CN212470240U - Light beam pointing stability monitoring and feedback device - Google Patents
Light beam pointing stability monitoring and feedback device Download PDFInfo
- Publication number
- CN212470240U CN212470240U CN201922311076.7U CN201922311076U CN212470240U CN 212470240 U CN212470240 U CN 212470240U CN 201922311076 U CN201922311076 U CN 201922311076U CN 212470240 U CN212470240 U CN 212470240U
- Authority
- CN
- China
- Prior art keywords
- light
- spectroscope
- light source
- processing laser
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
The utility model discloses a directional stability monitoring of light beam and feedback device, including light source and detection correcting element, the light source is used for providing instruction light and processing laser, it is used for detecting the facula position of correcting instruction light to detect correcting element, the light source with detect correcting element and pass through a plurality of spectroscopes integration in the laser beam machining light path. The utility model discloses to detect correcting element and instruct light to through a plurality of spectroscopes integrated to current laser beam machining light path in, monitor and feedback the directional stability in the mirror system that shakes, can solve the current directional skew problem of processing light beam that the mirror system that shakes exists.
Description
Technical Field
The utility model relates to a monitoring of the directional stability of light beam and feedback control technical field especially relate to the laser equipment that is used for realizing the high accuracy mirror processing that shakes mirror output, especially shake mirror output laser and return the device that the directional positional stability of light beam monitored and feedback control adjusted, specifically are a monitoring of the directional stability of light beam and feedback device.
Background
Laser machining has been widely used in modern manufacturing, particularly in the fields of precision machining, micromachining, including cutting, marking, jet printing, drilling, engraving, scanning, and the like. The instability of the laser beam pointing greatly affects the processing precision, and the stability of the laser pointing determines the processing precision of fine laser manufacturing equipment, so that the stable laser beam pointing is one of the core problems to be solved by various laser high-precision manufacturing equipment.
When a laser is used to perform pattern processing on a workpiece, a laser beam is generally emitted by a laser, and then the laser beam is scanned at a high speed by a laser galvanometer to act on the workpiece, so that the corresponding pattern processing is finally completed. With the long-term use of the laser galvanometer, the precision of the laser galvanometer can be changed due to external factors such as ambient temperature, humidity and vibration and the temperature drift of the laser galvanometer. In the process of using the galvanometer to carry out high-precision laser processing, strict requirements on the processing precision of the galvanometer are often required, and the main method for solving the problem is to correct the galvanometer before sample processing, namely to calibrate the position of the galvanometer by using a positioning calibration plate, a light beam quality analyzer and other tools before the processing is started, and to correct the galvanometer according to results after the calibration is finished. Meanwhile, in order to ensure the long-term processing precision, the laser galvanometer needs to be corrected again irregularly. At present, when the laser galvanometer is corrected, the laser galvanometer needs to be checked after system shutdown, the phenomenon of unstable laser beam pointing can occur again along with the increase of processing time, and the problems seriously influence the precision of laser processing and the sample processing efficiency.
When the laser galvanometer is used for long-term processing, the processing precision of the laser galvanometer can be changed due to external factors such as ambient temperature, humidity and vibration and the temperature drift of the laser galvanometer, and the specific reason is that the position direction of the emergent light beam of the galvanometer is changed. In order to overcome the positioning deviation caused by the pointing deviation of the galvanometer system in the laser processing system and solve the defects of the prior art, a device which can be integrated in laser processing equipment and is used for monitoring the pointing stability of galvanometer processing and feeding back and correcting is needed to be designed.
Disclosure of Invention
The utility model aims at the problem that prior art exists, provide a monitoring of directional stability of light beam and feedback device, solve the positioning deviation problem that the directional skew of mirror system caused that shakes in the laser processing system.
In order to achieve the above object, the utility model adopts the following technical scheme:
the utility model provides a light beam directional stability monitoring and feedback device, includes the light source and detects correcting element, the light source is used for providing instruction light and processing laser, detect correcting element and be used for detecting and correcting the facula position of instruction light, the light source with detect correcting element and pass through a plurality of spectroscopes integration in laser beam machining light path.
Preferably, the plurality of beam splitters includes a first beam splitter, a second beam splitter and a third beam splitter.
Preferably, the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light enters the first beam splitter and is reflected to the second beam splitter by the first beam splitter, the processing laser light is transmitted through the second beam splitter, the indicating light and the processing laser light are combined by the second beam splitter, the combined light enters the galvanometer system, and the light emitted by the galvanometer system enters the third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
Preferably, the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light enters the first beam splitter and is reflected to the second beam splitter by the first beam splitter, the indicating light transmits through the second beam splitter, the indicating light and the processing laser light reflected by the second beam splitter are combined, the combined light enters the galvanometer system, and the light emitted by the galvanometer system enters the third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
Preferably, the light source includes a processing laser light source, the processing laser light source emits processing laser light, the processing laser light is incident to the mirror vibration system via the first spectroscope and the second spectroscope, light emitted by the mirror vibration system is incident to the third spectroscope, most of the processing laser light is transmitted through the third spectroscope, a small part of the processing laser light is reflected by the third spectroscope as indicating light, and the reflected light path reaches the detection and correction device along the mirror vibration system, the second spectroscope and the first spectroscope.
Preferably, the detection correction device is preceded by a beam processing module.
Preferably, the beam processing module comprises any one of: attenuator, focusing device, attenuator and focusing device, and beam shaper.
Preferably, the detection correction means includes any one of: a beam analyzer, a PSD photoelectric position sensor, a high-resolution high-frame-frequency CCD camera and a COMS camera.
Furthermore, the interior of the galvanometer system is composed of two electric reflectors which are distributed in space, one reflector can realize scanning in the X direction, the other reflector can realize scanning in the Y direction, and the galvanometer system adjusts the offset angle of the first reflector and the second reflector according to the received offset (delta X and delta Y) to realize light path adjustment.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model discloses the device will detect correcting element and instruct the light source to pass through a plurality of spectroscopes integrated to current laser beam machining light path in, monitor and feedback the directional stability in the mirror system that shakes, can solve the directional skew problem of processing light beam that current mirror system that shakes exists.
(2) The utility model discloses the device can adopt multiple light path integrated mode, and occupation space is little, and the structure is nimble variable.
Drawings
Fig. 1 is a schematic diagram of a device for monitoring and feeding back the pointing stability of a light beam according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of a beam pointing stability monitoring and feedback device according to another embodiment of the present invention.
Fig. 3 is a schematic diagram of a beam pointing stability monitoring and feedback device using a processing laser as an indicator light according to another embodiment of the present invention.
Fig. 4 is a work flow chart of the device for monitoring and feeding back the pointing stability of a light beam according to the embodiment of the present invention.
Fig. 5 is a state diagram of the optical path indicating the pointing direction of the detection beam without deviation according to the embodiment of the present invention.
Fig. 6 is a diagram illustrating a state of an optical path when the direction of the detection beam is shifted according to an embodiment of the present invention.
In the figure: 1. an indicator light; 2/2 '/2', a first beam splitter; 3/3 '/3', a second beam splitter; 4. a galvanometer; 5/5 '/5', a third beam splitter; 6. a light beam processing module; 7. the correction device is detected.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are only some embodiments, not all embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The utility model provides a directional stability monitoring of light beam and feedback device adds the light source and detects correcting device 7 in laser beam machining light path, and the light source passes through the spectroscope integration with detecting correcting device 7 in the machining light path. The light source comprises an indicating light source and a processing laser light source. The indicating light emitted by the indicating light source is a common indicating laser wave band, such as 266nm, 355nm, 450nm, 532nm, 650nm, 850nm, 1064nm and other wave bands. The detection and correction device 7 is used for detecting a light beam image of the indicating light or position information thereof, and obtains the centroid position of the light beam through software processing and analysis, and can be a light beam analysis camera device or a photoelectric position sensing device such as a PSD (position sensitive detector) and the like, the photoelectric position sensor has high spatial resolution, and the measurement of the position of the laser incident light beam can reach high precision. The detection and correction device 7 is provided with a light beam processing module 6 in front, and the light beam processing module 6 can be an attenuation device, a focusing device, or a combination of the attenuation device and the focusing device, or other light beam shaping devices, so that light beams can be well identified on the photoelectric position sensing device. The indicating light source 1 and the detection correction device 7 are distributed on two sides of the spectroscope.
And the indicating light and the processing laser are combined through another light splitting lens after passing through the light splitting lens. The spectroscope can be a lens which can fully transmit processing laser, partially or totally reflect indicating light, or a lens which can fully reflect processing laser, partially or totally transmit indicating light. Two bundles of lasers get into mirror 4 that shakes after the beam combination, and the mirror system that shakes includes two spatial distribution's electronic reflectors, and the scanning of X direction can be realized to a reflector, and the scanning of Y direction can be realized to another reflector.
A spectroscope is installed below the galvanometer 4, wherein the spectroscope can make the indicating light totally reflect or partially reflect. The indicating light is incident to the spectroscope below the galvanometer 4 through the galvanometer 4 and then reflected, the reflected light is incident to the photoelectric detector through the original incident optical device and the light beam processing module 6 in front of the detection and correction device 7, and at the moment, the photoelectric detector can accurately detect the position information of the incident laser.
Specifically, when the indicating light source is used for providing indicating light, the spectroscope below the galvanometer 4 can adopt a lens of full-transmission processing laser and full-reflection indicating light; when the processing laser is used as the indicating light, the spectroscope below the galvanometer 4 can adopt a partially reflective and partially transmissive lens, for example, a 99% transmissive and 1% reflective lens, so that 99% of the light emitted by the galvanometer 4 is incident to the processing surface as the processing laser, and 1% is returned to the detection and correction device along the original optical path as the indicating light.
The utility model discloses the device will detect correcting element 7 and instruct light source 1 to through a plurality of spectroscopes integrated to current laser beam machining light path in, monitor and feedback the directional stability in the mirror system that shakes, can solve the current directional skew problem of processing light beam that the mirror system that shakes exists.
As an embodiment, as shown in fig. 1, the plurality of beam splitters includes a first beam splitter 2, a second beam splitter 3 and a third beam splitter 5. The first spectroscope 2 is the lens of semi-transparent indicating light, semi-reflection indicating light, the second spectroscope 3 is the lens of full-transparent processing laser, semi-reflection or full-reflection indicating light, the third spectroscope 5 is the lens of full-transparent processing laser, full-reflection indicating light.
Specifically, the light source comprises an indicating light source 1 and a processing laser light source, the indicating light source 1 emits indicating light, the processing laser light source emits processing laser light, the indicating light enters a first beam splitter 2 and is reflected to a second beam splitter 3 through the first beam splitter 2, the processing laser light penetrates through the second beam splitter 3, the indicating light and the processing laser light are combined through the second beam splitter 3, the combined light enters a vibrating mirror system, and the light emitted by the vibrating mirror system enters a third beam splitter 5; the processing laser is transmitted through the third beam splitter 5, the indicating light is reflected by the third beam splitter 5, and the reflected light path reaches the detection and correction device 7 along the vibrating mirror system, the second beam splitter 3 and the first beam splitter 2.
As an embodiment, as shown in fig. 2, the plurality of beam splitters includes a first beam splitter 2', a second beam splitter 3' and a third beam splitter 5 '. The first spectroscope 2' is the lens of semi-transparent indicating light, semi-reflection indicating light, the second spectroscope 3' is the lens of full reflection processing laser, semi-transparent or full transmission indicating light, the third spectroscope 5' is the lens of full transmission processing laser, full reflection indicating light.
Specifically, the light source comprises an indicating light source 1 and a processing laser light source, the indicating light source 1 emits indicating light, the processing laser light source emits processing laser light, the indicating light enters a first beam splitter 2', the indicating light is reflected to a second beam splitter 3' through the first beam splitter 2', the indicating light is transmitted through the second beam splitter 3', the indicating light and the processing laser light reflected by the second beam splitter 3' are combined, the combined light enters a galvanometer system, and the light emitted by the galvanometer system enters a third beam splitter 5; the processing laser is transmitted through the third beam splitter 5', the indicating light is reflected by the third beam splitter 5', and the reflected light path reaches the detection and correction device 7 along the galvanometer system, the second beam splitter 3 'and the first beam splitter 2'.
As an embodiment, as shown in fig. 3, the plurality of beam splitters includes a first beam splitter 2 ", a second beam splitter 3", and a third beam splitter 5 ". The first spectroscope 2 "is a partially reflective and partially transmissive lens, the second spectroscope 3" is a totally reflective lens for indicating light, and the third spectroscope 5 "is a partially reflective and partially transmissive lens.
Specifically, the light source includes processing laser light source, processing laser light source sends processing laser, processing laser incides the mirror system that shakes via first spectroscope 2 ", second spectroscope 3", the third spectroscope 5 "is incided to the light of mirror system outgoing that shakes, and most processing laser transmission passes through third spectroscope 5", and the reflection of light path edge mirror system that shakes, second spectroscope 3 ", first spectroscope 2" reaches detection correcting unit 7 as the pilot light via third spectroscope 5 "reflection, reflection light path.
As an embodiment, the detection correction means 7 includes any one of: a beam analyzer, a PSD photoelectric position sensor, a high-resolution high-frame-frequency CCD camera and a COMS camera. The detection and correction device 7 in fig. 1 and 2 is a high-resolution high-frame-rate CCD camera or a cmos camera.
