregoing slope coefficient can be demarcated by existing equipment or technology, such as using ultra-precise autocollimator, double
Frequency laser interferometer etc., it would however also be possible to employ micro-displacement apparatus produce minute angle to be demarcated.During demarcation, in apparatus of the present invention base
Two pieces of speculums are set up on plinth, one piece is tested oneself for the present invention, one piece measures for autocollimator.Two pieces of speculums are positioned over one
On individual one-dimensional tilting table, tilting table angle is adjusted, read the angle value of autocollimator reflection, while read present invention measurement obtaining
The corresponding pixel count of measurement spot motion amount, using angle value divided by pixel count, can obtain calibration slope coefficient.The pixel count
The slope information that calibration coefficient obtains minute surface to be measured 12 is multiplied by, further slope is integrated and be can obtain minute surface to be measured 12
Height distributed intelligence.The Processing Algorithm of each cross concealed wire is identical, finally give minute surface to be measured 12 two-dimensional slope distribution and
Height distributed intelligence, the two-dimensional of optical element to be measured is decided by the size of two-dimensional array structure π phase boards 2.
The two-dimensional array structure π phase boards 2 that the present invention is used are for the position of the specific wavelength for semiconductor laser 1 is mutually adjusted
Device processed.As shown in Fig. 2 black square represents π phase in figure, white square represents 0 phase, its product for the structure of two-dimensional array structure π phase boards 2
Raw far-field diffraction pattern is visited as shown in figure 3, can obtain each of which cross concealed wire by suitable image processing algorithm in CCD
The unique positions coordinate surveyed on device.Preferably using projected outline's method, specific steps include above-mentioned image processing algorithm：To measurement light
Spot is projected in vertical both direction, to obtain its contour curve, because spot center is cross concealed wire, therefore both direction
Projection centered on a minimum curve shape, by the way that hot spot must be measured by the center minimum point for determining contour curve
Particular location.The present invention can also be aided in during with arithmetic of subpixel on the basis of projected outline's method, further to improve
The resolution ratio of detection means.Arithmetic of subpixel is, using the gray value information of pixel, to determine the specific position of image edge pixels
Put, position edge more accurate, marginal position determines to be realized using existing interpolation algorithm or matrix algorithm.When only with
Projected outline's method not auxiliary pixel close classification when be only capable of navigating to a pixel, if with reference to can be navigated to after pixel subdivision method
0.1 pixel.
When needed, by adjusting the structure or software algorithm of two-dimensional array structure π phase boards 2, two dimension of the invention is long
Journey surface shape detection apparatus can also be used for one-dimensional measurement.Wherein, the adjustment in structure refers to by blocking two-dimensional array structure π phase
The part phase structure of plate 2, makes it only stay the phase structure of a unit；Adjustment on software refers to by its part by software
The measuring beam shielding that the phase structure of unit is produced, makes it only stay the measuring beam of a unit, so as to realize high accuracy one
Dimension scanning survey
Fig. 4 is for the standard reflection mirror of 1nm enters using 2 couples of peak-to-valley value PV of two-dimensional array structure π phase boards of the invention
The test result that row one-dimensional scanning is obtained.Standard mirror factory testing result PV is 1.09nm, and RMS is 0.22nm；Using this hair
The bright result for carrying out one-dimensional scanning is PV1.03nm, RMS0.29nm.This testing result explanation present invention is with high longitudinal direction point
Resolution and accuracy of detection.
Realize that the method that two-dimentional long-range profile is detected comprises the following steps using detection means of the invention：
Step S1, first, by the light beam of 1 outgoing of semiconductor laser one, so that the light beam passes through two-dimensional array structure π
Phase-plate 2 incides Amici prism 3, and pentagonal prism 4 is incided after the light splitting of Amici prism 3, is incided after being reflected through pentagonal prism 4
Minute surface to be measured 12, and after be reflected back pentagonal prism 4 through minute surface to be measured 12, again through pentagonal prism 4 reflect after sequentially pass through light splitting
Prism 3, lens 5 and right-angle prism 6,7,8,9,10 reach ccd detector 11, and measurement hot spot is formed on ccd detector 11.
