CN104515481B - Measure the device and method of large diameter circle facial plane degree - Google Patents
Measure the device and method of large diameter circle facial plane degree Download PDFInfo
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- CN104515481B CN104515481B CN201410788237.0A CN201410788237A CN104515481B CN 104515481 B CN104515481 B CN 104515481B CN 201410788237 A CN201410788237 A CN 201410788237A CN 104515481 B CN104515481 B CN 104515481B
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Abstract
Measure the device and method of large diameter circle facial plane degree, it is related to be machined the e measurement technology for debuging detection field, solve the problems, such as that the measurement apparatus of existing circular planes degree have complex structure and using limited, present measuring method causes measurement error, including precise rotating platform, interior focusing light pipe, fiber optic point source, leveling turntable mechanism, measuring staff and ccd detector due to there are problems that certainty of measurement low.Fiber optic point source is imaged on tested anchor ring top by this method first with interior focusing light pipe, precise rotating platform drives the picture point of spot light to be rotated in space and draws circle, then on the basis of the plane where this justifies, spot light picture point is received with ccd detector, the distance of measured point and datum plane is measured according to missing the target, the flatness that can obtain measured circle anchor ring is calculated finally by data processing.Certainty of measurement of the present invention is high, and data processing is simple, easy to operate, efficiency high, low cost；Detection of the present invention suitable for large scale annulus part flatness.
Description
Technical field
The e measurement technology of detection field is debug the present invention relates to be machined, and in particular to a kind of flat to large-diameter circular anchor ring
The apparatus and method of face degree detection.
Background technology
The high-acruracy survey of flatness is the important step that machining is debug in detection process, large scale circular ring type part
Diameter all in several meters of magnitudes, the accurate measurement of its flatness is always a difficult point, and the method that uses has water in production at present
Level method, many gauge head error separation methods, three-dimensional coordinates measurement method, level surface method, rotation of rotary table method, 3 analyzer methods and micro-alignment
Telescope method etc..
Wherein level meter method is most widely used, and due to using pitch point-to-point measurement, measuring speed is too slow, by external interference factor
Many, the most ripe application of the method is mainly for middle non-porous big plane in addition, in order to the division of examination network；Many gauge heads point
Micron-sized high accuracy can be obtained from method, but due to many using sensor, it is necessary to the data volume for the treatment of is big, complex structure, behaviour
Make inconvenience, using limited；Three-dimensional coordinates measurement method precision is reduced with the increase of measurement size, and mobile bridge type coordinate measuring machine is most
The annulus part of two meters or so of diameter can only be measured greatly, and portable coordinate measurement machine (articulated arm or laser tracker) can be surveyed
Amount large-scale part, but precision is relatively low, it is expensive；Level surface method system hardware configuration is complicated, and sampling site measurement process needs to wait
Liquid level stabilizing, efficiency is low, affected by environment big, low precision；Rotation of rotary table method due to by measurement cantilever stiffness influenceed, to big chi
The certainty of measurement of very little annulus is relatively low；3 analyzer methods be specific to the measurement of planeness of electro-optic theodolite turntable bearer ring and
Research and development, but due to 3 influences of analyzer stiffness by itself, only obtained very on one meter in diameter or so and following bearer ring
Good application；Micr-alignment telescope coordinates pentaprism to rotate to form datum plane, and the method is relatively adapted to annulus part flatness
Measurement, but because it uses parallel plate micrometer principle reading, during telemeasurement, by optical system picture element and multiplication factor
Influence, measurement error is larger.
The content of the invention
The present invention is that the measurement apparatus for solving the problems, such as existing circular planes degree have complex structure and using being limited, now
Measuring method causes measurement error due to there are problems that certainty of measurement low, there is provided one kind measurement large diameter circle facial plane
The device and method of degree.
Measure the device of large diameter circle facial plane degree, including precise rotating platform, interior focusing light pipe, fiber optic point source, turntable
Levelling gear, measuring staff and ccd detector；Precise rotating platform is placed in leveling turntable mechanism, and interior focusing light pipe is fixed on accurate turning
On platform table top, the interior focusing light pipe optical axis is vertical with the rotary shaft of precise rotating platform, the rotary shaft of the precise rotating platform with it is tested
The center superposition of anchor ring, the fiber optic point source is connected to the focal position of interior focusing light pipe, ccd detector target surface and measuring staff
Diameter parallel, measuring staff axis is vertical with tested anchor ring, and measuring staff head is sphere, and with tested anchor ring for point is contacted.
The method for measuring large diameter circle facial plane degree, the method is realized by following steps：
Step one, the position for marking measured point described in the position of measured point that measuring staff is placed on the first-class interval of tested anchor ring successively
Put, ccd detector is received the picture point of the fiber optic point source of different measured point positions, rotate precise rotating platform, make the difference
The picture point of the fiber optic point source of measured point position is zero in the miss distance of ccd detector horizontal direction, and it is vertical to record ccd detector
Nogata to miss distance；
Step 2, the miss distance to the record ccd detector vertical direction described in step one carry out data processing, obtain quilt
The error of anchor ring flatness is surveyed, the detection of the flatness to being tested anchor ring is realized.
Beneficial effects of the present invention：The present invention is innovated on the basis of conventional method and improved, and overcomes conventional method not
Foot, using optics and the method for image procossing, using interior focusing light pipe combination precise rotating platform, with fiber optic point source picture point in space
On the basis of the formed disc of rotation, receive fiber optic point source picture point with ccd detector and measure its miss distance, finally by number
The flatness of tested anchor ring is calculated according to treatment.Clearly, simple structure is easy to operate, high precision for the principle of the invention, practical
Property is strong.The present invention forms datum plane in an optical manner, and precision is not influenceed by the rigidity of structure；Using CCD direct measurement benchmark
The distance of hot spot and tested surface, certainty of measurement is high；For the measured circle ring of different-diameter, interior focusing light pipe is adjusted, optical fiber
Spot light picture point is transmitted to tested annulus top, measures strong adaptability；Simultaneously Site Detection can also be carried out with instruct rigidity compared with
Debuging for poor Large circular ring, meets its flatness error and requires.
Brief description of the drawings
Fig. 1 is the schematic device of measurement large diameter circle facial plane degree of the present invention.
In figure：1st, ccd detector, 2, fixed lens group, 3, focusing lens group, 4, fiber optic point source, 5, precise rotating platform, 6,
Leveling turntable mechanism, 7, measuring staff, 8, tested annulus.
Specific embodiment
Specific embodiment one, with reference to Fig. 1 illustrate present embodiment, measure large diameter circle facial plane degree device, should
Device includes precise rotating platform 5, interior focusing light pipe, fiber optic point source 4, leveling turntable mechanism 6, measuring staff 7 and ccd detector 1.Interior tune
Burnt light pipe is made up of fixed lens group 2 and focusing lens group 3.Precise rotating platform 5 is placed in leveling turntable mechanism 6, interior focusing light
Pipe is fixed on the table top of precise rotating platform 5, and fiber optic point source 4 is connected to the focal position of interior focusing light pipe, and ccd detector 1 is installed
On measuring staff 7.
The focusing lens group 3 in interior focusing light pipe described in present embodiment can be moved along optical axis direction, precise rotating platform 5
Rotation axis and the center superposition of tested anchor ring 8.Interior focusing light pipe optical axis is vertical with the rotary shaft of precise rotating platform 5.Ccd detector 1
Target surface and the diameter parallel of measuring staff 7, the axis of measuring staff 7 are vertical with tested anchor ring 8, and the head of measuring staff 7 is sphere, with tested anchor ring 8
It is a contact.
Specific embodiment two, present embodiment is the measurement large diameter circle facial plane degree described in specific embodiment one
Device method, the method concretely comprises the following steps：
First, interior focusing light pipe is regulated before measurement, measuring staff 7 is vertically placed on tested anchor ring 8, ccd detector 1 connects
The picture point of fiber optic point source 4 is received, the position of adjustment focusing lens group 3 makes picture point hot spot minimum.
Secondly, the attitude of precise rotating platform 5 is adjusted, the position of mobile measuring staff 7 makes ccd detector 1 in tested anchor ring 8
Upper equally spaced three diverse locations receive the picture point of fiber optic point source 4, and adjustment precise rotating platform levelling gear 6 makes picture point in CCD
The miss distance of the vertical direction of detector 1 is equal.
During measurement, first in the position of the tested first-class spaced markings measured point of anchor ring 8, then successively measuring staff 7 be placed on by
The position θ of measuring pointi, precise rotating platform 5 is rotated, make picture point be zero in the horizontal direction miss distance of ccd detector 1, record ccd detector
The miss distance y of 1 vertical directioni。
Finally, measurement data is processed, first measurement data yiIt is launched into Fourier space f (θi) carry out harmonic wave
Analysis, then removes constant termAnd first order harmonic wave Y1, obtain data ti。
Wherein：
Kth time item harmonic function：Yk=akcos kθi+bksin kθi
Again to (θi, ti) least squares line fitting is planar carried out, linear equation is：
A θ+Bt+C=0
Then each point (θ is calculatedi, ti) to fitting a straight line distance：
Last Calculation Plane degree error：Flatness=Dmax-Dmin。
In formula：yiIt is the miss distance of ccd detector vertical direction, θiIt is angle value of the measurement point position on anchor ring, ak
It is the coefficient of cosine component in kth time item harmonic function, bkIt is the coefficient of sinusoidal component in kth time item harmonic function；YkIt is kth
Secondary item harmonic function, tiTo remove the data after constant term and first order after frequency analysis, A, B and C are the coefficient of fitting a straight line,
DiIt is the distance of each point to fitting a straight line, DmaxIt is ultimate range, DminIt is minimum range, Flatness is flatness error.
Measuring method of the present invention forms datum plane in an optical manner, and precision is not influenceed by the rigidity of structure；Adopt
With the distance of ccd detector direct measurement benchmark hot spot and tested anchor ring, certainty of measurement is high；For the measured circle of different-diameter
Toric optical part, adjusts interior focusing light pipe, fiber optic point source picture point is transmitted to the top of tested anchor ring, measures adaptability
By force；The suitable mechanic factory workers of the present invention, big component assembling construction unit and detection metrological service use.
Claims (5)
1. measure large diameter circle facial plane degree device, including precise rotating platform (5), interior focusing light pipe, fiber optic point source (4),
Leveling turntable mechanism (6), measuring staff (7) and ccd detector (1)；Precise rotating platform (5) is placed in leveling turntable mechanism (6), interior tune
Burnt light pipe is fixed on precise rotating platform (5) table top, it is characterized in that, the rotation of the interior focusing light pipe optical axis and precise rotating platform (5)
Axle is vertical, the rotary shaft of the precise rotating platform (5) and the center superposition of tested anchor ring (8), fiber optic point source (4) connection
In the focal position of interior focusing light pipe, the diameter parallel of ccd detector (1) target surface and measuring staff (7), measuring staff (7) axis with it is tested
Anchor ring (8) is vertical, and measuring staff (7) head is sphere, and with tested anchor ring (8) to contact.
2. it is according to claim 1 measurement large diameter circle facial plane degree device, it is characterised in that the interior focusing light
Pipe is made up of fixed lens group (2) and focusing lens group (3)；Focusing lens group (3) in described interior focusing light pipe is along optical axis
Move in direction.
3. it is according to claim 2 measurement large diameter circle facial plane degree device method, it is characterised in that the method
Realized by following steps：
Step one, measuring staff (7) is placed on tested anchor ring (8) measured point described in the position of equally spaced mark measured point successively
On position, ccd detector (1) is received the picture point of the fiber optic point source (4) of different measured point positions, rotate precise rotating platform (5),
The picture point of the fiber optic point source (4) of the different measured point positions is set to be zero in the miss distance of ccd detector (1) horizontal direction,
And record the miss distance of ccd detector (1) vertical direction；
Step 2, the miss distance to record ccd detector (1) vertical direction described in step one carry out data processing, obtain quilt
The error of anchor ring (8) flatness is surveyed, the detection of the flatness to being tested anchor ring is realized.
4. it is according to claim 3 measurement large diameter circle facial plane degree method, it is characterised in that in step 2 obtain
The detailed process of flatness error is：Measurement miss distance data are launched into Fourier space first carries out frequency analysis, secondly,
Removal constant term and first order harmonic wave, again, carry out least square fitting, finally calculate flatness error.
5. it is according to claim 3 measurement large diameter circle facial plane degree method, it is characterised in that step one it
Before, also including the regulation to interior focusing light pipe, measuring staff (7) being vertically placed on tested anchor ring (8), ccd detector (1) is received
The picture point of fiber optic point source (4), the position of adjustment focusing lens group (3) makes picture point hot spot minimum；To precise rotating platform (5) attitude
Adjustment, the position of mobile measuring staff (7), the equally spaced different positions for making ccd detector (1) be marked on tested anchor ring (8)
The picture point for receiving fiber optic point source (4) is put, adjustment leveling turntable mechanism (6) makes picture point in ccd detector (1) vertical direction
Miss distance is equal.
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| US10976146B2 (en) | 2017-05-03 | 2021-04-13 | Dalian University Of Technology | System for shape error in-situ measurement of large-scale torus |
| WO2018201340A1 (en) * | 2017-05-03 | 2018-11-08 | 大连理工大学 | In-situ method for measuring shape error in flat ring surface |
| CN106979789B (en) * | 2017-05-16 | 2023-04-18 | 苏州迅威光电科技有限公司 | Device and method for detecting precision image of total station support |
| CN109597214A (en) * | 2018-12-29 | 2019-04-09 | 深圳航星光网空间技术有限公司 | The system for drawing optical antenna outgoing beam optical axis |
| CN112325809A (en) * | 2021-01-06 | 2021-02-05 | 广东技术师范大学 | Method for detecting flatness of flange |
| CN114001632B (en) * | 2021-11-02 | 2023-09-19 | 中国科学院光电技术研究所 | Flatness detection device and detection method for large ultra-precise annular plane |
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