CN103713383B - The servicing unit that a kind of light beam accurately guides and calibrates - Google Patents
The servicing unit that a kind of light beam accurately guides and calibrates Download PDFInfo
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- CN103713383B CN103713383B CN201310693782.7A CN201310693782A CN103713383B CN 103713383 B CN103713383 B CN 103713383B CN 201310693782 A CN201310693782 A CN 201310693782A CN 103713383 B CN103713383 B CN 103713383B
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Abstract
The invention discloses the servicing unit that a kind of light beam accurately guides and calibrates, include front sightingpiston, rear sightingpiston, be arranged at prism module between front sightingpiston and rear sightingpiston, prism module includes three pieces of total reflection right-angle prisms, is front little right-angle prism, large right-angle prism and rear little right-angle prism respectively; Wherein, one right-angle surface of front little right-angle prism and a right-angle surface of rear little right-angle prism are all glued on the inclined-plane of large right-angle prism, respectively there is an aperture at the center of front sightingpiston and rear sightingpiston, aims at the center of another right-angle surface of front little right-angle prism and another right-angle surface of rear little right-angle prism respectively.Compact conformation of the present invention, simple to operate, realize high sensitivity and high-precision calibration function by the total reflection of prism module.
Description
Technical field
The present invention relates to guiding and the calibration field of light beam, specifically a kind of light beam servicing unit of accurately guiding and calibrating.
Background technology
In all kinds of laser optical apparatus and equipment, all need the optical axis direction of the laser beam of laser emitting along system to be accurately directed in optical system.Under normal circumstances, this mainly by placing two apertures on the optical axis of system, the distance that these two apertures are coaxial and certain apart, by adjusting angle and the position of laser beam, its accurate center through two apertures realized.Distance between two apertures is longer, and laser beam is higher along the positioning precision of optical axis direction, thus the quality of optical system is also higher.And now increasing laser optical system be tending towards integrated, miniaturization, be therefore difficult to have living space in optical system along optical axis direction and place two apertures in a distance.On the other hand, if optical system is lacked of proper care due to external disturbance, need the optical system of instrument and equipment to open, readjust angle and the position of laser beam, make it again accurately through the center of two apertures.This gives debuging of instrument and equipment and maintenance brings very large inconvenience.
Summary of the invention
The technical problem to be solved in the present invention is to provide the servicing unit that a kind of light beam accurately guides and calibrates, and this apparatus structure is compact, simple to operate, and has high sensitivity and high-precision calibration function.
Technical scheme of the present invention is:
The servicing unit that a kind of light beam accurately guides and calibrates, include front sightingpiston, rear sightingpiston, be arranged at prism module between front sightingpiston and rear sightingpiston, described prism module includes three pieces of total reflection right-angle prisms, is front little right-angle prism, large right-angle prism and rear little right-angle prism respectively; Wherein, one right-angle surface of front little right-angle prism and a right-angle surface of rear little right-angle prism are all glued on the inclined-plane of large right-angle prism, respectively there is an aperture at the center of front sightingpiston and rear sightingpiston, aims at the center of another right-angle surface of front little right-angle prism and another right-angle surface of rear little right-angle prism respectively.
Described light beam accurately guide also to include with the servicing unit calibrated be glued at front little another right-angle surface of right-angle prism front cube Amici prism, be glued at rear cube Amici prism in rear another right-angle surface of little right-angle prism and front vertical little right-angle prism and rear vertical little right-angle prism; Wherein, a right-angle surface of front vertical little right-angle prism is glued on the lower surface of front cube Amici prism, and a right-angle surface of rear vertical little right-angle prism is glued on the lower surface of rear cube Amici prism.
Advantage of the present invention:
The present invention be divided into one-dimensional square to light beam accurately guide and calibrate and accurately to guide with the light beam of two-dimensional directional and calibrate.
One-dimensional square to light beam accurately guide and to include three pieces of total reflection right-angle prisms with the prism module of alignment aid, incident beam first by the central small hole normal incidence of front sightingpiston in a right-angle surface of front little right-angle prism, then, after four total reflections of two right-angle surface of the inclined-plane of two little right-angle prisms and large right-angle prism, shine on rear sightingpiston from the right-angle surface of rear little right-angle prism.If incident beam deviate from θ angle, after four total reflections, the deviation angle of outgoing beam is then 16 θ.And traditional deviation angle of the calibration steps outgoing beam of two apertures that utilizes only has θ.Suppose that the distance between front sightingpiston of the present invention and rear sightingpiston is 100mm, incident beam departs from 1 °, then outgoing beam is after the amplification of four total reflections, is 28.67mm(28.67mm=100*tan16 ° of mm apart from the position offset of rear sightingpiston central small hole).And traditional sensitivity utilizing the calibration steps of two apertures will reach same, then the distance between needing two apertures is increased to 1642.5mm.By above analysis, illustrate that method of the present invention has high sensitivity and high-precision advantage.
Due to one-dimensional square to light beam accurately guide with alignment aid with incident beam four fully reflecting surfaces another direction orthogonal on there is no the function of calibrating, so by increasing cube Amici prism and vertical little right-angle prism, the light beam realizing two-dimensional directional (two orthogonal directions) accurately guides and calibrates.Incident beam is first divided into orthogonal two light beams by front cube Amici prism by incident beam, and then every light beams is respectively through after the total reflection of right-angle prism, then merges into a branch of light beam by rear cube Amici prism, shines on rear sightingpiston.The method, except having high sensitivity and high-precision advantage, by the combination of two mutually perpendicular directions, can also calibrate the beam deflection of any direction simultaneously.
Accompanying drawing explanation
Fig. 1 is the servicing unit that one dimension light beam of the present invention accurately guides and calibrates.
Fig. 2 is the servicing unit that two-dimentional light beam of the present invention accurately guides and calibrates.
Fig. 3 is mechanical construction drawing of the present invention.
To be the present invention accurately guide for the light beam of photo-thermal Weak Absorption measuring instrument and calibrate schematic diagram Fig. 4.
Embodiment
See Fig. 1, the servicing unit that a kind of one dimension light beam accurately guides and calibrates, include front sightingpiston 1, rear sightingpiston 2, be arranged at prism module between front sightingpiston 1 and rear sightingpiston 2; Prism module includes three pieces of total reflection right-angle prisms, is front little right-angle prism 31, large right-angle prism 32 and rear little right-angle prism 33 respectively; Wherein, one right-angle surface of front little right-angle prism 31 and a right-angle surface of rear little right-angle prism 33 are all glued on the inclined-plane of large right-angle prism 32, respectively there is an aperture at the center of front sightingpiston 1 and rear sightingpiston 2, aims at the center of another right-angle surface of front little right-angle prism 31 and another right-angle surface of rear little right-angle prism 33 respectively.
Wherein, incident beam first by the central small hole normal incidence of front sightingpiston 1 in a right-angle surface of front little right-angle prism 31, then successively through front little right-angle prism 31 inclined-plane and large right-angle prism 32 two right-angle surface and after little right-angle prism 33 inclined-plane four total reflections after, shine on rear sightingpiston 2 from the right-angle surface of rear little right-angle prism 33.
See Fig. 2, the servicing unit that a kind of two-dimentional light beam accurately guides and calibrates, include front sightingpiston 1, rear sightingpiston 2, be arranged at prism module between front sightingpiston and rear sightingpiston; Prism module includes five pieces of total reflection right-angle prisms and two pieces of cube Amici prisms, be front little right-angle prism 31 respectively, large right-angle prism 32, rear little right-angle prism 33, be glued at front another right-angle surface of little right-angle prism 31 front cube Amici prism 34, be glued at rear cube Amici prism 35 in rear another right-angle surface of little right-angle prism 33 and front vertical little right-angle prism 36 and rear vertical little right-angle prism 37; Wherein, one right-angle surface of front little right-angle prism 31 and a right-angle surface of rear little right-angle prism 33 are all glued on the inclined-plane of large right-angle prism 32, one right-angle surface of front vertical little right-angle prism 36 is glued on the lower surface of front cube Amici prism 34, and a right-angle surface of rear vertical little right-angle prism 37 is glued on the lower surface of rear cube Amici prism 35.
Wherein, incident beam is first divided into orthogonal two light beams by front cube Amici prism 34 by incident beam, wherein a branch of light beam successively through front little right-angle prism 31 inclined-plane and large right-angle prism 32 two right-angle surface and after little right-angle prism 33 inclined-plane four total reflections after, another light beams successively through front vertical little right-angle prism 36 inclined-plane with after vertical little right-angle prism 37 inclined-plane twice total reflection after, two light beams is merged into a branch of light beam by rear cube Amici prism 35 again, shines on rear sightingpiston 2.
See Fig. 3, the servicing unit that a kind of light beam accurately guides and calibrates, incident beam incides in prism module 43 by the central small hole of front sightingpiston 41, after total reflection repeatedly, from the central small hole outgoing of rear sightingpiston 42.
Photo-thermal Weak Absorption measuring instrument, a kind of high-accuracy laser surveying instrument utilizing thermal lensing effect to carry out Optical Coatings Surface native defect and the analysis of crystals body native defect, it is by the pumping laser Shu Jifa tested sample of focusing, thermal lensing effect is produced at focal beam spot place, then irradiate with another bundle exploring laser light bundle the region that sample produces thermal lensing effect, measured the absorption of optical thin film and crystal by the change detecting exploring laser light beam intensity.In the instrument, need pumping laser bundle to introduce from instrument outside, then accurately adjust the relative position of pumping laser focus point and exploring laser light focus point.Sometimes, according to the difference measuring wavelength, need to change pumping laser, therefore need to be reintroduced back to pumping laser bundle.If utilize the calibration steps of two traditional apertures, then need the optical system opening instrument internal, readjust light path, and calibration accuracy is not high.Light beam of the present invention accurately guides and the servicing unit calibrated then does not need the optical system opened in instrument, directly can carry out accurate guiding and the calibration of laser beam in instrument outside.
See Fig. 4, light beam for photo-thermal Weak Absorption measuring instrument accurately guides and calibrates schematic diagram, comprise pump laser 1, along this laser beam outbound course be the first high reflective mirror 2, second high reflective mirror 3 successively, light beam accurately guides and alignment aid 4 and photo-thermal Weak Absorption measuring instrument 5.Light beam accurately guides sees Fig. 3 with the logical light mouth of alignment aid 4 and the logical light mouth of photo-thermal Weak Absorption measuring instrument 5 by fixed pin 44() be accurately connected and fixed.
In photo-thermal Weak Absorption measuring instrument 5, the light beam sent along pump laser 1 irradiates on tested sample 7 through the anti-mirror 6 of third high, and the light beam exported at detecting laser 8 irradiates on tested sample 7 through the 4th high reflective mirror 9, the 5th high reflective mirror 10 successively.
See Fig. 4, the light beam for photo-thermal Weak Absorption measuring instrument accurately guides and calibration steps, comprises the following steps:
(1), light beam accurately to be guided and the logical light mouth of alignment aid 4 and the logical light mouth of photo-thermal Weak Absorption measuring instrument 5 are connected and fixed by fixed pin;
(2), adjust the first high reflective mirror 2 and the second high reflective mirror 3, make the laser beam of pump laser 1 accurately accurately guide the central small hole with the front sightingpiston of alignment aid 4 41 and rear sightingpiston 42 by light beam;
(3), open the light path system of photo-thermal Weak Absorption measuring instrument 5, and regulate the anti-mirror 6 of third high, the 4th high reflective mirror 9 and the 5th high reflective mirror 10 wherein, the focal beam spot of pumping laser bundle and exploring laser light bundle is accurately overlapped, produce measuring-signal;
(4), close the light path system of photo-thermal Weak Absorption measuring instrument 5, take off light beam and accurately guide and alignment aid 4, carry out photothermal measurement.
