CN103486998B - Autocollimation indication error calibration method - Google Patents

Autocollimation indication error calibration method Download PDF

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Publication number
CN103486998B
CN103486998B CN201310430148.4A CN201310430148A CN103486998B CN 103486998 B CN103486998 B CN 103486998B CN 201310430148 A CN201310430148 A CN 201310430148A CN 103486998 B CN103486998 B CN 103486998B
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Prior art keywords
autocollimator
error
tested
indication
polygon
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CN103486998A (en
Inventor
田留德
赵建科
赵怀学
潘亮
段亚轩
龙江波
段炯
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The present invention provides a kind of autocollimation indication error calibrating installation and calibration method, and this device, including vertical sleeping turntable, polygon, adjusting pole, standard autocollimator;Polygon is connected with vertical sleeping turntable by adjusting pole, the standard autocollimator optical axis is perpendicular to polygon working face and is directed at polygon working face center, the tested autocollimator optical axis is perpendicular to another working face of polygon, and it being directed at polygon working face center, the precision of the tested autocollimator of ratio of precision of standard autocollimator is the most three times higher.The method, comprises the following steps: assemble instrument;Toward surveying;Anti-survey;Take toward surveying and the anti-mean value surveyed.The present invention utilizes the common equipment in laboratory to achieve the calibrating of Two-Axis Autocollimator, and simple in construction is with low cost;Have only to a set of equipment, it is possible to survey the error of 1 grade, 2 grades, 3 grades autocollimator indicating value;Have only to a set of equipment, it is possible to calibrated horizontal angle and the angular error of vertical angle.

Description

Autocollimation indication error calibration method
Technical field
The error of indication calibration of autocollimator belongs to accuracy test and the precision calibration field of autocollimator, is specifically related to autocollimation indication error calibrating installation and calibration method.
Background technology
Autocollimator is a kind of precision measuring instrument for small angle measurement.It with multiteeth indexing table with the use of, may be used for measuring polygon, angle block gauge angularly measurer.With plane mirror with the use of, can be used for measuring linearity, flatness, the depth of parallelism, perpendicularity and the measurement key element of other relative position relations.It is factory inspection department and the measuring equipment of metrology and measurement department indispensability.
As a metrology and measurement instrument, it is necessary to be performed as often as calibrating and test, to guarantee accuracy and the reliability of its indicating value.The error of indication is the most important technical indicator of autocollimator, is the embodiment of autocollimator precision, therefore, the error of indication be autocollimator calibrating and period verify must survey project.At present, the calibrating foundation of autocollimation indication error is JJG202 2007 " autocollimator vertification regulation ".Code specifies: for 2 grades, 3 grades of autocollimation indication error be with 3 etc. or 0 grade of gauge block measurement on low-angle calibrating instrument, its calibrating principle is to utilize gauge block and low-angle calibrating instrument to produce the standard angle needed, by test examination instrument, standard angle is measured, be this by the cautious error of indication by the difference of the measured value of test examination instrument Yu standard angle.Requiring respectively examined and determine tested autocollimator by cautious successively according to vertification regulation, the error of indication of autocollimator is to determine with the difference of maximal and minmal value.The calibrating installation of 1 grade of autocollimation indication error is laser Small angle measuring instrument, its calibrating principle is to utilize panoramic table to produce a standard angle, tested autocollimator is to the speculum autocollimatic on panoramic table and measures the anglec of rotation, standard angle is measured by laser Small angle measuring instrument and tested autocollimator simultaneously, the measured value of laser Small angle measuring instrument is the tested autocollimator error of indication at this point as true value, the measured value of tested autocollimator with the difference of the measured value of laser Small angle measuring instrument.The error of indication of autocollimator is to determine with the difference of maximal and minmal value in the range of whole measurement.
The error of indication calibration method that JJG202 2007 " autocollimator vertification regulation " specifies has the following disadvantages:
(1) low-angle calibrating instrument and laser Small angle measuring instrument are expensive, function is more single, it is not the most extensive for using, therefore, only minority measurement verification department just buys this kind equipment, detection department for company, it is contemplated that fund and cost performance problem, typically will not buy this price higher and use less equipment;
(2) error of indication in one direction of autocollimator all can only be examined and determine by the error of indication of low-angle calibrating instrument and laser Small angle measuring instrument calibrating autocollimator.Low-angle calibrating instrument can only calibrate the angular error of autocollimator vertical direction as vertical angle standard, and it cannot calibrated horizontal angle;Laser Small angle measuring instrument can only calibrate the angular error of autocollimator horizontal direction as horizontal angle standard, and it cannot calibrate vertical angle.
Due to above 2 problems cause autocollimator can not in time, examine and determine efficiently.
Summary of the invention
Present invention aim at: a kind of autocollimation indication error calibrating installation and calibration method are provided, solve prior art and utilize low-angle calibrating instrument and laser low-angle calibration error of indication cost high, and the technical problem of two dimension calibrating cannot be realized.
The technology of the present invention solution is:
Autocollimation indication error calibrating installation, it is characterized in that and includes vertical sleeping turntable, polygon, adjusting pole, standard autocollimator;Polygon is connected with vertical sleeping turntable by adjusting pole, the each working face of polygon is parallel with the axis of rotation of vertical sleeping turntable or controls in error range, the standard autocollimator optical axis is perpendicular to polygon working face and is directed at polygon working face center, standard autocollimator graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, the tested autocollimator optical axis is perpendicular to another working face of polygon, and it is directed at polygon working face center, tested autocollimator graticle vertical line should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator is the most three times higher.
Above-mentioned autocollimation indication error calibrating installation also includes that vibration-isolating platform, whole autocollimation indication error calibrating installation are positioned on vibration-isolating platform.
The working face of above-mentioned standard autocollimator alignment is adjacent working face with the working face that tested autocollimator is directed at.
Above-mentioned standard autocollimator and tested autocollimator are as far as possible near the working face of polygon.
Autocollimation indication error calibration method, it is characterized in that and comprises the following steps:
1] instrument is assembled:
1.1] polygon is arranged on vertical sleeping turntable, the axis of regulation polygon overlaps with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, the depth of parallelism≤10 of the axis of each working face of polygon and vertical sleeping rotation of rotary table axle ", vertical sleeping turntable is in vertical state or horizontal state;
1.2] installing standard autocollimator, make the standard autocollimator optical axis be perpendicular to polygon working face and be directed at polygon working face center, standard autocollimator graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c of record standard autocollimator0
1.3] tested autocollimator is installed, the tested autocollimator optical axis is made to be perpendicular to another working face of polygon and be directed at polygon working face center, tested autocollimator graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator0
2] toward surveying: choose x, x in the range of the measurement of tested autocollimator2... xnN is subject to cautious altogether, according to by cautious order, rotates and founds sleeping turntable, makes standard autocollimator produce n standard angle c1, c2, c3..., cn, tested autocollimator reading is a1, a2, a3... an
3] instead survey: contrary with toward survey order, gradually measure, obtain standard autocollimator and produce n standard angle c 'n... c '1, and the reading a ' of tested autocollimatorn..., a '1
4] by cautious error of indication βi, calculate by following equation:
β 1 = ( a ‾ 1 - a 0 ) - ( c ‾ 1 - c 0 ) - - - ( 1 )
β 2 = ( a ‾ 2 - a 0 ) - ( c ‾ 2 - c 0 ) - - - ( 2 )
β n = ( a ‾ n - a 0 ) - ( c ‾ n - c 0 ) - - - ( 3 )
In formula:By cautious aiWith a 'iMean value;
By cautious ciWith c 'iMean value;
βiBy the cautious error of indication;
Take β1~βnMiddle maximum is as error of indication w of tested autocollimator1
Step 1.1] in, when vertical sleeping turntable is in vertical state, and now, autocollimation indication error calibration method also includes step 5], make vertical sleeping turntable be in horizontal state, repeat step 2]-4], it is thus achieved that error of indication w of tested autocollimator2, take w1And w2Middle maximum is as the final error of indication;When vertical sleeping turntable is in horizontal state, and now, autocollimation indication error calibration method also includes step 5], make vertical sleeping turntable be in vertical state, repeat step 2]-4], it is thus achieved that error of indication w of tested autocollimator2, take w1And w2Middle maximum is as the final error of indication.
The method have the advantages that:
(1) present invention utilizes the common equipment in laboratory to achieve the calibrating of Two-Axis Autocollimator, and simple in construction is with low cost.
(2) a set of equipment is had only to, it is possible to survey the error of 1 grade, 2 grades, 3 grades autocollimator indicating value
(3) a set of equipment is had only to, it is possible to calibrated horizontal angle and the angular error of vertical angle.
Accompanying drawing explanation
The schematic diagram of autocollimation indication error calibrating installation when Fig. 1 is to measure horizontal angle;
The schematic diagram of autocollimation indication error calibrating installation when Fig. 2 is to measure vertical angle;
Fig. 3 is distributed in " field " type by cautious.
Detailed description of the invention
Autocollimation indication error calibrating installation, as depicted in figs. 1 and 2, including vertical sleeping turntable 1, polygon 2, adjusting pole 3, standard autocollimator 4;
Polygon 2 is connected with vertical sleeping turntable 1 by adjusting pole 3, make each working face of polygon 2 parallel with the axis of rotation of vertical sleeping turntable 1 by regulation adjusting pole 3 or control in error range, standard autocollimator 4 and tested autocollimator 5 can be to certain working face autocollimatics of polygon, standard autocollimator 4 optical axis is perpendicular to polygon working face and is directed at polygon working face center, standard autocollimator 4 graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, tested autocollimator 5 optical axis is perpendicular to another working face of polygon, and it is directed at polygon working face center, tested autocollimator 5 graticle vertical line should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator 4 is the most three times higher.
Standard autocollimator 4 and tested autocollimator 5 can be to the same working face autocollimatics of polygon, can also be to different operating face autocollimatic, for reducing airflow influence, the working face that the working face of standard autocollimator 4 alignment is directed at tested autocollimator 5 is adjacent working face.
Standard autocollimator 4 and tested autocollimator 5 should be close proximity to polygons 2, to reduce the air-flow impact on measurement result.
Whole autocollimation indication error calibrating installation is placed on a vibration-isolating platform, to reduce the vibrations impact on measurement result.
The vertical major function crouching turntable 1 is carrying adjusting pole 3 and polygon 2, and also and standard autocollimator 4 coordinates generation to examine and determine the standard angle that autocollimator needs to found sleeping turntable 1 by rotation.Secondly, make vertical sleeping turntable 1 work in vertical and horizontal two states respectively, horizontal angle and the vertical angle of tested autocollimator can be calibrated respectively.When measuring horizontal angle, when autocollimation indication error calibrating installation schematic diagram is as it is shown in figure 1, measure vertical angle, autocollimation indication error calibrating installation schematic diagram is as shown in Figure 2.
The function of polygon 2 is to transmit the measurement target of equal angular for standard autocollimator 4 and tested autocollimator.
Adjusting pole 3 is a governor motion, can ensure that each working face of polygon 2 is parallel with the axis of rotation of vertical sleeping turntable 1 or controls in certain error range by regulation adjusting pole, it is ensured that calibration accuracy.
Standard autocollimator 4 is the nucleus equipment of this device, and it provides the true value of vertical sleeping turntable 1 anglec of rotation.Standard autocollimator 4 herein can be replaced with other high-precision angle test equipment, but it must possess and has coordinated the accurate measurement of vertical sleeping turntable 1 anglec of rotation with polygon 2.
Tested autocollimator 5 is the autocollimator being calibrated, and is the object being calibrated and testing.
Autocollimation indication error calibrating is roughly divided into the calibrating of the horizontal angle error of indication and the vertical angle error of indication examines and determine two processes, and testing procedure is identical, specific as follows:
1] instrument is assembled:
1.1] as shown in Figure 1, polygon (2) is arranged on vertical sleeping turntable (1), the axis of regulation polygon overlaps with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, the depth of parallelism≤10 of the axis of each working face of polygon and vertical sleeping rotation of rotary table axle ", vertical sleeping turntable is in horizontal state;
1.2] standard autocollimator (4) is installed, standard autocollimator (4) optical axis is made to be perpendicular to polygon working face and be directed at polygon working face center, standard autocollimator (4) graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c0 of record standard autocollimator (4);
Tested autocollimator (5) 1.3] is installed, tested autocollimator (5) optical axis is made to be perpendicular to another working face of polygon and be directed at polygon working face center, tested autocollimator (5) graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator (5)0
2] toward surveying: choose x in the range of the measurement of tested autocollimator1, x2..., xnN is subject to cautious altogether, such as Fig. 3, by cautious in three horizontal line distributions in " field " type, cover the full filed of tested autocollimator, and the sampling interval can the most arbitrarily select;According to by cautious order, rotate vertical sleeping turntable, make standard autocollimator produce n standard angle c1, c2, c3..., cn, tested autocollimator reading is a1, a2, a3... an
3] instead survey: contrary with toward survey order, gradually measure, obtain standard autocollimator and produce n standard angle c 'n... c '1, and the reading a ' of tested autocollimatorn..., a '1
4] by cautious error of indication βi, calculate by following equation:
β 1 = ( a ‾ 1 - a 0 ) - ( c ‾ 1 - c 0 ) - - - ( 1 )
β 2 = ( a ‾ 2 - a 0 ) - ( c ‾ 2 - c 0 ) - - - ( 2 )
β n = ( a ‾ n - a 0 ) - ( c ‾ n - c 0 ) - - - ( 3 )
In formula:By cautious aiWith a 'iMean value;
By cautious ciWith c 'iMean value;
βiBy the cautious error of indication;
Take β1~βnMiddle maximum is as error of indication w of tested autocollimator1
5] press Fig. 2, make vertical sleeping turntable be in vertical state, repeat step 2,3,4, wherein, by cautious in three vertical lines distributions in " field " type, try to achieve error of indication w in tested autocollimator another one direction2, take w1And w2Maximum as the final result of tested autocollimator.
Above method also has following deformation.
Step 1] in, make vertical sleeping turntable first be in vertical state, step 5] in make vertical sleeping turntable be in horizontal state.
The present invention utilizes the common equipment in laboratory to achieve the calibrating of Two-Axis Autocollimator, and simple in construction is simple to operate, with low cost.Have only to a set of equipment, it is possible to survey the error of 1 grade, 2 grades, 3 grades autocollimator indicating value.Have only to a set of equipment, it is possible to calibrated horizontal angle and the angular error of vertical angle.

Claims (2)

1. autocollimation indication error calibration method, it is characterised in that: comprise the following steps:
1] instrument is assembled:
1.1] polygon (2) is arranged on vertical sleeping turntable (1), the axis of regulation polygon overlaps with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, the depth of parallelism≤10 of the axis of each working face of polygon and vertical sleeping rotation of rotary table axle ", vertical sleeping turntable is in vertical state or horizontal state;
1.2] standard autocollimator (4) is installed, standard autocollimator (4) optical axis is made to be perpendicular to polygon working face and be directed at polygon working face center, standard autocollimator (4) graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c of record standard autocollimator (4)0
Tested autocollimator (5) 1.3] is installed, tested autocollimator (5) optical axis is made to be perpendicular to another working face of polygon and be directed at polygon working face center, tested autocollimator (5) graticle vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator (5)0
2] toward surveying: choose x in the range of the measurement of tested autocollimator1, x2... xnN is subject to cautious altogether, according to by cautious order, rotates and founds sleeping turntable, makes standard autocollimator produce n standard angle c1, c2, c3..., cn, tested autocollimator reading is a1, a2, a3... an
3] instead survey: contrary with toward survey order, gradually measure, obtain standard autocollimator and produce n standard angle c 'n... c '1, and the reading a ' of tested autocollimatorn..., a '1
4] by cautious error of indication βi, calculate by following equation:
In formula:By cautious aiAnd ai' mean value;
By cautious ciAnd ci' mean value;
βiBy the cautious error of indication;
Take β1~βnMiddle maximum is as error of indication w of tested autocollimator1
Autocollimation indication error calibration method the most according to claim 1, it is characterized in that: step 1.1] in, when vertical sleeping turntable is in vertical state, now, autocollimation indication error calibration method also includes step 5], make vertical sleeping turntable be in horizontal state, repeat step 2]-4], it is thus achieved that error of indication w of tested autocollimator2, take w1And w2Middle maximum is as the final error of indication;When vertical sleeping turntable is in horizontal state, and now, autocollimation indication error calibration method also includes step 5], make vertical sleeping turntable be in vertical state, repeat step 2]-4], it is thus achieved that error of indication w of tested autocollimator2, take w1And w2Middle maximum is as the final error of indication.
CN201310430148.4A 2013-09-18 2013-09-18 Autocollimation indication error calibration method Expired - Fee Related CN103486998B (en)

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