CN207197460U - High-precision angle measurement system for virtual optical axis and structure leaning surface - Google Patents

Abstract

The utility model proposes a high-precision angle measurement system for the virtual optical axis and the structure contact surface, which can realize high-precision measurement of the angles of the reflective surface and the non-reflective surface. The high-precision angle measurement system includes a calibration device, a goniometer and a turntable; wherein the calibration device includes a reference plane mirror, a surface-facing mirror and a calibration base; A vertically adjacent first facade and a second facade, the calibration seat also has a third surface vertically adjacent to the first facade and the second facade, and a light hole is arranged in the middle of the third surface; in angle measurement When the first elevation is used as the bottom surface of the calibration seat, it is placed flat on the turntable, the reference plane mirror is used as the installation bottom surface of the equipment to be tested, the plane mirror is used to draw the normal direction of the structure of the equipment to be tested, and the output of the equipment to be tested The optical axis is measured through the aperture.

Description

A high-precision angle measurement system for virtual optical axis and structure contact surface

technical field

The utility model relates to a system for measuring the angle of the optical axis and the surface of the structure, which is especially suitable for optical equipment with small external dimensions and high measurement accuracy.

Background technique

The instrument whose structure is led out by facing the target reference plane has the advantages of very compact optical and mechanical system structure, small size, and no electronic control system. However, the convenient, stable and accurate measurement of its structural contact surface and output virtual optical axis has the problem of low measurement accuracy due to the measurement of reflective surfaces and non-reflective surfaces.

At present, the commonly used high-precision angle measurement methods mainly include non-contact measurement and contact measurement.

There are many non-contact angle measurement methods with high precision, and the autocollimator is mainly used for measurement. The optical fiber of the autocollimator is made by the principle that the parallel light is reflected by the mirror with an inclination angle and then shifted to the zero mark. However, it is required that the measurement plane must be reflective, and there is nothing to do with the surface of the non-reflective structure.

High-precision contact measurement mainly relies on three-coordinate instrument measurement. The working principle of the three-coordinate measuring machine is that within the three-dimensional measurable space, it can detect the workpiece according to the side head system, return the point data on the surface of the workpiece, and calculate various geometric shapes, dimensions and measurement capabilities through the three-coordinate software system.

Any shape is composed of spatial points, and all geometric measurements come down to the measurement of spatial points. Put the measured part into the measurement space it allows, and accurately measure the data processing of the three coordinate positions of the point on the surface of the measured part in space. , the coordinate values of these points are processed by computer data, and fitted to form measurement elements, such as circles, spheres, cylinders, cones, curved surfaces, etc., and their shape, position tolerance and other geometric quantity data are obtained by data calculation methods.

The smaller the surface of the part in three-coordinate measurement, the greater the relative angle error, which cannot meet the requirements of high-precision angle measurement, and its measurement needs to contact the surface of the part, which is not suitable for the normal measurement of rectangular prisms.

Utility model content

In order to realize the high-precision measurement of the angle of the reflective surface and the non-reflective surface, the utility model proposes a high-precision angle measurement system for the virtual optical axis and the surface of the structure.

The technical scheme of the utility model is as follows:

The high-precision angle measurement system includes a calibration device, a goniometer and a turntable; wherein the calibration device includes a reference plane mirror, a surface-facing mirror and a calibration base; A vertically adjacent first facade and second facade, so that the reference plane mirror and the surface mirror can be adjusted to be perpendicular to each other; the opposite sides of the first facade and the second facade of the calibration base are open, and the calibration base also has a The third surface, which is vertically adjacent to the first facade and the second facade, is provided with a light hole in the middle of the third surface; the goniometer is at the same level as the reference plane mirror and the surface plane mirror, and is realized by coincidence of the observation optical axes Calibration and angle measurement; during calibration, the third surface is placed flat on the turntable as the bottom surface of the calibration seat; during angle measurement, the first elevation is placed flat on the turntable as the bottom surface of the calibration seat, and the reference plane mirror is used as The installation bottom surface of the device under test, and the plane mirror is used to lead the normal direction of the structure of the device under test, and the output optical axis of the device under test is measured through the light hole.

On the basis of the above scheme, the utility model has been further optimized as follows:

Both the adjustment frame of the reference plane mirror and the adjustment frame of the surface plane mirror have a locking function to lock the adjustment position.

The high-precision angle measurement system also includes a leveling frame, through which the calibration device is leveled and installed on the turntable during angle measurement.

The mounting surface of the reference flat mirror in contact with the device under test is coated with a reflective film, and the surface of the back plane mirror in contact with the device under test is coated with a reflective film.

The thickness of the reference plane mirror and the surface plane mirror is not less than 6mm.

A method for measuring the above-mentioned high-precision angle measurement system. First, a goniometer and a turntable are used to calibrate the reference plane mirror and the surface plane mirror so that they are perpendicular to each other; As the installation bottom surface of the equipment under test; use the goniometer and turntable to measure the horizontal azimuth angle θ _a between the normal line of the structure of the equipment under test and the output optical axis to measure the optical axis of the surface mirror and the equipment under test The included angle of the output optical axis of . Specifically include the following steps:

1) Level the goniometer, and then adjust the reference plane mirror so that the optical axis of the goniometer coincides with the optical axis of the reference plane mirror;

2) With the reference plane mirror as the reference, use the turntable and goniometer to calibrate the plane mirror perpendicular to it on the horizontal plane;

3) The relative angle relationship between the fixed reference plane mirror and the surface plane mirror;

4) Place the reference plane mirror horizontally and level it, place the equipment to be tested on the reference plane mirror so that the structure of the equipment to be tested is close to the surface of the plane mirror (the orientation of the structure is drawn out through the plane mirror), and measured with the goniometer 7 The azimuth value θ ₁ of the output optical axis of the device under test;

5) Remove the equipment to be tested, turn the turntable clockwise by θ ₂ , so that the orientation of the surface mirror can be measured by the goniometer; measure the orientation value θ ₃ of the surface mirror at this time, then the structure of the equipment under test is normal to the surface The horizontal azimuth angle of the output optical axis θ _a =θ ₂ +(θ ₃ −θ ₁ ).

In the above step 1), level the goniometer so that the error between the main optical axis of the goniometer and the horizontal plane is within 8', that is, every time the angle between the main optical axis of the goniometer and the horizontal plane increases by 8', the two planes The squareness error increases by no more than 1″.

The horizontal adjustment accuracy of the reference plane mirror in the above step 4) can be controlled within 30″.

The beneficial effects of the utility model are:

1. The utility model measures the angular relationship between the virtual optical axis of the equipment and the plane of the equipment, with stable measurement and high precision.

2. The utility model does not have high requirements on the plane mirror and the adjustment structure, and the operation is simple and convenient, and the functions are independent.

3. The utility model does not involve any electric control components, and is simple and reliable.

4. Especially for smaller devices to be tested, the utility model has higher precision than the traditional measurement scheme.

Description of drawings

Figure 1 Schematic diagram of the angle constant of the device under test.

Figure 2 Schematic diagram of the calibration device.

Fig. 3 is the verticality calibration process of the utility model.

Fig. 4 is a front view of the process of measuring the equipment under test of the utility model.

Fig. 5 is a top view of the process of measuring the leaning plane of the utility model.

Detailed ways

Figure 1 is a schematic diagram of the angle constant of the device under test. The device reads the azimuth angle of the target surface through the normal of the structure, and transmits the read azimuth to the external device through the output optical axis, wherein the normal of the structure and the surface The horizontal azimuth angle of the output optical axis is θ _a , which requires accurate measurement in order to convert the azimuth angle of the target surface to the output optical axis.

Fig. 2 shows a calibration device of the present invention. It consists of five parts, which are respectively a reference plane mirror 1, a reference plane mirror adjustment frame 2, a surface-receiving plane mirror 3, a surface-receiving plane mirror adjustment frame 4 and a calibration seat 5. The angle adjustment of the reference plane mirror 1 is carried out by the reference plane mirror adjustment frame 2, and the angle adjustment of the back plane mirror 3 is carried out by the back plane mirror adjustment frame 4, and the two adjustment frames have self-locking functions respectively. When calibrating, place it on the turntable with the calibration installation surface as the bottom surface; when measuring, place the debugging installation surface parallel to the plane of the turntable, and the output optical axis of the device under test is measured through the light hole.

Fig. 3 is the verticality calibration process using the calibration device shown in Fig. 2, through which the reference plane mirror 1 and the surface plane mirror 3 can be adjusted to be perpendicular to each other. First, the goniometer 7 is leveled, the calibration plane mirror is placed on the turntable 6 with the calibration installation surface as the bottom surface, and the reference plane mirror adjustment frame 2 is adjusted so that the optical axis of the goniometer 7 coincides with the optical axis of the reference plane mirror 1; the goniometer 7 does not move, the turntable rotates 90° horizontally, adjust the surface mirror adjustment frame 4 so that the optical axis of the goniometer 7 coincides with the surface mirror 3 optical axis; lock the reference plane mirror adjustment frame 2 and the surface mirror adjustment frame 4, and complete Vertical calibration.

FIG. 4 is a schematic diagram of the process of using the calibration device shown in FIG. 2 to measure the device under test 9. Through this process, the angle between the normal line of the structure of the device under test and the output optical axis can be measured. details as follows:

First, place the calibration device on the leveling frame 8, place the leveling frame on the turntable 6, level the goniometer 7 and the reference plane mirror 1, put the device under test 9 on the reference plane mirror 1, and manually adjust the device under test 9. Make the surface of the structure close to the plane mirror 3, and use the goniometer 7 to measure the azimuth value θ ₁ of the output optical axis of the device under test. Remove the equipment to be tested 9, turn the turntable clockwise θ ₂ , so that the surface mirror can be measured by the goniometer azimuth; measure the orientation value θ ₃ of the surface mirror at this time, then the structure of the equipment to be tested is normal to the surface The horizontal azimuth angle θ _a =θ ₂ +(θ ₃ -θ ₁ ) of the output optical axis of the measuring device.

Claims (5)

1. A kind of 1. High-precision angle measuring system that face is leaned on for vignette axle and structure, it is characterised in that：Including caliberating device, survey Angle instrument and turntable；Wherein caliberating device includes datum plane mirror, by facial plane mirror and demarcation seat；The datum plane mirror, by face Level crossing is respectively arranged in the first facade, the second facade of two perpendicular abutments of demarcation seat by respective adjusting bracket so that Datum plane mirror and being adjusted to by facial plane mirror is mutually perpendicular to；The first facade, the opposite of the second facade for demarcating seat are equal Open wide, demarcation seat also has the 3rd face with the first facade, the equal perpendicular abutment of the second facade, and the 3rd Middle face is provided with thang-kng Hole；

   The angular instrument and datum plane mirror and be in same level by facial plane mirror, by observe optical axis coincidence realize demarcation with Angular surveying；

   In demarcation, the 3rd face is lain against on turntable as the bottom surface of demarcation seat；

   In angular surveying, first facade is lain against on turntable as the bottom surface of demarcation seat, and datum plane mirror is as to be measured The installation bottom surface of equipment, it is used to draw normal direction of the Devices to test structure by face, the output light of Devices to test by facial plane mirror Axle is measured by the light hole.
2. 2. the High-precision angle measuring system according to claim 1 that face is leaned on for vignette axle and structure, it is characterised in that： The adjusting bracket of datum plane mirror and adjusting bracket by facial plane mirror are respectively provided with locking function, with lock adjustment position.
3. 3. the High-precision angle measuring system according to claim 1 that face is leaned on for vignette axle and structure, it is characterised in that： This is used for vignette axle and structure also includes leveling lugs, in angular surveying, the demarcation by the High-precision angle measuring system in face Device is installed on turntable by the leveling lugs leveling.
4. 4. the High-precision angle measuring system according to claim 1 that face is leaned on for vignette axle and structure, it is characterised in that： The mounting surface plating reflective membrane that the datum plane mirror contacts with Devices to test, is plated by what facial plane mirror contacted with Devices to test by face Reflective membrane.
5. 5. the High-precision angle measuring system according to claim 1 that face is leaned on for vignette axle and structure, it is characterised in that： The datum plane mirror and thickness by facial plane mirror are not less than 6mm.