CN103713383A - Auxiliary device for light beam accurate guidance and calibration - Google Patents

Auxiliary device for light beam accurate guidance and calibration Download PDF

Info

Publication number
CN103713383A
CN103713383A CN201310693782.7A CN201310693782A CN103713383A CN 103713383 A CN103713383 A CN 103713383A CN 201310693782 A CN201310693782 A CN 201310693782A CN 103713383 A CN103713383 A CN 103713383A
Authority
CN
China
Prior art keywords
prism
angle
angle prism
sightingpiston
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201310693782.7A
Other languages
Chinese (zh)
Other versions
CN103713383B (en
Inventor
董敬涛
吴周令
陈坚
江凤池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO LTD
Original Assignee
HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO LTD filed Critical HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO LTD
Priority to CN201310693782.7A priority Critical patent/CN103713383B/en
Publication of CN103713383A publication Critical patent/CN103713383A/en
Application granted granted Critical
Publication of CN103713383B publication Critical patent/CN103713383B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

The invention discloses an auxiliary device for light beam accurate guidance and calibration. The auxiliary device comprises a front observation surface, a rear observation surface and a prism module which is arranged between the front observation surface and the rear observation surface. The prism module comprises three total reflection rectangular prisms, wherein one is a front small rectangular prism, one is a large rectangular prism and the last one is a rear small rectangular prism respectively. One right-angled surface of the front small rectangular prism and one right-angled surface of the rear small rectangular prism are glued on an inclined surface of the large rectangular prism. Each of the centers of the front observation surface and the rear observation surface is provided with a hole. The holes are respectively aligned with the centers of the other right-angled surface of the front small rectangular prism and the other right-angled surface of the rear small rectangular prism. The auxiliary device is compact in structure and simple in operation. A high-sensitivity and high-precision calibration function is realized via total reflection of the prism module.

Description

The servicing unit that a kind of light beam accurately guides and calibrates
 
Technical field
The present invention relates to guiding and the calibration field of light beam, the servicing unit that specifically a kind of light beam accurately guides and calibrates.
Background technology
In all kinds of laser optical apparatus and equipment, all need the optical axis direction along system by the laser beam of laser emitting to be accurately directed in optical system.Generally, this is mainly by place two apertures on the optical axis of system, and these two apertures are coaxial and at a distance of certain distance, by adjusting angle and the position of laser beam, it accurately realized through center of two apertures.Distance between two apertures is longer, and laser beam is higher along the positioning precision of optical axis direction, thereby the quality of optical system is also higher.And increasing laser optical system is tending towards integrated, miniaturization now, therefore in optical system, being difficult to has living space places two apertures in a distance along optical axis direction.On the other hand, if optical system, because external disturbance is lacked of proper care, need to be opened the optical system of instrument and equipment, readjust angle and the position of laser beam, make it again accurately pass the center of two apertures.This gives debuging of instrument and equipment and maintenance has brought very large inconvenience.
Summary of the invention
The technical problem to be solved in the present invention is to provide the servicing unit that a kind of light beam accurately guides and calibrates, and this apparatus structure is compact, simple to operate, and has high sensitivity and high-precision calibration function.
Technical scheme of the present invention is:
The servicing unit that a kind of light beam accurately guides and calibrates, include front sightingpiston, rear sightingpiston, be arranged at the prism module between front sightingpiston and rear sightingpiston, described prism module includes three total reflection right-angle prisms, is respectively front little right-angle prism, large right-angle prism and rear little right-angle prism; Wherein, the edged surface always of front little right-angle prism and the edged surface always of rear little right-angle prism are all glued on the inclined-plane of large right-angle prism, respectively there is an aperture at the center of front sightingpiston and rear sightingpiston, aims at respectively another right angle face of front little right-angle prism and the Mian center, another right angle of rear little right-angle prism.
Described light beam accurately the servicing unit of guiding and calibration also include be glued at front another right angle face of little right-angle prism front cube Amici prism, be glued at rear cube Amici prism and front vertical little right-angle prism and rear vertical little right-angle prism on another right angle face of rear little right-angle prism; Wherein, the edged surface always of front vertical little right-angle prism is glued on the lower surface of front cube Amici prism, and the edged surface always of rear vertical little right-angle prism is glued on the lower surface of rear cube Amici prism.
Advantage of the present invention:
The present invention be divided into one-dimensional square to the accurate guiding of light beam and accurately guiding and the calibration of the light beam of calibration and two-dimensional directional.
One-dimensional square to light beam accurately the prism module of guiding and alignment aid include three total reflection right-angle prisms, incident beam first the central small hole normal incidence by front sightingpiston to a right angle face of front little right-angle prism, then after four total reflections of the inclined-plane of two little right-angle prisms and two right angle faces of large right-angle prism, from the right angle face of rear little right-angle prism, shine on rear sightingpiston.If incident beam has departed from θ angle, after four total reflections, the deviation angle of outgoing beam is 16 θ.And the deviation angle of traditional calibration steps outgoing beam that utilizes two apertures only has θ.Suppose that the distance between front sightingpiston of the present invention and rear sightingpiston is 100mm, incident beam departs from 1 °, outgoing beam is after the amplification of four total reflections, and the position offset of the rear sightingpiston central small hole of distance is 28.67mm(28.67mm=100*tan16 ° of mm).And traditional calibration steps that utilizes two apertures will reach same sensitivity, need the distance between two apertures to be increased to 1642.5mm.By above analysis, illustrate that method of the present invention has high sensitivity and high-precision advantage.
Due to one-dimensional square to light beam accurately guiding and alignment aid with orthogonal another direction of four fully reflecting surfaces of incident beam on there is no the function of calibrating, so by increasing cube Amici prism and vertical little right-angle prism, realize accurately guiding and the calibration of light beam of two-dimensional directional (two orthogonal directions).Incident beam is first divided into orthogonal two light beams by front cube Amici prism by incident beam, and then every light beams respectively after the total reflection of right-angle prism, then merges into a branch of light beam by rear cube Amici prism, shines on rear sightingpiston.The method, except having high sensitivity and high-precision advantage, can also be passed through the combination of two mutually perpendicular directions, the beam deflection of simultaneously calibrating any direction.
Accompanying drawing explanation
Fig. 1 is the servicing unit that one dimension light beam of the present invention accurately guides and calibrates.
Fig. 2 is the servicing unit that two-dimentional light beam of the present invention accurately guides and calibrates.
Fig. 3 is mechanical construction drawing of the present invention.
Fig. 4 is that the present invention is for the accurate guiding of light beam and the calibration schematic diagram of photo-thermal Weak Absorption measuring instrument.
Embodiment
See Fig. 1, the servicing unit that a kind of one dimension light beam accurately guides and calibrates, includes front sightingpiston 1, rear sightingpiston 2, is arranged at the prism module between front sightingpiston 1 and rear sightingpiston 2; Prism module includes three total reflection right-angle prisms, is respectively front little right-angle prism 31, large right-angle prism 32 and rear little right-angle prism 33; Wherein, the edged surface always of front little right-angle prism 31 and the edged surface always of rear little right-angle prism 33 are all glued on the inclined-plane of large right-angle prism 32, respectively there is an aperture at the center of front sightingpiston 1 and rear sightingpiston 2, aims at respectively another right angle face of front little right-angle prism 31 and the Mian center, another right angle of rear little right-angle prism 33.
Wherein, incident beam first the central small hole normal incidence by front sightingpiston 1 to a right angle face of front little right-angle prism 31, then successively through two right angle faces of front little right-angle prism 31 inclined-planes and large right-angle prism 32 and after after four total reflections on little right-angle prism 33 inclined-planes, from the right angle face of rear little right-angle prism 33, shine on rear sightingpiston 2.
See Fig. 2, the servicing unit that a kind of two-dimentional light beam accurately guides and calibrates, includes front sightingpiston 1, rear sightingpiston 2, is arranged at the prism module between front sightingpiston and rear sightingpiston; Prism module includes five total reflection right-angle prisms and two cube Amici prisms, be respectively front little right-angle prism 31, large right-angle prism 32, rear little right-angle prism 33, be glued at front little right-angle prism 31 another right angle faces front cube Amici prism 34, be glued at rear cube Amici prism 35 and front vertical little right-angle prism 36 and rear vertical little right-angle prism 37 on rear little right-angle prism 33 another right angle faces; Wherein, the edged surface always of front little right-angle prism 31 and the edged surface always of rear little right-angle prism 33 are all glued on the inclined-plane of large right-angle prism 32, the edged surface always of front vertical little right-angle prism 36 is glued on the lower surface of front cube Amici prism 34, and the edged surface always of rear vertical little right-angle prism 37 is glued on the lower surface of rear cube Amici prism 35.
Wherein, incident beam is first divided into orthogonal two light beams by front cube Amici prism 34 by incident beam, wherein a branch of light beam successively through two right angle faces of front little right-angle prism 31 inclined-planes and large right-angle prism 32 and after after four total reflections on little right-angle prism 33 inclined-planes, another light beams successively through front vertical little right-angle prism 36 inclined-planes with after after twice total reflection on vertical little right-angle prism 37 inclined-planes, rear cube Amici prism 35 merges into two light beams a branch of light beam again, shines on rear sightingpiston 2.
See Fig. 3,, the servicing unit that a kind of light beam accurately guides and calibrates, incident beam incides in prism module 43 by the central small hole of front sightingpiston 41, after total reflection repeatedly, from the central small hole outgoing of rear sightingpiston 42.
Photo-thermal Weak Absorption measuring instrument, a kind of high-accuracy laser surveying instrument that utilizes thermal lensing effect to carry out Optical Coatings Surface native defect and the analysis of crystals body native defect, it is by the pumping laser Shu Jifa tested sample focusing on, at focal beam spot place, produce thermal lensing effect, then with another bundle exploring laser light bundle, irradiate the region of Sample producing thermal lensing effect, the absorption of measuring optical thin film and crystal by detecting the variation of exploring laser light beam intensity.In this instrument, pumping laser bundle need to be introduced from instrument is outside, then accurately adjust the relative position of pumping laser focus point and exploring laser light focus point.Sometimes, according to the difference of measuring wavelength, pumping laser need to be changed, therefore pumping laser bundle need to be reintroduced back to.If utilize the calibration steps of two traditional apertures, need to open the optical system of instrument internal, readjust light path, and calibration accuracy is not high.Light beam of the present invention accurately guides and the servicing unit of calibration does not need to open the optical system in instrument, can directly in instrument outside, carry out accurate guiding and the calibration of laser beam.
See Fig. 4, light beam for photo-thermal Weak Absorption measuring instrument accurately guides and calibration schematic diagram, comprise pump laser 1, along this laser beam outbound course be the first high reflective mirror 2, the second high reflective mirror 3 successively, light beam accurately guides and alignment aid 4 and photo-thermal Weak Absorption measuring instrument 5.The accurate guiding of light beam and the logical light mouth of alignment aid 4 and the logical light mouth of photo-thermal Weak Absorption measuring instrument 5 are shown in Fig. 3 by fixed pin 44() be accurately connected and fixed.
In photo-thermal Weak Absorption measuring instrument 5, the light beam sending along pump laser 1 irradiates on tested sample 7 through the anti-mirror 6 of third high, and the light beam of exporting at detecting laser 8 irradiates on tested sample 7 through the 4th high reflective mirror 9, the 5th high reflective mirror 10 successively.
See Fig. 4, the accurate guiding of light beam and calibration steps for photo-thermal Weak Absorption measuring instrument, comprise the following steps:
(1), by light beam, accurately guiding and the logical light mouth of alignment aid 4 and the logical light mouth of photo-thermal Weak Absorption measuring instrument 5 are connected and fixed by fixed pin;
(2), adjust the first high reflective mirror 2 and the second high reflective mirror 3, the laser beam that makes pump laser 1 is accurately by light beam accurately guiding and the front sightingpiston 41 of alignment aid 4 and the central small hole of rear sightingpiston 42;
(3), open the light path system of photo-thermal Weak Absorption measuring instrument 5, and regulate the anti-mirror 6 of third high, the 4th high reflective mirror 9 and the 5th high reflective mirror 10 wherein, the focal beam spot of pumping laser bundle and exploring laser light bundle is accurately overlapped, produce measuring-signal;
(4), the light path system of sealing photo-thermal Weak Absorption measuring instrument 5, take off light beam accurately guiding and alignment aid 4, carry out photothermal measurement.
By above step, by light beam, accurately guiding and alignment aid 4 are integrated in the light path system of photo-thermal Weak Absorption measuring instrument 5 and carry out light path calibration.The benefit of doing is like this if when system is lacked of proper care because of external disturbance or need to be changed pump laser, and only need to carry out following steps just can recovery system, does not need the structure of instrument internal to carry out any interference.Step is as follows:
(1), by light beam, accurately guiding and the logical light mouth of alignment aid 4 and the logical light mouth of photo-thermal Weak Absorption measuring instrument 5 are connected and fixed by fixed pin;
(2), adjust the first high reflective mirror 2 and the second high reflective mirror 3, the laser beam that makes pump laser 1 is accurately by light beam accurately guiding and the front sightingpiston of alignment aid 4 and the central small hole of rear sightingpiston.

Claims (2)

1. the accurate servicing unit of guiding and calibration of a light beam, include front sightingpiston and rear sightingpiston, it is characterized in that: also include the prism module being arranged between front sightingpiston and rear sightingpiston, described prism module includes three total reflection right-angle prisms, is respectively front little right-angle prism, large right-angle prism and rear little right-angle prism; Wherein, the edged surface always of front little right-angle prism and the edged surface always of rear little right-angle prism are all glued on the inclined-plane of large right-angle prism, respectively there is an aperture at the center of front sightingpiston and rear sightingpiston, aims at respectively another right angle face of front little right-angle prism and the Mian center, another right angle of rear little right-angle prism.
2. the accurate servicing unit of guiding and calibration of a kind of light beam according to claim 1, is characterized in that: described light beam accurately the servicing unit of guiding and calibration also include be glued at front another right angle face of little right-angle prism front cube Amici prism, be glued at rear cube Amici prism and front vertical little right-angle prism and rear vertical little right-angle prism on another right angle face of rear little right-angle prism; Wherein, the edged surface always of front vertical little right-angle prism is glued on the lower surface of front cube Amici prism, and the edged surface always of rear vertical little right-angle prism is glued on the lower surface of rear cube Amici prism.
CN201310693782.7A 2013-12-18 2013-12-18 The servicing unit that a kind of light beam accurately guides and calibrates Active CN103713383B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310693782.7A CN103713383B (en) 2013-12-18 2013-12-18 The servicing unit that a kind of light beam accurately guides and calibrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310693782.7A CN103713383B (en) 2013-12-18 2013-12-18 The servicing unit that a kind of light beam accurately guides and calibrates

Publications (2)

Publication Number Publication Date
CN103713383A true CN103713383A (en) 2014-04-09
CN103713383B CN103713383B (en) 2016-01-20

Family

ID=50406486

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310693782.7A Active CN103713383B (en) 2013-12-18 2013-12-18 The servicing unit that a kind of light beam accurately guides and calibrates

Country Status (1)

Country Link
CN (1) CN103713383B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104375256A (en) * 2014-10-31 2015-02-25 上海卫星装备研究所 Omni-directional right-angle reference prism and using method thereof
CN109061789A (en) * 2018-07-23 2018-12-21 华天慧创科技(西安)有限公司 A kind of light-guide device
CN109164564A (en) * 2018-08-24 2019-01-08 华天慧创科技(西安)有限公司 A kind of light-guide device of band turnover optical path
CN111061064A (en) * 2019-12-30 2020-04-24 浙江大学 Double-beam optical trap beam auxiliary alignment device and method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5995233A (en) * 1994-06-21 1999-11-30 Kabushiki Kaisha Topcon Surveying system
CN2738270Y (en) * 2004-11-02 2005-11-02 曲阜师范大学激光研究所 High precision achromatic phase delayer for right-angle prism
CN101545761A (en) * 2009-05-06 2009-09-30 湖北工业大学 Optical measuring system with multiple degrees of freedom
CN101915560A (en) * 2010-06-25 2010-12-15 北京市普锐科创科技有限责任公司 Device for measuring straightness/coaxiality by applying laser
CN102735650A (en) * 2012-07-12 2012-10-17 中国工程物理研究院流体物理研究所 Particle field transient multi-picture holography device and method
CN203643678U (en) * 2013-12-18 2014-06-11 合肥知常光电科技有限公司 Auxiliary device for light beam accurate guiding and calibration

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5995233A (en) * 1994-06-21 1999-11-30 Kabushiki Kaisha Topcon Surveying system
CN2738270Y (en) * 2004-11-02 2005-11-02 曲阜师范大学激光研究所 High precision achromatic phase delayer for right-angle prism
CN101545761A (en) * 2009-05-06 2009-09-30 湖北工业大学 Optical measuring system with multiple degrees of freedom
CN101915560A (en) * 2010-06-25 2010-12-15 北京市普锐科创科技有限责任公司 Device for measuring straightness/coaxiality by applying laser
CN102735650A (en) * 2012-07-12 2012-10-17 中国工程物理研究院流体物理研究所 Particle field transient multi-picture holography device and method
CN203643678U (en) * 2013-12-18 2014-06-11 合肥知常光电科技有限公司 Auxiliary device for light beam accurate guiding and calibration

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104375256A (en) * 2014-10-31 2015-02-25 上海卫星装备研究所 Omni-directional right-angle reference prism and using method thereof
CN109061789A (en) * 2018-07-23 2018-12-21 华天慧创科技(西安)有限公司 A kind of light-guide device
CN109164564A (en) * 2018-08-24 2019-01-08 华天慧创科技(西安)有限公司 A kind of light-guide device of band turnover optical path
CN111061064A (en) * 2019-12-30 2020-04-24 浙江大学 Double-beam optical trap beam auxiliary alignment device and method

Also Published As

Publication number Publication date
CN103713383B (en) 2016-01-20

Similar Documents

Publication Publication Date Title
CN101718534B (en) Parallelism detector for optical axis of multi-optical system
CN103884491B (en) A kind of scanning camera pendulum mirror two dimension dynamic angular measures calibration steps and device
CN105424322A (en) Self-calibration optical axis parallelism detector and detection method
CN105181298B (en) Multiple reflections formula confocal laser Long focal length measurement method and apparatus
CN103940348B (en) A kind of device and method of working table movement error multiple degrees of freedom detection
CN202938795U (en) Laser measuring device for measuring micro angles
CN102589428B (en) Asymmetric-incidence-based sample axial position tracking and correcting method and device
CN103344609B (en) A kind of Miniature Fourier transform spectrometer
CN105444700A (en) Multi-wavelength multi-optical axis parallelism detection device and detection method
CN106094234A (en) Self-aligning optical path system with polarization beam splitting element
CN103713383B (en) The servicing unit that a kind of light beam accurately guides and calibrates
CN108592825A (en) A kind of photoelectric auto-collimation device and method based on differential compensation
CN103471524B (en) Confocal paraboloids vertex curvature radius measuring method
CN111580075A (en) Laser range finder system capable of automatically calibrating optical axis
CN106767395A (en) One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method
CN103542813A (en) Laser diameter measuring instrument based on boundary differential and environmental light self-calibration
CN205942120U (en) Self-aligning optical path system with polarization beam splitting element
CN108132026A (en) Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor
CN212569122U (en) Laser range finder system capable of automatically calibrating optical axis
CN102607472A (en) Measuring device and measuring method for large-range flatness
CN102226689B (en) Method for measuring coaxial error of correlation beam
CN109470177A (en) Three-dimensional perspective measurement method and device based on double grating
CN110307807B (en) Incident beam angle calibration device and method based on DOE
CN113376857B (en) High-precision optical path debugging device and method
CN203643678U (en) Auxiliary device for light beam accurate guiding and calibration

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant