CN106767545A - A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method - Google Patents
A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method Download PDFInfo
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- CN106767545A CN106767545A CN201710043906.5A CN201710043906A CN106767545A CN 106767545 A CN106767545 A CN 106767545A CN 201710043906 A CN201710043906 A CN 201710043906A CN 106767545 A CN106767545 A CN 106767545A
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- light
- lens
- spectroscope
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- speculum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of high accuracy high-space resolution angel measuring instrument and angle measurement method.Measuring instrument of the invention includes：Light source, produces locational space and all uniform light field in angle space；Light bar, confine optical beam bore；Camera lens, for the light beam that focused subbeams and collection are turned back；Speculum to be measured；Spectroscope, for that will turn back, light beam reflexes to detector plane；Detector array, the image for recording light beam pattern of being turned back on front focal plane；Data processing display module.Structure of the present invention can solve the problem that and measured at sample surfaces that existing optical angle measurement instrument (such as autocollimator etc.) is faced the big problem of spot size, further, this equipment can be scanned for long-range profile, so as to obtain the face graphic data of testing sample.Meanwhile, position or defocus error of the system to sample, lens aberration are insensitive, are adapted to the high-acruracy survey of a small range.
Description
Technical field
Angular measure the present invention relates to be based on optical instrument, can expand for mirror surface testing, more particularly to a kind of
The angel measuring instrument and angle measurement method of high accuracy high-space resolution.
Background technology
High-precision angle measurement technique has very important application value in many engineering fields, such as high-accuracy sets
It is standby to need high-precision attitude to debug, especially in synchrotron radiation field, can be obtained by the gradient measurement to surface and integration
Obtain surface face shape of element etc..Angle-measuring equipment based on optical means has contactless, and the huge of workpiece/system features is not influenceed
Advantage, and it is subject to extensive use.Main angle-measuring equipment includes electronics autocollimator and the angular surveying side based on laser interference
Method.Because they scan sample, in order to ensure enough noises when positioning precision, this scanning light beam using collimated light beam
The sampling spot size of spot size sample surfaces in other words is general than larger.For example, the optical head structure in long-range profile instrument
The angle measurement method of laser interference is used, because the size of hot spot of sampling is 1-2mm, therefore to each sampled point,
The angle of measurement is the average result in the hot spot illumination region.
In brief, if the horizontal cycle of face deformation is less than 1mm (fast to become), this change is to be accurately
's.From for frequency angle, the surface information of higher frequency cannot be measured.But these information are commented the quality of mirror shape
Estimate, and the Performance Evaluation of its system applied is all extremely important.
The content of the invention
For technical problem present in prior art, it is an object of the invention to provide a kind of high accuracy high-space resolution
Angel measuring instrument and angle measurement method.Optical system framework of the invention includes：
Light source 11, produces locational space and all uniform light field in angle space.Implementation：(1) for incoherent light source, such as
LED, using optical fiber or the even light of other modes, produces uniform spatial distribution, the light that the angle of emergence is evenly distributed；Light is limited using aperture
The area in source.(2) coherent source, is transmitted and exported by single-mode polarization maintaining fiber.
Light bar 12, confine optical beam bore；
Lens 14, for focused subbeams, produce small sampling hot spot, and collect the light turned back from speculum to be measured 15
Beam；
Speculum to be measured 15, position can arbitrarily adjust, can be in the imaging surface of lens 14, and now test sample hot spot is most
It is small, therefore spatial resolution is higher.Can also can only change spatial resolution in other focal planes, not influence measuring accuracy；
Spectroscope 13, separates illumination path and detection light path, i.e. illuminating bundle transmission, light beam of turning back reflexes to probe unit
Plane；
Detector cells 16 are a detector array, on the front focal plane of lens, the figure for recording light beam of turning back
Picture；
Data handling component 17, the image according to record is calculated the relative position of hot spot caused by mirror angle change to be measured
Move, so based on this it is counter push away mirror angle to be measured change, and final measurement is shown.
Functional realiey mechanism：
The divergent rays that light source sends first by position fix light bar, then go-no-go illuminating bundle through point
Lens are reached after light microscopic, by the focusing of lens, and mirror surface to be measured is irradiated.The position of speculum to be measured is for convergent point
Distance, determine sampling hot spot size.
The light beam turned back by speculum, through lens after, the mirror that is split reflection, eventually arrive at detector plane and by photoelectricity
It is converted into electronic image.Before and after mirror angle to be measured change, displacement (the Δ x, Δ of hot spot in detector detection image
Y), the angle change information (Δ x/2f, Δ y/2f) of test speculum can be obtained, wherein, f is the focal length of lens.
Compared with prior art, the positive effect of the present invention is：
The structure can solve the problem that and measured at sample surfaces that existing optical angle measurement instrument (such as autocollimator etc.) is faced
The big problem of spot size, further, this equipment can be scanned for long-range profile, so as to obtain the face figurate number of testing sample
According to.Meanwhile, position or defocus error of the system to sample, lens aberration are insensitive, and the high accuracy for being adapted to a small range is surveyed
Amount.
As shown in figure 4, the present invention has spatial resolving power higher, the spot size 0.1mm that example is used, sampling step
0.1mm long, can substantially observe the angular distribution on this small spatial scale.
Brief description of the drawings
Fig. 1 is angel measuring instrument of the invention；
Wherein, 10- scannings optical head, 11- light sources, 12- light bars, 13- spectroscopes, 14- lens, 15- speculums to be measured,
16- probe units, 17- data handling components, 18- illuminating rays, 19- turns back light beam；
Fig. 2 is the structure chart of light source of the present invention；
A () is a kind of coherent source system, wherein, 21- lasers, 22- coupled lens, 23- optical fiber；
B () is a kind of incoherent light origin system, wherein, 24- light emitting diodes, smallcolumn diaphragm -25；
Fig. 3 is profile instrument scanning system；
Wherein, the high-accuracy air supporting translation stage of 31- objects under test, 32-, 33- large caliber reflecting mirrors, 34- electronics autocollimators；
Fig. 4 is profile instrument measurement result；
A the surface slope curve of () measurement, (b) curve is integrated result.
Specific embodiment
The present invention is explained in further detail below in conjunction with the accompanying drawings：
The angel measuring instrument of high accuracy high-space resolution of the invention is as shown in figure 1, its structure includes：Light source 11, produces
The all uniform light field of locational space and angle space；Light bar 12, confine optical beam bore；Lens 14, for focused subbeams and receipts
The light beam that collection is turned back；Speculum to be measured；Spectroscope 13, for that will turn back, light beam reflexes to detector plane；Detector array 16,
Image for recording light beam pattern of being turned back on front focal plane；Data handling component 17, the image according to record is calculated to be treated
Hot spot relative displacement caused by mirror angle change is surveyed, and then based on this anti-angle change for pushing away speculum to be measured 15, and to final
Measurement result is shown；Barycenter change can be calculated using methods such as centroid method, related algorithms, the present invention is used and is based on barycenter
Algorithm.
Displacement and angle algorithm：Record the image A, B before and after mirror angle change to be measured.Counted respectively using centroid method
The barycenter of hot spot is calculated, that is, is calculated
Wherein Ii,jIt is the light signal strength of (i, j) pixel, xi,jAnd yi,jIt is the space coordinates of (i, j) pixel,
M and N are the horizontal and vertical number of pixels of image for data processing.Method is calculated barycenter in image A and image B successively
Respectively (xA,yA) and (xB,yB), the angle that may finally obtain test speculum is：
Wherein, f is the focal length of lens.
The concrete structure of light source of the invention 11 is as shown in Fig. 2 implementation：(1) coherent source such as Fig. 2 (a) is used, including
Laser 21, coupled lens 22 and optical fiber 23, directly by laser 21 optically coupling to optical fiber in, by Optical Fiber Transmission and defeated
Go out, it is ensured that optical fiber long enough, on the premise of end face is smooth, it is possible to produce this light field.(2) using incoherent light source such as Fig. 2
(b), including light emitting diode 24 and smallcolumn diaphragm 25.Or optical fiber or the even light of other modes are utilized, uniform spatial distribution is produced,
The light that the angle of emergence is evenly distributed；Using the area of aperture limiting light source.
Application example：
(1) angular surveying (in principle, only angle measurement)
As it was previously stated, the rotational angle of measurement target mirror
(2) surface shape measurement (in application, angle measurement is integrated so as to obtain)
Reference picture 3, the high-spatial resolution long range profile detection system includes：Object under test 31, high-accuracy air supporting translation stage
32nd, scanning optical head 10, large caliber reflecting mirror 33, electronics autocollimator 34.
Scanning optical head 10 is as shown in Figure 3.Scanning optical head 10 and large caliber reflecting mirror 33 are with high-accuracy air supporting translation stage
32 motions.It is scanned through the inside light channel structure of optical head 10 and forms the scanning object under test 31 of focus on light beam 35, the weight of light beam 36 of turning back
It is detected after the new optical head 10 into scanning.Electronics autocollimator 34 is fixed on outside scanning optical head 10, electronics autocollimator
34 measure light beams of its transmitting through the angle change after the reflection of large caliber reflecting mirror 33, so as to obtain scanning the rotation of optical head 10
Angular error βOH.The light-beam position change of detector measurement can be expressed as in optical head：
xsamp=2x0, samp+2f(βsut+βOH)
During scanning process, constant Const=2x0, sampThe change of the surface slope of object under test 31 will not be reflected.
Finally, the gradient change that can obtain the surface of object under test 11 is turned to：
Fig. 4 gives a gradient measurement result for sample, and scanning step is 0.1mm.Fig. 4 (a) is the surface of measurement
Gradient curve, Fig. 4 (b) is that difference calculating is carried out to the curve of Fig. 4 (a), and SS difference is 40nrad rms.
Claims (10)
1. a kind of high accuracy high-space resolution angel measuring instrument, it is characterised in that including light source (11), spectroscope (13), lens
(14), detector cells (16) and data handling component (17), wherein,
The light of light source (11) outgoing enters lens (14) through spectroscope (13)；
Lens (14), for will focus on speculum to be measured (15) through the incident light of spectroscope (13), and collect from reflection to be measured
Mirror (15) is turned back light beam；
Spectroscope (13), for the light beam of turning back to be reflexed into detector cells (16)；
Detector cells (16), the image for recording the light beam of turning back；
Data handling component (17) is connected with detector cells (16), for being calculated speculum to be measured according to the image of record
(15) angle change.
2. high accuracy high-space resolution angel measuring instrument as claimed in claim 1, it is characterised in that the light source (11) is energy
Enough produce the light source of locational space and all uniform light field in angle space.
3. high accuracy high-space resolution angel measuring instrument as claimed in claim 1 or 2, it is characterised in that the light source (11)
It is a coherent source system, it includes laser (21), coupled lens (22) and optical fiber (23)；Wherein, laser (21) output
The coupled lens of laser (22) incide optical fiber (23), the light through optical fiber (23) outgoing enters lens through spectroscope (13)
(14)。
4. high accuracy high-space resolution angel measuring instrument as claimed in claim 1 or 2, it is characterised in that the light source (11)
It is an incoherent light origin system, it includes light emitting diode (24) and smallcolumn diaphragm (25)；Wherein, light emitting diode (24) output
Laser incide spectroscope (13) through smallcolumn diaphragm (25).
5. high accuracy high-space resolution angel measuring instrument as claimed in claim 1, it is characterised in that light source (11) and spectroscope
(13) light bar (12) is provided between.
6. high accuracy high-space resolution angel measuring instrument as claimed in claim 1, it is characterised in that detector cells (16) position
In on the front focal plane of lens (14)；Speculum (15) to be measured is on the imaging surface of lens (14) or on focal plane.
7. a kind of high accuracy high-space resolution angle measurement method, its step is：
1) light of light source (11) outgoing is entered into lens (14) through spectroscope (13)；
2) lens (14) will focus on speculum to be measured (15) through the incident light of spectroscope (13), and will be from speculum to be measured (15)
Light beam of turning back incides spectroscope (13)；
3) light beam of turning back is reflexed to detector cells (16) by spectroscope (13)；
4) image of the light beam of turning back is sent to data handling component (17) by detector cells (16)；
5) angle of speculum (15) to be measured is adjusted, detector cells (16) regenerate speculum to be measured (15) and turn back light beam
Image is simultaneously sent to data handling component (17)；
6) image that data handling component (17) is received twice is calculated the angle change of speculum to be measured (15).
8. method as claimed in claim 7, it is characterised in that the light source (11) is can to produce locational space and angle space
The light source of all uniform light field.
9. method as claimed in claim 7, it is characterised in that be provided with a light bar between light source (11) and spectroscope (13)
(12)。
10. method as claimed in claim 7, it is characterised in that front focal plane of the detector cells (16) positioned at lens (14)
On；Speculum (15) to be measured is on the imaging surface of lens (14) or on focal plane.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643057A (en) * | 2017-11-07 | 2018-01-30 | 中航国画（上海）激光显示科技有限公司 | A kind of lens assembling vertical detection device and its detection method |
| CN108226902A (en) * | 2018-02-28 | 2018-06-29 | 北京瑞特森传感科技有限公司 | A kind of face battle array lidar measurement system |
| CN108692729A (en) * | 2018-05-04 | 2018-10-23 | 北京空间飞行器总体设计部 | A kind of space non-cooperative target Relative Navigation covariance adaptive correction filtering method |
| CN109489691A (en) * | 2018-12-07 | 2019-03-19 | 银河航天(北京)通信技术有限公司 | Optical calibrating system and scaling method |
| CN109668512A (en) * | 2018-12-21 | 2019-04-23 | 清华大学深圳研究生院 | The beam directing mechanisms and alignment methods for the laser displacement sensor being arranged symmetrically |
| CN109974583A (en) * | 2019-04-11 | 2019-07-05 | 南京信息工程大学 | A kind of non-contact optical element surface surface shape measurement device and method |
| CN110702036A (en) * | 2019-08-27 | 2020-01-17 | 广东工业大学 | Complex beam angle sensor and small-sized aspheric surface morphology detection method |
| CN111354500A (en) * | 2020-03-16 | 2020-06-30 | 中国科学院高能物理研究所 | Synchrotron radiation X-ray double-reflector |
| CN113238374A (en) * | 2020-09-30 | 2021-08-10 | 南京航空航天大学 | Design method of high-power laser collimation system |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643057A (en) * | 2017-11-07 | 2018-01-30 | 中航国画（上海）激光显示科技有限公司 | A kind of lens assembling vertical detection device and its detection method |
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| CN109489691A (en) * | 2018-12-07 | 2019-03-19 | 银河航天(北京)通信技术有限公司 | Optical calibrating system and scaling method |
| CN109668512B (en) * | 2018-12-21 | 2024-06-04 | 清华大学深圳研究生院 | Light beam alignment device and alignment method for symmetrically arranged laser displacement sensors |
| CN109668512A (en) * | 2018-12-21 | 2019-04-23 | 清华大学深圳研究生院 | The beam directing mechanisms and alignment methods for the laser displacement sensor being arranged symmetrically |
| CN109974583A (en) * | 2019-04-11 | 2019-07-05 | 南京信息工程大学 | A kind of non-contact optical element surface surface shape measurement device and method |
| CN109974583B (en) * | 2019-04-11 | 2024-03-26 | 南京信息工程大学 | Non-contact optical element surface shape measuring device and method |
| CN110702036A (en) * | 2019-08-27 | 2020-01-17 | 广东工业大学 | Complex beam angle sensor and small-sized aspheric surface morphology detection method |
| CN111354500A (en) * | 2020-03-16 | 2020-06-30 | 中国科学院高能物理研究所 | Synchrotron radiation X-ray double-reflector |
| CN111354500B (en) * | 2020-03-16 | 2022-03-22 | 中国科学院高能物理研究所 | Synchrotron radiation X-ray double-reflector |
| CN113238374A (en) * | 2020-09-30 | 2021-08-10 | 南京航空航天大学 | Design method of high-power laser collimation system |
| CN113238374B (en) * | 2020-09-30 | 2022-08-05 | 南京航空航天大学 | Design method of high-power laser collimation system |
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Application publication date: 20170531 |