CN101718534B - Parallelism detector for optical axis of multi-optical system - Google Patents

Parallelism detector for optical axis of multi-optical system Download PDF

Info

Publication number
CN101718534B
CN101718534B CN2009102180671A CN200910218067A CN101718534B CN 101718534 B CN101718534 B CN 101718534B CN 2009102180671 A CN2009102180671 A CN 2009102180671A CN 200910218067 A CN200910218067 A CN 200910218067A CN 101718534 B CN101718534 B CN 101718534B
Authority
CN
China
Prior art keywords
guide rail
mirror
reflecting
optical axis
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009102180671A
Other languages
Chinese (zh)
Other versions
CN101718534A (en
Inventor
叶露
赵强
张馥生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN2009102180671A priority Critical patent/CN101718534B/en
Publication of CN101718534A publication Critical patent/CN101718534A/en
Application granted granted Critical
Publication of CN101718534B publication Critical patent/CN101718534B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The invention relates to a parallelism detector for an optical axis of a multi-optical system. A first half-reflecting semi-permeable mirror of the detector is fixed on a guide rail, and a calibration reflection mirror is movably connected with the guide rail through a two-dimensional adjusting mechanism; a refluxing reflection mirror is movably connected with a guide rail sliding block through the two-dimensional adjusting mechanism, and the guide rail sliding block can move along the guide rail; a crosshair division plate is positioned on a focal surface of a collimating system, and a light source irradiates one side of the crosshair division plate; one path of collimated light beams emitted from the collimating system permeates the first half-reflecting semi-permeable mirror and is then incident upon the calibration reflecting mirror, and the other path of the collimated light beams is incident upon a cone prism after reflected through the first half-reflecting semi-permeable mirror and the refluxing reflection mirror. The invention can be flexibly applied to the parallelism detection of optical axes of various multi-optical systems and has simple processing and manufacturing, low cost, convenient installation and debugging and convenient detection and calibration.

Description

Parallelism detector for optical axis of multi-optical system
Technical field
The invention belongs to optical instrument inspection technology field, relate to a kind of parallelism detector for optical axis of multi-optical system.
Background technology
Along with science and technology development, it is extensive further that multi-sensor photoelectric equipment is used, the various electro-optic theodolites that use of ground not only, and novel airborne optoelectronic device all has infrared, visible light transducer and laser distance measuring system simultaneously simultaneously.Three optical systems are tested same target, and for guaranteeing the consistance of measurement result, the optical axis of three optical systems must be parallel.Because the optical axis spacing difference of three optical systems is bigger, can not test with a bigbore parallel light tube, and laser distance measuring system is active illuminating, be different from infrared and visible optical system.
The Chinese patent communique discloses a kind of " device that adopts thermal target technology that three-axle parallel of large photoelectric monitoring equipment is detected ", and (open day: 2007.7.1 8; Publication number: CN101000235).The half-reflecting half mirror of this device, light damping plate and first plane mirror are fixed on first microscope base; The plane mirror and second plane mirror of band mesopore are fixed on second microscope base; Parabolic lens and hyperbolic mirror are formed colimated light system; Light damping plate is perpendicular to the optical axis of colimated light system, and the optical axis of half-reflecting half mirror and colimated light system is 45.The plane mirror and second plane mirror of half-reflecting half mirror, first plane mirror, band mesopore are parallel to each other; Place the hot target that has the central start hole on the focal plane of colimated light system, one of hot target is sidelong and is put light source.Adjustment is by the optical axis coincidence of the optical axis of test examination instrument laser system and colimated light system; Open light source, one side of the hot target of light source irradiation, the collimated light beam of colimated light system outgoing is by the reflection of half-reflecting half mirror, first catoptron, one tunnel center pit of plane mirror through the band mesopore enters by the test examination instrument infrared optical system, the central start borescopic imaging of hot target is on by the optical axis of test examination instrument infrared optical system, another road is through the reflection of the band center pit plane mirror and second catoptron, enter by test examination instrument visible optical system, the central start borescopic imaging of hot target is on by the image planes of test examination instrument visible optical system; The angle of asterism kine bias from the center, visual field is the collimation error of visible optical systematic optical axis and infrared optical system optical axis.Adjustment is by the optical axis coincidence of the optical axis of test examination instrument laser system and colimated light system, close light source, the colimated light system optical axis is removed in the central start hole of hot target, open by the laser instrument of test examination instrument laser system, laser energy makes hot target produce hot spot, the hot spot picture is after the reflection of the semi-transparent semi-reflecting lens and first catoptron, and the center pit of plane mirror by the band mesopore enters by the test examination instrument infrared optical system, is imaged on the image planes of infrared optical system.The angle of hot spot kine bias from the center, visual field is laser system optical axis and infrared optical system plain shaft parallelism error.
This device is because the plane mirror of semi-transparent semi-reflecting lens, first plane mirror, band mesopore and the second plane reflection mirror angle and position are fixing after debuging, thereby can only be used to specify the optoelectronic device of model as specialized equipment, do not possess versatility and dirigibility.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of highly versatile, adjusts parallelism detector for optical axis of multi-optical system flexibly.
In order to solve the problems of the technologies described above, parallelism detector for optical axis of multi-optical system of the present invention comprises first half-reflecting half mirror, refluxing reflection mirror, light source, colimated light system, crosshair graticule, guide rail, guide rail slide block, calibration catoptron, corner prism; Described first half-reflecting half mirror is fixed on the guide rail, and the calibration catoptron flexibly connects by first two-dimensional adjusting mechanism and guide rail; Refluxing reflection mirror flexibly connects by second two-dimensional adjusting mechanism and guide rail slide block, and the guide rail slide block can move along guide rail; The crosshair graticule is positioned on the focal plane of colimated light system, a side of light source irradiation crosshair graticule; The collimated light beam that colimated light system sends, a Reuter crosses first half-reflecting half mirror and incides the calibration catoptron, and corner prism is incided after through first half-reflecting half mirror, refluxing reflection mirror reflection in another road.
As improvement of the present invention be: place second half-reflecting half mirror between described light source and the crosshair graticule; Microscopical camera lens is positioned on the reflected light path of second half-reflecting half mirror.
During detection, at first according between two tested system optical axis apart from the moving guide rail slide block, the optical axis of one of them optical system is positioned on the transmitted light path of first half-reflecting half mirror, and the optical axis of another optical system is positioned on the reflected light path of refluxing reflection mirror.Light transmission second half-reflecting half mirror illumination crosshair graticule that light source sends.Colimated light system sends collimated light beam, and first collimated light beam that sees through first half-reflecting half mirror incides the calibration catoptron, and the angle by first two-dimensional adjusting mechanism adjustment calibration catoptron makes light beam return by former road, and the picture of crosshair overlaps with the thing of crosshair.Second collimated light beam through first half-reflecting half mirror and refluxing reflection mirror reflection incides corner prism, adjust the angle of refluxing reflection mirror by second two-dimensional adjusting mechanism, make refluxing reflection mirror parallel with first half-reflecting half mirror, the light beam that then enters corner prism returns by former road, and the picture of crosshair overlaps with the thing of crosshair.This moment, first collimated light beam was parallel with second collimated light beam.Calibration catoptron and corner prism are removed, received first collimated light beam and second collimated light beam respectively, can detect the collimation of two tested system optical axis by two tested optical systems.
The present invention can according between two tested system optical axis apart from the moving guide rail slide block, the optical axis of one of them optical system is positioned on the transmitted light path of first half-reflecting half mirror, and the optical axis of another optical system is positioned on the reflected light path of refluxing reflection mirror; And can adjust the angle of calibration catoptron and refluxing reflection mirror by two-dimensional adjusting mechanism, make the collimated light beam of winning parallel, thereby can flexible Application detect highly versatile in the collimation of various optical axis of multi-optical system with second collimated light beam.The employing microscope is observed thing and the picture on the crosshair graticule, can further improve the depth of parallelism between first collimated light beam and second collimated light beam, thereby improve the accuracy of detection of parallelism error between two tested system optical axis.Because the collimation precision of first collimated light beam and second collimated light beam and the precision of guide rail have nothing to do, the accuracy requirement of guide rail is reduced greatly.Processing and manufacturing of the present invention is simple, and cost is low, debugs conveniently, detects and demarcates conveniently.
On the focal plane of colimated light system, place the hot target have the central start hole, promptly can detecting instrument laser system optical axis and the collimation error of infrared optical system optical axis.
The instrument laser system is positioned on the transmitted light path of first half-reflecting half mirror, and the instrument infrared optical system is positioned on the reflected light path of refluxing reflection mirror.Adjustment is by the optical axis coincidence of the optical axis of test examination instrument laser system and colimated light system, calibration catoptron and corner prism are removed, close light source, open by the laser instrument of test examination instrument laser system, laser energy makes hot target produce hot spot, the light that hot spot is sent enters tested instrument infrared optical system after first semi-transparent semi-reflecting lens and refluxing reflection mirror reflection, be imaged on the image planes of infrared optical system.The angle of hot spot kine bias from the center, visual field is laser system optical axis and infrared optical system plain shaft parallelism error.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Fig. 1 is the structural representation of parallelism detector for optical axis of multi-optical system of the present invention.
Embodiment
As shown in Figure 1, parallelism detector for optical axis of multi-optical system of the present invention comprises first half-reflecting half mirror 6, refluxing reflection mirror 11, colimated light system 20, light source 1, crosshair graticule 3, guide rail 12, guide rail slide block 13, calibration catoptron 7, corner prism 9, the second half-reflecting half mirrors 2, microscope 14; First half-reflecting half mirror 6 is fixed on the guide rail 12, and calibration catoptron 7 is fixed on the known two-dimensional adjusting mechanism (first two-dimensional adjusting mechanism), and first two-dimensional adjusting mechanism is fixedlyed connected with guide rail 12; Refluxing reflection mirror 11 is fixed on the known two-dimensional adjusting mechanism (second two-dimensional adjusting mechanism), and second two-dimensional adjusting mechanism is fixedlyed connected with guide rail slide block 13, and guide rail slide block 13 can move along guide rail 12; The parallel light tube that colimated light system 20 can adopt parabolic lens 4 and hyperbolic mirror 5 to form, crosshair graticule 3 is positioned on the focal plane of this parallel light tube, a side of light illumination crosshair graticule.Second half-reflecting half mirror 2 is positioned between the light source 1 and crosshair graticule 3 of colimated light system; The camera lens of microscope 14 is positioned on the reflected light path of second half-reflecting half mirror 2.The collimated light beam that colimated light system 20 sends, one Reuter crosses first half-reflecting half mirror 2 and incides on the calibration catoptron 7, after 7 reflections of calibration catoptron, return by former road, another road is incided on the corner prism 9 after reflecting through first half-reflecting half mirror 6, refluxing reflection mirror 11, returns by former road through corner prism 9 reflections.
Crosshair graticule 3 is positioned on the focal plane of the parallel light tube of being made up of parabolic lens 4 and hyperbolic mirror 5, the light transmission second half-reflecting half mirror 2 illumination crosshair graticules 3 that sent by light source 1.The collimated light beam that colimated light system sends, first collimated light beam 8 that sees through first half-reflecting half mirror 6 is directly incident on the calibration catoptron 7, adjusts calibration catoptron 7, and light beam is returned by former road, the thing of crosshair overlaps with picture, determines registration by viewing microscope 14.Simultaneously, second collimated light beam 10 through first half-reflecting half mirror 6 and refluxing reflection mirror 11 reflections enters corner prism 9, adjust the angle of refluxing reflection mirror 11, light beam is returned by former road, on the focal plane of colimated light system, observe first collimated light beam 8 and second collimated light beam, 10 autocollimatics and return the back imaging, when two pictures overlapped fully, first collimated light beam 8 was parallel with second collimated light beam 10.After adjustment finishes, calibration catoptron 7 and corner prism 9 are removed, receive first collimated light beam 8 by tested photoelectric tracking measuring equipment visible light system 15, tested photoelectric tracking measuring equipment infrared light system 16 receives second collimated light beam 10, can detect the tested photoelectric tracking measuring equipment visible light system and the plain shaft parallelism of infrared light system.The hot target that employing has the central start hole replaces crosshair graticule 3, promptly can detecting instrument laser system optical axis and the collimation error of infrared optical system optical axis.

Claims (2)

1. a parallelism detector for optical axis of multi-optical system comprises first half-reflecting half mirror (6), refluxing reflection mirror (11), light source (1), colimated light system (20); It is characterized in that also comprising crosshair graticule (3), guide rail (12), guide rail slide block (13), calibration catoptron (7), corner prism (9); Described first half-reflecting half mirror (6) is fixed on the guide rail (12), and calibration catoptron (7) flexibly connects by first two-dimensional adjusting mechanism and guide rail (12); Refluxing reflection mirror (11) flexibly connects by second two-dimensional adjusting mechanism and guide rail slide block (13), and guide rail slide block (13) can move along guide rail (12); Crosshair graticule (3) is positioned on the focal plane of colimated light system (20), a side of light source (1) irradiation crosshair graticule (3); The collimated light beam that colimated light system (20) sends, a Reuter crosses first half-reflecting half mirror (6) and incides calibration catoptron (7), and corner prism (9) is incided after through first half-reflecting half mirror (6), refluxing reflection mirror (11) reflection in another road.
2. parallelism detector for optical axis of multi-optical system according to claim 1 is characterized in that placing between described light source (1) and the crosshair graticule (3) second half-reflecting half mirror (2); The camera lens of microscope (14) is positioned on the reflected light path of second half-reflecting half mirror (2).
CN2009102180671A 2009-12-22 2009-12-22 Parallelism detector for optical axis of multi-optical system Expired - Fee Related CN101718534B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009102180671A CN101718534B (en) 2009-12-22 2009-12-22 Parallelism detector for optical axis of multi-optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009102180671A CN101718534B (en) 2009-12-22 2009-12-22 Parallelism detector for optical axis of multi-optical system

Publications (2)

Publication Number Publication Date
CN101718534A CN101718534A (en) 2010-06-02
CN101718534B true CN101718534B (en) 2011-01-19

Family

ID=42433141

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009102180671A Expired - Fee Related CN101718534B (en) 2009-12-22 2009-12-22 Parallelism detector for optical axis of multi-optical system

Country Status (1)

Country Link
CN (1) CN101718534B (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102162724B (en) * 2010-12-30 2012-07-25 中国科学院长春光学精密机械与物理研究所 Deflection angle measurement and dynamic monitoring device of beam expanding system
RU2488076C1 (en) * 2011-12-27 2013-07-20 Открытое акционерное общество "Красногорский завод им. С.А. Зверева" Apparatus for aligning optical axes of multichannel system
CN102589605B (en) * 2012-03-07 2015-05-06 中国电子科技集团公司第十一研究所 Portable type external field equipment for multi-sensor optical axis calibration
CN102620688B (en) * 2012-03-23 2014-03-12 中国科学院西安光学精密机械研究所 Multifunctional optical-axis parallelism rectifying instrument and calibration method thereof
CN102878952B (en) * 2012-09-25 2016-08-03 中国科学院西安光学精密机械研究所 Plain shaft parallelism calibration system and scaling method
CN105092212B (en) * 2015-07-10 2019-06-28 中国科学院西安光学精密机械研究所 Array corner reflector pointing accuracy measuring system and method
CN105424322B (en) * 2015-11-09 2017-12-26 中国科学院长春光学精密机械与物理研究所 Self calibration plain shaft parallelism detector and detection method
CN105487247B (en) * 2015-12-04 2018-02-13 中国航空工业集团公司洛阳电光设备研究所 A kind of optical sensor is turned back part assembling & adjusting system and method
CN105655857A (en) * 2016-03-27 2016-06-08 中国科学院光电研究院 Installation system based on large-face pumping batten laser cylindrical lens
CN108020916A (en) * 2016-11-03 2018-05-11 河南平原光电有限公司 A kind of ray machine adjustment mechanism not lacked of proper care based on roof prism compensation
CN107796337B (en) * 2017-09-14 2020-04-07 西安科佳光电科技有限公司 High-precision reverse double-optical-axis and multi-optical-axis parallelism adjusting method
CN108196377B (en) * 2017-12-14 2020-05-05 中国航空工业集团公司洛阳电光设备研究所 Scanning mechanism light path debugging device and method
CN108828748B (en) * 2018-05-31 2021-06-11 北京航天发射技术研究所 Method and system for adjusting reflector of light path deflection device
CN109186944B (en) * 2018-08-20 2020-02-11 长春理工大学 Airborne multi-optical-axis optical load optical axis consistency calibration method
CN109059807B (en) * 2018-10-29 2021-01-01 北京遥感设备研究所 Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure
CN111323887B (en) * 2020-03-23 2021-03-23 中国科学院长春光学精密机械与物理研究所 Method for assembling and adjusting light path turning reflector of periscopic tracking mechanism
CN112068322B (en) * 2020-09-09 2022-06-17 西安应用光学研究所 Multi-detector system optical axis parallelism correction method based on laser displacement sensor
CN112815876A (en) * 2020-12-31 2021-05-18 合肥视涯技术有限公司 Binocular head-mounted display equipment parallelism detection device and method
CN114088355A (en) * 2021-11-18 2022-02-25 天津津航技术物理研究所 Assembling and calibrating method for light guide device of optical axis detection system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1731085A (en) * 2005-08-12 2006-02-08 中国科学院上海光学精密机械研究所 The device of measuring laser beam collimation
CN101000235A (en) * 2006-01-12 2007-07-18 中国科学院长春光学精密机械与物理研究所 Device for detecting three-axle parallel of large photoelectric monitoring equipment using thermal target technology
CN101118156A (en) * 2007-09-07 2008-02-06 中国科学院长春光学精密机械与物理研究所 Device for detecting light axis parallelism of laser and visual light system
CN101446485A (en) * 2008-08-27 2009-06-03 中国科学院光电技术研究所 Surveymeter for parallelism of optical axis of visible and infrared light wave

