CN105758336B - Reflective laser differential confocal curvature radius measurement method and device - Google Patents
Reflective laser differential confocal curvature radius measurement method and device Download PDFInfo
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- CN105758336B CN105758336B CN201610307770.XA CN201610307770A CN105758336B CN 105758336 B CN105758336 B CN 105758336B CN 201610307770 A CN201610307770 A CN 201610307770A CN 105758336 B CN105758336 B CN 105758336B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
Abstract
The invention belongs to technical field of optical precision measurement, are related to a kind of reflective laser differential confocal curvature radius measurement method and device.This method accurately corresponds to this characteristic with system focus using laser differential confocal Intensity response curve zero crossing, and mobile measured lens is focused object focal point and its rear surface vertex measurement and obtains measured lens position difference L1, then mobile mirror is focused object focal point and its rear surface vertex measurement and obtains reflector position difference L2, utilize the measured lens position difference L measured1With reflector position difference L2Tested curvature radius value is acquired, realizes radius of curvature high-acruracy survey.Compared with existing measuring method, this method can not only realize concave mirror radius of curvature measurement, moreover it can be used to which convex mirror radius of curvature measurement has many advantages, such as that high certainty of measurement, optical path are short and environment resistant interference performance is strong.
Description
Technical field
The present invention relates to a kind of reflective laser differential confocal curvature radius measurement method and devices, belong to optical element ginseng
Number Technology of Precision Measurement field.
Technical background
Spherical optics element is widely used in astronomical telescopic system, high-resolution earth observation systems and laser-produced fusion system
Etc. in Research on Optical System field, radius of curvature is one of most basic and most important parameter of spherical optics element, is directly affected
This kind of optical system performance and image quality, it is necessary to accurately be detected to it.
At present, in order to realize the high-acruracy survey of radius of curvature, many different measuring methods have been proposed in researcher,
It can mainly divide two categories below：
The first kind is contact measurement method.This kind of measuring method is by horizontal metroscope gauge head directly to measured lens element surface
Position measurement is carried out, is then fitted and acquires tested curvature radius, typical instrument has spherometer, three coordinate measuring machine etc..
Not only measurement accuracy is relatively low for this kind of measuring method, but also can damage detected element surface, it is impossible to be used in radius of curvature high-precision is surveyed
Amount.
Second class is contactless measurement.This kind of measuring method is mainly using interference fringe as test foundation, such as newton
Ring interferometry, Taibo interferometry, Fizeau interference method.For example, 1980《SPIE Vol.192-Intefferometrv》Middle hair
Table《Differential technique for accurately measuring the radius ofcurvature
oflong radius concave optical surfaces》In one text, author proposes a kind of multiple reflections formula radius of curvature
Measuring method is accurately positioned the measured lens position of different order of reflection using interference fringe, utilizes different reflections time
Measured lens position difference acquires tested curvature radius during number.1992《Optical Engineering》In deliver
《Radius measurementby interferometry》In one text, author is using interference fringe directly to measured lens opal
Point and confocal point carry out accurate fixed-focus, then using horizontal metroscope measure at 2 points between position difference, realize radius of curvature measurement.Phase
Than first kind measuring method, this kind of measuring method measurement accuracy is higher, and does not damage measured lens surface, but due to interference fringe by
The such environmental effects such as air-flow, temperature and shake are serious, thus extremely harsh requirement is proposed to environmental condition.
In view of the above-mentioned problems, the present invention proposes a kind of reflective laser differential confocal curvature radius measurement method, this method
Using differential confocal Intensity response curve zero crossing to respectively to system focus and object lens rear surface vertex be focused measurement come
Tested curvature radius value is obtained, realizes radius of curvature high-acruracy survey.Compared with existing measuring method, this method has not only
Available for can concave surface curvature radius value high-acruracy survey, while can be additionally used in convex surface curvature radius high-acruracy survey, have
The advantages that optical path is short, high certainty of measurement and environment resistant interference performance are strong.