Then, determine that measurement hot spot is visited in CCD with the method that pixel subdivision method is combined using projected outline's method or projected outline's method
The position surveyed on device 11；
Step S2, guide rail is constantly mobile along minute surface to be measured 12, and often a mobile guide rail then repeats a hyposynchronization
Rapid S1, to obtain measuring corresponding sports amount of the hot spot on ccd detector 11；And
Step S3, the slope coefficient that the amount of exercise for measuring hot spot is multiplied by demarcation is obtained the slope distribution of minute surface to be measured 12,
And the height distribution of minute surface to be measured 12 is obtained by being integrated to slope.
Explanation is needed, when high precision test is carried out, ambient windstream and temperature drift need to have been controlled, because working as ring
When border temperature is raised and lowered or has air-flow, the atmospheric turbulance for causing can introduce air refraction graded, make measurement light path
Change, so as to produce influence to measurement result.
In sum, compared with prior art, the present invention has following features and advantage：
(1) high-precision two-dimensional scan measurement is realized, different from traditional long-range profile instrument and NOM devices, the present invention
Far field cross concealed wire array is produced using two-dimensional array structure π phase boards 2, the two-dimensional signal of optical element surface to be measured is obtained.
(2) it is applicable not only to the large scale mirror surface quality testing that synchrotron radiation is used, it is also possible to be applied to other
The speculum of type or the surface quality detection of diaphotoscope.
(3) insensitive to ambient vibration, the characteristic of pentagonal prism 4 is 90 ° of light beam steering for making incidence, when pentagonal prism 4
Attitude do not interfere with the angle of emergent light when changing yet, and the deflection angle that machinery or air-float guide rail commercial at present is produced
Less than 10 rads, so small angle will not produce influence to the characteristic of pentagonal prism 4, therefore the vibration for introducing then will not be to surveying
Amount result produces influence.
(4) high-precision reference optical element or high-precision reference wavefront are not needed.
(5) intensity of the cross concealed wire positioning produced because of use two-dimensional array structure π phase boards 2, therefore LASER Light Source
Drift about on testing result without influence, because when drifting about occurs in the light intensity of semiconductor laser 1, by the survey after cross π phase boards 2
Amount light beam light intensity also can respective change, but the cross concealed wire position at center will not change, and only its contrast can be changed, therefore half
The drift of the light intensity of conductor laser 1 will not produce influence to measurement result of the invention.
(6) because cross π phase boards 2 are only to the wavelength sensitive of light source, therefore the present invention using semiconductor except that can be swashed
Outside light device 1, it is possible to use non coherent monochromatic source.
More than record, only presently preferred embodiments of the present invention is not limited to the scope of the present invention, it is of the invention on
Stating embodiment can also make a variety of changes.What i.e. every claims and description according to the present patent application were made
Simply, equivalence changes and modification, fall within the claims of patent of the present invention.Of the invention not detailed description is
Routine techniques content.
Claims (10)
1. a kind of two-dimentional long-range profile detection means, the surface testing for realizing minute surface to be measured, it is characterised in that including monochrome
Radiant, two-dimensional array structure π phase boards, Amici prism, guide rail, the pentagonal prism being installed on guide rail, lens, right-angle prism
Module and planar array detector；
Wherein, the monochromatic light source is set to the light beam of outgoing one, and the light beam is incident through the two-dimensional array structure π phase boards
To the Amici prism, the pentagonal prism is incided after the Amici prism light splitting, entered after being reflected through the pentagonal prism
Be mapped to the minute surface to be measured, and after return the pentagonal prism through the mirror-reflection to be measured, reflected through the pentagonal prism again
After sequentially pass through the Amici prism, the lens and the right-angle prism module and reach the planar array detector, and described
Measurement hot spot is formed on planar array detector.
2. two-dimentional long-range profile detection means according to claim 1, it is characterised in that the monochromatic light source is partly to lead
Body laser or He-Ne laser.
3. two-dimentional long-range profile detection means according to claim 1, it is characterised in that described two-dimensional array structure π
Phase-plate is in yi word pattern or cross.
4. two-dimentional long-range profile detection means according to claim 1, it is characterised in that the guide rail be mechanical guide or
Air-float guide rail.
5. two-dimentional long-range profile detection means according to claim 1, it is characterised in that the lens are f- θ type lens.
6. two-dimentional long-range profile detection means according to claim 1, it is characterised in that the right-angle prism module includes
Multiple right-angle prisms.
7. two-dimentional long-range profile detection means according to claim 1, it is characterised in that the planar array detector CCD is visited
Survey device or CMOS-type detector.
8. a kind of two-dimentional long-range profile detection method, based on the two-dimentional long-range profile any one of preceding claims 1-7
Detection means is realized, it is characterised in that the method is comprised the following steps：
Step S1, first by the light beam of monochromatic light source outgoing one, so that the light beam passes through described two-dimensional array structure π
Phase-plate incides the Amici prism, the pentagonal prism is incided after the Amici prism light splitting, through the pentagonal prism
Incide the minute surface to be measured after refraction, and after return the pentagonal prism through the mirror-reflection to be measured, again through described five jiaos
The Amici prism, the lens and the right-angle prism module are sequentially passed through after refraction by prism and reach the planar array detector,
And measurement hot spot is formed on the planar array detector, it is then determined that position of the measurement hot spot on the planar array detector
Put；
Step S2, the guide rail is constantly moved along the minute surface to be measured, and often the once described guide rail of movement is then repeated
The once step S1, to obtain corresponding sports amount of the measurement hot spot on the planar array detector；And
Step S3, the slope coefficient that the amount of exercise of the measurement hot spot is multiplied by demarcation is obtained the slope point of the minute surface to be measured
Cloth, and the height distribution of the minute surface to be measured is obtained by being integrated to the slope.
9. two-dimentional long-range profile detection method according to claim 8, it is characterised in that the step 1 is taken turns by projecting
Wide method determines position of the measurement hot spot on the planar array detector.
10. two-dimentional long-range profile detection method according to claim 8, it is characterised in that the step 1 combines projection and takes turns
Wide method determines position of the measurement hot spot on the planar array detector with pixel subdivision method.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107270832A (en) * | 2017-08-04 | 2017-10-20 | 望新（上海）科技有限公司 | A kind of HUD non-spherical reflectors face type detection light path and detection method |
| CN113064286A (en) * | 2021-03-25 | 2021-07-02 | 中国科学院上海天文台 | K mirror detection device with help of pentagonal prism and installation and adjustment method thereof |
| CN114322825A (en) * | 2021-12-08 | 2022-04-12 | 中国电子科技集团公司第十一研究所 | Visual super-large-size optical plane detection device and method |
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| DE3432583A1 (en) * | 1984-09-05 | 1986-03-13 | Adolf Friedrich Prof. Dr.-Phys. 4300 Essen Fercher | Method and device for measuring surface shapes |
| CN1432790A (en) * | 2002-01-11 | 2003-07-30 | 中国科学院上海原子核研究所 | Long-range profile instrument |
| CN102175433B (en) * | 2011-02-28 | 2012-09-05 | 中国科学院光电技术研究所 | Lens center error measurement system based on interference principle |
| CN106225715A (en) * | 2016-08-02 | 2016-12-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of pentaprism scanning detection method for non-spherical reflector |
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| DE3432583A1 (en) * | 1984-09-05 | 1986-03-13 | Adolf Friedrich Prof. Dr.-Phys. 4300 Essen Fercher | Method and device for measuring surface shapes |
| CN1432790A (en) * | 2002-01-11 | 2003-07-30 | 中国科学院上海原子核研究所 | Long-range profile instrument |
| CN102175433B (en) * | 2011-02-28 | 2012-09-05 | 中国科学院光电技术研究所 | Lens center error measurement system based on interference principle |
| CN106225715A (en) * | 2016-08-02 | 2016-12-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of pentaprism scanning detection method for non-spherical reflector |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107270832A (en) * | 2017-08-04 | 2017-10-20 | 望新（上海）科技有限公司 | A kind of HUD non-spherical reflectors face type detection light path and detection method |
| CN113064286A (en) * | 2021-03-25 | 2021-07-02 | 中国科学院上海天文台 | K mirror detection device with help of pentagonal prism and installation and adjustment method thereof |
| CN114322825A (en) * | 2021-12-08 | 2022-04-12 | 中国电子科技集团公司第十一研究所 | Visual super-large-size optical plane detection device and method |
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| CN106840030B (en) | 2019-04-19 |
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