CN104391366A - Terahertz-band off-axis three-reflector system and debugging method thereof - Google Patents
Terahertz-band off-axis three-reflector system and debugging method thereof Download PDFInfo
- Publication number
- CN104391366A CN104391366A CN201410690280.3A CN201410690280A CN104391366A CN 104391366 A CN104391366 A CN 104391366A CN 201410690280 A CN201410690280 A CN 201410690280A CN 104391366 A CN104391366 A CN 104391366A
- Authority
- CN
- China
- Prior art keywords
- high precision
- reference block
- mirror
- measuring
- precision reference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
Abstract
The invention discloses a terahertz-band off-axis three-reflector system and a debugging method thereof and belongs to the technical field of off-axis reflection imaging optical systems. The terahertz-band off-axis three-reflector system comprises a measuring substrate, a main mirror, a secondary mirror and a tertiary mirror and is characterized by further comprising a first measuring probe, a second measuring probe and a third measuring probe arranged on the measuring substrate, a first high-precision reference block fixed at the lateral surface of the main mirror, a second high-precision reference block fixed at the lateral surface of the secondary mirror, and a third high-precision reference block fixed at the lateral surface of the tertiary mirror, each of the first measuring probe, second measuring probe and third measuring probe is provided with a distance sensor, the positions, postures and degrees of freedom information of the first high-precision reference block, second high-precision reference block and third high-precision reference block are measured through the distance sensors so as to obtain the positions, postures and degrees of freedom information of the primary mirror, secondary mirror and tertiary mirror, and accordingly the precise debugging for the large off-axis three-reflector system is realized.
Description
Technical field
The invention belongs to off axis reflector imaging optical system technical field, be specifically related to a kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof.
Background technology
Computer-aided alignment can realize long-focus and Large visual angle, non-stop layer block, modulation transfer function is high, to advantages such as parasitic light rejection ability are strong, become an important component part of space remote sensing measuring system owing to having simultaneously.Its structure as shown in Figure 1, comprise primary mirror (1), secondary mirror (2), three mirrors (3) and image planes (4), the installation quality of computer-aided alignment determined primarily of the mutual locus of these three catoptrons, the error between attitude and theoretical value.But due to complicacy (each optical element has 6 degree of freedom) and the asymmetry of its structure, and separate between each catoptron degree of freedom, span is comparatively large, and the high precision that realize system is debug extremely difficult.
At present, it is auto-interference method that the assembling and setting method of computer-aided alignment mainly contains two kinds: one, as shown in Figure 2, namely the sphericity interferometer (5) by being placed on computer-aided alignment focus sends spherical light wave, complanation ripple after computer-aided alignment, after outgoing beam is reflected by one piece of standard flat mirror (6), return by former road and form tested corrugated, this corrugated again by after optical system with the canonical reference spherical waves interfere of interferometer inside, obtain interference fringe thus obtain unbalance of system amount by Computer Aided Assembly Process Planning optimization process.The application prerequisite of the method is the light source and the interference fringe pattern observable that need to produce spherical light wave, therefore computer-aided alignment many employings the method for near ultraviolet, visible ray, near-infrared band.But, for terahertz wave band off-axis incidence system: first the reflecting surface of terahertz wave band is aluminized and more coarse, can not reflect visible light, therefore can not carry out auto-interference by visible ray; Secondly terahertz light source power is more weak, and can only provide light source for miniature or small-sized terahertz optics system, therefore debuging of terahertz wave band off-axis incidence system cannot use auto-interference method.
The another kind of assembling and setting method of computer-aided alignment is space-location method, for small-sized off-axis incidence system, can when processing mounting bracket, high precision machine tool is utilized to process installation positioning datum, ensure the accuracy of each reflector position, in installation process, utilize the site error of the high-precision measuring tool inspection catoptrons such as vernier caliper simultaneously; And for medium-sized off-axis incidence system, then adopt the instrument of surveying and mappings such as total powerstation, transit, stadimeter to measure the locus of catoptron, attitude.The method is the main Method of Adjustment of current terahertz wave band off-axis incidence system, but along with the volume of catoptron and span increase, operation wavelength reduces, the position of catoptron, the installation accuracy of attitude are also more and more higher, have have met or exceeded the ultimate precision of the instrument of surveying and mappings such as total powerstation, transit, stadimeter gradually.Therefore, for the Terahertz off-axis incidence system of large-scale, short wavelength, high-precision debuging becomes a difficult problem.
