CN1740742A - Grating type photoelectric autocollimator - Google Patents
Grating type photoelectric autocollimator Download PDFInfo
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- CN1740742A CN1740742A CN 200510086412 CN200510086412A CN1740742A CN 1740742 A CN1740742 A CN 1740742A CN 200510086412 CN200510086412 CN 200510086412 CN 200510086412 A CN200510086412 A CN 200510086412A CN 1740742 A CN1740742 A CN 1740742A
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Abstract
The utility model provides a grating formula photoelectricity autocollimator, scale grating (2) and instruction grating (6) conjugate, on the focal plane of collimating objective (4) was arranged in to scale grating (2), on another focal plane of collimating objective (4) through spectroscope (3) beam splitting was arranged in to instruction grating (6), light that laser source (1) sent lighted scale grating (2), light is in the department of instructing grating (6) after collimating objective (4) collimation and plane mirror (5) reflection. The image of the scale grating (2) and the indicating grating (6) form a grating pair, and Moire fringes generated by periodic change of the grating pair reflect small-angle variation of a measured object. The invention can realize static and dynamic angle test, has large measuring range and high resolution, and can be widely applied to the detection of industrial production process, the verification of angle measuring instruments and the detection of high-frequency angle shaking.
Description
Technical field
The present invention relates to a kind of angular position detection device, particularly a kind of optical grating photoelectric self-collimator.
Background technology
In the precision measurement field of measuring techniques, autocollimator is one of instrument most widely used, maximum in the small angle measurement.Because it has higher accuracy and measurement resolution, and simple in structure, cost is lower, thereby is widely used in the detection of industrial processes and the calibrating of angular measure utensil.As: play an important role at measurement of angle, the dull and stereotyped measurement of planeness, the aspect autocollimators such as straight line degree measurement that measurement, guide rail are rocked in an angle that is.
High-precision photoelectric auto-collimator is owing to its precision height, and the advantage of automatic reading is becoming the main flow of autocollimator development.At present, the used photodetector of high precision photoelectric autocollimator mainly contains: Position-Sensitive Detector PSD, 4 quadrant detector, CCD etc.But be subjected to the restriction of the size and the electronic fine-grained figure place of detector receiving plane, these photoelectric auto-collimators are difficult to accomplish that existing very high resolving power has very big measurement range and kinetic measurement performance simultaneously again.Thereby it in use has been subjected to many restrictions.
Summary of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, provide a kind of quiet kinetic measurement that is applicable to, the optical grating photoelectric self-collimator that resolving power height and measurement range are big.
Technical solution of the present invention: optical grating photoelectric self-collimator, its characteristics are: a kind of optical grating photoelectric self-collimator, it is characterized in that: include LASER Light Source (1), scale grating (2), spectroscope (3), collimator objective (4), plane mirror (5), indication grating (6), photoelectric apparatus (7), scale grating (2) and indication grating (6) conjugation, scale grating (2) places on the focal plane of object lens, indication grating (6) place object lens on another focal plane after spectroscope (3) beam splitting, the bright scale grating of the illumination that LASER Light Source (1) is sent (2), light collimates and image in indication grating (6) after plane mirror (5) reflection through collimator objective (4) and locates, the picture of scale grating (2) forms optical grating pair with indication grating (6), reflects the small angle variation amount of measured object by the cyclical variation of this optical grating pair.
Description of drawings
Fig. 1 is a principle schematic of the present invention;
Fig. 2 is the signal output map of a photoelectric apparatus of the present invention;
Fig. 3 is the signal output map of another photoelectric apparatus of the present invention.
Embodiment
As shown in Figure 1, include LASER Light Source 1, scale grating 2, spectroscope 3, collimator objective 4, plane mirror 5, indication grating 6, photoelectric apparatus 7.Scale grating 2 and indication grating 6 are all on the focal plane of collimator objective 4.The bright scale grating 2 of illumination from LASER Light Source 1 is sent shines on the plane mirror 5 behind collimator objective 4 collimations again.Light through plane mirror 5 reflected backs converges at indication grating 6 places through spectroscope 3 again.Therefore, the picture of scale grating 2 is superimposed with indication grating 6 and forms Moire fringe.When plane mirror 5 rotates a low-angle, optical grating pair relatively moves and produces the light signal of light and shade alternate, photovalve 7 outputs are with the electric signal of change in optical signal, link to each other with computing machine with the A/D capture card through subsequent process circuit, to be converted to angular metric from the positional information that the optical gate type Moire fringe obtains by computer processing, and show the output angle variable quantity in real time.
Among Fig. 1, LASER Light Source 1 adopts semiconductor laser.It is the long grating of 100 lines/mm that scale grating 2 and indication grating 6 all adopt incisure density.Grating fringe adopts the optical gate type Moire fringe.Photoelectric apparatus 7 adopts 2 photodiodes to compose in parallel, and scale grating 2 and indication grating 6 all are placed on the focal plane of collimator objective 4.
If the focal length of collimator objective 4 is f, the moving distance of scale grating image drift is S, when measured object 5 rotational angle θ, according to the autocollimation principle, has: S=f tan 2 θ.
Make angle measurement in this way, its resolving power depends on the focal distance f of collimator objective 4 and the displacement resolving power of grating; Its measurement range depends on the length of scale grating 2 and the field angle of collimator objective 4.At present, the pattern displacement resolving power is easy to reach 0.1 μ m, if select focal distance f=500mm collimator objective for use, then its resolving power can reach: θ=1/2*arctan (S/f)=0.02 ".The scale grating is easy to accomplish hundreds of mm lengths (corresponding angle can reach tens of degree) at present, so measurement range only is subjected to the restriction of collimator objective field angle, thereby the present invention not only can accomplish high resolution but also can accomplish wide-measuring range.
In addition, because receiving element 7 of the present invention is photodiodes, its dynamic response time is in tens nanoseconds, and postmenstruation, electronic fine-grained and software segmentation was extracted the message processing time of optical grating pair in 1 microsecond, so the present invention can be used for dynamic test.Fig. 2 is the cos signal waveform, and Fig. 3 is the sin signal waveform, and this signal is the signal after the circuit difference is put, and transverse axis is the used time of signal acquisition process, and the longitudinal axis is a signal amplitude.
The present invention can be widely used in quiet dynamic accuracy test, as: the measurement of planeness, the detection of angular displacement sensor dynamic perfromance and the low-angle detection of optical flat cold working part etc. of the measurement of the calibrating of polygon, scrambler and fast mirror dynamic measuring angle error, flat board.
Claims (3)
1, a kind of optical grating photoelectric self-collimator, it is characterized in that: include LASER Light Source (1), scale grating (2), spectroscope (3), collimator objective (4), plane mirror (5), indication grating (6), photoelectric apparatus (7), scale grating (2) and indication grating (6) conjugation, scale grating (2) places on the focal plane of object lens, indication grating (6) place object lens on another focal plane after spectroscope (3) beam splitting, the bright scale grating of the illumination that LASER Light Source (1) is sent (2), light collimates and image in indication grating (6) after plane mirror (5) reflection through collimator objective (4) and locates, the picture of scale grating (2) forms optical grating pair with indication grating (6), reflects the small angle variation amount of measured object by the cyclical variation of this optical grating pair.
2, optical grating photoelectric self-collimator according to claim 1 is characterized in that: described scale grating (2) all adopts long grating with indication grating (6).
3, optical grating photoelectric self-collimator according to claim 1 is characterized in that: described photoelectric apparatus (7) is composed in parallel by two photodiodes.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510086412 CN1740742A (en) | 2005-09-13 | 2005-09-13 | Grating type photoelectric autocollimator |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200510086412 CN1740742A (en) | 2005-09-13 | 2005-09-13 | Grating type photoelectric autocollimator |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102298245A (en) * | 2011-09-21 | 2011-12-28 | 中国科学院光电技术研究所 | Aerial camera focusing system |
| CN102865835A (en) * | 2012-09-29 | 2013-01-09 | 中国科学院西安光学精密机械研究所 | Vernier slit type photoelectric autocollimator |
| CN103345100A (en) * | 2013-07-09 | 2013-10-09 | 中国科学院光电技术研究所 | Improved aviation camera focusing system |
| CN103673891A (en) * | 2013-11-21 | 2014-03-26 | 清华大学 | Grating heterodyne interference auto-collimation measuring device |
| CN103702472A (en) * | 2012-09-28 | 2014-04-02 | 北京航天计量测试技术研究所 | Self-adaptive light source for photoelectric automatic-collimation system |
| CN104154884A (en) * | 2014-08-25 | 2014-11-19 | 长春华特光电技术有限公司 | Direct-reading type photoelectric collimation angular instrument with yardstick |
| CN106767542A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of contactless torsion angle measuring system and measuring method |
| CN106932917A (en) * | 2017-05-05 | 2017-07-07 | 西安枭龙科技有限公司 | A kind of optics display module image generation unit rotates method of adjustment and system |
| CN109387161A (en) * | 2018-09-06 | 2019-02-26 | 中国科学院西安光学精密机械研究所 | Auto-collimation system |
-
2005
- 2005-09-13 CN CN 200510086412 patent/CN1740742A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102298245A (en) * | 2011-09-21 | 2011-12-28 | 中国科学院光电技术研究所 | Aerial camera focusing system |
| CN103702472A (en) * | 2012-09-28 | 2014-04-02 | 北京航天计量测试技术研究所 | Self-adaptive light source for photoelectric automatic-collimation system |
| CN102865835B (en) * | 2012-09-29 | 2015-12-23 | 中国科学院西安光学精密机械研究所 | Vernier slit type photoelectric autocollimator |
| CN102865835A (en) * | 2012-09-29 | 2013-01-09 | 中国科学院西安光学精密机械研究所 | Vernier slit type photoelectric autocollimator |
| CN103345100A (en) * | 2013-07-09 | 2013-10-09 | 中国科学院光电技术研究所 | Improved aviation camera focusing system |
| CN103673891A (en) * | 2013-11-21 | 2014-03-26 | 清华大学 | Grating heterodyne interference auto-collimation measuring device |
| CN103673891B (en) * | 2013-11-21 | 2016-05-18 | 清华大学 | A kind of grating difference interference self-collimation measurement device |
| CN104154884A (en) * | 2014-08-25 | 2014-11-19 | 长春华特光电技术有限公司 | Direct-reading type photoelectric collimation angular instrument with yardstick |
| CN106767542A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of contactless torsion angle measuring system and measuring method |
| CN106767542B (en) * | 2016-12-28 | 2019-02-01 | 中国科学院长春光学精密机械与物理研究所 | The contactless torsion angle measuring system of one kind and measurement method |
| CN106932917A (en) * | 2017-05-05 | 2017-07-07 | 西安枭龙科技有限公司 | A kind of optics display module image generation unit rotates method of adjustment and system |
| CN106932917B (en) * | 2017-05-05 | 2023-02-24 | 西安维度视界科技有限公司 | Optical display module image generation unit rotation adjustment method and system |
| CN109387161A (en) * | 2018-09-06 | 2019-02-26 | 中国科学院西安光学精密机械研究所 | Auto-collimation system |
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