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1731085A (en) * 2005-08-12 2006-02-08 中国科学院上海光学精密机械研究所 The device of measuring laser beam collimation
CN101000235A (en) * 2006-01-12 2007-07-18 中国科学院长春光学精密机械与物理研究所 Device for detecting three-axle parallel of large photoelectric monitoring equipment using thermal target technology
CN101118156A (en) * 2007-09-07 2008-02-06 中国科学院长春光学精密机械与物理研究所 Device for detecting light axis parallelism of laser and visual light system
CN101446485A (en) * 2008-08-27 2009-06-03 中国科学院光电技术研究所 Surveymeter for parallelism of optical axis of visible and infrared light wave

Also Published As

Publication number Publication date
CN101718534A (en) 2010-06-02

Similar Documents

Publication Publication Date Title
CN101718534B (en) Parallelism detector for optical axis of multi-optical system
CN100451540C (en) Device for detecting three-axle parallel of large photoelectric monitoring equipment using thermal target technology
CN101553707B (en) Coordinate measurement instrument
CN107228638B (en) The method and apparatus that five degree of freedom error based on beam drift compensation measures simultaneously
CN105424322A (en) Self-calibration optical axis parallelism detector and detection method
CN101408413B (en) Device for detecting wide distance light beam parallelism
CN103884491B (en) A kind of scanning camera pendulum mirror two dimension dynamic angular measures calibration steps and device
CN108152013A (en) Electro-optical system pointing accuracy measuring device light path adjusting process
CN110186653B (en) Optical axis consistency calibration and split image fixed focus adjustment device and method for non-imaging system
CN100442010C (en) Single-photodetector confocal laser triangulation device
KR20100134609A (en) Apparatus and method for measuring surface topography of an object
CN107702644B (en) Multi-degree-of-freedom measuring device based on double PSDs
CN102901467A (en) Device for correcting parallelism degree of laser emission optical axis and capturing and tracking visual axis
CN106767545A (en) A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method
CN109358435B (en) Device and method for adjusting perpendicularity of double telecentric lenses
CN102607472B (en) Measuring device and measuring method of wide-range flatness
CN112325802B (en) Two-dimensional small-angle laser measurement method and device based on common-path difference and self-zero calibration
CN108592825A (en) A kind of photoelectric auto-collimation device and method based on differential compensation
CN106094234A (en) A kind of autocollimatic light path system with polarization beam splitting element
CN102226689B (en) Method for measuring coaxial error of thru-beams
CN111458108A (en) Device and method for measuring parallelism of transmitting and receiving optical axes
CN104315985A (en) Interference measuring method for thickness of center of lens
CN209043571U (en) Airborne three light axis consistencies test suite and test macro
CN207439442U (en) A kind of laser pick-off emission element commissioning device
CN104154882B (en) Dual-beam device for detecting parallelism and method based on differential confocal measurement

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110119

Termination date: 20121222