Summary of the invention
In order to overcome the difficult problem that the Terahertz off-axis incidence system that is large-scale, short wavelength that exists in prior art is debug, the invention provides a kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof, this system arranges a high precision reference block in each catoptron picture frame side, measurement pedestal arranges measuring sonde, the position of high precision reference block, attitude and degree of freedom information is measured by range sensor on measuring sonde, obtain the degree of freedom information of catoptron, thus reach the object accurately debug.
A kind of terahertz wave band off-axis incidence system, comprise measurement pedestal, primary mirror, secondary mirror, three mirrors, it is characterized in that, also comprise the first measuring sonde being arranged on and measuring on pedestal, second measuring sonde, 3rd measuring sonde, and be fixed on the first high precision reference block of primary mirror side, be fixed on the second high precision reference block of secondary mirror side and be fixed on the third high precision references block of three mirror sides, described first measuring sonde, second measuring sonde and the 3rd measuring sonde are provided with range sensor, the first high precision reference block is measured by range sensor, the position of the second high precision reference block and third high precision references block, attitude and degree of freedom information, then primary mirror can be obtained, the position of secondary mirror and three mirrors, attitude and degree of freedom information, thus realize debuging of catoptron.
Further, described high precision reference block is fixed on the side of catoptron by the mode of welding.
A Method of Adjustment for terahertz wave band off-axis incidence system, comprises the following steps:
Step 1: be fixed on by three measuring sondes and measure on pedestal, adopts high precision machine tool to demarcate three measuring sondes measured on pedestal;
Step 2: adopt the result of laser interferometer to calibrated three measuring sondes of step 1 to compensate;
Step 3: be fixedly installed the first high precision reference block in the side of primary mirror picture frame, the side of secondary mirror picture frame is fixedly installed the second high precision reference block, the side of three mirror picture frames is fixedly installed third high precision references block, obtains the corresponding relation of the position of high precision reference block, attitude, the position of degree of freedom and catoptron, attitude, degree of freedom through profile inspection;
Step 4: primary mirror, secondary mirror and three mirrors are individually fixed on moveable support, primary mirror, secondary mirror and three mirrors are moved near theoretical position respectively, first the position of three catoptrons and attitude are adjusted roughly, then measuring sonde measures the position of high precision reference block, attitude and degree of freedom information by range sensor, the information of the position of catoptron, attitude and degree of freedom can be obtained, thus realize the accurate debugging of each catoptron.
Wherein, above-mentioned primary mirror and corresponding first measuring sonde of the first high precision reference block, secondary mirror and corresponding second measuring sonde of the second high precision reference block, three mirrors and corresponding 3rd measuring sonde of third high precision references block.
Beneficial effect of the present invention is:
1, the present invention is fixedly installed high precision reference block by the picture frame side at each catoptron, to debug in process with this reference block as measuring object, the information of the position of reference block, attitude and 6 degree of freedom obtains by measuring sonde, thus converse the information of each catoptron 6 degree of freedom, realize accurately debuging of large-scale Three mirror optical system.
2, the present invention adopts the absolute position of high precision machine tool to 3 measuring sondes to demarcate, and utilize laser interferometer to correct further the kinematic error of lathe own, thus the calibrated error of the absolute position of 3 of compensating measure system measuring sondes, obtain 3 more accurate absolute positions of measuring sonde.
3, the present invention's relative position, attitude of adopting on measuring sonde 18 high precision range sensors to determine between 3 catoptron reference blocks, thus obtain relative position, the attitude of catoptron, realize accurately debuging of terahertz wave band off-axis incidence system.
Accompanying drawing explanation
Fig. 1 is the light path schematic diagram of computer-aided alignment.
Fig. 2 is the schematic diagram that auto-interference method debugs off-axis incidence system.
Fig. 3 is the schematic diagram of terahertz wave band off-axis incidence system provided by the invention.
Fig. 4 is the position relationship schematic diagram of high precision reference block and measuring sonde and catoptron.
Fig. 5 is the schematic diagram adopting high precision machine tool to calibrate measuring sonde.
Fig. 6 is the schematic diagram adopting high precision machine tool to demarcate measuring sonde.