As an embodiment, the detection and correction device 7 is preceded by a beam processing module 6. The beam processing module 6 comprises any one of: attenuator, focusing device, attenuator and focusing device, and beam shaper.
Specifically, a focusing device including a focusing mirror having a focal length F may be used as the beam processing module 6.
The working process of the utility model, as shown in fig. 4, comprises the following steps:
step 1, collecting and calibrating an indicating light detection beam reflected back to the detection and correction device 7 to obtain an initial calibration position light spot.
The galvanometer 4 is powered on and in an initial state to be processed, the indicating light emits light, the camera collects the indicating light reflected by a third beam splitter 5 below the galvanometer 4, the detection is continued, and when the light beam pointing is stable, the initial calibration light spot position is recorded;
and 2, identifying the position of the light spot of the return light beam of the detection light path in a time-sharing manner, and detecting whether the laser beam of the light path deviates.
The camera collects light beams returned by a detection light path of the galvanometer 4 in an initial processing state at different online moments to obtain the position of a light spot, the position of the collected light spot is compared with the position of the initial calibration light spot obtained in the step 1, and if the position of the collected light spot is not consistent with that of the target light spot, the offset of the laser processing light beam is obtained through the position deviation of the collected light spot and the initial calibration light spot; and if the positions of the collected light spots and the initial calibration light spot are not deviated, continuing to process. Here, as shown in FIG. 5, the position of the indicator light is not shifted and the device continues to process. When the pointing light passes through the galvanometer 4 and then deviates by the angle Θ, as shown in fig. 6, the light beam angle reflected back to the camera through the third beam splitter 55 deviates by 2 Θ, and if a focusing mirror with a focal length F is installed in the front camera beam processing module 6, the position distance Δ of the light spot deviation on the target surface of the camera is equal to F star (2 Θ) according to the geometrical optics principle of the focusing mirror, and the position deviation Δ X and Δ Y of the light spot in the direction of monitoring X, Y can be resolved on the camera.
And 3, feedback correction.
And (3) converting the offset delta X and delta Y obtained in the step (2) into deflection angles by the camera and feeding the deflection angles back to the processing software of the galvanometer 4, and adjusting the optical path of a reflecting mirror inside the galvanometer 4 by the processing software according to the received deflection angle data to realize the pointing correction of the laser beam. The mirror vibration system is internally composed of two electric reflectors which are distributed in space, one reflector can realize scanning in the X direction, the other reflector can realize scanning in the Y direction, and the mirror vibration system adjusts the offset angle of the first reflector and the second reflector according to the received offset (delta X and delta Y) to realize light path adjustment.
And 4, after the real-time correction is finished, identifying and checking the corrected laser beam again, acquiring the corrected detection beam by the camera to obtain the corrected spot position, and repeating the step 2 and the step 3.
Through the working steps, the problem of long-term processing light beam pointing deviation of the existing galvanometer 4 can be solved, and the positioning processing precision of the galvanometer 4 of the equipment is greatly improved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. A light beam pointing stability monitoring and feedback device is characterized by comprising a light source and a detection and correction device, wherein the light source is used for providing indicating light and processing laser, the detection and correction device is used for detecting and correcting the position of a light spot of the indicating light, and the light source and the detection and correction device are integrated in a laser processing light path through a plurality of spectroscopes; the plurality of spectroscopes comprise a first spectroscope, a second spectroscope and a third spectroscope.
2. The device for monitoring and feeding back beam pointing stability according to claim 1, wherein the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light is incident on a first beam splitter, reflected to a second beam splitter through the first beam splitter, the processing laser light is transmitted through the second beam splitter, the indicating light and the processing laser light are combined through the second beam splitter, the combined light is incident on a galvanometer system, and the light emitted from the galvanometer system is incident on a third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
3. The device for monitoring and feeding back beam pointing stability according to claim 1, wherein the light source includes an indicating light source and a processing laser light source, the indicating light source emits indicating light, the processing laser light source emits processing laser light, the indicating light is incident on a first beam splitter and reflected to a second beam splitter by the first beam splitter, the indicating light is transmitted through the second beam splitter, the indicating light and the processing laser light reflected by the second beam splitter are combined, the combined light is incident on a galvanometer system, and light emitted by the galvanometer system is incident on a third beam splitter; the processing laser is transmitted through the third spectroscope, the indicating light is reflected by the third spectroscope, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
4. The device for monitoring and feeding back the pointing stability of the light beam according to claim 1, wherein the light source comprises a processing laser light source, the processing laser light source emits processing laser light, the processing laser light is incident to the galvanometer system through the first spectroscope and the second spectroscope, light emitted from the galvanometer system is incident to the third spectroscope, most of the processing laser light is transmitted through the third spectroscope, a small part of the processing laser light is reflected through the third spectroscope as indicating light, and the reflected light path reaches the detection and correction device along the galvanometer system, the second spectroscope and the first spectroscope.
5. The apparatus according to any one of claims 2 to 4, wherein the detection and correction device is preceded by a beam processing module.
6. The beam pointing stability monitoring and feedback device of claim 5, wherein the beam processing module comprises any one of: attenuator, focusing device, attenuator and focusing device, and beam shaper.
7. The beam pointing stability monitoring and feedback device according to any of claims 2 to 4, wherein the detection correction means comprises any of: a beam analyzer, a PSD photoelectric position sensor, a high-resolution high-frame-frequency CCD camera and a COMS camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922311076.7U CN212470240U (en) | 2019-12-20 | 2019-12-20 | Light beam pointing stability monitoring and feedback device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922311076.7U CN212470240U (en) | 2019-12-20 | 2019-12-20 | Light beam pointing stability monitoring and feedback device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212470240U true CN212470240U (en) | 2021-02-05 |
Family
ID=74415149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922311076.7U Active CN212470240U (en) | 2019-12-20 | 2019-12-20 | Light beam pointing stability monitoring and feedback device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212470240U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111055030A (en) * | 2019-12-20 | 2020-04-24 | 武汉华工激光工程有限责任公司 | Device and method for monitoring and feeding back light beam pointing stability |
| CN115493816A (en) * | 2022-11-08 | 2022-12-20 | 中国工程物理研究院激光聚变研究中心 | Method for improving target shooting precision of large laser device |
| CN116539282A (en) * | 2023-05-27 | 2023-08-04 | 星遥光宇(常州)科技有限公司 | Optical axis monitoring device |
-
2019
- 2019-12-20 CN CN201922311076.7U patent/CN212470240U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111055030A (en) * | 2019-12-20 | 2020-04-24 | 武汉华工激光工程有限责任公司 | Device and method for monitoring and feeding back light beam pointing stability |
| CN115493816A (en) * | 2022-11-08 | 2022-12-20 | 中国工程物理研究院激光聚变研究中心 | Method for improving target shooting precision of large laser device |
| CN116539282A (en) * | 2023-05-27 | 2023-08-04 | 星遥光宇(常州)科技有限公司 | Optical axis monitoring device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111055030A (en) | Device and method for monitoring and feeding back light beam pointing stability | |
| CN212470240U (en) | Light beam pointing stability monitoring and feedback device | |
| US10245683B2 (en) | Apparatus and method for beam diagnosis on laser processing optics | |
| EP2800945B1 (en) | Non-contact sensor having improved laser spot | |
| EP2769800B1 (en) | Laser processing machine | |
| EP3249350B1 (en) | Laser measurement system capable of detecting 21 geometric errors | |
| US10281579B2 (en) | Method of operating a confocal white light sensor on a coordinate measuring machine | |
| CN111065947B (en) | Device for determining the orientation of an optical device of a coherence tomography camera, coherence tomography camera and laser processing system | |
| CN107765426B (en) | Self-focusing laser scanning projection device based on symmetrical out-of-focus double detectors | |
| CN107088706B (en) | Multipoint sensing laser scanning processing system | |
| CN109332879B (en) | Michelson interference-based online galvanometer positioning precision correction processing system and method | |
| US20220297228A1 (en) | Alignment unit, sensor module comprising same, and laser working system comprising the sensor module | |
| US20230133662A1 (en) | Method for calibrating one or more optical sensors of a laser machining head, laser machining head, and laser machining system | |
| CN103913294A (en) | Reticle increment calibration method for laser galvanometer system | |
| CN103862166A (en) | Determination method for laser beam focal plane | |
| WO2022008885A1 (en) | Improvements in or relating to an optical scanner for directing electromagnetic radiation to different locations within a scan field | |
| CN116900470A (en) | Laser processing apparatus | |
| CN107817047B (en) | Molten pool light intensity detection device that first subregion of detecting more detected | |
| KR101554389B1 (en) | Laser processing apparatus | |
| US11648624B2 (en) | Laser processing apparatus and optical adjustment method | |
| US10520360B1 (en) | Automated power-in-the-bucket measurement apparatus for large aperture laser systems | |
| KR20190122515A (en) | Apparatus for automatically correcting the position of laser scanning system | |
| JP2001147399A (en) | Laser beam machining device and adjusting method therefor | |
| CN220178394U (en) | Focusing device | |
| CN113092075B (en) | Variable-angle high-precision calibration light source system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |