CN103486998A - Autocollimator indication error calibration device and calibration method - Google Patents

Abstract

The invention provides an autocollimator display value error verification device and verification method. The device includes a vertical and horizontal turntable, a multi-faceted prism, an adjustment bracket, and a standard autocollimator; the multi-faced prism is connected to the vertical and horizontal turntable through the adjustment bracket. , the boresight of the standard autocollimator is perpendicular to the working surface of the polyhedral prism and aligned with the center of the working face of the polyhedral prism, the boresight of the measured autocollimator is perpendicular to the other working face of the polyhedral prism, and aligned center of the plane, the accuracy of the standard autocollimator is at least three times higher than that of the autocollimator under test. The method comprises the following steps: assembling an instrument; forward measurement; reverse measurement; taking the average value of the forward measurement and the reverse measurement. The present invention realizes the verification of the two-dimensional autocollimator by using common equipment in the laboratory, and has a simple structure and low cost; only one set of equipment is needed to measure the errors of the indication values of the 1st, 2nd and 3rd autocollimators ; Only one set of equipment is needed to calibrate the angle error of horizontal angle and vertical angle.

Description

Autocollimator Indication Error Verification Device and Verification Method

technical field

The indication error calibration of an autocollimator belongs to the field of precision testing and precision calibration of an autocollimator, and specifically relates to an autocollimator indication error verification device and a verification method.

Background technique

Autocollimator is a precision metrology instrument for small angle measurement. It is used in conjunction with a multi-tooth indexing table and can be used to measure angle measuring tools such as polygonal prisms and angle blocks. Used in conjunction with a plane reflector, it can be used to measure straightness, flatness, parallelism, perpendicularity and other relative positional relationship measurement elements. It is a necessary measurement equipment for the factory inspection department and the measurement and testing department.

As a measuring and testing instrument, verification and testing must be carried out frequently to ensure the accuracy and reliability of its indication. The indication error is the most important technical index of the autocollimator, and it is the embodiment of the accuracy of the autocollimator. Therefore, the indication error is a must-test item for the verification and verification of the autocollimator. At present, the verification basis for the indication error of the autocollimator is JJG202-2007 "Verification Regulations for Autocollimator". Regulations stipulate: For the indication error of level 2 and level 3 autocollimators, the level 3 or level 0 gauge block is used for calibration on the small angle calibration instrument. The calibration principle is to use the gauge block and the small angle calibration instrument to generate the required standard angle. , the tested instrument measures the standard angle, and the difference between the measured value of the tested instrument and the standard angle is the indication error of the tested point. According to the requirements of the verification regulations, the autocollimator under test is verified at each inspected point in turn. The indication error of the autocollimator is determined by the difference between the maximum and minimum values. The verification device for the indication error of the first-class autocollimator is a laser small angle measuring instrument. The verification principle is to use the turntable to generate a standard angle, and the autocollimator to be tested will self-align the mirror on the turntable and measure the rotation angle , the laser small angle measuring instrument and the tested autocollimator measure the standard angle at the same time, the measured value of the laser small angle measuring instrument is taken as the true value, the measured value of the tested autocollimator and the measured value of the laser small angle measuring instrument The difference is the indication error of the tested autocollimator at this point. The indication error of the autocollimator is determined by the difference between the maximum and minimum values within the entire measurement range.

The indication error verification method stipulated in JJG202-2007 "Autocollimator Verification Regulations" has the following shortcomings:

(1) The small-angle calibration instrument and the laser small-angle measuring instrument are expensive, their functions are relatively single, and they are not widely used. Therefore, only a few metrology and verification departments purchase such equipment. For the company's testing department, considering the problem of capital and cost performance , generally will not buy this kind of equipment with higher price and less use;

(2) The indication error of the autocollimator can only be verified by the small angle calibrating instrument and the laser small angle measuring instrument in one direction of the autocollimator. As a vertical angle standard, the small angle calibrator can only calibrate the angle error in the vertical direction of the autocollimator, but it cannot calibrate the horizontal angle; as a horizontal angle standard, the laser small angle measuring instrument can only calibrate the angle error in the horizontal direction of the autocollimator. It cannot calibrate the vertical angle.

Due to the above two problems, the autocollimator cannot be calibrated in a timely and efficient manner.

Contents of the invention

The purpose of the present invention is to provide an autocollimator indication error verification device and verification method to solve the technical problems of high cost of indication error and the inability to realize two-dimensional verification in the prior art using a small angle verification instrument and a laser small angle calibration .

Technical solution of the present invention is:

The autocollimator display value error verification device is special in that it includes a vertical and horizontal turntable, a polyhedral prism, an adjustment bracket, and a standard autocollimator; the polyhedron is connected to the vertical and horizontal turntable through an adjustment bracket, and each The working surface is parallel to the rotation axis of the vertical and horizontal turntable or controlled within the error range. The standard autocollimator visual axis is perpendicular to the polyhedral prism working surface and aligned with the center of the polyhedral prism working surface. The standard autocollimator reticle is vertical. line is parallel to the axis of rotation of the vertical and horizontal turntable, the boresight of the autocollimator under test is perpendicular to the other working surface of the polyhedral prism, and is aligned with the center of the working surface of the polyhedral prism, and the vertical line of the reticle of the autocollimator under test should be Parallel to the axis of rotation of the vertical and horizontal turntables, the accuracy of the standard autocollimator is at least three times higher than that of the tested autocollimator.

The above autocollimator indication error verification device also includes a vibration isolation platform, and the entire autocollimator indication error verification device is placed on the vibration isolation platform.

The working surface aligned with the standard autocollimator and the working surface aligned with the tested autocollimator are adjacent working surfaces.

The above-mentioned standard autocollimator and the tested autocollimator are as close as possible to the working surface of the polygonal prism.

The method for verifying the indication error of the autocollimator is special in that it includes the following steps:

1] Assemble the instrument:

1.1] Install the polyhedral prism on the vertical and horizontal turntable, adjust the axis of the polyhedral prism to coincide with the rotary axis of the vertical and horizontal turntable, the coaxiality error is ≤0.005mm, the distance between each working surface of the polyhedral prism and the axis of the vertical and horizontal turntable Parallelism ≤ 10", the vertical and horizontal turntable is in the vertical state or horizontal state;

1.2] Install the standard autocollimator so that the visual axis of the standard autocollimator is perpendicular to the polyhedral prism working surface and aligned with the center of the polyhedral prism working surface, the vertical line of the standard autocollimator reticle and the rotation of the vertical and horizontal turntable The axes are parallel, record the initial reading c ₀ of the standard autocollimator;

1.3] Install the autocollimator under test so that the boresight of the autocollimator under test is perpendicular to the other working surface of the polyhedral prism and aligned with the center of the working surface of the polyhedron prism. The rotation axes of the vertical and horizontal turntables are parallel, and record the initial reading a ₀ of the autocollimator under test;

2] Going test: Select x, x ₂ , ... x _n , a total of n inspection points within the measurement range of the autocollimator to be tested, and rotate the vertical and horizontal turntable according to the order of the inspection points, so that the standard autocollimator Generate n standard angles c ₁ , c ₂ , c ₃ , ..., c _n , and the readings of the measured autocollimator are a ₁ , a ₂ , a ₃ , ... a _n ;

3) Reverse measurement: Contrary to the previous measurement sequence, carry out successive measurements to obtain n standard angles c′ _n ,…c′ ₁ generated by the standard autocollimator, and the readings a′ _n ,…, of the measured autocollimator a'₁;

4] The indication error β _i of the tested point is calculated according to the following formula:

${\mathrm{<span\; class="notranslate">\; \&beta;</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; a</span>}}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; c</span>}}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; c</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; \&beta;</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; a</span>}}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; c</span>}}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; c</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

...

${\mathrm{<span\; class="notranslate">\; \&beta;</span>}}_{\mathrm{<span\; class="notranslate">\; no</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; a</span>}}}_{\mathrm{<span\; class="notranslate">\; no</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; c</span>}}}_{\mathrm{<span\; class="notranslate">\; no</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; c</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 3</span>}<span\; class="notranslate">\; )</span>$

——受检点的a_i和a′_i的平均值；In the formula:

- the average value of a _i and a' _i of the inspected point;

——受检点的c_i和c′_i的平均值；

——the average value of c _i and c′ _i of the inspected point;

β _i ——Indication error of the point under inspection;

Take the maximum value among β ₁ ~ β _n as the indication error w ₁ of the tested autocollimator.

In step 1.1], when the vertical and horizontal turntable is in the vertical state, at this time, the autocollimator indication error verification method also includes step 5], making the vertical and horizontal turntable in the horizontal state, repeating steps 2]-4] to obtain For the indication error w ₂ of the tested autocollimator, take the maximum value of w ₁ and w ₂ as the final indication error; when the vertical and horizontal turntable is in the horizontal state, at this time, the autocollimator indication error verification method Including step 5], make the vertical and horizontal turntable in a vertical state, repeat steps 2]-4], obtain the indication error w ₂ of the autocollimator under test, and take the maximum value of w ₁ and w ₂ as the final indication error .

Advantage of the present invention is:

(1) The present invention realizes the verification of the two-dimensional autocollimator by utilizing common laboratory equipment, and has a simple structure and low cost.

(2) Only one set of equipment is needed to measure the error of the indication value of the 1st, 2nd and 3rd autocollimator

(3) Only one set of equipment is needed to calibrate the angle error of horizontal angle and vertical angle.

Description of drawings

Fig. 1 is the schematic diagram of autocollimator indication error verification device when measuring horizontal angle;

Fig. 2 is the schematic diagram of autocollimator indication error verification device when measuring vertical angle;

Figure 3. The inspected points are distributed in a "field" shape.

Detailed ways

The autocollimator display value error verification device, as shown in Figure 1 and Figure 2, includes a vertical and horizontal turntable 1, a polyhedral prism 2, an adjustment bracket 3, and a standard autocollimator 4;

The multi-faceted prism 2 is connected to the vertical and horizontal turntable 1 through the adjustment bracket 3, and the working surfaces of the multi-faceted prism 2 are parallel to the rotation axis of the vertical and horizontal turntable 1 by adjusting the adjustment bracket 3 or controlled within the error range. The standard autocollimator 4 and the tested autocollimator 5 can self-collimate a certain working surface of the polyhedral prism, the standard autocollimator 4 visual axis is perpendicular to the polyhedral prism working surface and aligned with the center of the polyhedral prism working surface, the standard autocollimation The vertical line of the reticle of the instrument 4 is parallel to the axis of rotation of the vertical and horizontal turntable, and the visual axis of the measured autocollimator 5 is perpendicular to the other working surface of the polyhedral prism and aligned with the center of the working surface of the polyhedral prism. The vertical line of the reticle of the instrument 5 should be parallel to the rotation axis of the vertical and horizontal turntable, and the accuracy of the standard autocollimator 4 is at least three times higher than that of the tested autocollimator.

The standard autocollimator 4 and the tested autocollimator 5 can be self-collimated on the same working surface of the polyhedral prism, and can also be self-collimating on different working surfaces. In order to reduce the influence of airflow, the standard autocollimator 4 aligns The working surface aligned with the tested autocollimator 5 is an adjacent working surface.

The standard autocollimator 4 and the tested autocollimator 5 should be as close as possible to the polygonal prism 2, so as to reduce the influence of air flow on the measurement results.

The entire autocollimator indication error verification device is placed on a vibration isolation platform to reduce the impact of vibration on the measurement results.

The main function of the vertical and horizontal turntable 1 is to carry the adjustment bracket 3 and the polyhedral prism 2. By rotating the vertical and horizontal turntable 1 and cooperating with the standard autocollimator 4, the standard angle required for the verification of the autocollimator is generated. Secondly, make the vertical and horizontal turntable 1 work in two states of vertical and horizontal respectively, so that the horizontal angle and vertical angle of the autocollimator to be tested can be calibrated respectively. When measuring the horizontal angle, the schematic diagram of the autocollimator indication error verification device is shown in Figure 1, and when the vertical angle is measured, the schematic diagram of the autocollimator indication error verification device is shown in Figure 2.

The function of the polygonal prism 2 is to transmit the measurement target of the same angle to the standard autocollimator 4 and the tested autocollimator.

The adjustment bracket 3 is an adjustment mechanism. By adjusting the adjustment bracket, it can be ensured that each working surface of the polyhedral prism 2 is parallel to the rotation axis of the vertical and horizontal turntable 1 or controlled within a certain error range to ensure calibration accuracy.

The standard autocollimator 4 is the core equipment of the device, which provides the true value of the rotation angle of the vertical and horizontal turntable 1. The standard autocollimator 4 here can be replaced with other high-precision angle testing equipment, but it must cooperate with the polyhedron 2 to complete the precise measurement of the rotation angle of the vertical and horizontal turntable 1 .

The autocollimator 5 under test is a calibrated autocollimator, and is the object to be calibrated and tested.

The verification of the indication error of the autocollimator is roughly divided into two processes: the verification of the horizontal angle indication error and the verification of the vertical angle indication error. The test steps are exactly the same, as follows:

1] Assemble the instrument:

1.1] As shown in Figure 1, install the polyhedral prism (2) on the vertical and horizontal turntable (1), adjust the axis of the polyhedral prism to coincide with the rotation axis of the vertical and horizontal turntable, the coaxiality error ≤ 0.005mm, the polyhedral prism The parallelism between each working surface and the axis of the rotary shaft of the vertical and horizontal turntables is ≤10", and the vertical and horizontal turntables are in a horizontal state;

1.2] Install the standard autocollimator (4) so that the visual axis of the standard autocollimator (4) is perpendicular to the polyhedral prism working surface and aligned with the center of the polyhedral prism working surface, the standard autocollimator (4) is divided The vertical line of the plate is parallel to the rotation axis of the vertical and horizontal turntable, and record the initial reading c0 of the standard autocollimator (4);

1.3] Install the autocollimator (5) under test so that the visual axis of the autocollimator (5) is perpendicular to the other working surface of the polyhedral prism and aligned with the center of the working surface of the polyhedron prism. The autocollimator under test (5) The vertical line of the reticle is parallel to the rotation axis of the vertical and horizontal turntable, and record the initial reading a ₀ of the autocollimator (5) under test;

2] Going test: select x ₁ , x ₂ , ..., x _n total n test points within the measurement range of the tested autocollimator, as shown in Figure 3, the test points are three horizontal lines in the "field" shape Line distribution, covering the entire field of view of the autocollimator to be tested, and the sampling interval can be arbitrarily selected according to the needs; according to the order of the tested points, rotate the vertical and horizontal turntable to make the standard autocollimator generate n standard angles c ₁ , c ₂ , c ₃ ,..., c _n , the readings of the measured autocollimator are a ₁ , a ₂ , a ₃ ,...a _n ;

3) Reverse measurement: Contrary to the previous measurement sequence, carry out successive measurements to obtain n standard angles c′ _n ,…c′ ₁ generated by the standard autocollimator, and the readings a′ _n ,…, of the measured autocollimator a'₁;

4] The indication error β _i of the tested point is calculated according to the following formula:

${\mathrm{<span\; class="notranslate">\; \&beta;</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; a</span>}}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; c</span>}}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; c</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; \&beta;</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; a</span>}}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; c</span>}}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; c</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

...

${\mathrm{<span\; class="notranslate">\; \&beta;</span>}}_{\mathrm{<span\; class="notranslate">\; no</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; a</span>}}}_{\mathrm{<span\; class="notranslate">\; no</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>{\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; c</span>}}}_{\mathrm{<span\; class="notranslate">\; no</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; c</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 3</span>}<span\; class="notranslate">\; )</span>$

In the formula: - the average value of a _i and a' _i of the inspected point;

——受检点的c_i和c′_i的平均值；

——the average value of c _i and c′ _i of the inspected point;

β _i ——Indication error of the point under inspection;

Take the maximum value among β ₁ ~ β _n as the indication error w ₁ of the tested autocollimator.

5] According to Figure 2, make the vertical and horizontal turntable in the vertical state, repeat steps 2, 3, and 4, where the points to be inspected are distributed in three vertical lines in the "field" shape, and the other one of the autocollimator to be tested is obtained. For the indication error w ₂ of the direction, take the maximum value of w ₁ and w ₂ as the final result of the tested autocollimator.

The above method also has the following variants.

In step 1], the vertical and horizontal turntable is in the vertical state first, and in step 5], the vertical and horizontal turntable is in the horizontal state.

The invention realizes the verification of the two-dimensional autocollimator by utilizing common laboratory equipment, and has simple structure, simple operation and low cost. Only one set of equipment is needed to measure the errors of indication values of 1st, 2nd and 3rd autocollimators. Only one set of equipment is needed to calibrate the angular error of horizontal angle and vertical angle.

Claims (6)

1. autocollimator error of indication calibrating installation, is characterized in that: comprise vertical sleeping turntable (1), polygon (2), adjusting pole (3), standard autocollimator (4);

Polygon (2) is connected with vertical sleeping turntable (1) by adjusting pole (3), each workplace of polygon (2) is parallel with the axis of rotation of vertical sleeping turntable (1) or be controlled in error range, standard autocollimator (4) optical axis is perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator (4) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, tested autocollimator (5) optical axis is perpendicular to another workplace of polygon, and aligning polygon workplace center, tested autocollimator (5) graticule vertical line should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator (4) is Senior Three times at least.

2. autocollimator error of indication calibrating installation according to claim 1, it is characterized in that: autocollimator error of indication calibrating installation also comprises vibration-isolating platform, whole autocollimator error of indication calibrating installation is positioned on vibration-isolating platform.

3. autocollimator error of indication calibrating installation according to claim 1 and 2 is characterized in that: the workplace that the workplace that standard autocollimator (4) is aimed at is aimed at tested autocollimator (5) is adjacent workplace.

4. autocollimator error of indication calibrating installation according to claim 3, is characterized in that: the workplace of the close as much as possible polygon of standard autocollimator (4) and tested autocollimator (5).

5. autocollimator error of indication calibration method is characterized in that: comprise the following steps:

1] assembling instrument:

1.1] polygon (2) is arranged on vertical sleeping turntable (1), the axis of regulating polygon overlaps with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, the depth of parallelism of the axis of each workplace of polygon and vertical sleeping rotation of rotary table axle≤10 ", vertical sleeping turntable is in vertical state or horizontal state;

1.2] installation code autocollimator (4), make standard autocollimator (4) optical axis perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator (4) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c of record standard autocollimator (4) ₀;

1.3] tested autocollimator (5) is installed, make tested autocollimator (5) optical axis perpendicular to another workplace of polygon and aim at polygon workplace center, tested autocollimator (5) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator (5) ₀;

2] toward surveying: choose x in the measurement range of tested autocollimator, x ₂... x _nexamined for n altogether, according to the order of being examined, the vertical sleeping turntable of rotation, make the standard autocollimator produce n standard angle c ₁, c ₂, c ₃..., c _n, tested autocollimator reading is a ₁, a ₂, a ₃... a _n;

3] the anti-survey: with the past reversed in order of surveying, successively measure, obtain the standard autocollimator and produce n standard angle c ' _n... c ' ₁, and the reading a ' of tested autocollimator _n..., a ' ₁;

4] be subject to cautious error of indication β _i, by following formula, calculate:

${\mathrm{\&beta;}}_1=({\stackrel{\&OverBar;}{a}}_1-a_0)-({\stackrel{\&OverBar;}{c}}_1-c_0)---\left(1\right)$

${\mathrm{\&beta;}}_2=({\stackrel{\&OverBar;}{a}}_2-a_0)-({\stackrel{\&OverBar;}{c}}_2-c_0)---\left(2\right)$

...

${\mathrm{\&beta;}}_n=({\stackrel{\&OverBar;}{a}}_n-a_0)-({\stackrel{\&OverBar;}{c}}_n-c_0)---\left(3\right)$

In formula: ---be subject to cautious a _iand a ' _imean value;

---be subject to cautious c _iand c ' _imean value;

β _i---be subject to the cautious error of indication;

Get β ₁～β _nmiddle maximal value is as the error of indication w of tested autocollimator ₁.

6. autocollimator error of indication calibration method according to claim 5, it is characterized in that: step 1.1] in, when founding sleeping turntable in vertical state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in horizontal state, repeating step 2]-4], obtain the error of indication w of tested autocollimator ₂, get w ₁and w ₂middle maximal value is as the final error of indication; When vertical sleeping turntable, in horizontal state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in vertical state, repeating step 2]-4], obtain the error of indication w of tested autocollimator ₂, get w ₁and w ₂middle maximal value is as the final error of indication.

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