CN111055030A - Device and method for monitoring and feeding back light beam pointing stability - Google Patents
Device and method for monitoring and feeding back light beam pointing stability Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains
Abstract
The invention discloses a light beam pointing stability monitoring and feedback device which comprises a light source and a detection and correction device, wherein the light source is used for providing indicating light and processing laser, the detection and correction device is used for detecting and correcting the light spot position of the indicating light, and the light source and the detection and correction device are integrated in a laser processing light path through a plurality of spectroscopes. The invention also discloses a method, which comprises the steps of detecting the light spot of the indication detection light returned by the original light path device in real time to obtain the real-time light spot position of the laser processing light beam, comparing the real-time light spot position with the calibrated initial light spot position, acquiring the offset of the light spot position to obtain the offset angle of the laser processing light beam when the real-time light spot position is not consistent with the initial light spot position, and adjusting the internal reflector angle by the vibrating mirror system according to the offset angle to adjust the light path, thereby realizing the real-time correction of the laser processing light beam.
Description
Technical Field
The invention relates to the technical field of beam pointing stability monitoring and feedback control, in particular to a method and a device for monitoring and feedback control and adjustment of the stability of a laser device galvanometer output for realizing high-precision galvanometer processing, especially the pointing position of a laser return beam output by the galvanometer, and specifically relates to a device and a method for monitoring and feedback control of beam pointing stability.
Background
Laser machining has been widely used in modern manufacturing, particularly in the fields of precision machining, micromachining, including cutting, marking, jet printing, drilling, engraving, scanning, and the like. The instability of the laser beam pointing greatly affects the processing precision, and the stability of the laser pointing determines the processing precision of fine laser manufacturing equipment, so that the stable laser beam pointing is one of the core problems to be solved by various laser high-precision manufacturing equipment.
When a laser is used to perform pattern processing on a workpiece, a laser beam is generally emitted by a laser, and then the laser beam is scanned at a high speed by a laser galvanometer to act on the workpiece, so that the corresponding pattern processing is finally completed. With the long-term use of the laser galvanometer, the precision of the laser galvanometer can be changed due to external factors such as ambient temperature, humidity and vibration and the temperature drift of the laser galvanometer. In the process of using the galvanometer to carry out high-precision laser processing, strict requirements on the processing precision of the galvanometer are often required, and the main method for solving the problem is to correct the galvanometer before sample processing, namely to calibrate the position of the galvanometer by using a positioning calibration plate, a light beam quality analyzer and other tools before the processing is started, and to correct the galvanometer according to results after the calibration is finished. Meanwhile, in order to ensure the long-term processing precision, the laser galvanometer needs to be corrected again irregularly. At present, when the laser galvanometer is corrected, the laser galvanometer needs to be checked after system shutdown, the phenomenon of unstable laser beam pointing can occur again along with the increase of processing time, and the problems seriously influence the precision of laser processing and the sample processing efficiency.
Chinese patent publication No. CN109483047A discloses a method for detecting and correcting the pointing direction of a laser beam terminal and a laser processing device, which lay out and calibrate the spatial position of the detection and correction device pointed by the laser beam terminal according to the optical path conjugation principle, so that the offset of the spot position in the field of view is equal to the offset of the actual laser processing spot position, and the spot position of the detection device represents the spot offset of the laser processing surface. However, the patent has the following defects: (1) the method comprises the following steps that a galvanometer system is extracted out of the laser beam terminal pointing detection and correction, a light beam returning from the surface of a processed workpiece directly reaches a vision system through a spectroscope and a reflector for detection, the deviation of the lens base of the spectroscope and the reflector can cause the deviation of the returning light beam, and the deviation is not generated by the galvanometer system, so that the real-time correction of the galvanometer system in the processing process has errors, and the correction precision is influenced; (2) because the optical path conjugation principle is adopted, the positions of the spectroscope, the reflector, the vision system and the working surface are limited, the whole device occupies large space and is not beneficial to system integration; (3) the indicating light is in contact with the workpiece surface; (4) the outgoing beam of the vibrating mirror is split by the spectroscope and then enters the processing surface, the size of the spectroscope is designed according to the actual processing breadth, if the breadth requirement is large, the size of the spectroscope needs to be large, the requirement on the lens surface type is high, and the installation is difficult.
When the laser galvanometer is used for long-term processing, the processing precision of the laser galvanometer can be changed due to external factors such as ambient temperature, humidity and vibration and the temperature drift of the laser galvanometer, and the specific reason is that the position direction of the emergent light beam of the galvanometer is changed. In order to overcome the positioning deviation caused by the pointing deviation of the galvanometer system in the laser processing system and solve the defects of the prior art, a method and a device which can be integrated in laser processing equipment and can monitor the pointing stability of galvanometer processing and perform feedback correction are needed to be designed.
Disclosure of Invention
The invention aims to provide a device and a method for monitoring and feeding back the pointing stability of a light beam, aiming at the problems in the prior art, and solving the problem of positioning deviation caused by the pointing deviation of a galvanometer system in a laser processing system.
In order to achieve the purpose, the invention adopts the technical scheme that:
the utility model provides a light beam directional stability monitoring and feedback device, includes the light source and detects correcting element, the light source is used for providing instruction light and processing laser, detect correcting element and be used for detecting and correcting the facula position of instruction light, the light source with detect correcting element and pass through a plurality of spectroscopes integration in laser beam machining light path.
Preferably, the plurality of beam splitters includes a first beam splitter, a second beam splitter and a third beam splitter.
Preferably, the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light enters the first beam splitter and is reflected to the second beam splitter by the first beam splitter, the processing laser light is transmitted through the second beam splitter, the indicating light and the processing laser light are combined by the second beam splitter, the combined light enters the galvanometer system, and the light emitted by the galvanometer system enters the third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
Preferably, the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light enters the first beam splitter and is reflected to the second beam splitter by the first beam splitter, the indicating light transmits through the second beam splitter, the indicating light and the processing laser light reflected by the second beam splitter are combined, the combined light enters the galvanometer system, and the light emitted by the galvanometer system enters the third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
Preferably, the light source includes a processing laser light source, the processing laser light source emits processing laser light, the processing laser light is incident to the mirror vibration system via the first spectroscope and the second spectroscope, light emitted by the mirror vibration system is incident to the third spectroscope, most of the processing laser light is transmitted through the third spectroscope, a small part of the processing laser light is reflected by the third spectroscope as indicating light, and the reflected light path reaches the detection and correction device along the mirror vibration system, the second spectroscope and the first spectroscope.
Preferably, the detection correction device is preceded by a beam processing module.
Preferably, the beam processing module comprises any one of: attenuator, focusing device, attenuator and focusing device, and beam shaper.
Preferably, the detection correction means includes any one of: a beam analyzer, a PSD photoelectric position sensor, a high-resolution high-frame-frequency CCD camera and a COMS camera.
A method for monitoring and feeding back beam pointing stability comprises the following steps:
collecting and calibrating an indicating light detection beam returned along an original light path device to obtain an initial calibration light spot position;
identifying an indicating light detection beam returned in the laser processing process to obtain a real-time light spot position;
comparing the real-time light spot position with the initial light spot position;
when the real-time light spot position is not consistent with the initial light spot position, acquiring the offset angle of the laser processing light beam;
and the galvanometer system adjusts the light path in the galvanometer system according to the offset angle of the laser processing beam to realize the pointing correction of the laser processing beam.
Preferably, after the laser processing beam is corrected, the spot position returned by the indication light detection beam is identified, and the current spot position is compared with the initial spot position to judge whether the laser processing beam needs to be corrected again.
Further, the galvanometer system respectively adjusts the offset angles of two electric reflectors which are spatially distributed in the galvanometer system according to the received offset angles to realize the optical path adjustment.
Furthermore, the inside of the galvanometer system is composed of two electric reflectors which are distributed in space, one reflector can realize scanning in the X direction, the other reflector can realize scanning in the Y direction, and the galvanometer system adjusts the offset angle of the first reflector and the second reflector according to the received offset (△ X, △ Y) to realize light path adjustment.
Compared with the prior art, the invention has the beneficial effects that:
(1) the device integrates the detection and correction device and the indicating light source into the existing laser processing light path through the plurality of spectroscopes, monitors and feeds back the pointing stability in the galvanometer system, and can solve the problem of processing light beam pointing offset in the existing galvanometer system.
(2) The device can adopt various optical path integration modes, occupies small space and has flexible and variable structure.
(3) The method comprises the steps of detecting light spots of indication detection light returned by an original light path device in real time to obtain real-time light spot positions of laser processing light beams, comparing the real-time light spot positions with a calibrated initial light spot position, acquiring offset of the light spot positions to obtain offset angles of the laser processing light beams when the real-time light spot positions are not consistent with the initial light spot positions, and adjusting internal reflector angles by a galvanometer system according to the offset angles to adjust light paths, so that real-time correction of the laser processing light beams is realized; the method can be used for online real-time adjustment, and the overall processing efficiency of the laser processing device is improved.
(4) The indication light for monitoring and feedback by the method can not contact with the processing surface, does not act on the processing surface, and does not influence the processing effect of the laser processing beam;
(5) the method can monitor the angle deviation of the emergent light beam of the galvanometer system by monitoring the spot position of the returned indicating detection light beam, can identify and check the laser processing light beam emergent by the galvanometer system, can repeat the positioning precision, and can carry out high-precision control on the galvanometer through the deviation angle of the fed-back indicating detection light beam so as to ensure the quality of laser processing products.
Drawings
Fig. 1 is a schematic diagram of a beam pointing stability monitoring and feedback device according to an embodiment of the invention.
Fig. 2 is a schematic diagram of a beam pointing stability monitoring and feedback apparatus according to another embodiment of the present invention.
FIG. 3 is a schematic diagram of a beam pointing stability monitoring and feedback apparatus using a processing laser as a pointing light according to another embodiment of the present invention.
FIG. 4 is a flowchart of a beam pointing stability monitoring and feedback method according to an embodiment of the invention.
FIG. 5 is a diagram illustrating the optical paths of the detection beams when the detection beam pointing direction is not shifted according to an embodiment of the present invention.
Fig. 6 is a diagram illustrating the state of the optical path when the detection beam pointing direction is shifted according to the embodiment of the present invention.
In the figure: 1. an indicator light; 2/2 '/2', a first beam splitter; 3/3 '/3', a second beam splitter; 4. a galvanometer; 5/5 '/5', a third beam splitter; 6. a light beam processing module; 7. the correction device is detected.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
On one hand, the invention provides a light beam pointing stability monitoring and feedback device, wherein a light source and a detection and correction device 7 are added in a laser processing light path, and the light source and the detection and correction device 7 are integrated in the processing light path through a spectroscope. The light source comprises an indicating light source and a processing laser light source. The indicating light emitted by the indicating light source is a common indicating laser wave band, such as 266nm, 355nm, 450nm, 532nm, 650nm, 850nm, 1064nm and other wave bands. The detection and correction device 7 is used for detecting a light beam image of the indicating light or position information thereof, and obtains the centroid position of the light beam through software processing and analysis, and can be a light beam analysis camera device or a photoelectric position sensing device such as a PSD (position sensitive detector) and the like, the photoelectric position sensor has high spatial resolution, and the measurement of the position of the laser incident light beam can reach high precision. The detection and correction device 7 is provided with a light beam processing module 6 in front, and the light beam processing module 6 can be an attenuation device, a focusing device, or a combination of the attenuation device and the focusing device, or other light beam shaping devices, so that light beams can be well identified on the photoelectric position sensing device. The indicating light source 1 and the detection correction device 7 are distributed on two sides of the spectroscope.
And the indicating light and the processing laser are combined through another light splitting lens after passing through the light splitting lens. The spectroscope can be a lens which can fully transmit processing laser, partially or totally reflect indicating light, or a lens which can fully reflect processing laser, partially or totally transmit indicating light. Two bundles of lasers get into mirror 4 that shakes after the beam combination, and the mirror system that shakes includes two spatial distribution's electronic reflectors, and the scanning of X direction can be realized to a reflector, and the scanning of Y direction can be realized to another reflector.
A spectroscope is arranged below the galvanometer 4, wherein the spectroscope can enable the processing laser to be completely transmitted and the indicating light to be completely reflected or partially reflected. The indicating light is incident to the spectroscope below the galvanometer 4 through the galvanometer 4 and then reflected, the reflected light is incident to the photoelectric detector through the original incident optical device and the light beam processing module 6 in front of the detection and correction device 7, and at the moment, the photoelectric detector can accurately detect the position information of the incident laser.
Specifically, when the indicating light source is used for providing indicating light, the spectroscope below the galvanometer 4 can adopt a lens of full-transmission processing laser and full-reflection indicating light; when the processing laser is used as the indicating light, the spectroscope below the galvanometer 4 can adopt a partially reflective and partially transmissive lens, for example, a 99% transmissive and 1% reflective lens, so that 99% of the light emitted by the galvanometer 4 is incident to the processing surface as the processing laser, and 1% is returned to the detection and correction device along the original optical path as the indicating light.
The device integrates the detection and correction device 7 and the indicating light source 1 into the existing laser processing light path through a plurality of spectroscopes, monitors and feeds back the pointing stability in the galvanometer system, and can solve the problem of processing light beam pointing deviation in the existing galvanometer system.
As an embodiment, as shown in fig. 1, the plurality of beam splitters includes a first beam splitter 2, a second beam splitter 3 and a third beam splitter 5. The first spectroscope 2 is the lens of semi-transparent indicating light, semi-reflection indicating light, the second spectroscope 3 is the lens of full-transparent processing laser, semi-reflection or full-reflection indicating light, the third spectroscope 5 is the lens of full-transparent processing laser, full-reflection indicating light.
Specifically, the light source comprises an indicating light source 1 and a processing laser light source, the indicating light source 1 emits indicating light, the processing laser light source emits processing laser light, the indicating light enters a first beam splitter 2 and is reflected to a second beam splitter 3 through the first beam splitter 2, the processing laser light penetrates through the second beam splitter 3, the indicating light and the processing laser light are combined through the second beam splitter 3, the combined light enters a vibrating mirror system, and the light emitted by the vibrating mirror system enters a third beam splitter 5; the processing laser is transmitted through the third beam splitter 5, the indicating light is reflected by the third beam splitter 5, and the reflected light path reaches the detection and correction device 7 along the vibrating mirror system, the second beam splitter 3 and the first beam splitter 2.
As an embodiment, as shown in fig. 2, the plurality of beam splitters includes a first beam splitter 2', a second beam splitter 3' and a third beam splitter 5 '. The first spectroscope 2' is the lens of semi-transparent indicating light, semi-reflection indicating light, the second spectroscope 3' is the lens of full reflection processing laser, semi-transparent or full transmission indicating light, the third spectroscope 5' is the lens of full transmission processing laser, full reflection indicating light.
Specifically, the light source comprises an indicating light source 1 and a processing laser light source, the indicating light source 1 emits indicating light, the processing laser light source emits processing laser light, the indicating light enters a first beam splitter 2', the indicating light is reflected to a second beam splitter 3' through the first beam splitter 2', the indicating light is transmitted through the second beam splitter 3', the indicating light and the processing laser light reflected by the second beam splitter 3' are combined, the combined light enters a galvanometer system, and the light emitted by the galvanometer system enters a third beam splitter 5; the processing laser is transmitted through the third beam splitter 5', the indicating light is reflected by the third beam splitter 5', and the reflected light path reaches the detection and correction device 7 along the galvanometer system, the second beam splitter 3 'and the first beam splitter 2'.
As an embodiment, as shown in fig. 3, the plurality of beam splitters includes a first beam splitter 2 ", a second beam splitter 3", and a third beam splitter 5 ". The first spectroscope 2 "is a partially reflective and partially transmissive lens, the second spectroscope 3" is a totally reflective lens for indicating light, and the third spectroscope 5 "is a partially reflective and partially transmissive lens.
Specifically, the light source includes processing laser light source, processing laser light source sends processing laser, processing laser incides the mirror system that shakes via first spectroscope 2 ", second spectroscope 3", the third spectroscope 5 "is incided to the light of mirror system outgoing that shakes, and most processing laser transmission passes through third spectroscope 5", and the reflection of light path edge mirror system that shakes, second spectroscope 3 ", first spectroscope 2" reaches detection correcting unit 7 as the pilot light via third spectroscope 5 "reflection, reflection light path.
As an embodiment, the detection correction means 7 includes any one of: a beam analyzer, a PSD photoelectric position sensor, a high-resolution high-frame-frequency CCD camera and a COMS camera. The detection and correction device 7 in fig. 1 and 2 is a high-resolution high-frame-rate CCD camera or a cmos camera.
As an embodiment, the detection and correction device 7 is preceded by a beam processing module 6. The beam processing module 6 comprises any one of: attenuator, focusing device, attenuator and focusing device, and beam shaper.
Specifically, a focusing device including a focusing mirror having a focal length F may be used as the beam processing module 6.
On the other hand, the present invention further provides a method for monitoring and feeding back beam pointing stability, as shown in fig. 4, comprising the following steps:
step 1, collecting and calibrating an indicating light detection beam reflected back to the detection and correction device 7 to obtain an initial calibration position light spot.
The galvanometer 4 is powered on and in an initial state to be processed, the indicating light emits light, the camera collects the indicating light reflected by a third beam splitter 5 below the galvanometer 4, the detection is continued, and when the light beam pointing is stable, the initial calibration light spot position is recorded;
and 2, identifying the position of the light spot of the return light beam of the detection light path in a time-sharing manner, and detecting whether the laser beam of the light path deviates.
The method comprises the steps that a camera collects light beams returned by a detection light path in an initial processing state of a galvanometer 4 at different online moments to obtain the position of a light spot, the position of the collected light spot is compared with the position of an initial calibration light spot obtained in the step 1, if the position of the collected light spot is not consistent with that of a target light spot, the offset of a laser processing light beam is obtained through the deviation of the collected light spot and the position of the initial calibration light spot, if the position of the collected light spot is not consistent with that of the target light spot, the laser processing light beam continues to be processed, if the position of an indicating light passes through the galvanometer 4 and is offset by a theta angle, equipment continues to be processed, if the indicating light passes through the galvanometer 4 and is offset by the theta angle, the light beam reflected back to the camera through a third spectroscope 55 is offset by 2 theta, if a focusing mirror with a focal length of F is arranged in a light beam processing module 6 in front of the camera, the distance △ of the light spot offset on the target surface of the camera is F tan (2 theta), and the offset △ X.
And 3, feedback correction.
The camera converts the offsets △ X and △ Y obtained in the step 2 into deflection angles and feeds the deflection angles back to the vibrating mirror 4 processing software, the processing software adjusts a reflector inside the vibrating mirror 4 according to received deflection angle data to adjust an optical path, and the pointing correction of a laser beam is realized.
And 4, after the real-time correction is finished, identifying and checking the corrected laser beam again, acquiring the corrected detection beam by the camera to obtain the corrected spot position, and repeating the step 2 and the step 3.
Through the working steps, the problem of long-term processing light beam pointing deviation of the existing galvanometer 4 can be solved, and the positioning processing precision of the galvanometer 4 of the equipment is greatly improved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The light beam pointing stability monitoring and feedback device is characterized by comprising a light source and a detection and correction device, wherein the light source is used for providing indicating light and processing laser, the detection and correction device is used for detecting and correcting the light spot position of the indicating light, and the light source and the detection and correction device are integrated in a laser processing light path through a plurality of spectroscopes.
2. The beam pointing stability monitoring and feedback device of claim 1, wherein the plurality of beam splitters includes a first beam splitter, a second beam splitter, and a third beam splitter.
3. The device for monitoring and feeding back beam pointing stability according to claim 2, wherein the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light is incident on a first beam splitter and reflected to a second beam splitter through the first beam splitter, the processing laser light is transmitted through the second beam splitter, the indicating light and the processing laser light are combined through the second beam splitter, the combined light is incident on a galvanometer system, and light emitted from the galvanometer system is incident on a third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
4. The device for monitoring and feeding back beam pointing stability according to claim 2, wherein the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light is incident on a first beam splitter and reflected to a second beam splitter by the first beam splitter, the indicating light is transmitted through the second beam splitter, the indicating light and the processing laser light reflected by the second beam splitter are combined, the combined light is incident on the galvanometer system, and the light emitted by the galvanometer system is incident on a third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
5. The device for monitoring and feeding back the pointing stability of the light beam according to claim 2, wherein the light source comprises a processing laser light source, the processing laser light source emits processing laser light, the processing laser light is incident to the galvanometer system through the first spectroscope and the second spectroscope, light emitted from the galvanometer system is incident to the third spectroscope, most of the processing laser light is transmitted through the third spectroscope, a small part of the processing laser light is reflected through the third spectroscope as indicating light, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
6. The apparatus according to any one of claims 3 to 5, wherein the detection and correction device is preceded by a beam processing module.
7. The beam pointing stability monitoring and feedback device of claim 6, wherein the beam processing module comprises any one of: attenuator, focusing device, attenuator and focusing device, and beam shaper.
8. The beam pointing stability monitoring and feedback device according to any of claims 3 to 5, wherein the detection correction means comprises any of: a beam analyzer, a PSD photoelectric position sensor, a high-resolution high-frame-frequency CCD camera and a COMS camera.
9. A method for beam pointing stability monitoring and feedback, comprising:
collecting and calibrating an indicating light detection beam returned along an original light path device to obtain an initial calibration light spot position;
identifying an indicating light detection beam returned in the laser processing process to obtain a real-time light spot position;
comparing the real-time light spot position with the initial light spot position;
when the real-time light spot position is not consistent with the initial light spot position, acquiring the offset angle of the laser processing light beam;
and the galvanometer system adjusts the light path in the galvanometer system according to the offset angle of the laser processing beam to realize the pointing correction of the laser processing beam.
10. The method of claim 9, wherein after the laser processing beam is corrected, the position of the light spot returned by the optical detection beam is identified, and the current position of the light spot is compared with the initial position of the light spot to determine whether the laser processing beam needs to be corrected again.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911325879.6A CN111055030A (en) | 2019-12-20 | 2019-12-20 | Device and method for monitoring and feeding back light beam pointing stability |
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| CN201911325879.6A CN111055030A (en) | 2019-12-20 | 2019-12-20 | Device and method for monitoring and feeding back light beam pointing stability |
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| CN111055030A true CN111055030A (en) | 2020-04-24 |
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| CN201911325879.6A Pending CN111055030A (en) | 2019-12-20 | 2019-12-20 | Device and method for monitoring and feeding back light beam pointing stability |
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| CN112117633A (en) * | 2020-09-23 | 2020-12-22 | 中国科学院上海光学精密机械研究所 | Regenerative amplifier for stably controlling energy and light beam pointing and control method thereof |
| CN112846485A (en) * | 2020-12-31 | 2021-05-28 | 武汉华工激光工程有限责任公司 | Laser processing monitoring method and device and laser processing equipment |
| CN113210853A (en) * | 2021-04-13 | 2021-08-06 | 广东原点智能技术有限公司 | Optical path correction system and correction method thereof |
| CN113427134A (en) * | 2021-06-25 | 2021-09-24 | 西安交通大学 | Multi-axis laser processing system for on-machine error detection and correction |
| CN113458627A (en) * | 2021-08-05 | 2021-10-01 | 瑟福迪恩半导体设备技术(苏州)有限公司 | Light path dimming method of laser cutting equipment |
| CN113751905A (en) * | 2021-10-25 | 2021-12-07 | 吉林建筑科技学院 | Infrared laser spot position detection system and method |
| CN114060008A (en) * | 2021-11-25 | 2022-02-18 | 西安科技大学 | Laser pointing device for roadway construction and deviation correcting method thereof |
| WO2022253172A1 (en) * | 2021-06-02 | 2022-12-08 | 上海名古屋精密工具股份有限公司 | Method for compensating ultrafast laser light path rotation error, apparatus thereof, and machine tool |
| CN115493816A (en) * | 2022-11-08 | 2022-12-20 | 中国工程物理研究院激光聚变研究中心 | Method for improving target shooting precision of large laser device |
| CN116765643A (en) * | 2023-07-10 | 2023-09-19 | 广州市凯枫智能科技有限公司 | Light beam adjustment and light signal processing method and device based on welding detection light path |
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| CN113458627A (en) * | 2021-08-05 | 2021-10-01 | 瑟福迪恩半导体设备技术(苏州)有限公司 | Light path dimming method of laser cutting equipment |
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| CN114060008A (en) * | 2021-11-25 | 2022-02-18 | 西安科技大学 | Laser pointing device for roadway construction and deviation correcting method thereof |
| CN114060008B (en) * | 2021-11-25 | 2022-07-15 | 西安科技大学 | Laser pointing device for roadway construction and deviation rectifying method thereof |
| CN115493816A (en) * | 2022-11-08 | 2022-12-20 | 中国工程物理研究院激光聚变研究中心 | Method for improving target shooting precision of large laser device |
| CN116765643A (en) * | 2023-07-10 | 2023-09-19 | 广州市凯枫智能科技有限公司 | Light beam adjustment and light signal processing method and device based on welding detection light path |
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