CN103673891B - A kind of grating difference interference self-collimation measurement device - Google Patents
A kind of grating difference interference self-collimation measurement device Download PDFInfo
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- CN103673891B CN103673891B CN201310595336.2A CN201310595336A CN103673891B CN 103673891 B CN103673891 B CN 103673891B CN 201310595336 A CN201310595336 A CN 201310595336A CN 103673891 B CN103673891 B CN 103673891B
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Abstract
A kind of grating difference interference self-collimation measurement device, this device mainly comprises two-frequency laser, quarter wave plate, beam splitting system, photo-translating system, polarization spectroscope, speculum and grating. Laser instrument penetrates double-frequency laser by after quarter wave plate, becomes the orthogonal linearly polarized light of two bundles. After entering beam splitting system, be divided into three tunnels, a road enters reference path photo-translating system, and residue two-way enters positive and negative gage beam polarization spectroscope. In the laser that enters polarization spectroscope, its reflection s light reflexes on grating through speculum, and wherein incidence angle is set to the Littrow angle inferior according to the corresponding order of diffraction. When grating is in level and vertical when mobile, the signal that the two-way that optical path photo-translating system detects comprises displacement relevant information, in conjunction with reference light information, can solve grating level and vertical deviation. Because pattern displacement is not depended in Littrow angle setting, therefore apparatus of the present invention can be carried out the large travel displacement of level and vertical deviation measurement.
Description
Technical field
The present invention relates to a kind of grating measuring device, particularly a kind of grating difference interference self-collimation measurement device.
Background technology
Grating is a kind of instrument of measuring as benchmark taking grid line distance. According to the difference that forms Moire fringe principle, can be divided intoGeometrical grating (amplitude grating) and diffraction grating (phase grating). The grating measuring of micron order and submicron order is to adopt geometrical grating,Grating pitch is 100 μ m to 20 μ m, and much larger than light source optical wavelength, diffraction phenomena can be ignored, when two blocks of gratings move relativelyWhen moving, produce low-frequency beat phenomenon and form Moire fringe, its measuring principle is called image principle. Nano level grating measuring is to adopt to spread outPenetrate grating, grating pitch is 8 μ m or 4 μ m at present, and the width of grid line and light wavelength are very approaching, produces diffraction and interferenceForm Moire fringe, its measuring principle is called principle of interference.
Current many electromechanical equipments require high to plane motion platform kinematic accuracy, this just requires its measuring system can realize the utmost pointHigh-precision displacement measurement. The widely used sensor of high precision displacement fields of measurement mainly comprises laser interferometer and grating at present.Although the advantage such as laser interferometer has that Measurement Resolution is high, certainty of measurement is high and Signal-to-Noise is large, because it is to the environment utmost pointFor sensitivity, therefore it requires very harsh and debugs very difficult measurement environment. Grating exactly has very good in this pointCharacteristic, it is insensitive and duplicate measurements precision is high to environment, therefore in motion platform ultraprecise displacement measurement, has veryHuge application potential.
Current many research institutions have carried out a series of research for this. Korea S scholar Jong-AhhKim is at research paper“Six-degree-of-freedomdisplacementmeasurementsystemusingadiffractiongrating,ReviewofScientificInstruments, Vol.71, No.8,2000 " in proposed one and utilize diffraction grating and PSD to carry out motion platformThe scheme of 6-DOF displacement measurement, but because the certainty of measurement of PSD is lower, thereby its final mean annual increment movement measurement cannot realize very high-precisionDegree. Japanese scholars WeiGao is at research paper " Asurfacemotor-drivenplanarmotionstageintegratedwithanXYθZSurfaceencoderforprecisionpositioning, PrecisionEngineering28 (2004) 329～337 " middle propositionA kind of measurement scheme of utilizing two-dimension grating to carry out the displacement of motion platform planar three freedom. On this basis, this authorAt research paper " Precisionpositioningofafivedegree-of-freedomplanarmotion stage, Mechatronics15 (2005) 969～987 " in, by newly-increased angular transducer, a kind of five degree of freedom displacement measurement scheme has been proposed. Above plan plotIngenious, but be limited to grating pitch and sensor accuracy of detection, can only reach resolution ratio and the submicron order certainty of measurement of tens nanometers.The top ASML of manufacturer of international litho machine also actively develops this respect research. Patent US20090061361A1(open day 2010On September 28), US007102729B2(open day on September 5th, 2006), US00748312B2(open day 2009On January 27, in) a kind of combination metering system of diffraction grating+height sensor that utilizes is disclosed for immersed photoetching machine workpieceThe measurement of platform displacement. Horizontal direction displacement adopts grating to measure in conjunction with read head; Height sensor generally selects current vortex to passSensor, capacitance sensor or laser interferometer. The use of multiple sensors brings system complex, causes certainty of measurement to decline.
Summary of the invention
Consider the defect that above scheme method exists, the present invention proposes a kind of grating difference interference self-collimation measurement device. This dressPut and can realize resolution ratio and the certainty of measurement that Subnano-class is even higher, and can measure that long stroke water prosposition moves and larger simultaneouslyScope vertical deviation. This device can effectively overcome the laser interferometer measurement system defect such as larger affected by environment, at ultrapreciseMotion platform fields of measurement has huge applications prospect.
Technical scheme of the present invention is as follows:
A kind of grating difference interference self-collimation measurement device, comprises laser instrument, quarter wave plate, beam splitting system, the conversion of reference arm photoelectricitySystem, negative m level gage beam polarization spectroscope, negative m level gage beam the first quarter wave plate, negative m level gage beam the first speculum,Negative m level gage beam the second quarter wave plate, negative m level gage beam the second speculum, positive m level gage beam polarization spectroscope, positive mLevel gage beam the first quarter wave plate, positive m level gage beam the first speculum, positive m level gage beam the second quarter wave plate, positive m level are surveyedAmount arm the second speculum, grating, negative m level gage beam photo-translating system and positive m level gage beam photo-translating system; Wherein mFor positive integer, and the maximum of m is determined by the maximum Littrow angle of grating;
It is characterized in that: the light beam of a branch of left-handed and right-circularly polarized light that contains two different frequencies of laser emitting, described bagLight beam containing two circularly polarized lights comprises two orthogonal linearly polarized lights through becoming after quarter wave plate. Then, described bagAfter beam splitting system, be divided into reference light, negative m level measurement light and positive m level containing the light beam of two linearly polarized lights and measure Guang San road light,All comprise two identical orthogonal linearly polarized lights; Reference light enters reference arm light power conversion system, and another two-way enters respectivelyNegative m level gage beam polarization spectroscope and positive m level gage beam polarization spectroscope;
Negative m level gage beam polarization spectroscope is measured light by negative m level and is divided into a branch of reflection s light and a branch of transmission p light that frequency is different;This reflection s light is first through negative m level gage beam the first quarter wave plate, then after negative m level gage beam the first speculum reflection againGet back to negative m level gage beam polarization spectroscope through negative m level gage beam the first quarter wave plate; Described negative m level gage beam polarization spectroThe transmission p light of mirror via negative m level gage beam the second quarter wave plate and negative m level gage beam the second speculum after to bear m level auto-collimationAngle is incided on grating, returns negative m level gage beam the second speculum by optical grating reflection, then by after its reflection through negative m level gage beamThe second quarter wave plate is got back to negative m level gage beam polarization spectroscope; At polarization light-dividing surface place, stack is combined into light beam to two-beam, entersNegative m level gage beam photo-translating system;
Positive m level gage beam polarization spectroscope is measured light by positive m level and is divided into a branch of reflection s light and a branch of transmission p light that frequency is different;This reflection s light first passes through positive m level gage beam the first quarter wave plate, then after positive m level gage beam the first speculum reflection againGet back to positive m level gage beam polarization spectroscope through positive m level gage beam the first quarter wave plate; Described positive m level gage beam polarization spectroThe transmission p light of mirror via positive m level gage beam the second quarter wave plate and positive m level gage beam the second speculum after with positive m level auto-collimationAngle is incided on grating, returns positive m level gage beam the second speculum by optical grating reflection, then by its reflection after through positive m level gage beamThe second quarter wave plate is got back to positive m level gage beam polarization spectroscope; At polarization light-dividing surface place, stack is combined into light beam to two-beam, entersPositive m level gage beam photo-translating system;
When grating x to z when mobile, by negative m level gage beam photo-translating system and just m level gage beam opto-electronic conversion beIn the two paths of signals that detects of system, comprise respectively different x to displacement and z to displacement information, in conjunction with reference arm light power conversion systemThe reference light information detecting, the x that can solve grating to z to shift value.
Beam splitting system of the present invention has following several scheme:
The first: beam splitting system is by forming with reference to spectroscope and measurement spectroscope; Describedly after quarter wave plate, comprise two and mutually hang downThe light beam of rectilinearly polarized light is through with reference to separating a branch of reverberation and through Beam after spectroscope, this reverberation enters reference arm lightPower conversion system; Transmitted light is divided into a branch of reverberation and through Beam after entering and measuring spectroscope, and this reverberation enters negative m levelGage beam polarization spectroscope, transmitted light enters positive m level gage beam polarization spectroscope.
