CN106405860B - Method of Adjustment based on refraction-reflection type infrared imaging optical system - Google Patents
Method of Adjustment based on refraction-reflection type infrared imaging optical system Download PDFInfo
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- CN106405860B CN106405860B CN201611121714.3A CN201611121714A CN106405860B CN 106405860 B CN106405860 B CN 106405860B CN 201611121714 A CN201611121714 A CN 201611121714A CN 106405860 B CN106405860 B CN 106405860B
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- G—PHYSICS
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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Abstract
Method of Adjustment based on refraction-reflection type infrared imaging optical system, it is related to infrared optical system integration techno logy field, unit optical element is without standard measure during solving the problems, such as existing infrared optical system adjustment, specific Method of Adjustment is as follows: one, by all reflecting mirrors of laser interferometer adjustment, guaranteeing reflecting mirror beam quality；Two, the spatial position of all diaphotoscopes or transmission microscope group is placed using laser tracker；Three, by the radial position of the interference fringe accurate adjustment diaphotoscope of diaphotoscope surface reflection, remaining location error is eliminated；Four, optical system Theoretical Design accurate adjustment diaphotoscope is combined by infrared detector imaging or transmits the tilt angle of microscope group and optical axis, eliminate remaining optical aberration.The method being capable of adjustment of quick, effective and accurate realization to refraction-reflection type infrared imaging optical system through the invention.
Description
Technical field
The present invention relates to infrared optical system integration techno logy fields, and in particular to one kind is based on refraction-reflection type infrared imaging optics
The Method of Adjustment of system passes through this method suitable for the refractive and reflective optical system precision adjustment process of a variety of infrared bands imaging
It being capable of adjustment of quick, effective and accurate realization to refraction-reflection type infrared imaging optical system.
Background technique
The technical indicator of infrared imaging optical system is more stringent relative to other infrared optical systems, and adjustment process is
Guarantee the important stage of infrared optical system image quality.Increase and infrared detector terminal cold stop with optics bore
Limitation, optical system are essentially refraction-reflection type structure, and generally muti-piece reflecting mirror and diaphotoscope.And most infrared transmissions
All there is the physics cut-off of spectrum in visible light wave range in mirror optical material, increase difficulty for the adjustment of system ray machine and do not know
Property.
Current quantitative detection of existing technological means during cannot achieve in the infrared optical system adjustment stage, at present
The adjustment of traditional diaphotoscope or transmission microscope group is substantially i.e. by mechanical structure control diaphotoscope or the space bit of transmission microscope group
It sets, radial deflection and the inclination with optical axis.Even if optical system mirror adjustment finishes, by diaphotoscope or transmission microscope group with
During reflecting mirror couples, the adjustment of diaphotoscope or lens group also relies only on machinery positioning, further can not accurately adjust light
The position for learning element is optimal optical system imaging quality.And cause final mass of system that can only rely on optical system
Depending on the image quality of infrared detector terminal.If system detection results do not reach technical requirement, especially in light
Learn system imaging quality meet the requirements but the focal length of system and in the case that visual field all deviation occurs, to there are the optics of deviation
The investigation of element will be extremely difficult.
Summary of the invention
The present invention in order to solve the problems, such as during existing infrared optical system adjustment unit optical element without standard measure,
A kind of Method of Adjustment based on refraction-reflection type infrared imaging optical system is provided.
Based on the Method of Adjustment of refraction-reflection type infrared imaging optical system, this method is realized by following steps:
Step 1: using laser interferometer be emitted collimated light beam, hot spot is adjusted to the first off axis reflector mirror, second from
The center of axis reflecting mirror, the first plane mirror, second plane mirror reflecting surface；And the wave fed back according to laser interferometer
Preceding information misses the wavefront of the first off axis reflector mirror, the second off axis reflector mirror, the first plane mirror, second plane mirror
Poor RMS is adjusted to 60nm-180nm；
Step 2: using laser tracker first off axis reflector mirror, the second off axis reflector mirror, first described in step 1
Plane mirror, second plane mirror carry out position positioning, and install third diaphotoscope according to positioning datum, saturating using third
It penetrates mirror front surface Returning beam and forms interference fringe in laser interferometer；It will be done by adjusting the radial translation of third diaphotoscope
The center for relating to striped moves to the target surface center of laser interferometer, eliminates the radial position error of third diaphotoscope；It will be infrared
Detector is placed in the focal point of the third diaphotoscope, saturating by adjusting third using the image quality of infrared detector as standard
The angle for penetrating mirror and optical axis eliminates angle tilt error；
Step 3: using the second diaphotoscope of laser tracker and infrared detector mounting and adjusting, before the second diaphotoscope
The interference fringe that surface Returning beam is formed in laser interferometer will interfere item by adjusting the radial translation of the second diaphotoscope
The center of line moves to the target surface center of laser interferometer, eliminates the radial position error of the second diaphotoscope；It will be described infrared
Detector is placed on the joint focal point of the second diaphotoscope and third diaphotoscope, saturating by adjusting second by standard of image quality
The angle for penetrating mirror and optical axis eliminates angle tilt error；
Step 4: using the first diaphotoscope of laser tracker and infrared detector mounting and adjusting, before the first diaphotoscope
The interference fringe that surface Returning beam is formed in laser interferometer will interfere item by adjusting the radial translation of the first diaphotoscope
The center of line moves to the target surface center of laser interferometer, eliminates the radial error of the first lens, infrared detector is placed
At system image planes, and according to the angle tilt error of infrared detector image quality the first diaphotoscope of elimination；Realize refraction-reflection type
The adjustment of infrared imaging system.
Beneficial effects of the present invention: the present invention in refraction-reflection type infrared imaging optical system mainly by reflecting mirror and transmission
Microscope group is at using assembling respectively during system adjustment, the principle individually detected is installed.Since reflecting mirror will not produce
Add lustre to difference, can use laser interferometer adjustment reflecting mirror, reuse laser tracker and diaphotoscope is installed, then by detecting
Device carries out further accurate adjustment.
Method of Adjustment of the present invention comprehensively utilizes laser tracker, laser interferometer during optical system alignment
And the high accuracy detection instrument such as detector, all optical mechanical elements are all carried out to quantitative installation, realize list in the ray machine adjustment stage
The adjustment quality assurance of component.This method can not only it is quick, effective and it is accurate completion to refraction-reflection type infrared imaging optics
The adjustment of system, and realize the closed-loop control of optical system Theoretical Design result and final system image quality.
Method of Adjustment of the present invention is accurately controlled institute by laser interferometer, laser tracker and infrared detector
There is the spatial position of optical element, eliminates the uncertainty of optical element position during adjustment.
Detailed description of the invention
Fig. 1 is refraction-reflection type infrared imaging optical system Method of Adjustment schematic diagram of the present invention.
In figure: 1, laser interferometer, the 2, first off axis reflector mirror, the 3, second off axis reflector mirror, the 4, first plane mirror,
5, the first diaphotoscope, 6, second plane mirror, the 7, second diaphotoscope, 8, third diaphotoscope, 9, laser tracker, 10, infrared
Detector, 11, optical platform.
Specific embodiment
Specific embodiment one, embodiment is described with reference to Fig. 1, the adjustment based on refraction-reflection type infrared imaging optical system
Method, including the transmission of laser interferometer 1, the first off axis reflector mirror 2, the second off axis reflector mirror 3, the first plane mirror 4, first
Mirror 5, second plane mirror 6, the second diaphotoscope 7, third diaphotoscope 8, laser tracker 9, infrared detector 10 and optics are flat
Platform 11.Wherein, the first off axis reflector mirror 2, the second off axis reflector mirror 3, the first plane mirror 4, the first diaphotoscope 5, second are flat
Face reflecting mirror 6, the second diaphotoscope 7, third diaphotoscope 8 and infrared detector 10 constitute refraction-reflection type infrared imaging optical system, and
Said units device is installed on optical platform 11.The first off axis reflector mirror 2, the second off axis reflector mirror 3, the first plane
Reflecting mirror 4, the first diaphotoscope 5, second plane mirror 6, the positional relationship of the second diaphotoscope 7 and third diaphotoscope 8 are as follows: described
Collimated light beam is reflected into the second off axis reflector mirror 3 through the first off axis reflector mirror 2 first, then reflexes to the first plane mirror 4 instead
It penetrates, through the second diaphotoscope 7 and third diaphotoscope 8 is penetrated after the reflection of second plane mirror 6 after the first diaphotoscope 5, finally
Reach infrared detector 10.
This method is realized by following steps:
Step 1: laser interferometer is emitted collimated light beam, all reflecting mirrors are carried out to wear axis, by the light of laser interferometer
Spot, which is adjusted to the first off axis reflector mirror 2, the second off axis reflector mirror 3, the first plane mirror 4, second plane mirror 6, to be reflected
The center on surface.The angle of each reflecting mirror is determined in advance by mechanical structure.Then the installation coke ratio of laser interferometer 1 is slightly less than
The camera lens of system coke ratio sets the laser interferometer camera lens coke ratio as 1.5；So as to measure unified optical wavefront matter
Amount.The wavefront information fed back by laser interferometer, the first off axis reflector mirror 2, the second off axis reflector mirror 3, the first plane is anti-
Penetrate mirror 4, the aberration of second plane mirror 6 is adjusted to optimal；That is: wavefront error RMS is adjusted to 60nm-180nm.
Step 2: optical platform is positioned 11 first using laser interferometer 1, then all mirror optics elements are carried out
Position positioning.Then third diaphotoscope 8 is installed with the benchmark that laser tracker 1 is established.Since diaphotoscope material is in visible light wave
The physics cut-off of section, therefore the only defocus formed in laser interferometer 1 using 8 front surface Returning beam of third diaphotoscope
With the interference fringe of spherical aberration.The center of interference fringe is moved into laser interferometer by adjusting the radial translation of third diaphotoscope 8
Target surface center, eliminate third diaphotoscope 8 radial position error.Further infrared detector 10 can be placed on third
The focal point of diaphotoscope 8 is eliminated by adjusting third diaphotoscope 8 and the angle of optical axis because angle causes using image quality as standard
Optical aberration.
Step 3: utilizing laser tracker and infrared detector mounting and adjusting second after third 8 adjustment of diaphotoscope
Diaphotoscope 7, the only defocus formed in laser interferometer 1 using 7 front surface Returning beam of the second diaphotoscope and spherical aberration
Interference fringe.Radial translation by adjusting the second diaphotoscope 7 moves at the center of interference fringe in the target surface of laser interferometer
The radial position error of the second diaphotoscope 7 is eliminated in heart position.Infrared detector is further placed on the second diaphotoscope 7 and
The joint focal point of three diaphotoscopes 8, the angle using image quality as standard by adjusting the second diaphotoscope 7 and optical axis are eliminated because of angle
Optical aberration caused by spending.
Step 4: finally adjusting the first diaphotoscope 5 by above-mentioned steps, existed using 5 front surface Returning beam of the first diaphotoscope
The interference fringe formed in laser interferometer, the radial translation by adjusting the first diaphotoscope 5 move to the center of interference fringe
The target surface center of laser interferometer eliminates the radial error of the first lens 5, infrared detector 10 is placed on system image planes
Place, and according to the angle tilt error of infrared detector image quality the first diaphotoscope 5 of elimination；Until the sky of each optical element
Between position all meet tolerance realize refraction-reflection type infrared imaging system adjustment.
The measurement accuracy of laser interferometer 1 described in present embodiment is higher than 0.01 λ, and λ is wavelength, (λ=632.8nm),
And the measurement camera lens for being suitble to tested examining system coke ratio can be installed.The measurement error of the laser tracker is 0.015mm.
First off axis reflector mirror 2, the second off axis reflector mirror 3 described in present embodiment, the first plane mirror 4 and second
The face type of plane mirror 6 all can be aspherical, spherical surface or plane.Installation accuracy reaches 0.1mm-0.015mm.And institute
There is reflecting mirror to complete optical coating, there is at least 10% reflectivity in visible light wave range, all reflecting mirror surface shape precision are all
The tolerance of optical design is reached.It is tilted also needed for bidimensional, D translation adjustment space.
The installation accuracy of first diaphotoscope 5, the second diaphotoscope 7 and third diaphotoscope 8 described in present embodiment reaches
0.1mm-0.015mm.And it is completed optical coating, there are at least 10% reflectivity, all diaphotoscopes in visible light wave range
Surface figure accuracy has all reached the tolerance of optical design.It is tilted also needed for bidimensional, D translation adjustment space.
Infrared detector 10 described in present embodiment, meets the cold door screen of infrared detector and optical system matches each other, full
Sufficient pixel resolution and refraction-reflection type infrared imaging optical system match each other.
Embodiment described above is only limitted to explain that the present invention, protection scope of the present invention should include the whole of claim
Content, and by embodiment, the full content of the claims in the present invention can be thus achieved in person skilled in art.
Claims (8)
1. the Method of Adjustment based on refraction-reflection type infrared imaging optical system, characterized in that this method is realized by following steps:
Step 1: being emitted collimated light beam using laser interferometer (1), hot spot is adjusted to the first off axis reflector mirror (2), second
The center of off axis reflector mirror (3), the first plane mirror (4), second plane mirror (6) reflecting surface；And it is dry according to laser
The wavefront information of interferometer feedback, by the first off axis reflector mirror (2), the second off axis reflector mirror (3), the first plane mirror (4), the
The wavefront error RMS of two plane mirrors (6) is adjusted to 60nm-180nm；
Step 2: using laser tracker (9) first off axis reflector mirror (2), the second off axis reflector mirror described in step 1
(3), the first plane mirror (4), second plane mirror (6) carry out position positioning, and saturating according to positioning datum installation third
Mirror (8) are penetrated, interference fringe is formed on laser interferometer (1) using third diaphotoscope (8) front surface Returning beam；By adjusting
The center of interference fringe is moved to the target surface center of laser interferometer by the radial translation of third diaphotoscope (8), eliminates third
The radial position error of diaphotoscope (8)；Infrared detector is placed in the focal point of the third diaphotoscope (8), with infrared acquisition
The image quality of device is standard, eliminates angle tilt error by adjusting the angle of third diaphotoscope (8) and optical axis；
Step 3: using laser tracker (9) and the second diaphotoscope of infrared detector mounting and adjusting (7), using the second diaphotoscope
(7) interference fringe that front surface Returning beam is formed on laser interferometer (1), by adjusting the radial direction of the second diaphotoscope (7)
The center of interference fringe is moved to the target surface center of laser interferometer (1) by translation, eliminates the radial position of the second diaphotoscope (7)
Set error；The infrared detector (10) is placed on to the joint focal point of the second diaphotoscope (7) and third diaphotoscope (8), with
Image quality is standard by adjusting the angle of the second diaphotoscope (7) and optical axis elimination angle tilt error；
Step 4: using laser tracker (9) and infrared detector (10) first diaphotoscope of mounting and adjusting (5), thoroughly using first
The interference fringe that mirror (5) front surface Returning beam is formed on laser interferometer (1) is penetrated, by adjusting the first diaphotoscope (5)
The center of interference fringe is moved to the target surface center of laser interferometer (1) by radial translation, eliminates the radial direction of the first lens (5)
Infrared detector (10) is placed at system image planes by error, and eliminates first thoroughly according to infrared detector (10) image quality
Penetrate the angle tilt error of mirror (5)；Realize the adjustment of refraction-reflection type infrared imaging system；
The first off axis reflector mirror (2), the second off axis reflector mirror (3), the first plane mirror (4), the first diaphotoscope (5),
The positional relationship of second plane mirror (6), the second diaphotoscope (7) and third diaphotoscope (8) are as follows:
The collimated light beam is reflected into the second off axis reflector mirror (3) through the first off axis reflector mirror (2) first, then to reflex to first flat
Face reflecting mirror (4) reflection penetrates the second diaphotoscope (7) after reflecting through the first diaphotoscope (5) by second plane mirror (6)
With third diaphotoscope (8), infrared detector (10) are eventually arrived at.
2. the Method of Adjustment according to claim 1 based on refraction-reflection type infrared imaging optical system, which is characterized in that step
In one, the laser interferometer (1) camera lens coke ratio is set as 1.5.
3. the Method of Adjustment according to claim 1 or 2 based on refraction-reflection type infrared imaging optical system, which is characterized in that
The measurement accuracy of the laser interferometer (1) is higher than 0.01 λ, and λ is wavelength, and can install and be suitble to tested examining system coke ratio
Measure camera lens.
4. the Method of Adjustment according to claim 3 based on refraction-reflection type infrared imaging optical system, which is characterized in that described
The measurement error of laser tracker (9) is 0.015mm.
5. the Method of Adjustment according to claim 4 based on refraction-reflection type infrared imaging optical system, which is characterized in that described
The face of first off axis reflector mirror (2), the second off axis reflector mirror (3), the first plane mirror (4) and second plane mirror (6)
Type is aspherical, spherical surface or plane.
6. the Method of Adjustment according to claim 5 based on refraction-reflection type infrared imaging optical system, which is characterized in that described
First off axis reflector mirror (2), the second off axis reflector mirror (3), the first plane mirror (4) and second plane mirror (6) carry out
Optical coating has 10% reflectivity in visible light wave range.
7. the Method of Adjustment according to claim 6 based on refraction-reflection type infrared imaging optical system, which is characterized in that described
First off axis reflector mirror (2), the second off axis reflector mirror (3), the first plane mirror (4), second plane mirror (6), first
Diaphotoscope (5), the second diaphotoscope (7) and third diaphotoscope (8) can be realized bidimensional inclination and D translation adjustment.
8. the Method of Adjustment according to claim 7 based on refraction-reflection type infrared imaging optical system, which is characterized in that described
The installation accuracy of first diaphotoscope (5), the second diaphotoscope (7) and third diaphotoscope (8) is 0.1mm-0.015mm.
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| CN107132636B (en) * | 2017-06-29 | 2019-10-11 | 佛山科学技术学院 | A kind of aspherical primary mirror reflecting surface adjustment benchmark calibration method and its system |
| CN110737103B (en) * | 2019-10-31 | 2022-03-08 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber off-axis catadioptric multichannel optical system assembling and adjusting method |
| CN110824459A (en) * | 2019-12-19 | 2020-02-21 | 成都英飞睿技术有限公司 | Intelligent optical axis adjusting system based on interference fringes and adjusting method thereof |
| CN111650737B (en) * | 2020-07-13 | 2021-11-19 | 中国科学院光电技术研究所 | Adjusting method and device for off-axis reflective optical system |
| CN111796434A (en) * | 2020-07-16 | 2020-10-20 | 中国人民解放军国防科技大学 | Automatic adjusting system and method for optical system |
| CN112747904B (en) * | 2020-12-30 | 2021-12-28 | 中国科学院长春光学精密机械与物理研究所 | Method for assembling and adjusting infrared transfer function measuring instrument |
| CN113834633A (en) * | 2021-08-09 | 2021-12-24 | 中国工程物理研究院应用电子学研究所 | Method for assembling and adjusting transmission type near-infrared beam expanding system |
| CN113949443B (en) * | 2021-09-29 | 2023-01-06 | 中国科学院西安光学精密机械研究所 | High-precision rapid installation and adjustment method of laser communication test system |
| CN114427953A (en) * | 2021-12-23 | 2022-05-03 | 北京空间机电研究所 | Full-automatic system for optical element measurement and testing method |
| CN114488521B (en) * | 2022-01-04 | 2022-12-09 | 中国科学院西安光学精密机械研究所 | Space pose positioning method of plane reflector in convergent-refractive optical path |
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