In figure, (1) be primary mirror, (2) be secondary mirror, (3) be three mirrors, (4) be image planes, (5) be sphericity interferometer, (6) be standard flat mirror, (7) be the first measuring sonde, (8) be the second measuring sonde, (9) are the 3rd measuring sonde, and (10) are the first high precision reference block, (11) be the second high precision reference block, (12) be third high precision references block, (13), for measuring pedestal, (14) are machine tool reference block, (15) be machine tool chief axis, (16) are machine tool movement platform.1,2,3,4,5,6 represent 6 range sensors arranged on the measurement probe.
Embodiment
Below in conjunction with drawings and Examples the present invention done and introduce further.
Fig. 3 is the schematic diagram of terahertz wave band off-axis incidence system provided by the invention, described Terahertz off-axis incidence system comprises measurement pedestal, primary mirror, secondary mirror and three mirrors, it is characterized in that, also comprise the first measuring sonde (7) being arranged on and measuring on pedestal, second measuring sonde (8), 3rd measuring sonde (9), and be fixed on the first high precision reference block (10) of primary mirror side, be fixed on the second high precision reference block (11) of secondary mirror side and be fixed on the third high precision references block (12) of three mirror sides, described first measuring sonde, second measuring sonde and the 3rd measuring sonde are provided with range sensor, described first measuring sonde measures the position of the first high precision reference block by range sensor, attitude and degree of freedom information, described second measuring sonde measures the position of the second high precision reference block by range sensor, attitude and degree of freedom information, described 3rd measuring sonde measures the position of the first high precision reference block by range sensor, attitude and degree of freedom information, then primary mirror can be obtained according to the corresponding relation between each high precision reference block and each catoptron, the position of secondary mirror and three mirrors, attitude and degree of freedom information, thus realize debuging of catoptron.
Further, described high precision reference block is fixed on the side of catoptron by the mode of welding.
A Method of Adjustment for terahertz wave band off-axis incidence system, comprises the following steps:
Step 1: adopt high precision machine tool to demarcate the measuring sonde of three on pedestal: as shown in Figure 5,3 measuring sondes are fixed on and measure on pedestal (13), then measurement pedestal is installed on the mobile platform of large-scale high-precision lathe, upper installation 1 the machine tool reference block (14) of the main shaft (15) of lathe, this machine tool reference block is utilized to demarcate the relative position of three measuring sondes and attitude.
Concrete calibration principle is: the reference position of machine tool reference block is near primary mirror measuring sonde (the first measuring sonde), and now, the relative position between primary mirror probe and reference block can be recorded by range sensor, is respectively (d2, d4); When machine tool reference block to be moved (D1, D2) distance by high precision machine tool is to secondary mirror measuring sonde place, the relative position between secondary mirror probe and machine tool reference block can be recorded by range sensor, is respectively (d1, d3); Physical dimension due to high precision reference block is known, for (W, L), the relative position that so primary mirror probe and secondary mirror are popped one's head in is (d2+D1+W+d1, d4+D2+L+d3), between other catoptrons, the calibration principle of relative position or comfortable state is the same.
Step 2: adopt the result of laser interferometer to calibrated three measuring sondes of step 1 to compensate: although the repetitive positioning accuracy of current common large-sized numerical control machining center all can reach ± 5um within, but because the kinematic accuracy of lathe finally can impact the measuring accuracy of this measuring system, in order to ensure lathe calibration result more accurately, more reliable, the kinematic accuracy of laser interferometer to lathe can be utilized to detect, and calibration result is revised.
Step 3: be welded and fixed the first high precision reference block in the side of primary mirror picture frame, the side of secondary mirror picture frame is welded and fixed the second high precision reference block, the side of three mirror picture frames is welded and fixed third high precision references block, then utilize high-precision three-coordinate instrument to carry out profile inspection, the corresponding relation of the position of high precision reference block, attitude, the position of degree of freedom and catoptron, attitude, degree of freedom can be obtained;
Step 4: primary mirror, secondary mirror and three mirrors are individually fixed on moveable support, first each catoptron is installed near theoretical position, carry out rough position and the adjustment of attitude, then the information of the position of each high precision reference block, attitude and its 6 degree of freedom in space coordinates is measured by the range sensor on measuring sonde, the position of catoptron, attitude and degree of freedom information can be obtained, according to the relative position of each catoptron and the difference of attitude and theoretical value, the position of each catoptron is adjusted.
The laser interferance method adopted when the calibration result of the present embodiment to measuring sonde compensates is the common method of high precision machine tool accuracy test, its measuring accuracy is high, usually, can reach several nm, by laser interferometer, high precision machine tool calibration result is compensated, the calibration result of lathe to measuring system can be made more accurate; The method that this enforcement utilizes 6DOF to locate, high precision reference block is fixedly installed in the picture frame side of each catoptron, debuging in process, with this reference block for witness mark, the information of its position, attitude and 6 degree of freedom can be obtained by the range sensor on measuring sonde, thus obtain the information of 6 degree of freedom of each catoptron, realize the accurate adjustment of each catoptron.
Claims (3)
1. a terahertz wave band off-axis incidence system, comprise measurement pedestal, primary mirror, secondary mirror, three mirrors, it is characterized in that, also comprise the first measuring sonde being arranged on and measuring on pedestal, second measuring sonde, 3rd measuring sonde, and be fixed on the first high precision reference block of primary mirror side, be fixed on the second high precision reference block of secondary mirror side and be fixed on the third high precision references block of three mirror sides, described first measuring sonde, second measuring sonde and the 3rd measuring sonde are provided with range sensor, the first high precision reference block is measured by range sensor, the position of the second high precision reference block and third high precision references block, attitude and degree of freedom information, then primary mirror can be obtained, the position of secondary mirror and three mirrors, attitude and degree of freedom information, thus realize debuging of catoptron.
2. terahertz wave band off-axis incidence system according to claim 1, is characterized in that, described high precision reference block is fixed on the side of corresponding catoptron by the mode of welding.
3. a Method of Adjustment for terahertz wave band off-axis incidence system, comprises the following steps:
Step 1: be fixed on by three measuring sondes and measure on pedestal, adopts high precision machine tool to demarcate three measuring sondes measured on pedestal;
Step 2: adopt the result of laser interferometer to calibrated three measuring sondes of step 1 to compensate;
Step 3: be fixedly installed the first high precision reference block in the side of primary mirror picture frame, the side of secondary mirror picture frame is fixedly installed the second high precision reference block, the side of three mirror picture frames is fixedly installed third high precision references block, obtains the corresponding relation of the position of high precision reference block, attitude, the position of degree of freedom and catoptron, attitude, degree of freedom through profile inspection;
Step 4: primary mirror, secondary mirror and three mirrors are individually fixed on moveable support, primary mirror, secondary mirror and three mirrors are moved near theoretical position respectively, first the position of three catoptrons and attitude are adjusted roughly, then measuring sonde measures the position of high precision reference block, attitude and degree of freedom information by range sensor, the information of the position of catoptron, attitude and degree of freedom can be obtained, thus realize the accurate debugging of each catoptron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410690280.3A CN104391366B (en) | 2014-11-25 | 2014-11-25 | A kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410690280.3A CN104391366B (en) | 2014-11-25 | 2014-11-25 | A kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104391366A true CN104391366A (en) | 2015-03-04 |
| CN104391366B CN104391366B (en) | 2016-12-07 |
Family
ID=52609289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410690280.3A Expired - Fee Related CN104391366B (en) | 2014-11-25 | 2014-11-25 | A kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104391366B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105116515A (en) * | 2015-07-30 | 2015-12-02 | 北京理工大学 | Off-axis tri-reflector zooming optical system adjusting method |
| CN106405860A (en) * | 2016-12-08 | 2017-02-15 | 中国科学院长春光学精密机械与物理研究所 | Method for installing and adjusting refraction and reflection type infrared imaging optical system |
| CN106526884A (en) * | 2016-11-28 | 2017-03-22 | 中国科学院长春光学精密机械与物理研究所 | Alignment system and adjusting method for large-calibre space optical camera lens |
| CN106568578A (en) * | 2016-10-12 | 2017-04-19 | 中国电子科技集团公司第五十研究所 | Aligning detector of off-axis reflection type terahertz imaging system and aligning method thereof |
| CN110737082A (en) * | 2019-10-09 | 2020-01-31 | 电子科技大学 | terahertz wave long-distance quasi-optical transmission system |
| CN111175989A (en) * | 2020-01-14 | 2020-05-19 | 湖北航天技术研究院总体设计所 | Method and system for adjusting reference of main mirror and three mirrors of off-axis three-mirror system |
| CN111552054A (en) * | 2020-06-09 | 2020-08-18 | 河南平原光电有限公司 | Overall design and adjustment method of off-axis three-mirror optical system |
| CN111879238A (en) * | 2020-07-31 | 2020-11-03 | 北京环境特性研究所 | Device and method for rapidly adjusting size of terahertz time-domain spectroscopy measurement quiet zone |
| CN112051233A (en) * | 2020-08-13 | 2020-12-08 | 中国科学院国家空间科学中心 | Small off-axis three-counter ionosphere imager frame structure |
| CN113031296A (en) * | 2021-03-24 | 2021-06-25 | 长春长光智欧科技有限公司 | Method for assembling and adjusting metal-based free-form surface three-reflection optical system capable of being assembled and adjusted quickly |
| KR102287242B1 (en) * | 2020-02-05 | 2021-08-10 | 한국표준과학연구원 | Optical having Mirror united with Body and Manufacturing Method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144496A (en) * | 1989-07-19 | 1992-09-01 | Olympus Optical Co., Ltd. | Reflecting objective system including a negative optical power second mirror with increasing negative optical power off-axis |
| JPH09105852A (en) * | 1995-10-12 | 1997-04-22 | Kankyocho Chokan | Sun tracking device |
| CN201331617Y (en) * | 2009-01-16 | 2009-10-21 | 中国科学院西安光学精密机械研究所 | Perfect reflection optic system |
| CN102062936A (en) * | 2010-12-24 | 2011-05-18 | 中国科学院长春光学精密机械与物理研究所 | Off-axis TMA optical system for reducing processing and resetting difficulty |
-
2014
- 2014-11-25 CN CN201410690280.3A patent/CN104391366B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144496A (en) * | 1989-07-19 | 1992-09-01 | Olympus Optical Co., Ltd. | Reflecting objective system including a negative optical power second mirror with increasing negative optical power off-axis |
| JPH09105852A (en) * | 1995-10-12 | 1997-04-22 | Kankyocho Chokan | Sun tracking device |
| CN201331617Y (en) * | 2009-01-16 | 2009-10-21 | 中国科学院西安光学精密机械研究所 | Perfect reflection optic system |
| CN102062936A (en) * | 2010-12-24 | 2011-05-18 | 中国科学院长春光学精密机械与物理研究所 | Off-axis TMA optical system for reducing processing and resetting difficulty |
Non-Patent Citations (3)
| Title |
|---|
| 张佳欣: "离轴三反系统非面检验与系统装调", 《中国优秀硕士学位论文全文数据库 工程科技Ⅱ辑》 * |
| 张学敏 等: "一种实现离轴非球面反射镜离轴量和离轴角精确测量的方法", 《中国激光》 * |
| 李俊峰 等: "离轴非球面零位补偿检验的三坐标装调技术", 《电子测量与仪器学报》 * |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105116515A (en) * | 2015-07-30 | 2015-12-02 | 北京理工大学 | Off-axis tri-reflector zooming optical system adjusting method |
| CN106568578A (en) * | 2016-10-12 | 2017-04-19 | 中国电子科技集团公司第五十研究所 | Aligning detector of off-axis reflection type terahertz imaging system and aligning method thereof |
| CN106568578B (en) * | 2016-10-12 | 2019-01-25 | 中国电子科技集团公司第五十研究所 | A kind of the adjustment detector and its Method of Adjustment of off-axis reflection terahertz imaging system |
| CN106526884A (en) * | 2016-11-28 | 2017-03-22 | 中国科学院长春光学精密机械与物理研究所 | Alignment system and adjusting method for large-calibre space optical camera lens |
| CN106526884B (en) * | 2016-11-28 | 2018-11-09 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber space optical camera lens assembling & adjusting system and Method of Adjustment |
| CN106405860A (en) * | 2016-12-08 | 2017-02-15 | 中国科学院长春光学精密机械与物理研究所 | Method for installing and adjusting refraction and reflection type infrared imaging optical system |
| CN106405860B (en) * | 2016-12-08 | 2019-03-12 | 中国科学院长春光学精密机械与物理研究所 | Method of Adjustment based on refraction-reflection type infrared imaging optical system |
| CN110737082A (en) * | 2019-10-09 | 2020-01-31 | 电子科技大学 | terahertz wave long-distance quasi-optical transmission system |
| CN111175989A (en) * | 2020-01-14 | 2020-05-19 | 湖北航天技术研究院总体设计所 | Method and system for adjusting reference of main mirror and three mirrors of off-axis three-mirror system |
| KR102287242B1 (en) * | 2020-02-05 | 2021-08-10 | 한국표준과학연구원 | Optical having Mirror united with Body and Manufacturing Method thereof |
| CN111552054A (en) * | 2020-06-09 | 2020-08-18 | 河南平原光电有限公司 | Overall design and adjustment method of off-axis three-mirror optical system |
| CN111552054B (en) * | 2020-06-09 | 2021-12-28 | 河南平原光电有限公司 | Off-axis three-mirror optical system assembling and adjusting method |
| CN111879238A (en) * | 2020-07-31 | 2020-11-03 | 北京环境特性研究所 | Device and method for rapidly adjusting size of terahertz time-domain spectroscopy measurement quiet zone |
| CN111879238B (en) * | 2020-07-31 | 2022-01-28 | 北京环境特性研究所 | Device and method for rapidly adjusting size of terahertz time-domain spectroscopy measurement quiet zone |
| CN112051233A (en) * | 2020-08-13 | 2020-12-08 | 中国科学院国家空间科学中心 | Small off-axis three-counter ionosphere imager frame structure |
| CN112051233B (en) * | 2020-08-13 | 2021-06-01 | 中国科学院国家空间科学中心 | Small off-axis three-counter ionosphere imager frame device |
| CN113031296A (en) * | 2021-03-24 | 2021-06-25 | 长春长光智欧科技有限公司 | Method for assembling and adjusting metal-based free-form surface three-reflection optical system capable of being assembled and adjusted quickly |
| CN113031296B (en) * | 2021-03-24 | 2022-08-19 | 长春长光智欧科技有限公司 | Method for assembling and adjusting metal-based free-form surface three-reflection optical system capable of being assembled and adjusted quickly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104391366B (en) | 2016-12-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104391366A (en) | Terahertz-band off-axis three-reflector system and debugging method thereof | |
| CN109141223B (en) | PSD-based laser interferometer light path efficient and accurate calibration method | |
| Muralikrishnan et al. | Laser trackers for large-scale dimensional metrology: A review | |
| CN104406541B (en) | Precise assembling and adjusting device and method for detector chip of imaging system | |
| Burge et al. | Use of a commercial laser tracker for optical alignment | |
| CN109341546B (en) | Light beam calibration method of point laser displacement sensor at any installation pose | |
| CN102980542B (en) | Multiple-sensor united calibration method | |
| JP2008051696A (en) | Optical axis deviation type laser interferometer, its calibration method, correction method, and measuring method | |
| EP2369319A2 (en) | Aspheric object measuring method and apparatus | |
| CN112304568B (en) | Laser galvanometer calibration system based on photosensitive sensor and calibration method thereof | |
| CN112596259B (en) | High-precision off-axis aspheric reflector optical axis leading-out method and system | |
| CN107091608B (en) | A kind of five degree of freedom measurement method of parameters based on primary standard of curved surface part | |
| Saadat et al. | Measurement systems for large aerospace components | |
| Muelaner et al. | Large scale metrology in aerospace assembly | |
| CN113091653B (en) | Device and method for measuring angle freedom degree error of linear guide rail based on pentaprism | |
| Jia et al. | Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools | |
| CN103134443B (en) | A kind of large-caliber large-caliber-thicknreflector reflector surface shape auto-collimation detection device and method | |
| CN105674934B (en) | A kind of assay method for being used for the catadioptric system optical interval containing hollow primary mirror | |
| US20230194247A1 (en) | Shape measuring apparatus and shape measuring method | |
| CN103175481B (en) | The measuring method of a kind of off-axis optics aspherical mirror vertex radius and device | |
| Zheng et al. | Effect of detector installation error on the measurement accuracy of multi-degree-of-freedom geometric errors of a linear axis | |
| KR20110065365A (en) | Method and apparatus for measuring aspherical body | |
| CN107817088B (en) | Off-axis parabolic mirror optical axis direction calibration method and system | |
| JP2002333305A (en) | Interference measuring apparatus and lateral coordinate measuring method | |
| JP2002206915A (en) | Abscissa calibration method for facial shape measuring device and facial shape measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161207 Termination date: 20191125 |