CN109059807B - Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure - Google Patents
Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure Download PDFInfo
- Publication number
- CN109059807B CN109059807B CN201811268651.3A CN201811268651A CN109059807B CN 109059807 B CN109059807 B CN 109059807B CN 201811268651 A CN201811268651 A CN 201811268651A CN 109059807 B CN109059807 B CN 109059807B
- Authority
- CN
- China
- Prior art keywords
- reflector
- measuring
- measured
- theodolite
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/24—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a mirror surface parallelism measuring device and a mirror surface parallelism measuring method for an internal reflector of a semi-closed structure, wherein the device comprises: theodolite, measurement speculum support, measurement speculum, rotary translation mechanism, the measurement speculum is installed in the one end of measuring the speculum support, and the measurement speculum support passes through rotary translation mechanism to be installed on the theodolite, and the measurement speculum support is rotatory around rotary translation mechanism, changes the angle of measuring the speculum, follows rotary translation mechanism translation simultaneously. The measuring reflector bracket (2) can rotate around the rotation translation mechanism (4) and can translate along the rotation translation mechanism (4). The invention has the advantages that: the method is simple to realize, and the included angle between the first measured reflector and the second measured reflector in the semi-closed structure can be conveniently obtained, so that the parallelism of the two measured reflector surfaces can be obtained.
Description
Technical Field
The invention relates to a device for measuring the parallelism of a mirror surface of a reflecting mirror, in particular to a device for measuring the parallelism of the mirror surface of a reflecting mirror in a semi-closed structure.
Background
In an optical system, a plurality of plane mirrors are often used to fold an optical path for the purpose of reducing the system volume, multiplexing multiple optical paths, and the like. According to the law of reflection, the influence of the angular installation error of the reflector on the optical axis error of light is doubled. Therefore, the accuracy of mounting the plane mirrors and the parallelism between the mirrors greatly affect the accuracy of the optical axis of the optical system. In the actual installation and adjustment and test process, the installation accuracy of the reflector needs to be accurately measured and calibrated.
The existing common method for measuring the installation accuracy of the reflecting mirror is an auto-collimation method, the theodolite emits parallel light, the optical axis is perpendicular to the measured reflecting mirror, and the perpendicularity of the reflecting mirror relative to the optical axis of the theodolite is measured by reflecting the parallel light of the theodolite through the reflecting mirror. However, this method requires that the mirror surface to be measured be exactly perpendicular to the theodolite optical axis. In practical engineering application, the reflector is often installed in a semi-closed shell, and due to structural limitation, the theodolite cannot measure the angle of the reflector inside the closed structure. In this case, the angle of the internal mirror is usually indirectly guaranteed by means of a dimensional chain transfer of the structure. However, errors between the plurality of dimensional chains are accumulated, so that the mounting accuracy of the mirror is degraded.
Disclosure of Invention
The invention aims to provide a device for measuring the parallelism of the mirror surface of an internal reflector in a semi-closed structure, which solves the problem that the parallelism of the mirror surface of the internal reflector in the semi-closed structure cannot be directly measured by the conventional device.
In order to solve the above technical problem, the present invention provides a mirror surface parallelism measuring device for an internal reflector of a semi-closed structure, comprising: theodolite, measurement speculum support, measurement speculum, rotary translation mechanism, the measurement speculum is installed in the one end of measuring the speculum support, and the measurement speculum support passes through rotary translation mechanism to be installed on the theodolite, and the measurement speculum support is rotatory around rotary translation mechanism, changes the angle of measuring the speculum, follows rotary translation mechanism translation simultaneously.
Another object of the present invention is to provide a method for measuring parallelism of mirror surfaces of an internal reflector having a semi-closed structure, comprising: the measuring reflector is installed at one end of the measuring reflector support, the measuring reflector support is installed on the theodolite through the rotating and translating mechanism, the measuring reflector support rotates around the rotating and translating mechanism, the angle of the measuring reflector is changed, and meanwhile the measuring reflector is translated along the rotating and translating mechanism.
The invention achieves the following significant beneficial effects:
the realization is simple, and the device includes: theodolite, measurement speculum support, measurement speculum, rotary translation mechanism, the measurement speculum is installed in the one end of measuring the speculum support, and the measurement speculum support passes through rotary translation mechanism to be installed on the theodolite, and the measurement speculum support is rotatory around rotary translation mechanism, changes the angle of measuring the speculum, follows rotary translation mechanism translation simultaneously. The included angle between the first measured reflector and the second measured reflector in the semi-closed structure can be conveniently obtained, and therefore the parallelism of the two measured reflector surfaces is obtained.
Drawings
Fig. 1 is a schematic structural diagram of a parallelism measuring device for a reflector in a semi-closed structure.
Fig. 2 is a schematic diagram of a testing process of a parallelism measuring device for a reflector in a semi-closed structure.
Schematic of the reference numerals
1. Theodolite 2, measuring reflector bracket 3, measuring reflector 4, rotary translation mechanism
5. Angle measuring scale 6, semi-closed structure 7, measured reflector I8, measured reflector II
Detailed Description
The advantages and features of the present invention will become more fully apparent from the following description and appended claims, taken in conjunction with the accompanying drawings and detailed description of specific embodiments of the invention. It is to be noted that the drawings are in a very simplified form and are not to scale, which is intended merely for convenience and clarity in describing embodiments of the invention.
It should be noted that, for clarity of description of the present invention, various embodiments are specifically described to further illustrate different implementations of the present invention, wherein the embodiments are illustrative and not exhaustive. In addition, for simplicity of description, the contents mentioned in the previous embodiments are often omitted in the following embodiments, and therefore, the contents not mentioned in the following embodiments may be referred to the previous embodiments accordingly.
While the invention is amenable to various modifications and alternative forms, specifics thereof have been shown by way of example in the drawings and will be described in detail. It should be understood that the inventors do not intend to limit the invention to the particular embodiments described, but intend to protect all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the claims. The same component numbers may be used throughout the drawings to refer to the same or like parts.
Referring to fig. 1 to 2, an apparatus for measuring parallelism of mirror surfaces of an inner mirror of a semi-enclosed structure according to the present invention includes: theodolite 1, measure speculum support 2, measure speculum 3, rotary translation mechanism 4, measure speculum 3 and install in the one end of measuring speculum support 2, measure speculum support 2 and install on theodolite 1 through rotary translation mechanism 4, measure speculum support 2 and rotate around rotary translation mechanism 4, change the angle of measuring speculum 3, follow rotary translation mechanism 4 translations simultaneously.
In one embodiment, further comprising: an angle measuring scale 5, the angle measuring scale 5 is installed together with the rotary translation mechanism 4, and through calibration in advance, the included angle between the mirror surface of the measuring reflector 3 and the emergent optical axis of the theodolite 1 is read out.
In one embodiment, the measuring mirror support 2 is an arm structure.
In one embodiment, a component under test is also included.
In one embodiment, the measured component comprises a semi-closed structure 6, a first measured mirror 7 and a second measured mirror 8, and is used for: during measurement, firstly, the optical axis of the theodolite 1 is perpendicular to the mirror surface of a measured reflector I7 in a measured component by an auto-collimation method; rotating the theodolite 1 to enable an optical axis of the theodolite to form an included angle alpha with a first measured reflector 7, and reflecting the optical axis to a second measured reflector 8 through the first measured reflector 7; moving the measuring reflector 3 to the front of the measured reflector II 8 by moving the measuring reflector bracket 2, so that the emergent optical axis is reflected to the measuring reflector 3 through the measured reflector I7 and the measured reflector II 8; the rotation measurement speculum support 2 changes the angle of measuring speculum 3, observes the auto-collimation image of reflection back simultaneously in theodolite 1, when the auto-collimation image is at 1 visual field center of theodolite, measures speculum 3 and is surveyed the 1 optical axis mutually perpendicular of theodolite that the speculum reflected through two, reads out the contained angle between measuring speculum 3 and the 1 outgoing optical axis of theodolite through angular surveying chi 5.
The invention also provides a measuring method of the mirror surface parallelism measuring device of the inner reflector with the semi-closed structure, which comprises the following steps: the measuring reflector 3 is installed at one end of the measuring reflector support 2, the measuring reflector support 2 is installed on the theodolite 1 through the rotating and translating mechanism 4, the measuring reflector support 2 rotates around the rotating and translating mechanism 4, the angle of the measuring reflector 3 is changed, and meanwhile the measuring reflector is translated along the rotating and translating mechanism 4.
In one embodiment, the method further comprises the step of installing an angle measuring ruler 5 and the rotating and translating mechanism 4 together, and reading out an included angle between the mirror surface of the measuring reflector 3 and the emergent optical axis of the theodolite 1 through pre-calibration.
In one embodiment, the method further comprises the step of installing a tested assembly, wherein the tested assembly comprises a semi-closed structure 6, a first tested reflector 7 and a second tested reflector 8, and during measurement, the optical axis of the theodolite 1 is perpendicular to the mirror surface of the first tested reflector 7 in the tested assembly by an auto-collimation method; rotating the theodolite 1 to enable an optical axis of the theodolite to form an included angle alpha with a first measured reflector 7, and reflecting the optical axis to a second measured reflector 8 through the first measured reflector 7; moving the measuring reflector 3 to the front of the measured reflector II 8 by moving the measuring reflector bracket 2, so that the emergent optical axis is reflected to the measuring reflector 3 through the measured reflector I7 and the measured reflector II 8; the rotation measurement speculum support 2 changes the angle of measuring speculum 3, observes the auto-collimation image of reflection back simultaneously in theodolite 1, when the auto-collimation image is at 1 visual field center of theodolite, measures speculum 3 and is surveyed 1 optical axis mutually perpendicular of theodolite that the speculum reflected through two, reads out the contained angle between measuring speculum 3 and the 1 outgoing optical axis of theodolite through angular surveying chi 5 to obtain the depth of parallelism of two surveyed speculum mirror surfaces.
In one embodiment, if the first mirror under test 7 and the second mirror under test 8 are exactly parallel, β ═ pi/2.
In one embodiment, if the second mirror 8 to be measured has an angle σ in the counterclockwise direction with respect to the first mirror 7 to be measured, β ═ pi/2-2 σ.
As a specific embodiment, the measurement reflector bracket is of an arm rod structure, the measurement reflector is mounted at one end of the measurement reflector bracket, the measurement reflector bracket is mounted on the theodolite through a rotation translation mechanism, the measurement reflector bracket can rotate around the rotation translation mechanism, the angle of the measurement reflector is changed, and meanwhile, the measurement reflector bracket can translate along the rotation translation mechanism. The angle measuring scale and the rotating and translating mechanism are installed together, and the included angle between the mirror surface of the measuring reflector and the exit optical axis of the theodolite can be accurately read out through pre-calibration.
During measurement, firstly, the optical axis of the theodolite is perpendicular to the mirror surface of a measured reflector I in a measured assembly through an auto-collimation method; secondly, rotating the theodolite to enable an included angle alpha to be formed between an optical axis of the theodolite and the first measured reflector, and enabling the optical axis to be reflected to the second measured reflector through the first measured reflector; thirdly, moving the measuring reflector to the front of the measured reflector II by moving the measuring reflector bracket, so that the emergent optical axis passes through the measured reflector I and the measured reflector II and is reflected to the measuring reflector; fourthly, the measuring reflector bracket is rotated to change the angle of the measuring reflector, the reflected auto-collimation image is observed in the theodolite, and when the auto-collimation image is at the center of the theodolite view field, the measuring reflector is perpendicular to the optical axis of the theodolite reflected by the two measured reflectors. Reading out an included angle beta between the measuring reflector and an emergent optical axis of the theodolite through an angle measuring ruler, and if the first reflector to be measured and the second reflector to be measured are strictly parallel, according to a reflection law, determining that the beta is pi/2; if an included angle sigma in the counterclockwise direction exists between the two measured reflectors relative to the first measured reflector, beta is pi/2-2 sigma.
As a specific embodiment, the present invention provides a device for measuring parallelism of mirror surfaces of an internal reflection mirror having a semi-closed structure, including: the theodolite, measure speculum support, measure speculum, rotary translation mechanism, angular surveying chi, measured subassembly, wherein measured subassembly includes semi-enclosed construction, measured speculum one, measured speculum two.
The measuring reflector support is of an arm rod structure, the measuring reflector is installed at one end of the measuring reflector support, the measuring reflector support is installed on the theodolite through the rotary translation mechanism, the measuring reflector support can rotate around the rotary translation mechanism, the angle of the measuring reflector is changed, and meanwhile the measuring reflector support can translate along the rotary translation mechanism. The angle measuring scale and the rotating and translating mechanism are installed together, and the included angle between the mirror surface of the measuring reflector and the exit optical axis of the theodolite can be accurately read out through pre-calibration.
During measurement, firstly, the optical axis of the theodolite is perpendicular to the mirror surface of a measured reflector I in a measured assembly through an auto-collimation method; secondly, rotating the theodolite to enable an included angle alpha to be formed between an optical axis of the theodolite and the first measured reflector, and enabling the optical axis to be reflected to the second measured reflector through the first measured reflector; thirdly, moving the measuring reflector to the front of the measured reflector II by moving the measuring reflector bracket, so that the emergent optical axis passes through the measured reflector I and the measured reflector II and is reflected to the measuring reflector; fourthly, the measuring reflector bracket is rotated to change the angle of the measuring reflector, the reflected auto-collimation image is observed in the theodolite, and when the auto-collimation image is at the center of the theodolite view field, the measuring reflector is perpendicular to the optical axis of the theodolite reflected by the two measured reflectors. Fifthly, reading out an included angle beta between the measuring reflector and an emergent optical axis of the theodolite through an angle measuring ruler, and if the first measured reflector and the second measured reflector are strictly parallel, according to a reflection law, determining that the beta is pi/2; if an included angle sigma in the counterclockwise direction exists between the two measured reflectors relative to the first measured reflector, beta is pi/2-2 sigma.
According to the formula, the included angle between the first measured reflector and the second measured reflector in the semi-closed structure can be calculated, and therefore the parallelism of the two measured reflector surfaces is obtained.
The invention achieves the following significant beneficial effects:
the realization is simple, and the device includes: theodolite, measurement speculum support, measurement speculum, rotary translation mechanism, the measurement speculum is installed in the one end of measuring the speculum support, and the measurement speculum support passes through rotary translation mechanism to be installed on the theodolite, and the measurement speculum support is rotatory around rotary translation mechanism, changes the angle of measuring the speculum, follows rotary translation mechanism translation simultaneously. The included angle between the first measured reflector and the second measured reflector in the semi-closed structure can be conveniently obtained, and therefore the parallelism of the two measured reflector surfaces is obtained.
Any other suitable modifications can be made according to the technical scheme and the conception of the invention. All such alternatives, modifications and improvements as would be obvious to one skilled in the art are intended to be included within the scope of the invention as defined by the appended claims.
Claims (2)
1. The utility model provides a semi-enclosed construction internal reflection mirror surface depth of parallelism measuring device which characterized in that includes: the device comprises a theodolite (1), a measuring reflector support (2), a measuring reflector (3) and a rotating and translating mechanism (4), wherein the measuring reflector (3) is installed at one end of the measuring reflector support (2), the measuring reflector support (2) is installed on the theodolite (1) through the rotating and translating mechanism (4), the measuring reflector support (2) rotates around the rotating and translating mechanism (4), the angle of the measuring reflector (3) is changed, and the measuring reflector (3) translates along the rotating and translating mechanism (4) at the same time;
further comprising: the angle measuring scale (5) is installed with the rotating and translating mechanism (4), and an included angle between the mirror surface of the measuring reflector (3) and the emergent optical axis of the theodolite (1) is read out after pre-calibration;
the measuring reflector bracket (2) is of an arm rod structure;
the device also comprises a tested component;
the measured component comprises a semi-closed structure (6), a first measured reflector (7) and a second measured reflector (8) and is used for: during measurement, firstly, the optical axis of the theodolite (1) is perpendicular to the mirror surface of a measured reflector I (7) in a measured component by an auto-collimation method; rotating the theodolite (1) to enable an optical axis of the theodolite to form an included angle alpha with a first measured reflector (7), and reflecting light rays to a second measured reflector (8) through the first measured reflector (7); the measuring reflector (3) is moved to the front of a measured reflector II (8) by moving the measuring reflector bracket (2), so that emergent light is reflected to the measuring reflector (3) through the measured reflector I (7) and the measured reflector II (8); rotatory survey speculum support (2) change the angle of measuring speculum (3), observe the auto-collimation image of reflection back simultaneously in theodolite (1), when the auto-collimation image is when theodolite (1) visual field center, measure speculum (3) and through two light mutually perpendicular who is surveyed the speculum reflection to theodolite (1), read out through angular surveying chi (5) and measure the contained angle between speculum (3) and theodolite (1) emergent optical axis.
2. A measuring method of a mirror surface parallelism measuring device of an internal reflector in a semi-closed structure is characterized by comprising the following steps: the measuring reflector (3) is arranged at one end of the measuring reflector bracket (2), the measuring reflector bracket (2) is arranged on the theodolite (1) through the rotating translation mechanism (4), the measuring reflector bracket (2) rotates around the rotating translation mechanism (4), the angle of the measuring reflector (3) is changed, and meanwhile, the measuring reflector bracket translates along the rotating translation mechanism (4);
the method also comprises the steps that an angle measuring ruler (5) and a rotary translation mechanism (4) are installed together, and an included angle beta between the mirror surface of the measuring reflector (3) and the emergent ray of the theodolite (1) is read out after pre-calibration;
the method comprises the following steps of installing a tested assembly, wherein the tested assembly comprises a semi-closed structure (6), a first tested reflector (7) and a second tested reflector (8), and during measurement, the optical axis of the theodolite (1) is perpendicular to the mirror surface of the first tested reflector (7) in the tested assembly by an auto-collimation method; rotating the theodolite (1) to enable an optical axis of the theodolite to form an included angle alpha with a first measured reflector (7), and reflecting light rays to a second measured reflector (8) through the first measured reflector (7); the measuring reflector (3) is moved to the front of a measured reflector II (8) by moving the measuring reflector bracket (2), so that emergent light is reflected to the measuring reflector (3) through the measured reflector I (7) and the measured reflector II (8); rotating the measuring reflector bracket (2) to change the angle of the measuring reflector (3), observing the reflected auto-collimation image in the theodolite (1), when the auto-collimation image is at the center of the field of view of the theodolite (1), the measuring reflector (3) is perpendicular to the light reflected to the theodolite (1) by the two measured reflectors, and reading out the included angle between the emergent light of the measuring reflector (3) and the emergent light of the theodolite (1) by an angle measuring scale (5), thereby obtaining the parallelism of the mirror surfaces of the two measured reflectors;
if the first measured reflector (7) and the second measured reflector (8) are strictly parallel, beta is pi/2; if an included angle sigma in the counterclockwise direction exists between the second measured reflector (8) and the first measured reflector (7), beta is pi/2-2 sigma.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811268651.3A CN109059807B (en) | 2018-10-29 | 2018-10-29 | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811268651.3A CN109059807B (en) | 2018-10-29 | 2018-10-29 | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109059807A CN109059807A (en) | 2018-12-21 |
| CN109059807B true CN109059807B (en) | 2021-01-01 |
Family
ID=64767627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811268651.3A Active CN109059807B (en) | 2018-10-29 | 2018-10-29 | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109059807B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU996862A1 (en) * | 1981-03-16 | 1983-02-15 | Военный Инженерный Краснознаменный Институт Им.А.Ф.Можайского | Mirror-type multiplier |
| DE3205610A1 (en) * | 1982-02-17 | 1983-08-25 | Berthold 5401 Buchholz Hajen | Optical equipment for testing parallelism and synchronisation |
| CN1490593A (en) * | 2002-10-15 | 2004-04-21 | 中国科学院长春光学精密机械与物理研 | Inspection of parallelism of light axle of bending optical pipe |
| CN101382608A (en) * | 2008-10-23 | 2009-03-11 | 中国兵器工业第二〇五研究所 | Method for making 180 degree big span second grade optical axis parallelism angle mirror |
| CN101718534A (en) * | 2009-12-22 | 2010-06-02 | 中国科学院长春光学精密机械与物理研究所 | Parallelism detector for optical axis of multi-optical system |
| CN103592775A (en) * | 2013-11-15 | 2014-02-19 | 深圳市大族激光科技股份有限公司 | Optical isolation system and optical isolator |
| CN104142579A (en) * | 2014-07-23 | 2014-11-12 | 西安空间无线电技术研究所 | Adjustment method for reflectors of periscopic type acquisition and tracking mechanism |