Invention content
The purpose of the present invention is to solve the high-acruracy survey problems of aspherical elements radius of curvature, it is proposed that a kind of reflection
Formula laser differential confocal curvature radius measurement method and device.This method is using differential confocal Intensity response curve zero crossing to dividing
It is other that measurement is focused to system focus and object lens rear surface vertex to obtain tested curvature radius value, realize that radius of curvature is high
Precision measure.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of reflective laser differential confocal curvature radius measuring device of the present invention, including point light source, spectroscope, collimation
Lens, annular pupil, object lens, object lens rear surface vertex, tested concave mirror, tested convex mirror, speculum front surface, speculum,
Differential confocal detection system, it is burnt before light intensity detector, it is burnt before pin hole, Amici prism, defocused pin hole and defocused light intensity detector,
Optical path is：Point light source is opened, the light being emitted by point light source forms collimated light beam after spectroscope and collimation lens and irradiates
On object lens；Formation convergent beam focuses on measured surface after collimated light beam penetrates object lens；Measured surface reflects light beam, reflection
Light beam back is reversely reflected into differential confocal detection system, differential confocal through the mirror that is split after object lens and collimation lens again
Axial intensity information is obtained differential confocal Intensity response curve, the accurate counterpart in zero crossing position by detection system after processing
Mirror foci position；Mobile measured lens, it will focal beam is reflected in object lens rear surface apex, by object lens rear surface vertex by light beam
Reflection, reflected light beam is reflected into differential confocal detection system through the mirror that is split after object lens and collimation lens again, poor
Axial intensity information is obtained differential confocal Intensity response curve by dynamic confocal detection system after processing, and zero crossing position is accurate
Corresponding object lens rear surface vertex position；Change measured lens into speculum, convergent beam focuses on mirror surface, and speculum is by light
Beam reflects, and the reflected reflected light beam of light beam is reversely reflected into again through the mirror that is split after object lens and collimation lens
Axial intensity information is obtained differential confocal Intensity response song by differential confocal detection system, differential confocal detection system after processing
Line, zero crossing position accurately correspond to objective focus positions again；Mobile mirror, it will focal beam is reflected in object lens rear surface
Apex is reflected light beam by object lens rear surface vertex, and reflected light beam is split after penetrating object lens and collimation lens again
Mirror is reflected into differential confocal detection system, and axial intensity information is obtained differential confocal by differential confocal detection system after processing
Intensity response curve, zero crossing position accurately correspond to object lens rear surface vertex position again.
Reflective laser differential confocal curvature radius measurement method of the present invention, can use it for aspherical elements curvature
The high-precision detection of radius, specific measuring process are as follows：
Step 1: measured lens is placed in the optical path after object lens, adjustment measured lens makes it coaxial with measuring beam；
Step 2: measured lens will be moved along optical axis direction, when measured lens is located near object focal point, mobile measured lens into
Row scanning, measures the confocal Intensity response curve of system differential by differential confocal detection system, utilizes differential confocal response curve mistake
Zero accurately determines object focal point, and measured lens position is z to record at this timeA；
Step 3: continue to move measured lens along optical axis direction, after measuring beam focuses on object lens after measured lens reflects
During surface vertices position, mobile measured lens is scanned, and the confocal Intensity response of system differential is measured by differential confocal detection system
Curve accurately determines object lens rear surface vertex using differential confocal response curve zero crossing, and measured lens position is z to record at this timeB；
Step 4: removal measured lens, speculum is placed in the optical path after object lens, adjustment speculum makes itself and measurement
Light beam is coaxial；
Step 5: along optical axis direction mobile mirror, when speculum is located near object focal point, mobile mirror carries out
Scanning, measures the confocal Intensity response curve of system differential by differential confocal detection system, utilizes differential confocal response curve zero passage
Point accurately determines object focal point, and reflector position is z to record at this timeC；
Step 6: continue along optical axis direction mobile mirror, after measuring beam focuses on object lens after speculum reflects
During surface vertices position, mobile mirror is scanned, and the confocal Intensity response of system differential is measured by differential confocal detection system
Curve accurately determines object lens rear surface vertex using differential confocal response curve zero crossing, and reflector position is z to record at this timeD；
Step 7: the measured lens position z by recordAAnd zBDifference is denoted as L1, reflector position zCAnd zDDifference is denoted as L2；
Step 8: utilize measured lens position difference L1With reflector position difference L2, acquired with reference to geometric optical imaging theory
Measured lens surface curvature radius R；
Reflective laser differential confocal curvature radius measurement method and device of the present invention, can also increase in the optical path
Annular pupil is added to be modulated measuring beam, forms annular beam, wave differs the influence to measuring beam when reducing fixed-focus, carries
High measurement accuracy.
Reflective laser differential confocal curvature radius measurement method and device of the present invention, can also send out point light source
The light gone out carries out intensity modulation, and the differential confocal for detecting to obtain modulated system by the light intensity sensor in differential confocal measurement system is rung
Induction signal obtains differential confocal response curve after the modulated signal is demodulated, improves the fixed-focus sensitivity of system.
Advantageous effect
Present invention comparison prior art has following innovative point：
A kind of reflective laser differential confocal curvature radius measurement method and device are proposed, this method utilizes differential confocal
Intensity response curve zero crossing obtains measured lens song to being focused measurement to system focus and object lens rear surface vertex respectively
Rate radius value realizes radius of curvature high-acruracy survey.
Present invention comparison prior art has following remarkable advantage：
1) present invention reflects convergence measurement light beam, shortens optical path, reduces survey over long distances, so as to shorten
Rail length, reduces equipment instrument, systematic survey speed and efficiency is improved, more suitable in Practical Project；
2) in this measuring method, with reference to differential confocal precision fixed-focus technology, using axial Intensity response signal as evaluation
Scale compresses measured lens depth of focus using reflection measurement light path, has higher fixed-focus sensitivity and Focus accuracy；
3) present invention can be also used for larger radius of curvature value convex mirror and concave surface mirror curvature half using reflectometry technique
Diameter high-accuracy degree measures；
4) non-interfering differential confocal fixed-focus technology is employed, it is suppressed that common-mode signal is interfered, and has cut down air agitation etc.
Influence of the environmental disturbances to measurement accuracy, significantly improves system environment resistant interference performance and system reliability；
Description of the drawings
Fig. 1 is the schematic diagram of the differential radius of curvature measurement system of reflective laser of the present invention；
Fig. 2 is the schematic diagram of reflective laser differential confocal curvature radius measuring system embodiment of the present invention；
Fig. 3 is the schematic diagram of reflective laser differential confocal curvature radius measuring system embodiment of the present invention；
Fig. 4 is the differential confocal response curve that the present invention is detected by differential confocal measurement system；
Wherein：1- point light sources, 2- spectroscopes, 3- collimation lenses, 4- annular pupils, 5- object lens, 6- rear surfaces vertex, 7- are surveyed
Measure that light beam, 8- is tested convex mirror, 9- is tested concave mirror, light intensity sensor, 13- before pin hole, 12- cokes before 10- speculums, 11- cokes
Differential confocal detection system, 14- Amici prisms, the defocused pin holes of 15-, the defocused light intensity detectors of 16-, 17- point light sources generating means,
The defocused detector image acquisition of detector image capture card, 22- before 18- lasers, 19- optical fiber, 20- master control systems, 21- cokes
Card, 23- electromechanical controlling devices, 24- rectilinear translations guide rail, 25- adjustment frames.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the reflective laser differential confocal curvature measuring system schematic diagram of the present invention, including：Point light source 1, light splitting
Mirror 2, collimation lens 3, annular pupil 4, object lens 5, rear surface vertex 6, measuring beam 7, tested convex mirror 8, tested concave mirror 9,
Speculum 10, it is burnt before pin hole 11, it is burnt before light intensity sensor 12, differential confocal detection system 13, Amici prism 14, defocused pin hole
15th, defocused light intensity detector 16.
Embodiment 1
As shown in Fig. 2, the embodiment of the present invention is based on reflective laser differential confocal curvature radius measuring system shown in FIG. 1
Schematic diagram can also include：Detector figure before point light source generating means 17, laser 18, optical fiber 19, master control system 20, coke
As capture card 21, defocused detector image capture card 22, electromechanical controlling device 23, rectilinear translation guide rail 24, adjustment frame 25；Its
In, point light source 1 can be made of laser 18 and optical fiber 19；Differential confocal detection system 13 can be by light intensity detector before coke
12nd, pin hole 11, Amici prism 14, defocused pin hole 15 and defocused light intensity detector 16 are formed before coke；
As shown in Fig. 2, realize tested convex surface mirror curvature half using reflective laser differential confocal curvature radius measurement method
Diameter high-accuracy degree measure process be：The light that point light source 1 is emitted forms collimated light beam and is irradiated after spectroscope 2 and collimation lens 3
On object lens 5.The collimated light beam is through 5 post-concentration of object lens into measuring beam 7, and measuring beam 7 is in 5 focal point of object lens by tested convex
Face mirror 8 reflects, and the reflected light mirror 2 that is again passed through being split after object lens 5 and collimation lens 3 is reflected on Amici prism 14.
Light path is divided into two-way by Amici prism 14, and the prism 14 that is split all the way reflects, and 11 position of pin hole is sensed by light intensity before focusing on coke
Device 12 receives, and another way is focused at defocused 15 position of pin hole through Amici prism 14 and is received by light intensity sensor 16.By master control system
System 20 controls rectilinear translation guide rail 24 that tested convex mirror 8 is driven to be moved along optical axis direction by electromechanical controlling device 23, is visited before burnt
It surveys device image pick-up card 21 and the collected light intensity signal of camera is transferred to master control system by defocused detector image capture card 22
20 normalizeds form the confocal Intensity response curve of system differential, and zero crossing position is accurately where corresponding tested convex mirror 8
Position zA.Continue to translate tested convex mirror 8, when measuring beam 7 focuses on 5 rear surface top of object lens after tested convex mirror 8 reflects
During 6 position of point, mobile tested convex mirror 8 is scanned, and measuring the confocal light intensity of system differential by differential confocal detection system 13 rings
Answer curve, using differential confocal response curve zero crossing accurately determine 5 object lens rear surface vertex of object lens, 6 position, record at this time by
It is z to survey convex mirror positionB.Removal is tested convex mirror 8, speculum 10 is placed in the measuring beam 7 after object lens 5, along optical axis side
To mobile mirror 10, when speculum 10 is located at 5 near focal point of object lens, mobile mirror 10 is scanned, by differential confocal
Detection system 13 measures the confocal Intensity response curve of system differential, and object lens are accurately determined using differential confocal response curve zero crossing
5 focuses, reflector position 10 is z to record at this timeC.Continue along optical axis direction mobile mirror 10, when measuring beam 7 is through speculum
When focusing on 56 position of rear surface vertex of object lens after 10 reflections, mobile mirror 10 is scanned, by differential confocal detection system
13 measure the confocal Intensity response curve of system differential, and 5 rear surface of object lens is accurately determined using differential confocal response curve zero crossing
6 position of vertex, 10 position of speculum is z to record at this timeD.By the 8 position z of tested convex mirror of recordAAnd zBDifference is denoted as L1, instead
Penetrate 10 position z of mirrorCAnd zDDifference is denoted as L2, utilize tested 8 position difference L of convex mirror1With 10 position difference L of speculum2, with reference to several
What optical imagery theory acquires tested 8 surface curvature radius R of convex mirror；
For measuring radius of curvature R ≈+10000mm and be tested convex mirror 8, when 5 vertex focal length of object lens is about 1045mm, measure
When bore is 100mm, reflective laser differential confocal curvature radius measuring device is as shown in Fig. 2, its measuring process is：
Step 1: tested convex mirror 8 is placed in the measuring beam 7 after object lens 5, adjusting tested convex mirror 8 makes itself and survey
It is coaxial to measure light beam 7；
Step 2: tested convex mirror 8 will be moved along optical axis direction, when tested convex mirror 8 is located at 5 near focal point of object lens,
Mobile tested convex mirror 8 is scanned, and is distinguished by detector image capture card 21 before coke and defocused detector image capture card 22
16 axial intensity information of detector 12 and defocused detector before acquisition is burnt, after 20 differential processing of master control system as shown in Figure 4
The confocal Intensity response curve of system differential accurately determines 5 focus of object lens using differential confocal response curve zero crossing, and record is at this time
Tested convex mirror position is zA=-0.0149mm；
Step 3: continue to move tested convex mirror 8 along optical axis direction, when measuring beam 7 gathers after tested convex mirror 8 reflects
At 56 position of rear surface vertex of object lens, mobile tested convex mirror 8 is scanned coke, by 21 He of detector image capture card before coke
Defocused detector image capture card 22 acquires 16 axial intensity information of detector 12 and defocused detector before coke respectively, through master control system
It unites the confocal Intensity response curve of system differential as shown in Figure 4 after 20 differential processing, utilizes differential confocal response curve zero crossing
Accurately determining 5 rear surface vertex of object lens, 6 position, it is z that record is tested 8 position of convex mirror at this timeB=495.0209mm；
Step 4: removal is tested convex mirror 8, speculum is placed in the measuring beam 7 after object lens 5, adjusts speculum 10
Make it coaxial with measuring beam 7；
Step 5: along optical axis direction mobile mirror 10, when speculum 10 is located at 5 near focal point of object lens, mobile reflection
Mirror 10 is scanned, and burnt preceding detection is acquired respectively by detector image capture card 21 before coke and defocused detector image capture card 22
16 axial intensity information of device 12 and defocused detector, system differential as shown in Figure 4 is confocal after 20 differential processing of master control system
Intensity response curve accurately determines 5 focus of object lens using differential confocal response curve zero crossing, records 10 position of speculum at this time
For zC=0.0748mm；
Step 6: continue along optical axis direction mobile mirror 10, when measuring beam 7 focuses on object after the reflection of speculum 10
During 56 position of rear surface vertex of mirror, mobile mirror 10 is scanned, by detector image capture card 21 before coke and defocused detection
Device image pick-up card 22 acquires 16 axial intensity information of detector 12 and defocused detector before coke respectively, differential through master control system 20
The confocal Intensity response curve of system differential as shown in Figure 4 after processing, is accurately determined using differential confocal response curve zero crossing
5 rear surface vertex of object lens, 6 position, 10 position of speculum is z to record at this timeD=522.3206mm；
Step 7: the 8 position z of tested convex mirror by recordAAnd zBDifference is denoted as L1, 10 position z of speculumCAnd zDDifference is remembered
For L2；
Step 8: utilize 8 position difference L of tested convex mirror1=zB-zA10 position difference of=495.0358mm and speculum
L2=zC-zA=522.2458mm, with reference to geometric optical imaging theory acquire tested 8 radius of curvature R of convex mirror=+
10003.28mm；
This embodiment realizes the radius of curvature measurement to being tested convex mirror 5 by a series of measure.In measurement process
In, accurate fixed-focus is carried out to 5 focus of object lens and 6 position of rear surface vertex using differential confocal measurement method, high certainty of measurement resists
Environmental disturbances ability is strong.
Embodiment 2
For the tested concave mirror 9 for measuring radius of curvature R ≈ -5000mm, when 5 vertex focal length of object lens is about 1045mm, survey
When measuring bore as 100mm, reflective laser differential confocal curvature radius measuring device is as shown in figure 3, its measuring process is：
Step 1: tested concave mirror 9 is placed in the measuring beam 7 after object lens 5, adjusting tested concave mirror 9 makes itself and survey
It is coaxial to measure light beam 7；
Step 2: tested concave mirror 9 will be moved along optical axis direction, when tested concave mirror 9 is located at 5 near focal point of object lens,
Mobile tested concave mirror 9 is scanned, and is distinguished by detector image capture card 21 before coke and defocused detector image capture card 22
16 axial intensity information of detector 12 and defocused detector before acquisition is burnt, after 20 differential processing of master control system as shown in Figure 4
The confocal Intensity response curve of system differential accurately determines 5 focus of object lens using differential confocal response curve zero crossing, and record is at this time
Tested convex mirror position is zA=-0.9068mm；
Step 3: continue to move tested concave mirror 9 along optical axis direction, when measuring beam 7 gathers after tested concave mirror 9 reflects
At 56 position of rear surface vertex of object lens, mobile tested concave mirror 9 is scanned coke, by 21 He of detector image capture card before coke
Defocused detector image capture card 22 acquires 16 axial intensity information of detector 12 and defocused detector before coke respectively, through master control system
It unites the confocal Intensity response curve of system differential as shown in Figure 4 after 20 differential processing, utilizes differential confocal response curve zero crossing
Accurately determining 5 rear surface vertex of object lens, 6 position, it is z that record is tested 9 position of concave mirror at this timeB=-4535.6534mm；
Step 4: removal is tested concave mirror 9, speculum is placed in the measuring beam 7 after object lens 5, adjusts speculum 10
Make it coaxial with measuring beam 7；
Step 5: along optical axis direction mobile mirror 10, when speculum 10 is located at 5 near focal point of object lens, mobile reflection
