CN209147932U - A kind of laser imaging range-measurement system - Google Patents

A kind of laser imaging range-measurement system Download PDF

Info

Publication number
CN209147932U
CN209147932U CN201821910659.0U CN201821910659U CN209147932U CN 209147932 U CN209147932 U CN 209147932U CN 201821910659 U CN201821910659 U CN 201821910659U CN 209147932 U CN209147932 U CN 209147932U
Authority
CN
China
Prior art keywords
laser
imaging
lens
lens group
measurement system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201821910659.0U
Other languages
Chinese (zh)
Inventor
李星辉
陈瑞铭
倪凯
白蛟
王晓浩
周倩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Graduate School Tsinghua University
Original Assignee
Shenzhen Graduate School Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Graduate School Tsinghua University filed Critical Shenzhen Graduate School Tsinghua University
Priority to CN201821910659.0U priority Critical patent/CN209147932U/en
Application granted granted Critical
Publication of CN209147932U publication Critical patent/CN209147932U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model relates to a kind of laser imaging range-measurement systems, including laser, the first lens, the first imaging lens group, the second imaging lens group and the detector for shoot laser, the laser forms hot spot by first lens and on the surface of determinand, the first imaging lens group and the second imaging lens group are used to convert mutually perpendicular polarised light for the scattering light that the hot spot is formed, and the photosignal that the polarised light converts is fed back to the laser by the detector.The utility model is imaged by the polarization laser to two mutually perpendicular directions, is converted and is collected and surveyed, improve the contrast of image, eliminate influence of the mirror-reflection to measurement process caused by determinand surface imperfection, according to the Spot detection pattern of hot spot, the moving distance for calculating imaging luminous point, improves the precision and stability of measurement.