| CN105424322A (en) * | 2015-11-09 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Self-calibration optical axis parallelism detector and detection method |
| CN106840044A (en) * | 2017-01-06 | 2017-06-13 | 中国科学院光电研究院 | A kind of double mirror parallelism measuring apparatus and its measuring method |
-
2018
- 2018-10-29 CN CN201811268651.3A patent/CN109059807B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU996862A1 (en) * | 1981-03-16 | 1983-02-15 | Военный Инженерный Краснознаменный Институт Им.А.Ф.Можайского | Mirror-type multiplier |
| DE3205610A1 (en) * | 1982-02-17 | 1983-08-25 | Berthold 5401 Buchholz Hajen | Optical equipment for testing parallelism and synchronisation |
| CN1490593A (en) * | 2002-10-15 | 2004-04-21 | 中国科学院长春光学精密机械与物理研 | Inspection of parallelism of light axle of bending optical pipe |
| CN101382608A (en) * | 2008-10-23 | 2009-03-11 | 中国兵器工业第二〇五研究所 | Method for making 180 degree big span second grade optical axis parallelism angle mirror |
| CN101718534A (en) * | 2009-12-22 | 2010-06-02 | 中国科学院长春光学精密机械与物理研究所 | Parallelism detector for optical axis of multi-optical system |
| CN103592775A (en) * | 2013-11-15 | 2014-02-19 | 深圳市大族激光科技股份有限公司 | Optical isolation system and optical isolator |
| CN104142579A (en) * | 2014-07-23 | 2014-11-12 | 西安空间无线电技术研究所 | Adjustment method for reflectors of periscopic type acquisition and tracking mechanism |
| CN105424322A (en) * | 2015-11-09 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Self-calibration optical axis parallelism detector and detection method |
| CN106840044A (en) * | 2017-01-06 | 2017-06-13 | 中国科学院光电研究院 | A kind of double mirror parallelism measuring apparatus and its measuring method |
Non-Patent Citations (1)
| Title |
|---|
| 水平式激光发射系统光轴平行度误差分析;薛向尧等;《红外与激光工程》;20120228;第41卷(第2期);第335-340页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109059807A (en) | 2018-12-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4776473B2 (en) | Optical axis deflection laser interferometer, its calibration method, correction method, and measurement method | |
| CN101067546A (en) | Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component | |
| CN101609250B (en) | Swing mirror angle scanning characteristic test device for camera | |
| CN206132076U (en) | Motion target simulation device | |
| CN103454249A (en) | Method and device for detecting uniformity of optical glass based on white light interferometry | |
| CN104236903A (en) | Calibration device of gear transmission error detection equipment | |
| CN109059807B (en) | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure | |
| CN109211273B (en) | Calibration method for star sensor optical axis leading-out mechanism | |
| WO2021081860A1 (en) | Device and method for laser compound path guide rail testing | |
| RU2757474C2 (en) | Scanning device and method for measuring and examining round holes in transparent liquids in medium with ionizing radiation | |
| CN103175481B (en) | The measuring method of a kind of off-axis optics aspherical mirror vertex radius and device | |
| CN103105283B (en) | Focal distance measuring device of single-spectrum large-diameter long-focus lens | |
| CN104581150B (en) | Positioning and error compensation method | |
| CN104570580B (en) | A kind of spatially distributed camera optical axis angle method of testing | |
| CN105444998A (en) | Telescope system visual amplification measuring device and measuring method | |
| JP2012117811A (en) | Wafer flatness measuring method | |
| CN113211192A (en) | Calibrating device for geometric error of machine tool and corner positioning error of rotary table | |
| CN220304798U (en) | Right angle error detection auxiliary device for pentaprism | |
| CN104501958A (en) | Infrared residual reflectivity spectrum test accessory and infrared residual reflectivity spectrum test method | |
| CN111854803B (en) | Star sensor thermal stability detection device and detection method thereof | |
| CN112880973B (en) | Device and method for improving grating period measurement precision | |
| CN218097590U (en) | Optical components and parts multidimension degree space calibrating device | |
| CN211718031U (en) | Laser image X ray relative density testing arrangement | |
| Kolosov et al. | Comparative evaluation of three modern turning-angle sensors | |
| CN107655931A (en) | A kind of high-precision cylinder linear expansion coefficient measurement apparatus and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |