CN105784335B - The fill-in light calibration device and method of a kind of reference-calibrating mirror normal direction - Google Patents
The fill-in light calibration device and method of a kind of reference-calibrating mirror normal direction Download PDFInfo
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- CN105784335B CN105784335B CN201610236246.8A CN201610236246A CN105784335B CN 105784335 B CN105784335 B CN 105784335B CN 201610236246 A CN201610236246 A CN 201610236246A CN 105784335 B CN105784335 B CN 105784335B
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The present invention discloses the fill-in light calibration device and method of a kind of reference-calibrating mirror normal direction, especially suitable for fields such as the demarcation of auxiliary base mirror normal direction, the optical axis monitorings of optical instrument.Auto-collimation function of the invention based on prism of corner cube, two beam laser are adjusted to being mutually 180 degree using the light splitting function of spectroscope (Beam Splitter), the characteristics of 180 degree being mutually using two-beam, wherein light beam is directly emitted after spectroscope, another light beam again passes by spectroscope outgoing after spectroscope, reference mirror reflection, by the optical axis coincidence for the beam emergent light of direction two for adjusting reference mirror, then the direction of the emergent light is reference mirror normal direction.Apparatus of the present invention are simple in construction, cost is cheap, scaling method is simple.
Description
Technical field
The present invention relates to a kind of fill-in light calibration device of reference-calibrating mirror normal direction and method, especially suitable for reference mirror
The fields such as the demarcation of normal, the optical axis monitoring of optical instrument.
Background technology
For optical instrument, optical axis registration is one of key technical index of instrument, and the change of optical axis is by direct shadow
The detection level to system is rung, and with the expansion of various optical instrument applications and the raising of application demand, to optics instrument
Also more and more higher, the also ground calibration to optical instrument and performance test propose for the requirement of the stability, optical axis registration accuracy of device
Higher requirement.In order to monitor the stability of optical instrument, generally require and establish a reference bearing or coordinate system, judge light
The change between the optical axis of instrument and reference mirror orientation is learned to determine whether optical axis changes, and optical reference mirror conforms exactly to
This requirement；Optical reference mirror generally refers to represent the high-precision optical dress of a certain particular orientation using optical reflection face normal
Put, and optical reference mirror can be mutually perpendicular to face to establish the direction coordinate system of three-dimensional with 3.Optical reference mirror can be extensive
Applied to the production, experiment and demarcation of high-precision optical instrumentation, optical reference mirror is mainly by block prism (surface gold-plating
Belong to reflectance coating) and installation pedestal composition, block prism reflecting surface provides high-precision optical reflection normal, installation pedestal for cube
Prism provides reference for installation, and ensures that block prism stably can be installed on tested optical device.
Optical axis relation between the demarcation of block prism normal, normal and optical instrument is required to Accurate Calibration, and this hair
The bright fill-in light calibration device and method for providing a kind of reference-calibrating mirror normal direction, the auto-collimation function based on prism of corner cube,
I.e. any incident ray into prism of corner cube clear aperature is efficiently returned by direction, recycles spectroscope (Beam
Splitter light splitting function) adjusts two beam laser to being mutually 180 °, the characteristics of being mutually 180 ° using two-beam, wherein a branch of
Light is directly emitted after spectroscope, is again passed by spectroscope outgoing after another light beam spectroscope, reference mirror reflection, is passed through regulation
The direction of reference mirror causes two beam emergent light optical axis coincidences, then the direction of the emergent light is reference mirror normal direction.The invention
The demarcation of auxiliary base mirror normal direction and the optical axis monitoring of optical instrument are adapted to.
The content of the invention
It is an object of the invention to provide a kind of fill-in light calibration device of reference-calibrating mirror normal direction and method, invention dress
The use put, the demarcation of reference mirror normal direction can be met, the normal direction of reference mirror is transferred to the direction of the launch of laser,
So as to which the optical axis between optical instrument carries out registering and tests, optical instrument change is monitored on the basis of reference mirror normal direction
Change situation.The characteristics of invention, is mainly reflected in：1) it is simple in construction, can testing auxiliary device at any time state, method of testing letter
It is single；2) can possess and aid in the optical axis of active and passive optical instrument to fill school, monitoring.
As shown in Figure 1, the dress school process of the device is as follows for apparatus of the present invention dress school light path：
First single-mode fiber 1, the second single-mode fiber 2 introduce LASER Light Source respectively, and the first single-mode fiber 1 introduces light through first
The collimation outgoing of collimating mirror 3, then enter parallel light tube 7 after the reflection of spectroscope 5 and be imaged on focal plane laser beam analyzer 8, remember
Record imaging point position；Second single-mode fiber 2 introduces light and collimates outgoing through the second collimating mirror 4, then is reflected by spectroscope 5, pyramid
Prism 6 enters parallel light tube 7 and is imaged on focal plane laser beam analyzer 8 after being returned along original optical path, the second collimating mirror 4 of regulation causes
The imaging point of two-beam overlaps, and completes the dress school of the device.Remove prism of corner cube 6, final first single-mode fiber 1, the second single mode
Optical fiber 2 introduces the exit direction of light into 180 degree, and for the optical axis to the demarcation of auxiliary base mirror normal direction or to optical instrument
Monitoring.The invention device finally by the first single-mode fiber 1, the second single-mode fiber 2, the first collimating mirror 3 and the second collimating mirror 4, point
Light microscopic 5 collectively constitutes.
The normal direction of reference mirror can be transferred to laser by apparatus of the present invention with the demarcation of auxiliary base mirror normal direction
The direction of the launch, registering regulation, this method comprise the steps of between auxiliary base mirror normal direction and optical instrument optical axis：
1st, fill-in light calibration device self-test
As shown in Figure 1, the first single-mode fiber 1, the second single-mode fiber 2 introduce the LASER Light Source specified respectively, wherein the
One single-mode fiber 1 introduce light reflected through the first collimating mirror 3, spectroscope 5, the second single-mode fiber 2 introduce light through the second collimating mirror 4,
After spectroscope 5 reflects, prism of corner cube 6 turns to, spectroscope 5 transmits, two-beam is together converged at focal plane by parallel light tube 7
On focal plane laser beam analyzer 8, finally whether imaging facula overlaps two beam laser of detection on laser beam analyzer, confirms complete after overlapping
Into fill-in light calibration device self-test, prism of corner cube 6 of dismantling；
2nd, benchmark light direction is adjusted
As shown in Figure 2, change prism of corner cube 6 into reference mirror 9, the laser specified is introduced by the first single-mode fiber 1 and is made
On the basis of light source, the reference light through the first collimating mirror 3 collimate be emitted, then by spectroscope 5 reflection after enter parallel light tube 7 and
It is imaged on focal plane laser beam analyzer 8, is recorded as image point position；
3rd, reference mirror normal direction is demarcated
As shown in Figure 2, the second single-mode fiber 2 introduces the LASER Light Source specified, and introduces light and is collimated out through the second collimating mirror 4
Penetrate, then enter after spectroscope 5 reflects, reference mirror 9 reflects in parallel light tube 7, the orientation of reference mirror 9, luffing angle cause
Light beam is imaged on focal plane laser beam analyzer 8, and the imaging facula for being fine-tuning to two-beam overlaps, and records the facula position, and now two
The direction of beam emergent light represents the normal direction of reference mirror 9；
4th, reference mirror normal direction and equipment under test light shaft coaxle degree dress school and test
After completing above step, the dress school of axiality between reference mirror and equipment under test 10 can be carried out, is now needed point
For two kinds of situations：
When equipment under test 10 is active emission system, subsequent step is as follows：Directly adjust the orientation of system under test (SUT) 10, bow
Elevation angle degree so that transmitting light is imaged on focal plane laser beam analyzer 8 after the convergence of parallel light tube 7, continues to be fine-tuning to imaging
Spot overlaps with step 2,3 facula positions, and now the outgoing light direction of equipment under test 10 overlaps with the normal direction of reference mirror 9；
When equipment under test 10 is passive reception system, subsequent step is as follows：Fixed reference mirror 9, by fill-in light calibration device
Before being positioned over equipment under test 10；First single-mode fiber 1 enters the LASER Light Source specified, and introduces light and collimates outgoing through the first collimating mirror 3,
Enter parallel light tube 7 after the reflection of spectroscope 5 again and be imaged on focal plane laser beam analyzer 8, regulation fill-in light calibration device makes
It is identical with step 1 position that the regulation of photoimaging facula position must be emitted, fixed fill-in light calibration device；Second single-mode fiber 2, which introduces, to swash
Light is collimated through the second collimating mirror 4 and is emitted, then is received after the reflection of spectroscope 5 by equipment under test 10, adjusts equipment under test 10
So that receiving optical axis and the second single-mode fiber 2 introducing light light shaft coaxle, optical axis and the normal direction weight of reference mirror 9 are now received
Close.
Apparatus of the present invention not only can with the demarcation of auxiliary base mirror normal direction, can with auxiliary base mirror normal direction with
Registration regulation between optical instrument optical axis, is mainly reflected in the characteristics of the invention：
1) apparatus of the present invention are simple in construction, and cost is cheap；
2) the inventive method is simple, the auto-collimation function based on prism of corner cube, utilizes spectroscope (Beam Splitter)
Light splitting function adjusts two beam laser to 180 degree is mutually, and is mutually 180 degree feature using two-beam to aid in receiving and dispatching coaxial dress school,
And the invention device self checking method is easy and effective；
3) present invention can auxiliary base mirror normal direction demarcation, and reference mirror normal direction can be transferred directly to swash
Light exit direction, and optical axis regulation and test between reference mirror normal direction and active and passive optical instrument can be met simultaneously.
Brief description of the drawings
Fig. 1 is that the fill-in light calibration device of reference-calibrating mirror normal direction fills school light path schematic diagram.
Registering light path schematic diagram between mirror normal direction and optical instrument optical axis on the basis of Fig. 2.
Embodiment
The embodiment of the inventive method is described in detail below in conjunction with accompanying drawing.
Main devices employed in the present invention are described as follows：
1) the first single-mode fiber 1, the second single-mode fiber 2：Using Thorlabs companies model SM600 single-mode fiber,
Its Specifeca tion speeification：Service band is 600-800nm；Fibre-optic mode field diameter is 4.6um@680nm, covering core diameter 125 ±
1um, by wavelength be 550 ± 50nm；
2) the first collimating mirror 3, the second collimating mirror 4：Using Thorlabs companies model 352280-B collimating mirror, it is led
Want performance parameter：Service band is 600-1050nm；Focal length is 18.4mm, bore 6.5mm；Transmission material is ECO550；
3) spectroscope 5：Using Thorlabs companies model BS017 unpolarized Amici prism, its Specifeca tion speeification：
Service band is 700-1100nm；Splitting ratio is 1：1, clear aperture 20mm；
4) prism of corner cube 6：Using Thorlabs companies model PS971 prism of corner cube, its Specifeca tion speeification：Printing opacity
Face surface face type is better than the@632.8nm of λ/10；Rotating accuracy is less than 3 ", clear aperture 25.4mm；
5) parallel light tube 7：Using the reflective parallel light pipe of customization, its Specifeca tion speeification：Parallel light tube focal length is 5m,
Reflection paraboloid face type is better than the@632.8nm of λ/20；
6) focal plane laser beam analyzer 8：Using Spiricon companies of U.S. model SP620 laser beam analyzer, its is main
Performance parameter：Service band 190nm-1100nm, pixel size 4.4um*4.4um, number of pixels 1600*1200；
7) reference mirror 9：Using the reference mirror of customization, its Specifeca tion speeification：Reference plane surface face type is better than the@of λ/10
632.8nm, electroplate film, reference plane clear aperture are 15mm.
The dress school schematic diagram of apparatus of the present invention itself is as shown in figure 1, comprise the following steps that：
1st, the first single-mode fiber 1 combines regulation with the first collimating mirror 3：What one end introducing of the first single-mode fiber 1 was specified swashs
Radiant, the optical fiber other end are docked with the first collimating mirror 3, and LASER Light Source is assembled after collimating mirror collimates by parallel light tube 7
In on focal plane laser beam analyzer 8, regulation optical fiber front and back position make it that imaging facula is minimum, fixed transmission end optical fiber position at focal plane
Put, complete single-mode fiber 1 and combined with collimating mirror 3；
2nd, the second single-mode fiber 2 combines regulation with the second collimating mirror 4：Adjusting method is identical with step 1；
3rd, the first single-mode fiber 1, the second single-mode fiber 2 introduce LASER Light Source respectively, wherein the first single-mode fiber 1 introduces light
Through the first collimating mirror 3 collimate be emitted, then by spectroscope 5 reflection after enter parallel light tube 7 and on focal plane laser beam analyzer 8 into
Picture, it is recorded as image point position；
4th, the second single-mode fiber 2 introduces light and collimates outgoing through the second collimating mirror 4, then is reflected by spectroscope 5, prism of corner cube
6 return along original optical path, are imaged into parallel light tube 7 and on focal plane laser beam analyzer 8, and the second collimating mirror 4 of regulation makes the outgoing
The imaging point that light introduces light with the first single-mode fiber 1 overlaps, and removes prism of corner cube 6, final first single-mode fiber 1, the second single mode
Optical fiber 2 introduces the exit direction of light into 180 degree, completes the dress school of invention device.
The normal direction of reference mirror can be transferred to laser by apparatus of the present invention with the demarcation of auxiliary base mirror normal direction
The direction of the launch, registering regulation, this method comprise the steps of between auxiliary base mirror normal direction and optical instrument optical axis：
1st, fill-in light calibration device self-test
As shown in Figure 2, the first single-mode fiber 1, the second single-mode fiber 2 introduce the LASER Light Source specified respectively, wherein the
One single-mode fiber 1 introduce light reflected through the first collimating mirror 3, spectroscope 5, the second single-mode fiber 2 introduce light through the second collimating mirror 4,
After spectroscope 5 reflects, prism of corner cube 6 turns to, spectroscope 5 transmits, two-beam together converges at burnt at focal plane by parallel light tube 7
On face laser beam analyzer 8, finally whether imaging facula overlaps two beam laser of detection on laser beam analyzer, confirms to complete after overlapping
Fill-in light calibration device self-test, prism of corner cube 6 of dismantling；
2nd, benchmark light direction is adjusted
Change prism of corner cube 6 into reference mirror 9, introducing the laser specified by one end of the first single-mode fiber is used as reference light
Source, the reference light are collimated through the first collimating mirror 3 and are emitted, then into parallel light tube 7 and in focal plane light beam after the reflection of spectroscope 5
It is imaged on analyzer 8, is recorded as image point position；
3rd, reference mirror normal direction auxiliary calibration
Second single-mode fiber 2 introduces the LASER Light Source specified, and introduces light and collimates outgoing through the second collimating mirror 4, then through undue
Enter after light microscopic 5 reflects, reference mirror 9 reflects in parallel light tube 7, the orientation of reference mirror 9, luffing angle cause light beam to image in Jiao
On face laser beam analyzer 8, the imaging facula for being fine-tuning to two-beam overlaps, and records the facula position, now the side of two beam emergent lights
Xiang Jun represents the normal direction of reference mirror 9；
4th, reference mirror normal direction and equipment under test light shaft coaxle degree dress school and test
It is solid after completion above step, the dress school of axiality between reference mirror and equipment under test 10 can be carried out, is now needed
It is divided into two kinds of situations：Equipment under test 10 is active emission system；Equipment under test 10 is passive reception system.
When equipment under test 10 is active emission system, orientation, the luffing angle of system under test (SUT) 10 are directly adjusted so that hair
Penetrate light to image on focal plane laser beam analyzer 8 after the convergence of parallel light tube 7, continue to be fine-tuning to imaging facula and reference light hot spot
Position overlaps, and now the outgoing light direction of equipment under test 10 overlaps with the normal direction of reference mirror 9；
When equipment under test 10 is passive reception system, subsequent step is as follows：Fixed reference mirror 9, by fill-in light calibration device
Before being positioned over equipment under test 10；First single-mode fiber 1 enters the LASER Light Source specified, and introduces light and collimates outgoing through the first collimating mirror 3,
Enter parallel light tube 7 after the reflection of spectroscope 5 again and be imaged on focal plane laser beam analyzer 8, regulation fill-in light calibration device makes
It is identical with step 1 position that the regulation of photoimaging facula position must be emitted, fixed fill-in light calibration device；Second single-mode fiber 2, which introduces, to swash
Light is collimated through the second collimating mirror 4 and is emitted, then is received after the reflection of spectroscope 5 by equipment under test 10, adjusts equipment under test 10
So that receiving optical axis and the second single-mode fiber 2 introducing light light shaft coaxle, optical axis and the normal direction weight of reference mirror 9 are now received
Close.
Claims (1)
1. a kind of fill-in light calibration method of the reference mirror normal direction of the fill-in light calibration device based on reference-calibrating mirror normal direction,
The fill-in light calibration device of described reference-calibrating mirror normal direction includes the first single-mode fiber (1), the second single-mode fiber (2), the
One collimating mirror (3), the second collimating mirror (4) and spectroscope (5), prism of corner cube (6), parallel light tube (7), focal plane laser beam analyzer
(8)；First single-mode fiber (1), the second single-mode fiber (2) introduce LASER Light Source respectively, wherein the first single-mode fiber (1) introduces light
Collimate and be emitted through the first collimating mirror (3), then into parallel light tube (7) and in focal plane beam analysis after spectroscope (5) reflection
Instrument is imaged on (8), is recorded as image point position；Second single-mode fiber (2) introduces light and collimates outgoing through the second collimating mirror (4), then passes through
Spectroscope (5) reflection is crossed, parallel light tube (7) is entered after prism of corner cube (6) turns back 180 degree, finally in the focal plane in focal plane
Laser beam analyzer is imaged on (8), and the second collimating mirror of regulation (4) causes the imaging point of two-beam to overlap；Prism of corner cube (6) is removed,
Final first single-mode fiber (1), the second single-mode fiber (2) introduce the exit direction of light into 180 degree, and for auxiliary base mirror
Normal direction is demarcated or the optical axis of optical instrument is monitored；It is characterized in that method and step is as follows：
1) fill-in light calibration device self-test：The laser specified is introduced by the first single-mode fiber (1), the second single-mode fiber (2) respectively
Light source, reflected wherein the first single-mode fiber (1) introduces light through the first collimating mirror (3) collimation, spectroscope (5), the second single-mode fiber
(2) introduce light to turn to, after spectroscope (5) transmission through the second collimating mirror (4) collimation, spectroscope (5) reflection, prism of corner cube (6), two
Shu Guang is together converged on the focal plane laser beam analyzer (8) at focal plane by parallel light tube (7), and two beam laser of detection are finally in light
Whether imaging facula overlaps on beam analysis instrument, confirms to complete fill-in light calibration device self-test, prism of corner cube of dismantling (6) after overlapping；
2) benchmark light direction is adjusted：Change prism of corner cube (6) into reference mirror (9), swashed by what the introducing of the first single-mode fiber was specified
Light is collimated through the first collimating mirror (3) and is emitted as reference light source, the reference light, then into parallel after spectroscope (5) reflection
Light pipe (7) is simultaneously imaged on focal plane laser beam analyzer (8), is recorded as image point position；
3) reference mirror normal direction is demarcated:Second single-mode fiber (2) introduces the LASER Light Source specified, and introduces light through the second collimating mirror
(4) collimation outgoing, then enter after spectroscope (5) reflection, reference mirror (9) reflection in parallel light tube (7), adjust reference mirror
(9) orientation, luffing angle cause this to be imaged on imaging point and the first single-mode fiber (1) on focal plane laser beam analyzer (8) and introduce
Photoimaging point overlaps, and records the facula position, now the direction of two beam emergent lights represents the normal direction of reference mirror (9)；
4) reference mirror normal direction and equipment under test light shaft coaxle degree dress school and test：After completing above step, base can be carried out
Quasi- mirror (9) normal direction and the regulation of equipment under test (10) light shaft coaxle degree, now need to be divided into two kinds of situations：
The first：When equipment under test (10) is active emission system, subsequent step is as follows：Directly adjust system under test (SUT) (10)
Orientation, luffing angle so that the transmitting light of system under test (SUT) (10) images in focal plane beam analysis after parallel light tube (7) convergence
On instrument (8), the facula position for being fine-tuning to imaging facula with the first single-mode fiber (1) introducing light overlaps, now equipment under test (10)
Outgoing light direction i.e. overlapped with the normal direction of reference mirror (9)；
Second：When equipment under test (10) is passive reception system, subsequent step is as follows：Fixed reference mirror (9), by fill-in light
Before calibration device is positioned over equipment under test (10)；The LASER Light Source that first single-mode fiber (1) access is specified, light is introduced through the first collimation
Mirror (3) collimation outgoing, then by spectroscope (5) reflection after enter parallel light tube (7) and on focal plane laser beam analyzer (8) into
Picture, regulation fill-in light calibration device make it that the imaging point position of emergent light imaging facula position adjustments reference light is identical, fixed auxiliary
Light calibration device；Second single-mode fiber (2) introduces laser and collimates outgoing through the second collimating mirror (4), then after spectroscope (5) reflection
Received by equipment under test (10), regulation equipment under test (10) is such that receiving optical axis and the second single-mode fiber (2) introduces light optical axis
Coaxially, optical axis is now received to overlap with the normal direction of reference mirror (9).
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