CN109059807A - A kind of semi-closed structure internal reflector mirror surface parallelism measuring apparatus and measurement method - Google Patents
A kind of semi-closed structure internal reflector mirror surface parallelism measuring apparatus and measurement method Download PDFInfo
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- CN109059807A CN109059807A CN201811268651.3A CN201811268651A CN109059807A CN 109059807 A CN109059807 A CN 109059807A CN 201811268651 A CN201811268651 A CN 201811268651A CN 109059807 A CN109059807 A CN 109059807A
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- reflecting mirror
- measurement
- mirror
- tested
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/24—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of semi-closed structure internal reflector mirror surface parallelism measuring apparatus and measurement methods, described device includes: theodolite, measurement mirror support, measurement reflecting mirror, rotating translation mechanism, the measurement reflecting mirror is installed on one end of measurement mirror support, measurement mirror support is installed on theodolite by rotating translation mechanism, measurement mirror support is rotated around rotating translation mechanism, change the angle of measurement reflecting mirror, while being translated along rotating translation mechanism.Measurement mirror support (2) can be rotated around rotating translation mechanism (4), while can be translated along rotating translation mechanism (4).The invention has the advantages that realizing simply, the angle between the tested reflecting mirror one and tested reflecting mirror two in semi-closed structure can be conveniently obtained, to obtain the depth of parallelism of two tested mirror mirrors.
Description
Technical field
The present invention relates to a kind of device of mirror mirror measurement of paralleism, especially a kind of semi-closed structure internal reflector
Mirror surface parallelism measuring apparatus.
Background technique
In optical system, in order to reduce system bulk, the purpose of multi-pass is compound, multiple plane reflections are often used
Mirror is turned back optical path.According to reflection law, influence of the angle installation error of reflecting mirror to optic biradial error is in two times of relationships
's.Therefore, influence of the depth of parallelism between the installation accuracy and reflecting mirror of plane mirror to system optical axis precision is non-
Chang great.In actual adjustment and test process, need to carry out precise measurement and calibration to the installation accuracy of reflecting mirror.
Currently used reflecting mirror installation accuracy measurement method is autocollimation method, and theodolite issues directional light, optical axis and quilt
Survey reflecting mirror is vertical, passes through the directional light that reflecting mirror reflects theodolite, measures verticality of the reflecting mirror relative to theodolite optical axis.
However, this method needs tested mirror mirror and theodolite optical axis exact vertical.In practical engineering applications, reflecting mirror passes through
It is often installed in semi-enclosed shell, since structure limits, theodolite is unable to measure the mirror angle inside enclosed construction.This
In the case of kind, the dimension chain transmitting for usually relying on structure to guarantee indirectly the angle of internal mirror.But multiple dimension chains it
Between error accumulation so that the installation accuracy of reflecting mirror declines.
Summary of the invention
It is an object of that present invention to provide a kind of semi-closed structure internal reflector mirror surface parallelism measuring apparatus, solve existing dress
Set the problem of can not directly measuring the semi-closed structure internal reflector mirror surface depth of parallelism.
In order to solve the above technical problems, the present invention provides a kind of semi-closed structure internal reflector mirror surface measurement of paralleism dress
It sets, which is characterized in that described device includes: theodolite, measurement mirror support, measures reflecting mirror, rotating translation mechanism, described
Measurement reflecting mirror is installed on one end of measurement mirror support, measures mirror support by rotating translation mechanism and is installed on longitude and latitude
On instrument, measurement mirror support is rotated around rotating translation mechanism, changes the angle of measurement reflecting mirror, while along rotating translation mechanism
Translation.
Another object of the present invention is to provide a kind of semi-closed structure internal reflector mirror surface parallelism measurement methods, special
Sign is, comprising: measurement reflecting mirror is installed on one end of measurement mirror support, and measurement mirror support passes through rotary flat telephone-moving
Structure is installed on theodolite, and measurement mirror support is rotated around rotating translation mechanism, changes the angle of measurement reflecting mirror, while edge
Rotating translation mechanism translation.
The present invention realize it is following significant the utility model has the advantages that
It realizes simply, device includes: theodolite, measurement mirror support, measures reflecting mirror, rotating translation mechanism, described
Measurement reflecting mirror is installed on one end of measurement mirror support, measures mirror support by rotating translation mechanism and is installed on longitude and latitude
On instrument, measurement mirror support is rotated around rotating translation mechanism, changes the angle of measurement reflecting mirror, while along rotating translation mechanism
Translation.The angle between the tested reflecting mirror one and tested reflecting mirror two in semi-closed structure can be conveniently obtained, to obtain two
The depth of parallelism of a tested mirror mirror.
Detailed description of the invention
A kind of structural schematic diagram of semi-closed structure internal reflector parallelism measuring apparatus of Fig. 1.
A kind of test process schematic diagram of semi-closed structure internal reflector parallelism measuring apparatus of Fig. 2.
Appended drawing reference signal
1. theodolite 2. measures mirror support 3. and measures 4. rotating translation mechanism of reflecting mirror
5. 6. semi-closed structure 7. of angle measuring scale is tested the tested reflecting mirror two of reflecting mirror 1
Specific embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments, is wanted according to following explanation and right
Book is sought, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and is applicable in
Non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
It should be noted that present invention spy is for multiple embodiments with further in order to clearly demonstrate the contents of the present invention
Illustrate different implementations of the invention, wherein multiple embodiment is enumeration and non-exhaustive.In addition, in order to illustrate
Succinctly, the content having been mentioned in preceding embodiment is often omitted in rear embodiment, therefore, unmentioned interior in rear embodiment
Appearance can accordingly refer to preceding embodiment.
Although the invention can modification in a variety of forms and replacement extend, also listed in specification some specific
Implement legend and is described in detail.It should be understood that the starting point of inventor is not that the invention is limited to illustrated spy
Determine embodiment, antithesis, the starting point of inventor is to protect in all spirit or scope given and defined by this rights statement
The improvement of progress, equivalent alterations and modifications.Same component number is likely to be used for all attached drawings to represent identical or class
As part.
Please refer to Fig. 1 to Fig. 2, a kind of semi-closed structure internal reflector mirror surface parallelism measuring apparatus of the invention, comprising:
Theodolite 1, measurement mirror support 2, measurement reflecting mirror 3, rotating translation mechanism 4, it is anti-that the measurement reflecting mirror 3 is installed on measurement
One end of mirror support 2 is penetrated, measurement mirror support 2 is installed on theodolite 1 by rotating translation mechanism 4, measures reflecting mirror branch
Frame 2 is rotated around rotating translation mechanism 4, changes the angle of measurement reflecting mirror 3, while translating along rotating translation mechanism 4.
In one embodiment, further includes: angle measuring scale 5, the angle measuring scale 5 are installed with rotating translation mechanism 4
Together, by demarcating in advance, the angle between measurement 3 mirror surface of reflecting mirror and 1 emergent light axis of theodolite is read.
In one embodiment, the measurement mirror support 2 is an armed lever structure.
It in one embodiment, further include MUT module under test.
In one embodiment, the MUT module under test includes semi-closed structure 6, tested reflecting mirror 1, tested reflecting mirror two
8, it is used for: when measurement, passing through auto-collimation method first for the tested reflecting mirror 1 in the optical axis and MUT module under test of theodolite 1
Mirror surface is vertical；Theodolite 1 is rotated, its optical axis and tested reflecting mirror 1 is made to generate angle α, optical axis is anti-by tested reflecting mirror 1
It is incident upon tested reflecting mirror 28；By traverse measurement mirror support 2, measurement reflecting mirror 3 is moved to tested reflecting mirror 28
Front reflexes to emergent light axis on measurement reflecting mirror 3 by tested reflecting mirror 1 and tested reflecting mirror 28；Wheel measuring is anti-
It penetrates mirror support 2 and changes the angle of measurement reflecting mirror 3, while observing reflected auto-collimation picture in theodolite 1, work as auto-collimation
As in 1 field of view center of theodolite, measurement reflecting mirror 3 and 1 optical axis of theodolite by two tested reflecting mirror reflections mutually hang down
Directly, the angle between measurement reflecting mirror 3 and 1 emergent light axis of theodolite is read by angle measuring scale 5.
The present invention also provides a kind of measurement methods of semi-closed structure internal reflector mirror surface parallelism measuring apparatus, comprising:
Measurement reflecting mirror 3 is installed on one end of measurement mirror support 2, and measurement mirror support 2 is installed on by rotating translation mechanism 4
On theodolite 1, measurement mirror support 2 is rotated around rotating translation mechanism 4, changes the angle of measurement reflecting mirror 3, while along rotation
Translation mechanism 4 translates.
It in one embodiment, further include being installed together angle measuring scale 5 and rotating translation mechanism 4, by preparatory
Calibration reads the angle between measurement 3 mirror surface of reflecting mirror and 1 emergent light axis of theodolite.
In one embodiment, further include the steps that install MUT module under test, the MUT module under test include semi-closed structure 6,
Tested reflecting mirror 1, tested reflecting mirror 28, when measurement, first by auto-collimation method by the optical axis of theodolite 1 and tested group
The mirror surface of tested reflecting mirror 1 in part is vertical；Theodolite 1 is rotated, its optical axis and tested reflecting mirror 1 is made to generate angle α, light
Axis reflexes to tested reflecting mirror 28 by tested reflecting mirror 1；By traverse measurement mirror support 2, reflecting mirror 3 will be measured
It is moved to before tested reflecting mirror 28, emergent light axis is made to reflex to survey by tested reflecting mirror 1 and tested reflecting mirror 28
It measures on reflecting mirror 3；Wheel measuring mirror support 2 changes the angle of measurement reflecting mirror 3, while reflection is observed in theodolite 1
Auto-collimation picture back measurement reflecting mirror 3 and passes through two tested reflecting mirrors when auto-collimation picture is in 1 field of view center of theodolite
1 optical axis of theodolite of reflection is mutually perpendicular to, and is read between measurement reflecting mirror 3 and 1 emergent light axis of theodolite by angle measuring scale 5
Angle, to obtain the depth of parallelism of two tested mirror mirrors.
In one embodiment, if tested reflecting mirror 1 and tested reflecting mirror 28 are strictly parallel, β=pi/2.
In one embodiment, if tested reflecting mirror 28 is pressed from both sides relative between tested reflecting mirror 1 in the presence of counter clockwise direction
Angle σ, then -2 σ of β=pi/2.
As specific embodiment, the measurement mirror support is an armed lever structure, and measurement reflecting mirror is installed on survey
One end of mirror support is measured, measurement mirror support is installed on theodolite by rotating translation mechanism, measures reflecting mirror branch
Frame can be rotated around rotating translation mechanism, change the angle of measurement reflecting mirror, while can be translated along rotating translation mechanism.Angle measurement
Ruler is installed together with rotating translation mechanism, by demarcating in advance, can accurately read measurement mirror mirror and theodolite is emitted
Angle between optical axis.
When measurement, pass through auto-collimation method first for the mirror of the tested reflecting mirror one in the optical axis and MUT module under test of theodolite
Face is vertical；Secondly, rotation theodolite, makes its optical axis and tested reflecting mirror one generate angle α, optical axis is anti-by tested reflecting mirror one
It is incident upon tested reflecting mirror two；Measurement reflecting mirror is moved to tested reflecting mirror two by traverse measurement mirror support by third
Front reflexes to emergent light axis on measurement reflecting mirror by tested reflecting mirror one and tested reflecting mirror two；4th, wheel measuring
Mirror support changes the angle of measurement reflecting mirror, while reflected auto-collimation picture is observed in theodolite, works as auto-collimation
As in theodolite field of view center, measurement reflecting mirror is mutually perpendicular to the theodolite optical axis by two tested reflecting mirror reflections.
The angle β between measurement reflecting mirror and theodolite emergent light axis is read by angle measuring scale, according to reflection law, if tested anti-
It penetrates mirror one and tested reflecting mirror two is strictly parallel, then β=pi/2；If tested reflecting mirror two is deposited relative between tested reflecting mirror one
Angle σ in the counterclockwise direction, then -2 σ of β=pi/2.
As specific embodiment, a kind of semi-closed structure internal reflector mirror surface parallelism measuring apparatus of the invention, packet
It includes: theodolite, measurement mirror support, measurement reflecting mirror, rotating translation mechanism, angle measuring scale, MUT module under test, wherein being tested
Component includes semi-closed structure, tested reflecting mirror one, tested reflecting mirror two.
The measurement mirror support is an armed lever structure, and measurement reflecting mirror is installed on the one of measurement mirror support
End, measurement mirror support are installed on theodolite by rotating translation mechanism, and measurement mirror support can be around rotary flat telephone-moving
Structure rotation, changes the angle of measurement reflecting mirror, while can translate along rotating translation mechanism.Angle measuring scale and rotating translation mechanism
It is installed together, by demarcating in advance, can accurately read the angle between measurement mirror mirror and theodolite emergent light axis.
When measurement, pass through auto-collimation method first for the mirror of the tested reflecting mirror one in the optical axis and MUT module under test of theodolite
Face is vertical；Secondly, rotation theodolite, makes its optical axis and tested reflecting mirror one generate angle α, optical axis is anti-by tested reflecting mirror one
It is incident upon tested reflecting mirror two；Measurement reflecting mirror is moved to tested reflecting mirror two by traverse measurement mirror support by third
Front reflexes to emergent light axis on measurement reflecting mirror by tested reflecting mirror one and tested reflecting mirror two；4th, wheel measuring
Mirror support changes the angle of measurement reflecting mirror, while reflected auto-collimation picture is observed in theodolite, works as auto-collimation
As in theodolite field of view center, measurement reflecting mirror is mutually perpendicular to the theodolite optical axis by two tested reflecting mirror reflections.
5th, the angle β between measurement reflecting mirror and theodolite emergent light axis is read by angle measuring scale, according to reflection law, if
Tested reflecting mirror one and tested reflecting mirror two are strictly parallel, then β=pi/2；If being tested reflecting mirror two relative to tested reflecting mirror one
Between there are counter clockwise direction angle σ, then -2 σ of β=pi/2.
According to above-mentioned formula, can be calculated between the tested reflecting mirror one and tested reflecting mirror two in semi-closed structure
Angle, to obtain the depth of parallelism of two tested mirror mirrors.
The present invention realize it is following significant the utility model has the advantages that
It realizes simply, device includes: theodolite, measurement mirror support, measures reflecting mirror, rotating translation mechanism, described
Measurement reflecting mirror is installed on one end of measurement mirror support, measures mirror support by rotating translation mechanism and is installed on longitude and latitude
On instrument, measurement mirror support is rotated around rotating translation mechanism, changes the angle of measurement reflecting mirror, while along rotating translation mechanism
Translation.The angle between the tested reflecting mirror one and tested reflecting mirror two in semi-closed structure can be conveniently obtained, to obtain two
The depth of parallelism of a tested mirror mirror.
Technical solution and design according to the present invention can also have other any suitable changes.Skill common for this field
For art personnel, all these replacements, adjustment and improvement be should all belong to the protection domain of appended claims of the present invention.
Claims (10)
1. a kind of semi-closed structure internal reflector mirror surface parallelism measuring apparatus characterized by comprising theodolite (1), measurement
Mirror support (2), measurement reflecting mirror (3), rotating translation mechanism (4), the measurement reflecting mirror (3) are installed on measurement reflecting mirror
One end of bracket (2), measurement mirror support (2) are installed on theodolite (1) by rotating translation mechanism (4), measurement reflection
Mirror support (2) is rotated around rotating translation mechanism (4), changes the angle of measurement reflecting mirror (3), while along rotating translation mechanism (4)
Translation.
2. semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 1, which is characterized in that also wrap
Include: angle measuring scale (5), the angle measuring scale (5) are installed together with rotating translation mechanism (4), by demarcating in advance, read
The angle between reflecting mirror (3) mirror surface and theodolite (1) emergent light axis is measured out.
3. semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 1, which is characterized in that described
Measuring mirror support (2) is an armed lever structure.
4. semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 1, which is characterized in that also wrap
Include MUT module under test.
5. semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 4, which is characterized in that described
MUT module under test includes semi-closed structure (6), tested reflecting mirror one (7), tested reflecting mirror two (8), is used for: logical first when measurement
Cross auto-collimation method the optical axis of theodolite (1) is vertical with the mirror surface of tested reflecting mirror one (7) in MUT module under test；Rotate longitude and latitude
Instrument (1), makes its optical axis and tested reflecting mirror one (7) generate angle α, and optical axis is reflexed to tested anti-by tested reflecting mirror one (7)
Penetrate mirror two (8)；By traverse measurement mirror support (2), before measurement reflecting mirror (3) is moved to tested reflecting mirror two (8)
Face reflexes to emergent light axis in measurement reflecting mirror (3) by tested reflecting mirror one (7) and tested reflecting mirror two (8)；Rotation is surveyed
Measure the angle that mirror support (2) change measurement reflecting mirror (3), while the reflected auto-collimation of observation in theodolite (1)
Picture, when the warp that auto-collimation picture is in theodolite (1) field of view center, and two tested reflecting mirrors of measurement reflecting mirror (3) and process reflect
Latitude instrument (1) optical axis is mutually perpendicular to, and is read between measurement reflecting mirror (3) and theodolite (1) emergent light axis by angle measuring scale (5)
Angle.
6. a kind of measurement method of semi-closed structure internal reflector mirror surface parallelism measuring apparatus characterized by comprising measurement
Reflecting mirror (3) is installed on one end of measurement mirror support (2), and measurement mirror support (2) is pacified by rotating translation mechanism (4)
Loaded on theodolite (1), measurement mirror support (2) is rotated around rotating translation mechanism (4), changes the angle of measurement reflecting mirror (3)
Degree, while being translated along rotating translation mechanism (4).
7. the measurement method of semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 6, special
Sign is, further includes being installed together angle measuring scale (5) and rotating translation mechanism (4), by demarcating in advance, reads measurement
Angle between reflecting mirror (3) mirror surface and theodolite (1) emergent light axis.
8. the measurement method of semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 7, special
Sign is, further includes the steps that installing MUT module under test, the MUT module under test includes semi-closed structure (6), tested reflecting mirror one
(7), it is tested reflecting mirror two (8), it, first will be in the optical axis and MUT module under test of theodolite (1) by auto-collimation method when measurement
The mirror surface of tested reflecting mirror one (7) is vertical；It rotates theodolite (1), its optical axis and tested reflecting mirror one (7) is made to generate angle α, light
Axis reflexes to tested reflecting mirror two (8) by tested reflecting mirror one (7)；It is by traverse measurement mirror support (2), measurement is anti-
It penetrates mirror (3) to be moved to before tested reflecting mirror two (8), makes emergent light axis by tested reflecting mirror one (7) and tested reflecting mirror
Two (8) reflex in measurement reflecting mirror (3)；Wheel measuring mirror support (2) changes the angle of measurement reflecting mirror (3), simultaneously
The reflected auto-collimation picture of observation in theodolite (1), when auto-collimation picture is in theodolite (1) field of view center, measurement is reflected
Mirror (3) is mutually perpendicular to theodolite (1) optical axis by two tested reflecting mirror reflections, is read and is surveyed by angle measuring scale (5)
The angle between reflecting mirror (3) and theodolite (1) emergent light axis is measured, to obtain the depth of parallelism of two tested mirror mirrors.
9. the measurement method of semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 8, special
Sign is, if tested reflecting mirror one (7) and tested reflecting mirror two (8) are strictly parallel, β=pi/2.
10. the measurement method of semi-closed structure internal reflector mirror surface parallelism measuring apparatus according to claim 8, special
Sign is, if tested reflecting mirror two (8) relative between tested reflecting mirror one (7) there are counter clockwise direction angle σ, β=π/
2-2σ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811268651.3A CN109059807B (en) | 2018-10-29 | 2018-10-29 | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811268651.3A CN109059807B (en) | 2018-10-29 | 2018-10-29 | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure |
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| CN109059807A true CN109059807A (en) | 2018-12-21 |
| CN109059807B CN109059807B (en) | 2021-01-01 |
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| CN201811268651.3A Active CN109059807B (en) | 2018-10-29 | 2018-10-29 | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240044642A1 (en) * | 2022-08-03 | 2024-02-08 | Oren Aharon | Orbital Goniometer Autocollimation Device |
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| CN109059807B (en) | 2021-01-01 |
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