CN104515481A - Device and method for measuring planeness of large-diameter torus - Google Patents

Device and method for measuring planeness of large-diameter torus Download PDF

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CN104515481A
CN104515481A CN201410788237.0A CN201410788237A CN104515481A CN 104515481 A CN104515481 A CN 104515481A CN 201410788237 A CN201410788237 A CN 201410788237A CN 104515481 A CN104515481 A CN 104515481A
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flatness
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CN104515481B (en
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陈宝刚
张景旭
吴小霞
徐伟
张岩
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

测量大直径圆环面平面度的装置及方法,涉及机械加工装调检测领域的测量技术,解决现有圆环平面度的测量装置存在结构复杂和使用受限的问题,现在测量方法由于存在测量精度低而导致测量误差大等问题,包括精密转台、内调焦光管、光纤点光源、转台调平机构、测杆和CCD探测器。本方法首先利用内调焦光管把光纤点光源成像在被测圆环面上方,精密转台带动点光源的像点旋转在空间画圆,然后以此圆所在的平面为基准,用CCD探测器接收点光源像点,根据脱靶量测出被测点与基准平面的距离,最后通过数据处理计算即可得到被测圆环面的平面度。本发明测量精度高,数据处理简单,操作方便,效率高,成本低;本发明适用于大尺寸圆环件平面度的检测。

The device and method for measuring the flatness of a large-diameter torus relate to the measurement technology in the field of mechanical processing, assembly and testing, and solve the problems of complex structure and limited use of the existing measuring device for the flatness of the torus. Low precision leads to large measurement errors and other problems, including precision turntable, internal focusing light tube, fiber optic point light source, turntable leveling mechanism, measuring rod and CCD detector. In this method, the optical fiber point light source is imaged above the toroidal surface by using the internal focusing light tube first, and the precision turntable drives the image point of the point light source to rotate to draw a circle in space, and then the plane where the circle is located is used as the reference, and the CCD detector is used to Receive the point light source image point, measure the distance between the measured point and the reference plane according to the off-target amount, and finally obtain the flatness of the measured torus through data processing and calculation. The invention has the advantages of high measurement precision, simple data processing, convenient operation, high efficiency and low cost; the invention is suitable for the detection of the flatness of large-sized ring parts.

Description

测量大直径圆环面平面度的装置及方法Device and method for measuring the flatness of a large-diameter torus

技术领域technical field

本发明涉及机械加工装调检测领域的测量技术,具体涉及一种对大直径圆环面平面度检测的装置与方法。The invention relates to the measurement technology in the field of mechanical processing, assembly and adjustment detection, in particular to a device and method for detecting the flatness of a large-diameter torus.

背景技术Background technique

平面度的高精度测量是机械加工装调检测过程中的重要环节,大尺寸圆环型零件的直径都在数米量级,其平面度的精确测量一直是一个难点,目前生产中使用的方法有水平仪法、多测头误差分离法、三坐标测量法、液面法、转台回转法、三点测定器法和测微准直望远镜法等。The high-precision measurement of flatness is an important link in the process of machining, assembly and testing. The diameter of large-sized circular parts is on the order of several meters, and the accurate measurement of its flatness has always been a difficult point. The method currently used in production There are level instrument method, multi-probe error separation method, three-coordinate measurement method, liquid level method, turntable rotation method, three-point measuring device method and micro-collimation telescope method, etc.

其中水平仪法应用最广,由于采用节距逐点测量,测量速度太慢,受外界干扰因素多,另外该法最成熟的应用主要针对中间无孔的大平面,以便于测量网格的划分;多测头分离法可以获得微米级的高精度,但由于使用传感器多,需要处理的数据量大,结构复杂,操作不便,使用受限;三坐标测量法精度随着测量尺寸的增大而降低,移动桥式坐标测量机最大只能测量直径两米左右的圆环零件,便携式坐标测量机(关节臂式或激光跟踪仪)可以测量大尺寸零件,但精度较低,价格昂贵;液面法系统硬件配置复杂,采点测量过程需要等待液面稳定,效率低,受环境影响大,精度差;转台回转法由于受测量悬臂刚度的影响,对大尺寸圆环的测量精度较低;三点测定器法是专门针对光电经纬仪转台轴承环的平面度测量而研发的,但由于三点测定器自身刚度的影响,只在直径一米左右及以下的轴承环上得到很好的应用;测微准直望远镜配合五棱镜旋转形成基准平面,该方法比较适合圆环件平面度的测量,但由于其采用平板测微器原理读数,远距离测量时,受光学系统像质及放大倍数的影响,测量误差较大。Among them, the level meter method is the most widely used. Because the pitch is measured point by point, the measurement speed is too slow, and there are many external interference factors. In addition, the most mature application of this method is mainly for large planes without holes in the middle, so as to facilitate the division of measurement grids; The multi-probe separation method can obtain micron-level high precision, but due to the use of many sensors, the amount of data to be processed is large, the structure is complex, the operation is inconvenient, and the use is limited; the accuracy of the three-coordinate measurement method decreases with the increase of the measurement size , the mobile bridge coordinate measuring machine can only measure ring parts with a diameter of about two meters at most, and the portable coordinate measuring machine (articulated arm or laser tracker) can measure large-sized parts, but the accuracy is low and the price is expensive; the liquid surface method The hardware configuration of the system is complicated, and the point measurement process needs to wait for the liquid level to be stable, which is inefficient, greatly affected by the environment, and has poor accuracy; due to the influence of the stiffness of the measuring cantilever by the turntable rotation method, the measurement accuracy of large-sized rings is low; three points The detector method is specially developed for the flatness measurement of the bearing ring of the turntable of the photoelectric theodolite, but due to the influence of the stiffness of the three-point detector itself, it is only well applied to the bearing ring with a diameter of about one meter or less; The collimating telescope cooperates with the rotation of the pentaprism to form a reference plane. This method is more suitable for the measurement of the flatness of the circular ring. However, because it uses the principle of a flat plate micrometer to read, it is affected by the image quality and magnification of the optical system during long-distance measurement. The measurement error is large.

发明内容Contents of the invention

本发明为解决现有圆环平面度的测量装置存在结构复杂和使用受限的问题,现在测量方法由于存在测量精度低而导致测量误差大等问题,提供一种测量大直径圆环面平面度的装置及方法。The present invention solves the problems of complex structure and limited use in existing measuring devices for the flatness of circular rings. The current measuring method has problems such as large measurement errors due to low measurement accuracy, and provides a method for measuring the flatness of large-diameter circular rings. devices and methods.

测量大直径圆环面平面度的装置,包括精密转台、内调焦光管、光纤点光源、转台调平机构、测杆和CCD探测器;精密转台放置在转台调平机构上,内调焦光管固定在精密转台台面上,所述内调焦光管光轴与精密转台的旋转轴垂直,所述精密转台的旋转轴与被测圆环面的中心重合,所述光纤点光源连接在内调焦光管的焦点位置,CCD探测器靶面与测杆的轴线平行,测杆轴线与被测圆环面垂直,测杆头部为球面,且与被测圆环面为点接触。A device for measuring the flatness of a large-diameter torus, including a precision turntable, an inner focusing light tube, a fiber optic point light source, a turntable leveling mechanism, a measuring rod, and a CCD detector; the precision turntable is placed on the turntable leveling mechanism, and the inner focus is adjusted The light pipe is fixed on the surface of the precision turntable, the optical axis of the inner focusing light pipe is perpendicular to the rotation axis of the precision turntable, the rotation axis of the precision turntable coincides with the center of the measured torus, and the optical fiber point light source is connected to the The focus position of the inner focusing light tube, the target surface of the CCD detector is parallel to the axis of the measuring rod, the axis of the measuring rod is perpendicular to the toroidal surface to be measured, and the head of the measuring rod is a spherical surface, which is in point contact with the toroidal surface to be measured.

测量大直径圆环面平面度的方法,该方法由以下步骤实现:A method for measuring the flatness of a large-diameter torus, the method is realized by the following steps:

步骤一、依次将测杆放在被测圆环面上等间隔的标记被测点位置所述被测点的位置上,使CCD探测器接收不同被测点位置的光纤点光源的像点,旋转精密转台,使所述不同被测点位置的光纤点光源的像点在CCD探测器水平方向的脱靶量为零,并记录CCD探测器垂直方向的脱靶量;Step 1. Place the measuring rod in turn on the position of the measured point at equal intervals on the measured toroidal surface, so that the CCD detector receives the image points of the optical fiber point light sources at different positions of the measured point, Rotate the precision turntable so that the off-target amount of the image point of the optical fiber point light source at the different measured point positions in the horizontal direction of the CCD detector is zero, and record the off-target amount in the vertical direction of the CCD detector;

步骤二、对步骤一所述的记录CCD探测器垂直方向的脱靶量进行数据处理,获得被测圆环面平面度的误差,实现对被测圆环面的平面度的检测。Step 2: Perform data processing on the off-target amount recorded in the vertical direction of the CCD detector described in step 1 to obtain the error of the flatness of the measured torus, and realize the detection of the flatness of the measured torus.

本发明的有益效果:本发明在传统方法的基础上创新改进,克服了传统方法的不足,采用光学及图像处理的方法,使用内调焦光管结合精密转台,以光纤点光源像点在空间旋转所形成的圆面为基准,用CCD探测器接收光纤点光源像点并测量其脱靶量,最后通过数据处理计算得出被测圆环面的平面度。本发明原理明确,结构简单,操作方便,精度高,实用性强。本发明以光学的方式形成基准平面,精度不受结构刚度影响;采用CCD直接测量基准光斑与被测面的距离,测量精度高;针对不同直径的被测圆环件,调节内调焦光管,把光纤点光源像点透射到被测圆环上方,测量适应性强;同时还可以进行现场检测以指导刚度较差的大型圆环件的装调,使其平面度误差满足要求。Beneficial effects of the present invention: the present invention innovates and improves on the basis of the traditional method, overcomes the deficiencies of the traditional method, adopts the method of optics and image processing, uses the inner focusing light tube combined with the precision turntable, and uses the optical fiber point light source image point in the space The circular surface formed by the rotation is used as the reference, and the CCD detector is used to receive the image point of the optical fiber point light source and measure the off-target amount, and finally calculate the flatness of the measured circular surface through data processing. The invention has clear principle, simple structure, convenient operation, high precision and strong practicability. The invention forms the reference plane in an optical way, and the precision is not affected by the structural rigidity; the distance between the reference spot and the measured surface is directly measured by the CCD, and the measurement accuracy is high; for the measured circular rings with different diameters, the inner focusing light tube is adjusted , the fiber optic point light source image point is transmitted to the top of the measured ring, and the measurement adaptability is strong; at the same time, on-site inspection can be carried out to guide the assembly and adjustment of large rings with poor stiffness, so that the flatness error can meet the requirements.

附图说明Description of drawings

图1为本发明所述的测量大直径圆环面平面度的装置示意图。Fig. 1 is a schematic diagram of a device for measuring the flatness of a large-diameter torus according to the present invention.

图中:1、CCD探测器,2、固定透镜组,3、调焦透镜组,4、光纤点光源,5、精密转台,6、转台调平机构,7、测杆,8、被测圆环。In the figure: 1. CCD detector, 2. Fixed lens group, 3. Focusing lens group, 4. Optical fiber point light source, 5. Precision turntable, 6. Turntable leveling mechanism, 7. Measuring rod, 8. Measured circle ring.

具体实施方式Detailed ways

具体实施方式一、结合图1说明本实施方式,测量大直径圆环面平面度的装置,该装置包括精密转台5、内调焦光管、光纤点光源4、转台调平机构6、测杆7和CCD探测器1。内调焦光管由固定透镜组2及调焦透镜组3组成。精密转台5安放在转台调平机构6上,内调焦光管固定在精密转台5台面上,光纤点光源4连接在内调焦光管的焦点位置,CCD探测器1安装在测杆7上。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. This embodiment is described in conjunction with FIG. 1 , a device for measuring the flatness of a large-diameter torus, which includes a precision turntable 5, an inner focusing light tube, an optical fiber point light source 4, a turntable leveling mechanism 6, and a measuring rod. 7 and CCD detector 1. The inner focusing light pipe is composed of a fixed lens group 2 and a focusing lens group 3 . The precision turntable 5 is placed on the turntable leveling mechanism 6, the inner focusing light tube is fixed on the surface of the precision turntable 5, the optical fiber point light source 4 is connected to the focus position of the inner focusing light tube, and the CCD detector 1 is installed on the measuring rod 7 .

本实施方式所述的内调焦光管中的调焦透镜组3可以沿光轴方向移动,精密转台5旋转轴线与被测圆环面8中心重合。内调焦光管光轴与精密转台5旋转轴垂直。CCD探测器1靶面与测杆7轴线平行,测杆7轴线与被测圆环面8垂直,测杆7头部为球面,与被测圆环面8为点接触。The focusing lens group 3 in the inner focusing light pipe described in this embodiment can move along the optical axis direction, and the rotation axis of the precision turntable 5 coincides with the center of the measured torus 8 . The optical axis of the inner focusing light tube is perpendicular to the rotation axis of the precision turntable 5 . The target surface of the CCD detector 1 is parallel to the axis of the measuring rod 7 , the axis of the measuring rod 7 is perpendicular to the measured torus 8 , and the head of the measuring rod 7 is a spherical surface, which is in point contact with the measured torus 8 .

具体实施方式二、本实施方式为具体实施方式一所述的测量大直径圆环面平面度的装置的方法,该方法的具体步骤为:Specific embodiment two, present embodiment is the method for the device for measuring the flatness of large-diameter torus described in specific embodiment one, and the concrete steps of this method are:

首先,测量前调节好内调焦光管,把测杆7垂直放在被测圆环面8上,CCD探测器1接收光纤点光源4的像点,调整调焦透镜组3的位置,使像点光斑最小。First, adjust the inner focusing light tube before the measurement, put the measuring rod 7 vertically on the torus 8 to be tested, and the CCD detector 1 receives the image point of the optical fiber point light source 4, and adjusts the position of the focusing lens group 3 so that The image spot is the smallest.

其次,调整好精密转台5的姿态,移动测杆7的位置,使CCD探测器1在被测圆环面8上等间隔的三个不同位置接收光纤点光源4的像点,调整精密转台调平机构6,使像点在CCD探测器1垂直方向的脱靶量相等。Secondly, adjust the posture of the precision turntable 5, move the position of the measuring rod 7, make the CCD detector 1 receive the image points of the optical fiber point light source 4 at three different positions equally spaced on the torus 8 to be measured, and adjust the adjustment of the precision turntable. The flat mechanism 6 makes the off-target amount of the image point in the vertical direction of the CCD detector 1 equal.

测量时,先在被测圆环面8上等间隔标记被测点的位置,然后依次把测杆7放在被测点的位置θi,旋转精密转台5,使像点在CCD探测器1水平方向脱靶量为零,记录CCD探测器1垂直方向的脱靶量yiWhen measuring, first mark the positions of the measured points at equal intervals on the measured torus 8, then place the measuring rod 7 at the position θ i of the measured points in turn, and rotate the precision turntable 5 so that the image point is on the CCD detector 1 The off-target amount in the horizontal direction is zero, and the off-target amount yi in the vertical direction of the CCD detector 1 is recorded.

最后,对测量数据进行处理,首先把测量数据yi展开成傅里叶级数f(θi)进行谐波分析,然后去除常数项及一次项谐波Y1,得到数据tiFinally, to process the measured data, first expand the measured data y i into a Fourier series f(θ i ) for harmonic analysis, and then remove the constant term and the first-order harmonic Y 1 to obtain the data t i .

ff (( θθ ii )) == aa 00 22 ++ ΣΣ kk == 11 ∞∞ (( aa kk coscos kθkθ ii ++ bb kk sinsin kk θθ ii ))

其中:in:

aa 00 == 22 nno ΣΣ ii == 00 nno -- 11 ythe y ii

aa kk ≈≈ 22 nno ΣΣ ii == 00 nno -- 11 ythe y ii coscos kk θθ ii

bb kk ≈≈ 22 nno ΣΣ ii == 00 nno -- 11 ythe y ii sinsin kk θθ ii

第k次项谐波函数:Yk=akcos kθi+bksin kθi The kth order harmonic function: Y k =a k cos kθ i +b k sin kθ i

tt ii == ythe y ii -- aa 00 22 -- YY 11 == ythe y ii -- aa 00 22 -- aa 11 coscos θθ ii -- bb 11 sinsin θθ ii

再对(θi,ti)在平面内进行最小二乘直线拟合,直线方程为:Then perform least squares straight line fitting on (θ i , t i ) in the plane, the straight line equation is:

Aθ+Bt+C=0Aθ+Bt+C=0

然后计算各点(θi,ti)到拟合直线的距离:Then calculate the distance from each point (θ i , t i ) to the fitted line:

DD. ii == AθAθ ii ++ BtBt ii ++ CC AA 22 ++ BB 22

最后计算平面度误差:Flatness=Dmax-DminFinally calculate the flatness error: Flatness=D max -D min .

式中:yi为CCD探测器垂直方向的脱靶量,θi为测量点位置在圆环面上的角度值,ak为第k次项谐波函数中余弦分量的系数,bk为第k次项谐波函数中正弦分量的系数;Yk为第k次项谐波函数,ti为谐波分析后去除常数项及一次项后的数据,A、B和C为拟合直线的系数,Di为各点到拟合直线的距离,Dmax为最大距离,Dmin为最小距离,Flatness为平面度误差。In the formula: y i is the off-target amount of the CCD detector in the vertical direction, θ i is the angle value of the measuring point position on the torus, a k is the coefficient of the cosine component in the harmonic function of the kth term, and b k is the coefficient of the kth harmonic function The coefficient of the sine component in the kth order harmonic function; Y k is the kth order harmonic function, t i is the data after removing the constant item and the first order item after the harmonic analysis, and A, B and C are the fitting straight line coefficient, D i is the distance from each point to the fitting line, D max is the maximum distance, D min is the minimum distance, and Flatness is the flatness error.

本发明所述的测量方法以光学的方式形成基准平面,精度不受结构刚度影响;采用CCD探测器直接测量基准光斑与被测圆环面的距离,测量精度高;针对不同直径的被测圆环面光学件,调节内调焦光管,把光纤点光源像点透射到被测圆环面的上方,测量适应性强;本发明适合机械加工企业、大构件安装施工单位和检测计量部门使用。The measurement method of the present invention forms a reference plane in an optical manner, and the accuracy is not affected by the structural rigidity; the distance between the reference spot and the measured torus is directly measured by a CCD detector, and the measurement accuracy is high; for measured circles with different diameters The torus optical part adjusts the inner focusing light pipe, transmits the image point of the optical fiber point light source to the top of the torus to be measured, and has strong measurement adaptability; the invention is suitable for machining enterprises, large component installation and construction units, and inspection and measurement departments. .

Claims (5)

1. measure the device of large diameter circle facial plane degree, comprise precise rotating platform (5), interior focusing light pipe, fiber optic point source (4), leveling turntable mechanism (6), measuring staff (7) and ccd detector (1), precise rotating platform (5) is placed in leveling turntable mechanism (6), interior focusing light pipe is fixed on precise rotating platform (5) table top, it is characterized in that, the rotational axis vertical of described interior focusing light pipe optical axis and precise rotating platform (5), the turning axle of described precise rotating platform (5) and the center superposition of measured circle anchor ring (8), described fiber optic point source (4) is connected to the focal position of interior focusing light pipe, the axis being parallel of ccd detector (1) target surface and measuring staff (7), measuring staff (7) axis is vertical with measured circle anchor ring (8), measuring staff (7) head is sphere, and be point cantact with measured circle anchor ring (8).
2. the device of described measurement large diameter circle facial plane degree according to claim 1, it is characterized in that, described interior focusing light pipe is made up of fixed lens group (2) and focusing lens group (3); Focusing lens group (3) in described interior focusing light pipe moves along optical axis direction.
3. the method for the device of measurement large diameter circle facial plane degree according to claim 1, it is characterized in that, the method is realized by following steps:
Step one, successively measuring staff (7) is placed on the position of measured point described in the upper position, equally spaced mark measured point of measured circle anchor ring (8), ccd detector (1) is made to receive the picture point of the fiber optic point source (4) of position, different measured point, rotate precise rotating platform (5), make the picture point of the fiber optic point source (4) of position, described different measured point be zero at the miss distance of ccd detector (1) horizontal direction, and record the miss distance of ccd detector (1) vertical direction;
Step 2, data processing is carried out to the miss distance of record ccd detector (1) vertical direction described in step one, obtain the error of measured circle anchor ring (8) flatness, realize the detection of the flatness to measured circle anchor ring.
4. the method for measurement large diameter circle facial plane degree according to claim 3, it is characterized in that, the detailed process obtaining flatness error in step 2 is: first measurement miss distance data are launched into Fourier series and carry out frequency analysis, secondly, removal constant term and once item harmonic wave, again, carry out least square fitting, finally calculate flatness error.
5. the method for the measurement large diameter circle facial plane degree according to claim 3 or 4, it is characterized in that, before step, also comprise the adjustment to interior focusing light pipe, measuring staff (7) is vertically placed on measured circle anchor ring (8), ccd detector (1) receives the picture point of fiber optic point source (4), and the position of adjustment focusing lens group (3), makes picture point hot spot minimum; To the adjustment of precise rotating platform (5) attitude, the position of mobile measuring staff (7), ccd detector (1) is made to receive the picture point of fiber optic point source (4) at the equally spaced diverse location of the upper mark of measured circle anchor ring (8), adjustment leveling turntable mechanism (6), makes picture point equal at the miss distance of ccd detector (1) vertical direction.
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