CN114001632B - Flatness detection device and detection method for large ultra-precise annular plane - Google Patents

Flatness detection device and detection method for large ultra-precise annular plane Download PDF

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Publication number
CN114001632B
CN114001632B CN202111289232.XA CN202111289232A CN114001632B CN 114001632 B CN114001632 B CN 114001632B CN 202111289232 A CN202111289232 A CN 202111289232A CN 114001632 B CN114001632 B CN 114001632B
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detection
point
flatness
guide rail
seat
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CN114001632A (en
Inventor
董日清
余伦
髙七一
郭进
王洁璐
陈智明
叶小俊
李晨旭
陈飞飞
王涛
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Institute of Optics and Electronics of CAS
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Institute of Optics and Electronics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004Supports

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention discloses a flatness detection device and a flatness detection method for a plane of a large ultra-precise annular part, wherein the diameter of the detected annular part is 2000-3000mm, and the accuracy of detection reading can reach 0.002mm. The device comprises: three supporting point components, one detecting point component and two radial positioning components are fixed on a flatness detecting frame; in the detection process, the supporting points of the three fixed supporting point components and the detection point of one detection point component are required to be fixed on the circumference of the same diameter ring to be detected, and the rotating flatness detection frame uses the two radial positioning components to carry out radial positioning, so that the track of the supporting points of the three fixed supporting point components and the track of the detection point of one detection point component are ensured to be on the circumference of the same diameter during rotation. Taking a torsional spring dial indicator value of a device detection point, wherein the flatness= (maximum value of indicator value-minimum value of indicator value)/2. The flatness detection device provided by the invention has the advantages of simple structure, easiness in manufacturing, low cost and stable and reliable detection result.

Description

Flatness detection device and detection method for large ultra-precise annular plane
Technical Field
The invention belongs to the technical field of mechanical precision manufacturing, and particularly relates to a flatness detection device and a flatness detection method for a large ultra-precision annular plane.
Background
The high-precision bearing and the rotary part mostly adopt high-precision rotary bearings, and a plane thrust bearing (also called a turntable bearing) is used in heavy-duty precision bearing systems (such as telescope azimuth shafting bearing, radar azimuth shafting bearing, wind power bearing and the like), so that the manufacture of the heavy-duty high-precision bearing is one of core technologies of advanced manufacture in China. The invention discloses a large-scale bearing flatness detection technology, which is a core technology of a large-scale high-precision bearing, is one of key bottleneck technologies which are necessary to break through in the manufacturing industry of the large-scale high-precision bearing, and aims to solve the problems of flatness detection of a large-scale ultra-precise annular plane, in particular to the on-line detection of the processing and assembly of a large-scale ultra-precise rotary part, namely a plane thrust bearing.
The method for detecting the planeness of the large ultra-precise annular plane at present comprises the following steps: three-coordinate measuring instrument, laser tracker, laser plane method, turntable cantilever method, aircraft frame method, etc. The three-coordinate measuring instrument has high detection precision, and the detection size, the weight and the environmental requirements are high, so that the on-line detection of the processing and the detection of the large-scale parts cannot be met, and the detection cost is very expensive; the detection precision of the laser tracker is influenced by laser ranging and a measurement angle, the precision is relatively low, and the flatness detection requirement of an ultra-precise annular plane cannot be met; the laser plane method is relatively time-consuming to detect, the detection size is influenced by optical diffraction light spots, and annular parts with diameters exceeding phi 2500mm cannot be detected; the turntable cantilever method is influenced by the precision of a turntable and the rigidity of a cantilever, and the flatness detection of the annular part with the diameter exceeding the diameter phi 2300 cannot be performed with the detection precision; when the diameter of the detection plane is larger than phi 2300mm, the existing aircraft frame detection device is characterized in that (1) the stability of the structure is poor, (2) the self rigidity is low, (3) the weight exceeds 65KG, the repeatability of the detection dial indicator value of the reason of rapid abrasion of the supporting point is larger than or equal to 0.005mm (the detection plane precision requires a plane of 0.01mm, and the repeatability of the dial indicator value is considered as effective detection data within 0.005 mm). For the three reasons mentioned above, the detection accuracy of the airframe cannot meet the detection requirements of the ultra-precise plane thrust bearing plane.
Disclosure of Invention
The invention aims to solve the technical problems that: the diameter is larger than phi 2500mm, the flatness accuracy requirement is smaller than 0.01mm, and the flatness detection of the large ultra-precise annular part plane lacks a corresponding detection instrument and a corresponding detection method. The detection principle method of the invention still adopts a plane frame method (namely a three-point measurement method of plane unevenness of a circular part, see Jiang Wenhan, the three-point measurement method of plane unevenness of the circular part, optical engineering, 1977, NO.1, P7-P16) to comb the problems of the prior plane frame detection device in the using process, and the prior plane frame device is found to have the technical problems of poor structural stability, low rigidity, severe abrasion of supporting points and the like, and the interaction of the technical problems ensures that the plane frame method has low plane degree detection precision in the plane of a large ultra-precise annular part, long detection time, high technical level requirements of detection personnel and high detection environment requirements, so that the plane degree of the large ultra-precise annular part is abandoned to be detected by the plane frame method in engineering application.
In order to solve the technical problems, the invention is realized by the following scheme:
a flatness detection apparatus for a plane of a large ultra-precise annular part, the apparatus comprising:
the device comprises a flatness detection frame, two radial positioning assemblies, three supporting point assemblies and a detection point assembly;
four rectangular guide rail grooves are formed in the flatness detection frame, three supporting point assemblies are installed in the three guide rail grooves forming an included angle of 120 degrees, detection point assemblies are installed in the other guide rail groove forming an included angle of 60 degrees with the guide rail groove in which the adjacent supporting point assemblies are located, two radial positioning assemblies are installed in the two guide rail grooves adjacent to the guide rail groove in which the detection point assemblies are located, and the radial positioning assemblies are located on the inner sides of the supporting point assemblies in the same guide rail groove;
each supporting point component consists of a first locking nut, a first gasket, a fulcrum seat and a first hexagon socket head cap screw of a supporting point; the fulcrum seat penetrates through the upper part of the guide rail groove to be sequentially provided with a first gasket and a first locking nut, the lower part of the guide rail groove is provided with a supporting point, and the fulcrum seat is connected with the supporting point through a first hexagon socket head cap screw;
each detection point component consists of a second hexagon socket head cap screw, a second gasket, a detection seat, a detection point, a torsion spring dial indicator, a sliding block, a locking screw and a locking seat; the torsional spring dial indicator is arranged in the detection seat, and the second hexagon socket head cap screw penetrates through the second gasket from top to bottom to be connected with the detection seat; the side surface of the lower part of the detection seat is provided with a guide rail for placing the sliding block and penetrating the locking screw, the locking seat is arranged at the inlet of the guide rail, the measuring rod of the torsional spring dial indicator downwards penetrates out of the detection seat, and the detecting head of the torsional spring dial indicator at the end part of the measuring rod is a detecting point;
the radial positioning assembly consists of a second lock nut, a third washer, a sliding shaft and a rolling bearing; the sliding shaft penetrates through the upper part of the guide rail groove to be sequentially provided with a third gasket and a second locking nut, and the lower part of the sliding shaft is provided with the rolling bearing;
three supporting points and one detecting point are on a circumference; the guide rail groove is used for adjusting the positions of the supporting point and the detecting point to enable the four points to be located on the same circumference, and simultaneously is also used for adjusting the circle center of the circle where the two radial positioning components are located to coincide with the circle center of the circumference where the four points are located.
The flatness detection frame comprises a frame body, a plurality of support point assemblies, a plurality of connecting beams, a plurality of support point assemblies and a plurality of support point assemblies, wherein the parts of the flatness detection frame corresponding to the three support point assemblies are connected by the connecting beams in pairs, and the three connecting beams form a regular triangle; the beam connected between the part of the flatness detection frame corresponding to the detection point component and the part of the support point component corresponding to the detection point component forms an isosceles triangle and two right triangles; the beam of the part of each supporting point component on the flatness detection frame forms a regular triangle, and the beam of the part of each supporting point component on the flatness detection frame and the connecting beam form a regular hexagon.
The flatness detection frame is formed by decomposing the structure of the flatness detection frame into a space grid structure on the topological relation between three supporting points and one detecting point, wherein the space grid structure is formed by connecting hollow rectangular pipes with the thickness of 30mm multiplied by 2mm in a welding mode.
The contact surface of the supporting point and the part is designed to be a spherical surface, and engineering wear-resistant material SFRJ-6000 is adopted.
The detection seat can move in the guide rail groove and is used for adjusting the position of the detection point.
The supporting seat can move in the guide rail groove and is used for detecting different diameter planes of the adjusting part.
The locking seat can be detached and used for placing the torsional spring dial indicator into the detection seat and then fixing the torsional spring dial indicator with the detection seat, the locking screw pushes the sliding block to move inwards along the guide rail in the detection seat, and the torsional spring dial indicator is fixed on the detection seat through the pretightening force of the sliding block and the locking seat.
The sliding shaft can move in the guide rail and is used for adjusting the position of the rolling bearing.
The invention also provides a flatness detection method adopting the flatness detection device for the plane of the large ultra-precise annular part, which comprises the following steps:
1) Mounting flatness detecting device:
the method comprises the steps of respectively installing three supporting point assemblies in three guide rail grooves forming an included angle of 120 degrees, installing one detecting point assembly in the other guide rail groove forming an included angle of 60 degrees with the guide rail groove where the adjacent supporting point assemblies are located, adjusting the positions of the three supporting point assemblies and the detecting point assembly in the guide rail groove to be on the same circumference, respectively locking and fixing the three supporting points and the detecting point in the position of the guide rail groove through a first locking nut and a second hexagon socket head cap screw, and adjusting the positions of the centers of the two radial positioning assemblies in the guide rail groove, so that the outer circle of the rolling bearing is tangent to the inner hole of a measured part, the circle center of the circle where the two radial positioning assemblies are located coincides with the circle center of the circumference where the four points are located, and locking and fixing the radial positioning assemblies in the position of the guide rail groove through a second locking nut;
2) Flatness detection is implemented:
placing the flatness detection device on a part, uniformly spraying paraffin on the circumference of the part corresponding to a supporting point and a detection point, holding the outer end part of a flatness detection frame corresponding to a detection point component by hand, applying force to the outside to enable a radial positioning component to be positioned on an inner hole of the part, applying force horizontally on the outer end part of the detection frame by hand along the tangential direction of the outer circumference of the part, at the moment, enabling the flatness detection frame to be in contact with the part and perform relative rotation movement, uniformly arranging detection points on the circumferences of the supporting point and the detection point, taking the number of the points to be detected according to actual detection requirements, recording the indication value of a torsion spring dial gauge at each detection point, and then ensuring that the flatness of the part on the circumference is = (the maximum value of the indication value-the minimum value of the indication value)/2.
The number of points to be detected is 36 points, 54 points or 72 points.
The structure of the large ultra-precise annular plane flatness detection device innovates the structure of the aircraft frame, reasonably utilizes the stability of the triangle and regular hexagon structures, has 13 triangle structures from a macroscopic form, is one of the structural forms of extreme stability in nature, and has structural stability due to the triangle and regular hexagon structures and the layout mode.
The structure of the large ultra-precise annular plane flatness detection device adopts a space grid structure to connect the topological relation formed by three supporting points and one detecting point, and hollow rectangular aluminum pipes with the dimensions of 30mm multiplied by 2mm are adopted for welding the connection of each space point.
The supporting point in the large ultra-precise annular plane flatness detection device adopts engineering wear-resistant material SFRJ-6000, the material has the abrasion loss of less than 10um/km under the pressure of 20MPa, the friction coefficient is 0.05-0.23, the total weight of the large ultra-precise annular plane flatness detection device is 65kg, after the flying frame rotates for 3-5 circles, the flying frame can form a plane with the diameter phi 4mm due to the early abrasion, and the contact area of each supporting point of the flying frame is S=3.14× (4/2) 2 =12.56mm 2 The contact area of the three supporting points is 37.68mm 2 At this time, the contact pressure of the supporting point is p=65×9.8/37.68 ×10 6 =16.90 MPa, a circumference of 3.14×3=9.42×10 as a circumference of 3000mm in diameter - 3 m, the abrasion loss of the contact fulcrum is 10×9.42×10 -3 = 0.0942um, such an amount of wear is sufficient to meet the requirements of the detection accuracy of the parts.
Compared with the prior art, the invention has the advantages that:
(1) The invention can be used for detecting the diameter of the annular part by 2000-3000mm, and the repeatability of the detection dial indicator value reaches 0.002mm (the repeatability of the detection dial indicator value is considered as effective detection data within 0.005 mm). Compared with the existing measuring methods such as a three-coordinate measuring instrument, a laser tracker, a laser plane method, a turntable cantilever method and the like, the device is the detection device with the highest detection precision in the listed methods.
(2) The detection device has extremely high structural stability and rigidity with the existing aircraft frame structure, and the technical means of triangle-shaped stability structure, space grid structure of topological relation, hollow rectangular pipe and the like are applied to realize the large-scale high-stability high-rigidity lightweight integrated structural device.
(3) When the invention is used, the invention has the advantages of simple structure, good stability, simple and convenient operation, and about 3-5 minutes of flatness of a plane with the diameter of phi 2000-phi 3000mm is detected, and the invention has no requirement on detection environment, and is particularly suitable for online detection of processing and assembly of large-scale ultra-precise rotary parts (plane thrust bearings).
(4) The invention has the advantages of simple structure, good stability, simple and convenient operation, low manufacturing cost of the flatness detection device, lower detection cost compared with a three-coordinate measuring instrument, a laser tracker and a laser plane method, and lowest technical requirements on detection personnel.
Drawings
FIGS. 1a and 1b are front and cross-sectional views, respectively, of a large ultra-precise annular planar flatness detection system of the present invention;
FIG. 2 is a block diagram of a large ultra-precise annular planar flatness detection apparatus of the present invention;
FIG. 3 is a schematic view of a horizontal plane structure of the flatness detection frame of the present invention;
FIG. 4 is a schematic view showing the spatial configuration of the flatness detection frame of the present invention;
FIGS. 5a, 5b and 5c are block diagrams of the support point assembly of the present invention;
FIGS. 6a and 6b are block diagrams of the detection point assembly of the present invention;
fig. 7a and 7b are block diagrams of the radial positioning assembly of the present invention.
The reference numerals in the drawings denote: 1, a flatness detection frame; 2 radial positioning components; 3, supporting point components; 4, detecting a point component; 5, detecting the part to be detected; 6, supporting points; 7, detecting a point; 8, a first lock nut; 9 a first gasket; 10 fulcrum seats; 11 a first hexagon socket cap screw; a second hexagon socket cap screw; 13 a second gasket; 14, detecting a seat; 15 torsional spring dial gauge; a 16-slide block; 17 locking screws; 18 locking seats; a second lock nut 19; a third gasket 20; 21 sliding shafts; 22 rolling bearings.
Detailed Description
The structural components of the device for detecting the planeness of the plane of the large ultra-precise annular part and the adjustment requirements of each component are further described below with reference to the accompanying drawings and the detailed description.
As shown in fig. 1a and 1b, the flatness detection device for the plane of the large ultra-precise annular part of the invention is composed of four parts, namely a flatness detection frame 1, two radial positioning assemblies 2, three supporting point assemblies 3 and a detection point assembly 4. Each supporting point component 3 consists of a first lock nut 8, a first gasket 9, a fulcrum seat 10, a supporting point 6 and a first hexagon socket head cap screw 11; each detection point component 4 consists of a second hexagon socket head cap screw 12, a second gasket 13, a detection seat 14, a torsion spring dial gauge 15, a sliding block 16, a locking screw 17 and a locking seat 18; the radial positioning assembly 2 is composed of a second lock nut 19, a third washer 20, a sliding shaft 21 and a rolling bearing 22.
During detection, three supporting point assemblies are arranged in guide rail grooves with an included angle of 120 degrees, detection point assemblies are arranged in the rest guide rail grooves with an included angle of 60 degrees with the guide rail grooves of the adjacent supporting point assemblies, and two radial positioning assemblies are arranged in the two adjacent guide rail grooves of the detection point assemblies. The positions of the three supporting points and the detecting points in the radial direction of the guide rail groove are adjusted to be on the diameter (the diameter of the circumference with the same circle center being O) of the detected part needing to be detected in flatness, the positions of the three supporting points and one detecting point in the guide rail groove are locked and fixed through the first locking nut 8 and the second hexagon socket head cap screw 12, the positions of the centers of the two radial positioning components in the radial direction of the guide rail groove are adjusted, meanwhile, the outer circle of the bearing of the detecting component is tangential to the inner hole or the outer circle of the detected part, the circle center is also adjusted to be O, and the position of the positioning component in the guide rail groove is locked and fixed through the second locking nut 19, so that the structure diagram is shown in the attached figure 2.
In the detection process, the supporting points of the three fixed supporting point components and the detection point of one detection point component are required to be fixed on the circumference of the same diameter ring to be detected, and the rotating flatness detection frame uses the two radial positioning components to carry out radial positioning, so that the track of the supporting points of the three fixed supporting point components and the track of the detection point of one detection point component are ensured to be on the circumference of the same diameter during rotation. The detection frame contacts with the workpiece and rotates relatively, and three support points and the surface fluctuation of the part corresponding to the detection points can cause the variation of the torsional spring dial indicator value of the detection point.
As shown in fig. 2, three of the support points 6 are on one circumference with one of the detection points 7; the guide rail groove is used for adjusting the positions of the supporting point and the detecting point to enable the four points to be located on the same circumference, and simultaneously is also used for adjusting the circle center of the circle where the two radial positioning components are located to coincide with the circle center 0 of the circumference where the four points are located.
The horizontal plane structure mode of the flatness detection frame is shown in figure 3, the connecting beams at the centers of the three detection components form a regular triangle, the beams connected between two adjacent support components and the detection components form an isosceles triangle and two right triangles, the connecting beams of each support component form 1 regular triangle, the beams of 3 support point components and the beams of each support point form a regular hexagon, the horizontal plane structure mode has 13 triangle structures in total), and the detection frame of the structure mode has extremely high stability, so that the requirement of ultra-precise detection precision on stability can be met.
The space structure of the flatness detection frame is shown in figure 4, the structure of the flatness detection frame is decomposed into a space grid structure on the topological relation between three supporting points and one detecting point, the space grid structure is formed by connecting hollow rectangular pipes of 30 multiplied by 2 in a welding mode, the hollow rectangular pipes have good weight rigidity ratio, the topological relation formed by the structure of the space grid has extremely high weight rigidity ratio, and the flatness detection device of the large ultra-precise annular plane has the advantages of small weight and high rigidity, so that the requirement of ultra-precise detection precision on the weight rigidity ratio can be met.
As shown in fig. 5 (a) -5 (c), in each supporting point assembly 3, the supporting point seat 10 passes through the upper part of the guide rail groove and is sequentially provided with the first washer 9 and the first locking nut 8, the lower part is provided with the supporting point 6, and the supporting point seat 10 and the supporting point 6 are connected through the first hexagon socket head cap screw 11; the fulcrum seat can move in the guide rail groove of the detection frame to adjust the position of the supporting point (namely, adjust the diameter of the detected plane), so that the three supporting points are in the same circumference, the contact surface of the supporting point and the part is designed into a spherical surface, the point taking error is reduced, the supporting point adopts engineering wear-resistant material SFRJ-6000, and the material has extremely high wear resistance and overcomes the detection error caused by the rapid wear of the supporting point.
As shown in fig. 6 (a) -6 (b), in each detection point assembly 4, the torsion spring dial gauge 15 is installed in the detection seat 14, and the second hexagon socket head cap screw 12 passes through the second washer 13 from top to bottom to be connected with the detection seat 14; a guide rail for placing the sliding block 16 and penetrating the locking screw 17 is arranged on the side surface of the lower part of the detection seat 14, the locking seat 18 is arranged at the inlet of the guide rail, the measuring rod of the torsion spring dial indicator 15 penetrates out of the detection seat 14 downwards, and the detecting head of the torsion spring dial indicator at the end part of the measuring rod is a detecting point; the detection seat can move in the guide rail of the detection frame, the position of the detection point is adjusted, the detection point and the three supporting points are in the same circumference, the locking seat can be detached, the torsion spring dial indicator is placed in the detection seat and then fixed with the detection seat, the locking screw pushes the sliding block to move inwards along the guide rail in the detection seat, and the torsion spring dial indicator is fixed on the detection seat through the pretightening force of the sliding block and the locking seat.
As shown in fig. 7 (a) -7 (b), in the radial positioning assembly 2, the sliding shaft 21 passes through the upper part of the guide rail groove and is sequentially provided with a third washer 20 and a second locking nut 19, and the lower part is provided with the rolling bearing 22; the sliding shaft can move in the guide rail of the detection frame, and the positions of the radial positioning bearings are adjusted to enable the 2 radial positioning bearings to be concentric with the three supporting points and one detection point.
The flatness detection device provided by the invention has the advantages of simple structure, easiness in manufacturing, low cost and stable and reliable detection result, the detection range can meet the flatness detection of annular planes at different diameters by adjusting the positions of the supporting point component and the detecting point component, the detection precision is high, and the flatness detection device is suitable for online flatness detection of various large-scale ultra-precise annular part planes, and is especially suitable for online detection of processing and assembly of large-scale ultra-precise rotary parts (plane thrust bearings).
The method for detecting the flatness of the plane of the large ultra-precise annular part according to the present invention will be described below.
Uniformly distributing points to be detected on the circumference of a detected part in a circle, taking the points to be detected (recommended 36 points, 54 points or 72 points) according to actual detection requirements, using a marker pen to make marks of the points to be detected on the excircle corresponding to the positions of the points to be detected, uniformly spraying paraffin on the circumferences of the center points of the part supporting point assemblies and the center points of the detecting point assemblies, holding the outer end parts of the detecting frames corresponding to the detecting point assemblies in the flatness detecting frames 1 by hands, applying force to the outer sides to enable the radial positioning assemblies 2 to be positioned on the inner circles of the part, applying force horizontally in the circumferential tangential direction by hands, at the moment, enabling the detecting frames to be in contact with a workpiece and perform relative rotation, taking the points to be detected of a previous mark as starting points, turning the detecting device around for one circle, and checking whether the reading indication value of the torsion spring dial gauge returns to zero at the starting point of the part, namely that the reading indication value relative difference value of the torsion spring dial gauge is within 0.005mm, and taking the paraffin to be effective detection data.
And after verifying that the detection data are effective, rotating the detection frame, detecting point by point and recording the dial indicator number of the torsion spring of each detection point. After one revolution, the flatness of the measured part= (maximum value of the torsion spring dial indicator value-minimum value of the torsion spring dial indicator value)/2. The invention is not described in detail in part as being well known in the art.
While the invention has been described with respect to certain preferred embodiments, it will be apparent to those skilled in the art that various changes and substitutions can be made herein without departing from the scope of the invention as defined by the appended claims.

Claims (8)

1. A flatness detection device for a large ultra-precise annular part plane is characterized in that,
the device comprises:
a flatness detection frame (1), two radial positioning components (2), three supporting point components (3) and a detection point component (4);
four rectangular guide rail grooves are formed in the flatness detection frame (1), three supporting point assemblies (3) are installed in the three guide rail grooves forming an included angle of 120 degrees, detection point assemblies (4) are installed in the other guide rail groove forming an included angle of 60 degrees with the guide rail groove in which the adjacent supporting point assemblies (3) are located, two radial positioning assemblies (2) are installed in the two guide rail grooves adjacent to the guide rail groove in which the detection point assemblies (4) are located, and the radial positioning assemblies (2) are located on the inner sides of the supporting point assemblies (3) in the same guide rail groove;
each supporting point component (3) consists of a first lock nut (8), a first gasket (9), a fulcrum seat (10), a supporting point (6) and a first hexagon socket head cap screw (11); the fulcrum seat (10) penetrates through the upper part of the guide rail groove to be sequentially provided with a first gasket (9) and a first locking nut (8), the lower part of the guide rail groove is provided with a supporting point (6), and the fulcrum seat (10) is connected with the supporting point (6) through the first hexagon socket head cap screw (11);
each detection point component (4) consists of a second hexagon socket head cap screw (12), a second gasket (13), a detection seat (14), a detection point (7), a torsion spring dial indicator (15), a sliding block (16), a locking screw (17) and a locking seat (18); the torsional spring dial indicator (15) is arranged in the detection seat (14), and the second hexagon socket head cap screw (12) penetrates through the second gasket (13) from top to bottom to be connected with the detection seat (14); a guide rail for placing a sliding block (16) and penetrating a locking screw (17) is arranged on the side surface of the lower part of the detection seat (14), the locking seat (18) is arranged at the inlet of the guide rail, a measuring rod of the torsion spring dial indicator (15) penetrates out of the detection seat (14) downwards, and a torsion spring dial indicator detecting head at the end part of the measuring rod is a detecting point (7);
the radial positioning assembly (2) consists of a second lock nut (19), a third washer (20), a sliding shaft (21) and a rolling bearing (22); the sliding shaft (21) penetrates through the upper part of the guide rail groove to be sequentially provided with a third gasket (20) and a second lock nut (19), and the lower part of the sliding shaft is provided with the rolling bearing (22);
three of the support points (6) are on a circumference with one of the detection points (7); the guide rail groove is used for adjusting the positions of the supporting point and the detecting point to enable the four points to be positioned on the same circumference, and simultaneously is also used for adjusting the circle center of the circle where the two radial positioning components are positioned to coincide with the circle center (0) of the circumference where the four points are positioned,
the flatness detection frame comprises a frame body, a plurality of support point assemblies, a plurality of connecting beams, a plurality of support point assemblies and a plurality of support point assemblies, wherein the parts of the flatness detection frame corresponding to the three support point assemblies are connected by the connecting beams in pairs, and the three connecting beams form a regular triangle; the beam connected between the part of the flatness detection frame corresponding to the detection point component and the part of the support point component corresponding to the detection point component forms an isosceles triangle and two right triangles; the beam of the part of each supporting point component on the flatness detection frame forms a regular triangle, and the beam of the part of each supporting point component on the flatness detection frame and the connecting beam form a regular hexagon; the flatness detection frame is formed by decomposing the structure of the flatness detection frame into a space grid structure on the topological relation between three supporting points and one detection point, wherein the space grid structure is formed by adopting a mode of welding hollow rectangular pipes with the thickness of 30mm multiplied by 2m, and the supporting points are made of engineering wear-resistant materials SFRJ-6000.
2. The flatness inspection apparatus for a large ultra-precise annular part plane according to claim 1, characterized in that:
the contact surface between the supporting point and the part is designed to be a spherical surface.
3. The flatness inspection apparatus for a large ultra-precise annular part plane according to claim 1, characterized in that:
the supporting seat is movable in the guide rail groove and used for detecting different diameter planes of the adjusting part.
4. The flatness inspection apparatus for a large ultra-precise annular part plane according to claim 1, characterized in that:
the detection seat is movable in the guide rail groove and is used for adjusting the position of the detection point.
5. The flatness inspection apparatus for a large ultra-precise annular part plane according to claim 1, characterized in that:
the locking seat is detachable and is used for placing the torsional spring dial indicator into the detection seat and then fixing the torsional spring dial indicator with the detection seat, the locking screw pushes the sliding block to move inwards along the guide rail in the detection seat, and the torsional spring dial indicator is fixed on the detection seat through the pretightening force of the sliding block and the locking seat.
6. The flatness inspection apparatus for a large ultra-precise annular part plane according to claim 1, characterized in that:
the sliding shaft is movable in the guide rail and is used for adjusting the position of the rolling bearing.
7. A method for detecting the flatness of a large ultra-precise annular part by using the flatness detecting device according to any one of claims 1-6, characterized in that,
the detection method comprises the following steps:
1) Mounting flatness detecting device:
the three supporting point assemblies (3) are respectively arranged in three guide rail grooves forming an included angle of 120 degrees, one detecting point assembly (4) is arranged in the other guide rail groove forming an included angle of 60 degrees with the guide rail groove where the adjacent supporting point assembly (3) is arranged, the supporting point and the detecting point are adjusted to be on the same circumference by adjusting the positions of the three supporting point assemblies (3) and the one detecting point assembly (4) in the guide rail groove, the three supporting points and the one detecting point are respectively locked and fixed at the positions of the guide rail groove by a first locking nut (8) and a second hexagon socket head screw (12), the positions of the centers of the two radial positioning assemblies (2) in the guide rail groove are adjusted, the outer circle of the rolling bearing is tangent with the inner hole of a part to be detected, the circle center of the circle where the two radial positioning assemblies are arranged is coincident with the circle center (0) of the circumference where the four points are arranged, and the positions of the radial positioning assemblies (2) in the guide rail groove are locked and fixed by a second locking nut (19);
2) Flatness detection is implemented:
placing the flatness detection device on a part (5), uniformly spraying paraffin on the circumference of the part corresponding to a supporting point and a detection point, holding the outer end part of a flatness detection frame (1) corresponding to a detection point assembly (4) by hands, applying force to the outside to enable a radial positioning assembly (2) to be positioned on an inner hole of the part, applying force to the outer end part of the detection frame horizontally by hands along the tangential direction of the outer circumference of the part, at the moment, enabling the flatness detection frame (1) to be in contact with the part and perform relative rotation, uniformly setting the detection points to be detected on the circumferences of the supporting point and the detection point, taking the number of points to be detected according to actual detection requirements, and recording the indication value of a torsion spring dial gauge at each detection point, wherein the flatness= (maximum indication value-minimum indication value of the indication value)/2 of the part on the circumference is obtained.
8. The flatness detection method according to claim 7, characterized in that:
the number of points to be detected is 36 points, 54 points or 72 points.
CN202111289232.XA 2021-11-02 2021-11-02 Flatness detection device and detection method for large ultra-precise annular plane Active CN114001632B (en)

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Citations (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU726927A1 (en) * 1973-07-02 1981-07-15 Специальное Конструкторское Бюро Попроектированию Шлифовального Оборудо-Вания Device for measuring deviation of circular surface from flat form
JPS58147605A (en) * 1982-02-26 1983-09-02 Hitachi Ltd Measuring device
JPH06341804A (en) * 1993-05-31 1994-12-13 Mitsubishi Materials Corp Flatness measuring jig
JPH1058308A (en) * 1996-05-29 1998-03-03 Ebara Corp Polishing device
JP2002071342A (en) * 2000-08-25 2002-03-08 T Sendzimir Inc Flatness-measuring device for strip
JP2005172487A (en) * 2003-12-09 2005-06-30 Micro Engineering Inc Flatness measurement method and flatness measurement program
JP2005337753A (en) * 2004-05-24 2005-12-08 Nsk Ltd Sensor ring, flatness inspection method, and rotation deflection accuracy inspection method
JP2006311654A (en) * 2005-04-26 2006-11-09 Igarashi Denki Seisakusho:Kk Electric actuator
CN1995911A (en) * 2006-12-28 2007-07-11 长安汽车(集团)有限责任公司 Method for detecting planeness of large-sized ring-shaped platform
CN102628667A (en) * 2012-05-04 2012-08-08 南京三邦金属复合材料有限公司 Unevenness detecting device and detecting method for composite material plate
CN202661028U (en) * 2012-05-07 2013-01-09 四川劲德兴汽车配件有限公司 Detection device for detecting concentricity and flatness of products
CN203141227U (en) * 2012-11-20 2013-08-21 北京海普瑞森科技发展有限公司 Ultra-precise air-floatation adjusting rotary table
CN203337080U (en) * 2013-07-03 2013-12-11 广西玉柴机器股份有限公司 Cylinder cover flatness testing tool
CN103983219A (en) * 2014-06-06 2014-08-13 中国科学院光电技术研究所 In-situ measurement method for large-size flatness
CN203869642U (en) * 2013-11-21 2014-10-08 洛阳Lyc轴承有限公司 Multifunctional portable oversize bearing ring end face curvature detector
CN104515481A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Device and method for measuring planeness of large-diameter torus
CN105115407A (en) * 2015-09-11 2015-12-02 苏州嘉德鲁机电科技有限公司 Portable multifunctional planeness detection device and application method therefor
CN105716510A (en) * 2016-04-07 2016-06-29 合肥美桥汽车传动及底盘系统有限公司 Device for comprehensively detecting planeness and roundness of rear axle passive gear
CN107152922A (en) * 2017-05-03 2017-09-12 大连理工大学 A kind of method of on-position measure annular plane form error
JP2018021613A (en) * 2016-08-04 2018-02-08 日本精工株式会社 Clearance measurement method of hub unit bearing
CN207019617U (en) * 2017-06-27 2018-02-16 蓝晶科技(义乌)有限公司 Wafer surface flatness detector
CN109238114A (en) * 2018-08-22 2019-01-18 芜湖市黄山松工业地坪新材料有限公司 Flatness checking device is used in a kind of processing of construction material
CN208860233U (en) * 2018-07-18 2019-05-14 南京布雷尔汽车配件有限公司 A kind of braking disc detector
CN209470659U (en) * 2019-04-09 2019-10-08 徐州徐工基础工程机械有限公司 A kind of annular surface flatness checking device
CN209910570U (en) * 2019-06-17 2020-01-07 大连东晟达铸造有限公司 Heavy-duty car support blank flatness and parallelism detection platform
CN112013753A (en) * 2020-08-04 2020-12-01 南京信息职业技术学院 Tool for measuring planeness of small circular boss on end surface of large pipe
CN112960137A (en) * 2021-02-22 2021-06-15 凌云(宜昌)航空装备工程有限公司 Flexible adjusting and positioning device for aviation high-temperature conduit and novel manufacturing process
CN114018183A (en) * 2021-10-21 2022-02-08 湖南恒岳重钢钢结构工程有限公司 Device and method for measuring flatness of tower barrel
CN217032443U (en) * 2022-01-06 2022-07-22 深圳菲思伦科技有限公司 Online circulator flatness automatic test equipment
CN115451788A (en) * 2022-09-06 2022-12-09 中国科学院光电技术研究所 Online detection tool and detection method for large optical platform

Patent Citations (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU726927A1 (en) * 1973-07-02 1981-07-15 Специальное Конструкторское Бюро Попроектированию Шлифовального Оборудо-Вания Device for measuring deviation of circular surface from flat form
JPS58147605A (en) * 1982-02-26 1983-09-02 Hitachi Ltd Measuring device
JPH06341804A (en) * 1993-05-31 1994-12-13 Mitsubishi Materials Corp Flatness measuring jig
JPH1058308A (en) * 1996-05-29 1998-03-03 Ebara Corp Polishing device
JP2002071342A (en) * 2000-08-25 2002-03-08 T Sendzimir Inc Flatness-measuring device for strip
JP2005172487A (en) * 2003-12-09 2005-06-30 Micro Engineering Inc Flatness measurement method and flatness measurement program
JP2005337753A (en) * 2004-05-24 2005-12-08 Nsk Ltd Sensor ring, flatness inspection method, and rotation deflection accuracy inspection method
JP2006311654A (en) * 2005-04-26 2006-11-09 Igarashi Denki Seisakusho:Kk Electric actuator
CN1995911A (en) * 2006-12-28 2007-07-11 长安汽车(集团)有限责任公司 Method for detecting planeness of large-sized ring-shaped platform
CN102628667A (en) * 2012-05-04 2012-08-08 南京三邦金属复合材料有限公司 Unevenness detecting device and detecting method for composite material plate
CN202661028U (en) * 2012-05-07 2013-01-09 四川劲德兴汽车配件有限公司 Detection device for detecting concentricity and flatness of products
CN203141227U (en) * 2012-11-20 2013-08-21 北京海普瑞森科技发展有限公司 Ultra-precise air-floatation adjusting rotary table
CN203337080U (en) * 2013-07-03 2013-12-11 广西玉柴机器股份有限公司 Cylinder cover flatness testing tool
CN203869642U (en) * 2013-11-21 2014-10-08 洛阳Lyc轴承有限公司 Multifunctional portable oversize bearing ring end face curvature detector
CN103983219A (en) * 2014-06-06 2014-08-13 中国科学院光电技术研究所 In-situ measurement method for large-size flatness
CN104515481A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Device and method for measuring planeness of large-diameter torus
CN105115407A (en) * 2015-09-11 2015-12-02 苏州嘉德鲁机电科技有限公司 Portable multifunctional planeness detection device and application method therefor
CN105716510A (en) * 2016-04-07 2016-06-29 合肥美桥汽车传动及底盘系统有限公司 Device for comprehensively detecting planeness and roundness of rear axle passive gear
JP2018021613A (en) * 2016-08-04 2018-02-08 日本精工株式会社 Clearance measurement method of hub unit bearing
CN107152922A (en) * 2017-05-03 2017-09-12 大连理工大学 A kind of method of on-position measure annular plane form error
CN207019617U (en) * 2017-06-27 2018-02-16 蓝晶科技(义乌)有限公司 Wafer surface flatness detector
CN208860233U (en) * 2018-07-18 2019-05-14 南京布雷尔汽车配件有限公司 A kind of braking disc detector
CN109238114A (en) * 2018-08-22 2019-01-18 芜湖市黄山松工业地坪新材料有限公司 Flatness checking device is used in a kind of processing of construction material
CN209470659U (en) * 2019-04-09 2019-10-08 徐州徐工基础工程机械有限公司 A kind of annular surface flatness checking device
CN209910570U (en) * 2019-06-17 2020-01-07 大连东晟达铸造有限公司 Heavy-duty car support blank flatness and parallelism detection platform
CN112013753A (en) * 2020-08-04 2020-12-01 南京信息职业技术学院 Tool for measuring planeness of small circular boss on end surface of large pipe
CN112960137A (en) * 2021-02-22 2021-06-15 凌云(宜昌)航空装备工程有限公司 Flexible adjusting and positioning device for aviation high-temperature conduit and novel manufacturing process
CN114018183A (en) * 2021-10-21 2022-02-08 湖南恒岳重钢钢结构工程有限公司 Device and method for measuring flatness of tower barrel
CN217032443U (en) * 2022-01-06 2022-07-22 深圳菲思伦科技有限公司 Online circulator flatness automatic test equipment
CN115451788A (en) * 2022-09-06 2022-12-09 中国科学院光电技术研究所 Online detection tool and detection method for large optical platform

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
姜文汉 ; .圆环形零件平面不平度的三点测量法.光电工程.1977,(01),第11-20页. *
陈国勋 ; .三点测定器的设计与应用.光电工程.1977,(01),第21-33页. *
陈小宁.基于双目视觉和投影圆的平面度非接触检测方法.《四川兵工学报》.2013,第34卷(第3期),第99-102+120页. *

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