CN113834633A - Method for assembling and adjusting transmission type near-infrared beam expanding system - Google Patents
Method for assembling and adjusting transmission type near-infrared beam expanding system Download PDFInfo
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- CN113834633A CN113834633A CN202110907068.8A CN202110907068A CN113834633A CN 113834633 A CN113834633 A CN 113834633A CN 202110907068 A CN202110907068 A CN 202110907068A CN 113834633 A CN113834633 A CN 113834633A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention discloses a method for assembling and adjusting a transmission type near-infrared beam expanding system, which comprises the following steps: s1: based on the use requirement, the optical design of the beam expanding system is completed under the use wavelength; s2: under the condition of adjusting the wavelength, adding a compensation plate between an eyepiece and an objective lens of the beam expanding system, and obtaining the thickness value of the compensation plate based on the system aberration condition preset in the step S1; s3: the interferometer, the ocular, the compensation flat plate, the objective and the reflector are sequentially fixed on the adjusting device, parallel light emitted by the interferometer sequentially passes through the ocular, the compensation flat plate and the objective and returns according to an original light path after being reflected by the reflector to obtain interference fringes and aberration thereof, and based on the aberration, the profile of the ocular and/or the objective is corrected repeatedly until the interference aberration meets the use requirement in the step S1. In the assembly and adjustment method, the problem of processing and assembly and adjustment caused by the inconsistency of the used wavelength and the assembly and adjustment wavelength of the near-infrared beam expanding system is solved by designing and adding the compensating plate 3.
Description
Technical Field
The invention belongs to the field of beam expanding system installation and adjustment, and particularly relates to an installation and adjustment method of a transmission type near-infrared beam expanding system.
Background
Transmissive beam expander systems are widely used in various optical systems, and some optical systems operate at near infrared (e.g. λ 1064nm), but in general, the beam expander systems are processed and adjusted under a visible light interferometer (e.g. λ 632.8nm or λ 658 nm), and the design and operating wavelength of the beam expander system are inconsistent with the wavelength of the processing and adjusting.
There are two current solutions:
one is that the achromatic design is carried out by taking the wavelength and the modulation wavelength into consideration, the scheme can lead the beam expanding system to be more complex, increase optical elements, reduce the transmittance and enlarge the volume scale;
the other scheme is that firstly, machining and adjusting are carried out at the visible light wavelength, then aberration confirmation is carried out under the condition of using the wavelength collimator, the scheme needs a mechanical part of the beam expanding system to take two states (a machining and adjusting state and a formal using state) into consideration, so that a structural part of the beam expanding system is complex and has higher requirements on machining precision, the state needs to be switched to the formal using state after the assembly and adjustment is finished at the visible light wavelength, an aberration confirmation light path needs to be established for the formal state and the confirmation of the aberration under the wavelength, due to insufficient machining and positioning precision of the mechanical part, fine adjustment needs to be carried out again when the state is switched to the formal state, the scheme enables the mechanical part to be complex, has higher requirements on machining precision, and has more complex assembly and adjustment flow.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a method for assembling and adjusting a transmission type near-infrared beam expanding system.
The purpose of the invention is realized by the following technical scheme:
a method for assembling and adjusting a transmission-type near-infrared beam expanding system comprises the following steps: s1: based on the use requirement, completing the optical design of a beam expanding system under the use wavelength, wherein the beam expanding system at least comprises an ocular lens and an objective lens; s2: under the condition of adjusting the wavelength, adding a compensation plate between an eyepiece and an objective lens of the beam expanding system, and obtaining the thickness value of the compensation plate based on the system aberration condition preset in the step S1; s3: an interferometer, an ocular, a compensation plate, an objective and a reflector are sequentially fixed on the adjusting device, parallel light emitted by the interferometer sequentially passes through the ocular, the compensation plate and the objective, is reflected by the reflector and then returns according to an original light path, returned test light and standard light of the interferometer are interfered to obtain interference fringes and system aberration thereof, and profile correction of the ocular and/or the objective is repeatedly carried out based on the system aberration of the interference fringes until the system aberration of the interference fringes meets the use requirement in the step S1; s4: and finishing the profile correction of the ocular lens and/or the objective lens in the beam expanding system, and removing the compensation plate on the adjusting device to finish the adjustment of the beam expanding system.
According to a preferred embodiment, the usage requirement of step S1 includes the design aberration of the beam expanding system.
According to a preferred embodiment, after the step S1 completes the optical design of the beam expanding system, the thickness, curvature and spacing parameters of the ocular lens and the objective lens are fixed.
According to a preferred embodiment, in step S2, a compensation plate is disposed proximate to the eyepiece.
According to a preferred embodiment, the interferometer is a visible light interferometer.
According to a preferred embodiment, the mirror is a plane mirror.
The main scheme and the further selection schemes can be freely combined to form a plurality of schemes which are all adopted and claimed by the invention; in the invention, the selection (each non-conflict selection) and other selections can be freely combined. The skilled person in the art can understand that there are many combinations, which are all the technical solutions to be protected by the present invention, according to the prior art and the common general knowledge after understanding the scheme of the present invention, and the technical solutions are not exhaustive herein.
The invention has the beneficial effects that: the adjusting method solves the processing and adjusting problems caused by the inconsistency of the used wavelength and the adjusting wavelength of the near-infrared beam expanding system by designing and adding the compensating plate.
Drawings
FIG. 1 is a schematic diagram of a tuning optical path involved in the tuning method of the present invention;
the interferometer comprises an interferometer 1, an eyepiece 2, a compensation plate 3, an objective 4 and a reflector 5.
Detailed Description
The terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, it should be noted that, in the present invention, if the specific structures, connection relationships, position relationships, power source relationships, and the like are not written in particular, the structures, connection relationships, position relationships, power source relationships, and the like related to the present invention can be known by those skilled in the art without creative work on the basis of the prior art.
Example 1:
referring to fig. 1, the invention discloses a method for assembling and adjusting a transmission-type near-infrared beam expanding system, which comprises the following steps:
step S1: based on the use requirement, the optical design of the beam expanding system is completed under the use wavelength, and the beam expanding system at least comprises an ocular lens 2 and an objective lens 4.
Preferably, the usage requirement of the step S1 includes the design aberration of the beam expanding system. For example, the design aberration of a beam expansion system may be 1/4 wavelengths or 1/5 wavelengths for a certain operating condition. The wavelength used may be λ 1064 nm.
Preferably, after the step S1 completes the optical design of the beam expanding system, the thickness, curvature and spacing parameters of the eyepiece 2 and the objective lens 4 are fixed.
Step S2: under the condition of adjusting the wavelength, the compensation plate 3 is added between the eyepiece 2 and the objective lens 4 of the beam expanding system, and the thickness value of the compensation plate 3 is obtained based on the system aberration condition preset in step S1.
The wavelength adjustment in step S2 is the wavelength of the light used in the process of installing and adjusting the beam expansion system. Typically visible wavelengths, and may be, for example, 632.8 nm.
Specifically, the compensation plate 3 is used to compensate the optical path difference caused by the difference between the used wavelength and the modulation wavelength of the beam expansion system, so that the optical path and the system aberration of the beam expansion system are consistent in two states. The thickness value of the compensation plate can be obtained by calculation in optical design software, the beam expanding system design is completed under the use wavelength, the curvature radius and the thickness parameter of the ocular lens and the objective lens and the distance between the ocular lens and the objective lens are solidified, the system wavelength is modified into the modulation wavelength, a parallel plate is added between the ocular lens and the objective lens, the thickness value is set as the unique variable quantity, and iterative optimization is performed finally until the system aberration is consistent with the use wavelength, so that the compensation plate design is completed.
Preferably, in step S2, the compensation plate 3 is disposed close to the eyepiece 2. The arrangement close to the ocular 2 is beneficial to reducing the optical size of the flat plate and reducing the material and the occupied space of the compensation flat plate 3.
Step S3: an interferometer 1, an ocular 2, a compensation plate 3, an objective 4 and a reflector 5 are fixed on the adjusting device in sequence. Parallel light emitted by the interferometer 1 sequentially passes through the ocular lens 2, the compensation flat plate 3 and the objective lens 4, is reflected by the reflector 5 and then returns according to an original optical path, the returned test light and standard light of the interferometer 1 are interfered to obtain interference fringes, and system aberration of the interference fringes is aberration of a beam expanding system. And repeatedly carrying out the profile correction of the eyepiece 2 and/or the objective lens 4 based on the system aberration of the interference fringes until the system aberration of the interference fringes reaches the use requirement in the step S1.
Preferably, the ocular lens 2 and/or the objective lens 4 is subjected to repeated correction of the profile, i.e. repeated reworking of the thickness and curvature of the ocular lens 2 and/or the objective lens 4, so that the aberrations of the beam expanding system meet the design values. In the prior art, the machining precision of the ocular lens 2 and the objective lens 4 cannot be guaranteed to be capable of machining to preset parameters at one time, so that the profile correction needs to be continuously and repeatedly carried out.
Further, the interferometer 1 is a visible light interferometer. The reflector 5 is a plane reflector.
Step S4: and finishing the profile correction of the ocular lens 2 and/or the objective lens 4 in the beam expanding system, and removing the compensation plate 3 from the adjusting device to finish the adjustment of the beam expanding system.
In the assembly and adjustment method, the problem of processing and assembly and adjustment caused by the inconsistency of the used wavelength and the assembly and adjustment wavelength of the near-infrared beam expanding system is solved by designing and adding the compensating plate 3.
The foregoing basic embodiments of the invention and their various further alternatives can be freely combined to form multiple embodiments, all of which are contemplated and claimed herein. In the scheme of the invention, each selection example can be combined with any other basic example and selection example at will. Numerous combinations will be known to those skilled in the art.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (6)
1. A method for assembling and adjusting a transmission-type near-infrared beam expanding system is characterized by comprising the following steps:
s1: based on the use requirement, completing the optical design of a beam expanding system at the use wavelength, wherein the beam expanding system at least comprises an ocular lens (2) and an objective lens (4);
s2: under the condition of adjusting the wavelength, adding a compensation plate (3) between an eyepiece and an objective lens of the beam expanding system, and obtaining the thickness value of the compensation plate (3) based on the system aberration condition preset in the step S1;
s3: an interferometer (1), an ocular (2), a compensation plate (3), an objective (4) and a reflector (5) are sequentially fixed on a debugging device, parallel light emitted by the interferometer (1) sequentially passes through the ocular (2), the compensation plate (3) and the objective (4), returns according to an original light path after being reflected by the reflector (5), interferes with returned test light and standard light of the interferometer to obtain interference fringes and system aberration thereof, and repeatedly corrects the profile of the ocular (2) and/or the objective (4) based on the system aberration of the interference fringes until the system aberration of the interference fringes reaches the use requirement in the step S1;
s4: and finishing the profile correction of the ocular lens (2) and/or the objective lens (4) in the beam expanding system, and removing the compensation plate (3) from the adjusting device to finish the adjustment of the beam expanding system.
2. The system setup method of claim 1, wherein the usage requirement of step S1 includes a design aberration of the beam expanding system.
3. The system setup method according to claim 1 or 2, wherein the thickness, curvature and spacing parameters of the eyepiece (2) and the objective lens (4) are fixed after the step S1 completes the optical design of the beam expanding system.
4. The system adjustment method according to claim 1, wherein in step S2, the compensation plate (3) is disposed close to the eyepiece (2).
5. The system set-up method according to claim 1, characterized in that the interferometer (1) is a visible light interferometer.
6. A method for system adjustment according to claim 1, characterized in that the mirror (5) is a plane mirror.
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| CN202110907068.8A CN113834633A (en) | 2021-08-09 | 2021-08-09 | Method for assembling and adjusting transmission type near-infrared beam expanding system |
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| CN202110907068.8A CN113834633A (en) | 2021-08-09 | 2021-08-09 | Method for assembling and adjusting transmission type near-infrared beam expanding system |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106405860A (en) * | 2016-12-08 | 2017-02-15 | 中国科学院长春光学精密机械与物理研究所 | Method for installing and adjusting refraction and reflection type infrared imaging optical system |
| CN108181092A (en) * | 2018-01-31 | 2018-06-19 | 中国科学院西安光学精密机械研究所 | Intermediate image surface detection device and method for large-caliber reflective optical system |
| CN109374262A (en) * | 2018-11-26 | 2019-02-22 | 中国科学院长春光学精密机械与物理研究所 | Using interferometer to non-achromatic optical system adjustment detection method and system |
| CN109580173A (en) * | 2018-11-26 | 2019-04-05 | 中国科学院长春光学精密机械与物理研究所 | Using interferometer to non-achromatic optical system adjustment detection method and system |
-
2021
- 2021-08-09 CN CN202110907068.8A patent/CN113834633A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106405860A (en) * | 2016-12-08 | 2017-02-15 | 中国科学院长春光学精密机械与物理研究所 | Method for installing and adjusting refraction and reflection type infrared imaging optical system |
| CN108181092A (en) * | 2018-01-31 | 2018-06-19 | 中国科学院西安光学精密机械研究所 | Intermediate image surface detection device and method for large-caliber reflective optical system |
| CN109374262A (en) * | 2018-11-26 | 2019-02-22 | 中国科学院长春光学精密机械与物理研究所 | Using interferometer to non-achromatic optical system adjustment detection method and system |
| CN109580173A (en) * | 2018-11-26 | 2019-04-05 | 中国科学院长春光学精密机械与物理研究所 | Using interferometer to non-achromatic optical system adjustment detection method and system |
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