CN103486998A - Auto-collimator indicating value error calibrating device and method - Google Patents

Auto-collimator indicating value error calibrating device and method Download PDF

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Publication number
CN103486998A
CN103486998A CN201310430148.4A CN201310430148A CN103486998A CN 103486998 A CN103486998 A CN 103486998A CN 201310430148 A CN201310430148 A CN 201310430148A CN 103486998 A CN103486998 A CN 103486998A
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China
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autocollimator
error
polygon
indication
standard
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CN201310430148.4A
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Chinese (zh)
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CN103486998B (en
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田留德
赵建科
赵怀学
潘亮
段亚轩
龙江波
段炯
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中国科学院西安光学精密机械研究所
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Abstract

The invention provides an auto-collimator indicating value error calibrating device and method. The device comprises a vertical horizontal rotating table, a polygon arris body, an adjusting support, and a standard auto-collimator. The polygon arris body is connected with the vertical horizontal rotating table through the adjusting support. The optical axis of the standard auto-collimator is perpendicular to the working face of the polygon arris body and aligns with the center of the working face of the polygon arris body. The optical axis of an auto-collimator to be detected is perpendicular to the other working face of the polygon arris body and aligns with the center of the working face of the polygon arris body. The standard auto-collimator is at least three times higher than the auto-collimator to be detected in precision. The method comprises the steps of assembling an instrument; normal detecting; reverse detecting; taking the average value of the normal detecting and the reverse detecting. According to the auto-collimator indicating value error calibrating device and method, calibration of two-dimensional auto-collimator is realized through common equipment in laboratories, the structure is simple, cost is low, errors of a first-level auto-collimator, errors of a second-level auto-collimator and errors of a third-level auto-collimator can be detected through one set of equipment, and angle errors of horizontal angles and vertical angles can be calibrated through one set of equipment.

Description

Autocollimator error of indication calibrating installation and calibration method
Technical field
The error of indication calibration of autocollimator belongs to accuracy test and the accuracy calibration field of autocollimator, is specifically related to autocollimator error of indication calibrating installation and calibration method.
Background technology
Autocollimator is a kind of precision measuring instrument for small angle measurement.It and multiteeth indexing table are used in conjunction with, can be for measuring polygon, angle block gauge equal angles measurer.Be used in conjunction with plane mirror, can be used for measuring the measurement key element of linearity, flatness, the depth of parallelism, verticality and other relative position relations.It is the metering outfit of factory inspection department and metrology and measurement department indispensability.
As a metrology and measurement instrument, must be examined and determine frequently and be tested, with accuracy and the reliability of guaranteeing its indicating value.The error of indication is the most important technical indicator of autocollimator, is the embodiment of autocollimator precision, therefore, the error of indication be autocollimator calibrating and Intermediate Checks must survey project.At present, the calibrating of autocollimator error of indication foundation is JJG202-2007 " autocollimator vertification regulations ".Rules regulation: be with 3 etc. or 0 grade of gauge block measurement on the low-angle calibrating instrument for 2 grades, the 3 grades autocollimator errors of indication, its calibrating principle is to utilize gauge block and low-angle calibrating instrument to produce the standard angle needed, by test examination instrument, standard angle is measured, be this by the difference of the measured value of test examination instrument and standard angle and be subject to the cautious error of indication.According to vertification regulation, require successively cautious tested autocollimator to be examined and determine respectively being subject to, the error of indication of autocollimator is to determine with the difference of maximal and minmal value.The calibrating installation of 1 grade of autocollimator error of indication is the laser Small angle measuring instrument, its calibrating principle is to utilize panoramic table to produce a standard angle, tested autocollimator is to the catoptron autocollimatic on panoramic table and measure the anglec of rotation, laser Small angle measuring instrument and tested autocollimator are measured standard angle simultaneously, the measured value of laser Small angle measuring instrument is as true value, and the difference of the measured value of the measured value of tested autocollimator and laser Small angle measuring instrument is the error of indication of tested autocollimator at this point.The error of indication of autocollimator is to determine with the difference of maximal and minmal value in whole measurement range.
The error of indication calibration method of JJG202-2007 " autocollimator vertification regulation " regulation has the following disadvantages:
(1) low-angle calibrating instrument and laser Small angle measuring instrument are expensive, function ratio is more single, it is not very extensive using, therefore, only have minority measurement verification department just to buy this kind equipment, for the detection department of company, consider fund and cost performance problem, generally can not buy this price higher and use less equipment;
(2) all can only examine and determine the error of indication of a direction of autocollimator by the error of indication of low-angle calibrating instrument and laser Small angle measuring instrument calibrating autocollimator.The low-angle calibrating instrument can only be calibrated the angular error of autocollimator vertical direction as the vertical angle standard, and it can't the calibrated horizontal angle; The laser Small angle measuring instrument can only be calibrated the angular error of autocollimator horizontal direction as the horizontal angle standard, and it can't calibrate vertical angle.
Due to above 2 problems cause autocollimator can not be in time, examined and determine efficiently.
Summary of the invention
The object of the invention is: a kind of autocollimator error of indication calibrating installation and calibration method are provided, and it is high that the solution prior art utilizes low-angle calibrating instrument and laser low-angle to calibrate error of indication cost, and the technical matters that can't realize the two dimension calibrating.
The technology of the present invention solution is:
Autocollimator error of indication calibrating installation, its special character is: comprise vertical sleeping turntable, polygon, adjusting pole, standard autocollimator, polygon is connected with vertical sleeping turntable by adjusting pole, each workplace of polygon is parallel with the axis of rotation of vertical sleeping turntable or be controlled in error range, the standard autocollimator optical axis is perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the tested autocollimator optical axis is perpendicular to another workplace of polygon, and aligning polygon workplace center, tested autocollimator graticule vertical line should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator is Senior Three times at least.
Above-mentioned autocollimator error of indication calibrating installation also comprises vibration-isolating platform, and whole autocollimator error of indication calibrating installation is positioned on vibration-isolating platform.
The workplace that the workplace that above-mentioned standard autocollimator is aimed at is aimed at tested autocollimator is adjacent workplace.
The workplace of the close as much as possible polygon of above-mentioned standard autocollimator and tested autocollimator.
Autocollimator error of indication calibration method, its special character is: comprise the following steps:
1] assembling instrument:
1.1] polygon is arranged on vertical sleeping turntable, the axis of regulating polygon overlaps with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, the depth of parallelism of the axis of each workplace of polygon and vertical sleeping rotation of rotary table axle≤10 ", vertical sleeping turntable is in vertical state or horizontal state;
1.2] the installation code autocollimator, make the standard autocollimator optical axis perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c of record standard autocollimator 0;
1.3] tested autocollimator is installed, make the tested autocollimator optical axis perpendicular to another workplace of polygon and aim at polygon workplace center, tested autocollimator graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator 0;
2] toward surveying: choose x in the measurement range of tested autocollimator, x 2... x nexamined for n altogether, according to the order of being examined, the vertical sleeping turntable of rotation, make the standard autocollimator produce n standard angle c 1, c 2, c 3..., c n, tested autocollimator reading is a 1, a 2, a 3... a n;
3] the anti-survey: with the past reversed in order of surveying, successively measure, obtain the standard autocollimator and produce n standard angle c ' n... c ' 1, and the reading a ' of tested autocollimator n..., a ' 1;
4] be subject to cautious error of indication β i, by following formula, calculate:
β 1 = ( a ‾ 1 - a 0 ) - ( c ‾ 1 - c 0 ) - - - ( 1 )
β 2 = ( a ‾ 2 - a 0 ) - ( c ‾ 2 - c 0 ) - - - ( 2 )
...
β n = ( a ‾ n - a 0 ) - ( c ‾ n - c 0 ) - - - ( 3 )
In formula: ---be subject to cautious a iand a ' imean value;
---be subject to cautious c iand c ' imean value;
β i---be subject to the cautious error of indication;
Get β 1~β nmiddle maximal value is as the error of indication w of tested autocollimator 1.
Step 1.1] in, when vertical sleeping turntable, in vertical state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in horizontal state, repeating step 2]-4], the error of indication w of tested autocollimator obtained 2, get w 1and w 2middle maximal value is as the final error of indication; When vertical sleeping turntable, in horizontal state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in vertical state, repeating step 2]-4], obtain the error of indication w of tested autocollimator 2, get w 1and w 2middle maximal value is as the final error of indication.
Advantage of the present invention is:
(1) the present invention utilizes the common equipment in laboratory to realize the calibrating of Two-Axis Autocollimator, simple in structure, with low cost.
(2) only need a set of equipment, just can survey the error of 1 grade, 2 grades, 3 grades autocollimator indicating value
(3) only need a set of equipment, just can the calibrated horizontal angle and the angular error of vertical angle.
The accompanying drawing explanation
The schematic diagram that Fig. 1 is autocollimator error of indication calibrating installation while measuring horizontal angle;
The schematic diagram that Fig. 2 is autocollimator error of indication calibrating installation while measuring vertical angle;
Fig. 3 is distributed by cautious " field " type that is.
Embodiment
Autocollimator error of indication calibrating installation, as depicted in figs. 1 and 2, comprise vertical sleeping turntable 1, polygon 2, adjusting pole 3, standard autocollimator 4;
Polygon 2 is connected with vertical sleeping turntable 1 by adjusting pole 3, by regulating adjusting pole 3, make polygon 2 each workplaces parallel with the axis of rotation of the vertical turntable 1 that crouches or be controlled in error range, standard autocollimator 4 and tested autocollimator 5 can be to certain workplace autocollimatics of polygon, standard autocollimator 4 optical axis are perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator 4 graticule vertical lines are parallel with the axis of rotation of vertical sleeping turntable, tested autocollimator 5 optical axis are perpendicular to another workplace of polygon, and aligning polygon workplace center, tested autocollimator 5 graticule vertical lines should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator 4 is Senior Three times at least.
Standard autocollimator 4 and tested autocollimator 5 can be to the same workplace autocollimatics of polygon, also can be to different operating face autocollimatic, for reducing airflow influence, the workplace that the workplace that standard autocollimator 4 is aimed at is aimed at tested autocollimator 5 is adjacent workplace.
Standard autocollimator 4 and tested autocollimator 5 should be tried one's best near polygon 2, to reduce the impact of air-flow on measurement result.
Whole autocollimator error of indication calibrating installation is placed on a vibration-isolating platform, to reduce the impact of vibrations on measurement result.
The major function of founding sleeping turntable 1 is to carry adjusting pole 3 and polygon 2, by the standard angle that rotates vertical sleeping turntable 1 also and standard autocollimator 4 coordinates generation calibrating autocollimators to need.Secondly, make respectively vertical sleeping turntable 1 work in vertical and horizontal two states, can calibrate respectively horizontal angle and the vertical angle of tested autocollimator.While measuring horizontal angle, as shown in Figure 1, while measuring vertical angle, autocollimator error of indication calibrating installation schematic diagram as shown in Figure 2 for autocollimator error of indication calibrating installation schematic diagram.
The function of polygon 2 is the measurement target for standard autocollimator 4 and tested autocollimator transmission equal angular.
Adjusting pole 3 is governor motions, by regulating adjusting pole, can guarantee that polygon 2 each workplaces are parallel with the axis of rotation of vertical sleeping turntable 1 or be controlled in certain error range, guarantees calibration accuracy.
Standard autocollimator 4 is nucleus equipments of this device, and it provides the true value of vertical sleeping turntable 1 anglec of rotation.Standard autocollimator 4 herein can be replaced with other high-precision angle test equipment, but it must possess the accurate measurement that has coordinated vertical sleeping turntable 1 anglec of rotation with polygon 2.
Tested autocollimator 5 is the autocollimators that are calibrated, and is the object that is calibrated and tests.
The calibrating of the autocollimator error of indication roughly is divided into the calibrating of the horizontal angle error of indication and two processes of vertical angle error of indication calibrating, and testing procedure is identical, specific as follows:
1] assembling instrument:
1.1] press shown in Fig. 1, polygon (2) is arranged on vertical sleeping turntable (1), the axis of regulating polygon overlaps with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, the depth of parallelism of the axis of each workplace of polygon and vertical sleeping rotation of rotary table axle≤10 ", vertical sleeping turntable is in horizontal state;
1.2] installation code autocollimator (4), make standard autocollimator (4) optical axis perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator (4) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c0 of record standard autocollimator (4);
1.3] tested autocollimator (5) is installed, make tested autocollimator (5) optical axis perpendicular to another workplace of polygon and aim at polygon workplace center, tested autocollimator (5) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator (5) 0;
2] toward surveying: in the measurement range of tested autocollimator, choose x 1, x 2..., x nexamined for n altogether, as Fig. 3, distributed by cautious three horizontal lines that are in " field " type, covered the full visual field of tested autocollimator, and sampling interval can be selected arbitrarily as required; According to the order of being examined, the vertical sleeping turntable of rotation, make the standard autocollimator produce n standard angle c 1, c 2, c 3..., c n, tested autocollimator reading is a 1, a 2, a 3... a n;
3] the anti-survey: with the past reversed in order of surveying, successively measure, obtain the standard autocollimator and produce n standard angle c ' n... c ' 1, and the reading a ' of tested autocollimator n..., a ' 1;
4] be subject to cautious error of indication β i, by following formula, calculate:
β 1 = ( a ‾ 1 - a 0 ) - ( c ‾ 1 - c 0 ) - - - ( 1 )
β 2 = ( a ‾ 2 - a 0 ) - ( c ‾ 2 - c 0 ) - - - ( 2 )
...
β n = ( a ‾ n - a 0 ) - ( c ‾ n - c 0 ) - - - ( 3 )
In formula: ---be subject to cautious a iand a ' imean value;
---be subject to cautious c iand c ' imean value;
β i---be subject to the cautious error of indication;
Get β 1~β nmiddle maximal value is as the error of indication w of tested autocollimator 1.
5] press Fig. 2, make vertical sleeping turntable in vertical state, repeating step 2,3,4, wherein, distributed by cautious three vertical lines that are in " field " type, tries to achieve the error of indication w of tested autocollimator another one direction 2, get w 1and w 2maximal value as the net result of tested autocollimator.
Above method also has following distortion.
Step 1] in, make vertical sleeping turntable first in vertical state, step 5] in make vertical sleeping turntable in horizontal state.
The present invention utilizes the common equipment in laboratory to realize the calibrating of Two-Axis Autocollimator, simple in structure, simple to operate, with low cost.Only need a set of equipment, just can survey the error of 1 grade, 2 grades, 3 grades autocollimator indicating value.Only need a set of equipment, just can the calibrated horizontal angle and the angular error of vertical angle.

Claims (6)

1. autocollimator error of indication calibrating installation, is characterized in that: comprise vertical sleeping turntable (1), polygon (2), adjusting pole (3), standard autocollimator (4);
Polygon (2) is connected with vertical sleeping turntable (1) by adjusting pole (3), each workplace of polygon (2) is parallel with the axis of rotation of vertical sleeping turntable (1) or be controlled in error range, standard autocollimator (4) optical axis is perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator (4) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, tested autocollimator (5) optical axis is perpendicular to another workplace of polygon, and aligning polygon workplace center, tested autocollimator (5) graticule vertical line should be parallel with the axis of rotation of vertical sleeping turntable, the precision of the tested autocollimator of ratio of precision of standard autocollimator (4) is Senior Three times at least.
2. autocollimator error of indication calibrating installation according to claim 1, it is characterized in that: autocollimator error of indication calibrating installation also comprises vibration-isolating platform, whole autocollimator error of indication calibrating installation is positioned on vibration-isolating platform.
3. autocollimator error of indication calibrating installation according to claim 1 and 2 is characterized in that: the workplace that the workplace that standard autocollimator (4) is aimed at is aimed at tested autocollimator (5) is adjacent workplace.
4. autocollimator error of indication calibrating installation according to claim 3, is characterized in that: the workplace of the close as much as possible polygon of standard autocollimator (4) and tested autocollimator (5).
5. autocollimator error of indication calibration method is characterized in that: comprise the following steps:
1] assembling instrument:
1.1] polygon (2) is arranged on vertical sleeping turntable (1), the axis of regulating polygon overlaps with vertical sleeping rotation of rotary table axle, coaxiality error≤0.005mm, the depth of parallelism of the axis of each workplace of polygon and vertical sleeping rotation of rotary table axle≤10 ", vertical sleeping turntable is in vertical state or horizontal state;
1.2] installation code autocollimator (4), make standard autocollimator (4) optical axis perpendicular to the polygon workplace and aim at polygon workplace center, standard autocollimator (4) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, the initial reading c of record standard autocollimator (4) 0;
1.3] tested autocollimator (5) is installed, make tested autocollimator (5) optical axis perpendicular to another workplace of polygon and aim at polygon workplace center, tested autocollimator (5) graticule vertical line is parallel with the axis of rotation of vertical sleeping turntable, records the initial reading a of tested autocollimator (5) 0;
2] toward surveying: choose x in the measurement range of tested autocollimator, x 2... x nexamined for n altogether, according to the order of being examined, the vertical sleeping turntable of rotation, make the standard autocollimator produce n standard angle c 1, c 2, c 3..., c n, tested autocollimator reading is a 1, a 2, a 3... a n;
3] the anti-survey: with the past reversed in order of surveying, successively measure, obtain the standard autocollimator and produce n standard angle c ' n... c ' 1, and the reading a ' of tested autocollimator n..., a ' 1;
4] be subject to cautious error of indication β i, by following formula, calculate:
β 1 = ( a ‾ 1 - a 0 ) - ( c ‾ 1 - c 0 ) - - - ( 1 )
β 2 = ( a ‾ 2 - a 0 ) - ( c ‾ 2 - c 0 ) - - - ( 2 )
...
β n = ( a ‾ n - a 0 ) - ( c ‾ n - c 0 ) - - - ( 3 )
In formula: ---be subject to cautious a iand a ' imean value;
---be subject to cautious c iand c ' imean value;
β i---be subject to the cautious error of indication;
Get β 1~β nmiddle maximal value is as the error of indication w of tested autocollimator 1.
6. autocollimator error of indication calibration method according to claim 5, it is characterized in that: step 1.1] in, when founding sleeping turntable in vertical state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in horizontal state, repeating step 2]-4], obtain the error of indication w of tested autocollimator 2, get w 1and w 2middle maximal value is as the final error of indication; When vertical sleeping turntable, in horizontal state, now, autocollimator error of indication calibration method also comprises step 5], make vertical sleeping turntable in vertical state, repeating step 2]-4], obtain the error of indication w of tested autocollimator 2, get w 1and w 2middle maximal value is as the final error of indication.
CN201310430148.4A 2013-09-18 2013-09-18 Autocollimation indication error calibration method CN103486998B (en)

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CN106556359A (en) * 2016-11-25 2017-04-05 中车戚墅堰机车有限公司 The method that body axiality is detected using body coaxality measuring mechanism
CN106840045A (en) * 2017-01-06 2017-06-13 中国科学院光电研究院 The accuracy detecting device and its detection method of a kind of autocollimator
CN107255561A (en) * 2017-05-27 2017-10-17 北京新立机械有限责任公司 Harmonic speed reducer static accuracy test fixture and its assembly method and application method
CN108132027A (en) * 2016-11-30 2018-06-08 北京航天计量测试技术研究所 Alignment measurement instrument integration school zero and alignment device
CN109238654A (en) * 2018-08-20 2019-01-18 河南省高远公路养护技术有限公司 A kind of raising laser depth of parallelism calibrating installation and method
CN110631523A (en) * 2019-10-16 2019-12-31 大连理工大学 Device and method for measuring position error between shafts of precise two-dimensional rotary table

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106556359A (en) * 2016-11-25 2017-04-05 中车戚墅堰机车有限公司 The method that body axiality is detected using body coaxality measuring mechanism
CN108132027A (en) * 2016-11-30 2018-06-08 北京航天计量测试技术研究所 Alignment measurement instrument integration school zero and alignment device
CN106840045A (en) * 2017-01-06 2017-06-13 中国科学院光电研究院 The accuracy detecting device and its detection method of a kind of autocollimator
CN107255561A (en) * 2017-05-27 2017-10-17 北京新立机械有限责任公司 Harmonic speed reducer static accuracy test fixture and its assembly method and application method
CN107255561B (en) * 2017-05-27 2019-04-23 北京新立机械有限责任公司 Harmonic speed reducer static accuracy test fixture and its assembly method and application method
CN109238654A (en) * 2018-08-20 2019-01-18 河南省高远公路养护技术有限公司 A kind of raising laser depth of parallelism calibrating installation and method
CN109238654B (en) * 2018-08-20 2020-04-10 河南省高远公路养护技术有限公司 Calibration device and method for improving laser parallelism
CN110631523A (en) * 2019-10-16 2019-12-31 大连理工大学 Device and method for measuring position error between shafts of precise two-dimensional rotary table

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