CN114001632B - Flatness detection device and detection method for large ultra-precise annular plane - Google Patents
Flatness detection device and detection method for large ultra-precise annular plane Download PDFInfo
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Abstract
本发明公开了一种大型超精密环形零件平面的平面度检测装置和检测方法，检测环形零件的直径为2000‑3000mm，检测读数精度可以达到0.002mm。所述装置包括：在一个平面度检测架上固定三个支撑点组件，一个检测点组件，两个径向定位组件；在检测过程中，要求三个固定支撑点组件的支撑点和一个检测点组件的检测点都固定在同一被测直径圆环的圆周上，旋转平面度检测架利用两个径向定位组件进行径向定位，保证旋转时三个固定支撑点组件的支撑点和一个检测点组件的检测点的轨迹在同一直径的圆周上。取装置检测点的扭簧千分表示值，平面度＝(示值的最大值‑示值的最小值)/2。本发明的平面度检测装置结构简单，易制作，成本低廉，检测结果稳定可靠。
The invention discloses a flatness detection device and detection method for the plane of large ultra-precision annular parts. The diameter of the detected annular part is 2000-3000mm, and the detection reading accuracy can reach 0.002mm. The device includes: fixing three support point components, one detection point component, and two radial positioning components on a flatness detection frame; during the detection process, the support points of the three fixed support point components and one detection point are required. The detection points of the components are all fixed on the circumference of the ring with the same measured diameter. The rotating flatness detection frame uses two radial positioning components for radial positioning to ensure that the support points of the three fixed support point components and one detection point during rotation The locus of the detection point of the component is on the same diameter circle. Take the thousandth indication value of the torsion spring at the detection point of the device, and the flatness = (maximum value of the indication value - minimum value of the indication value)/2. The flatness detection device of the present invention has a simple structure, is easy to manufacture, is low in cost, and has stable and reliable detection results.
Description
技术领域Technical field
本发明属于机械精密制造技术领域，具体涉及一种大型超精密环形平面的平面度检测装置和检测方法。The invention belongs to the technical field of mechanical precision manufacturing, and specifically relates to a flatness detection device and detection method for a large ultra-precision annular plane.
背景技术Background technique
高精度支承以及回转部件多采用高精度的回转轴承，在重型精密支承系统(如望远镜方位轴系支承轴承，雷达方位轴系支承轴承，风电轴承等)均用到了平面止推轴承(也称为转盘轴承)，此类重载高精度轴承的制造是我国先进制造的核心技术之一。大型轴承平面度的检测技术是大型高精度轴承的核心技术，也是大型高精度轴承制造业必须突破的关键瓶颈技术之一，本发明就是为了解决大型超精密环形平面的平面度检测，尤其大型超精密回转零件——平面止推轴承的加工与装配的在线检测的难题。High-precision supports and rotating parts mostly use high-precision slewing bearings. Planar thrust bearings (also known as planar thrust bearings) are used in heavy-duty precision support systems (such as telescope azimuth shafting support bearings, radar azimuth shafting support bearings, wind power bearings, etc.) Slewing bearings), the manufacturing of such heavy-duty, high-precision bearings is one of the core technologies of my country's advanced manufacturing. The detection technology of large-scale bearing flatness is the core technology of large-scale high-precision bearings, and it is also one of the key bottleneck technologies that must be broken through in the large-scale high-precision bearing manufacturing industry. The present invention is to solve the problem of flatness detection of large-scale ultra-precision annular planes, especially large-scale ultra-precision bearings. Precision rotary parts - the problem of online inspection of the processing and assembly of plane thrust bearings.
目前大型超精密环形平面的平面度检测可以利用的方法有：三坐标测量仪，激光跟踪仪，激光平面法，转台悬臂法和飞机架法等。三坐标测量仪检测精度高，由于其检测尺寸，重量以及对环境的要求较高，不能满足大型零件加工与检测的在线检测，检测成本也十分昂贵；激光跟踪仪的检测精度受激光测距与测量角度的影响，其精度相对较低，不能满足超精密环形平面的平面度检测要求；激光平面法检测相对比较费时，检测尺寸受光学衍射光斑的影响，不能对超过Φ2500mm直径的环形零件进行检测；转台悬臂法受转台精度以及悬臂刚性的影响，检测精度不能直径超过Φ2300直径的环形零件的平面度检测；当检测平面直径在大于Φ2300mm时，现有飞机架检测装置由于①自身结构的稳定性差，②自身刚度低，③重量超过65KG，支撑点急剧磨损的原因检测千分表示值的重复性大于等于0.005mm(检测平面度精度要求0.01mm的平面，千分表示值重复性在0.005mm内认为是有效检测数据)。由于上述三种原因，飞机架的检测精度不能满足超精密平面止推轴承平面的检测要求。At present, the methods that can be used to detect the flatness of large ultra-precision annular planes include: three-dimensional coordinate measuring instrument, laser tracker, laser plane method, turntable cantilever method and aircraft frame method, etc. The three-coordinate measuring instrument has high detection accuracy. Due to its high detection size, weight and environmental requirements, it cannot meet the online detection of large parts processing and detection, and the detection cost is also very expensive. The detection accuracy of the laser tracker is affected by laser ranging and Affected by the measurement angle, its accuracy is relatively low and cannot meet the flatness detection requirements of ultra-precision annular planes; laser plane method detection is relatively time-consuming, and the detection size is affected by optical diffraction spots, so it cannot detect annular parts with a diameter exceeding Φ2500mm. ; The turntable cantilever method is affected by the accuracy of the turntable and the rigidity of the cantilever, and the detection accuracy cannot be used to detect the flatness of annular parts with a diameter exceeding Φ2300. When the diameter of the detection plane is greater than Φ2300mm, the existing aircraft frame detection device has poor stability due to ① its own structure , ② its own stiffness is low, ③ the weight exceeds 65KG, and the reason for the rapid wear of the support points is that the repeatability of the detection value in thousandths is greater than or equal to 0.005mm (the detection flatness accuracy requires a plane of 0.01mm, the repeatability of the detection value in thousandths is within 0.005mm considered to be valid detection data). Due to the above three reasons, the detection accuracy of the aircraft frame cannot meet the detection requirements of the ultra-precision plane thrust bearing plane.
发明内容Contents of the invention
本发明要解决的技术问题是：直径大于Φ2500mm，平面度精度要求小于0.01mm的环形零件，此类大型超精密环形零件平面的平面度检测缺乏相应的检测仪器和相对应的检测方法。本发明的检测原理方法仍采用飞机架法(即圆环形零件平面不平度的三点测量法，参见姜文汉，圆环形零件平面不平度的三点测量法，《光学工程》，1977年，NO.1，P7-P16)，对现有飞机架检测装置在使用过程的问题进行梳理，发现现有飞机架装置具有结构稳定性差，刚度低，支撑点磨损剧烈等技术问题，这些技术问题相互作用使飞机架法在大型超精密环形零件平面的平面度检测精度低，检测费时长，检测人员技术水平要求高，检测环境要求高，这些原因使工程应用中放弃使用飞机架法检测大型超精密环形零件平面的平面度。The technical problem to be solved by this invention is: for annular parts with a diameter greater than Φ2500mm and a flatness accuracy requirement of less than 0.01mm, the flatness detection of such large ultra-precision annular parts lacks corresponding detection instruments and corresponding detection methods. The detection principle method of the present invention still adopts the aircraft frame method (that is, the three-point measurement method of the plane unevenness of circular parts, see Jiang Wenhan, the three-point measurement method of the plane unevenness of circular parts, "Optical Engineering", 1977 , NO.1, P7-P16), sorted out the problems in the use of existing aircraft frame detection devices, and found that the existing aircraft frame devices have technical problems such as poor structural stability, low stiffness, and severe wear of support points. These technical problems The interaction makes the aircraft frame method have low accuracy in flatness detection of large ultra-precision annular parts, long detection time, high technical requirements for inspection personnel, and high requirements for the inspection environment. These reasons have led to the abandonment of the aircraft frame method for detecting large ultra-precision parts in engineering applications. Flatness of precision ring part planes.
为解决以上技术问题，本发明通过以下方案来实现：In order to solve the above technical problems, the present invention is implemented through the following solutions:
一种大型超精密环形零件平面的平面度检测装置，该装置包括：A flatness detection device for large ultra-precision annular parts, which includes:
一个平面度检测架、两个径向定位组件，三个支撑点组件，一个检测点组件；One flatness detection frame, two radial positioning components, three support point components, and one detection point component;
所述平面度检测架上设置有四个矩形导轨槽，三个所述支撑点组件在成120°夹角的三个所述导轨槽内安装，所述检测点组件在与相邻的支撑点组件所在导轨槽成60°夹角的另一所述导轨槽内安装，两个径向定位组件在与检测点组件所在导轨槽相邻的两个所述导轨槽内安装，所述径向定位组件位于同一导轨槽内的支撑点组件的内侧；The flatness detection frame is provided with four rectangular guide rail grooves, and the three support point assemblies are installed in the three guide rail grooves at an angle of 120°. The detection point assembly is at an adjacent support point. The component is installed in another guide rail groove with an included angle of 60°. Two radial positioning components are installed in the two guide rail grooves adjacent to the guide rail groove where the detection point assembly is located. The radial positioning components The component is located inside the support point component in the same guide rail groove;
每个支撑点组件由第一锁紧螺母,第一垫圈，支点座，支撑点第一内六角圆柱头螺钉组成；所述支点座穿过导轨槽的上部依次安装第一垫圈和第一锁紧螺母，下部安装有支撑点，且支点座和支撑点通过所述第一内六角圆柱头螺钉连接；Each support point assembly is composed of a first locking nut, a first washer, a fulcrum seat, and a first hexagon socket head screw at the support point; the fulcrum seat passes through the upper part of the guide rail groove and is sequentially installed with the first washer and the first locking screw. The nut has a support point installed on the lower part, and the fulcrum seat and the support point are connected through the first hexagon socket head screw;
每个检测点组件由第二内六角圆柱头螺钉,第二垫圈，检测座，检测点、扭簧千分表，滑块，锁紧螺钉，锁紧座组成；所述扭簧千分表安装在检测座内，所述第二内六角圆柱头螺钉从上到下穿过第二垫圈与检测座连接；所述检测座的下部侧面设置供滑块放置以及锁定螺钉穿入的导轨，该导轨入口安装有所述锁紧座，所述扭簧千分表的测量杆朝下穿出检测座，测量杆端部的扭簧千分表探测头即为检测点；Each detection point assembly is composed of a second hexagon socket head screw, a second washer, a detection seat, a detection point, a torsion spring dial indicator, a slider, a locking screw, and a locking seat; the torsion spring dial indicator is installed In the detection seat, the second hexagon socket head screw passes through the second washer from top to bottom and is connected to the detection seat; a guide rail is provided on the lower side of the detection seat for the slider to be placed and the locking screw to penetrate. The locking seat is installed at the entrance, and the measuring rod of the torsion spring dial indicator passes downwards out of the detection seat, and the torsion spring dial indicator probe at the end of the measuring rod is the detection point;
径向定位组件由第二锁紧螺母，第三垫圈，滑动轴，滚动轴承组成；所述滑动轴穿过导轨槽的上部依次安装第三垫圈和第二锁紧螺母，下部安装所述滚动轴承；The radial positioning assembly is composed of a second locking nut, a third washer, a sliding shaft, and a rolling bearing; the sliding shaft passes through the upper part of the guide rail groove and is sequentially installed with a third washer and a second locking nut, and the rolling bearing is installed at the lower part;
三个所述支撑点与一个所述检测点在一个圆周上；所述导轨槽用以调整支撑点与检测点位置使该四个点位于同一圆周上，同时也用以调整两个径向定位组件所在圆的圆心与上述四点所在圆周的圆心重合。Three support points and one detection point are on a circle; the guide rail groove is used to adjust the positions of the support points and the detection point so that the four points are on the same circle, and is also used to adjust two radial positionings. The center of the circle where the component is located coincides with the center of the circle where the above four points are located.
其中，平面度检测架上对应三个支撑点组件的部分之间通过连接梁两两相连，三根所述连接梁构成一个正三角形；平面度检测架上对应检测点组件的部分及对应相邻于该检测点组件的支撑点组件的部分之间相连接的梁构成一个等腰三角形与两个直角三角形；平面度检测架上每个支撑点组件所在部分的梁构成一个正三角形，且平面度检测架上三个支撑点组件所在部分的梁与所述连接梁构成一个正六边形。Among them, the parts of the flatness detection frame corresponding to the three support point components are connected in pairs by connecting beams, and the three connecting beams form an equilateral triangle; the parts of the flatness detection frame corresponding to the detection point components and the parts adjacent to The beams connected between the support point components of the detection point component form an isosceles triangle and two right triangles; the beams of the portion of each support point component on the flatness detection frame form an equilateral triangle, and the flatness detection The beams on the parts where the three supporting point components are mounted and the connecting beams form a regular hexagon.
其中，平面度检测架由所述在三个支撑点和一个检测点之间的拓扑关系上将其结构分解成空间网格结构，该空间网格结构采取30mm×30mm×2mm的空心矩形管焊接的方式连接而成。Among them, the flatness detection frame is decomposed into a spatial grid structure based on the topological relationship between three support points and one detection point. The spatial grid structure adopts a 30mm×30mm×2mm hollow rectangular tube welding connected in a way.
其中，所述支撑点与零件的接触面设计为圆球面，采用工程耐磨材料SFRJ-6000。Among them, the contact surface between the support point and the part is designed as a spherical surface, and the engineering wear-resistant material SFRJ-6000 is used.
其中，所述检测座在导轨槽内可以移动，用于调整检测点的位置。Wherein, the detection seat can move in the guide rail groove for adjusting the position of the detection point.
其中，支撑座在导轨槽内可以移动，用于调整零件不同直径平面的检测。Among them, the support seat can move in the guide rail groove and is used to adjust the detection of planes with different diameters of the parts.
其中，所述锁紧座可以拆开，用以将扭簧千分表放入检测座内，再与检测座固定，锁紧螺钉推动滑块沿检测座内的导轨向内移动，通过滑块与锁紧座的预紧力将扭簧千分表固定在检测座上。Among them, the locking seat can be disassembled to put the torsion spring dial indicator into the detection seat and then fix it with the detection seat. The locking screw pushes the slider to move inward along the guide rail in the detection seat. The pretightening force with the locking seat fixes the torsion spring dial indicator on the detection seat.
其中，所述滑动轴在导轨内可以移动，用于调整滚动轴承的位置。Wherein, the sliding shaft can move within the guide rail and is used to adjust the position of the rolling bearing.
本发明还提供了采用所述的一种大型超精密环形零件平面的平面度检测装置的平面度检测方法，所述检测方法包括以下步骤：The invention also provides a flatness detection method using the flatness detection device for the plane of a large ultra-precision annular part. The detection method includes the following steps:
1)安装平面度检测装置：1) Install flatness detection device:
将三个支撑点组件在成120°夹角的三个导轨槽内分别安装，将一个检测点组件在与相邻的支撑点组件所在导轨槽成60°夹角的另一个所述导轨槽内安装，通过调整三个支撑点组件与一个检测点组件在导轨槽中的位置，将支撑点和检测点调整到同一圆周上，通过第一锁紧螺母和第二内六角圆柱头螺钉分别将三个支撑点和一个检测点在导轨槽的位置锁紧固定，再调整两个径向定位组件的中心在导轨槽的位置，使得所述滚动轴承外圆与被测零件的内孔相切，并使得两个径向定位组件所在圆的圆心与上述四点所在圆周的圆心重合，通过第二锁紧螺母将径向定位组件在导轨槽的位置锁紧固定；Install the three support point components in three guide rail grooves at an angle of 120°, and install one detection point component in another guide rail groove at an angle of 60° to the guide rail groove where the adjacent support point component is located. To install, adjust the positions of the three support point components and one detection point component in the guide rail groove, adjust the support points and detection points to the same circle, and secure the three support point components and the second hexagon socket head screws respectively through the first lock nut and the second hexagon socket head screw. A support point and a detection point are locked and fixed at the position of the guide rail groove, and then the centers of the two radial positioning components are adjusted to the position of the guide rail groove so that the outer circle of the rolling bearing is tangent to the inner hole of the part being tested, and the The center of the circle where the two radial positioning components are located coincides with the center of the circle where the above four points are located, and the radial positioning component is locked and fixed in the guide rail groove through the second locking nut;
2)实施平面度检测：2) Implement flatness detection:
将平面度检测装置放置于零件上，将石蜡均匀洒在零件上对应支撑点和检测点所在的圆周上，用手握检测点组件所对应的平面度检测架的外端部，向外侧施力使径向定位组件定位于零件内孔上，沿零件外圆周切线方向用手在检测架外端部水平地施力，此时平面度检测架与所述零件接触并作相对旋转运动，在支撑点和检测点所在的圆周上均匀设置待检测点，根据实际检测需要取待检测点数，记录扭簧千分表在各检测点的示值，则零件在该圆周上的平面度＝(示值的最大值-示值的最小值)/2。Place the flatness detection device on the part, sprinkle paraffin evenly on the circumference of the corresponding support point and detection point on the part, hold the outer end of the flatness detection frame corresponding to the detection point assembly with your hand, and apply force to the outside Position the radial positioning component on the inner hole of the part, and apply force horizontally on the outer end of the detection frame by hand along the tangential direction of the outer circumference of the part. At this time, the flatness detection frame contacts the part and performs relative rotation. Points to be detected are evenly arranged on the circumference where the detection points are located. The number of points to be detected is determined according to the actual detection needs, and the indication value of the torsion spring dial indicator at each detection point is recorded. Then the flatness of the part on the circle = (indication value The maximum value - the minimum value of the indication value)/2.
其中，所述待检测点数为36点，54点或72点。Among them, the number of points to be detected is 36 points, 54 points or 72 points.
本发明的大型超精密环形平面的平面度检测装置的结构对飞机架的结构进行了创新，合理利用了三角形和正六边形结构的稳定性，从宏观形式看具有13个三角形结构，该结构是自然界中极稳定性的结构形式之一，本发明中的平面度检测装置中的三角形和正六边形结构以及布局方式使得本发明平面度检测装置具有结构稳定性。The structure of the large-scale ultra-precision annular plane flatness detection device of the present invention innovates the structure of the aircraft frame and rationally utilizes the stability of the triangular and regular hexagonal structures. From a macro perspective, it has 13 triangular structures. The structure is One of the most stable structural forms in nature, the triangular and regular hexagonal structures and layout of the flatness detection device of the present invention make the flatness detection device of the present invention structurally stable.
本发明的大型超精密环形平面的平面度检测装置的结构，对三个支撑点和一个检测点构成的拓扑关系，采用了空间网格结构的方式进行了连接，每个空间点的连接均采用30mm×30mm×2mm的空心矩形铝管进行焊接，该结构经有限元程序分析计算具有极高的刚性，且重量小，满足轻量化的要求，本发明中的平面度检测装置中的空间网格连接成的拓扑关系结构是系统高刚性的关键技术，也是结构具有超静定性的核心技术。The structure of the large-scale ultra-precision annular plane flatness detection device of the present invention uses a spatial grid structure to connect the topological relationship composed of three support points and one detection point, and each spatial point is connected using 30mm×30mm×2mm hollow rectangular aluminum tubes are welded. The structure is analyzed and calculated by the finite element program to have extremely high rigidity and small weight, meeting the requirements of lightweight. The spatial grid in the flatness detection device of the present invention The connected topological relationship structure is the key technology for the high rigidity of the system and the core technology for the structure to have super static certainty.
本发明的大型超精密环形平面的平面度检测装置中的支撑点采用工程耐磨材料SFRJ-6000，该材料在压强20MPa以下，磨损量小于10um/km，摩擦系数为0.05～0.23，本发明的大型超精密环形平面的平面度检测装置其总重量65kg,飞机架在零件试转3-5圈后，会形成球头因前期磨损会形成一个直径Φ4mm的平面，飞机架每个支撑点的接触面积为S＝3.14×(4/2)2＝12.56mm2，三个支撑点的接触面积为37.68mm2,，此时支撑点的接触压强为P＝65×9.8/37.68×106＝16.90MPa，按直径3000mm的圆周，其一周周长为3.14×3＝9.42×10- 3m，接触支点的磨损量为10×9.42×10-3＝0.0942um，这样的磨损量足够满足零件的检测精度的需求。The supporting points in the large-scale ultra-precision annular plane flatness detection device of the present invention adopt engineering wear-resistant material SFRJ-6000. When the pressure of this material is below 20MPa, the wear amount is less than 10um/km, and the friction coefficient is 0.05~0.23. The total weight of the large ultra-precision annular plane flatness detection device is 65kg. After the aircraft frame is tested for 3-5 turns of the parts, the ball head will form a plane with a diameter of Φ4mm due to early wear. The contact of each support point of the aircraft frame The area is S＝3.14×(4/2) 2 ＝12.56mm 2 , and the contact area of the three support points is 37.68mm 2 . At this time, the contact pressure of the support points is P＝65×9.8/37.68×10 6 ＝16.90 MPa, according to the circumference of a circle with a diameter of 3000mm, its circumference is 3.14×3=9.42×10 - 3 m, and the wear amount of the contact fulcrum is 10×9.42×10 -3 = 0.0942um. This amount of wear is enough to meet the inspection of parts. accuracy requirements.
本发明与现有技术相比的优点在于：The advantages of the present invention compared with the prior art are:
(1)本发明在用于检测环形零件的直径可以2000-3000mm，检测千分表示值重复性达到0.002mm(检测平面度精度要求0.01mm的平面，千分表示值重复性在0.005mm内认为是有效检测数据)。相比现有的三坐标测量仪，激光跟踪仪，激光平面法，转台悬臂法等测量方法，是所列方法中检测精度最高的检测装置。(1) The present invention can be used to detect the diameter of ring parts between 2000-3000mm, and the repeatability of the detection value in thousandths reaches 0.002mm (the flatness accuracy of the detection requires a plane of 0.01mm, and the repeatability of the value in thousandths is considered to be within 0.005mm) is valid detection data). Compared with existing measurement methods such as three-dimensional coordinate measuring instrument, laser tracker, laser plane method, turntable cantilever method, etc., it is the detection device with the highest detection accuracy among the listed methods.
(2)本发明的检测装置与现有的飞机架结构具有极高的结构稳定性和刚度，应用了三角形的稳定性结构，拓扑关系的空间网格结构，空心矩形管材等技术手段实现了大型高稳定性高刚度轻量化一体化的结构装置，由于这些技术的应用使装置具有极高的稳定性，高刚性，轻量化等特点。(2) The detection device of the present invention has extremely high structural stability and stiffness compared with the existing aircraft frame structure. It applies triangular stability structure, topological spatial grid structure, hollow rectangular pipe and other technical means to achieve large-scale High stability, high stiffness and lightweight integrated structural device. Due to the application of these technologies, the device has the characteristics of extremely high stability, high rigidity and lightweight.
(3)本发明在使用时，由于其结构简单，稳定性好，操作简单便捷，检测一个圆周直径Φ2000-Φ3000mm平面的平面度大约3-5分钟，而且其对检测环境没有什么要求，特别适合于大型超精密回转零件(平面止推轴承)加工与装配的在线检测。(3) When the present invention is used, due to its simple structure, good stability, simple and convenient operation, it takes about 3-5 minutes to detect the flatness of a plane with a circumferential diameter of Φ2000-Φ3000mm, and it has no requirements on the detection environment, so it is particularly suitable Online inspection for processing and assembly of large ultra-precision rotary parts (planar thrust bearings).
(4)本发明由于其结构简单，稳定性好，操作简单便捷，这样一个平面度检测装置的制造成本很低，其检测成本相比三坐标测量仪,激光跟踪仪以及激光平面法低得多，对检测人员的技术要求也是最低的。(4) Due to its simple structure, good stability, and simple and convenient operation, the invention has a very low manufacturing cost for such a flatness detection device, and its detection cost is much lower than that of a three-dimensional coordinate measuring instrument, a laser tracker, and a laser plane method. , the technical requirements for inspection personnel are also the lowest.
附图说明Description of drawings
图1a和图1b分别是本发明一种大型超精密环形平面的平面度检测系统的主视图和剖视图；Figures 1a and 1b are respectively a front view and a cross-sectional view of a large ultra-precision annular plane flatness detection system of the present invention;
图2是本发明一种大型超精密环形平面的平面度检测装置的结构图；Figure 2 is a structural diagram of a flatness detection device for a large ultra-precision annular plane according to the present invention;
图3是本发明平面度检测架的水平面结构方式图；Figure 3 is a horizontal structural view of the flatness detection frame of the present invention;
图4是本发明平面度检测架的空间结构方式图；Figure 4 is a spatial structure diagram of the flatness detection frame of the present invention;
图5a、图5b和图5c是本发明支撑点组件的结构图；Figure 5a, Figure 5b and Figure 5c are structural diagrams of the support point assembly of the present invention;
图6a和图6b是本发明检测点组件的结构图；Figures 6a and 6b are structural diagrams of the detection point assembly of the present invention;
图7a和图7b是本发明径向定位组件的结构图。Figures 7a and 7b are structural diagrams of the radial positioning assembly of the present invention.
图中各标号表示：1平面度检测架；2径向定位组件；3支撑点组件；4检测点组件；5被检测零件；6支撑点；7检测点；8第一锁紧螺母；9第一垫圈；10支点座；11第一内六角圆柱头螺钉；12第二内六角圆柱头螺钉；13第二垫圈；14检测座；15扭簧千分表；16滑块；17锁紧螺钉；18锁紧座；19第二锁紧螺母；20第三垫圈；21滑动轴；22滚动轴承。Each number in the figure represents: 1 flatness detection frame; 2 radial positioning component; 3 support point component; 4 detection point component; 5 parts to be detected; 6 support point; 7 detection point; 8 first locking nut; 9 1 washer; 10 fulcrum seat; 11 first hexagon socket head screw; 12 second hexagon socket head screw; 13 second washer; 14 detection seat; 15 torsion spring dial indicator; 16 slide block; 17 locking screw; 18 locking seat; 19 second lock nut; 20 third washer; 21 sliding shaft; 22 rolling bearing.
具体实施方式Detailed ways
下面结合附图以及具体实施方式进一步说明本发明大型超精密环形零件平面的平面度检测装置的结构组成和各组件的调整要求。The structural composition and adjustment requirements of each component of the flatness detection device for the plane of large ultra-precision annular parts of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.
如图1a和图1b所示，本发明的大型超精密环形零件平面的平面度检测装置由一个平面度检测架1、两个径向定位组件2，三个支撑点组件3，一个检测点组件4四个部分组成。每个支撑点组件3由第一锁紧螺母8，第一垫圈9，支点座10，支撑点6，第一内六角圆柱头螺钉11组成；每个检测点组件4由第二内六角圆柱头螺钉12，第二垫圈13，检测座14，扭簧千分表15，滑块16，锁紧螺钉17，锁紧座18组成；径向定位组件2由第二锁紧螺母19，第三垫圈20，滑动轴21，滚动轴承22组成。As shown in Figure 1a and Figure 1b, the flatness detection device of the large ultra-precision annular part plane of the present invention consists of a flatness detection frame 1, two radial positioning components 2, three support point components 3, and a detection point component 4 consists of four parts. Each support point assembly 3 is composed of a first locking nut 8, a first washer 9, a fulcrum seat 10, a support point 6, and a first hexagon socket head screw 11; each detection point assembly 4 is composed of a second hexagon socket head screw Screw 12, second washer 13, detection seat 14, torsion spring dial indicator 15, slider 16, locking screw 17, locking seat 18; radial positioning assembly 2 consists of second locking nut 19, third washer 20. It is composed of sliding shaft 21 and rolling bearing 22.
检测时，三个支撑点组件在成120°夹角的导轨槽内安装，检测点组件在剩余的一个与相邻的支撑点组件的导轨槽成60°夹角的导轨槽内安装，两个径向定位组件在检测点组件相邻的两个导轨槽内安装。通过调整三个支撑点与检测点在导轨槽径向的位置，都调整到被测零件需要检测平面度的直径上(同一圆心为O的圆周直径上)，通过第一锁紧螺母8，第二内六角圆柱头螺钉12将三个支撑点和一个检测点在导轨槽的位置锁紧固定，再调整两个径向定位组件的中心在导轨槽径向的位置，同时检测组件的轴承外圆与被测零件的内孔或外圆相切，将其也调整共圆心O，通过第二锁紧螺母19将进行定位组件在导轨槽的位置锁紧固定，结构简图见附图2。During detection, the three support point components are installed in the guide rail groove at an angle of 120°, and the detection point component is installed in the remaining guide rail groove at an angle of 60° with the guide rail groove of the adjacent support point component. Two The radial positioning component is installed in two guide rail grooves adjacent to the detection point component. By adjusting the radial positions of the three support points and detection points in the guide rail groove, they are all adjusted to the diameter of the tested part that needs to be tested for flatness (on the diameter of the same circle with center O). Through the first locking nut 8, the Two hexagon socket head screws 12 lock and fix the three support points and one detection point at the position of the guide rail groove, then adjust the center of the two radial positioning components in the radial position of the guide rail groove, and simultaneously detect the outer circle of the bearing of the component It is tangent to the inner hole or outer circle of the part being tested, and is also adjusted to the common center O, and the positioning assembly is locked and fixed in the guide rail groove through the second locking nut 19. The structural diagram is shown in Figure 2.
在检测过程中，要求三个固定支撑点组件的支撑点和一个检测点组件的检测点都固定在同一被测直径圆环的圆周上，旋转平面度检测架利用两个径向定位组件进行径向定位，保证旋转时三个固定支撑点组件的支撑点和一个检测点组件的检测点的轨迹在同一直径的圆周上。此检测架与工件接触并作相对旋转，三个支撑点和检测点对应的零件表面起伏都会引起检测点的扭簧千分表示值的变动。During the detection process, it is required that the support points of the three fixed support point components and the detection point of the one detection point component are fixed on the circumference of the same measured diameter ring. The rotating flatness detection frame uses two radial positioning components to perform radial measurement. Directional positioning ensures that the support points of the three fixed support point components and the detection point of one detection point component are on the same diameter circle during rotation. This detection frame is in contact with the workpiece and performs relative rotation. The three support points and the surface fluctuations of the parts corresponding to the detection points will cause changes in the thousandth value of the torsion spring at the detection point.
如图2所示，三个所述支撑点6与一个所述检测点7在一个圆周上；所述导轨槽用以调整支撑点与检测点位置使该四个点位于同一圆周上，同时也用以调整两个径向定位组件所在圆的圆心与上述四点所在圆周的圆心0重合。As shown in Figure 2, three support points 6 and one detection point 7 are on a circle; the guide rail groove is used to adjust the positions of the support points and detection points so that the four points are located on the same circle, and at the same time It is used to adjust the center of the circle where the two radial positioning components are located to coincide with the center 0 of the circle where the above four points are located.
平面度检测架的水平面结构方式见附图3，三个检测组件的中心的连接梁构成一个正三角形，与检测组件相邻的两个支撑组件与检测组件之间相连接的梁构成一个等腰三角形与两个直角三角形，每个支撑组件的连接梁构成1个正三角形，3个支撑点组件的梁与每个支撑点的梁构成一个正六边形，该水平面结构方式共有13个三角形结构)，该结构方式的检测架具有极高的稳定性，才能满足超精密检测精度对稳定性的需求。The horizontal plane structure of the flatness detection frame is shown in Figure 3. The connecting beams at the centers of the three detection components form an equilateral triangle, and the beams connecting the two support components adjacent to the detection components and the detection components form an isosceles A triangle and two right triangles, the connecting beam of each support component forms an equilateral triangle, the beams of the 3 support point components and the beams of each support point form a regular hexagon, this horizontal plane structure has a total of 13 triangular structures) , the detection frame with this structure has extremely high stability, so that it can meet the stability requirements of ultra-precision detection accuracy.
平面度检测架空间结构见附图4，在三个支撑点和一个检测点之间的拓扑关系上将其结构分解成空间网格结构，空间网格结构采取30×30×2的空心矩形管焊接的方式连接而成，空心矩形管具有良好的重量刚性比，空间网格的结构组成的拓扑关系具有极高的重量刚性比，这样的大型超精密环形平面的平面度检测装置具有重量小，刚性高的优点，才能满足超精密检测精度对重量刚性比的需求。The spatial structure of the flatness detection frame is shown in Figure 4. The structure is decomposed into a spatial grid structure based on the topological relationship between three support points and one detection point. The spatial grid structure adopts a 30×30×2 hollow rectangular tube. Connected by welding, the hollow rectangular tubes have a good weight-to-rigidity ratio, and the topological relationship composed of the space grid structure has a very high weight-to-rigidity ratio. Such a large-scale ultra-precision annular plane flatness detection device has a small weight and Only with the advantage of high rigidity can it meet the demand for weight-to-rigidity ratio for ultra-precision detection accuracy.
由图5(a)-图5(c)所示，每个支撑点组件3中，所述支点座10穿过导轨槽的上部依次安装第一垫圈9和第一锁紧螺母8，下部安装有支撑点6，且支点座10和支撑点6通过所述第一内六角圆柱头螺钉11连接；支点座在检测架的导轨槽内可以移动实现调整支撑点的位置(即调整被检测平面的直径)，使三个支撑点共圆周，支撑点与零件接触面设计为圆球面，减少取点误差，支撑点采用了工程耐磨材料SFRJ-6000，该材料具有极高的耐磨性，克服了支撑点的急剧磨损带来的检测误差。As shown in Figure 5 (a) to Figure 5 (c), in each support point assembly 3, the first washer 9 and the first lock nut 8 are sequentially installed on the upper part of the fulcrum seat 10 through the guide rail groove, and the first washer 9 and the first lock nut 8 are installed on the lower part. There is a support point 6, and the fulcrum seat 10 and the support point 6 are connected through the first hexagon socket head screw 11; the fulcrum seat can move in the guide rail groove of the detection frame to adjust the position of the support point (that is, adjust the position of the detected plane diameter), so that the three support points share the same circumference. The contact surface between the support points and the part is designed as a spherical surface to reduce point selection errors. The support points are made of engineering wear-resistant material SFRJ-6000. This material has extremely high wear resistance and overcomes the problem of The detection error caused by the rapid wear of the support point is eliminated.
由图6(a)-图6(b)所示，每个检测点组件4中，所述扭簧千分表15安装在检测座14内，所述第二内六角圆柱头螺钉12从上到下穿过第二垫圈13与检测座14连接；所述检测座14的下部侧面设置供滑块16放置以及锁定螺钉17穿入的导轨，该导轨入口安装有所述锁紧座18，所述扭簧千分表15的测量杆朝下穿出检测座14，测量杆端部的扭簧千分表探测头即为检测点；检测座在检测架的导轨内可以移动，调整检测点的位置，使检测点与三个支撑点共圆周，锁紧座可以拆开，用以将扭簧千分表放入检测座内，再与检测座固定，锁紧螺钉推动滑块沿检测座内的导轨向内移动，通过滑块与锁紧座的预紧力将扭簧千分表固定在检测座上。As shown in Figure 6 (a) to Figure 6 (b), in each detection point assembly 4, the torsion spring dial indicator 15 is installed in the detection seat 14, and the second hexagon socket head screw 12 is installed from above. Go down and pass through the second washer 13 to connect to the detection seat 14; the lower side of the detection seat 14 is provided with a guide rail for the slider 16 to be placed and the locking screw 17 to penetrate, and the locking seat 18 is installed at the entrance of the guide rail, so The measuring rod of the torsion spring dial indicator 15 passes downwards through the detection seat 14, and the torsion spring dial indicator probe at the end of the measuring rod is the detection point; the detection seat can be moved in the guide rail of the detection frame, and the detection point can be adjusted position so that the detection point and the three support points share the same circumference. The locking seat can be disassembled to put the torsion spring dial indicator into the detection seat and then fix it with the detection seat. The locking screw pushes the slider along the inside of the detection seat. The guide rail moves inward, and the torsion spring dial indicator is fixed on the detection seat through the pretightening force of the slide block and the locking seat.
由图7(a)-图7(b)所示，径向定位组件2中，所述滑动轴21穿过导轨槽的上部依次安装第三垫圈20和第二锁紧螺母19，下部安装所述滚动轴承22；滑动轴在检测架的导轨内可以移动，调整径向定位轴承的位置，使2个径向定位轴承与三个支撑点和一个检测点共圆心。As shown in Figure 7(a)-Figure 7(b), in the radial positioning assembly 2, the upper part of the sliding shaft 21 passing through the guide rail groove is sequentially installed with the third washer 20 and the second locking nut 19, and the lower part is installed with the third washer 20 and the second lock nut 19. The rolling bearing 22; the sliding shaft can move in the guide rail of the detection frame, and the position of the radial positioning bearing is adjusted so that the two radial positioning bearings are cocentric with the three support points and one detection point.
本发明的平面度检测装置结构简单，易制作，成本低廉，检测结果稳定可靠，检测范围可以通过调整支撑点组件和检测点组件的位置满足不同直径处环形平面的平面度检测，检测精度高，适合于各种的大型超精密环形零件平面的平面度在线检测，尤其大型超精密回转零件(平面止推轴承)加工与装配的在线检测。The flatness detection device of the present invention has a simple structure, is easy to manufacture, has low cost, and the detection results are stable and reliable. The detection range can meet the flatness detection of annular planes with different diameters by adjusting the positions of the support point assembly and the detection point assembly, and the detection accuracy is high. It is suitable for online inspection of flatness of various large ultra-precision ring parts, especially for online inspection of processing and assembly of large ultra-precision rotary parts (planar thrust bearings).
以下针对本发明的大型超精密环形零件平面的平面度检测方法进行说明。The following is a description of the flatness detection method of the plane of a large ultra-precision annular part according to the present invention.
在被测零件圆周上一周均匀的分布待检测点，根据实际检测需要取待检测点数(推荐36点，54点或72点)，在其位置对应的外圆上利用记号笔做待检测点标记，将石蜡均匀洒在零件支撑点组件中心点和检测点组件中心点所在的圆周上，用手握平面度检测架1中检测点组件对应的检测架外端部，向外侧施力使径向定位组件2定位于零件内圆上，用手在圆周切线方向水平地施力，此时检测架与工件接触并作相对旋转运动，取一个前文标记的待检测点作为起始点，检测装置回转一周，看扭簧千分表在零件起始点的读数示值是否回零，也就是扭簧千分表的读数示值相对差值在0.005mm内，认为是有效检测数据。Distribute the points to be inspected evenly around the circumference of the part to be tested. Select the number of points to be inspected according to the actual inspection needs (36 points, 54 points or 72 points are recommended), and use a marker pen to mark the points to be inspected on the outer circle corresponding to their positions. , sprinkle paraffin evenly on the circumference where the center point of the part support point assembly and the center point of the detection point assembly are located, hold the outer end of the detection frame corresponding to the detection point assembly in flatness detection frame 1 with your hands, and apply force outward to make the radial direction Positioning component 2 is positioned on the inner circle of the part. Apply force horizontally by hand in the tangential direction of the circumference. At this time, the detection frame contacts the workpiece and performs relative rotation. Take a previously marked point to be detected as the starting point, and the detection device rotates once. , see if the reading of the torsion spring dial indicator at the starting point of the part returns to zero, that is, the relative difference in the reading of the torsion spring dial indicator is within 0.005mm, which is considered to be valid detection data.
当验证检测数据有效后，转动检测架，逐点检测并记录各检测点的扭簧千分表示数。在回转一周后，被测零件的平面度＝(扭簧千分表示值的最大值-扭簧千分表示值的最小值)/2。本发明未详细阐述部分属于本领域公知技术。After verifying that the test data is valid, rotate the test frame, test point by point and record the torsion spring number expressed in thousandths at each test point. After one rotation, the flatness of the tested part = (the maximum value of the torsion spring expressed in thousandths - the minimum value of the torsion spring expressed in thousandths)/2. The parts not described in detail in the present invention belong to the well-known technologies in the art.
以上所述，仅为本发明部分具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本领域的人员在本发明揭露的技术范围内，可轻易想到的变化或替换，都应涵盖在本发明的保护范围之内。The above are only some specific implementations of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by those familiar with the art within the technical scope disclosed in the present invention should be made. are covered by the protection scope of the present invention.
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