CN104515481A - Device and method for measuring planeness of large-diameter torus - Google Patents

Device and method for measuring planeness of large-diameter torus Download PDF

Info

Publication number
CN104515481A
CN104515481A CN201410788237.0A CN201410788237A CN104515481A CN 104515481 A CN104515481 A CN 104515481A CN 201410788237 A CN201410788237 A CN 201410788237A CN 104515481 A CN104515481 A CN 104515481A
Authority
CN
China
Prior art keywords
point
measured
measuring
ccd detector
anchor ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201410788237.0A
Other languages
Chinese (zh)
Other versions
CN104515481B (en
Inventor
陈宝刚
张景旭
吴小霞
徐伟
张岩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201410788237.0A priority Critical patent/CN104515481B/en
Publication of CN104515481A publication Critical patent/CN104515481A/en
Application granted granted Critical
Publication of CN104515481B publication Critical patent/CN104515481B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a device and a method for measuring planeness of a large-diameter torus, relates to measuring technology in the field of machining mounting and adjusting detection and solves the problem that an existing torus planeness measuring device is complex in structure and limited in use and the problem that an existing measuring method is large in measuring error caused by low measuring accuracy and the like. The device comprises a precise turntable, an internal focusing light tube, a turnplate leveling mechanism, a measuring rod and a CCD (charge coupled device) detector. The method includes utilizing the internal focusing light tube to image an optical fiber point light source above the measured torus; enabling the precise turntable to drive an image point of the point light source to rotate for drawing a circle in space; using the CCD detector to receive the image point of the point light source by taking a plane where the circle is positioned as a base; measuring distance between a measured point and the base plane according to target missing distance; calculating to acquire planeness of the measured torus through data processing. The device and the method are high in measuring accuracy, simple in data processing, convenient in operation, high in efficiency, low in cost and suitable for detection of planeness of large-size ring members.

Description

Measure the device and method of large diameter circle facial plane degree
Technical field
The present invention relates to the measuring technique that machining debugs detection field, be specifically related to a kind of apparatus and method that large diameter circle facial plane degree is detected.
Background technology
The high-acruracy survey of flatness is the important step that machining debugs in testing process, the diameter of large scale circular ring type part is all several meters of magnitudes, the accurate measurement of its flatness is a difficult point always, and the method used in producing at present has level meter method, many gauge heads error separation method, three-dimensional coordinates measurement method, level surface method, rotation of rotary table method, 3 analyzer methods and micr-alignment telescope method etc.
Wherein level meter method is most widely used, and owing to adopting pitch point-to-point measurement, measuring speed is too slow, and many by external interference factor, the application that this method is the most ripe is in addition mainly for the large plane of middle atresia, so that the division of examination network; Many gauge heads partition method can obtain micron-sized high precision, but owing to using sensor many, needs data volume to be processed large, complex structure, and operation inconvenience, uses limited; Three-dimensional coordinates measurement method precision reduces along with the increase of measurement size, the maximum annulus part can only measuring diameter about two meters of mobile bridge type coordinate measuring machine, portable coordinate measurement machine (articulated arm or laser tracker) can measure large-scale part, but precision is lower, expensive; Level surface method system hardware configuration is complicated, and adopting a measuring process needs to wait for liquid level stabilizing, and efficiency is low, greatly affected by environment, low precision; Rotation of rotary table method is due to by the impact of measuring cantilever stiffness, lower to the measuring accuracy of large scale annulus; 3 analyzer methods are researched and developed for the measurement of planeness of electro-optic theodolite turntable shaft carrier ring specially, but due to the impact of 3 analyzer stiffness by itself, only about one meter in diameter and below neck collar on well applied; Micr-alignment telescope coordinates pentaprism to rotate formation reference plane, the method is relatively applicable to the measurement of annulus part flatness, but adopts parallel plate micrometer principle reading, during telemeasurement due to it, by the impact of optical system picture element and enlargement factor, measuring error is larger.
Summary of the invention
The present invention is that the measurement mechanism solving existing circular planes degree exists complex structure and uses limited problem, present measuring method is low and cause the problems such as measuring error is large owing to there is measuring accuracy, provides a kind of device and method measuring large diameter circle facial plane degree.
Measure the device of large diameter circle facial plane degree, comprise precise rotating platform, interior focusing light pipe, fiber optic point source, leveling turntable mechanism, measuring staff and ccd detector; Precise rotating platform is placed in leveling turntable mechanism, interior focusing light pipe is fixed on precise rotating platform table top, the rotational axis vertical of described interior focusing light pipe optical axis and precise rotating platform, the turning axle of described precise rotating platform and the center superposition of measured circle anchor ring, described fiber optic point source is connected to the focal position of interior focusing light pipe, the axis being parallel of ccd detector target surface and measuring staff, and measuring staff axis is vertical with measured circle anchor ring, measuring staff head is sphere, and is point cantact with measured circle anchor ring.
Measure the method for large diameter circle facial plane degree, the method is realized by following steps:
Step one, successively measuring staff is placed on the position of measured point described in position, equally spaced mark measured point on measured circle anchor ring, ccd detector is made to receive the picture point of the fiber optic point source of position, different measured point, rotate precise rotating platform, make the picture point of the fiber optic point source of position, described different measured point be zero at the miss distance of ccd detector horizontal direction, and record the miss distance of ccd detector vertical direction;
Step 2, data processing is carried out to the miss distance of the record ccd detector vertical direction described in step one, obtain the error of measured circle anchor ring flatness, realize the detection of the flatness to measured circle anchor ring.
Beneficial effect of the present invention: the present invention innovates improvement on the basis of classic method, overcome the deficiency of classic method, adopt the method for optics and image procossing, use interior focusing light pipe in conjunction with precise rotating platform, the disc formed at Space Rotating with fiber optic point source picture point is for benchmark, receive fiber optic point source picture point with ccd detector and measure its miss distance, calculating the flatness of measured circle anchor ring finally by data processing.The principle of the invention is clear and definite, and structure is simple, and easy to operate, precision is high, practical.The present invention forms reference plane in an optical manner, and precision does not affect by the rigidity of structure; Adopt the distance of the direct measuring basis hot spot of CCD and tested surface, measuring accuracy is high; For the measured circle ring of different-diameter, regulate interior focusing light pipe, fiber optic point source picture point is transmitted to above tested annulus, measure strong adaptability; Site Detection debuging with the Large circular ring instructing rigidity poor can also be carried out simultaneously, its flatness error is met the demands.
Accompanying drawing explanation
Fig. 1 is the device schematic diagram of measurement large diameter circle facial plane degree of the present invention.
In figure: 1, ccd detector, 2, fixed lens group, 3, focusing lens group, 4, fiber optic point source, 5, precise rotating platform, 6, leveling turntable mechanism, 7, measuring staff, 8, tested annulus.
Embodiment
Embodiment one, composition graphs 1 illustrate present embodiment, and measure the device of large diameter circle facial plane degree, this device comprises precise rotating platform 5, interior focusing light pipe, fiber optic point source 4, leveling turntable mechanism 6, measuring staff 7 and ccd detector 1.Interior focusing light pipe is made up of fixed lens group 2 and focusing lens group 3.Precise rotating platform 5 is placed in leveling turntable mechanism 6, and interior focusing light pipe is fixed on precise rotating platform 5 table top, and fiber optic point source 4 is connected to the focal position of interior focusing light pipe, and ccd detector 1 is arranged on measuring staff 7.
Focusing lens group 3 in interior focusing light pipe described in present embodiment can move along optical axis direction, precise rotating platform 5 rotation and measured circle anchor ring 8 center superposition.Interior focusing light pipe optical axis and precise rotating platform 5 rotational axis vertical.Ccd detector 1 target surface and measuring staff 7 axis being parallel, measuring staff 7 axis is vertical with measured circle anchor ring 8, and measuring staff 7 head is sphere, is point cantact with measured circle anchor ring 8.
Embodiment two, present embodiment are the method for the device of the measurement large diameter circle facial plane degree described in embodiment one, and the concrete steps of the method are:
First, regulate interior focusing light pipe before measurement, measuring staff 7 is vertically placed on measured circle anchor ring 8, and ccd detector 1 receives the picture point of fiber optic point source 4, and the position of adjustment focusing lens group 3, makes picture point hot spot minimum.
Secondly, adjust the attitude of precise rotating platform 5, the position of mobile measuring staff 7, make ccd detector 1 equally spaced three diverse locations on measured circle anchor ring 8 receive the picture point of fiber optic point source 4, adjustment precise rotating platform levelling gear 6, makes picture point equal at the miss distance of ccd detector 1 vertical direction.
During measurement, first in the position of the first-class spaced markings measured point of measured circle anchor ring 8, then successively measuring staff 7 is placed on the position θ of measured point i, rotate precise rotating platform 5, make picture point be zero at ccd detector 1 horizontal direction miss distance, the miss distance y of record ccd detector 1 vertical direction i.
Finally, measurement data is processed, first measurement data y ibe launched into Fourier series f (θ i) carry out frequency analysis, then remove constant term and once item harmonic wave Y 1, obtain data t i.
f ( θ i ) = a 0 2 + Σ k = 1 ∞ ( a k cos kθ i + b k sin k θ i )
Wherein:
a 0 = 2 n Σ i = 0 n - 1 y i
a k ≈ 2 n Σ i = 0 n - 1 y i cos k θ i
b k ≈ 2 n Σ i = 0 n - 1 y i sin k θ i
Kth time item harmonic function: Y k=a kcos k θ i+ b ksin k θ i
t i = y i - a 0 2 - Y 1 = y i - a 0 2 - a 1 cos θ i - b 1 sin θ i
Again to (θ i, t i) planar carrying out least squares line fitting, straight-line equation is:
Aθ+Bt+C=0
Then each point (θ is calculated i, t i) to the distance of fitting a straight line:
D i = Aθ i + Bt i + C A 2 + B 2
Last Calculation Plane degree error: Flatness=D max-D min.
In formula: y ifor the miss distance of ccd detector vertical direction, θ ifor the angle value of measurement point position on anchor ring, a kfor the coefficient of cosine component in kth time item harmonic function, b kfor the coefficient of sinusoidal component in kth time item harmonic function; Y kfor kth time item harmonic function, t ifor removing constant term and the data once after item after frequency analysis, A, B and C are the coefficient of fitting a straight line, D ifor each point is to the distance of fitting a straight line, D maxfor ultimate range, D minfor minor increment, Flatness is flatness error.
Measuring method of the present invention forms reference plane in an optical manner, and precision does not affect by the rigidity of structure; Adopt the distance of the direct measuring basis hot spot of ccd detector and measured circle anchor ring, measuring accuracy is high; For the measured circle toric optical part of different-diameter, regulate interior focusing light pipe, fiber optic point source picture point is transmitted to the top of measured circle anchor ring, measure strong adaptability; The present invention is applicable to mechanic factory workers, large component assembling construction unit and detects metrological service using.

Claims (5)

1. measure the device of large diameter circle facial plane degree, comprise precise rotating platform (5), interior focusing light pipe, fiber optic point source (4), leveling turntable mechanism (6), measuring staff (7) and ccd detector (1), precise rotating platform (5) is placed in leveling turntable mechanism (6), interior focusing light pipe is fixed on precise rotating platform (5) table top, it is characterized in that, the rotational axis vertical of described interior focusing light pipe optical axis and precise rotating platform (5), the turning axle of described precise rotating platform (5) and the center superposition of measured circle anchor ring (8), described fiber optic point source (4) is connected to the focal position of interior focusing light pipe, the axis being parallel of ccd detector (1) target surface and measuring staff (7), measuring staff (7) axis is vertical with measured circle anchor ring (8), measuring staff (7) head is sphere, and be point cantact with measured circle anchor ring (8).
2. the device of described measurement large diameter circle facial plane degree according to claim 1, it is characterized in that, described interior focusing light pipe is made up of fixed lens group (2) and focusing lens group (3); Focusing lens group (3) in described interior focusing light pipe moves along optical axis direction.
3. the method for the device of measurement large diameter circle facial plane degree according to claim 1, it is characterized in that, the method is realized by following steps:
Step one, successively measuring staff (7) is placed on the position of measured point described in the upper position, equally spaced mark measured point of measured circle anchor ring (8), ccd detector (1) is made to receive the picture point of the fiber optic point source (4) of position, different measured point, rotate precise rotating platform (5), make the picture point of the fiber optic point source (4) of position, described different measured point be zero at the miss distance of ccd detector (1) horizontal direction, and record the miss distance of ccd detector (1) vertical direction;
Step 2, data processing is carried out to the miss distance of record ccd detector (1) vertical direction described in step one, obtain the error of measured circle anchor ring (8) flatness, realize the detection of the flatness to measured circle anchor ring.
4. the method for measurement large diameter circle facial plane degree according to claim 3, it is characterized in that, the detailed process obtaining flatness error in step 2 is: first measurement miss distance data are launched into Fourier series and carry out frequency analysis, secondly, removal constant term and once item harmonic wave, again, carry out least square fitting, finally calculate flatness error.
5. the method for the measurement large diameter circle facial plane degree according to claim 3 or 4, it is characterized in that, before step, also comprise the adjustment to interior focusing light pipe, measuring staff (7) is vertically placed on measured circle anchor ring (8), ccd detector (1) receives the picture point of fiber optic point source (4), and the position of adjustment focusing lens group (3), makes picture point hot spot minimum; To the adjustment of precise rotating platform (5) attitude, the position of mobile measuring staff (7), ccd detector (1) is made to receive the picture point of fiber optic point source (4) at the equally spaced diverse location of the upper mark of measured circle anchor ring (8), adjustment leveling turntable mechanism (6), makes picture point equal at the miss distance of ccd detector (1) vertical direction.
CN201410788237.0A 2014-12-17 2014-12-17 Measure the device and method of large diameter circle facial plane degree Active CN104515481B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410788237.0A CN104515481B (en) 2014-12-17 2014-12-17 Measure the device and method of large diameter circle facial plane degree

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410788237.0A CN104515481B (en) 2014-12-17 2014-12-17 Measure the device and method of large diameter circle facial plane degree

Publications (2)

Publication Number Publication Date
CN104515481A true CN104515481A (en) 2015-04-15
CN104515481B CN104515481B (en) 2017-06-09

Family

ID=52791149

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410788237.0A Active CN104515481B (en) 2014-12-17 2014-12-17 Measure the device and method of large diameter circle facial plane degree

Country Status (1)

Country Link
CN (1) CN104515481B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106979789A (en) * 2017-05-16 2017-07-25 苏州迅威光电科技有限公司 A kind of apparatus and method of total powerstation support precision Image detection
WO2018201340A1 (en) * 2017-05-03 2018-11-08 大连理工大学 In-situ method for measuring shape error in flat ring surface
WO2018201337A1 (en) * 2017-05-03 2018-11-08 大连理工大学 In-situ system for measuring shape error in large ring surface
CN109597214A (en) * 2018-12-29 2019-04-09 深圳航星光网空间技术有限公司 The system for drawing optical antenna outgoing beam optical axis
CN112325809A (en) * 2021-01-06 2021-02-05 广东技术师范大学 Method for detecting flatness of flange
CN114001632A (en) * 2021-11-02 2022-02-01 中国科学院光电技术研究所 Flatness detection device and detection method for large ultra-precise annular plane

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080008375A1 (en) * 2006-07-06 2008-01-10 Petersen Russell H Method for inspecting surface texture direction of workpieces
CN102890284A (en) * 2012-10-10 2013-01-23 中国科学院高能物理研究所 Nuclear detection device
CN103778877A (en) * 2014-02-17 2014-05-07 达靖虹 Projection application method
US20140268172A1 (en) * 2013-03-12 2014-09-18 Kla-Tencor Corporation Enhanced Inspection and Metrology Techniques And Systems Using Bright-Field Differential Interference Contrast
CN104067089A (en) * 2012-01-27 2014-09-24 新日铁住金株式会社 Device for measuring undulation of brake disk in brake disk-equipped railroad wheel

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080008375A1 (en) * 2006-07-06 2008-01-10 Petersen Russell H Method for inspecting surface texture direction of workpieces
CN104067089A (en) * 2012-01-27 2014-09-24 新日铁住金株式会社 Device for measuring undulation of brake disk in brake disk-equipped railroad wheel
CN102890284A (en) * 2012-10-10 2013-01-23 中国科学院高能物理研究所 Nuclear detection device
US20140268172A1 (en) * 2013-03-12 2014-09-18 Kla-Tencor Corporation Enhanced Inspection and Metrology Techniques And Systems Using Bright-Field Differential Interference Contrast
CN103778877A (en) * 2014-02-17 2014-05-07 达靖虹 Projection application method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
王琼 等: "wMPS系统中扫描光面的拟合与评定技术", 《光电工程》 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018201340A1 (en) * 2017-05-03 2018-11-08 大连理工大学 In-situ method for measuring shape error in flat ring surface
WO2018201337A1 (en) * 2017-05-03 2018-11-08 大连理工大学 In-situ system for measuring shape error in large ring surface
US10976146B2 (en) 2017-05-03 2021-04-13 Dalian University Of Technology System for shape error in-situ measurement of large-scale torus
CN106979789A (en) * 2017-05-16 2017-07-25 苏州迅威光电科技有限公司 A kind of apparatus and method of total powerstation support precision Image detection
CN109597214A (en) * 2018-12-29 2019-04-09 深圳航星光网空间技术有限公司 The system for drawing optical antenna outgoing beam optical axis
CN112325809A (en) * 2021-01-06 2021-02-05 广东技术师范大学 Method for detecting flatness of flange
CN114001632A (en) * 2021-11-02 2022-02-01 中国科学院光电技术研究所 Flatness detection device and detection method for large ultra-precise annular plane
CN114001632B (en) * 2021-11-02 2023-09-19 中国科学院光电技术研究所 Flatness detection device and detection method for large ultra-precise annular plane

Also Published As

Publication number Publication date
CN104515481B (en) 2017-06-09

Similar Documents

Publication Publication Date Title
CN104515481B (en) Measure the device and method of large diameter circle facial plane degree
CN107144248B (en) A kind of scaling method of numerically-controlled machine tool turntable error
CN104215258A (en) Vehicle-mounted theodolite angle measurement precision testing method and system
CN109631826B (en) Satellite automation precision detection method
CN102706361B (en) A kind of high precision many inertial navigation systems attitude accuracy assessment method
CN103754235B (en) A kind of high ferro is measured by inertia positioning and orienting device and method
WO2013044677A1 (en) Large-scale, three-dimensional coordinate measuring method and apparatus with laser tracking
CN206648613U (en) A kind of big lens eccentricity measurement apparatus
CN102252637A (en) Method for detecting flatness of large-scale flange
CN103017690A (en) Method for measuring straightness of super-long guide rail
CN106705991B (en) Strapdown is used to group and aims prism installation error test equipment
CN103630096B (en) A kind of Zero positioning method of articulated arm coordinate measuring machine
CN105486276A (en) High-precision measurement device and measurement method for angle of pitch
CN104535042B (en) Measuring method based on non-orthogonal axes system laser transit
CN105444673A (en) Device and method for determining center of optical element according to rotating translation absolute detection method
CN109813343A (en) A kind of measurement method of centrifuge Initial Alignment Error
CN104154881A (en) Measuring method for parallelism error of shaft hole end face of telescope four-way
CN102353329A (en) Method for measuring non-contact three-dimensional coordinate of simulation test site and device used in same
CN101819017B (en) Detecting device and method of vertex curvature radius of large-diameter non-spherical reflecting mirror
CN103033344B (en) Optical system focal distance detection method
CN107339583B (en) Self-centering type laser tripod
CN110345838B (en) Method for measuring working radius of four-axis centrifugal machine
CN107957241B (en) Subway tunnel section center of circle determining device and method
CN105627945A (en) Device and method of measuring deviation between center of aspheric element and center of outer circle
CN106482743A (en) A kind of method for quick of relative position measurement equipment

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant