CN107607061B - High-precision angle measurement method for virtual optical axis and structural leaning surface - Google Patents
High-precision angle measurement method for virtual optical axis and structural leaning surface Download PDFInfo
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Abstract
The invention provides a high-precision angle measurement method for a virtual optical axis and a structural leaning surface, which can realize high-precision measurement of angles of a reflecting surface and a non-reflecting surface. The high-precision angle measurement system comprises a calibration device a goniometer and a turntable; wherein the calibration device comprises a reference plane mirror a plane mirror and a calibration seat; the reference plane mirror and the leaning plane mirror are respectively arranged on the two vertically adjacent first vertical faces and second vertical faces of the calibration seat through respective adjusting frames, the calibration seat is also provided with a third face vertically adjacent to the first vertical face and the second vertical face, and the middle part of the third face is provided with a light through hole; when the angle is measured, the first elevation is used as the bottom surface of the calibration seat to be horizontally placed on the turntable, the reference plane mirror is used as the installation bottom surface of the equipment to be measured, the leaning plane mirror is used for leading out the normal direction of the leaning plane of the structure of the equipment to be measured, and the output optical axis of the equipment to be measured is measured through the light passing hole.
Description
Technical Field
The invention relates to a system and a method for measuring angles of an optical axis and a structural leaning surface, which are particularly suitable for optical equipment with smaller external dimensions and high measuring precision.
Background
The instrument led out by adopting the structure leaning surface to the target datum plane has the advantages of compact structure of an optical and mechanical system, small size and no electric control system. However, the measurement of the reflecting surface and the non-reflecting surface has the problem of low measurement accuracy due to the fact that the measurement of the reflecting surface and the non-reflecting surface is convenient, stable and accurate for the structure leaning surface and the output virtual optical axis.
The currently commonly used high-precision angle measurement method mainly comprises non-contact measurement and contact measurement.
The non-contact angle measurement method is more, the precision is very high, and the measurement is mainly carried out by adopting an auto-collimator. The optical fiber of the auto-collimator is manufactured by the principle that parallel light is reflected by a tilting mirror surface and then deviates from a zero marking line. However, the measuring plane must be reflective, which is not desirable for the beam on the surface of the structure that cannot be reflective.
High precision contact measurement relies mainly on three-coordinate instrument measurement. The working principle of the three-coordinate measuring machine is that in the three-dimensional measurable space range, the instrument can detect the workpiece according to the side head system, return point data on the surface of the workpiece and calculate various geometric shapes, sizes and measuring capacities through a three-coordinate software system.
Any shape is composed of space points, all geometric measurements are summarized as the measurement of the space points, the measured part is put into the allowed measurement space, the data of the points on the surface of the measured part in three coordinate positions in space are accurately measured, the coordinate values of the points are processed by a computer, the coordinate values are fitted to form measuring elements such as circles, balls, cylinders, cones, curved surfaces and the like, and the shape, position tolerance and other geometric quantity data of the measuring elements are obtained by a data calculation method.
The smaller the surface of the part is during three-coordinate measurement, the larger the relative angle error is, and the requirement of high-precision angle measurement cannot be met, and the measurement needs to contact the surface of the part, so that the method is not suitable for normal measurement of a rectangular prism.
Disclosure of Invention
In order to realize high-precision measurement of angles of a reflecting surface and a non-reflecting surface, the invention provides a high-precision angle measurement system and a high-precision angle measurement method for a virtual optical axis and a structural leaning surface.
The technical scheme of the invention is as follows:
the high-precision angle measurement system comprises a calibration device, an angle meter and a turntable; wherein the calibration device comprises a reference plane mirror a plane mirror and a calibration seat; the reference plane mirror and the leaning plane mirror are respectively arranged on the two vertically adjacent first vertical surfaces and the second vertical surfaces of the calibration seat through respective adjusting frames, so that the reference plane mirror and the leaning plane mirror can be adjusted to be mutually vertical; the first vertical face and the second vertical face of the calibration seat are open at opposite sides, the calibration seat is also provided with a third face vertically adjacent to the first vertical face and the second vertical face, and the middle part of the third face is provided with a light through hole; the angle meter is in the same level with the reference plane mirror and the leaning plane mirror, and calibration and angle measurement are realized through superposition of an observation optical axis; when in calibration, the third surface is used as the bottom surface of the calibration seat to be horizontally placed on the turntable; when the angle is measured, the first elevation is used as the bottom surface of the calibration seat to be horizontally placed on the rotary table, the reference plane mirror is used as the installation bottom surface of the equipment to be measured, the leaning plane mirror is used for leading out the normal direction of the leaning plane of the structure of the equipment to be measured, and the output optical axis of the equipment to be measured is measured through the light transmission hole.
Based on the scheme, the invention further optimizes the following steps:
the adjusting frame of the reference plane mirror and the adjusting frame of the leaning plane mirror both have locking functions so as to lock the adjusting position.
The high-precision angle measurement system further comprises a leveling frame, and the calibration device is installed on the turntable in a leveling mode through the leveling frame during angle measurement.
The installation surface of the reference plane mirror, which is contacted with the equipment to be tested, is plated with a reflective film, and the leaning surface of the leaning plane mirror, which is contacted with the equipment to be tested, is plated with a reflective film.
The thickness of the reference plane mirror and the leaning plane mirror is not less than 6mm.
The measuring method of the high-precision angle measuring system comprises the steps of firstly calibrating a reference plane mirror and a leaning plane mirror by using a goniometer and a rotary table to enable the reference plane mirror and the leaning plane mirror to be mutually perpendicular; then, a structure leaning surface normal direction of the equipment to be tested is led out by using a leaning surface plane mirror, and a reference plane mirror is used as the installation bottom surface of the equipment to be tested; by using the angle measuring instrument and the rotary table, the horizontal azimuth included angle theta between the normal of the structure leaning surface of the device to be measured and the output optical axis is measured a And converting into an included angle between the optical axis of the plane mirror of the measurement leaning surface and the output optical axis of the equipment to be measured. The method specifically comprises the following steps:
1) Leveling the goniometer, and then adjusting the reference plane mirror so that the optical axis of the goniometer coincides with the optical axis of the reference plane mirror;
2) With the reference plane mirror as the reference, calibrating a leaning plane mirror vertical to the turntable on a horizontal plane by utilizing the turntable and the goniometer;
3) Fixing the relative angle relation between the reference plane mirror and the leaning plane mirror;
4) The reference plane mirror is horizontally placed and leveled, the device to be measured is placed on the reference plane mirror, the leaning surface of the structure of the device to be measured is tightly attached to the leaning surface plane mirror (the leaning surface azimuth of the structure is led out through the leaning surface plane mirror), and the azimuth value theta of the output optical axis of the device to be measured is measured by utilizing the goniometer 7 1 ；
5) Removing the device to be tested, and rotating the rotary table clockwise by theta 2 The plane mirror of the leaning surface can be measured by the angle measuring instrument; measuring azimuth value theta of the plane mirror of the leaning surface at the moment 3 The horizontal azimuth included angle theta between the normal of the structure leaning surface of the device to be tested and the output optical axis a ＝θ 2 +(θ 3 -θ 1 )。
The leveling goniometer in the step 1) is only required to meet the requirement that the error between the main optical axis of the goniometer and the horizontal plane is within 8', namely, the perpendicularity error between the two planes is increased by not more than 1″ when the included angle between the main optical axis of the goniometer and the horizontal plane is increased by 8'.
The level adjustment precision of the reference plane mirror in the step 4) is controlled within 30'.
The beneficial effects of the invention are as follows:
1. the invention measures the angle relation between the virtual optical axis of the equipment and the plane of the equipment, and has stable measurement and high precision.
2. The invention has low requirements on the plane mirror and the adjusting structure, and has simple and convenient operation and independent functions.
3. The invention does not relate to any electric control element, and is simple and reliable.
4. The invention has higher accuracy than conventional measurement schemes, especially for smaller devices to be measured.
Drawings
FIG. 1 is a schematic diagram of the angle constants of a device under test.
FIG. 2 is a schematic diagram of a calibration apparatus.
FIG. 3 illustrates the perpendicularity calibration process of the present invention.
Fig. 4 is a front view of the process of measuring a device under test of the present invention.
Fig. 5 is a top view of the present invention measuring the planar process of the rest surface.
Detailed Description
FIG. 1 is a schematic diagram showing an angle constant of a device to be tested, the device reads an azimuth angle of a target bearing surface through a normal line of a bearing surface of a structure, and transmits the read azimuth angle to an external device through an output optical axis, wherein an included angle between the normal line of the bearing surface of the structure and a horizontal azimuth angle of the output optical axis is θ a Accurate measurements are required to scale the azimuth of the target bearing surface to the optical axis of the output.
Fig. 2 shows a calibration device according to the invention. The device consists of five parts, namely a reference plane mirror 1, a reference plane mirror adjusting frame 2, a leaning plane mirror 3, a leaning plane mirror adjusting frame 4 and a calibration seat 5. The reference plane mirror 1 is angularly adjusted by the reference plane mirror adjusting frame 2, the leaning plane mirror 3 is angularly adjusted by the leaning plane mirror adjusting frame 4, and the two adjusting frames are respectively provided with a self-locking function. When in calibration, the calibration mounting surface is taken as the bottom surface to be placed on the turntable; during measurement, the debugging installation surface is placed parallel to the plane of the turntable, and the output optical axis of the device to be measured is measured through the light transmission hole.
Fig. 3 shows a verticality calibration process by which the reference plane mirror 1 and the mirror 3 can be adjusted to be perpendicular to each other by using the calibration apparatus shown in fig. 2. Firstly, leveling a goniometer 7, placing a calibration plane mirror on a turntable 6 by taking a calibration mounting surface as a bottom surface, and adjusting a reference plane mirror adjusting frame 2 so that an optical axis of the goniometer 7 coincides with an optical axis of a reference plane mirror 1; the goniometer 7 is fixed, the turntable horizontally rotates by 90 degrees, and the leaning plane mirror adjusting frame 4 is adjusted so that the optical axis of the goniometer 7 coincides with the optical axis of the leaning plane mirror 3; and locking the reference plane mirror adjusting frame 2 and the leaning plane mirror adjusting frame 4 to finish verticality calibration.
Fig. 4 is a schematic diagram of a process of measuring the device 9 to be measured by using the calibration device shown in fig. 2, by which an angle between a normal of a surface of a structure of the device to be measured and an output optical axis can be measured. ###
First, the calibration is to be performedThe device is arranged on a leveling frame 8, the leveling frame is arranged on a rotary table 6, a leveling angle meter 7 and a reference plane mirror 1 are leveled, a device 9 to be measured is arranged on the reference plane mirror 1, the device 9 to be measured is manually adjusted, the structure leaning surface clings to the leaning surface plane mirror 3, and the azimuth value theta of the output optical axis of the device to be measured is measured by utilizing the angle meter 7 1 . The device under test 9 is removed and the turret is rotated clockwise by θ 2 The plane mirror of the leaning surface can be measured by the angle measuring instrument; measuring azimuth value theta of the plane mirror of the leaning surface at the moment 3 The horizontal azimuth included angle theta between the structural leaning surface normal line of the equipment to be tested and the output optical axis of the equipment to be tested a ＝θ 2 +(θ 3 -θ 1 )。
Claims (4)
1. A high-precision angle measurement method for a virtual optical axis and a structural leaning surface is based on a high-precision angle measurement system, and the system comprises a calibration device, an angle meter and a turntable; the calibration device comprises a reference plane mirror, a leaning plane mirror and a calibration seat; the reference plane mirror and the leaning plane mirror are respectively arranged on the two vertically adjacent first vertical surfaces and the second vertical surfaces of the calibration seat through respective adjusting frames, so that the reference plane mirror and the leaning plane mirror can be adjusted to be mutually vertical; the first vertical face and the second vertical face of the calibration seat are open at opposite sides, the calibration seat is also provided with a third face vertically adjacent to the first vertical face and the second vertical face, and the middle part of the third face is provided with a light through hole;
the angle meter is in the same level with the reference plane mirror and the leaning plane mirror, and calibration and angle measurement are realized through superposition of an observation optical axis;
when in calibration, the third surface is used as the bottom surface of the calibration seat to be horizontally placed on the turntable;
when the angle is measured, the first elevation is used as the bottom surface of the calibration seat to be horizontally placed on the turntable, the reference plane mirror is used as the installation bottom surface of the equipment to be measured, the leaning plane mirror is used for leading out the normal direction of the leaning surface of the structure of the equipment to be measured, and the output optical axis of the equipment to be measured is measured through the light transmission hole;
the method is characterized in that: firstly, calibrating a reference plane mirror and a leaning plane mirror by using a goniometer and a rotary table to enable the reference plane mirror and the leaning plane mirror to be mutually vertical; then use the backrestThe surface plane mirror is led out of the structure of the equipment to be tested and is close to the surface normal direction, and the reference plane mirror is used as the installation bottom surface of the equipment to be tested; by using the angle measuring instrument and the rotary table, the horizontal azimuth included angle theta between the normal of the structure leaning surface of the device to be measured and the output optical axis is measured a And converting into an included angle between the optical axis of the plane mirror of the measurement leaning surface and the output optical axis of the equipment to be measured.
2. The high-precision angle measurement method for the virtual optical axis and the structural abutment surface according to claim 1, comprising the following steps:
1) Leveling the goniometer, and then adjusting the reference plane mirror so that the optical axis of the goniometer coincides with the optical axis of the reference plane mirror;
2) The method comprises the steps of using a reference plane mirror as a reference, and using a turntable and a goniometer to mark a leaning plane mirror which is vertical to the turntable on a horizontal plane;
3) Fixing the relative angle relation between the reference plane mirror and the leaning plane mirror;
4) The reference plane mirror is horizontally placed and leveled, the equipment to be measured is placed on the reference plane mirror, the leaning surface of the structure of the equipment to be measured is tightly clung to the leaning surface plane mirror, and the azimuth value theta of the output optical axis of the equipment to be measured is measured by utilizing the goniometer 1 ；
5) Removing the device to be tested, and rotating the rotary table clockwise by theta 2 The plane mirror of the leaning surface can be measured by the angle measuring instrument; measuring azimuth value theta of the plane mirror of the leaning surface at the moment 3 The horizontal azimuth included angle theta between the normal of the structure leaning surface of the device to be tested and the output optical axis a ＝θ 2 +(θ 3 -θ 1 )。
3. The high-precision angle measurement method for the virtual optical axis and the structural abutment surface according to claim 2, wherein the method comprises the following steps of: in the step 1), the goniometer is leveled, and the error between the main optical axis of the goniometer and the horizontal plane is within 8', namely, when the included angle between the main optical axis of the goniometer and the horizontal plane is increased by 8', the perpendicularity error between the two planes is increased by not more than 1 '.
4. A high precision angle measurement method for virtual optical axis and structural abutment as defined in claim 3, wherein: the level adjustment precision of the reference plane mirror in the step 4) is controlled within 30'.
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| CN108253947B (en) * | 2018-03-22 | 2024-01-05 | 中国科学院西安光学精密机械研究所 | High-precision leaning surface reference transmission device convenient to adjust |
| CN110749279B (en) * | 2018-07-23 | 2021-10-26 | 鸿翌科技有限公司 | Measuring mechanism |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW199204B (en) * | 1991-10-11 | 1993-02-01 | Ind Tech Res Inst | Apparatus and process measuring the angle of an optical axis |
| JPH10242248A (en) * | 1997-02-26 | 1998-09-11 | Canon Inc | Method and apparatus for measuring position of moving stage |
| JPH11237305A (en) * | 1998-02-23 | 1999-08-31 | Mitsubishi Electric Corp | Detecting apparatus for deviation of optical axis |
| JP2003202476A (en) * | 2002-01-07 | 2003-07-18 | Fujitsu Ltd | Optical axis adjusting method and optical axis adjusting device for wavelength dispersion compensator, and assembling method for the wavelength dispersion compensator |
| CN1570555A (en) * | 2003-07-15 | 2005-01-26 | 明基电通股份有限公司 | Micro mirror detecting method and device |
| JP2006066745A (en) * | 2004-08-27 | 2006-03-09 | Ricoh Co Ltd | Method of measuring radiation optical axis deviation angle, and device thereof |
| JP2006266904A (en) * | 2005-03-24 | 2006-10-05 | Keisoku Giken Kk | Surveying method, and target for survey apparatus used therefor |
| WO2007140915A1 (en) * | 2006-06-02 | 2007-12-13 | Innovent E.V. | Method and apparatus for determining deviations in shape and undulation in continuous freeform surfaces |
| CN101960338A (en) * | 2008-02-27 | 2011-01-26 | Asml荷兰有限公司 | The device of optical element, the lithographic equipment that comprises this optical element, device making method and manufacturing |
| CN102060105A (en) * | 2010-11-23 | 2011-05-18 | 中国兵器工业第二〇五研究所 | Course calibration device with tilt compensation |
| CN102538713A (en) * | 2011-12-19 | 2012-07-04 | 北京卫星环境工程研究所 | System for measuring final-assembly high-precision angle of spacecraft |
| CN202471022U (en) * | 2012-03-06 | 2012-10-03 | 中国科学院西安光学精密机械研究所 | Measuring device of flatness on a large scale |
| JP2015175603A (en) * | 2014-03-12 | 2015-10-05 | 株式会社ミツトヨ | Calibration method for reference mirror surface shape of interferometer |
| CN105698712A (en) * | 2016-03-23 | 2016-06-22 | 西安科技大学 | Two-degree freedom measurement apparatus and method based on plane mirror imaging |
| CN106017404A (en) * | 2016-06-22 | 2016-10-12 | 中国科学院西安光学精密机械研究所 | Detection device and method for included angle between visual axis of camera and optical axis of auxiliary laser in image pickup measurement |
| CN106546413A (en) * | 2016-10-19 | 2017-03-29 | 中国科学院西安光学精密机械研究所 | Optical transmission equipment instrument constant calibration system and calibration method thereof |
| CN106989699A (en) * | 2017-05-16 | 2017-07-28 | 广东省计量科学研究院（华南国家计量测试中心） | Laser alignment instrument calibrator (-ter) unit and the method by its error of indication for measuring laser alignment instrument |
| CN207197460U (en) * | 2017-09-07 | 2018-04-06 | 中国科学院西安光学精密机械研究所 | High-precision angle measurement system for virtual optical axis and structure leaning surface |
-
2017
- 2017-09-07 CN CN201710800838.2A patent/CN107607061B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW199204B (en) * | 1991-10-11 | 1993-02-01 | Ind Tech Res Inst | Apparatus and process measuring the angle of an optical axis |
| JPH10242248A (en) * | 1997-02-26 | 1998-09-11 | Canon Inc | Method and apparatus for measuring position of moving stage |
| JPH11237305A (en) * | 1998-02-23 | 1999-08-31 | Mitsubishi Electric Corp | Detecting apparatus for deviation of optical axis |
| JP2003202476A (en) * | 2002-01-07 | 2003-07-18 | Fujitsu Ltd | Optical axis adjusting method and optical axis adjusting device for wavelength dispersion compensator, and assembling method for the wavelength dispersion compensator |
| CN1570555A (en) * | 2003-07-15 | 2005-01-26 | 明基电通股份有限公司 | Micro mirror detecting method and device |
| JP2006066745A (en) * | 2004-08-27 | 2006-03-09 | Ricoh Co Ltd | Method of measuring radiation optical axis deviation angle, and device thereof |
| JP2006266904A (en) * | 2005-03-24 | 2006-10-05 | Keisoku Giken Kk | Surveying method, and target for survey apparatus used therefor |
| WO2007140915A1 (en) * | 2006-06-02 | 2007-12-13 | Innovent E.V. | Method and apparatus for determining deviations in shape and undulation in continuous freeform surfaces |
| CN101960338A (en) * | 2008-02-27 | 2011-01-26 | Asml荷兰有限公司 | The device of optical element, the lithographic equipment that comprises this optical element, device making method and manufacturing |
| CN102060105A (en) * | 2010-11-23 | 2011-05-18 | 中国兵器工业第二〇五研究所 | Course calibration device with tilt compensation |
| CN102538713A (en) * | 2011-12-19 | 2012-07-04 | 北京卫星环境工程研究所 | System for measuring final-assembly high-precision angle of spacecraft |
| CN202471022U (en) * | 2012-03-06 | 2012-10-03 | 中国科学院西安光学精密机械研究所 | Measuring device of flatness on a large scale |
| JP2015175603A (en) * | 2014-03-12 | 2015-10-05 | 株式会社ミツトヨ | Calibration method for reference mirror surface shape of interferometer |
| CN105698712A (en) * | 2016-03-23 | 2016-06-22 | 西安科技大学 | Two-degree freedom measurement apparatus and method based on plane mirror imaging |
| CN106017404A (en) * | 2016-06-22 | 2016-10-12 | 中国科学院西安光学精密机械研究所 | Detection device and method for included angle between visual axis of camera and optical axis of auxiliary laser in image pickup measurement |
| CN106546413A (en) * | 2016-10-19 | 2017-03-29 | 中国科学院西安光学精密机械研究所 | Optical transmission equipment instrument constant calibration system and calibration method thereof |
| CN106989699A (en) * | 2017-05-16 | 2017-07-28 | 广东省计量科学研究院（华南国家计量测试中心） | Laser alignment instrument calibrator (-ter) unit and the method by its error of indication for measuring laser alignment instrument |
| CN207197460U (en) * | 2017-09-07 | 2018-04-06 | 中国科学院西安光学精密机械研究所 | High-precision angle measurement system for virtual optical axis and structure leaning surface |
Non-Patent Citations (1)
| Title |
|---|
| 利用偏振光实现空间方位角的快速测量;陆卫国等;光学精密工程;第21卷(第3期);539-545 * |
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