CN101825453A - Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system - Google Patents

Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system Download PDF

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CN101825453A
CN101825453A CN201010171390A CN201010171390A CN101825453A CN 101825453 A CN101825453 A CN 101825453A CN 201010171390 A CN201010171390 A CN 201010171390A CN 201010171390 A CN201010171390 A CN 201010171390A CN 101825453 A CN101825453 A CN 101825453A
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error compensation
workpiece
temperature error
measurement
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张国雄
裘祖荣
刘书桂
郭敬滨
李杏华
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Tianjin University
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Abstract

本发明属于测试技术及仪器领域。为实现温度误差补偿,本发明采用的技术方案是,1.根据被测工件的情况,设计并制作上下两端的基准件;2.对基准件的内外径、高度等进行精确的标定;3.建立温度误差补偿的数学模型;4.在建立的温度误差补偿的数学模型基础上编写误差补偿程序,并将它加入到工件测量结果的数据处理程序中;5.将误差补偿所需要测量的截面加入到测量程序中,在测量工件过程中加测用于误差补偿所需要测量的截面;6.进行测量结果数据处理,完成温度误差补偿。本发明主要应用于回转体零件测量。

Figure 201010171390

The invention belongs to the field of testing technology and instruments. In order to realize temperature error compensation, the technical solution adopted by the present invention is: 1. According to the situation of the workpiece to be measured, design and manufacture the reference parts at the upper and lower ends; 2. Accurately calibrate the inner and outer diameters and heights of the reference parts; 3. Establish a mathematical model for temperature error compensation; 4. Write an error compensation program based on the established mathematical model for temperature error compensation, and add it to the data processing program for workpiece measurement results; Add it to the measurement program, and measure the cross-section required for error compensation during the process of measuring the workpiece; 6. Perform data processing of the measurement results to complete temperature error compensation. The invention is mainly applied to the measurement of rotary parts.

Figure 201010171390

Description

圆柱坐标系三坐标测量机的温度误差补偿方法 The Temperature Error Compensation Method of Cylindrical Coordinate System Three Coordinate Measuring Machine

技术领域technical field

本发明涉及圆柱坐标系三坐标测量机的温度误差补偿技术,能够在车间使用条件下,对于温度变化引起的测量机和工件变形所产生的测量误差实现有效的补偿,提高测量精度。属于测试技术及仪器领域。The invention relates to a temperature error compensation technology for a three-coordinate measuring machine of a cylindrical coordinate system, which can effectively compensate the measurement error caused by the deformation of the measuring machine and workpiece caused by temperature changes under the working condition of a workshop, and improve the measurement accuracy. It belongs to the field of testing technology and instruments.

背景技术Background technique

回转体零件在工业生产的各种零件中,特别在军工生产中占有很大比重。它们作为机器的关键零件被广泛应用于工业、航空、航天、国防等领域中。回转体类工件的母线可以为直线段或圆弧段,表面的形状可以是圆柱面、圆锥面、球面、圆环面、平面等。尽管回转体类零件的结构与尺寸随其用途不同而异,但其结构一般都具有以下特点:对各个截面的圆度有较高要求,有多个内外圆回转面需要检测,并对它们的同轴度要求较高。这些零件往往是机器、装备的关键件,批量大,需要100%检测。回转体零件的高精度、高效率已经成为国民经济和国防中许多部门的迫切需求。Rotary parts occupy a large proportion in various parts of industrial production, especially in military production. As the key parts of machines, they are widely used in the fields of industry, aviation, aerospace, national defense and so on. The generatrix of the rotary workpiece can be a straight line or an arc, and the shape of the surface can be cylindrical, conical, spherical, torus, plane, etc. Although the structure and size of revolving parts vary with their uses, their structures generally have the following characteristics: there are high requirements for the roundness of each section, there are multiple inner and outer circular revolving surfaces that need to be tested, and their The coaxiality requirement is higher. These parts are often the key parts of machines and equipment, and the batches are large, requiring 100% inspection. The high precision and high efficiency of rotary parts have become the urgent needs of many departments in the national economy and national defense.

圆柱坐标系三坐标测量机特别适合于回转体零件的检测。圆柱坐标系三坐标测量机的总体构成和工作原理如图1所示。测量机由回转工作台和若干个测量架组成。工件安装在回转工作台上由夹具夹紧定心,并由回转工作台带动连续转动。测量架上分别装有各种测头,以测量工件的内外表面的轴向与径向尺寸、形状与位置误差。The three-coordinate measuring machine with cylindrical coordinate system is especially suitable for the detection of rotating parts. The overall composition and working principle of the cylindrical coordinate system three-coordinate measuring machine are shown in Figure 1. The measuring machine consists of a rotary table and several measuring frames. The workpiece is installed on the rotary table, clamped and centered by the fixture, and driven by the rotary table to rotate continuously. Various probes are installed on the measuring frame to measure the axial and radial dimensions, shape and position error of the inner and outer surfaces of the workpiece.

圆柱坐标系三坐标测量机有以下优点。The cylindrical coordinate system CMM has the following advantages.

1)测量效率高    测量时工件连续旋转、测头固定不动,工件转动一圈,就完成对一个截面的测量。而在传统正交式三坐标测量机中,需要逐点进行测量,十分费时。1) High measurement efficiency When measuring, the workpiece rotates continuously, the probe is fixed, and the workpiece rotates one circle to complete the measurement of a section. In the traditional orthogonal three-coordinate measuring machine, it needs to measure point by point, which is very time-consuming.

2)形位测量精度高    采用在回转过程中测量,只有回转工作台的运动误差和测头的测量不确定度影响测量圆度、圆跳动、同轴度等形位误差的精度,而各个测量架上的各个部件的运动误差对于这些形位测量精度基本没有影响,因为在测量一个截面时它们不动。2) The measurement accuracy of form and position is high. It is measured during the rotation process. Only the motion error of the rotary table and the measurement uncertainty of the probe affect the accuracy of measuring form and position errors such as roundness, circular runout, and coaxiality. The motion errors of the individual components on the stand have little effect on the accuracy of these form and position measurements, since they do not move when measuring a section.

3)测头运动简单、防碰撞问题比较容易解决。3) The movement of the measuring head is simple, and the problem of anti-collision is relatively easy to solve.

但是圆柱坐标测量机也有它自己的问题。这主要是被测工件的尺寸不能直接从确定各个测量架的标尺中读出。从标尺中读出的只是各个移动架的相对位移,为了确定被测工件的绝对尺寸,需要知道各个测量架的坐标原点相对于回转工作台坐标系原点的位置,以及坐标轴方向之间的夹角关系,即实现各个测量架与回转工作台坐标系的统一。通常通过对基准件的标定来实现这一坐标系的统一。But the CMM has its own problems. This is mainly because the size of the workpiece to be measured cannot be read directly from the scales that determine each measuring frame. What is read from the ruler is only the relative displacement of each mobile frame. In order to determine the absolute size of the workpiece to be measured, it is necessary to know the position of the coordinate origin of each measuring frame relative to the origin of the coordinate system of the rotary table, as well as the clamping distance between the directions of the coordinate axes. Angular relationship, that is, to realize the unification of each measuring frame and the coordinate system of the rotary table. The unification of this coordinate system is usually achieved through the calibration of the reference parts.

然而,如图1所示,由于温度变化会使各个测量架的位置和坐标轴方向相对于回转工作台的发生变化,引起测量误差。特别对于在车间使用的圆柱坐标测量机温度变化引起的测量误差会很大,常达几十至数百微米。加之车间温度条件变化复杂,采用建立温度场模型的方法进行温度误差补偿难以获得好的效果。However, as shown in Figure 1, due to temperature changes, the position and coordinate axis direction of each measuring frame will change relative to the rotary table, causing measurement errors. Especially for the cylindrical coordinate measuring machine used in the workshop, the measurement error caused by the temperature change will be very large, often reaching tens to hundreds of microns. In addition, the temperature conditions in the workshop are complex, and it is difficult to obtain good results by using the method of establishing a temperature field model for temperature error compensation.

发明内容Contents of the invention

为克服现有技术的不足,为达到上述目的,本发明采用的技术方案是:为此需要通过一些套筒,作为模拟的相关件,测量其在离开零件一定位置处的延伸部位的跳动量。测量机应当能够测量具有延伸公差的参数。在温度误差补偿中就可以以它们为基准件,实现温度误差补偿。In order to overcome the deficiencies of the prior art, in order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: for this purpose, some sleeves need to be used as related parts of the simulation to measure the runout of the extended part at a certain position away from the part. The measuring machine should be able to measure parameters with extended tolerances. In temperature error compensation, they can be used as reference parts to realize temperature error compensation.

为达到上述目的,本发明采取的技术方案是,圆柱坐标系三坐标测量机的温度误差补偿方法,包括下列步骤:In order to achieve the above object, the technical solution adopted by the present invention is that the temperature error compensation method of a three-coordinate measuring machine in a cylindrical coordinate system comprises the following steps:

1.根据被测工件的情况,设计并制作上下两端的基准件,要求基准件符合一般量规的技术要求,圆柱度形状误差小、端面平面度误差小,长期稳定性好;1. According to the condition of the workpiece to be tested, design and manufacture the reference parts at the upper and lower ends. The reference parts are required to meet the technical requirements of general gauges, with small cylindricity shape errors, small end surface flatness errors, and good long-term stability;

2.对基准件的内外径、高度等进行精确的标定:内外径都需要至少在两个截面上进行标定,这两个截面应力求相距较远,以获得较精确的夹角变化值,高度测量的位置数视需要而定;2. Accurately calibrate the inner and outer diameters and heights of the reference parts: the inner and outer diameters need to be calibrated on at least two sections, and the two sections should be far apart to obtain a more accurate angle change value, height The number of positions measured depends on the need;

3.建立温度误差补偿的数学模型;3. Establish a mathematical model for temperature error compensation;

4.在建立的温度误差补偿的数学模型基础上编写误差补偿程序,并将它加入到工件测量结果的数据处理程序中;4. Write the error compensation program on the basis of the established mathematical model of temperature error compensation, and add it to the data processing program of the workpiece measurement results;

5.将误差补偿所需要测量的截面加入到测量程序中,在测量工件过程中加测用于误差补偿所需要测量的截面;5. Add the section to be measured for error compensation into the measurement program, and add the section to be measured for error compensation during the process of measuring the workpiece;

6.进行测量结果数据处理,完成温度误差补偿。6. Perform data processing of measurement results and complete temperature error compensation.

所述的基准件是套筒。The reference part is a sleeve.

本发明具有以下技术效果:The present invention has the following technical effects:

1、提高圆柱坐标测量机测量稳定性。1. Improve the measurement stability of the cylindrical coordinate measuring machine.

2、简便准确性高。2. Simple and accurate.

附图说明Description of drawings

图1为圆柱坐标测量机工作原理图。图中:Figure 1 is a schematic diagram of the working principle of a cylindrical coordinate measuring machine. In the picture:

1-回转工作台  2-夹具  3-下套筒  4-测头  5-轴向参数外测量架  6-工件7-内测量架  8-上套筒  9-测头  10-测头  11-径向参数外测量架  12-测头。1-rotary table 2-fixture 3-lower sleeve 4-probe 5-outer measuring frame for axial parameters 6-workpiece 7-inner measuring frame 8-upper sleeve 9-probe 10-probe 11-radial Parameter external measuring frame 12-probe.

图2为误差补偿测量示意图。Figure 2 is a schematic diagram of error compensation measurement.

具体实施方式Detailed ways

本发明的目的在于提供一种基于测量基准件尺寸的温度误差补偿技术,提高圆柱坐标测量机测量稳定性。The purpose of the present invention is to provide a temperature error compensation technology based on the size of the measurement reference part, so as to improve the measurement stability of a cylindrical coordinate measuring machine.

在圆柱坐标测量机上测量工件尺寸的温度误差主要由以下三方面的因素引起。The temperature error of measuring workpiece size on a cylindrical coordinate measuring machine is mainly caused by the following three factors.

1.测量架相对于回转工作台产生平移。1. The measuring frame moves in translation relative to the rotary table.

2.测量架的运动轴线方向相对于回转轴线发生偏转。2. The direction of the movement axis of the measuring frame is deflected relative to the rotation axis.

3.工件本身的热膨胀。3. The thermal expansion of the workpiece itself.

在实践中考察发现,有相当一部分回转体零件需要通过螺纹与相关件连接,并保证相连接的相关件具有准确的位置与方向,为此需要通过一些套筒,作为模拟的相关件,测量其在离开零件一定位置处的延伸部位的跳动量。测量机应当能够测量具有延伸公差的参数。在温度误差补偿中就可以以它们为基准件,实现温度误差补偿。In practice, it is found that a considerable part of the rotating body parts need to be connected to the related parts through threads, and to ensure that the connected related parts have accurate positions and directions. For this reason, it is necessary to use some sleeves as the simulated related parts to measure their The amount of runout in an extension at a certain location away from the part. The measuring machine should be able to measure parameters with extended tolerances. In temperature error compensation, they can be used as reference parts to realize temperature error compensation.

图2为在工件的两端各拧上一个套筒的情况。套筒在标准状态下的尺寸是确定的,并且通过标定是已知的。利用外测头测量套筒在A截面上的外径,可以得到测量得到的A截面上的外径与其标定值之差ΔDA。它由在温度变化影响下,测量架测量A截面时标尺的零位相对于回转工作台轴线距离的变化与工件、基准件本身的热变形共同引起。一般说,测量架标尺的零位与回转工作台轴线间的距离比工件的外径大许多;与此同时,工件与基准件的温度接近,如果它们的线膨胀系数和外径也接近,那么它们的热变形也很接近,其影响互相抵消。可以认为,ΔDA主要由测量架测量A截面时标尺的零位相对于回转工作台轴线距离的变化引起。Figure 2 shows the situation where a sleeve is screwed on each of the two ends of the workpiece. The size of the sleeve in the standard state is determined and known by calibration. Using the external probe to measure the outer diameter of the sleeve on section A, the difference ΔD A between the measured outer diameter on section A and its calibration value can be obtained. It is caused by the change of the zero position of the scale relative to the axis of the rotary table when the measuring frame measures the A section under the influence of temperature changes, and the thermal deformation of the workpiece and the reference piece itself. Generally speaking, the distance between the zero position of the measuring frame scale and the axis of the rotary table is much larger than the outer diameter of the workpiece; at the same time, the temperature of the workpiece and the reference part are close, if their linear expansion coefficient and outer diameter are also close, then Their thermal deformations are also very close, and their effects cancel each other out. It can be considered that ΔD A is mainly caused by the change of the zero position of the scale relative to the axis of the rotary table when the measuring frame measures the A section.

随后,利用外测头测量套筒在B截面上的外径,可以得到B截面上的外径与其标定值之差ΔDB。ΔDB-ΔDA主要由测量架的运动轴线方向相对于回转轴线发生偏转引起。它们之间的夹角变化

Figure GDA0000021312880000031
Subsequently, the outer diameter of the sleeve on the B-section is measured by the external probe, and the difference ΔD B between the outer diameter on the B-section and its calibration value can be obtained. ΔD B - ΔD A is mainly caused by the deflection of the movement axis direction of the measuring frame relative to the rotation axis. The angle change between them
Figure GDA0000021312880000031

在测量得到ΔDA和ΔDB后就可以对任意截面处由于温度变化引起的外径测量误差进行补偿。After measuring ΔD A and ΔD B , the measurement error of outer diameter caused by temperature change at any section can be compensated.

同样可以通过在截面C和D处,测量套筒的内径,得到它们的实测值与标定值之差ΔdC与ΔdD。根据测量得到ΔdC和ΔdD后就可以对任意截面处由于温度变化引起的内径测量误差进行补偿。Similarly, the difference Δd C and Δd D between the measured value and the calibration value can be obtained by measuring the inner diameter of the sleeve at the cross-sections C and D. After the Δd C and Δd D are obtained according to the measurement, the measurement error of the inner diameter caused by the temperature change at any section can be compensated.

在工件没有具有延伸公差的项目需要测量,从而不需要图2所示带螺纹的套筒时,下套筒可以用回转工作台的转动体外表面代替,即通过测量转动体的外径获得ΔDA。为了获得ΔDB与ΔdC、ΔdD则需要采用专门的套筒。When the workpiece does not have an extension tolerance item to be measured, so that the threaded sleeve shown in Figure 2 is not needed, the lower sleeve can be replaced by the outer surface of the rotary table, that is, ΔD A is obtained by measuring the outer diameter of the rotating body . In order to obtain ΔD B and Δd C , Δd D , special sleeves are required.

为了对轴向尺寸的测量进行温度误差补偿,需要利用内外测头测量套筒的某些轴向尺寸LE、LF,将测量得到的值LE、LF分别与在标准状态下标定得到的值LE0、LF0进行比较,获得它们的差值ΔLE与ΔLF,然后按线性插值引入补偿。In order to compensate the temperature error for the measurement of the axial dimension, it is necessary to use some axial dimensions L E and L F of the inner and outer probes to measure the sleeve, and the measured values L E and L F are respectively compared with those obtained by calibration under the standard state Compare the values of L E0 and L F0 to obtain their difference ΔL E and ΔL F , and then introduce compensation according to linear interpolation.

以上对于轴向尺寸的测量进行温度误差补偿是针对柱状工件,即高度远大于直径的情况讨论的。对于盘状工件,即直径远大于高度的情况,则需要考虑测量架的水平运动方向相对于回转工作台轴线的变化带来的影响。为此需要在不同的x的两个截面上进行上述测量,然后引入误差补偿。The temperature error compensation for the measurement of the axial dimension above is discussed for the columnar workpiece, that is, the case where the height is much larger than the diameter. For disc-shaped workpieces, that is, the diameter is much larger than the height, it is necessary to consider the influence of the change of the horizontal movement direction of the measuring frame relative to the axis of the rotary table. To do this, it is necessary to carry out the above-mentioned measurements on two cross-sections with different x, and then to introduce error compensation.

下面结合实施例进一步说明本发明。Below in conjunction with embodiment further illustrate the present invention.

1.根据被测工件的情况,设计并制作上下两端的基准件。要求基准件(套筒)符合一般量规的技术要求,圆柱度形状误差小、端面平面度误差小,长期稳定性好。1. According to the condition of the workpiece to be tested, design and manufacture the reference parts at the upper and lower ends. The reference part (sleeve) is required to meet the technical requirements of general gauges, with small cylindricity shape errors, small end face flatness errors, and good long-term stability.

2.对基准件的内外径、高度等进行精确的标定。内外径都需要至少在两个截面上进行标定。这两个截面应力求相距较远,以获得较精确的夹角变化值。高度测量的位置数视需要而定。2. Accurately calibrate the inner and outer diameters and heights of the reference parts. Both inner and outer diameters need to be calibrated on at least two sections. The two sections should try to be far apart to obtain a more accurate angle change value. The number of positions for height measurement is as required.

3.建立温度误差补偿的数学模型。3. Establish the mathematical model of temperature error compensation.

4.在建立的温度误差补偿的数学模型基础上编写误差补偿程序,并将它加入到工件测量结果的数据处理程序中。4. Write the error compensation program based on the established mathematical model of temperature error compensation, and add it to the data processing program of the workpiece measurement results.

5.将误差补偿所需要测量的截面加入到测量程序中,在测量工件过程中加测用于误差补偿所需要测量的截面。5. Add the section to be measured for error compensation into the measurement program, and add the section to be measured for error compensation during the process of measuring the workpiece.

6.进行测量结果数据处理,完成温度误差补偿。6. Perform data processing of measurement results and complete temperature error compensation.

Claims (2)

1.一种圆柱坐标系三坐标测量机的温度误差补偿方法,其特征是,包括下列步骤:1. A temperature error compensation method of a cylindrical coordinate system three-coordinate measuring machine, characterized in that, comprising the following steps: 1)根据被测工件的情况,设计并制作上下两端的基准件,要求基准件符合一般量规的技术要求,圆柱度形状误差小、端面平面度误差小,长期稳定性好;1) According to the condition of the workpiece to be tested, design and manufacture the reference parts at the upper and lower ends. The reference parts are required to meet the technical requirements of general gauges, with small cylindricity shape errors, small end surface flatness errors, and good long-term stability; 2)对基准件的内外径、高度等进行精确的标定:内外径都需要至少在两个截面上进行标定,这两个截面应力求相距较远,以获得较精确的夹角变化值,高度测量的位置数视需要而定;2) Accurately calibrate the inner and outer diameters and heights of the reference parts: the inner and outer diameters need to be calibrated on at least two sections, and the two sections should be far apart to obtain a more accurate angle change value, height The number of positions measured depends on the need; 3)建立温度误差补偿的数学模型;3) Establish a mathematical model for temperature error compensation; 4)在建立的温度误差补偿的数学模型基础上编写误差补偿程序,并将它加入到工件测量结果的数据处理程序中;4) Write the error compensation program on the basis of the established mathematical model of temperature error compensation, and add it to the data processing program of the workpiece measurement results; 5)将误差补偿所需要测量的截面加入到测量程序中,在测量工件过程中加测用于误差补偿所需要测量的截面;5) Add the section to be measured for error compensation into the measurement program, and add the section to be measured for error compensation during the process of measuring the workpiece; 6)进行测量结果数据处理,完成温度误差补偿。6) Perform data processing of the measurement results and complete temperature error compensation. 2.根据权利要求1所述的一种圆柱坐标系三坐标测量机的温度误差补偿方法,其特征是,所述的基准件是套筒。2. A method for compensating temperature errors of a three-coordinate measuring machine with a cylindrical coordinate system according to claim 1, wherein the reference member is a sleeve.
CN201010171390A 2010-05-13 2010-05-13 Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system Pending CN101825453A (en)

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN101975564A (en) * 2010-09-26 2011-02-16 天津大学 Temperature error compensation method based on three-section measurement
CN103376058A (en) * 2012-04-28 2013-10-30 鸿富锦精密工业(深圳)有限公司 Temperature compensation system and method
CN106500641A (en) * 2016-10-21 2017-03-15 北京信息科技大学 The thermal deformation error compensating method of articulated coordinate machine
CN111895947A (en) * 2020-07-16 2020-11-06 中国航空工业集团公司北京航空精密机械研究所 Temperature compensation system and temperature compensation method based on three-coordinate measuring machine
CN112414265A (en) * 2020-10-26 2021-02-26 东风汽车集团有限公司 Engine aperture size measurement compensation calculation method, measurement compensation method and device
CN117592313A (en) * 2024-01-18 2024-02-23 成都飞机工业(集团)有限责任公司 Simulation optimization method for uncertainty of shape and position error measurement

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101975564A (en) * 2010-09-26 2011-02-16 天津大学 Temperature error compensation method based on three-section measurement
CN101975564B (en) * 2010-09-26 2012-09-05 天津大学 Temperature error compensation method based on three-section measurement
CN103376058A (en) * 2012-04-28 2013-10-30 鸿富锦精密工业(深圳)有限公司 Temperature compensation system and method
CN106500641A (en) * 2016-10-21 2017-03-15 北京信息科技大学 The thermal deformation error compensating method of articulated coordinate machine
CN106500641B (en) * 2016-10-21 2018-12-14 北京信息科技大学 The thermal deformation error compensating method of articulated coordinate machine
CN111895947A (en) * 2020-07-16 2020-11-06 中国航空工业集团公司北京航空精密机械研究所 Temperature compensation system and temperature compensation method based on three-coordinate measuring machine
CN112414265A (en) * 2020-10-26 2021-02-26 东风汽车集团有限公司 Engine aperture size measurement compensation calculation method, measurement compensation method and device
CN117592313A (en) * 2024-01-18 2024-02-23 成都飞机工业(集团)有限责任公司 Simulation optimization method for uncertainty of shape and position error measurement
CN117592313B (en) * 2024-01-18 2024-05-14 成都飞机工业(集团)有限责任公司 Simulation optimization method for uncertainty of shape and position error measurement

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