CN209198786U - A device for adjusting verticality of bi-telecentric lens - Google Patents

Abstract

A kind of adjustment device of doubly telecentric camera lens verticality, the adjustment device includes source of parallel light, the first spectroscope, the 4th spectroscope, the first mirror assembly, the second mirror assembly and the second spectroscope being sequentially arranged along main shaft optical path, third spectroscope, object lens and camera, and camera is located in the focus of object lens；First spectroscope, the second spectroscope and the 4th spectroscope are sequentially arranged along the input path of source of parallel light, and input path is vertical with main shaft optical path；First mirror assembly is located on first spectroscopical light splitting optical path, light through the first spectroscope dichroic reflection is reflexed to third spectroscope by the first mirror assembly, and the light reflected through the first mirror assembly is reflexed to object lens along the direction for being parallel to main shaft optical path by third spectroscope；Second mirror assembly is located on the 4th spectroscopical light splitting optical path.Whether the utility model is convenient for the optical axis of confirmation doubly telecentric camera lens perpendicular to article carrying platform.

Description

A device for adjusting verticality of bi-telecentric lens

technical field

The utility model relates to the technical field of visual detection and image measurement, in particular to an adjustment device for the verticality of a bi-telecentric lens.

Background technique

Telecentric lens is mainly designed to correct the parallax of traditional industrial lenses. It can make the magnification of the obtained image not change within a certain range of object distance, which is very important when the measured object is not on the same object surface. Applications, widely used in various visual image detection equipment.

When using a bi-telecentric lens for detection, in order to ensure measurement accuracy, a known geometric relationship must be strictly satisfied between the lens and the stage. Most of this geometric relationship requires that the optical axis of the bi-telecentric lens is perpendicular to the loading platform.

In the prior art, the way to ensure that the optical axis of the bi-telecentric lens is perpendicular to the loading platform is to rely on mechanical positioning. The loading platform is vertically installed on the lifting mechanism, and the bi-telecentric lens is installed vertically downward on the lens support frame. However, this mechanical positioning method has no way to determine whether the optical axis of the bi-telecentric lens is perpendicular to the loading platform.

Utility model content

The utility model provides a device for adjusting the verticality of a bi-telecentric lens, which is convenient for confirming whether the optical axis of the bi-telecentric lens is perpendicular to the loading platform.

According to the first aspect of the utility model, the utility model provides an adjustment device for the verticality of a bi-telecentric lens, including a parallel light source, a first beam splitter, a fourth beam splitter, a first mirror assembly, and a second mirror assembly And the second beamsplitter, the third beamsplitter, the objective lens and the camera that are arranged in sequence along the main shaft optical path, the camera is located on the focus of the objective lens; the first beamsplitter, the second beamsplitter and the fourth beamsplitter are arranged along the parallel light The incident optical path is arranged in sequence, and the incident optical path is perpendicular to the main axis optical path; the first reflector assembly is located on the split optical path of the first beam splitter, and the first reflector assembly is used to split and reflect light through the first beam splitter The light from the beam is reflected to the third beam splitter, and the third beam splitter is used to reflect the light reflected by the first mirror assembly to the objective lens in a direction parallel to the optical path of the main axis; the second mirror assembly is located on the beam splitting optical path of the fourth beam splitter , the second mirror assembly is used to reflect the light reflected by the fourth beam splitter to the fourth beam splitter, and the fourth beam splitter is used to reflect the light reflected by the second mirror assembly to the second beam splitter, and the second beam splitter The mirror is used to reflect the light reflected by the fourth beam splitter through the third reflector and shoot toward the objective lens in a direction parallel to the optical path of the main axis.

Preferably, the first beam splitter, the second beam splitter, the third beam splitter and the fourth beam splitter are all cube beam splitters.

Preferably, the first mirror assembly is a pentaprism, a rectangular prism or a plane mirror.

Preferably, the second mirror assembly is a corner cube or a plane mirror.

Preferably, the parallel light source includes a point light source, a cross reticle and a collimating objective lens arranged in sequence along the incident light path, and the cross reticle is placed close to the point light source and at the focus of the collimating objective lens.

Preferably, the parallel light source includes a point laser and an attenuation sheet arranged in sequence along the incident light path.

According to the second aspect of the utility model, the utility model provides an adjustment device for the verticality of a bi-telecentric lens, which includes a parallel light source, a first beam splitter, a first reflector assembly, and reflective surfaces arranged in sequence along the main axis optical path, The second beamsplitter, the third beamsplitter, the objective lens and the camera, the camera is positioned at the focal point of the objective lens; the first beamsplitter and the second beamsplitter are arranged in sequence along the incident light path of the parallel light source, and the incident light path and the set The optical path of the main axis is vertical; the first mirror assembly is located on the splitting optical path of the first beam splitter, and the first mirror assembly is used to reflect the light reflected by the first beam splitter to the third beam splitter, and the third beam splitter It is used to reflect the light reflected by the first reflector assembly to the objective lens in a direction parallel to the optical path of the main axis; the reflective surface is located on the split optical path of the second beam splitter, and the reflective surface is used to reflect the light reflected by the second beam splitter to the second beam splitter, and the light reflected by the reflective surface sequentially passes through the second beam splitter and the third beam splitter along the direction parallel to the optical path of the main axis and is directed to the objective lens.

Preferably, the first beam splitter, the second beam splitter and the third beam splitter are all cube beam splitters.

Preferably, the side of the second beam splitter located on its splitting light path is coated with a reflective film, and the reflective film is the reflective surface; or, the reflective surface is a plane reflective mirror; or, the reflective surface is corner cube prism.

The verticality adjustment device of the bi-telecentric lens of the utility model can be used to adjust the optical axis of the bi-telecentric lens to be perpendicular to the loading platform. Based on the principle of optical self-collimation, the bi-telecentricity can be judged by observing the imaging in the camera. It is more intuitive and simple to judge whether the optical axis of the lens is perpendicular to the loading platform.

Based on the adjustment device for the verticality of the bi-telecentric lens of the utility model, the adjustment device for the verticality of the bi-telecentric lens is self-calibrated to reduce the influence of air disturbance, and then the loading platform and the bi-telecentric lens are adjusted separately , until the adjustment is complete. This adjustment method can greatly improve the accuracy of adjustment.

Description of drawings

Fig. 1 is a schematic diagram of optical path characteristics of a bi-telecentric lens of an embodiment;

Fig. 2 is a schematic diagram of the optical self-collimation principle of an embodiment;

Fig. 3 is the structural representation of the adjustment device of the verticality of the bi-telecentric lens of an embodiment of the present invention;

4 is a schematic diagram of the self-calibration optical path of the adjustment device for the verticality of the bi-telecentric lens according to an embodiment of the present invention;

Fig. 5 is a structural schematic diagram of an adjustment device for verticality of a bi-telecentric lens according to an embodiment of the present invention;

Fig. 6 is a structural schematic diagram of a device for adjusting verticality of a bi-telecentric lens according to another embodiment of the present invention;

7 is a schematic diagram of the self-calibration optical path of the adjustment device for the verticality of the bi-telecentric lens according to another embodiment of the present invention;

Fig. 8 is a schematic diagram of an optical path for adjusting an object loading platform according to an embodiment of the present invention;

FIG. 9 is a schematic diagram of an optical path for adjusting a bi-telecentric lens according to an embodiment of the present invention.

Detailed ways

The "equal" or "identical" referred to in the present invention refers to the equality or the same in the case of considering the reasonable error, rather than the equality or the same in the absolute sense. The light irradiation angle, reflection angle or refraction angle determined by the utility model all need to take into account the loss of light in the medium and the existence of certain reasonable errors, rather than angles in an absolute sense. The utility model will be described in further detail below through specific embodiments in conjunction with the accompanying drawings.

Figure 1 is a schematic diagram of the optical characteristics of a bi-telecentric lens. Among the rays entering the bi-telecentric lens, if and only if the propagation direction of the light parallel to the optical axis remains unchanged, that is, it enters parallel to the optical axis and exits parallel to the optical axis. .

Figure 2 is a schematic diagram of the principle of optical self-collimation. When the light passes through the reticle located at the focal plane of the objective lens, it forms parallel light through the objective lens. The parallel light is reflected back by the mirror perpendicular to the optical axis, and then passes through the objective lens to form a reticle reticle image on the focal plane to coincide with the reticle. When the mirror is tilted by a small angle α, the reflected beam is tilted by 2α. Therefore, in this way, it can be judged whether the lens is perpendicular or parallel to a certain plane.

The embodiment of the utility model provides a device for adjusting the verticality of a bi-telecentric lens, as shown in Figure 3 and Figure 4, comprising a parallel light source 1, a first beam splitter 2, a fourth beam splitter 7, and a first reflector assembly 3 , the second mirror assembly 8 and the second beam splitter 6 , the third beam splitter 4 , the objective lens 5 and the camera 9 arranged in sequence along the main axis optical path 200 . The parallel light source 1 is used to generate parallel light, which can be a single light source or a light source assembly composed of a light source and a lens. The main shaft optical path 200 is a light path that is located on the central axis of the objective lens 5 and propagates axially. The second beam splitter 6, the third beam splitter 4, the objective lens 5 and the camera 9 are all coaxially arranged along the main shaft optical path 200. The objective lens 5 can collect the light rays. , the camera 9 is located at the focal point of the objective lens 5, so as to photograph the light spots formed by the convergence.

The first beamsplitter 2, the second beamsplitter 6 and the fourth beamsplitter 7 are sequentially arranged along the incident light path 100 of the parallel light source 1, and the incident light path 100 is an optical path formed by the straight line propagation of parallel light emitted by the parallel light source 1, parallel The light beam will pass through the first beam splitter 2, the second beam splitter 6 and the fourth beam splitter 7 in sequence without refraction. Wherein, the incident light path 100 is perpendicular to the main axis light path 200 .

The first beamsplitter 2, the second beamsplitter 6, the third beamsplitter 4 and the fourth beamsplitter 7 all have a beamsplitting surface. After the light is irradiated to the beamsplitter, a part of the light will directly pass through the beamsplitter, and another part of the light will pass through the beamsplitter. Reflection occurs on the splitting surface to form a splitting light path.

The first reflector assembly 3 is located on the splitting light path of the first beam splitter 2, the parallel light source 1 emits parallel light to the first beam splitter 2, and the first beam splitter 2 splits and reflects a part of the light to the first reflector assembly 3, the second beam splitter A mirror assembly 3 reflects the light reflected by the first beam splitter 2 to the third beam splitter 4, and the third beam splitter 4 reflects the light reflected by the first mirror assembly 2 along a direction parallel to the main axis optical path 200 to The entire optical path of the objective lens 5 forms the first calibration optical path, which will form the first light spot on the imaging of the camera 9 . Among them, the beam splitting angle of the first beam splitter 2, the reflection angle of the first reflector assembly 3 and the beam splitting angle of the third beam splitter 4 need to be satisfied through reasonable configuration: the light beam finally passed through the third beam splitter 4 splits and reflects along the direction parallel to the main axis The direction of the optical path 200 is toward the objective lens 5. Under this condition, the beam splitting angle of the first beam splitter 2, the reflection angle of the first mirror assembly 3 and the beam splitting angle of the third beam splitter 4 can be set as required.

The second reflector assembly 8 is located on the beam splitting light path of the fourth beam splitter 7, the parallel light emitted by the parallel light source 1 directly passes through the second beam splitter 6 and is directed to the fourth beam splitter 7, and the fourth beam splitter 7 splits a part of light Sent to the second mirror assembly 8, the second mirror assembly 8 reflects the light reflected by the fourth beam splitter 7 to the fourth beam splitter 7, and the fourth beam splitter 7 is used to reflect the second mirror assembly 8 The light is reflected to the second beam splitter 6, and the second beam splitter is used to reflect the light reflected by the fourth beam splitter 7 and pass through the third mirror 4, and the light passing through the third mirror 4 is along the optical path 200 parallel to the main axis. direction to the objective lens 5. This entire optical path forms a second calibration optical path, which will form a second light spot on the imaging of the camera 9 . Wherein, the beam splitting angle of the second beam splitter 6, the reflection angle of the second reflector assembly 8 and the beam splitting angle of the fourth beam splitter 7 need to be satisfied through rational configuration: the light beam finally passed through the second beam splitter 6 splits and reflects along the direction parallel to the main axis The direction of the optical path 200 is directed toward the objective lens 5. Under this condition, the beam splitting angle of the second beam splitter 6, the reflection angle of the second mirror assembly 8 and the fourth beam splitter 7 can be set as required.

It can be seen from the principle of optical self-collimation that when the light rays of the first optical path and the second optical path finally incident on the objective lens 5 are parallel to the main axis optical path 200, the first light spot and the second light spot on the camera 9 must overlap. Based on this, the verticality of the bi-telecentric lens can be judged.

In one embodiment, the first beamsplitter 2, the second beamsplitter 6, the third beamsplitter 4, and the fourth beamsplitter 7 are all cube beamsplitting prisms with an angle of 45 degrees, that is, the incidence of light on the beamsplitting surface At an angle of 45 degrees, the rays entering the beamsplitter are perpendicular to the rays exiting the beamsplitter. In order to enhance the transmission of light, anti-reflection coatings can be coated on the right-angle surfaces of the above-mentioned beam splitters. The glued surface of the first beam splitter 2 and the second beam splitter 6 is coated with a semi-transparent and semi-reflective film, and the glued surface of the third beam-splitter 4 and the fourth beam-splitter 7 is coated with a semi-transparent and semi-reflective film or a PBS film. The rays entering the first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the fourth beam splitter 7 should be perpendicular to the corresponding first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the surface of the fourth beam splitter 7, and the included angle between the beam splitting surfaces of the first beam splitter 2, the second beam splitter 6, the third beam splitter 4 and the fourth beam splitter 7 and the corresponding incident light is 45 degrees.

In one embodiment, the first mirror assembly 3 is a pentaprism, a rectangular prism or a plane mirror. When it is a pentaprism, the light enters from one of the vertical surfaces and exits from the other vertical surface, which can deflect the light by 90 degrees. When it is a right-angle prism, the light enters from one of the vertical surfaces, exits from the other vertical surface, and is reflected on the inclined surface, which can also deflect the light by 90 degrees and exit. When it is a plane reflector, the plane reflector can form an angle of 45 degrees with the light incident on it, and can also deflect the light by 90 degrees to exit.

In one embodiment, the second mirror assembly 8 is a corner cube or a plane mirror. When it is a corner cube prism, the light is reflected twice on the corner cube surface, and finally exits parallel to the incident direction. When it is a plane radiation mirror, the plane radiation mirror can be perpendicular to the incident light, so that the reflected light is emitted parallel to the incident direction.

In one embodiment, as shown in FIG. 3 , the parallel light source 1 includes a point laser 101 and an attenuation sheet 102 sequentially arranged along an incident light path 100 . The point laser 101 emits laser light, and the laser light forms a parallel beam. The attenuation sheet 102 is used to attenuate the light intensity of the laser light and protect the lens on the subsequent optical path. The attenuation sheet 102 is used to attenuate the laser light, and a low-power point laser can be selected to reduce the light intensity of the point laser light emitted by it, so that the use of the attenuation sheet 102 can be omitted, which belongs to the conventional technical means of those skilled in the art. Not too much description.

In one embodiment, as shown in FIG. 5 , the parallel light source 1 includes a point light source 103, a cross reticle 105 and a collimating objective lens 104 arranged sequentially along the incident light path 100, and the cross reticle 105 is close to The point light source 103 is placed and located at the focus of the collimating objective lens 104 . The point light source 103 emits light radially, and the light collimated by the collimating objective lens 104 will form parallel light. Since parallel light sources are common light sources in this field, those skilled in the art may also choose parallel light sources with other structures according to actual needs.

The utility model embodiment also provides a kind of adjustment device of the perpendicularity of bi-telecentric lens, as shown in Fig. 6 and Fig. 7, comprise parallel light source 1, the first beam splitter 2, the first reflection mirror assembly 3 and along the main shaft light path Secondary reflective surface, second beam splitter 6, third beam splitter 4, objective lens 5 and camera 9. The parallel light source 1 is used to generate parallel light, which can be a single light source or a light source assembly composed of a light source and a lens. The main shaft optical path is the light path that is positioned on the central axis of the objective lens 5 and propagates along the axial direction. Converging, the camera 9 is located at the focal point of the objective lens 5, so as to photograph the light spots formed by converging.

The first beamsplitter 2 and the second beamsplitter 6 are sequentially arranged along the incident light path of the parallel light source 1, the incident light path is the light path formed by the straight line propagation of the parallel light emitted by the parallel light source 1, and the parallel light will pass through the first light beam in turn. The mirror 2 and the second beam splitter 6 do not produce refraction. Wherein, the incident light path is perpendicular to the main axis light path.

The first reflector assembly 3 is located on the beam-splitting optical path of the first beamsplitter 2, the parallel light source 1 emits parallel light to the first beamsplitter 2, and the first beamsplitter 2 splits and reflects a part of light to the first reflector assembly 3, The first mirror assembly 3 reflects the light reflected by the first beam splitter 2 to the third beam splitter 4, and the third beam splitter 4 reflects the light reflected by the first mirror assembly 2 along a direction parallel to the main axis optical path. The entire optical path of the objective lens 5 forms the first calibration optical path, which will form the first light spot on the imaging of the camera 9 . Among them, the beam splitting angle of the first beam splitter 2, the reflection angle of the first reflector assembly 3 and the beam splitting angle of the third beam splitter 4 need to be satisfied through reasonable configuration: the light beam finally passed through the third beam splitter 4 splits and reflects along the direction parallel to the main axis The direction of the optical path 200 is toward the objective lens 5. Under this condition, the beam splitting angle of the first beam splitter 2, the reflection angle of the first mirror assembly 3 and the beam splitting angle of the third beam splitter 4 can be set as required.

The reflective surface is located on the splitting light path of the second beam splitter 6, the parallel light emitted by the parallel light source 1 directly passes through the first beam splitter 2 and is directed to the second beam splitter 6, a part of the light will pass through the second beam splitter 6, and the other A part of the light is split and reflected by the first beam splitter 2, and the reflection surface is used to reflect the light split and reflected by the second beam splitter 6 to the second beam splitter 6, and the light reflected by the reflection surface is sequentially along the direction parallel to the main axis optical path Pass through the second beam splitter 6 and the third beam splitter 4 and enter the objective lens 5. This entire optical path forms a second calibration optical path, which will form a second light spot on the imaging of the camera 9 . Wherein, the beam splitting angle of the second beam splitter 6 and the reflection angle of the reflective surface need to be satisfied through reasonable configuration: finally, the light reflected by the reflective surface is directed toward the objective lens 5 along a direction parallel to the main axis optical path. Under this condition, the second beam splitter The beam splitting angle of 6 and the reflection angle of the reflective surface can be set as required.

It can be seen from the principle of optical self-collimation that when the light rays of the first optical path and the second optical path finally incident on the objective lens 5 are parallel to the main axis optical path, the first light spot and the second light spot on the imaging of the camera 9 must coincide. Based on this, the verticality of the bi-telecentric lens can be judged.

In one embodiment, the first beamsplitter 2, the second beamsplitter 6 and the third beamsplitter 4 are cube beamsplitting prisms with an angle of 45 degrees, that is, when the incident angle of light on the beam splitting surface is 45 degrees, The rays entering the beamsplitter are perpendicular to the rays exiting the beamsplitter. In order to enhance the transmission of light, anti-reflection coatings can be coated on the right-angle surfaces of the above-mentioned beam splitters. The glued surface of the first beam splitter 2 and the second beam splitter 6 is coated with a semi-transparent and semi-reflective film, and the glued surface of the third beam-splitter 4 is coated with a semi-transparent and semi-reflective film or a PBS film. The rays incident on the first beam splitter 2, the second beam splitter 6 and the third beam splitter 4 should be perpendicular to the surfaces of the corresponding first beam splitter 2, the second beam splitter 6 and the third beam splitter 4, and the first The included angle between the beam splitting surfaces of the beam splitter 2 , the second beam splitter 6 and the third beam splitter 4 and the corresponding incident light is 45 degrees.

Further, as shown in FIGS. 6 and 7 , one of the surfaces of the second beam splitter 6 is coated with a reflective film, and the reflective film is located on the side of its beam splitting light path. Since the reflective film is coated, light cannot be emitted, and the split light is reflected by the reflective film, thereby penetrating the second beam splitter 6, and the reflective film forms the reflective surface.

In another embodiment, the reflective surface is a reflective mirror independent of the second beam splitter 6 , which specifically may be a plane reflective mirror, a corner cube prism or other reflective mirrors.

In one embodiment, the first mirror assembly 3 is a pentaprism, a rectangular prism or a plane mirror. When it is a pentaprism, the light enters from one of the vertical surfaces and exits from the other vertical surface, which can deflect the light by 90 degrees. When it is a right-angle prism, the light enters from one of the vertical surfaces, exits from the other vertical surface, and is reflected on the inclined surface, which can also deflect the light by 90 degrees and exit. When it is a plane reflector, the plane reflector can form an angle of 45 degrees with the light incident on it, and can also deflect the light by 90 degrees to exit.

In one embodiment, as shown in FIG. 3 , the parallel light source 1 includes a point laser 101 and an attenuation sheet 102 sequentially arranged along an incident light path 100 . The point laser 101 emits laser light, and the laser light forms a parallel beam. The attenuation sheet 102 is used to attenuate the light intensity of the laser light and protect the lens on the subsequent optical path. The attenuation sheet 102 is used to attenuate the laser light, and a low-power point laser can be selected to reduce the light intensity of the point laser light emitted by it, so that the use of the attenuation sheet 102 can be omitted, which belongs to the conventional technical means of those skilled in the art. Not too much description.

In one embodiment, as shown in FIG. 5 , the parallel light source 1 includes a point light source 103, a cross reticle 105 and a collimating objective lens 104 arranged sequentially along the incident light path 100, and the cross reticle 105 is close to The point light source 103 is placed and located at the focus of the collimating objective lens 104 . The point light source 103 emits light radially, and the light collimated by the collimating objective lens 104 will form parallel light. Since parallel light sources are common light sources in this field, those skilled in the art may also choose parallel light sources with other structures according to actual needs.

The embodiment of the utility model also provides a method for adjusting the verticality of the bi-telecentric lens, which includes the following steps:

(1) Use the adjustment device for the verticality of the bi-telecentric lens in any of the above-mentioned embodiments to make the parallel light source emit parallel light to the first beam splitter. At this time, observe the imaging in the camera. When there are two non-overlapping When the light spot is detected, it means that the entire adjustment device is not adjusted properly, and the adjustment device needs to be adjusted. The adjustment objects are the parallel light source 1, the first beam splitter 2, the fourth beam splitter 7, the first mirror assembly 3, and the second mirror assembly. 8. Any one or more of the second beam splitter 6 , the third beam splitter 4 , the objective lens 5 and the camera 9 , the angle and distance will be adjusted specifically. During the adjustment process, the imaging in the camera 9 is continuously observed until the two light spots in the imaging coincide, and the self-calibration of the adjustment device is completed. Self-calibration of the adjustment device first can reduce the influence of air disturbance and improve the accuracy of subsequent adjustments.

(2) After completing the self-calibration of the adjustment device, as shown in Figure 8, the loading platform 10 is arranged on the incident light path of the adjustment device that has completed the self-calibration, so that the parallel light passing through the adjustment device is irradiated onto the loading platform 10 on. The object-carrying platform 10 will reflect the transmitted light, and make the light go to the second beam splitter 6 , and the second beam-splitter 6 will reflect the light reflected by the object-carrying platform 10 to the objective lens 5 . Observe the imaging in the camera. When there are two non-overlapping spots in the imaging, it means that the object-carrying platform 10 is not perpendicular to the incident light path. At this time, adjust the angle of the object-carrying platform 10 and continue to observe the imaging in the camera until the imaging The two light spots in the center coincide to complete the calibration of the loading platform. At this time, the object loading platform 10 is perpendicular to the incident light path.

(3) After the adjustment of the loading platform 10 is completed, as shown in FIG. Through the adjustment device and the bi-telecentric lens 11, and irradiate onto the loading platform 10. The object-carrying platform 10 will reflect the transmitted light, so that the light passes through the bi-telecentric lens 11 and shoots to the second beam splitter 6, and the second beam splitter 6 reflects the light reflected by the object-carrying platform 10 to the objective lens 5. Observe the imaging in the camera. When there are two non-overlapping spots in the imaging, it means that the optical axis of the bi-telecentric lens 11 is not perpendicular to the loading platform 10. Adjust the angle of the bi-telecentric lens 11 and/or The distance of the loading platform 10 is continuously observed by the camera until the two spots in the imaging coincide, and the adjustment of the verticality of the bi-telecentric lens 11 is completed. At this time, the optical axis of the bi-telecentric lens 11 is perpendicular to the loading platform 10.

The above content is a further detailed description of the utility model in conjunction with specific implementation methods, and it cannot be determined that the specific implementation of the utility model is only limited to these descriptions. For those of ordinary skill in the technical field to which the utility model belongs, some simple deduction or replacement can also be made without departing from the concept of the utility model.

Claims (9)

1. A device for adjusting the verticality of a double telecentric lens, characterized in that: Comprising a parallel light source, a first beamsplitter, a fourth beamsplitter, a first reflector assembly, a second reflector assembly, and a second beamsplitter, a third beamsplitter, an objective lens and a camera arranged in sequence along the main axis optical path, the camera Located on the focal point of the objective lens; the first beamsplitter, the second beamsplitter and the fourth beamsplitter are arranged sequentially along the incident light path of the parallel light source, and the incident light path is perpendicular to the main shaft light path; the first reflector assembly Located on the splitting optical path of the first beam splitter, the first mirror assembly is used to reflect the light reflected by the first beam splitter to the third beam splitter, and the third beam splitter is used to reflect the light reflected by the first mirror assembly Reflected to the objective lens in a direction parallel to the main axis optical path; the second reflector assembly is located on the light path of the fourth beam splitter, and the second reflector assembly is used to reflect the light reflected by the fourth beam splitter to the fourth beam splitter, The fourth beam splitter is used to reflect the light reflected by the second mirror assembly to the second beam splitter, and the second beam splitter is used to reflect the light reflected by the fourth beam splitter through the third mirror and along the direction parallel to the main axis optical path. direction toward the objective lens. 2. The adjusting device according to claim 1, characterized in that: The first beam splitter, the second beam splitter, the third beam splitter and the fourth beam splitter are all cube beam splitters. 3. The adjusting device according to claim 1, characterized in that: The first mirror assembly is a pentaprism, a rectangular prism or a plane mirror. 4. The adjusting device according to claim 1, characterized in that: The second mirror assembly is a corner cube or a plane mirror. 5. The adjusting device according to claim 1, characterized in that: Preferably, the parallel light source includes a point light source, a cross reticle and a collimating objective lens arranged in sequence along the incident light path, and the cross reticle is placed close to the point light source and at the focus of the collimating objective lens. 6. The adjusting device according to claim 1, characterized in that: The parallel light source includes a point laser and an attenuation sheet sequentially arranged along the incident light path. 7. A device for adjusting the verticality of a bi-telecentric lens, characterized in that: It includes a parallel light source, a first beam splitter, a first reflector assembly, and a reflective surface arranged in sequence along the optical path of the main axis, a second beam splitter, a third beam splitter, an objective lens and a camera, and the camera is located at the focal point of the objective lens; The first beamsplitter and the second beamsplitter are sequentially arranged along the incident light path of the parallel light source, and the incident light path is perpendicular to the main shaft light path; The mirror assembly is used to reflect the light reflected by the first beam splitter to the third beam splitter, and the third beam splitter is used to reflect the light reflected by the first mirror assembly to the objective lens in a direction parallel to the optical path of the main axis; the reflective surface Located on the light path of the second beam splitter, the reflective surface is used to reflect the light reflected by the second beam splitter to the second beam splitter, and the light reflected by the reflective surface passes through the second light beam sequentially along the direction parallel to the main axis optical path mirror and the third beam splitter and shoot to the objective lens. 8. The adjusting device according to claim 7, characterized in that: The first beam splitter, the second beam splitter and the third beam splitter are all cube beam splitters. 9. The adjusting device according to claim 8, characterized in that: The side of the second beamsplitter located on its splitting optical path is coated with a reflective film, and the reflective film is the reflective surface; or, the reflective surface is a plane reflector; or, the reflective surface is a corner cube .