The second: beam splitting system is by reference arm output optical fibre, negative m level gage beam output optical fibre and positive m level gage beam output optical fibreComposition; Described reference arm output optical fibre is input to reference arm photoelectricity conversion system by reference to arm output optical fibre interface with reference to optical signalSystem, negative m level gage beam output optical fibre will be born m level measurement light by negative m level gage beam output optical fibre interface and be input to negative m levelGage beam polarization spectroscope, positive m level gage beam output optical fibre is measured positive m level by positive m level gage beam output optical fibre interfaceLight is input to positive m level gage beam polarization spectroscope.
The third: beam splitting system is by forming with reference to double-frequency laser generator light splitting part, measurement double-frequency laser generator light splitting part;Described with reference to double-frequency laser generator light splitting part comprise with reference to double-frequency laser generator light splitting part linear polarizer, with reference to double frequency swashOptical generator light splitting part grating, described measurement double-frequency laser generator light splitting part comprises measures double-frequency laser generator spectrum partPart linear polarizer, measurement double-frequency laser generator light splitting part grating; It is described that after quarter wave plate, to comprise two mutual vertical lines inclined to one sideShake the light beam of light through with reference to being divided into two-beam after double-frequency laser generator light splitting part, a branch of reference arm light power conversion system that enters;Another bundle enters measures double-frequency laser generator light splitting part, is divided into two-beam, enters respectively negative m level gage beam polarization spectroMirror and positive m level gage beam polarization spectroscope.
Technical characterictic of the present invention is also: reference arm light power conversion system is by reference arm analyzer and reference arm light photodetector groupBecome, negative m level optical path photo-translating system is by bearing m level optical path analyzer and negative m level optical path photoelectric detectorComposition, positive m level optical path photo-translating system is by positive m level optical path analyzer and positive m level optical path Photoelectric DetectionDevice composition.
Technical characterictic of the present invention is also: negative m level gage beam the second speculum substitutes by bearing m level gage beam the second right-angle prism;Positive m level gage beam the second speculum is substituted by positive m level gage beam the second right-angle prism.
Technical characterictic of the present invention is also: negative m level gage beam the second speculum is by bearing m level gage beam the second right-angle reflecting prismSubstitute; Positive m level gage beam the second speculum is substituted by positive m level gage beam the second right-angle reflecting prism.
Advantage and the high-lighting effect of a kind of grating difference interference self-collimation measurement device of the present invention are mainly manifested in:
(1) owing to using diffraction grating, therefore can realize the even more high-precision resolution ratio of Ya Na meter and precision, and be subject to external environment shadowSound is little, duplicate measurements precision is higher;
(2) because Littrow angle setting does not depend on that grating level is to displacement, the level of therefore can measuring is to large travel displacement;
(3) owing to having used self-collimation measurement principle, therefore can measure the vertical deviation of larger stroke;
(4) because positive and negative gage beam is independent, therefore this measurement mechanism regulates more convenient.
Brief description of the drawings
Fig. 1 is the structural representation of grating difference interference self-collimation measurement device of the present invention.
Fig. 2 is the measurement mechanism embodiment schematic diagram that the present invention uses the first beam splitting system.
Fig. 3 is the measurement mechanism embodiment schematic diagram that the present invention uses the second beam splitting system.
Fig. 4 is the measurement mechanism embodiment schematic diagram that the present invention uses the third beam splitting system.
Fig. 5 is that the present invention utilizes the measurement mechanism of light path analyzer and photoelectric detector composition photo-translating system to implement schematic diagram.
Fig. 6 is the present invention substitutes negative, positive m level gage beam the second speculum measurement mechanism embodiment schematic diagram with right-angle prism.
Fig. 7 is the present invention substitutes negative, positive m level gage beam the second speculum measurement mechanism embodiment signal with right-angle reflecting prismFigure.
Wherein, 1-laser instrument; 2-1/4 wave plate; 3-beam splitting system; 31-is with reference to spectroscope; 32-measures spectroscope; 33-reference armOutput optical fibre; 33a-reference arm output optical fibre interface; 34-bears m level gage beam output optical fibre; The negative m level gage beam output of 34a-lightFine interface; The positive m level of 35-gage beam output optical fibre; The positive m level of 35a-gage beam output optical fibre interface; 36-sends out with reference to double-frequency laserRaw device light splitting part; 36a-is with reference to double-frequency laser generator light splitting part linear polarizer; 36b-is with reference to the light splitting of double-frequency laser generatorParts grating; 37-measures double-frequency laser generator light splitting part; 37a-measures double-frequency laser generator light splitting part linear polarizer;37b-measures double-frequency laser generator light splitting part grating; 4-reference arm light power conversion system; 41-reference arm analyzer; 42-referenceArm photoelectric detector; 5-bears m level gage beam polarization spectroscope; 6-bears m level gage beam the first quarter wave plate; The negative m level of 7-is measuredArm the first speculum; 8-bears m level gage beam the second quarter wave plate; 9-bears m level gage beam the second speculum; The negative m level of 91-is measuredArm the second right-angle prism; 92-bears m level gage beam the second right-angle reflecting prism; The positive m level of 10-gage beam polarization spectroscope; 11-Positive m level gage beam the first quarter wave plate; The positive m level of 12-gage beam the first speculum; The positive m level of 13-gage beam the second quarter wave plate;The positive m level of 14-gage beam the second speculum; The positive m level of 141-gage beam the second right-angle prism; The positive m level of 142-gage beam second is straightCorner reflection prism; 15-grating; 16-bears m level gage beam photo-translating system; 161-bears m level optical path analyzer; 162-Negative m level optical path photoelectric detector; The positive m level of 17-gage beam photo-translating system; The positive m level of 171-optical path analyzer;The positive m level of 172-optical path photoelectric detector.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiment of the present invention is described further in detail.
With reference to figure 1, Fig. 1 is grating difference interference self-collimation measurement device of the present invention, as shown in Figure 1, and this measurement mechanismComprise laser instrument 1, quarter wave plate 2, beam splitting system 3, reference arm light power conversion system 4, negative m level gage beam polarization spectroscope 5,Negative m level gage beam the first quarter wave plate 6, negative m level gage beam the first speculum 7, negative m level gage beam the second quarter wave plate 8,Negative m level gage beam the second speculum 9, positive m level gage beam polarization spectroscope 10, positive m level gage beam the first quarter wave plate 11,Positive m level gage beam the first speculum 12, positive m level gage beam the second quarter wave plate 13, positive m level gage beam the second speculum 14,Grating 15, negative m level gage beam photo-translating system 16 and positive m level gage beam photo-translating system 17.
The light beam of a branch of left-handed and right-circularly polarized light that contains two different frequencies of laser instrument 1 outgoing, described in to comprise two circles inclined to one sideThe light beam of light of shaking comprises two orthogonal linearly polarized lights through becoming after quarter wave plate 2. Then,, comprise two linesThe light beam of polarised light is divided into reference light after beam splitting system 3, negative m level measures light and positive m level is measured Guang San road light, all comprisesTwo identical orthogonal linearly polarized lights; Reference light enters reference arm light power conversion system 4, and another two-way enters respectively negative mLevel gage beam polarization spectroscope 5 and positive m level gage beam polarization spectroscope 10, wherein m is positive integer, and the maximum of m byThe maximum Littrow angle of grating is determined.
Negative m level gage beam polarization spectroscope 5 is measured light by negative m level and is divided into a branch of reflection s light and a branch of transmission p that frequency is differentLight; This reflection s light is first through negative m level gage beam the first quarter wave plate 6, then through negative m level gage beam the first speculum 7After reflection, get back to negative m level gage beam polarization spectroscope 5 through negative m level gage beam the first quarter wave plate 6 again; Described negative m level is surveyedThe transmission p light of amount arm polarization spectroscope 5 is via negative m level gage beam the second quarter wave plate 8 and negative m level gage beam the second speculumAfter 9, incide on grating 15 to bear m level Littrow angle, be reflected back negative m level gage beam the second speculum 9 by grating 15, thenBy getting back to negative m level gage beam polarization spectroscope 5 through negative m level gage beam the second quarter wave plate 8 after its reflection; Two-beam is partiallyThe light splitting surface place stack of shaking is combined into light beam, enters negative m level gage beam photo-translating system 16.
Positive m level gage beam polarization spectroscope 10 is measured light by positive m level and is divided into a branch of reflection s light and a branch of transmission p that frequency is differentLight; This reflection s light first passes through positive m level gage beam the first quarter wave plate 11, then passes through positive m level gage beam the first speculum 12After reflection, get back to positive m level gage beam polarization spectroscope 10 through positive m level gage beam the first quarter wave plate 11 again; Described positive m levelThe transmission p light of gage beam polarization spectroscope 10 is anti-via positive m level gage beam the second quarter wave plate 13 and positive m level gage beam secondAfter penetrating mirror 14, incide on grating 15 with positive m level Littrow angle, be reflected back positive m level gage beam the second speculum by grating 1514, then by getting back to positive m level gage beam polarization spectroscope 10 through positive m level gage beam the second quarter wave plate 13 after its reflection; TwoAt polarization light-dividing surface place, stack is combined into light beam to Shu Guang, enters positive m level gage beam photo-translating system 17.
When grating 15 x to z when mobile, by negative m level gage beam photo-translating system 16 and m level gage beam photoelectricity justIn the two paths of signals that converting system 17 detects, comprise respectively different x to displacement and z to displacement information, in conjunction with reference arm photoelectricityThe reference light information that converting system 4 detects, the x that can solve grating 15 to z to shift value.
With reference to figure 2, Fig. 2 is the measurement mechanism embodiment schematic diagram that the present invention uses the first beam splitting system, as shown in Figure 2,Beam splitting system 3 is by forming with reference to spectroscope 31 and measurement spectroscope 32; Described after quarter wave plate 2, comprise two mutually verticalThe light beam of linearly polarized light is through with reference to separating a branch of reverberation and through Beam after spectroscope 31, this reverberation enters reference arm lightPower conversion system 4; Transmitted light is divided into a branch of reverberation and through Beam after entering and measuring spectroscope 32, and this reverberation enters negativeM level gage beam polarization spectroscope 5, transmitted light enters positive m level gage beam polarization spectroscope 10.
With reference to figure 3, Fig. 3 is the measurement mechanism embodiment schematic diagram that the present invention uses the second beam splitting system, as shown in Figure 3,Beam splitting system 3 is by reference arm output optical fibre 33, negative m level gage beam output optical fibre 34 and positive m level gage beam output optical fibre 35Composition; Described reference arm output optical fibre 33 is input to reference arm photoelectricity by reference to arm output optical fibre interface 33a with reference to optical signalConverting system 4, negative m level gage beam output optical fibre 34 will be born m level by negative m level gage beam output optical fibre interface 34a and measureLight is input to negative m level gage beam polarization spectroscope 5, and positive m level gage beam output optical fibre 35 is by positive m level gage beam output lightFine interface 35a measures light by positive m level and is input to positive m level gage beam polarization spectroscope 10.
With reference to figure 4, Fig. 4 is the measurement mechanism embodiment schematic diagram that the present invention uses the third beam splitting system, as shown in Figure 4,Beam splitting system 3 is by forming with reference to double-frequency laser generator light splitting part 36, measurement double-frequency laser generator light splitting part 37; InstituteState with reference to double-frequency laser generator light splitting part 36 and comprise with reference to double-frequency laser generator light splitting part linear polarizer 36a, with reference to twoFrequency laser generator light splitting part grating 36b, described measurement double-frequency laser generator light splitting part 37 comprises that measuring double-frequency laser sends outRaw device light splitting part linear polarizer 37a, measurement double-frequency laser generator light splitting part grating 37b; Described after quarter wave plate 2 bagContaining the light beam of two mutual perpendicular linear polarization light through with reference to being divided into two-beam, Yi Shujin after double-frequency laser generator light splitting part 36Enter reference arm light power conversion system 4; Another bundle enters measures double-frequency laser generator light splitting part 37, is divided into two-beam, pointDo not enter negative m level gage beam polarization spectroscope 5 and positive m level gage beam polarization spectroscope 10.
With reference to figure 5, Fig. 5 is that the present invention utilizes the measurement mechanism of light path analyzer and photoelectric detector composition photo-translating system realExecute schematic diagram, as shown in Figure 5, reference arm light power conversion system 4 is by reference arm analyzer 41 and reference arm light photodetector 42Composition, negative m level optical path photo-translating system 16 is by negative m level optical path analyzer 161 and negative m level optical path lightPhotodetector 162 forms, and positive m level optical path photo-translating system 17 is by positive m level optical path analyzer 171 and positive mLevel optical path photoelectric detector 172 forms.
With reference to figure 6, Fig. 6 is that the measurement mechanism that the present invention substitutes negative, positive m level gage beam the second speculum with right-angle prism is implementedIllustrate intention, as shown in Figure 6, negative m level gage beam the second speculum 9 is substituted by negative m level gage beam the second right-angle prism 91;Positive m level gage beam the second speculum 14 is substituted by positive m level gage beam the second right-angle prism 141.
With reference to figure 7, Fig. 7 is the present invention substitutes negative, positive m level gage beam the second speculum measurement mechanism with right-angle reflecting prismEmbodiment schematic diagram, as shown in Figure 7, negative m level gage beam the second speculum 9 is by negative m level gage beam the second right-angle reflecting prism92 substitute; Positive m level gage beam the second speculum 14 is substituted by positive m level gage beam the second right-angle reflecting prism 142.
Embodiment:
Taking m=1 as example, implement device and method of the present invention.
With reference to figure 1, demonstrate the whole measuring process of described grating difference interference self-collimation measurement. Described measurement mechanism comprises laserDevice 1, quarter wave plate 2, beam splitting system 3, reference arm light power conversion system 4, negative 1 grade of gage beam polarization spectroscope 5, negative 1 gradeGage beam the first quarter wave plate 6, negative 1 grade of gage beam first speculum 7, negative 1 grade of gage beam second quarter wave plate 8, negative 1 gradeGage beam the second speculum 9, positive 1 grade of gage beam polarization spectroscope 10, positive 1 grade of gage beam the first quarter wave plate 11, positive 1 gradeGage beam the first speculum 12, positive 1 grade of gage beam the second quarter wave plate 13, positive 1 grade of gage beam the second speculum 14, grating15, negative 1 grade of gage beam photo-translating system 16 and positive 1 grade of gage beam photo-translating system 17;
The light beam of a branch of left-handed and right-circularly polarized light that contains two different frequencies of laser instrument 1 outgoing, described in to comprise two circles inclined to one sideThe light beam of light of shaking comprises two orthogonal linearly polarized lights through becoming after quarter wave plate 2. Then,, comprise two linesThe light beam of polarised light is divided into reference light, negative 1 grade of measurement light and positive 1 grade of measurement Guang San road light after beam splitting system 3, all comprisesTwo identical orthogonal linearly polarized lights; Reference light enters reference arm light power conversion system 4, and another two-way enters respectively negative 1Level gage beam polarization spectroscope 5 and positive 1 grade of gage beam polarization spectroscope 10;
Negative 1 grade of gage beam polarization spectroscope 5 is measured light by negative 1 grade and is divided into a branch of reflection s light and a branch of transmission p that frequency is differentLight; This reflection s light is first through negative 1 grade of gage beam first quarter wave plate 6, then anti-through negative 1 grade of gage beam first speculum 7After penetrating, get back to negative 1 grade of gage beam polarization spectroscope 5 through negative 1 grade of gage beam first quarter wave plate 6 again; Described negative 1 grade of gage beamThe transmission p light of polarization spectroscope 5 is via bearing after 1 grade of gage beam the second quarter wave plate 8 and negative 1 grade of gage beam second speculum 9Incide on grating 15 to bear 1 grade of Littrow angle, be reflected back negative 1 grade of gage beam second speculum 9 by grating 15, then by itAfter reflection, get back to negative 1 grade of gage beam polarization spectroscope 5 through negative 1 grade of gage beam second quarter wave plate 8; Two-beam is at polarization spectroThe stack of face place is combined into light beam, enters negative 1 grade of gage beam photo-translating system 16;
Positive 1 grade of gage beam polarization spectroscope 10 is measured light by positive 1 grade and is divided into a branch of reflection s light and a branch of transmission p that frequency is differentLight; This reflection s light first passes through positive 1 grade of gage beam the first quarter wave plate 11, then passes through positive 1 grade of gage beam the first speculum 12After reflection, get back to positive 1 grade of gage beam polarization spectroscope 10 through positive 1 grade of gage beam the first quarter wave plate 11 again; Described positive 1 grade of surveyThe transmission p light of amount arm polarization spectroscope 10 reflects via positive 1 grade of gage beam the second quarter wave plate 13 and positive 1 grade of gage beam secondAfter mirror 14, incide on grating 15 with positive 1 grade of Littrow angle, be reflected back positive 1 grade of gage beam the second speculum 14 by grating 15,Again by getting back to positive 1 grade of gage beam polarization spectroscope 10 through positive 1 grade of gage beam the second quarter wave plate 13 after its reflection; Two-beam existsThe stack of polarization light-dividing surface place is combined into light beam, enters positive 1 grade of gage beam photo-translating system 17;
When grating 15 x to z when mobile, turned by negative 1 grade of gage beam photo-translating system 16 and positive 1 grade of gage beam photoelectricityChange and in the two paths of signals that system 17 detects, comprise respectively different x to displacement and z to displacement information, turn in conjunction with reference arm photoelectricityChange the reference light information that system 4 detects, the x that can solve grating 15 to z to shift value.
Above-mentioned grating difference interference self-collimation measurement device and method not only can be realized even more high-resolution and precision of Ya Na meter,There is little, the duplicate measurements precision of being affected by the external environment compared with advantages of higher; The level of can measuring is to large travel displacement, meanwhile, due toUse self-collimation measurement principle, therefore can measure the vertical deviation of larger stroke; In addition, because positive and negative gage beam is independent, because ofThis this measurement mechanism regulates more convenient.
Claims (7)
1. a grating difference interference self-collimation measurement device, is characterized in that: this self-collimation measurement device comprises two-frequency laser(1), quarter wave plate (2), beam splitting system (3), reference arm light power conversion system (4), negative m level gage beam polarization spectroscope(5), negative m level gage beam the first quarter wave plate (6), negative m level gage beam the first speculum (7), negative m level gage beam secondQuarter wave plate (8), negative m level gage beam the second speculum (9), positive m level gage beam polarization spectroscope (10), positive m level are surveyedAmount arm the first quarter wave plate (11), positive m level gage beam the first speculum (12), positive m level gage beam the second quarter wave plate (13),Positive m level gage beam the second speculum (14), grating (15), negative m level gage beam photo-translating system (16) and positive m levelGage beam photo-translating system (17), wherein m is positive integer, and the maximum of m is determined by the maximum Littrow angle of grating;
The light beam of a branch of left-handed and right-circularly polarized light that contains two different frequencies of two-frequency laser (1) outgoing, described light beam warpCrossing quarter wave plate (2) becomes the light beam that comprises two mutual perpendicular linear polarization light of polarization state afterwards, then passes through beam splitting system (3)After be divided into reference light, negative m level measures light and positive m level is measured Guang San road light; Reference light enters reference arm light power conversion system (4),Negative m level is measured light and is entered negative m level gage beam polarization spectroscope (5), and positive m level measurement light enters positive m level gage beam polarization and dividesLight microscopic (10);
Negative m level gage beam polarization spectroscope (5) is measured light by negative m level and is divided into a branch of reflection s light that frequency is different and a branch ofPenetrate p light; This reflection s light is first through negative m level gage beam the first quarter wave plate (6), then anti-through negative m level gage beam firstAfter penetrating mirror (7) reflection, get back to negative m level gage beam polarization spectroscope (5) through negative m level gage beam the first quarter wave plate (6) again;The transmission p light of described negative m level gage beam polarization spectroscope (5) is via negative m level gage beam the second quarter wave plate (8) and negative mAfter level gage beam the second speculum (9), incide grating (15) above to bear m level Littrow angle, be reflected back by grating (15)Negative m level gage beam the second speculum (9), then by getting back to negative m through negative m level gage beam the second quarter wave plate (8) after its reflectionLevel gage beam polarization spectroscope (5); At polarization light-dividing surface place, stack is combined into light beam to two-beam, enters negative m level gage beam photoelectricityConverting system (16);
Positive m level gage beam polarization spectroscope (10) is measured light by positive m level and is divided into a branch of reflection s light that frequency is different and a branch ofPenetrate p light; This reflection s light first passes through positive m level gage beam the first quarter wave plate (11), then passes through positive m level gage beam first anti-Penetrate and pass through again positive m level gage beam the first quarter wave plate (11) after mirror (12) reflection and get back to positive m level gage beam polarization spectroscope (10);The transmission p light of described positive m level gage beam polarization spectroscope (10) via positive m level gage beam the second quarter wave plate (13) and justAfter m level gage beam the second speculum (14), incide grating (15) with positive m level Littrow angle upper, reflected by grating (15)Return positive m level gage beam the second speculum (14), then by returning through positive m level gage beam the second quarter wave plate (13) after its reflectionTo positive m level gage beam polarization spectroscope (10); At polarization light-dividing surface place, stack is combined into light beam to two-beam, enters positive m level and surveysAmount arm photo-translating system (17);
When grating (15) x to z when mobile, by negative m level gage beam photo-translating system (16) and just m level measurementIn the two paths of signals that arm photo-translating system (17) detects, comprise respectively different x to displacement and z to displacement information, in conjunction withThe reference light information that reference arm light power conversion system (4) detects, the x that can solve grating to z to shift value.
2. a kind of grating difference interference self-collimation measurement device according to claim 1, is characterized in that: described light splittingSystem (3) is by forming with reference to spectroscope (31) and measurement spectroscope (32); Described light beam comprises after quarter wave plate (2)The light beam of two mutual perpendicular linear polarization light of polarization state is through with reference to separating a branch of reverberation and through Beam after spectroscope (31),This reverberation enters reference arm light power conversion system (4); Transmitted light is divided into a branch of reverberation after entering and measuring spectroscope (32)And through Beam, this reverberation enters negative m level gage beam polarization spectroscope (5), and transmitted light enters positive m level gage beam polarizationSpectroscope (10).
3. a kind of grating difference interference self-collimation measurement device according to claim 1, is characterized in that: described light splittingSystem (3) is by reference arm output optical fibre (33), negative m level gage beam output optical fibre (34) and positive m level gage beam output optical fibre(35) composition; Described reference arm output optical fibre (33) is inputted with reference to optical signal by reference to arm output optical fibre interface (33a)To reference arm light power conversion system (4), negative m level gage beam output optical fibre (34) is by negative m level gage beam output optical fibre interface(34a) will bear m level measurement light and be input to negative m level gage beam polarization spectroscope (5), positive m level gage beam output optical fibre (35)By positive m level gage beam output optical fibre interface (35a), positive m level is measured to light and be input to positive m level gage beam polarization spectroscope (10).
4. a kind of grating difference interference self-collimation measurement device according to claim 1, is characterized in that: described light splittingSystem (3) is by forming with reference to double-frequency laser generator light splitting part (36), measurement double-frequency laser generator light splitting part (37);Described with reference to double-frequency laser generator light splitting part (36) comprise with reference to double-frequency laser generator light splitting part linear polarizer (36a),With reference to double-frequency laser generator light splitting part grating (36b), described measurement double-frequency laser generator light splitting part (37) comprises surveyAmount double-frequency laser generator light splitting part linear polarizer (37a), measurement double-frequency laser generator light splitting part grating (37b); InstituteState the light beam process that comprises two mutual perpendicular linear polarization light after quarter wave plate (2) with reference to double-frequency laser generator light splitting part (36)After be divided into two-beam, a branch of reference arm light power conversion system (4) that enters; Another bundle enters measures double-frequency laser generator spectrum partPart (37), is divided into two-beam, enters respectively negative m level gage beam polarization spectroscope (5) and positive m level gage beam polarization spectroMirror (10).
5. according to a kind of grating difference interference self-collimation measurement device described in the arbitrary claim of claim 1～4, its featureBe: reference arm light power conversion system (4) is made up of reference arm analyzer (41) and reference arm light photodetector (42), negativeM level optical path photo-translating system (16) is by negative m level optical path analyzer (161) and negative m level optical path photoelectricityDetector (162) composition, positive m level optical path photo-translating system (17) is by positive m level optical path analyzer (171)Form with positive m level optical path photoelectric detector (172).
6. according to a kind of grating difference interference self-collimation measurement device described in the arbitrary claim of claim 1～4, its featureBe: negative m level gage beam the second speculum (9) adopts negative m level gage beam the second right-angle prism (91); Positive m level is measuredArm the second speculum (14) adopts positive m level gage beam the second right-angle prism (141).
7. according to a kind of grating difference interference self-collimation measurement device described in the arbitrary claim of claim 1～4, its featureBe: negative m level gage beam the second speculum (9) adopts negative m level gage beam the second right-angle reflecting prism (92); Positive m levelGage beam the second speculum (14) adopts positive m level gage beam the second right-angle reflecting prism (142).
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| CN104048597B (en) * | 2014-06-13 | 2017-06-13 | 中国科学院上海光学精密机械研究所 | Self adaptation common light path grating interferometer and its implementation |
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| CN107462167B (en) * | 2017-08-24 | 2019-11-05 | 中国科学院长春光学精密机械与物理研究所 | The pattern displacement measurement method of long stroke, high-acruracy survey |
| CN107655411B (en) * | 2017-08-24 | 2019-10-15 | 中国科学院长春光学精密机械与物理研究所 | The grating displacement measuring system of long stroke, high-acruracy survey |
| CN107607045B (en) * | 2017-08-24 | 2019-12-13 | 中国科学院长春光学精密机械与物理研究所 | Long-stroke and high-precision displacement measuring system based on diffraction grating |
| CN108225193A (en) * | 2018-03-23 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | Diffraction grating heterodyne system two-dimension displacement measuring system and method |
| CN108775869A (en) * | 2018-03-23 | 2018-11-09 | 中国科学院长春光学精密机械与物理研究所 | Realize the grating displacement measuring system and method that long stroke three-D displacement measures |
| CN110132550B (en) * | 2019-05-16 | 2020-08-18 | 清华大学 | Plane grating calibration system |
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| CN114877811B (en) * | 2022-06-15 | 2023-06-20 | 中国科学院长春光学精密机械与物理研究所 | One-dimensional grating displacement measuring device |
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