CN203479292U - Autocollimator indicating value error calibration device - Google Patents

Autocollimator indicating value error calibration device Download PDF

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Publication number
CN203479292U
CN203479292U CN201320582650.2U CN201320582650U CN203479292U CN 203479292 U CN203479292 U CN 203479292U CN 201320582650 U CN201320582650 U CN 201320582650U CN 203479292 U CN203479292 U CN 203479292U
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autocollimator
error
vertical
standard
polygon
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田留德
赵建科
赵怀学
潘亮
段亚轩
龙江波
段炯
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The utility model provides an autocollimator indicating value error calibration device, which comprises a vertical and horizontal rotating table, a polygonal prism, an adjusting bracket and a standard autocollimator, wherein the polygonal prism is connected with the vertical and horizontal rotating table through the adjusting bracket, an optical axis of the standard autocollimator is vertical to a working surface of the polygonal prism and is aligned with the center of the working surface of the polygonal prism, an optical axis of a calibrated autocollimator is vertical to another working surface of the polygonal prism and is aligned with the center of the working surface of the polygonal prism, and the precision of the standard autocollimator is at least three times higher than that of the calibrated autocollimator. The autocollimator indicating value error calibration device realizes the calibration of a two-dimensional autocollimator by utilizing common equipment in a laboratory, and has the advantages of simple structure and low cost; indicating value errors of 1-level, 2-level and 3-level autocollimator can be measured with only one set of equipment; and the angle errors of horizontal angles and vertical angles can be calibrated with only one set of equipment.

Description

Autocollimator error of indication calibrating installation
Technical field
The error of indication calibration of autocollimator belongs to accuracy test and the accuracy calibration field of autocollimator, is specifically related to autocollimator error of indication calibrating installation.
Background technology
Autocollimator is a kind of precision measuring instrument for small angle measurement.It and multiteeth indexing table are used in conjunction with, can be for measuring polygon, angle block gauge equal angles measurer.Be used in conjunction with plane mirror, can be used for measuring the measurement key element of linearity, flatness, the depth of parallelism, verticality and other relative position relations.It is the metering outfit of factory inspection department and metrology and measurement department indispensability.
As a metrology and measurement instrument, must examine and determine frequently and test, to guarantee accuracy and the reliability of its indicating value.The error of indication is the most important technical indicator of autocollimator, is the embodiment of autocollimator precision, therefore, the error of indication be autocollimator calibrating and Intermediate Checks must survey project.At present, the calibrating of autocollimator error of indication foundation is JJG202-2007 < < autocollimator vertification regulation > >.Rules regulation: be with 3 etc. or 0 grade of gauge block measurement on low-angle calibrating instrument for 2 grades, the 3 grades autocollimator errors of indication, its calibrating principle is to utilize gauge block and low-angle calibrating instrument to produce the standard angle needing, by test examination instrument, standard angle is measured, by the difference of the measured value of test examination instrument and standard angle, be this and be subject to the cautious error of indication.According to vertification regulation, require successively cautious tested autocollimator to be examined and determine being respectively subject to, the error of indication of autocollimator is to determine with the difference of maximal and minmal value.The calibrating installation of 1 grade of autocollimator error of indication is laser Small angle measuring instrument, its calibrating principle is to utilize panoramic table to produce a standard angle, tested autocollimator is to the catoptron autocollimatic on panoramic table and measure the anglec of rotation, laser Small angle measuring instrument and tested autocollimator are measured standard angle simultaneously, the measured value of laser Small angle measuring instrument is as true value, and the difference of the measured value of the measured value of tested autocollimator and laser Small angle measuring instrument is that tested autocollimator is in the error of indication of this point.The error of indication of autocollimator is to determine with the difference of maximal and minmal value in whole measurement range.
The error of indication calibration method of JJG202-2007 < < autocollimator vertification regulation > > regulation has the following disadvantages:
(1) low-angle calibrating instrument and laser Small angle measuring instrument are expensive, function ratio is more single, it is not very extensive using, therefore, only have minority measurement verification department just to buy this kind equipment, for the detection department of company, consider fund and cost performance problem, generally can not buy this price compared with high and use less equipment;
(2) by the error of indication of low-angle calibrating instrument and laser Small angle measuring instrument calibrating autocollimator, all can only examine and determine the error of indication of a direction of autocollimator.Low-angle calibrating instrument can only be calibrated the angular error of autocollimator vertical direction as vertical angle standard, and it cannot calibrated horizontal angle; Laser Small angle measuring instrument can only be calibrated the angular error of autocollimator horizontal direction as horizontal angle standard, and it cannot calibrate vertical angle.
Due to above 2 problems cause autocollimator can not be in time, examine and determine efficiently.
Summary of the invention
The utility model object is: a kind of autocollimator error of indication calibrating installation is provided, and it is high that solution prior art utilizes low-angle calibrating instrument and laser low-angle to calibrate error of indication cost, and the technical matters that cannot realize two dimension calibrating.
The utility model technical solution is:
Autocollimator error of indication calibrating installation, its special character is: comprise vertical sleeping turntable, polygon, adjusting pole, standard autocollimator, polygon is connected with vertical sleeping turntable by adjusting pole, the axis of rotation of each workplace of polygon and vertical sleeping turntable is parallel or be controlled in error range, the standard autocollimator optical axis is perpendicular to polygon workplace and aim at polygon workplace center, standard autocollimator graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the tested autocollimator optical axis is perpendicular to another workplace of polygon, and aim at polygon workplace center, tested autocollimator graticule vertical line should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator is Senior Three times at least.
Above-mentioned autocollimator error of indication calibrating installation also comprises vibration-isolating platform, and whole autocollimator error of indication calibrating installation is positioned on vibration-isolating platform.
The workplace that the workplace that above-mentioned standard autocollimator is aimed at is aimed at tested autocollimator is adjacent workplace.
The workplace of the close as much as possible polygon of above-mentioned standard autocollimator and tested autocollimator.
Autocollimator error of indication calibration method, comprises the following steps:
1] assembling instrument:
1.1] polygon is arranged on vertical sleeping turntable, regulate the axis of polygon to overlap with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, each workplace of polygon and the depth of parallelism≤10 of founding the axis of sleeping rotation of rotary table axle ", vertical sleeping turntable is in vertical state or horizontal state;
1.2] installation code autocollimator, makes the standard autocollimator optical axis perpendicular to polygon workplace and aims at polygon workplace center, and standard autocollimator graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c of record standard autocollimator 0;
1.3] tested autocollimator is installed, make the tested autocollimator optical axis perpendicular to another workplace of polygon and aim at polygon workplace center, tested autocollimator graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator 0;
2] toward surveying: choose x in the measurement range of tested autocollimator, x 2... x nexamined for n altogether, according to the order of being examined, the vertical sleeping turntable of rotation, makes standard autocollimator produce n standard angle c 1, c 2, c 3..., c n, tested autocollimator reading is a 1, a 2, a 3... a n;
3] instead survey: with the past reversed in order of surveying, successively measure, obtain standard autocollimator and produce n standard angle c ' n... c 1', and the reading a ' of tested autocollimator n..., a 1';
4] be subject to cautious error of indication β i, by following formula, calculate:
&beta; 1 = ( a &OverBar; 1 - a 0 ) - ( c &OverBar; 1 - c 0 ) - - - ( 1 )
&beta; 2 = ( a &OverBar; 2 - a 0 ) - ( c &OverBar; 2 - c 0 ) - - - ( 2 )
…
&beta; n = ( a &OverBar; n - a 0 ) - ( c &OverBar; n - c 0 ) - - - ( 3 )
In formula:
Figure BDA0000384208130000034
---be subject to cautious a iand a i' mean value;
Figure BDA0000384208130000035
---be subject to cautious c iand c i' mean value;
β i---be subject to the cautious error of indication;
Get β 1～β nmiddle maximal value is as the error of indication w of tested autocollimator 1.
Step 1.1] in, when vertical sleeping turntable is in vertical state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in horizontal state, repeating step 2]-4], the error of indication w of tested autocollimator obtained 2, get w 1and w 2middle maximal value is as the final error of indication; When vertical sleeping turntable is in horizontal state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in vertical state, repeating step 2]-4], obtain the error of indication w of tested autocollimator 2, get w 1and w 2middle maximal value is as the final error of indication.
The utility model advantage is:
(1) the utility model utilizes the common equipment in laboratory to realize the calibrating of Two-Axis Autocollimator, simple in structure, with low cost.
(2) only need a set of equipment, just can survey the error of 1 grade, 2 grades, 3 grades autocollimator indicating value
(3) only need a set of equipment, just can calibrated horizontal angle and the angular error of vertical angle.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of autocollimator error of indication calibrating installation while measuring horizontal angle;
Fig. 2 is the schematic diagram of autocollimator error of indication calibrating installation while measuring vertical angle;
Fig. 3 is distributed by cautious " field " type that is.
Embodiment
Autocollimator error of indication calibrating installation, as depicted in figs. 1 and 2, comprises vertical sleeping turntable 1, polygon 2, adjusting pole 3, standard autocollimator 4;
Polygon 2 is connected with vertical sleeping turntable 1 by adjusting pole 3, by regulating adjusting pole 3 to make the axis of rotation of polygon 2 each workplaces and the vertical turntable 1 that crouches parallel or be controlled in error range, standard autocollimator 4 and tested autocollimator 5 can be to polygon certain workplace autocollimatic, standard autocollimator 4 optical axis are perpendicular to polygon workplace and aim at polygon workplace center, standard autocollimator 4 graticule vertical lines are parallel with the axis of rotation of vertical sleeping turntable, tested autocollimator 5 optical axis are perpendicular to another workplace of polygon, and aim at polygon workplace center, tested autocollimator 5 graticule vertical lines should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator 4 is Senior Three times at least.
Standard autocollimator 4 and tested autocollimator 5 can be to polygon same workplace autocollimatic, also can be to different operating face autocollimatic, for reducing airflow influence, the workplace that the workplace that standard autocollimator 4 is aimed at is aimed at tested autocollimator 5 is adjacent workplace.
Standard autocollimator 4 and tested autocollimator 5 should be tried one's best near polygon 2, to reduce the impact of air-flow on measurement result.
Whole autocollimator error of indication calibrating installation is placed on a vibration-isolating platform, to reduce the impact of vibrations on measurement result.
The major function of founding sleeping turntable 1 is to carry adjusting pole 3 and polygon 2, by the standard angle that rotates vertical sleeping turntable 1 also and standard autocollimator 4 coordinates generation calibrating autocollimators to need.Secondly, make respectively vertical sleeping turntable 1 work in vertical and horizontal two states, can calibrate respectively horizontal angle and the vertical angle of tested autocollimator.While measuring horizontal angle, as shown in Figure 1, while measuring vertical angle, autocollimator error of indication calibrating installation schematic diagram as shown in Figure 2 for autocollimator error of indication calibrating installation schematic diagram.
The function of polygon 2 is the measurement target for standard autocollimator 4 and tested autocollimator transmission equal angular.
Adjusting pole 3 is governor motions, by regulating adjusting pole can guarantee that polygon 2 each workplaces are parallel with the axis of rotation that founds sleeping turntable 1 or be controlled in certain error range, guarantees calibration accuracy.
Standard autocollimator 4 is nucleus equipments of this device, and it provides the true value of vertical sleeping turntable 1 anglec of rotation.Standard autocollimator 4 herein can be replaced with other high-precision angle test equipment, but it must possess the accurate measurement that has coordinated vertical sleeping turntable 1 anglec of rotation with polygon 2.
Tested autocollimator 5 is the autocollimators that are calibrated, and is the object that is calibrated and tests.
The calibrating of the autocollimator error of indication is roughly divided into the calibrating of the horizontal angle error of indication and two processes of vertical angle error of indication calibrating, and testing procedure is identical, specific as follows:
1] assembling instrument:
1.1] press shown in Fig. 1, polygon (2) is arranged on vertical sleeping turntable (1), regulate the axis of polygon to overlap with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, each workplace of polygon and the depth of parallelism≤10 of founding the axis of sleeping rotation of rotary table axle ", vertical sleeping turntable is in horizontal state;
1.2] installation code autocollimator (4), make standard autocollimator (4) optical axis perpendicular to polygon workplace and aim at polygon workplace center, standard autocollimator (4) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c of record standard autocollimator (4) 0;
1.3] tested autocollimator (5) is installed, make tested autocollimator (5) optical axis perpendicular to another workplace of polygon and aim at polygon workplace center, tested autocollimator (5) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator (5) 0;
2] toward surveying: choose x in the measurement range of tested autocollimator 1, x 2..., x nexamined for n altogether, as Fig. 3, distributed by cautious three horizontal lines that are in " field " type, covered the full visual field of tested autocollimator, and sampling interval can be selected arbitrarily as required; According to the order of being examined, the vertical sleeping turntable of rotation, makes standard autocollimator produce n standard angle c 1, c 2, c 3..., c n, tested autocollimator reading is a 1, a 2, a 3... a n;
3] instead survey: with the past reversed in order of surveying, successively measure, obtain standard autocollimator and produce n standard angle c ' n... c 1', and the reading a ' of tested autocollimator n..., a 1';
4] be subject to cautious error of indication β i, by following formula, calculate:
&beta; 1 = ( a &OverBar; 1 - a 0 ) - ( c &OverBar; 1 - c 0 ) - - - ( 1 )
&beta; 2 = ( a &OverBar; 2 - a 0 ) - ( c &OverBar; 2 - c 0 ) - - - ( 2 )
…
&beta; n = ( a &OverBar; n - a 0 ) - ( c &OverBar; n - c 0 ) - - - ( 3 )
In formula:
Figure BDA0000384208130000064
---be subject to cautious a iand a i' mean value;
Figure BDA0000384208130000065
---be subject to cautious c iand c i' mean value;
β i---be subject to the cautious error of indication;
Get β 1～β nmiddle maximal value is as the error of indication w of tested autocollimator 1.
5] press Fig. 2, make vertical sleeping turntable in vertical state, repeating step 2,3,4, wherein, is distributed by cautious three vertical lines that are in " field " type, tries to achieve the error of indication w of tested autocollimator another one direction 2, get w 1and w 2maximal value as the net result of tested autocollimator.
Above method also has following distortion.
Step 1] in, make vertical sleeping turntable first in vertical state, step 5] in make vertical sleeping turntable in horizontal state.
The utility model utilizes the common equipment in laboratory to realize the calibrating of Two-Axis Autocollimator, simple in structure, simple to operate, with low cost.Only need a set of equipment, just can survey the error of 1 grade, 2 grades, 3 grades autocollimator indicating value.Only need a set of equipment, just can calibrated horizontal angle and the angular error of vertical angle.

Claims (4)

1. autocollimator error of indication calibrating installation, is characterized in that: comprise vertical sleeping turntable (1), polygon (2), adjusting pole (3), standard autocollimator (4);
Polygon (2) is connected with vertical sleeping turntable (1) by adjusting pole (3), the axis of rotation of each workplace of polygon (2) and vertical sleeping turntable (1) is parallel or be controlled in error range, standard autocollimator (4) optical axis is perpendicular to polygon workplace and aim at polygon workplace center, standard autocollimator (4) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, tested autocollimator (5) optical axis is perpendicular to another workplace of polygon, and aim at polygon workplace center, tested autocollimator (5) graticule vertical line should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator (4) is Senior Three times at least.
2. autocollimator error of indication calibrating installation according to claim 1, is characterized in that: autocollimator error of indication calibrating installation also comprises vibration-isolating platform, and whole autocollimator error of indication calibrating installation is positioned on vibration-isolating platform.
3. autocollimator error of indication calibrating installation according to claim 1 and 2, is characterized in that: the workplace that the workplace that standard autocollimator (4) is aimed at is aimed at tested autocollimator (5) is adjacent workplace.
4. autocollimator error of indication calibrating installation according to claim 3, is characterized in that: the workplace of the close as much as possible polygon of standard autocollimator (4) and tested autocollimator (5).
CN201320582650.2U 2013-09-18 2013-09-18 Autocollimator indicating value error calibration device Expired - Fee Related CN203479292U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103486998A (en) * 2013-09-18 2014-01-01 中国科学院西安光学精密机械研究所 Auto-collimator indicating value error calibrating device and method
CN106441371A (en) * 2016-11-23 2017-02-22 西安富图精密仪器有限公司 Special verification/calibration device for digital level
CN107607142A (en) * 2017-08-24 2018-01-19 中国科学院长春光学精密机械与物理研究所 The calibration system and scaling method of a kind of sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103486998A (en) * 2013-09-18 2014-01-01 中国科学院西安光学精密机械研究所 Auto-collimator indicating value error calibrating device and method
CN103486998B (en) * 2013-09-18 2016-09-07 中国科学院西安光学精密机械研究所 Autocollimation indication error calibration method
CN106441371A (en) * 2016-11-23 2017-02-22 西安富图精密仪器有限公司 Special verification/calibration device for digital level
CN106441371B (en) * 2016-11-23 2023-03-03 西安富图精密仪器有限公司 Special verification/calibration device for digital level
CN107607142A (en) * 2017-08-24 2018-01-19 中国科学院长春光学精密机械与物理研究所 The calibration system and scaling method of a kind of sensor
CN107607142B (en) * 2017-08-24 2019-11-15 中国科学院长春光学精密机械与物理研究所 A kind of calibration system and scaling method of sensor

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