CN113376857A - High-precision optical light path debugging device and debugging method thereof - Google Patents

High-precision optical light path debugging device and debugging method thereof Download PDF

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CN113376857A
CN113376857A CN202110634689.3A CN202110634689A CN113376857A CN 113376857 A CN113376857 A CN 113376857A CN 202110634689 A CN202110634689 A CN 202110634689A CN 113376857 A CN113376857 A CN 113376857A
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light
optical
module
debugging
debugged
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CN113376857B (en
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郑广建
董灵健
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Fuzhou Nafei Photoelectric Technology Co ltd
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Fuzhou Nafei Photoelectric Technology Co ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

Abstract

The invention discloses a high-precision optical light path debugging device and a debugging method thereof, wherein the high-precision optical light path debugging device comprises a light source module and a receiving module, the light source module is used for providing reference light and receiving feedback signals in a debugging process, and the receiving module is used for testing the positions and pointing angles of light beams before and after light path debugging; the light source module comprises an adjusting bracket, an optical fiber collimator, a reference light source and a first spectroscope, wherein light output by the reference light source is input into the optical module to be debugged through the optical fiber collimator and the first spectroscope; the receiving module comprises a partial reflection light splitter, a second light splitter, a coaxial focusing lens, a first light spot machine and a second light spot machine, light output by the optical module to be debugged is transmitted to the first light spot machine and the coaxial focusing lens respectively after passing through the second light splitter, and the light focused after passing through the coaxial focusing lens is input into the second light spot machine. The invention can accurately control and monitor the relation between the front incident light of the optical module and the back emergent light of the optical module, provides a visual debugging scheme and has high debugging efficiency.

Description

High-precision optical light path debugging device and debugging method thereof
Technical Field
The invention relates to the technical field of optical light paths, in particular to a high-precision optical light path debugging device and a debugging method thereof.
Background
Optical path debugging is a core process in the fields of optical machine assembly and laser application. In many optical assembly applications, such as laser cavity assembly, fiber coupling, and spatial communication assembly, the applications often require the output light of the module to coincide with the input light, and the included angle between the two needs to satisfy <10 "(0.05 mrad), so how to implement high-precision optical path assembly is a problem that must be considered in the field of optical-mechanical assembly.
In a complex optical path system, the reference light of the optical path is not visible light, so that in order to facilitate high-precision adjustment, some auxiliary visible light and visual devices, such as a beam analyzer, a spectrometer, a photoelectric detector and the like, are usually used in the adjustment process, and the position and the pointing angle of the optical path are measured by matching with optical instruments and devices, such as a diaphragm, a reflector and the like. Due to the influence of the precision and stability of the measuring instrument equipment, or due to the possible deviation of the machining and positioning of mechanical parts, and the problems that the intensity of the auxiliary light source is easy to attenuate, and the positioning and pointing errors exist between the auxiliary light source and the actual reference light, or due to the added auxiliary measuring instrument equipment, the debugging precision is easy to reach the precision required by the system, or the long-time correction and debugging is needed to meet the requirement of the installation precision.
Disclosure of Invention
In order to solve the above problems, an object of the present invention is to provide a high-precision optical path debugging apparatus and a debugging method thereof, which can be used for assembling and debugging an optical path with a complex axis and multiple turns, can ensure high-precision consistency of incident light and emergent light before and after debugging an optical module in position and pointing angle, and does not need to add auxiliary visible light as indicating light in a system, and has high visualization degree in the debugging process, and fast and reliable debugging operation.
In order to achieve the purpose, the invention adopts the following technical scheme:
a high-precision optical light path debugging device comprises a light source module and a receiving module, wherein the light source module is used for providing reference light used for debugging and feedback signals in a debugging process, and the receiving module is used for testing the positions and pointing angles of light beams before and after light path debugging; the light source module comprises an adjusting bracket, an optical fiber collimator, a reference light source and a first spectroscope, wherein the optical fiber collimator is arranged on the five-dimensional adjusting bracket, and a light source output by the reference light source is input into the optical module to be debugged after being reflected by the optical fiber collimator and the first spectroscope; the receiving module comprises a partial reflection light splitter, a second light splitter, a coaxial focusing lens, a first light spot machine and a second light spot machine, the partial reflection light splitter is arranged on the optical mirror bracket, light output by the optical module to be debugged is emitted to the first light spot machine and the coaxial focusing lens respectively after passing through the second light splitter, and the light focused by the coaxial focusing lens is input into the second light spot machine.
Further, the first light spot machine is arranged on the sliding guide rail and used for monitoring the position of the emergent light beam; the second light spot machine is arranged on the focal plane of the coaxial focusing lens and used for monitoring the pointing angle of the emergent light beam.
Furthermore, an optical input/output port of the optical module to be debugged is respectively provided with an adjustable first aperture diaphragm and an adjustable second aperture diaphragm, and the first aperture diaphragm and the second aperture diaphragm are used for roughly adjusting the optical path of the invisible light.
Furthermore, an autocollimator is arranged on one side of the first spectroscope, the autocollimator is connected with a camera capable of receiving the wavelength of the reference light, and the autocollimator is used for receiving the return light reflected by the partial reflection spectroscope.
Further, the autocollimator is arranged on an adjusting frame, and the adjusting frame is used for adjusting the pitching and yawing angles of the autocollimator.
Furthermore, an optical circulator is arranged in the reference light source, a first interface of the optical circulator is connected with the light source, a second interface of the optical circulator is connected with the optical fiber collimator, and a third interface of the optical circulator is connected with the power meter.
Furthermore, an angle calibration reflector is arranged at the optical output port of the optical module to be debugged, and the calibration reflector is the partial reflection lens.
Further, the debugging method based on the high-precision optical path debugging device comprises the following steps:
s1, light source module calibration: fixing the first spectroscope at a position corresponding to incident light on a light path at 45 degrees; fixing a part of reflection light splitting sheets arranged on an optical frame at the corresponding position of emergent light of a light path; arranging the autocollimator on an adjusting frame, adjusting the angles of the autocollimator and the partial reflection spectroscope, and enabling light emitted by a light source of the autocollimator to be received by a camera of the autocollimator after being reflected by the partial reflection spectroscope; placing the optical fiber collimator on an optical five-dimensional adjusting bracket, wherein the front end of incident light is connected with a reference light source; adjusting the pitching and deflecting positions of the optical fiber collimator to enable the reference light to be partially reflected by the partial reflection beam splitter and then coupled and received by the optical fiber collimator through the first beam splitter, and the reference light is vertically incident or reflected to the partial reflection beam splitter and is parallel to a light source of the autocollimator; when the coupling efficiency of the optical fiber collimator reaches the maximum, taking an imaging point of the reference light as a new reference point;
s2, calibration of a receiving module: a second spectroscope arranged at 45 degrees is added in a light path, transmitted reference light is divided into two beams which are respectively projected to a first light spot machine and a second light spot machine, and the mounting positions of the first light spot machine and the second light spot machine are adjusted to enable the light spots to be projected to the central position of imaging software of the light spot machine; adjusting the front and back positions of the second spot machine to find the focus of the focused light spot, monitoring whether the position of the light beam deviates or not by comparing the central position of the light spot of the first spot machine, and monitoring whether the pointing angle of the light beam changes or not by comparing the central position of the light spot of the second spot machine;
s3, debugging the optical path of the system: recording the central coordinates of light spots on the first light spot machine and the second light spot machine before adding the optical module to be debugged, and using the central coordinates as a reference before debugging the light path module; adding an optical module to be debugged into a set area between a light source module and a receiving module, adjusting the optical module to be debugged to enable reference light to pass through a partial reflection beam splitter and then return along the original path to be imaged on a display interface of an autocollimator again, continuously fine-tuning the optical module to be debugged to move an imaging point to a reference point position according to the imaging point on the autocollimator, reading the energy value of coupled light by using a power meter, ensuring that system emergent light added with the optical module to be debugged is perpendicular to the partial reflection beam splitter, and calculating the change of the optical module to be debugged to the light emergent angle through the position deviation of light spots of a second light spot machine; then, according to the deviation condition between the central position of the light spot on the first light spot machine and the initial value, continuously adjusting the optical module to be debugged, and adjusting the central position of the light spot displayed on the first light spot machine to the position before the light spot is placed in the light path module; and when the central positions of the light spot images on the first light spot machine and the second light spot machine are adjusted to be consistent with the positions before the light spot images are put into the optical module to be debugged, completing debugging.
The invention has the following beneficial effects:
1. the invention can accurately control and monitor the relation between the front incident light of the optical module and the rear emergent light of the optical module by arranging the light source module and the receiving module in front of and behind the optical module to be debugged, and provides a visual debugging scheme.
2. Compared with the prior art, the invention is not limited by whether the light is visible light or not during the debugging of the light path, and simultaneously does not need to switch between the visible light and the invisible light in the light path system.
3. The light source module is internally provided with the adjusting bracket, the optical fiber collimator, the reference light source and the first spectroscope, the light source output by the reference light source is input into the optical module to be debugged through the optical fiber collimator and the spectroscope, the reference light source is accurately positioned, the position adjustment is convenient and reliable, the high-precision test principle of echo coupling is utilized, the light visualization of the autocollimator is combined, and the debugging precision and the operation difficulty are both considered.
4. The receiving module is provided with a reflector beam splitter, a second beam splitter, a coaxial focusing lens, a first light spot machine and a second light spot machine, wherein the first light spot machine is used for monitoring the position of an emergent light beam; the second light spot machine is used for monitoring the pointing angle of the emergent light beam, accurate measurement can be carried out in the debugging process of the light path, the light spot machine is fixedly installed during debugging, and errors caused by the fact that a mobile platform is used in a traditional method are avoided.
Drawings
Fig. 1 is a schematic diagram of one of the high-precision optical path adjusting devices according to the present invention.
FIG. 2 is a schematic diagram of a second high-precision optical path adjusting apparatus according to the present invention.
Description of reference numerals:
1. a light source module; 11. adjusting the bracket; 12. a fiber collimator; 13. a reference light source; 14. a first beam splitter; 15. an autocollimator; 16. an adjusting frame; 17. a power meter; 2. a receiving module; 21. a partial reflection beam splitter; 22. a second spectroscope; 23. a coaxial focusing lens; 24. a first spot machine; 25. a second spot machine; 26. an optical frame; 27. a sliding guide rail; 3. an optical module to be debugged; 4. a first aperture stop; 5. a second aperture stop; 6. the mirror is angularly aligned.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples:
referring to fig. 1, a high-precision optical light path debugging device includes a light source module 1 and a receiving module 2, where the light source module 1 is configured to provide reference light used for debugging and a feedback signal in a debugging process, and the receiving module 2 is configured to test positions and pointing angles of light beams before and after debugging of a light path; the light source module 1 comprises an adjusting bracket 11, an optical fiber collimator 12, a reference light source 13 and a first spectroscope 14, wherein the optical fiber collimator 12 is installed on the optical five-dimensional adjusting bracket 11, and light output by the reference light source 13 is input into the optical module 3 to be debugged through the optical fiber collimator 12 and the first spectroscope 14 to be used as a reference light source for debugging an optical light path; the receiving module 2 comprises a partial reflection spectroscope 21, a second spectroscope 22, a coaxial focusing lens 23, a first light spot machine 24 and a second light spot machine 25, the partial reflection spectroscope 21 is arranged on an optical lens frame 26, light output by the optical module 3 to be debugged is emitted to the first light spot machine 24 and the coaxial focusing lens 23 respectively after passing through the second spectroscope 22, and the light focused after passing through the coaxial focusing lens 23 is input into the second light spot machine 25.
The first spot machine 24 is arranged on the sliding guide rail 27 and used for monitoring the position of the emergent light beam; the second spot machine 25 is disposed on the focal plane of the coaxial focusing lens 23, and is configured to monitor the pointing angle of the outgoing light beam.
The optical module 3 to be debugged is provided with a first aperture diaphragm 4 and a second aperture diaphragm 5 which can be adjusted respectively at the optical input and output port, and the first aperture diaphragm 4 and the second aperture diaphragm 5 are used for roughly adjusting the non-visible light optical path.
An autocollimator 15 is disposed on one side of the first beam splitter 14, the autocollimator 15 is connected to a camera capable of receiving a wavelength of the reference light, and the autocollimator 15 is configured to receive a return light reflected by the partial reflection beam splitter. The autocollimator 15 is arranged on an adjusting frame 16, and the adjusting frame 16 is used for adjusting the pitch and yaw angles of the autocollimator 15. An optical circulator is arranged in the reference light source 13, a first interface of the optical circulator is connected with the light source, a second interface of the optical circulator is connected with the optical fiber collimator 12, and a third interface of the optical circulator is connected with the power meter 17. When the light path of the return light and the light path of the light emitted from the original collimator are completely parallel and the positions of the return light and the light path of the light emitted from the original collimator coincide, the light energy received by the power meter 17 is the maximum. When the optical fiber used by the optical fiber collimator 12 is a single-mode optical fiber, the accuracy of tuning the optical path using the coupling method will reach the second level.
Referring to fig. 2, the optical module 3 to be debugged is provided with an angle-collimating mirror 6, which is partially reflective. When the incident/emergent light has a turning/angle, the debugging of the optical path of the optical module can be carried out according to the actual requirement only by adding one or a plurality of angle calibration reflectors 6 with angles calibrated in advance at the light-emitting module.
The debugging method of the high-precision optical light path debugging device comprises the following steps:
s1, calibrating the light source module 1: fixing the first spectroscope 14 at a position corresponding to the incident light on the light path at 45 degrees; fixing a partial reflection light-splitting sheet 21 arranged on an optical lens bracket 26 at a corresponding position of emergent light of a light path, wherein the partial reflection light-splitting sheet 21 is plated with a partial reflection film and can reflect partial reference light, and the partial reflection light-splitting sheet 21 can adjust pitching and yawing; the autocollimator 15 is arranged on the adjusting frame 16, the autocollimator 15 contains a coaxial light source (the light source is visible light), the camera of the autocollimator 15 can receive self coaxial light and reference light at the same time, the angles of the autocollimator 15 and the partial reflection spectroscope 21 are adjusted, the light emitted by the light source of the autocollimator 15 is received by the camera of the autocollimator 15 after being reflected by the partial reflection spectroscope 21 (the light is presented as a cross image on the autocollimator 15 software, the cross image is adjusted to the central position of the autocollimator 15 camera software, and the image is taken as a reference image, at this time, the light source of the autocollimator 15 is vertically incident or reflected to the partial reflection spectroscope 21);
placing an optical fiber collimator 12 on an optical five-dimensional adjusting bracket 11, wherein the front end of light incidence is connected with a reference light source 13; adjusting the pitching and yawing positions of the optical fiber collimator 12 to enable the reference light to be partially reflected by the partial reflection beam splitter 21 and then coupled and received by the optical fiber collimator 12 through the first beam splitter 14, wherein the reference light vertically enters or is reflected onto the partial reflection beam splitter 21 and is parallel to the light source of the autocollimator 15; because the system may have errors, the two may not completely overlap, at this time, the pitching and the yawing of the optical fiber collimator 12 are finely adjusted, so that the coupling efficiency of the optical fiber collimator 12 reaches the highest (the energy of the return light is detected by the power meter 17, and the energy displayed by the power meter 17 is the largest at this time), the imaging point of the reference light is used as a new reference point (the imaging point is used as a reference point by using the image identification and positioning function of the autocollimator 15 itself, and the imaging point is used as a reference point in the subsequent optical path debugging process, so as to perform visual position adjustment, and the reference point also represents the position of the optical fiber collimator 12 where the coupling efficiency of the return light is the largest, and by the method, the difficulty of debugging can be reduced); in the debugging process, the first aperture diaphragm 4 and the second aperture diaphragm 5 play roles in limiting the position of a light beam and facilitating coarse adjustment;
s2, calibrating a receiving module 2: a second spectroscope 22 placed at 45 degrees is added in the light path, the transmitted reference light is divided into two beams which are respectively projected to a first light spot machine 24 and a second light spot machine 25, and the installation positions of the first light spot machine 24 and the second light spot machine 25 are adjusted to enable the light spots to be projected at the central position of the imaging software of the light spot machine; adjusting the front and back positions of the second spot machine 25, finding the focus of the focused spot (when the spot of the spot machine is over-exposed due to large focusing energy during debugging, the intensity of a reference light source can be properly adjusted or an attenuation sheet is placed in front of the spot machine), monitoring whether the position of the light beam deviates or not by comparing the central position of the 24 spots of the first spot machine, and monitoring whether the pointing angle of the light beam changes or not by comparing the central position of the 25 spots of the second spot machine; automatic data processing software can be developed later to convert the position coordinates displayed by the first spot machine 24 and the second spot machine 25 into the position deviation and the angle deviation of the light beam in real time.
S3, debugging the optical path of the system: before the optical module 3 to be debugged is added, the central coordinates of light spots on the first light spot machine 24 and the second light spot machine 25 are recorded and are used as a reference before the light path module is debugged; adding the optical module 3 to be debugged into a setting area between the light source module 1 and the receiving module 2 (when the optical module 3 to be debugged is not debugged, the readings on the two first light spot machines 24 and the second light spot machine 25 will change (or the light spot is completely invisible) before and after the optical module 3 to be debugged is added, at this time, the power meter 17 will not receive the readings, and the position of the reference light reflection imaging point on the imaging surface of the autocollimator 15 will also change (or disappear)), adjusting the optical module 3 to be debugged to make the reference light returning along the original path after passing through the partial reflection beam splitter 21 re-image on the display interface of the autocollimator 15, continuing to fine-tune the optical module 3 to be debugged to move the imaging point to the reference point position according to the imaging point on the autocollimator 15, reading out the energy value of the coupling light by using the power meter 17, ensuring that the emergent light of the system added with the optical module 3 to be debugged is perpendicular to the partial reflection beam splitter 21 (that the optical module 3 to be debugged is added) (that the optical module 3 to be debugged is perpendicular to the partial reflection beam splitter 21) Before and after the module 3, the light-emitting angle is not changed, the light-emitting angles are parallel to each other), and the change of the optical module 3 to be debugged to the light-emitting angle can be calculated through the position deviation of the light spots of the second light spot machine 25; then, according to the deviation between the central position of the light spot on the first light spot machine 24 and the initial value, the optical module 3 to be debugged is continuously adjusted, and the central position of the light spot displayed on the first light spot machine 24 is adjusted to the position before being placed in the light path module (note that, in the light beam position adjustment process, the light beam angle may also change, and the angle needs to be adjusted back in time, and the adjustment can be performed with reference to the central positions of the reference light image on the autocollimator 15 and the focusing image on the second light spot machine 25); and when the central positions of the light spot images on the first light spot machine 24 and the second light spot machine 25 are adjusted to be consistent with the positions before the light spot images are put into the optical module 3 to be debugged, completing debugging.
In the debugging process, the return light imaging and return loss energy value on the autocollimator 15 and the spot center positions on the first spot machine 24 and the second spot machine 25 are all actually readable values, and the accurate effect parameters for debugging the optical module can be obtained by substituting and calculating the values and the optical path.
In practical application, according to the debugging complexity of the optical module 3 to be debugged, similar receiving modules 21 can be added to other positions of the system, so that the complicated optical path module can be calibrated step by step. Moreover, the receiving module 2 and the partial reflection spectroscope 21 can be used as a movable integral module, and the movable integral module can be arranged at any light emitting position, so that the distribution adjustment is convenient.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the present specification and the drawings, or applied directly or indirectly to other related technical fields, are included in the scope of the present invention.

Claims (8)

1. A high-precision optical light path debugging device is characterized in that: the device comprises a light source module (1) and a receiving module (2), wherein the light source module (1) is used for providing reference light used for debugging and feedback signals in the debugging process, and the receiving module (2) is used for testing the positions and pointing angles of light beams before and after the debugging of a light path; the light source module (1) comprises an adjusting bracket (11), an optical fiber collimator (12), a reference light source (13) and a first spectroscope (14), wherein the optical fiber collimator (12) is installed on the adjusting bracket (11), and light output by the reference light source (13) is input into the optical module (3) to be debugged through the optical fiber collimator (12) and the first spectroscope (14) and is used as the reference light source for debugging an optical light path; the receiving module (2) comprises a partial reflection light splitting sheet (21), a second light splitting mirror (22), a coaxial focusing lens (23), a first light spot machine (24) and a second light spot machine (25), the partial reflection light splitting sheet (21) is arranged on an optical lens frame (26), light output by the optical module (3) to be debugged is emitted to the first light spot machine (24) and the coaxial focusing lens (23) respectively after passing through the second light splitting mirror (22), and the light focused after passing through the coaxial focusing lens (23) is input into the second light spot machine (25).
2. The high-precision optical path adjustment device according to claim 1, wherein: the first spot machine (24) is arranged on the sliding guide rail (27) and used for monitoring the position of the emergent light beam; and the second spot machine (25) is arranged on the focal plane of the coaxial focusing lens (23) and is used for monitoring the pointing angle of the emergent light beam.
3. The high-precision optical path adjustment device according to claim 2, wherein: the optical module (3) to be debugged is provided with a first aperture diaphragm (4) and a second aperture diaphragm (5) which are adjustable at the light input and output port respectively, and the first aperture diaphragm (4) and the second aperture diaphragm (5) are used for roughly adjusting the non-visible light path.
4. The high-precision optical path adjusting device according to claim 3, wherein: an autocollimator (15) is arranged on one light-returning reflection side of the first spectroscope (14), and the autocollimator (15) is connected with a camera capable of receiving the wavelength of the reference light.
5. The high-precision optical path adjustment device according to claim 4, wherein: the autocollimator (15) is arranged on an adjusting frame (16), and the adjusting frame (16) is used for adjusting the pitching and yawing angles of the autocollimator (15).
6. The high-precision optical path adjustment device according to claim 5, wherein: an optical circulator is arranged in the reference light source (13), a first interface of the optical circulator is connected with the light source, a second interface of the optical circulator is connected with the optical fiber collimator (12), and a third interface of the optical circulator is connected with the power meter (17).
7. The high-precision optical path adjustment device according to claim 1, wherein: an angle calibration reflector (6) is arranged at the light output port of the optical module (3) to be debugged, and the reflector is partially reflective.
8. The debugging method of the high-precision optical path debugging device according to claim 6, comprising: the method comprises the following steps:
s1, calibrating the light source module (1): fixing a first spectroscope (14) at a position corresponding to incident light on a light path at 45 degrees; fixing a partial reflection light splitting sheet (21) arranged on an optical frame (26) at a position corresponding to light emitted from a light path; arranging the autocollimator (15) on an adjusting frame (16), adjusting the angles of the autocollimator (15) and the partial reflection spectroscope (21), and enabling light emitted by a light source of the autocollimator (15) to be received by a camera of the autocollimator (15) after being reflected by the partial reflection spectroscope (21); placing an optical fiber collimator (12) on an optical five-dimensional adjusting bracket (11), wherein the front end of light incidence is connected with a reference light source (13); adjusting the pitching and yawing positions of the optical fiber collimator (12), so that reference light can be partially reflected by the partial reflection beam splitter (21) and then coupled and received by the optical fiber collimator (12) through the first beam splitter (14), and the reference light also vertically enters or is reflected onto the partial reflection beam splitter (21) and is parallel to a light source of the autocollimator (15); when the coupling efficiency of the optical fiber collimator (12) reaches the maximum, taking an imaging point of the reference light as a new reference point;
s2, calibrating a receiving module (2): a second spectroscope (22) placed at 45 degrees is added in a light path, transmitted reference light is divided into two beams which are respectively projected to a first light spot machine (24) and a second light spot machine (25), the installation positions of the first light spot machine (24) and the second light spot machine (25) are adjusted, and light spots are projected to the central position of imaging software of the light spot machine; adjusting the front and back positions of the second light spot machine (25), finding out the focus of a focused light spot, monitoring whether the position of the light beam deviates or not by comparing the central position of the light spot of the first light spot machine (24), and monitoring whether the pointing angle of the light beam changes or not by comparing the central position of the light spot of the second light spot machine (25);
s3, debugging the optical path of the system: before the optical module (3) to be debugged is added, the central coordinates of light spots on a first light spot machine (24) and a second light spot machine (25) are recorded and are used as a reference before the light path module is debugged; adding an optical module (3) to be debugged into a set area between a light source module (1) and a receiving module (2), adjusting the optical module (3) to be debugged to enable reference light to pass through a partial reflection beam splitter (21) and then to re-image light returned along the original path on a display interface of an autocollimator (15), continuously finely adjusting the optical module (3) to be debugged to move an imaging point to a reference point position according to the imaging point on the autocollimator (15), reading out the energy value of coupled light by using a power meter (17), ensuring that system emergent light added with the optical module (3) to be debugged is perpendicular to the partial reflection beam splitter (21), and calculating the change of the optical module (3) to be debugged to the emergent light angle by using the position deviation of light spots of a second light spot machine (25); then, according to the deviation condition between the central position of the light spot on the first light spot machine (24) and the initial value, continuously adjusting the optical module (3) to be debugged, and adjusting the central position of the light spot displayed on the first light spot machine (24) to the position before the light path module is placed; and when the central positions of the light spot images on the first light spot machine (24) and the second light spot machine (25) are adjusted to be consistent with the positions before the light spot images are put into the optical module (3) to be debugged, completing debugging.
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CN115267985A (en) * 2022-08-10 2022-11-01 武汉联特科技股份有限公司 Lens coupling collimation system and method
CN115839826A (en) * 2022-11-03 2023-03-24 长园视觉科技(珠海)有限公司 Detection device and detection method for transmittance and numerical aperture of optical fiber

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