Description

A kind of laser imaging range-measurement system
Technical field
The utility model relates to laser displacement and technical field of distance measurement more particularly to a kind of laser imaging ranging systems System.
Background technique
With the continuous development of manufacturing, the requirement to on-line checking is also increasingly improved, to by stability, logical Improved with property and interchangeability etc., reduce cost, laser displacement and range measurement have high-precision, at high speed, it is small-sized The characteristics of changing and dynamically measuring, is widely used in each field of industrial detection.
But in traditional laser measurement, by it is actually detected when determinand step surface and mirror-reflection to tested point institute The light spot image of formation impacts, and interferes the imaging of laser facula, is easy to cause measurement to fail, influences measurement efficiency and measurement Precision.
Utility model content
The purpose of this utility model is to provide a kind of laser imaging range-measurement system, improves the accuracy of measurement and consistent Property.
The utility model solves technical solution used by above-mentioned technical problem:
A kind of laser imaging range-measurement system, including laser, the first lens, the first imaging lens for shoot laser Group, the second imaging lens group and detector, the laser form hot spot, institute by first lens and on the surface of determinand It is mutually perpendicular inclined for converting the scattering light that the hot spot is formed to state the first imaging lens group and the second imaging lens group Shake light, and the photosignal that the polarised light converts is fed back to the laser by the detector.
In a preferred embodiment, further include the second lens, second lens be set to the laser and Between first lens, and for collimating to the laser, second lens are equipped with arcuate flanks, and the arcuate flanks are leaned on The nearly laser.
In a preferred embodiment, it is additionally provided with half-wave plate between first lens and the second lens, by institute The laser for stating half-wave plate forms polarization state laser.
In a preferred embodiment, the material of the half-wave plate be birefringent quartz plate, birefringent magnesium fluoride or The surface of ultraviolet sapphire sheet, second lens is coated with anti-reflection film.
In a preferred embodiment, the laser, the first lens, the second lens and half-wave plate are concentric.
In a preferred embodiment, the first imaging lens group includes the first imaging len, the second one-tenth described As lens group includes the second imaging len, angle between the exit direction of the laser and the first imaging len and described swash Angle is 45 degree between the exit direction of light and the second imaging len.
In a preferred embodiment, first imaging len and the second imaging len are Cook three-chip type object Mirror.
In a preferred embodiment, the first imaging lens group further includes the first analyzer, the second one-tenth described As lens group further includes the second analyzer, the polarizing film that first analyzer is 0 degree, second analyzer is inclined for 90 degree Shake piece.
It in a preferred embodiment, further include receiving module, the receiving module is for receiving the detector The photosignal of sending is simultaneously delivered to the laser.
In a preferred embodiment, the detector is line array CCD or linear array CMOS photosensitive element.
The beneficial effects of the utility model are: the utility model by the polarization laser to two mutually perpendicular directions into Row imaging, conversion and collection and analysis, improve the contrast of image, eliminate mirror-reflection caused by determinand surface imperfection to survey The influence of amount process calculates the moving distance of imaging luminous point according to the Spot detection pattern of hot spot, improves the precision of measurement and steady It is qualitative.
Detailed description of the invention
The utility model is described further with reference to the accompanying drawings and examples.
Fig. 1 is the structural schematic diagram of the utility model laser imaging range-measurement system one embodiment.
Specific embodiment
It is carried out below with reference to technical effect of the embodiment and attached drawing to the design of the utility model, specific structure and generation Clear, complete description, to be completely understood by the purpose of this utility model, scheme and effect.It should be noted that not conflicting In the case where, the features in the embodiments and the embodiments of the present application can be combined with each other.
It should be noted that unless otherwise specified, when a certain feature referred to as " fixation ", " connection " are in another feature, It can directly fix, be connected to another feature, and can also fix, be connected to another feature indirectly.In addition, this The descriptions such as upper and lower, left and right used in utility model are only the phase relative to each component part of the utility model in attached drawing For mutual positional relationship.
In addition, unless otherwise defined, the technology of all technical and scientific terms used herein and the art The normally understood meaning of personnel is identical.Term used in the description is intended merely to description specific embodiment herein, without It is to limit the utility model.Term " and or " used herein includes appointing for one or more relevant listed items The combination of meaning.
Referring to Fig.1, the laser imaging range-measurement system in the present embodiment includes pedestal 100, can on the bottom plate 110 of pedestal 100 The determinand 101 for detection is placed, laser 210 is for emitting laser, it is preferred that the laser 210 swashs for two class feux rouges Light device 210, the output power for the laser that laser 210 is issued is between 1-10mw, wavelength 650nm, and the wavelength can Regulated and controled, the laser as emitted by laser 210 passes through non-spherical lens 220, and non-spherical lens 220 is biggish by the angle of divergence Laser beam collimation is collimated light beam, and convenient for the adjustment of subsequent light beam, which is passed down through half-wave plate 230, and half 45 degree of polarization state laser are generated under the action of wave plate 230, the polarization state laser is after plus lens 240 in 101 table of determinand Face forms facular point.
Preferably, the numerical aperture of non-spherical lens 220 is greater than the numerical aperture of laser 210, the non-spherical lens 220 Two sides be respectively spherical or aspherical, which is arranged backwards to laser beam, to realize non-spherical lens 220 To the collimation of laser, the diameter for the collimated light beam being emitted from the non-spherical lens 220 depends on the focal length with non-spherical lens 220, It can be reasonably selected according to the actual situation.The non-spherical lens 220 is using the molding aspheric for being coated with 600-1050nm anti-reflection film Face lens 220 enhance the transmitance of shoot laser.Birefringent quartz plate, birefringent fluorination may be selected in the material of half-wave plate 230 Magnesium or ultraviolet sapphire sheet.
It further include the first imaging lens group 300 and the second imaging lens group 400, surface shape of the hot spot in determinand 101 It at scattering light and respectively enters in the first imaging lens group 300 and the second imaging lens group 400, in the first imaging lens group 300 Under the action of the second imaging lens group 400, scattering light forms orthogonal polarised light, and detector 500 receives the polarised light The photosignal of formation, and the signal is fed back into laser 210, laser 210 can swash outgoing according to the signal fed back The power of light is adjusted.
First imaging lens group 300 includes the first analyzer 320 and the first imaging len 310, the second imaging lens group 400 include the second analyzer 420 and the second imaging len 410, and first analyzer 320 and the first imaging len 310, second are examined Inclined device 420 and the equal coaxial placement of the second imaging len 410, the first analyzer 320 are located at the front of the first imaging len 310, the Two analyzers 420 are located at the front of the second imaging len 410, the first analyzer 320 and the second analyzer 420 first receive to The light that object 101 is fed back is surveyed, the scattering light for respectively enteing the first analyzer 320 and the second analyzer 420 is formed mutually Vertical polarised light, it is preferred that the first analyzer 320 and respectively 0 degree and 90 degree of the second analyzer 420 of polarizing film, polarization Light respectively enters in the first imaging len 310 and the second imaging len 410, and saturating in the first imaging len 310 and the second imaging Image is formed under the action of mirror 410, the first imaging lens group 300 and the second imaging lens group 400 respectively correspond a detector 500, which receives the first imaging len 310 and the image generated of the second imaging len 410 and is translated into light Electric signal, and then be analyzed and processed, it passes the information on to laser 210.
By the way that the first imaging lens group 300, the second imaging lens group 400 are arranged in orthogonal both direction and visits Device 500 is surveyed, the polarization contrast of background and object is improved, avoids and caused because determinand 101 is there are inclined surface, step surface The case where measurement failure, the trigon use scope of conventional laser is widened, measurement accuracy is improved.
Pedestal 100 in the present embodiment further includes two side plates being mutually connected vertically 120, and the side plate 120 is and bottom plate 110 vertical connections, detector 500 are respectively arranged on different side plates 120, and then receive to the picture signal of different angle Collection.In addition, the shoot laser of laser 210 forms 45 degree of polarised lights under the action of half-wave plate 230, detector 500 is received respectively Collection is formed by 0 degree and 90 degree of imaging points by the first imaging len 310 and the second imaging len 410, effectively eliminates because to be measured 101 surface irregularity of object formed mirror-reflection influenced caused by hot spot image quality, improve image contrast and Measurement accuracy and measurement stability.
Preferably, by half-wave plate 230 be formed by polarization state laser polarization direction and the first imaging lens group 300 and The optical axis direction of second imaging lens group 400 is in 45 degree of angles, and the fast axle of polarization state laser towards the half-wave plate 230 turns Dynamic angle be half-wave plate 230 fast axis direction and 2 times of shoot laser polarization direction angle.
Preferably, the first imaging len 310 and the second imaging len 410 are Cook three piece type camera object lens or are it Evolving form is capable of forming good quality of optical imaging, and can be according to reality because it has the characteristics that large aperture, big visual field Border uses aberration correction, conducive to the optimization of detection accuracy.
Preferably, detector 500 is formed using line array CCD or linear array CMOS photosensitive element, so that detector 500 has Highly sensitive, low noise and the fast feature of acquisition signal frequency, to improve measurement efficiency.
Preferably, receiving module (not shown) is additionally provided in the present embodiment, which is used for 500 institute of pick-up probe The signal is simultaneously fed back to laser 210 by the electric signal of output, according to different measured surfaces, is adjusted laser 210 and is emitted Laser power, to form the feedback regulation of closed loop, by removing the imaging shade of 101 surface specular reflections of determinand, The target detection pattern of spot center is obtained, to calculate the moving distance of imaging luminous point, realizes high-precision measurement.
It is to be illustrated to the preferable implementation of the utility model, but the utility model creation is not limited to institute above Embodiment is stated, those skilled in the art can also make various be equal without departing from the spirit of the present invention Deformation or replacement, these equivalent deformations or replacement are all included in the scope defined by the claims of the present application.

Claims (10)

1. a kind of laser imaging range-measurement system, which is characterized in that including laser, the first lens, first for shoot laser Imaging lens group, the second imaging lens group and detector, the laser pass through first lens and the surface shape in determinand At hot spot, the first imaging lens group and the second imaging lens group are for converting the scattering light that the hot spot is formed to mutually The photosignal that the polarised light converts is fed back to the laser by vertical polarised light, the detector.
2. laser imaging range-measurement system according to claim 1, which is characterized in that it further include the second lens, described second Lens are set between the laser and the first lens, and for collimating to the laser, second lens are equipped with Arcuate flanks, the arcuate flanks are close to the laser.
3. laser imaging range-measurement system according to claim 2, which is characterized in that first lens and the second lens it Between be additionally provided with half-wave plate, by the half-wave plate the laser formed polarization state laser.
4. laser imaging range-measurement system according to claim 3, which is characterized in that the material of the half-wave plate is birefringent The surface of quartz plate, birefringent magnesium fluoride or ultraviolet sapphire sheet, second lens is coated with anti-reflection film.
5. laser imaging range-measurement system according to claim 3, which is characterized in that the laser, the first lens, second Lens and half-wave plate are concentric.
6. laser imaging range-measurement system according to claim 1, which is characterized in that the first imaging lens group includes the One imaging len, the second imaging lens group include the second imaging len, and the exit direction of the laser and the first imaging are saturating Angle is 45 degree between the exit direction and the second imaging len of angle and the laser between mirror.
7. laser imaging range-measurement system according to claim 6, which is characterized in that first imaging len and the second one-tenth As lens are Cook three-chip type object lens.
8. laser imaging range-measurement system according to claim 1, which is characterized in that the first imaging lens group further includes First analyzer, the second imaging lens group further include the second analyzer, the polarizing film that first analyzer is 0 degree, institute State the polarizing film that the second analyzer is 90 degree.
9. laser imaging range-measurement system according to claim 1, which is characterized in that it further include receiving module, the reception Module is used to receive the photosignal that the detector issues and is delivered to the laser.
10. laser imaging range-measurement system according to claim 1, which is characterized in that the detector be line array CCD or Linear array CMOS photosensitive element.
CN201821910659.0U 2018-11-19 2018-11-19 A kind of laser imaging range-measurement system Active CN209147932U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821910659.0U CN209147932U (en) 2018-11-19 2018-11-19 A kind of laser imaging range-measurement system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821910659.0U CN209147932U (en) 2018-11-19 2018-11-19 A kind of laser imaging range-measurement system

Publications (1)

Publication Number Publication Date
CN209147932U true CN209147932U (en) 2019-07-23

Family

ID=67286551

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821910659.0U Active CN209147932U (en) 2018-11-19 2018-11-19 A kind of laser imaging range-measurement system

Country Status (1)

Country Link
CN (1) CN209147932U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109405749A (en) * 2018-11-19 2019-03-01 清华大学深圳研究生院 A kind of laser imaging distance measuring method and system
CN112433222A (en) * 2020-11-24 2021-03-02 长春理工大学 Haze-penetrating laser distance measuring system and method
WO2022134938A1 (en) * 2020-12-24 2022-06-30 上海智能制造功能平台有限公司 Binocular sensor visual measurement probe and binocular sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109405749A (en) * 2018-11-19 2019-03-01 清华大学深圳研究生院 A kind of laser imaging distance measuring method and system
CN109405749B (en) * 2018-11-19 2024-03-26 清华大学深圳研究生院 Laser imaging ranging method and system
CN112433222A (en) * 2020-11-24 2021-03-02 长春理工大学 Haze-penetrating laser distance measuring system and method
WO2022134938A1 (en) * 2020-12-24 2022-06-30 上海智能制造功能平台有限公司 Binocular sensor visual measurement probe and binocular sensor

Similar Documents

Publication Publication Date Title
CN102147234B (en) Laser triangulation sensor
CN209147932U (en) A kind of laser imaging range-measurement system
CN110186653B (en) Optical axis consistency calibration and split image fixed focus adjustment device and method for non-imaging system
CN107505121B (en) The angle measuring device and method of electro-optic crystal light pass surface normal and the optical axis of crystal
CN1687702A (en) 2D photoelectric auto collimation equipment and measuring method based on dynamic differential compensation process
CN106679940A (en) High-precision laser divergence angle parameter calibration device
CN102589428B (en) Asymmetric-incidence-based sample axial position tracking and correcting method and device
CN100442010C (en) Single-photodetector confocal laser triangulation device
CN102087483B (en) Optical system for focal plane detection in projection lithography
CN109342028A (en) Diffraction optical element detection method and system
CN111458108A (en) Device and method for measuring parallelism of transmitting and receiving optical axes
CN105571834A (en) Measuring device of quantum efficiency of CCD device
CN205942120U (en) Autocollimatic optic system with polarization beam splitting element
GB2539844A (en) Dual-optical-path optical centering instrument for eliminating stray light
CN106461572A (en) Non-imaging coherent line scanner systems and methods for optical inspection
CN110793756A (en) Optical correction device for monitoring optical axis of reflecting telescope based on polarization beam splitting
CN114216659A (en) System and method for measuring parallelism of large-caliber long-focus optical axis
CN114001673B (en) Coding pattern projector
CN204578635U (en) A kind of infrared camera and focal plane registration apparatus thereof
CN113465547A (en) Linear scanning spectrum copolymerization measurement system and method
CN112834462A (en) Method for measuring reflectivity of reflector
CN211668748U (en) Optical correction device for monitoring optical axis of reflecting telescope based on polarization beam splitting
CN105091797B (en) A kind of single CCD intensity correlation autocollimator
CN109405749A (en) A kind of laser imaging distance measuring method and system
CN108572160B (en) Refractometer for measuring refractive index distribution

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant