CN105115407A - Portable multifunctional planeness detection device and application method therefor - Google Patents
Portable multifunctional planeness detection device and application method therefor Download PDFInfo
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- CN105115407A CN105115407A CN201510579047.2A CN201510579047A CN105115407A CN 105115407 A CN105115407 A CN 105115407A CN 201510579047 A CN201510579047 A CN 201510579047A CN 105115407 A CN105115407 A CN 105115407A
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- plane
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- altitude gauge
- checking device
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Abstract
The invention provides a portable multifunctional planeness detection device, and the device comprises a cross beam which is provided with at least two supporting parts contacting with a to-be-measured plane. The bottoms of all supporting parts are located in the same plane, and the cross beam is also provided with at least one altimeter. According to the invention, the bottoms of all supporting parts of the device are located in the same plane, and all the supporting parts contact with the to-be-measured plane to determine the other plane, thereby determining the height changes among all planes according to the change of the altimeters. The change range of the reading of the altimeters can be used for measuring a planeness error of the to-be-measured plane. The device is simple in structure, is convenient to use, can achieve the detection of planeness very quickly, also can be used for the detection of the parallelism and linearity of a guide rail, is wide in application range, is convenient for on-site detection, is convenient for popularization, and is very high in market popularization value.
Description
Technical field
The present invention relates to a kind of flatness checking device, particularly one portable Multifunctional planar degree pick-up unit, and adopt the method for this pick-up unit detection plane degree.
Background technology
Flatness refers to the variation of tested real surface to its ideal plane, refers to the deviation of macroscopical height of concave convex relative ideal plane that substrate has.The method of existing measurement plane mainly contains a variety of, as optical flat interferometric method, make table mensuration, fluid level method, beam plane method, laser planeness measuring instrument etc., adopt these method detection plane degree steps all comparatively complicated, often need very professional instrument just can detect.To beat table mensuration, when detecting, needing tested part and micrometer to be placed on dressing plate, using dressing plate as measurement datum, measuring along real surface pointwise or along several rectilinear directions with micrometer.Beat table mensuration and be divided into three point method and diagonal method by evaluation reference field: three point method be with 3 ideal planes determined of lie farthest away on tested real surface as evaluation reference field, are first adjusted to dressing plate contour at 3 of lie farthest away on tested real surface during actual measurement; First the angle point of four on real surface is adjusted to contour between two by diagonal line during diagonal method actual measurement.Then measure with micrometer, the maximum variation that micrometer records on whole real surface is the flatness error of this real surface.
There is foregoing description known, adopting to beat when table mensuration detects tested part flatness needs to use dressing plate as a reference, but in actual production process, a lot of occasion does not have dressing plate (as some working-yards), with regard to being difficult to, Site Detection being carried out to the flatness of tested part like this, being therefore necessary that the flatness of a kind of portable flatness checking device of design to detected part detects.
Summary of the invention
The shortcoming of prior art in view of the above, the object of the present invention is to provide a kind of structure simple, easy to use, and the on-the-spot on-line checkingi of energy, has the portable multi-function flatness checking device of several functions.
For achieving the above object and other relevant objects, the invention provides a kind of portable multi-function flatness checking device, it comprises a crossbeam, and described crossbeam is provided with at least two support members, a plane can be determined when support member contacts with tested surface, described crossbeam is also provided with at least one altitude gauge.
Preferably, described crossbeam is provided with two support members, and the bottom of one of them support member is point-like support portion, and the bottom wire of another support member described is support portion, the point in described point-like support portion and described wire be the line of support portion not on the same line.
Preferably, one of them support member is conical structure, and another support member is v-shaped structure.
Preferably, described crossbeam is provided with two support members, and the bottom of one of them support member is provided with a point-like support portion, and the bottom of another support member described is provided with two point-like support portions.
Preferably, described crossbeam is provided with three support members, and the bottom of three support members is point-like support portion, and three point-like support portions are not on same straight line.
Preferably, described support member is movably connected with described crossbeam.
Preferably, described crossbeam is provided with elongated slot, and described support member is slidably positioned at described elongated slot.
The present invention also discloses the using method of this portable multi-function flatness checking device several:
When detecting the flatness of plane to be checked, first in the plane that the contact point making the gauge head contact of the altitude gauge of this pick-up unit be placed in support member is formed, altitude gauge is returned to zero, when needing the flatness detecting plane to be checked, this pick-up unit at least twice is placed in plane to be checked with different angles, make the bottom of support member used all with plane contact to be checked, and read the reading of altitude gauge, select the absolute value sum of the maximum positive reading of altitude gauge and maximum negative reading to weigh the flatness error of tested surface.
When the parallelism error of detection two guide rails, first a reading platform is set between two guide rails, a part of support member of this pick-up unit is placed on a guide rail one end, another part support member of this pick-up unit is placed on another root guide rail other end, pick-up unit is inclined cross and between two guide rails, make altitude gauge touch reading platform and altitude gauge is returned to zero, then by the crossbeam of pick-up unit with reading platform for the center of circle rotates to an angle, and read the full-scale reading of altitude gauge, the parallelism error of two guide rails is weighed with this.
When detecting the linearity of long narrow plane, first in the plane that the contact point making the gauge head contact of the altitude gauge of this pick-up unit be placed in support member is formed, altitude gauge is returned to zero, when needing the linearity detecting plane to be checked, this pick-up unit is placed in plane to be checked, makes all support members and plane contact to be checked, and this pick-up unit that moves around, read the reading of altitude gauge, select the full-scale reading of altitude gauge to weigh the straightness error of plane to be checked.
As mentioned above, portable multi-function flatness checking device of the present invention and using method thereof have following beneficial effect: the bottom of this portable multi-function flatness checking device upper supporting piece contacts with the face of workpiece for measurement just can determine a plane, then another plane just can be determined in the position of motion detection device, this variation just can determining between each plane according to the change of altitude gauge, the reading variation range of such altitude gauge just can be used as measurement flatness error.This structure of the detecting device is simple, easy to use, can detect flatness very fast, except flatness error is detected, the straightness error of parallelism error between guide rail and guide rail can also be detected, therefore also there is applied range, be convenient to promote, the advantages such as the on-the-spot on-line checkingi of energy, have high market popularization value.
Accompanying drawing explanation
Fig. 1 is the structural representation of first embodiment of the invention.
Fig. 2 is the structural representation of second embodiment of the invention.
Fig. 3 is the structural representation that the present invention is placed on when standard flat returns to zero.
Fig. 4 be the embodiment of the present invention detection plane when spending first time the structural representation put.
Fig. 5 is the embodiment of the present invention detection plane structural representation that second time is put when spending.
The structural representation that Fig. 6 puts when being the embodiment of the present invention detection depth of parallelism for the first time.
The structural representation that when Fig. 7 is the embodiment of the present invention detection depth of parallelism, second time is put.
Fig. 8 is the structural representation that embodiment of the present invention detection of straight lines is put when spending.
Element numbers explanation
1, flatness checking device 11, crossbeam 12, altitude gauge 13, first support member 14, second support member 141, feet 142, feet 2, reference platform 3, plane to be detected 4, guide rail 5, reading platform 6, long narrow plane.
Embodiment
By particular specific embodiment, embodiments of the present invention are described below, person skilled in the art scholar the content disclosed by this instructions can understand other advantages of the present invention and effect easily.
Refer to Fig. 1 to Fig. 8.Notice, structure, ratio, size etc. that this instructions institute accompanying drawings illustrates, content all only in order to coordinate instructions to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the present invention can produce and the object that can reach, still all should drop on disclosed technology contents and obtain in the scope that can contain.Simultaneously, quote in this instructions as " on ", D score, "left", "right", " centre " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the present invention.
As shown in fig. 1, the invention provides a kind of portable multi-function flatness checking device, it comprises a crossbeam 11, is respectively equipped with the first support member 13 and the second support member 14 at the two ends of crossbeam 11, measurement 11 is also provided with altitude gauge 12, and altitude gauge 12 can arrange one or more.The bottom of the first support member 13 is point-like support portion, and namely it contacts with surface of contact as point cantact, and the bottom wire of the second support member 14 is support portion, and the contact namely between itself and supporting surface is linear contact lay.As a kind of preferred implementation, the first support member 13 can select conical structure, and the second support member 14 can select v-shaped structure.
This portable multi-function flatness checking device in use, needs the first support member 13, second support member 14 to be supported in the plane that will detect, the bottom making the first support member 13, second support member 14 respectively with the plane contact that will detect.In order to adapt to the plane of different sizes, an elongated slot can be set on crossbeam 11, and make the first support member 13, second support member 14 movably be positioned at this elongated slot respectively, can the distance very easily between the first support member 13, second support member 14 regulate, with the plane making this flatness checking device be applicable to different size size like this.
A support member of this portable multi-function flatness checking device and plane are point cantact, another support member and plane are linear contact lay, because a point and straight line can form a plane, the variation so just can determining between each plane according to the number of degrees of altitude gauge, so just can provide reference to the flatness weighing this plane to be detected.
Support on above-mentioned crossbeam can arrange multiple as required, as long as ensure that the strong point bottom support member is positioned at same plane.As shown in Figure 2, second on crossbeam 11 supports 14 and is provided with two feets 141,142, and two feets 141,142 are two point-like support portions, because can determine a plane, therefore can ensure that the strong point bottom support member is in the same plane at 3.As another embodiment of the present invention, can be provided with three support members on crossbeam 11, the bottom of three support members is point-like support portion, and three point-like support portions are not on same straight line, and such three support members also can determine a plane.
Use this flatness checking device can detect the flatness of workpiece, the depth of parallelism, linearity.Below in conjunction with accompanying drawing, this flatness checking device detection mode of employing is described:
When the flatness of detection plane, concrete operation step is as follows: first as shown in Figure 3, returns to zero to altitude gauge 12, directly can be placed on by this flatness checking device on a reference plane 2, then be returned to zero by altitude gauge when returning to zero.When being placed on reference plane by flatness checking device 1, with reference to the plane sizes that will detect, regulate the distance between the first support member 13, second support member 14, distance between the two should be large as much as possible, and testing result can be made so more accurate.Altitude gauge 12 can detect plane to be detected after returning to zero, during detection, as shown in Figure 4, this planar detecting device is placed in plane to be checked, make the first support member, the second support member and plane contact to be checked, and read the reading of altitude gauge, line item of going forward side by side.Then more as shown in Figure 5, crossbeam 11 is rotated to an angle, and repeats above-mentioned steps, treat detection plane in the same way and detect, and the reading of recording altimeter, select the absolute value sum of the maximum positive reading of altitude gauge and maximum negative reading to weigh the flatness error of tested surface.Above-mentioned detection method can repeatedly, should select the absolute value sum of the maximum positive reading of altitude gauge and maximum negative reading to weigh the flatness error of tested surface.
The parallelism error concrete operation step detecting two guide rails is as follows: first as shown in Figure 6, a reading platform 5 is determined between two guide rails 4, this pick-up unit 1 is placed on two guide rails 4, the first support member 13 is made to be supported on a guide rail, second support member 14 is supported on another root guide rail, altitude gauge 12 is supported on reading platform 5, altitude gauge 14 is returned to zero, then as shown in Figure 7, by the crossbeam of pick-up unit 1 with reading platform for the center of circle rotates to an angle, make two support members 13, 14 exchange with the guide rail position contacted, and then read the reading of altitude gauge 12, namely this reading can be used as the reference weighing these two guide rail 4 depth of parallelisms.Equally, can crossbeam 11 be rotated repeatedly, select altitude gauge full-scale reading to weigh the parallelism error of two guide rails.
The concrete operation step detecting narrow average linearity is as follows: first as shown in Figure 3, returns to zero to altitude gauge 12, directly can be placed on by this flatness checking device on a reference plane 2, then be returned to zero by altitude gauge when returning to zero.When needs detect long narrow flat sided straight dimension, as shown in Figure 8, this pick-up unit is placed in long narrow plane 6 to be checked, first support member 13, second support member 14 is contacted with long narrow plane 6 to be checked, and read the reading of altitude gauge, select altimeter reading maximum be the linearity of long narrow plane to be checked.When detecting, the distance between the first support member 13, second support member 14 should be far away as much as possible, can move around repeatedly in long narrow plane 6 to be checked equally, select the maximum number of degrees to weigh the straightness error of plane to be checked.
Each support member of this portable multi-function flatness checking device contacts with tested surface just can determine a plane, then to move on tested surface or another plane just can be determined in the position of rotation detecting, the change in location just can determining between each plane according to the change of altitude gauge, the readings scope of such altitude gauge just can be used to the flatness error weighing tested surface.
This structure of the detecting device is simple, easy to use, can detect flatness error very fast, except flatness error is detected, the straightness error of parallelism error between guide rail and guide rail can also be detected, therefore also there is applied range, facilitate Site Detection, be convenient to the advantages such as popularization, there is high market popularization value.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any person skilled in the art scholar all without prejudice under spirit of the present invention and category, can modify above-described embodiment or changes.Therefore, such as have in art usually know the knowledgeable do not depart from complete under disclosed spirit and technological thought all equivalence modify or change, must be contained by claim of the present invention.
Claims (10)
1. a portable multi-function flatness checking device, is characterized in that: it comprises a crossbeam, and described crossbeam is provided with at least two support members, can determine a plane, described crossbeam is also provided with at least one altitude gauge when support member contacts with tested surface.
2. portable multi-function flatness checking device according to claim 1, it is characterized in that: described crossbeam is provided with two support members, the bottom of one of them support member is point-like support portion, the bottom wire of another support member described is support portion, the point in described point-like support portion and described wire be the line of support portion not on the same line.
3. portable multi-function flatness checking device according to claim 2, is characterized in that: one of them support member is conical structure, and another support member is v-shaped structure.
4. portable multi-function flatness checking device according to claim 1, it is characterized in that: described crossbeam is provided with two support members, the bottom of one of them support member is provided with a point-like support portion, and the bottom of another support member described is provided with two point-like support portions.
5. portable multi-function flatness checking device according to claim 1, is characterized in that: described crossbeam is provided with three support members, and the bottom of three support members is point-like support portion, and three point-like support portions are not on same straight line.
6. portable multi-function flatness checking device according to claim 1, is characterized in that: described support member is connected with described crossbeam movably.
7. portable multi-function flatness checking device according to claim 6, it is characterized in that: described crossbeam is provided with elongated slot, described support member is slidably positioned at described elongated slot.
8. the using method of portable multi-function flatness checking device described in a claim 1, it is characterized in that, when detecting the flatness of plane to be checked, first in the plane that the contact point making the gauge head contact of the altitude gauge of this pick-up unit be placed in support member is formed, altitude gauge is returned to zero, when needing the flatness detecting plane to be checked, this pick-up unit at least twice is placed in plane to be checked with different angles, make the bottom of support member used all with plane contact to be checked, and read the reading of altitude gauge, the absolute value sum of the maximum positive reading of altitude gauge and maximum negative reading is selected to weigh the flatness error of tested surface.
9. the using method of portable multi-function flatness checking device described in a claim 1, it is characterized in that, when the parallelism error of detection two guide rails, first a reading platform is set between two guide rails, a part of support member of this pick-up unit is placed on a guide rail one end, another part support member of this pick-up unit is placed on another root guide rail other end, pick-up unit is inclined cross and between two guide rails, make altitude gauge touch reading platform and altitude gauge is returned to zero, then by the crossbeam of pick-up unit with reading platform for the center of circle rotates to an angle, and read the full-scale reading of altitude gauge, the parallelism error of two guide rails is weighed with this.
10. the using method of portable multi-function flatness checking device described in a claim 1, it is characterized in that, when detecting the linearity of long narrow plane, first in the plane that the contact point making the gauge head contact of the altitude gauge of this pick-up unit be placed in support member is formed, altitude gauge is returned to zero, when needing the linearity detecting plane to be checked, this pick-up unit is placed in plane to be checked, make all support members and plane contact to be checked, and this pick-up unit that moves around, read the reading of altitude gauge, the full-scale reading of altitude gauge is selected to weigh the straightness error of plane to be checked.
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CN201510579047.2A CN105115407A (en) | 2015-09-11 | 2015-09-11 | Portable multifunctional planeness detection device and application method therefor |
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Cited By (5)
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CN108020180A (en) * | 2017-11-22 | 2018-05-11 | 郭淑芳 | A kind of surface roughness device for fast detecting |
CN108844497A (en) * | 2018-06-07 | 2018-11-20 | 东北大学 | A kind of numerical control machine slide rail mounting surface linearity testing apparatus and method |
CN113483637A (en) * | 2021-08-06 | 2021-10-08 | 上海菲利华石创科技有限公司 | Temporary rapid detection device and method for thick quartz plate groove for semiconductor |
CN113532367A (en) * | 2020-04-17 | 2021-10-22 | 北京福田康明斯发动机有限公司 | Flatness measuring device and method |
CN114001632A (en) * | 2021-11-02 | 2022-02-01 | 中国科学院光电技术研究所 | Flatness detection device and detection method for large ultra-precise annular plane |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108020180A (en) * | 2017-11-22 | 2018-05-11 | 郭淑芳 | A kind of surface roughness device for fast detecting |
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CN113532367A (en) * | 2020-04-17 | 2021-10-22 | 北京福田康明斯发动机有限公司 | Flatness measuring device and method |
CN113483637A (en) * | 2021-08-06 | 2021-10-08 | 上海菲利华石创科技有限公司 | Temporary rapid detection device and method for thick quartz plate groove for semiconductor |
CN114001632A (en) * | 2021-11-02 | 2022-02-01 | 中国科学院光电技术研究所 | Flatness detection device and detection method for large ultra-precise annular plane |
CN114001632B (en) * | 2021-11-02 | 2023-09-19 | 中国科学院光电技术研究所 | Flatness detection device and detection method for large ultra-precise annular plane |
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