By above step, light beam is accurately guided in the light path system being integrated in photo-thermal Weak Absorption measuring instrument 5 with alignment aid 4 and carry out light path calibration.The benefit done like this is if when system is lacked of proper care because of external disturbance or needed replacing pump laser time, and only needing to carry out following steps just can recovery system, does not need to carry out any interference to the structure of instrument internal.Step is as follows:
(1), light beam accurately to be guided and the logical light mouth of alignment aid 4 and the logical light mouth of photo-thermal Weak Absorption measuring instrument 5 are connected and fixed by fixed pin;
(2), adjust the first high reflective mirror 2 and the second high reflective mirror 3, make the laser beam of pump laser 1 accurately accurately be guided the central small hole of front sightingpiston with alignment aid 4 and rear sightingpiston by light beam.
Claims (1)
1. the light beam servicing unit that accurately guides and calibrate, include front sightingpiston and rear sightingpiston, it is characterized in that: also include the prism module be arranged between front sightingpiston and rear sightingpiston, described prism module includes five pieces of total reflection right-angle prisms and two pieces of cube Amici prisms, is front little right-angle prism, large right-angle prism, rear little right-angle prism, front cube Amici prism, rear cube Amici prism, front vertical little right-angle prism and rear vertical little right-angle prism respectively; Wherein, one right-angle surface of front little right-angle prism and a right-angle surface of rear little right-angle prism are all glued on the inclined-plane of large right-angle prism, respectively there is an aperture at the center of front sightingpiston and rear sightingpiston, aims at the center of another right-angle surface of front little right-angle prism and another right-angle surface of rear little right-angle prism respectively; Front cube Amici prism is glued at another right-angle surface described of front little right-angle prism, and rear cube Amici prism is glued at another right-angle surface described in rear little right-angle prism; One right-angle surface of front vertical little right-angle prism is glued on the lower surface of front cube Amici prism, and a right-angle surface of rear vertical little right-angle prism is glued on the lower surface of rear cube Amici prism.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310693782.7A CN103713383B (en) | 2013-12-18 | 2013-12-18 | The servicing unit that a kind of light beam accurately guides and calibrates |
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| CN201310693782.7A CN103713383B (en) | 2013-12-18 | 2013-12-18 | The servicing unit that a kind of light beam accurately guides and calibrates |
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| CN103713383A CN103713383A (en) | 2014-04-09 |
| CN103713383B true CN103713383B (en) | 2016-01-20 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104375256B (en) * | 2014-10-31 | 2017-03-15 | 上海卫星装备研究所 | Omnidirectional right-angle benchmark prism and its using method |
| CN109061789A (en) * | 2018-07-23 | 2018-12-21 | 华天慧创科技（西安）有限公司 | A kind of light-guide device |
| CN109164564A (en) * | 2018-08-24 | 2019-01-08 | 华天慧创科技（西安）有限公司 | A kind of light-guide device of band turnover optical path |
| CN111061064B (en) * | 2019-12-30 | 2020-12-15 | 浙江大学 | Double-beam optical trap beam auxiliary alignment device and method |
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| US5995233A (en) * | 1994-06-21 | 1999-11-30 | Kabushiki Kaisha Topcon | Surveying system |
| CN2738270Y (en) * | 2004-11-02 | 2005-11-02 | 曲阜师范大学激光研究所 | High precision achromatic phase delayer for right-angle prism |
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| CN101915560A (en) * | 2010-06-25 | 2010-12-15 | 北京市普锐科创科技有限责任公司 | Device for measuring straightness/coaxiality by applying laser |
| CN102735650A (en) * | 2012-07-12 | 2012-10-17 | 中国工程物理研究院流体物理研究所 | Particle field transient multi-picture holography device and method |
| CN203643678U (en) * | 2013-12-18 | 2014-06-11 | 合肥知常光电科技有限公司 | Auxiliary device for light beam accurate guiding and calibration |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5995233A (en) * | 1994-06-21 | 1999-11-30 | Kabushiki Kaisha Topcon | Surveying system |
| CN2738270Y (en) * | 2004-11-02 | 2005-11-02 | 曲阜师范大学激光研究所 | High precision achromatic phase delayer for right-angle prism |
| CN101545761A (en) * | 2009-05-06 | 2009-09-30 | 湖北工业大学 | Optical measuring system with multiple degrees of freedom |
| CN101915560A (en) * | 2010-06-25 | 2010-12-15 | 北京市普锐科创科技有限责任公司 | Device for measuring straightness/coaxiality by applying laser |
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