CN106679940A - High-precision laser divergence angle parameter calibration device - Google Patents
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- CN106679940A CN106679940A CN201611110653.0A CN201611110653A CN106679940A CN 106679940 A CN106679940 A CN 106679940A CN 201611110653 A CN201611110653 A CN 201611110653A CN 106679940 A CN106679940 A CN 106679940A
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention discloses a high-precision laser divergence angle parameter calibration device. A to-be-tested laser (1) is focused through a lens (6) after being reflected through an optical flat (3) and a spectroscope (2); a converge light is divided into two testing light paths of transmission and reflection after passing through a beam splitter (7); when a focus light spot not exceeds a photosurface of a CCD camera (8), the testing light path is the transmission light path; the CCD camera (8) is located at a lens focal plane position, and the focal spot diameter is calculated by a formula (2); conversely, the testing light path is reflecting light path; a ground glass screen (9) is located at the lens focal plane, an imaging system (10) images the light spot on the ground glass screen (9); the focal spot diameter is calculated by the formula (2). A calibration parameter fn is substituted; a formula (3) is used for calculating the divergence angle of the to-be-tested laser; according to the established confusion disc model base, the collected focal spot is performed with confusion disc spreading and superposition; thus the measurement uncertainty introduced by aberration and light path imbalance of the lens (6) is evaluated.
Description
Technical field
The invention belongs to the measurement of laser beam divergence parameter and metering field, are related to a kind of high-precision laser diverging angular dimensions
Caliberating device.
Background technology
The angle of divergence is the core parameter of laser instrument, is also the important parameter for evaluating beam quality, and Gaussian beam far field dissipates
Angle is commonly defined as：At far field (transmission range tends to infinite), Gaussian beam amplitude be reduced at the maximum 1/e of center with
The angle of transmission center axle.
Laser beam divergence parameter main flow measurement apparatus as shown in figure 3, testing laser with condenser lenses focus on, using detector
The spot diameter d on lens focal plane is measured, spot diameter is generally pressed the definition of Power in the bucket 86.5% and calculated, based on formula (1)
Calculate laser beam divergence：
θ=d/f (1)
In formula：
θ --- beam divergence angle, mrad；
D --- spot diameter on focal plane, mm；
F --- focus lamp focal length, m.
From computing formula (1), laser beam divergence measurement result uncertainty of measurement source mainly includes that focus lamp is burnt
Away from parameter calibration uncertainty, detector pixel sizing calibration uncertainty, condenser lenses aberration and optical axis imbalance etc., wherein growing
Focal length and Pixel Dimensions demarcate the uncertainty of measurement for introducing greatly, and the impact of lens aberration and optical axis imbalance to measurement result is more
It is limited to theory analysis.
The content of the invention
(1) goal of the invention
The purpose of the present invention is：For existing laser beam divergence parameter measurement techniques device measuring partial uncertainty it is many and
Partial uncertainty analyzes the weak point such as incomplete, there is provided a kind of measurable 0~20mrad laser beam divergences parameter, measurement is not
Degree of certainty is less than 5%, and the measurement apparatus of laser beam divergence parameter high-acruracy survey are just capable of achieving with lower cost.
(2) technical scheme
In order to solve above-mentioned technical problem, the present invention provides a kind of high-precision laser angle of divergence parameter calibration device, its bag
Include：Light source, spectroscope 2, the transparent side of spectroscope 2 arranges optical flat 3, and optical flat 3 is arranged on precision rotation platform 4, and the rear side of optical flat 3 is arranged
Electronics autocollimator 5；Incide light beam on spectroscope 2 Jing after optical flat 3 reflects, the secondary reflection again of Jing spectroscopes 2, spectroscope 2
Reflective side arrangement condenser lenses 6, beam splitter 7 and CCD camera 8, the reflective side arrangement ground glass 9 of beam splitter 7 and imaging system
10；Light source Jing condenser lenses 6 Jing after optical flat 3 and spectroscope 2 reflect are focused on, and converged light is divided into transmission Jing after beam splitter 7 and reflects
Two optical system for testing, when focal beam spot is less than 8 photosurface of CCD camera, optical system for testing is transmitted light path, and CCD camera 8 is located at
Lens focal plane position, CCD camera will record focal spot intensity distribution；Conversely, optical system for testing is reflected light path, ground glass 9 is located at
Lens focal plane position, imaging system 10 is imaged to hot spot on ground glass 9, and imaging system will record focal spot intensity distribution, and go forward side by side
One step calculates focused spot diameter, with reference to equivalent focal length parameter f for completing to demarcatenCalculate the testing laser angle of divergence.
Wherein, the light source is testing laser 1.
Wherein, the calculation of the focused spot diameter is：
According to focal spot intensity distribution, the focused spot diameter in units of pixel meets relation：
In formula：
R --- CCD camera position coordinateses, pix；
dn--- focused spot diameter, pix.
Wherein, the calculation of testing laser angle of divergence θ is：
θ=dn/fn (3)
In formula：
θ --- beam divergence angle, rad；
dn--- spot diameter on focal plane, pix；
fn--- condenser lenses equivalent focal length, pix.
Wherein, in the parameter calibration device, when the testing laser 1 replaces with collimated light source 11, lens are focused
The demarcation of the equivalent focal length parameter in units of pixel.
Wherein, during the equivalent focal length parameter calibration, the Jing condenser lenses Jing after optical flat 3, spectroscope 2 reflect of collimated light source 11
6 focus on, will collimation optical transmission direction it is parallel with the optical axis of condenser lenses 6 when as initial position, now CCD camera 8 and be imaged
The position of centre of gravity of the record hot spot of system 10 is (x1,y1), the reading of electronics autocollimator 5 is (θx1, θy1).Precision rotation platform 4 is rotated
After low-angle, the position of centre of gravity that hot spot is recorded in CCD camera 8 and imaging system 10 is changed into (x2, y2), the reading of electronics autocollimator 5
It is changed into (θx2, θy2), then equivalent focal length parameter fnMeet relation
In formula：
xi, yi--- the x of hot spot center of gravity, y direction coordinate, pix；
θxi, θyi--- autocollimator measures angle, rad；
Thus, you can calibrate parameter fn。
Wherein, after the completion of the testing laser angle of divergence is demarcated, the parameter calibration device can also be used to condenser lenses 6
The impact analysis of aberration and optical axis imbalance to measurement result.
Wherein, when measuring the impact analysis of result, light source is collimated light source 11.
Wherein, when measuring the impact analysis of result, condenser lenses are set up not using collimated light and electronics autocollimator
With corresponding disc of confusion model library under visual field, disc of confusion diffusion superposition is carried out using unit is one-to-one to the minimum of actual focal spot,
Distortion hot spot will be obtained and original hot spot beamwidth result of calculation will be compared, evaluate the survey that lens aberration and optical axis imbalance are introduced
Amount uncertainty.
Wherein, when measuring the impact analysis of result, the transmission direction of collimated light source 11 is parallel with the optical axis of condenser lenses 6
When, the disc of confusion of CCD camera 8 and the record angle of visual field of condenser lenses 6 of imaging system 10 when being 0 degree, disc of confusion attachment condenser lenses 6
The angle of visual field is 0 degree of aberration information；Anglec of rotation θ of precision rotation platform 4, CCD camera 8 and the record disc of confusion attachment of imaging system 10
Aberration information during 62 θ of the angle of visual field of condenser lenses；The different rotation angle of control precision rotation platform 4, sets up the difference of condenser lenses 6 and regards
Off field corresponding disc of confusion model library, to actual acquisition laser focal spot application disc of confusion principle of stacking is spread, by image by minimum
Sampling unit is that pixel carries out disperse extension, and different pixels position correspondence difference visual field will select disc of confusion under respective field of vision
Figure is extended, follow in expansion process grey scale pixel value with extension hot spot gray value summation it is consistent, to all pixels disc of confusion
Diffusion result is overlapped, and obtains new hot spot distribution, as distortion hot spot；New hot spot and original hot spot beamwidth are calculated into knot
Fruit is compared, you can the uncertainty of measurement that effectively the analysis aberration of condenser lenses 6 and optical axis imbalance are introduced.
(3) beneficial effect
The high-precision laser angle of divergence parameter calibration device that above-mentioned technical proposal is provided, experimental implementation is simple and measures not
Degree of certainty is little, can complete the laser beam divergence parameter testing of degree of precision；Using the one-to-one disperse of focal spot minimum sampling unit
Overlay analysis technology, is closer to physical condition, substantially increases the credibility of divergence angle measurement outcome measurement uncertainty.
Description of the drawings
Fig. 1 is the principle schematic of laser beam divergence parameter calibration device of the present invention.
Fig. 2 is that the present invention demarcates condenser lenses equivalent focal length parameter and sets up the principle schematic of disc of confusion model library.
Fig. 3 is laser beam divergence parameter main flow measurement apparatus in prior art.
In figure：1- testing lasers, 2- spectroscopes, 3- optical flats, 4- precision rotation platforms, 5- electronics autocollimators, 6- focuses on saturating
Mirror, 7- beam splitters, 8-CCD cameras, 9- ground glasses, 10- imaging systems, 11- collimated light sources.
Specific embodiment
To make the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, the tool to the present invention
Body embodiment is described in further detail.
Refering to Fig. 1.In embodiment described below, the demarcation of laser beam divergence parameter can be completed.
The present embodiment high-precision laser angle of divergence parameter calibration device includes：Testing laser 1, spectroscope 2, optical flat 3 is accurate
Turntable 4, electronics autocollimator 5, condenser lenses 6, beam splitter 7, CCD camera 8, ground glass 9 and imaging system 10.
The Jing condenser lenses 6 Jing after optical flat 3 and spectroscope 2 reflect of testing laser 1 are focused on, and converged light is divided into Jing after beam splitter 7
Two optical system for testing of transmission and reflection, when focal beam spot is less than 8 photosurface of CCD camera, optical system for testing is transmitted light path,
CCD camera 8 is located at lens focal plane position, and CCD camera will record focal spot intensity distribution；Conversely, optical system for testing is reflected light path, hair
Glass screen 9 is located at lens focal plane position, and imaging system 10 is imaged to hot spot on ground glass 9, and imaging system will record focal spot light
Strong distribution, and focused spot diameter is further calculated, with reference to equivalent focal length parameter f for completing to demarcatenCalculate testing laser to send out
Scattered angle.
According to focal spot intensity distribution, the focused spot diameter in units of pixel meets relation
In formula：
R --- CCD camera position coordinateses, pix；
dn--- focused spot diameter, pix；
Calculate focused spot diameter dnAs a result relation is met between the testing laser angle of divergence
θ=dn/fn (3)
In formula：
θ --- beam divergence angle, rad；
dn--- spot diameter on focal plane, pix；
fn--- focus lamp equivalent focal length, pix.
Refering to Fig. 2.In embodiment described below, equivalent focal length of the condenser lenses 6 in units of pixel can be completed
The demarcation of parameter.
The present embodiment high-precision laser angle of divergence parameter calibration device includes：Collimated light source 11, spectroscope 2, optical flat 3, essence
Close turntable 4, electronics autocollimator 5, condenser lenses 6, beam splitter 7, CCD camera 8, ground glass 9 and imaging system 10.
Jing condenser lenses 6 are focused on after collimated light 11 is Jing optical flat 3, spectroscope 2 reflects, and collimation optical transmission direction is saturating with focusing
As initial position when the optical axis of mirror 6 is parallel, now the position of centre of gravity of CCD camera 8 and the record hot spot of imaging system 10 is (x1,
y1), the reading of autocollimator 5 is (θx1, θy1).Precision rotation platform 4 is rotated after low-angle, is recorded in CCD camera 8 and imaging system 10
The position of centre of gravity of hot spot is changed into (x2, y2), the reading of autocollimator 5 is changed into (θx2, θy2), then equivalent focal length parameter fnMeet relation
In formula：
xi, yi--- the x of hot spot center of gravity, y direction coordinate, pix；
θxi, θyi--- autocollimator measures angle, rad；
Thus, you can calibrate parameter fn。
Lens aberration and light path imbalance are to the impact analysis technical scheme of measurement result：Using collimated light and autocollimator
Corresponding disc of confusion model library under condenser lenses difference visual field is set up, as shown in Fig. 2 adopting unit one to the minimum of actual focal spot
Disc of confusion diffusion superposition is carried out to one, distortion hot spot will be obtained and original hot spot beamwidth result of calculation is compared, evaluated
The uncertainty of measurement that mirror image difference and optical axis imbalance are introduced.
Specifically, refering to Fig. 2.In embodiment described below, the aberration of condenser lenses 6 and optical axis imbalance etc. can be completed
Impact analysis to measurement result.
The present embodiment high-precision laser angle of divergence parameter calibration device includes：Collimated light source 11, spectroscope 2, optical flat 3, essence
Close turntable 4, electronics autocollimator 5, condenser lenses 6, beam splitter 7, CCD camera 8, ground glass 9 and imaging system 10.
When the transmission direction of collimated light source 11 is parallel with the optical axis of condenser lenses 6, CCD camera 8 and imaging system 10 record be
The disc of confusion when angle of visual field of condenser lenses 6 is 0 degree, disc of confusion is attached to the aberration information that the angle of visual field of condenser lenses 6 is 0 degree.Essence
Anglec of rotation θ of close turntable 4, CCD camera 8 and imaging system 10 record disc of confusion by adhere to 62 θ of the angle of visual field of condenser lenses when
Aberration information.The different rotation angle of control precision rotation platform 4, sets up corresponding disc of confusion model under the different visual fields of condenser lenses 6
Storehouse.Principle of stacking is spread to actual acquisition laser focal spot application disc of confusion, by minimum sampling unit is that pixel is carried out by image
Disperse extends, different pixels position correspondence difference visual field, and figure of optical lens preferred embodiment under respective field of vision will be selected to be extended.In expansion process
Follow strictly law of conservation of energy, i.e. grey scale pixel value consistent with extension hot spot gray value summation.All pixels disc of confusion is expanded
Fruit is overlapped eliminating stagnation, will obtain new hot spot distribution, as distortion hot spot.New hot spot and original hot spot beamwidth are calculated into knot
Fruit is compared, you can the uncertainty of measurement that effectively the analysis aberration of condenser lenses 6 and optical axis imbalance are introduced.
The each optical parametric of apparatus of the present invention as shown in table 1, compares existing laser beam divergence parameter measurement techniques, with as follows
Beneficial effect.
The measurement apparatus optical parametric of table 1
| Condenser lenses focal length | Autocollimator uncertainty of measurement | CCD camera size | Imaging system amplification |
| 1.8m | 1.5″ | 5.28mm×7.04mm | 0.6×/0.1× |
The measuring method for calibrating focal length of lens parameter and CCD pixel size respectively is compared, experimental implementation is simple and measures
Uncertainty is little, and current long-focus parameter (being more than 1m) and the high-precision calibrating of CCD pixel size have certain difficulty, laser
Divergence angle measurement measurement device uncertainty is generally evaluated as 10%, and the present invention can complete the laser beam divergence parameter of degree of precision
Test.
The impact analysis of condenser lenses aberration and light path imbalance to divergence angle measurement result, it is at present to be in theory analysis rank more
Section, the uncertainty of measurement component credibility for thus evaluating is not high, a pair of the focal spot minimum sampling unit that the present invention is adopted
One disperse overlay analysis technology, is closer to physical condition, substantially increases divergence angle measurement outcome measurement uncertainty
Credibility.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of without departing from the technology of the present invention principle, some improvement and deformation can also be made, these improve and deform
Also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of high-precision laser angle of divergence parameter calibration device, it is characterised in that include：Light source, spectroscope (2), spectroscope
(2) transparent side arranges optical flat (3), and optical flat (3) is arranged on precision rotation platform (4), and optical flat (3) rear side arranges electronics autocollimator
(5)；Incide light beam on spectroscope (2) Jing after optical flat (3) reflection, Jing spectroscopes (2) secondary reflection again, spectroscope (2) it is anti-
Light side arrangement condenser lenses (6), beam splitter (7) and CCD camera (8), the reflective side of beam splitter (7) arrange ground glass (9) and
Imaging system (10)；Light source Jing condenser lenses (6) Jing after optical flat (3) and spectroscope (2) reflection are focused on, converged light Jing beam splitter
(7) it is divided into transmission after and reflects two optical system for testing, when focal beam spot is less than CCD camera (8) photosurface, optical system for testing is
Transmitted light path, CCD camera (8) will record focal spot intensity distribution positioned at lens focal plane position, CCD camera；Conversely, optical system for testing is
Reflected light path, ground glass (9) is imaged positioned at lens focal plane position, imaging system (10) to hot spot on ground glass (9), imaging
System will record focal spot intensity distribution, and further calculate focused spot diameter, with reference to equivalent focal length parameter f for completing to demarcaten
Calculate the testing laser angle of divergence.
2. high-precision laser angle of divergence parameter calibration device as claimed in claim 1, it is characterised in that the light source is to be measured
Laser (1).
3. high-precision laser angle of divergence parameter calibration device as claimed in claim 2, it is characterised in that the focused spot diameter
Calculation is：
According to focal spot intensity distribution, the focused spot diameter in units of pixel meets relation：
In formula：
R --- CCD camera position coordinateses, pix；
dn--- focused spot diameter, pix.
4. high-precision laser angle of divergence parameter calibration device as claimed in claim 3, it is characterised in that the testing laser is sent out
The calculation of scattered angle θ is：
θ=dn/fn (3)
In formula：
θ --- beam divergence angle, rad；
dn--- spot diameter on focal plane, pix；
fn--- condenser lenses equivalent focal length, pix.
5. high-precision laser angle of divergence parameter calibration device as claimed in claim 4, it is characterised in that the parameter calibration dress
In putting, when the testing laser (1) replaces with collimated light source (11), equivalent focal length ginseng of the lens in units of pixel is focused
Several demarcation.
6. high-precision laser angle of divergence parameter calibration device as claimed in claim 5, it is characterised in that the equivalent focal length ginseng
When number is demarcated, collimated light source (11) Jing condenser lenses (6) Jing after optical flat (3), spectroscope (2) reflection are focused on, and will collimate optical transport
As initial position when direction is parallel with the optical axis of condenser lenses (6), now CCD camera (8) and imaging system (10) recording light
The position of centre of gravity of speckle is (x1,y1), electronics autocollimator (5) reading is (θx1, θy1).Precision rotation platform (4) is rotated after low-angle,
The position of centre of gravity that hot spot is recorded in CCD camera (8) and imaging system (10) is changed into (x2, y2), electronics autocollimator (5) reading becomes
For (θx2, θy2), then equivalent focal length parameter fnMeet relation
In formula：
xi, yi--- the x of hot spot center of gravity, y direction coordinate, pix；
θxi, θyi--- autocollimator measures angle, rad；
Thus, you can calibrate parameter fn。
7. high-precision laser angle of divergence parameter calibration device as claimed in claim 6, it is characterised in that the testing laser is sent out
After the completion of scattered footmark is fixed, the parameter calibration device can also be used to condenser lenses (6) aberration and optical axis is lacked of proper care to measurement result
Impact analysis.
8. high-precision laser angle of divergence parameter calibration device as claimed in claim 7, it is characterised in that measure result
During impact analysis, light source is collimated light source (11).
9. high-precision laser angle of divergence parameter calibration device as claimed in claim 8, it is characterised in that measure result
During impact analysis, corresponding disc of confusion model library under the different visual fields of condenser lenses is set up using collimated light and electronics autocollimator,
Disc of confusion diffusion superposition is carried out using unit is one-to-one to the minimum of actual focal spot, distortion hot spot and original hot spot beamwidth will be obtained
Result of calculation is compared, and evaluates the uncertainty of measurement that lens aberration and optical axis imbalance are introduced.
10. high-precision laser angle of divergence parameter calibration device as claimed in claim 9, it is characterised in that measure result
Impact analysis when, when collimated light source (11) transmission direction is parallel with condenser lenses (6) optical axis, CCD camera (8) and imaging system
(10) disc of confusion when condenser lenses (6) angle of visual field is 0 degree is recorded, disc of confusion attachment condenser lenses (6) angle of visual field is 0 degree of picture
Difference information；Precision rotation platform (4) anglec of rotation θ, CCD camera (8) and imaging system (10) record disc of confusion attachment condenser lenses
(6) aberration information during 2 θ of the angle of visual field；Control precision rotation platform (4) different rotation angle, sets up condenser lenses (6) difference visual field
Under corresponding disc of confusion model library, to actual acquisition laser focal spot application disc of confusion spread principle of stacking, image is adopted by minimum
Sample unit is that pixel carries out disperse extension, and different pixels position correspondence difference visual field will select figure of optical lens preferred embodiment under respective field of vision
Be extended, follow in expansion process grey scale pixel value with extension hot spot gray value summation it is consistent, to all pixels disc of confusion expansion
Fruit is overlapped eliminating stagnation, obtains new hot spot distribution, as distortion hot spot；By new hot spot and original hot spot beamwidth result of calculation
It is compared, you can effectively analyze the uncertainty of measurement that condenser lenses (6) aberration and optical axis imbalance are introduced.
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