CN108318451A - A kind of solid material refractive index measuring instrument from motion tracking reflection light - Google Patents
A kind of solid material refractive index measuring instrument from motion tracking reflection light Download PDFInfo
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- CN108318451A CN108318451A CN201810424804.2A CN201810424804A CN108318451A CN 108318451 A CN108318451 A CN 108318451A CN 201810424804 A CN201810424804 A CN 201810424804A CN 108318451 A CN108318451 A CN 108318451A
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- refractive index
- solid material
- measuring instrument
- pivoted arm
- reflection light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
- G09B23/00—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes
- G09B23/06—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics
- G09B23/22—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics for optics
Abstract
A kind of solid material refractive index measuring instrument from motion tracking reflection light belongs to the fields of measurement of Brewster's law in wave optics.The pedestal of the instrument is a disk, is respectively used to control the direction of input path and reflected light path there are two the pivoted arm that can rotate around the axis on disk.The instrument be a kind of linkage of light path, quantitative measurment light intensity reflection light autotracker, simplify the measurement operation of Brewster's angle.Reflected light " most dark " point, and the Brewster's angle read using the angle index line of the instrument are found in the way of numeralization display, substitute into formula tan θbIt carries out that determinand refractive index is calculated in=n, accuracy is high.When the instrument is used as teaching demonstration instruments, experimental phenomena is easily observed, and effectively student is helped to understand related physical principle.
Description
Technical field
The invention belongs to refractometry field, more particularly to it is a kind of based on Brewster's law can be from motion tracking
The solid material refractive index measuring instrument of reflection light.
Background technology
Brewster (Brewster) law is pointed out:Natural light on dielectric interface when reflecting and reflecting, ordinary circumstance
Lower reflected light and refraction light are all partial poolarized lights, and only when incidence angle is certain specific angle, reflected light is only linearly polarized light,
Direction of vibration is vertical with the plane of incidence.Known to accordingly when natural light is mapped to refractive index determinand surface with Brewster's angle, reflection
Light beam is linearly polarized light.
Brewster's law is a kind of method for refractometry, and existing a variety of measured using Brewster's law is rolled over
The instrument for penetrating rate detects device (optical screen, sensor etc.) the problem is that when finding reflection light mostly in operating process
The adjustment of position and angle relies on manual alignment, is not easy to synchronize, thus the angle value for reading incident light and reflected light it is not convenient enough,
Fast, intuitively.
Secondly, it in the method for reflection light detection, is usually found with estimation mode at " most dark " by the light of polarizing film
To determine that incidence angle at this time is Brewster's angle.However, by subjective range estimation for an angle of reflected light " most dark "
Determination be extremely difficult, and difference differentiated to " most dark " point between Different Individual, there are larger inclined for tradition range estimation
Difference cannot be satisfied the demand of quantitative determination.
In addition, Brewster's law is important wave optics experimental laws, it is most existing based on Brewster's law
Instrument in the demonstration instrument as teaching experiment, experimental phenomena is not intuitive enough, and observation effect is bad.
Invention content
To overcome the problems, such as that the above apparatus measures are inconvenient, measurement accuracy is inadequate, teaching demonstration is ineffective, the present invention
Provide a kind of linkage of light path, quantitative measurment light intensity the refractive index measuring instrument from motion tracking reflection light, make incidence end light source
The light sent out can be reflected into the polarizing film center of reflection end and continue to travel to sensor and measure all the time, from
And it solves the above problems.
In order to solve the above technical problems, the present invention provides following technical solutions:
A kind of solid material refractive index measuring instrument from motion tracking reflection light, it is characterised in that:The refractive index measuring instrument
Including disc base, first rotating shaft, the second shaft, the first pivoted arm, the second pivoted arm, rectangular parallelepiped sliders, central round bar, determinand folder
Hold device, determinand, light source, photoelectric sensor, digital display system, polarizer, groove, the first sliding rail, the second sliding rail.It is described
The upper surface of disc base indicates angle index line, and the groove is engraved out in inside, there is the direction water extended along groove in the trench
Flat hanging the first sliding rail and the second sliding rail placed and be mutually parallel, first sliding rail and the second sliding rail and disc base phase
Even.The rectangular parallelepiped sliders, central round bar, determinand clamping device are connected as one.The rectangular parallelepiped sliders have at two
Two-way perforative circular hole, the rectangular parallelepiped sliders are by the first sliding rail and the second sliding rail from being passed through in circular hole from described two.First pivoted arm
One end be connected with disc base by first rotating shaft, one end of the second pivoted arm is connected by the second shaft with disc base.
The light source is fixed on the upper end of first rotating shaft, and the photoelectric sensor and the polarizer are fixed on the second shaft
Upper end, the photoelectric sensor connect with the digital display system.The side of the center round bar has to be recessed at two, respectively
For being placed in the central paddle-tumble of first pivoted arm and the second pivoted arm, make the first pivoted arm and the second pivoted arm with the central round bar
The change of position rotates in the plane parallel with the disc base around respective shaft.Make incident light and reflected light with this
Synchronously rotated centered on first rotating shaft and the second shaft respectively by identical angular speed, opposite clockwise.Determinand
The position setting of clamping device ensure that subpoint of the point of incident light irradiation on central cylindrical horizontal direction section corresponds to
The center of circle in central round bar section.Since the propagation of light follows reflection law, can be summarized as " three lines are coplanar, two lines separation, incidence angle
Equal to angle of reflection ", so said mechanism principle is realized to reflected light ray from motion tracking.
According to Brewster's law, there is formula:Tan θ b=n (made to simplify, often by air refraction in engineering by this formula
It is approximately 1 to acquire the relative index of refraction of other media.If bigger required precision need to be met when calculating, formula tan θ b are used
=n/n0, wherein n0 be air refraction, at 20 degrees Celsius, when 760 millimetress of mercury are high air refraction be 1.00027), wherein
N is determinand refractive index, and θ b are Brewster's angle.It is determined by the minimum value of the light intensity of the digital display system feedback of reflection end
After Brewster's angle, determinand refractive index can easily be calculated by substituting into formula, or directly be tabled look-up come really according to Brewster's angle
Determine which kind of material determinand is.
When the present invention is implemented, the incident light that light source generates is made to be irradiated on the determinand along first pivoted arm, due to
The presence of the first sliding rail and the second sliding rail that is horizontal and being mutually parallel, the tested surface of the determinand remain on the move with
The direction that groove extends is vertical.Reflection light enters back into the photoelectric sensor automatically by the polarizer.Then it adjusts
The center position of the round bar in the groove, this operation can cause incidence angle and refraction angle synchronize change, until institute
When stating digital display system and showing that numerical value is minimum value, determine that incidence angle at this time is the Brewster's angle of determinand.From described
On the upper surface target angle index of disc base, the angle index value on corresponding disc base 1 is read.The refractive index is surveyed
Amount instrument should under more dark environment operation with eliminate or reduce the ambient light interferences of the data that photoelectric sensor is measured at
Point.
Preferably, in the present invention, the determinand is transparent solid material or opaque solid material.
Preferably, in the present invention, the light source uses sodium lamp, and the sodium lamp is monochromatic source.
Preferably, in the present invention, the polarization direction of the polarizer is parallel to light path plane, and reflected light path is made to hang down
Straight through polarizer working face, that is, filter out the light of all polarization directions other than P waves.
Preferably, in the present invention, the photoelectric sensor is CCD camera, for detecting light intensity.
Preferably, in the present invention, the digital display system is collection data receiver, data processing, numerical value display function
The SCM system being integrated.
Further, preferably, in the present invention, the control chip of the SCM system is STC89C52 chips, and
Internal operating program with suitable required peripheral components and corresponding function, makes the digital display system meet data and connects
The functional requirement that receipts, data processing, numerical value are shown.
Beneficial effects of the present invention:
(1) the present invention provides a kind of linkage of light path, the reflection light autotracker of quantitative measurment light intensity, structure letters
It is single, simple operation.A large amount of work for finding reflected light travels direction are eliminated, the measurement operation of Brewster's angle is simplified.Profit
Reflected light " most dark " point is found with the mode of numeralization display and improves accuracy, is read with the angle index line of the instrument
Number is more acurrate, and calculates to obtain determinand refractive index with the Brewster's angle read.
(2) Brewster's law is one of the most important theories of kymatology about light in related discipline education content, due to
The present invention the manufacturing it is relatively easy, cheap, and the feedback of shirtsleeve operation and numeralization make student be more easy to observation phenomenon,
Understand principle, demonstrating effect is good, therefore the present invention also serves as teaching demonstration instruments and is used to help student and understands physical theory.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of the present invention;
Fig. 2 is the light path schematic diagram of the present invention;
Fig. 3 is the structural schematic diagram of the present invention;
Fig. 4 is the partial schematic diagram of the trench profile of the present invention;
Fig. 5 is the partial schematic diagram of the central round bar of the present invention;
Fig. 6 is the partial schematic diagram of the disc base of the present invention.
In figure, 1. disc bases, 2. first rotating shafts, 3. second shafts, 4. first pivoted arms, 5. second pivoted arms, 6. cuboids
Sliding block, 7. central round bars, 8. determinand clamping devices, 9. determinands, 10. light sources, 11. photoelectric sensors, 12. number display systems
System, 13. polarizers, 14. grooves, 15. first sliding rails, 16. second sliding rails.
Specific implementation mode
Invention is further described in detail with reference to the accompanying drawings and examples, this hair is described in detail below with reference to attached drawing
Bright exemplary embodiment, but it is not limited to the scope of the present invention.Identical sign flag indicates that function is identical in attached drawing
Device, although the various aspects of embodiment are shown in the accompanying drawings, unless otherwise indicated, it is not necessary to attached drawing drawn to scale.
Word " exemplary " mentioned above means " being used as example ".The embodiment of here as " exemplary " should not necessarily be construed as being better than or
It is better than other embodiment.
As shown in Figure 1, Figure 3, it is the stereochemical structure and planar structure schematic diagram of a kind of embodiment of the invention.In the instrument
The groove 14 is engraved out in the inside of the disc base 1 of device, the ruler of the extending direction of the groove 14 in the disc base 1
The very little diameter less than disc base 1.Have in the groove 14 along the horizontal hanging placement in the direction that groove 14 extends and mutually puts down
Capable the first sliding rail 15 and the second sliding rail 16, first sliding rail, 15 and second sliding rail 16 are connected with disc base 1.It is described rectangular
Body sliding block 6, central round bar 7, determinand clamping device 8 are connected as one.The rectangular parallelepiped sliders 6 have two-way at two run through
Circular hole, the rectangular parallelepiped sliders 6 are in the groove 14, and are justified from described two by the first sliding rail 15 and the second sliding rail 16
It is passed through in hole so that the entirety that rectangular parallelepiped sliders 6, central round bar 7, determinand clamping device 8 are connected as can only be simultaneously described
It is slided along the first sliding rail 15 and the second sliding rail 16 in groove 14.Shaft 2 and shaft 3 are fixed on the disk 1, can be around respective axle center
It is freely rotated.
Referring again to Fig. 1, Fig. 3, in the outside of the disc base 1 of the instrument, 1 upper surface of the disc base indicates this
The angle index of instrument.One end of first pivoted arm 4 is connected by first rotating shaft 2 with disc base 1, and the one of the second pivoted arm 5
End is connected by the second shaft 3 with disc base 1.The label of the side of first pivoted arm has a black dotted lines, the black
Dotted line is meant that as just label, the label:The pivoted arm 4 marks the outermost edge of side as angle with black dotted lines
One side, for coordinating the angle index line to determine the incidence angle number of degrees.It can be using the angle value that this mode is read as incidence angle
The reason of mathematic(al) treatment it is as follows:It is parallel that incident ray marks the outermost edge of side with the pivoted arm 4 with black dotted lines
, the outermost edge with black dotted lines label side of the pivoted arm 4 is with the Central Line of the groove 14 (in the groove 14
Centre line is parallel to the normal of light path) angle that constitutes of the angle that constitutes and the Central Line of incident ray and the groove 14 alternate interior angle each other
And it is equal.Because of Central Line (Central Line of the groove 14 is parallel to the normal of light path) structure of incident ray and the groove 14
At angle be incidence angle, so the pivoted arm 4 with black dotted lines mark side outermost edge and the groove 14 center
The angle that line is constituted is that incidence angle can also be used as incidence angle.
The paddle-tumble of first pivoted arm, 4 and second pivoted arm 5 respectively has a central paddle-tumble, the side of the center round bar 7 to have
It is recessed at two, for being respectively implanted in the paddle-tumble of first pivoted arm, 4 and second pivoted arm 5, makes the first pivoted arm 4 and the second pivoted arm 5
With the change of 7 position of the central round bar in the rotation in surface parallel with the disc base 1.With this make incident light with it is anti-
It is rotated centered on first rotating shaft 2 and the second shaft 3 respectively by identical angular speed, opposite clockwise with penetrating phototiming.
Since the propagation of light follows reflection law, i.e., incidence angle is equal to angle of reflection, thus this instrument realize to reflected light luminous point from
Motion tracking.First rotating shaft 2 on the disc base 1 and the second shaft 3, the side that the line of centres extends about the groove 14
It is equal at a distance from groove 14 to vertical and first rotating shaft 2 and the second shaft 3.5 top of first pivoted arm 4 and the second pivoted arm
Respectively there is a round platform, the surface area of two round platforms is bigger than first rotating shaft 2 and 3 area of section of the second shaft, first rotating shaft 2 and
Two shafts, 3 area of section is equal, and the round platform surface area at 5 top of round platform and the second pivoted arm at 4 top of the first pivoted arm is equal, described
Two two, round platforms are for placing simultaneously immobilising device.
As shown in Figure 1, Figure 2, it is the light path schematic diagram of the present invention, the round platform of incidence end, 4 top of the first pivoted arm is used for fixed light source
10, the light source is preferably sodium lamp, so that the light that the light source 10 is sent out is parallel to the first pivoted arm of incidence end 4, and directive is to be measured
Object 9, the determinand are transparent solid material or opaque solid material.Reflection end, the round platform at 5 top of the second pivoted arm is for solid
Determine photoelectric sensor 11, the photoelectric sensor 11 is preferably CCD camera, the photoelectric sensor 11 and digital display system
12 be connected, digital display system 12 be integrate data receiver, data processing, numerical value display function SCM system.Into
One step, the control chip of the SCM system is preferably STC89C52 chips, and with peripheral components needed for suitable and
The internal operating program of corresponding function makes the function that the digital display system meets data receiver, data processing, numerical value are shown
It is required that.The polarizer 13 is clamped on the second pivoted arm 5 of reflection end, the polarization direction of the polarizer 13 be parallel to it is described
The parallel plane of disc base 1, the light for filtering out all polarization directions other than P waves.Determinand 9, polarizer 13, photoelectric sensing
Device 11 is on same optical axis line.The natural light that light source 10 is sent out is usually partial poolarized light after the surface reflection of determinand 9,
But when incident light meets Brewster's law, corresponding reflected light is linearly polarized light, and direction of vibration is perpendicular to disc base
Place plane.The light intensity detected after the line polarisation is parallel to polarizer 13 of light path by polarization direction is minimum, reason
It is zero by this upper value, and still has light in reality and may be such that light intensity is more than zero at this time through or because factors such as ambient lights.
But still light intensity minimum value, i.e. Brewster's angle can be found out by digital display system.In order to eliminate or reduce photoelectric sensor
The ambient light interference ingredient for the data measured, the refractive index measuring instrument are operated under more dark environment.
The operating procedure of the present embodiment is:By touching position of the central round bar 7 in the groove 14 back and forth, come
The above-mentioned incident light position for making digital display system display brightness minimum value is found, then (i.e. with the downward visual angle of plumb line
Bend to underface) it is marked on disc base 1 corresponding to first outermost edge of the pivoted arm 4 with black dotted lines side of observation
Dedicated angle degree line reads the incidence angle of its value i.e. at this time.Then formula tan θ b=n (or tan θ b=n/n0) are substituted into count
Calculate refractive index.Or it is directly tabled look-up according to Brewster's angle to determine which kind of material determinand is.
If Fig. 3, Fig. 4, Fig. 4 are the part section A of disc base 1 in Fig. 3, section is shown with arrow in figure 3
Direction (and being not drawn into the sectional view of direction whole).Consider that about 14 groove passes through for dust-proof, anti-foreign body obstruction
Logical, the space of middle and upper part perforation is smaller.The rectangular parallelepiped sliders 6 can not detach from groove 14 and can only be in the first sliding rail 15
It is slided on the second sliding rail 16.Since rectangular parallelepiped sliders 6 and 15 and second sliding rail of the first sliding rail, 16 contact surfaces are very small, because
, when pushing the entirety that rectangular parallelepiped sliders 6, central round bar 7,8 three of determinand clamping device are linked as, force of sliding friction is smaller for this.
It is worth noting that:What rectangular parallelepiped sliders 6, central round bar 7,8 three of determinand clamping device were linked as in order to prevent is whole on edge
Shake when first sliding rail, 15 and second sliding rail 16 slides and cause experimental error, when experimental implementation, should touch the center circle
Bar 7 makes its sliding, and cannot upwards carry to play it and be slided on first sliding rail, 15 and second sliding rail 16.
Preferably, the disc base 1 is metal material, and relatively smooth hard, is unlikely to deform.
Preferably, the rectangular parallelepiped sliders 6 are metal material, and relatively smooth, lightweight.
Preferably, 15 and second sliding rail of the first sliding rail, 16 material be metal material, and it is relatively smooth, hard, be not easy
Deformation.
Such as Fig. 3, Fig. 5, face of the determinand 9 for refractometry is clamped perpendicular to the direction that groove 14 extends, and makes
Subpoint of the point of incident light irradiation on 7 horizontal direction section of central cylindrical corresponds to the center of circle in 7 section of central round bar.Due to
The first sliding rail 15 and the second sliding rail 16 that the rectangular parallelepiped sliders 6 being arranged in the groove 14 are fixed in disc base 1 pass through
It wears, so the clamper 8 cannot be freely rotated, ensure that the direction of tested surface is constant always.The rectangular parallelepiped sliders 6 it is upper
The central round bar 7 of portion's connection, the clamping device 8 of the upper end connection detected materials of central round bar 7, while the height of the clamping device 8
It spends adjustable.Center 7 side of round bar has two small grooves, two small groove to be placed in the central paddle-tumble of two pivoted arms,
To make its sliding stability, reliable, 4 to the second pivoted arm of the first pivoted arm in the first pivoted arm 4 and the second pivoted arm 5 with central paddle-tumble
5 is low, i.e. the first pivoted arm 4, closer to the upper surface of the disc base 1, thus can alternately make compared to the second pivoted arm 5
Centre round bar 7 is in respective paddle-tumble.The next error of the angle index sensing tape on disc base 1 is estimated in order to reduce, first
Pivoted arm 4 is close to disc base 1.When pushing central round bar 7, the rectangular parallelepiped sliders 6 of bar lower part and the determinand clamping on bar top
Device 8 integrally slides in groove 14 along the first sliding rail 15 and the second sliding rail 16, and This move makes the first pivoted arm 4 and the
Two pivoted arms 5 are also with bar around respective shaft, i.e. first rotating shaft 2 and the rotation of the second shaft 3.The known to the congruent condition of triangle
The central paddle-tumble of one pivoted arm 4 and the second pivoted arm 5 is equal with angle value folded by 14 Central Line of groove, and the propagation of light follows reflection and determines
Rule, i.e. incidence angle are equal to angle of reflection, so the second pivoted arm of reflection end 5 can automatically real-time tracking reflection light.
Such as Fig. 6, refractometry range of the invention is by the spacing between first rotating shaft 2 and the second shaft 3, groove 14
The factors such as length determine, can theoretically calculate the present embodiment minimum can survey refractive index and be less than 1, theoretical maximum refractive index is just
It is infinite.But in applying, from the characteristic distributions of the angle line on disc base 1:Determinand refractive index is bigger, measurement accuracy
It is lower.And the refractive index of most materials is between 1 to 3 in nature.As a kind of possible embodiment, the disc base
1 a diameter of 0.36 meter.The dial high scale line of drafting for scale, disc base 1 is drawn since 45 degree, because of refraction
The ratio of the speed of rate light in a vacuum and speed in the medium, group velocity are always less than the light velocity;The scale of disc base 1
Disk high scale line maximum value is 80 degree, and the Refractive Index of Material corresponding to 80 degree of scales is about 5.67.In conclusion the present invention is available
In the refractive index for measuring the solid material that refractive index is 1 to 5.67, measurement range is wider.In addition, being rolled over to common materials to improve
Penetrate rate measurement precision, 45 to 60 degree in divide minimum scale be 0.5 degree (it is clear for attached drawing, only shown in schematic diagram Fig. 6
Integer value angle line), and the minimum scale divided in 60 to 80 degree is 1 degree.
The present invention provides a kind of can be reflected from the solid material of motion tracking reflection light based on Brewster's law
The technical solution of the method for rate measuring instrument, specific implementation has very much, and the above is only the preferred embodiment of the present invention, should be referred to
Go out, for the common staff of the art, without departing from the technical principles of the invention, if can also make
Dry to improve and replace, these, which improve and replace, also should be regarded as protection scope of the present invention.
In the description of the present embodiment, it should be noted that be:Each component part being not known in the embodiment of the present invention is available
The prior art is realized.
Claims (8)
1. a kind of solid material refractive index measuring instrument from motion tracking reflection light, it is characterised in that:The refractive index measuring instrument packet
Disc base (1) is included, the disc base (1) is equipped with first rotating shaft (2) and the second shaft (3), and the first rotating shaft (2) will
One end of first pivoted arm (4) is fixed on the disk (1), and one end of the second pivoted arm (5) is fixed on described by the second shaft (3)
On disk (1), rectangular parallelepiped sliders (6), central round bar (7), determinand clamping device (8) are connected as one, determinand (9)
It is clamped on the determinand clamping device (8).Light source (10) is arranged on first pivoted arm (4), photoelectric sensor
(11) it is arranged on second pivoted arm (5) with polarizer (13).The photoelectric sensor (11) and digital display system (12)
It is connected.It is equipped with groove (14) in the disc base (1), the first sliding rail (15) and the second sliding rail (16) are provided in groove.
2. a kind of solid material refractive index measuring instrument from motion tracking reflection light according to claim 1, feature exist
In:It is carved with angle index line in disc base (1) upper surface.
3. a kind of solid material refractive index measuring instrument from motion tracking reflection light according to claim 1, feature exist
In:First pivoted arm (4) and the second pivoted arm (5) have respectively engraved a central paddle-tumble.
4. a kind of solid material refractive index measuring instrument from motion tracking reflection light according to claim 1, feature exist
In:The determinand (9) is transparent solid material or opaque solid material.
5. a kind of solid material refractive index measuring instrument from motion tracking reflection light according to claim 1, feature exist
In:The light source (10) is sodium lamp.
6. a kind of solid material refractive index measuring instrument from motion tracking reflection light according to claim 1, feature exist
In:The photoelectric sensor (12) is CCD camera.
7. a kind of solid material refractive index measuring instrument from motion tracking reflection light according to claim 1, feature exist
In:Polarizer (13) polarization direction is parallel with light path plane.
8. a kind of solid material refractive index measuring instrument from motion tracking reflection light according to claim 1, feature exist
In:First sliding rail (15) is arranged in parallel with second sliding rail (16).
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CN114295555A (en) * | 2021-12-21 | 2022-04-08 | 西安应用光学研究所 | Method for improving measurement precision of ellipsometer |
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