CN106840030B - A kind of two dimension long-range profile detection device and detection method - Google Patents
A kind of two dimension long-range profile detection device and detection method Download PDFInfo
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- CN106840030B CN106840030B CN201710198456.7A CN201710198456A CN106840030B CN 106840030 B CN106840030 B CN 106840030B CN 201710198456 A CN201710198456 A CN 201710198456A CN 106840030 B CN106840030 B CN 106840030B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Abstract
The present invention provides a kind of two-dimentional long-range profile detection device, including monochromatic light source, two-dimensional array structure π phase board, Amici prism, guide rail, the pentagonal prism being installed on guide rail, lens, right-angle prism module and planar array detector；The monochromatic light source is set as one light beam of outgoing, the light beam passes through the two-dimensional array structure π phase board and is incident on the Amici prism, the pentagonal prism is incident on after Amici prism light splitting, the mirror surface to be measured is incident on after pentagonal prism refraction, the pentagonal prism is returned through the mirror-reflection to be measured after and, the Amici prism, the lens and the right-angle prism module are sequentially passed through after pentagonal prism refraction again and reaches the planar array detector, and measurement hot spot is formed on the planar array detector.The present invention obtains the two-dimensional signal of optical element surface by guide rail moving sweep, realizes the quality testing of large scale optical element surface and the detection of high-precision bending mechanism.
Description
Technical field
The present invention relates to large scale high-precision optical element surface testing, in particular to a kind of two-dimentional long-range profile detection dress
It sets and detection method.
Background technique
Large scale optical surface using increasingly extensive, especially in synchrotron radiation light beam line engineering and high power laser system
Grazing incidence mirror be representative.The mirror length used on synchrotron radiation applications light beam line can achieve 1500mm, and
Surface quality requirements are very high, and face type has from plane, cylinder to toroid.Since the wavelength of X-ray is extremely short, current optics material
Material can only operate in glancing incidence state, it is necessary to could arrive higher reflectivity using very big incidence angle (close to 90 °), therefore same
Walk the general strip of optical element of radiation.
Synchrotron radiation is mostly hard X ray wave band using wave band with optical element, because wavelength is very short, to table mass surface
It is required that high.Third generation Synchrotron Radiation to the surface slope error common demands of optical element less than 1 μ ard (RMS), most
High request is less than 100nrad (RMS).The optical element working ability of such high-precision large scale depends critically upon detectability,
Therefore high-precision large scale optical detection problem is always grinding for international synchrotron radiation light educational circles and optical element manufacture field
Study carefully hot spot.
Meridian direction radius of curvature is often larger when synchrotron radiation optics element collimation or focusing, very usually using several kilometers
To more greatly, meridian direction press-bending mostly at this moment is carried out to long reflecting mirror using bending mechanism, forms the shapes such as cylinder or elliptic cylinder.
Bend direction be divided into it is upward, lateral and three kinds downward, that is, bend when reflecting mirror mirror surface direction may there are three types of orientation.Bullodozer
The detection of structure needs to test the radius of curvature that press-bending system extrudes at various pressures and whether face shape slope error is up to standard, surveys
Examination process needs the various parameters of constantly adjustment bending mechanism, needs to detect entire reflecting mirror again after having adjusted every time,
Until obtaining preferably bending radius of curvature and slope error distribution.
Existing surface testing means mainly have long-range profile instrument (Long trace profiler-LTP), interferometer to spell
It connects, the splicing of Shack-Hartmann (Shark-Hartmann) Wavefront sensor, interferometer oblique feeding method, arc measurement instrument of receiving
(Nanometer Optical component Measuring Machine-NOM) etc..LTP and NOM is that one-dimensional scanning is surveyed
Amount is distinguished as LTP using the various optical paths of designed, designed and obtains the slope information on surface to be measured, and detection accuracy can reach 0.2 μ
ard；NOM replaces the part optical path in LTP with autocollimator, is similarly obtained the slope information on surface to be measured, and detection accuracy can
Reach 50nrad.
Interferometer splicing and Shark-Hartmann joining method are all made of joining method and obtain large scale optical element
Surface information.What interferometer obtained is apparent height distributed intelligence, and slope distribution can be obtained by carrying out differential to elevation information
It arrives；What Shark-Hartmann joining method obtained is the slope information of optical element surface, by that can obtain to result integral
To apparent height distributed intelligence.Joining method depends critically upon the kinematic accuracy of the stitching algorithm and motion guide rail that use, simultaneously
Every step scanning needs 80% or more area to be overlapped when splicing, therefore detection efficiency is low.
The method of interferometer oblique incidence is to carry out oblique incidence to surface to be measured using bigbore lasing area shape interferometer, with
Expand area to be measured.This method measurement accuracy depends on the precision of interferometer itself, simultaneously because interferometer standard mirror when detection
With interferometer apart from excessive, it is unable to get high detection accuracy.Because cost is relatively low for this method, detection time is shorter, is chiefly used in work
In factory's production detection, for detecting the not high reflecting mirror of surface slope error requirements.
Existing surface testing method there are the problem of mainly have, one-dimensional scanning detection method such as LTP and NOM, testing result
The surface information that can only reflect a line on mirror surface is unable to get two-dimensional surface information.And one of bending mechanism detection
Important indicator --- surface deflections, whether mirror surface is distorted when reflection is bent, this technical requirements is to surface information
Carrying out two-dimensional measurement can just obtain.The reasons in structure of interferometer and Shack-Hartmann method due to equipment of itself, it is difficult to examine
Bending mechanism is surveyed, the lesser non-planar optical element of surface curvature radius is not suitable for yet.
Summary of the invention
The present invention is to overcome the shortcomings of above-mentioned existing detection technique, provides a kind of two-dimentional long-range profile detection device and detection
Method realizes large scale optical element surface quality to obtain the two-dimensional signal of optical element surface by guide rail moving sweep
Detection and the detection of high-precision bending mechanism.
To achieve the goals above, one aspect of the present invention provides a kind of two-dimentional long-range profile detection device, for realizing to
Survey the surface testing of mirror surface comprising monochromatic light source, Amici prism, guide rail, is installed in and leads two-dimensional array structure π phase board
Pentagonal prism, lens, right-angle prism module and planar array detector on rail；
Wherein, the monochromatic light source is set as one light beam of outgoing, which passes through the two-dimensional array structure π phase board
It is incident on the Amici prism, the pentagonal prism is incident on after Amici prism light splitting, is reflected through the pentagonal prism
After be incident on the mirror surface to be measured, and after through the mirror-reflection to be measured return the pentagonal prism, again through the pentagonal prism
The Amici prism is sequentially passed through after refraction, the lens and the right-angle prism module reach the planar array detector, and
Measurement hot spot is formed on the planar array detector.
Preferably, the monochromatic light source is semiconductor laser or He-Ne laser.
Preferably, the two-dimensional array structure π phase board is in "-" type or cross.
Preferably, the guide rail is mechanical guide or air-float guide rail.
Preferably, the lens are f- θ type lens.
Preferably, the right-angle prism module includes multiple right-angle prisms.
Preferably, the planar array detector ccd detector or CMOS type detector.
Another aspect of the present invention provides a kind of two-dimentional long-range profile detection method, and this method utilizes two-dimentional long-range face above-mentioned
Shape detection device realizes the surface testing of mirror surface to be measured, comprising the following steps:
Step S1 is emitted a light beam by the monochromatic light source first, so that the light beam passes through the two-dimensional array knot
Structure π phase board is incident on the Amici prism, the pentagonal prism is incident on after Amici prism light splitting, through described five jiaos
Be incident on the mirror surface to be measured after refraction by prism, and after through the mirror-reflection to be measured return the pentagonal prism, again through described
The Amici prism, the lens and the right-angle prism module are sequentially passed through after pentagonal prism refraction reaches the face battle array detection
Device, and measurement hot spot is formed on the planar array detector, then determine the measurement hot spot on the planar array detector
Position；
Step S2 constantly moves the guide rail along the mirror surface to be measured, and once the guide rail then repeats for every movement
The primary step S1 is executed, to obtain corresponding sports amount of the measurement hot spot on the planar array detector；And
The amount of exercise of the measurement hot spot is obtained the slope of the mirror surface to be measured multiplied by the slope coefficient of calibration by step S3
Distribution, and the height by being integrated to obtain the mirror surface to be measured to the slope is distributed.
Preferably, the step 1 determines position of the measurement hot spot on the planar array detector by projected outline's method
It sets.
Preferably, the step 1 determines the measurement hot spot in the face battle array in conjunction with projected outline's method and pixel subdivision method
Position on detector.
By using above-mentioned technical proposal, compared with prior art, the present invention has the following advantages:
Firstly, the present invention using multiple two-dimensional array structure π phase boards generate far field cross concealed wire array, it is available to
The two-dimensional signal of mirror surface is surveyed, so as to fast implement the two-dimension high-precision scanning survey to large scale high-precision mirror surface to be measured,
To obtain the two-dimensional slope distribution and height distributed intelligence on surface to be measured；Secondly, the characteristic for the pentagonal prism that the present invention uses is
Make incident 90 ° of light beam steering, the angle of emergent light, therefore this hair will not be influenced when the posture of pentagonal prism changes
Bright insensitive to ambient vibration, measurement accuracy is little by influence of ambient vibration；Again, the present invention has self-correction ability, is not required to
Additionally to increase reference beam, pentagonal prism caused by guide rail or ambient vibration can be eliminated and shake brought error；Finally,
By blocking the part phase structure of two-dimensional array structure π phase board, it is set only to stay the phase structure of a unit, or pass through
The measuring beam that software generates the phase structure of other units shields, it is made only to stay the measuring beam of a unit, Ke Yishi
Existing High Precision One Dimensional scanning survey.
Detailed description of the invention
Fig. 1 is the optical texture schematic diagram of the two-dimentional long-range profile detection device of the present invention；
Fig. 2 is the structural schematic diagram of the two-dimensional array structure π phase board in Fig. 1；
Fig. 3 is the far field effect picture of the two-dimensional array structure π phase board in Fig. 1；
Fig. 4 is the high-precision result curve figure that the two-dimentional π phase board in the present invention obtain when one-dimensional scanning.
Specific embodiment
1-4 with reference to the accompanying drawing provides presently preferred embodiments of the present invention, and is described in detail, and makes to be better understood when
Function of the invention, feature.
As shown in Figure 1, two-dimentional long-range profile detection device of the invention includes semiconductor laser 1, two-dimensional array structure π
Phase board 2, Amici prism 3, guide rail (not shown), the pentagonal prism 4 being installed on guide rail, lens 5, right-angle prism module and
Ccd detector 11.Wherein, ccd detector 11 using CMOS type detector or other can also have high-resolution face battle array to visit
Survey device；Semiconductor laser 1 can also use He-Ne laser 1 or other monochromatic light sources；Two-dimensional array structure π phase board 2
Line-styled, " ten " font or other types of geometry can be used；Lens 5 are for the specific of semiconductor laser 1
The f- θ type lens 5 of wavelength optimization；Right-angle prism module includes multiple right-angle prisms 6,7,8,9,10；Guide rail can use
High-precision air-float guide rail, can also be using common mechanical guide rail, because the machining accuracy of pentagonal prism 4 enough bows to it
It is insensitive to face upward kinematic error.
The light path principle of above-mentioned detection device are as follows: the collimated laser beam that semiconductor laser 1 is emitted is irradiated to two-dimensional array
It is the hot spot of cross concealed wire on structure π phase board 2, centered on far-field intensity distribution (see Fig. 3)；Then the light beam is through being divided rib
After mirror 3, wherein a branch of be irradiated on the pentagonal prism 4 being mounted on guide rail, mirror to be measured is irradiated to after transferring via pentagonal prism 4
On face 12, and the turnover of pentagonal prism 4 is again passed by after mirror surface 12 to be measured reflection and is irradiated on Amici prism 3, then by saturating
After mirror 5, then through the arrival ccd detector 11 of right-angle prism 6,7,8,9,10.When guide rail drives pentagonal prism 4 to sweep along mirror surface 12 to be measured
When retouching measurement, measurement hot spot constantly moves on ccd detector 11, by measuring measurement hot spot on ccd detector 11
Amount of exercise, and the slope distribution of mirror surface 12 to be measured is can be obtained into multiplied by the slope coefficient of calibration in amount of exercise, then by slope
Integral obtains the height distribution on surface to be measured.
Aforementioned slope coefficient can be demarcated by existing equipment or technology, such as using ultra-precise autocollimator, double
Frequency laser interferometer etc. can also generate minute angle using micro-displacement apparatus and be demarcated.When calibration, in apparatus of the present invention base
Two pieces of reflecting mirrors are added on plinth, one piece is surveyed certainly for the present invention, and one piece measures for autocollimator.Two pieces of reflecting mirrors are placed in one
On a one-dimensional tilting table, tilting table angle is adjusted, reads the angle value of autocollimator reflection, present invention measurement is read simultaneously and obtains
The corresponding pixel number of measurement spot motion amount calibration slope coefficient can be obtained using angle value divided by pixel number.The pixel number
The slope information of mirror surface 12 to be measured is obtained multiplied by calibration coefficient, further carrying out integral to slope can be obtained mirror surface 12 to be measured
Height distributed intelligence.The Processing Algorithm of each cross concealed wire is identical, finally obtain mirror surface 12 to be measured two-dimensional slope distribution and
Height distributed intelligence, the two-dimensional of optical element to be measured are decided by the size of two-dimensional array structure π phase board 2.
The two-dimensional array structure π phase board 2 that the present invention uses mutually is adjusted for the position of the specific wavelength for semiconductor laser 1
Device processed.For the structure of two-dimensional array structure π phase board 2 as shown in Fig. 2, black square indicates π phases in figure, white square indicates 0 phase, produces
Raw far-field diffraction pattern by each of which available cross concealed wire of suitable image processing algorithm in CCD as shown in figure 3, visited
Survey the unique positions coordinate on device.Above-mentioned image processing algorithm preferably uses projected outline's method, and specific steps include: to measurement light
Spot projects in vertical both direction, to obtain its contour curve, since spot center is cross concealed wire, both direction
Projection centered on a minimum curve shape, by determining that the center minimum point of contour curve can must measure hot spot
Specific location.When the present invention can also assist on the basis of projected outline's method with arithmetic of subpixel, to further increase
The resolution ratio of detection device.Arithmetic of subpixel is the gray value information using pixel, determines the specific position of image edge pixels
It sets, keeps edge positioning more acurrate, marginal position determines that existing interpolation algorithm or matrix algorithm, which can be used, to be realized.When only with
Projected outline's method not auxiliary pixel close classification when be only capable of navigating to a pixel, if in conjunction with that can be navigated to after pixel subdivision method
0.1 pixel.
When needed, by adjusting the structure or software algorithm of two-dimensional array structure π phase board 2, two dimension of the invention is long
Journey surface shape detection apparatus can also be used for one-dimensional measurement.Wherein, the adjustment in structure refers to by blocking π phases of two-dimensional array structure
The part phase structure of plate 2, makes it only stay the phase structure of a unit；Adjustment on software refers to its part through software
The measuring beam shielding that the phase structure of unit generates, makes it only stay the measuring beam of a unit, to realize high-precision one
Tie up scanning survey
Fig. 4 be using two-dimensional array structure π phase board 2 of the invention to a peak-to-valley value PV be 1nm standard reflection mirror into
The test result that row one-dimensional scanning obtains.The standard mirror factory testing result PV is 1.09nm, RMS 0.22nm；Utilize this hair
The bright result for carrying out one-dimensional scanning is PV1.03nm, RMS0.29nm.This testing result illustrates that the present invention has high longitudinal direction point
Resolution and detection accuracy.
Included the following steps: using the method that detection device of the invention realizes two-dimentional long-range profile detection
Step S1 a, firstly, light beam is emitted by semiconductor laser 1, so that the light beam passes through two-dimensional array structure π
Phase-plate 2 is incident on Amici prism 3, is incident on pentagonal prism 4 after the light splitting of Amici prism 3, is incident on after the refraction of pentagonal prism 4
Mirror surface 12 to be measured, and after through mirror surface 12 to be measured be reflected back pentagonal prism 4, sequentially pass through light splitting after the refraction of pentagonal prism 4 again
Prism 3, lens 5 and right-angle prism 6,7,8,9,10 reach ccd detector 11, and measurement hot spot is formed on ccd detector 11.
Then, determine that measurement hot spot is visited in CCD using the method that projected outline's method or projected outline's method are combined with pixel subdivision method
Survey the position on device 11；
Step S2 constantly moves guide rail along mirror surface 12 to be measured, and guide rail of every movement then repeats a hyposynchronization
Rapid S1, to obtain corresponding sports amount of the measurement hot spot on ccd detector 11；And
The amount of exercise for measuring hot spot is obtained the slope distribution of mirror surface 12 to be measured multiplied by the slope coefficient of calibration by step S3,
And the height by being integrated to obtain mirror surface 12 to be measured to slope is distributed.
It should be noted that need to be controlled ambient windstream and temperature drift, when carrying out high-precision detection because working as ring
When border temperature is raised and lowered or has air-flow, caused atmospheric turbulance can introduce air refraction change of gradient, make to measure light path
It changes, to be had an impact to measurement result.
In conclusion compared with prior art, the present invention have the advantages that following features and:
(1) high-precision two-dimensional scanning measurement is realized, different from traditional long-range profile instrument and NOM device, the present invention
Far field cross concealed wire array is generated using two-dimensional array structure π phase board 2, obtains the two-dimensional signal of optical element surface to be measured.
(2) it is applicable not only to the large scale mirror surface quality testing that synchrotron radiation uses, also can be applied to other
The reflecting mirror of type or the surface quality detection of diaphotoscope.
(3) insensitive to ambient vibration, the characteristic of pentagonal prism 4 is to make incident 90 ° of light beam steering, when pentagonal prism 4
Posture will not influence the angle of emergent light when changing, and the deflection angle that machinery or air-float guide rail commercial at present generates
Less than 10 rads, this one small angle will not have an impact the characteristic of pentagonal prism 4, therefore the vibration introduced then will not be to survey
Amount result has an impact.
(4) high-precision reference optical element or high-precision reference wavefront are not needed.
(5) because of the cross concealed wire positioning generated using two-dimensional array structure π phase board 2, the intensity of laser light source
It drifts about on testing result without influence, because passing through the survey after cross π phase board 2 when 1 light intensity of semiconductor laser is drifted about
Amount light beam light intensity may also change accordingly, but the cross concealed wire position at center will not change, and only its contrast can change, therefore half
The drift of 1 light intensity of conductor laser will not have an impact measurement result of the invention.
(6) since cross π phase board 2 is only sensitive to the wavelength of light source, the present invention swashs in addition to semiconductor can be used
Outside light device 1, it is possible to use non coherent monochromatic source.
It records above, only presently preferred embodiments of the present invention, the range being not intended to limit the invention, of the invention is upper
Stating embodiment can also make a variety of changes.Made by i.e. all claims applied according to the present invention and description
Simply, equivalent changes and modifications fall within the claims of the invention patent.The not detailed description of the present invention is
Routine techniques content.
Claims (10)
1. a kind of two dimension long-range profile detection device, for realizing the surface testing of mirror surface to be measured, which is characterized in that including monochrome
Radiant, two-dimensional array structure π phase board, Amici prism, guide rail, the pentagonal prism being installed on guide rail, lens, right-angle prism
Module and planar array detector；
Wherein, the monochromatic light source is set as one light beam of outgoing, and it is incident which passes through the two-dimensional array structure π phase board
To the Amici prism, it is incident on the pentagonal prism after Amici prism light splitting, is entered after pentagonal prism refraction
Be mapped to the mirror surface to be measured, and after through the mirror-reflection to be measured return the pentagonal prism, reflected again through the pentagonal prism
After sequentially pass through the Amici prism, the lens and the right-angle prism module reach the planar array detector, and described
Measurement hot spot is formed on planar array detector.
2. two dimension long-range profile detection device according to claim 1, which is characterized in that the monochromatic light source is partly to lead
Body laser or He-Ne laser.
3. two dimension long-range profile detection device according to claim 1, which is characterized in that described two-dimensional array structure π
Phase-plate is in "-" type or cross.
4. two dimension long-range profile detection device according to claim 1, which is characterized in that the guide rail be mechanical guide or
Air-float guide rail.
5. two dimension long-range profile detection device according to claim 1, which is characterized in that the lens are f- θ type lens.
6. two dimension long-range profile detection device according to claim 1, which is characterized in that the right-angle prism module includes
Multiple right-angle prisms.
7. two dimension long-range profile detection device according to claim 1, which is characterized in that the planar array detector CCD is visited
Survey device or CMOS type detector.
8. a kind of two dimension long-range profile detection method, based on two-dimentional long-range profile described in any one of preceding claims 1-7
Detection device is realized, which is characterized in that method includes the following steps:
Step S1 is emitted a light beam by the monochromatic light source first, so that the light beam passes through described two-dimensional array structure π
Phase-plate is incident on the Amici prism, the pentagonal prism is incident on after Amici prism light splitting, through the pentagonal prism
Be incident on the mirror surface to be measured after refraction, and after through the mirror-reflection to be measured return the pentagonal prism, again through described five jiaos
The Amici prism, the lens and the right-angle prism module are sequentially passed through after refraction by prism reaches the planar array detector,
And measurement hot spot is formed on the planar array detector, then determine position of the measurement hot spot on the planar array detector
It sets；
Step S2 constantly moves the guide rail along the mirror surface to be measured, and once the guide rail then repeats for every movement
The primary step S1, to obtain corresponding sports amount of the measurement hot spot on the planar array detector；And
The amount of exercise of the measurement hot spot is obtained the slope point of the mirror surface to be measured multiplied by the slope coefficient of calibration by step S3
Cloth, and the height by being integrated to obtain the mirror surface to be measured to the slope is distributed.
9. two dimension long-range profile detection method according to claim 8, which is characterized in that the step S1 passes through projection wheel
Wide method determines position of the measurement hot spot on the planar array detector.
10. two dimension long-range profile detection method according to claim 8, which is characterized in that the step S1 combines projection
Consistency profiles and pixel subdivision method determine position of the measurement hot spot on the planar array detector.
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| CN107270832A (en) * | 2017-08-04 | 2017-10-20 | 望新（上海）科技有限公司 | A kind of HUD non-spherical reflectors face type detection light path and detection method |
| CN113064286A (en) * | 2021-03-25 | 2021-07-02 | 中国科学院上海天文台 | K mirror detection device with help of pentagonal prism and installation and adjustment method thereof |
| CN114322825A (en) * | 2021-12-08 | 2022-04-12 | 中国电子科技集团公司第十一研究所 | Visual super-large-size optical plane detection device and method |
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|---|---|---|---|---|
| DE3432583A1 (en) * | 1984-09-05 | 1986-03-13 | Adolf Friedrich Prof. Dr.-Phys. 4300 Essen Fercher | Method and device for measuring surface shapes |
| CN1432790A (en) * | 2002-01-11 | 2003-07-30 | 中国科学院上海原子核研究所 | Long-range profile instrument |
| CN102175433B (en) * | 2011-02-28 | 2012-09-05 | 中国科学院光电技术研究所 | Lens center error measurement system based on interference principle |
| CN106225715A (en) * | 2016-08-02 | 2016-12-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of pentaprism scanning detection method for non-spherical reflector |
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- 2017-03-29 CN CN201710198456.7A patent/CN106840030B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3432583A1 (en) * | 1984-09-05 | 1986-03-13 | Adolf Friedrich Prof. Dr.-Phys. 4300 Essen Fercher | Method and device for measuring surface shapes |
| CN1432790A (en) * | 2002-01-11 | 2003-07-30 | 中国科学院上海原子核研究所 | Long-range profile instrument |
| CN102175433B (en) * | 2011-02-28 | 2012-09-05 | 中国科学院光电技术研究所 | Lens center error measurement system based on interference principle |
| CN106225715A (en) * | 2016-08-02 | 2016-12-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of pentaprism scanning detection method for non-spherical reflector |
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