Mirror 10 is scanned, and burnt preceding detection is acquired respectively by detector image capture card 21 before coke and defocused detector image capture card 22
16 axial intensity information of device 12 and defocused detector, system differential as shown in Figure 4 is confocal after 20 differential processing of master control system
Intensity response curve accurately determines 5 focus of object lens using differential confocal response curve zero crossing, records 10 position of speculum at this time
For zC=0.0748mm；
Step 6: continue along optical axis direction mobile mirror 10, when measuring beam 7 focuses on object after the reflection of speculum 10
During 56 position of rear surface vertex of mirror, mobile mirror 10 is scanned, by detector image capture card 21 before coke and defocused detection
Device image pick-up card 22 acquires 16 axial intensity information of detector 12 and defocused detector before coke respectively, differential through master control system 20
The confocal Intensity response curve of system differential as shown in Figure 4 after processing, is accurately determined using differential confocal response curve zero crossing
5 rear surface vertex position 6 of object lens, 10 position of speculum is z to record at this timeD=522.3206mm；
Step 7: the 9 position z of tested concave mirror by recordAAnd zBDifference is denoted as L1, 10 position z of speculumCAnd zDDifference is remembered
For L2；
Step 8: utilize 9 position difference L of tested concave mirror1=zB-zA10 alternate position spike of=- 4534.7466mm and speculum
Value L2=zC-zA=522.2458mm, with reference to geometric optical imaging theory acquire tested 9 radius of curvature R of concave mirror=-
5003.0752mm。
By above example it is found that the laser differential confocal curvature radius measurement method and device of the present invention will be reflective
Optical path and laser differential confocal fixed-focus technology are combined, and are measured length and are less than tested curvature radius, thus are shortened
Optical path reduces measurement distance, is particularly suitable for promoting and applying in engineering.
The specific embodiment of the present invention is described, but these explanations cannot be understood to limit above in association with attached drawing
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (5)
1. reflective laser differential confocal curvature radius measuring device, it is characterised in that：Including point light source (1), spectroscope (2),
Collimation lens (3), annular pupil (4), object lens (5), rear surface vertex (6), measuring beam (7), as the tested convex of measured lens
Light intensity sensor (12), differential confocal are visited before pin hole (11), coke before face mirror (8) or tested concave mirror (9) or speculum (10), coke
Examining system (13), Amici prism (14), defocused pin hole (15), defocused light intensity detector (16), optical path are：Opening point light
Source (1) forms collimated light beam by point light source (1) emergent light through spectroscope (2) and collimation lens (3), and object lens (5) are by collimated light beam
Measuring beam (7) is converged to focus near measured lens；Measured lens is moved along optical axis to reflect measuring beam (7), is reflected
Light beam be reversely reflected into differential confocal detection system (13) through object lens (5) and collimation lens (3) mirror (2) that is split, it is poor
Axial intensity information is obtained differential confocal Intensity response curve, zero crossing position by dynamic confocal detection system (13) after processing
Accurate corresponding object lens (5) focus；Measured lens is continued to move to, measuring beam (7) is reflected at object lens (5) rear surface vertex (6),
Measuring beam (7) is reflected into differential confocal detection system (13), differential confocal detection system (13) by rear surface vertex (6)
Axial intensity information is obtained into differential confocal Intensity response curve after processing, after zero crossing position accurately corresponds to object lens (5)
Surface vertices (6) position；Using tested concave mirror (8) or tested concave mirror (9) as measured lens, obtained using above-mentioned focusing
Object lens (5) focus and the alternate position spike of rear surface vertex (6), then using speculum (10) as measured lens, utilize above-mentioned focusing
Object lens (5) focus and the alternate position spike of rear surface vertex (6) are obtained, it is theoretical according to the two alternate position spikes and geometric optical imaging, i.e.,
The radius of curvature of tested concave mirror (8) or tested concave mirror (9) can be calculated.
2. reflective laser differential confocal curvature radius measuring device according to claim 1, it is characterised in that：It further includes
Point light source generating means (17), laser (18), optical fiber (19), master control system (20), it is burnt before detector image capture card (21),
Defocused detector image capture card (22), electromechanical controlling device (23), rectilinear translation guide rail (24), adjustment frame (25)；Its relationship
For：Point light source generating means (17) can be formed by the light beam that laser (18) are sent out through optical fiber (19) output；Detector before coke
Image pick-up card (21) and defocused detector image capture card (22) are respectively used to light intensity detector before coke (12) and defocused light
Strong detector (16) collected intensity signal is transferred to master control system (20) processing and obtains the confocal Intensity response song of system differential
Line；Adjustment frame (25) is on rectilinear translation guide rail (24), for adjusting tested convex mirror (8) or tested concave mirror (9).
3. reflective laser differential confocal curvature radius measuring device according to claim 1, it is characterised in that：It can be by it
It is detected for the high-precision of spherical optics element curvature radius, specific measuring process is as follows：
Step 1: tested convex mirror (8) or tested concave mirror (9) are placed in the measuring beam (7) after object lens (5), quilt is adjusted
Surveying convex mirror (8) or tested concave mirror (9) makes it coaxial with measuring beam (7)；
Step 2: tested convex mirror (8) or tested concave mirror (9) will be moved along optical axis direction, when tested convex mirror (8) or it is tested
When concave mirror (9) is positioned at object lens (5) near focal point, mobile tested convex mirror (8) or tested concave mirror (9) are scanned, by coke
Preceding detector image capture card (21) and defocused detector image capture card (22) acquire before coke detector (12) and defocused respectively
Detector (16) axial intensity information obtains the confocal Intensity response curve of system differential after master control system (20) differential processing,
Object lens (5) focus is accurately determined using differential confocal response curve zero crossing, and record is tested convex mirror (8) or tested concave surface at this time
Mirror (9) position is zA；
Step 3: continue to move tested convex mirror (8) or concave mirror (9) along optical axis direction, when measuring beam (7) is through tested convex surface
When focusing on object lens (5) rear surface vertex (6) position after mirror (8) or tested concave mirror (9) reflection, mobile tested convex mirror (8)
Or tested concave mirror (9) is scanned, by detector image capture card (21) before coke and defocused detector image capture card (22)
Detector (12) and defocused detector (16) axial intensity information before acquisition is burnt respectively, after master control system (20) differential processing
To the confocal Intensity response curve of system differential, object lens (5) rear surface top is accurately determined using differential confocal response curve zero crossing
Point (6) position, it is z to record be tested convex mirror (8) or tested concave mirror (9) position at this time againB；
Step 4: removal is tested convex mirror (8) or tested concave mirror (9), measurement light speculum (10) being placed in after object lens (5)
In beam (7), adjustment speculum (10) makes it coaxial with measuring beam (7)；
Step 5: along optical axis direction mobile mirror (10), it is mobile anti-when speculum (10) is positioned at object lens (5) near focal point
It penetrates mirror (10) to be scanned, be acquired respectively by detector image capture card (21) before coke and defocused detector image capture card (22)
Detector (12) and defocused detector (16) axial intensity information, System level gray correlation is obtained after master control system (20) differential processing before coke
Confocal Intensity response curve is moved, accurately determines object lens (5) focus using differential confocal response curve zero crossing, record reflects at this time
Mirror (10) position is zC；
Step 6: continue along optical axis direction mobile mirror (10), when measuring beam (7) focuses on after speculum (10) reflection
During object lens (5) rear surface vertex (6) position, mobile mirror (10) is scanned, by detector image capture card (21) before coke
Acquire detector (12) and defocused detector (16) axial intensity information before coke respectively with defocused detector image capture card (22),
The confocal Intensity response curve of system differential is obtained after master control system (20) differential processing, utilizes differential confocal response curve zero passage
Point accurately determines object lens (5) rear surface vertex (6) position, and speculum (10) position is z to record at this timeD；
Step 7: by the tested convex mirror (8) of record or tested concave mirror (9) position zAAnd zBDifference is denoted as L1, speculum (10)
Position zCAnd zDDifference is denoted as L2；
Step 8: utilize tested convex mirror (8) or tested concave mirror (9) position difference L1With speculum (10) position difference L2, knot
It closes geometric optical imaging theory and acquires tested convex mirror (8) or tested concave mirror (9) radius of curvature R.
4. reflective laser differential confocal curvature radius measurement method, it is characterised in that measuring process is as follows：
Step 1: tested convex mirror (8) or tested concave mirror (9) are placed in the measuring beam (7) after object lens (5), quilt is adjusted
Surveying convex mirror (8) or tested concave mirror (9) makes it coaxial with measuring beam (7)；
Step 2: tested convex mirror (8) or tested concave mirror (9) will be moved along optical axis direction, when tested convex mirror (8) or it is tested
When concave mirror (9) is positioned at object lens (5) near focal point, mobile tested convex mirror (8) or tested concave mirror (9) are scanned, by difference
Dynamic confocal detection system (13) measures the confocal Intensity response curve of system differential, accurate using differential confocal response curve zero crossing
Determine object lens (5) focus, record is tested convex mirror (8) at this time or tested concave mirror (9) position is zA；
Step 3: continue to move tested convex mirror (8) or tested concave mirror (9) along optical axis direction, when measuring beam (7) is through tested
When focusing on object lens (5) rear surface vertex (6) position after convex mirror (8) or tested concave mirror (9) reflection, mobile tested convex mirror
(8) or tested concave mirror (9) is scanned, and it is bent to measure the confocal Intensity response of system differential by differential confocal detection system (13)
Line accurately determines object lens (5) rear surface vertex (6) position using differential confocal response curve zero crossing, and record is tested convex at this time
Face mirror (8) or tested concave mirror (9) position are zB；
Step 4: removal is tested convex mirror (8) or tested concave mirror (9), measurement light speculum (10) being placed in after object lens (5)
In beam (7), adjustment speculum (10) makes it coaxial with measuring beam (7)；
Step 5: along optical axis direction mobile mirror (10), it is mobile anti-when speculum (10) is positioned at object lens (5) near focal point
It penetrates mirror (10) to be scanned, the confocal Intensity response curve of system differential is measured by differential confocal detection system (13), utilization is differential
Confocal response curve zero crossing accurately determines object lens (5) focus, and speculum (10) position is z to record at this timeC；
Step 6: continue along optical axis direction mobile mirror (10), when measuring beam (7) focuses on after speculum (10) reflection
During object lens (5) rear surface vertex (6) position, mobile mirror (10) is scanned, and is measured by differential confocal detection system (13)
The confocal Intensity response curve of system differential accurately determines object lens (5) rear surface vertex using differential confocal response curve zero crossing
(6), speculum (10) position is z to record at this timeD；
Step 7: by the tested convex mirror (8) of record or tested concave mirror (9) position zAAnd zBDifference is denoted as L1, speculum (10)
Position zCAnd zDDifference is denoted as L2；
Step 8: utilize tested convex mirror (8) or tested concave mirror (9) position difference L1With speculum (10) position difference L2, knot
It closes geometric optical imaging theory and acquires tested convex mirror (8) or tested concave mirror (9) surface curvature radius R.
5. reflective laser differential confocal curvature radius measurement method according to claim 4, it is characterised in that：In light path
Middle increase annular pupil is modulated measuring beam, forms annular beam, wave aberration is to the shadow of measuring beam when reducing fixed-focus
It rings, improves measurement accuracy.
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| CN109269443B (en) * | 2018-11-13 | 2019-09-24 | 北京理工大学 | A kind of laser differential confocal curvature radius measurement method and device |
| CN109931874B (en) * | 2019-04-04 | 2020-08-11 | 北京理工大学 | Laser differential confocal precision measurement method for fit clearance of spherical inertial element |
| CN109990982B (en) * | 2019-04-19 | 2020-06-16 | 北京理工大学 | Reflection type transverse subtraction differential confocal focal length measuring method |
| CN110455221B (en) * | 2019-09-11 | 2024-04-09 | 大连鉴影光学科技有限公司 | Optical path structure and equipment for rapidly measuring curvature radius of optical lens |
| CN114441531B (en) * | 2022-01-21 | 2024-03-12 | 匠岭科技(上海)有限公司 | Automatic focusing method with image recognition, device, computer and storage medium |
| CN115143904B (en) * | 2022-06-17 | 2023-08-11 | 北京理工大学 | Method and device for quickly and relatively measuring double-differential confocal spherical curvature radius |
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