CN107462167B - The pattern displacement measurement method of long stroke, high-acruracy survey - Google Patents

The pattern displacement measurement method of long stroke, high-acruracy survey Download PDF

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CN107462167B
CN107462167B CN201710734790.XA CN201710734790A CN107462167B CN 107462167 B CN107462167 B CN 107462167B CN 201710734790 A CN201710734790 A CN 201710734790A CN 107462167 B CN107462167 B CN 107462167B
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light
measurement
grating
polarization splitting
polarization
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CN107462167A (en
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李文昊
吕强
巴音贺希格
宋�莹
刘兆武
王玮
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness

Abstract

The invention discloses a kind of long strokes, the pattern displacement measurement method of high-acruracy survey, include the following steps: that the double-frequency laser of two-frequency laser sending cross-polarization is divided into two bundles light by beam splitter prism and 90 ° of mirrors of turning back, and being incident on two polarization splitting prisms respectively by two polarization splitting prism beam splitting is P light and S light;The P light and S light become right-circularly polarized light and left circularly polarized light after four quarter-wave plates;Dextrorotation and left circularly polarized light after the reflection of two plane mirrors, are incident on measurement grating respectively with Littrow angle;It is mobile to measure grating, carries the diffraction light of displacement information by backtracking, respectively after quarter-wave plate, becomes S light and P light respectively, is transmitted through two polarization splitting prisms, is overlapped the exit facet in two polarization splitting prisms, is received through two receivers.Accurate displacement measurement may be implemented in the present invention, and reading head is compact-sized, small in size, the environmentally sensitive property of system is low, greatly reduces the control cost to measurement environment.

Description

The pattern displacement measurement method of long stroke, high-acruracy survey
Technical field
The present invention relates to the displacement measurement methods based on diffraction grating, in particular to are used for Precision Machining field workbench position The high-precision large-stroke pattern displacement measurement method of shift measurement.
Background technique
Accurate displacement measuring technique is in semiconductor machining, precision machinery manufacture, the manufacture of large scale diffraction grating and biology The fields such as medicine play very important effect.And the accurate displacement measuring technique required for these fields is its main feature is that survey It is big to measure range, up to meter-sized;Measurement Resolution and precision are high, up to nanometer and sub-nanometer precision.Such as it is dry using scanning It relates to exposure technique and manufactures meter-sized diffraction grating, it is desirable that workbench step distance measurement accuracy cooperates PGC demodulation precision several A nanometer.Due to wide range and high-resolution and precision meet simultaneously be it is very difficult, this is just accurate displacement measuring technique Propose very high requirement.
The measurement method used by many Precision Machining fields is all two-frequency laser interferometer substantially at present, but double frequency swashs Optical interferometer environmental sensitivity is high, and measurement reproducibility is poor, and expensive, therefore to guarantee its high-acruracy survey cost ratio It is larger.Pattern displacement measurement method is small by environmental constraints using grating pitch as measuring basis, and measurement reproducibility is good, and can Realize high-acruracy survey, but its range is limited by the size of measurement grating, for needing the workbench of meter level range motion It says, it is impossible to meet require for general pattern displacement measurement method.
In view of the above-mentioned problems, related work has done in some research institutions, such as Japanese Nikon company is to solve pattern displacement Measurement method range problem, the said firm align shifting in such a way that multiple reading heads switch on same grating and measure, Realize the increase of range.Keep system bulk larger by the way of more reading heads, and install it is more difficult, due to reading head compared with More, the energy of light source can also reduce very much, and each reading head requires a set of reception system, handle band to later data Carry out very big pressure.
Summary of the invention
In view of the limitation of above-mentioned technology, the present invention provides a kind of high-precision large-stroke pattern displacement measurement method.
The pattern displacement measurement method of long stroke of the present invention, high-acruracy survey, includes the following steps:
Light is divided into two bundles by beam splitter prism and 90 ° of mirrors of turning back by the double-frequency laser that two-frequency laser issues cross-polarization;
The two-beam is incident on two polarization splitting prisms respectively, is incident on the light of two polarization splitting prisms by two polarizations Amici prism beam splitting, wherein P light transmission, S light reflect;
After four quarter-wave plates, P light becomes right-circularly polarized light for the P light and S light, and S light becomes left-handed circle Polarised light;
The dextrorotation and left circularly polarized light after the reflection of two plane mirrors, are incident on measurement respectively with Littrow angle On grating;
The measurement grating is moved along grating vector direction, is carried the diffraction light of displacement information by backtracking, is passed through respectively After crossing quarter-wave plate, right-circularly polarized light becomes S light, reflects by two polarization splitting prisms, and left circularly polarized light becomes P Light is transmitted by two polarization splitting prisms, and the final exit facet being overlapped in two polarization splitting prisms is received through two receivers.
In some embodiments, the measurement grating includes the high incisure density grating of three layings in the shape of " pin ", is located at The left end of the high incisure density grating of upside is carried on the right end of the high incisure density grating positioned at left side, and right end is held It is loaded in the left end of the high incisure density grating positioned at right side, and the lap of high incisure density grating described in every two In, slot is corresponding with slot, and ridge is corresponding with ridge.
In some embodiments, the three high incisure density grating is three identical high incisure density gratings.
In some embodiments, two-frequency laser, beam splitter prism, 90 ° of mirrors of turning back, two polarization splitting prisms, four four/ One wave plate, two plane mirrors and two receivers constitute reading head.
In some embodiments, the double-frequency laser for the cross-polarization that two-frequency laser issues is by beam splitter prism and 90 ° of mirrors of turning back It is divided into parallel two-beam, is incident on two polarization splitting prisms respectively.
In some embodiments, two pieces of a quarters are fixed respectively in the transmission direction and reflection direction of a polarization splitting prism Wave plate equally also fixes two blocks of quarter-wave plates in the transmission direction of another polarization splitting prism and reflection respectively.
In some embodiments, described two receivers are worked alternatively, and realize long stroke displacement measurement.
Compared with prior art, in pattern displacement measurement method of the invention, use three pieces high incisure density grating with " product " word arrangement forms long stroke and measures grating, and in " product " word arrangement, guarantees that the cutting of grating is parallel to each other, grating slot It is corresponded with grating ridge, eliminates error in reading and data transmission error in this way.This method has taken into account pattern displacement measurement system It unites the advantages of environmental sensitivity is low and wide range.And required reading head is compact-sized, and small in size, system is environmentally sensitive Property it is low, be easily installed, for Precision Machining field worktable displacement measurement can substantially reduce to measurement environment control cost, Lifting system performance.
Detailed description of the invention
Fig. 1 be long stroke of the present invention, high-acruracy survey grating displacement measuring system three identical high incisure densities One embodiment schematic diagram of grating laying in the shape of " pin ".
Fig. 2 be long stroke of the present invention, high-acruracy survey reading head one embodiment of grating displacement measuring system show It is intended to.
Fig. 3 be long stroke of the present invention, high-acruracy survey pattern displacement measurement method flow chart.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing and specific implementation Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this hair It is bright, but not to limit the present invention.
Long stroke of the present invention, high-acruracy survey pattern displacement measurement method be the light based on long stroke, high-acruracy survey What grid displacement measurement system was realized.Referring initially to Fig. 1, the grating position of long stroke provided in an embodiment of the present invention, high-acruracy survey Shift measurement system, high incisure density grating 1 arrange splicing, three high incisure density grating 1 cloth in the shape of " pin " in a manner of Fig. 1 If forming measurement grating, the high groove positioned at left side is carried on positioned at the left end of the high incisure density grating 1 of upside The right end of density grating 1, right end are carried on the left end of the high incisure density grating 1 positioned at right side, and height described in every two In the lap of incisure density grating 1, slot is corresponding with slot, and ridge is corresponding with ridge.
In one embodiment, the three high incisure density grating 1 is three identical high incisure density gratings.
With reference to Fig. 2, the reading head matched with the high incisure density grating 1 of above three laying in the shape of " pin ", including (there are also one piece not for 2,90 ° of mirrors 3 of turning back of beam splitter prism, polarization beam splitter prism 4, polarization beam splitter prism 5, quarter-wave plate 6,7,8 Draw), plane mirror 9 and 10.The double-frequency laser for the cross-polarization that two-frequency laser (not shown) issues is by 2 He of beam splitter prism 90 ° of mirrors 3 of turning back divide for parallel two-beam, polarization splitting prism 4 and polarization splitting prism 5 are incident on respectively, in polarization spectro The transmission direction and reflection direction of prism 5 fix one block of quarter-wave plate 8 and 6 respectively;Equally, in the saturating of polarization spectroscope 4 It penetrates direction and one block of quarter-wave plate 7 and one piece of quarter-wave plate (not shown) is also fixed in reflection respectively, be incident on polarization The light of Amici prism 4 and 5 is by the beam splitting of polarization splitting prism 4 and 5, wherein P light transmission, S light reflection, by quarter-wave plate P light becomes right-circularly polarized light afterwards, and S light becomes left circularly polarized light.Dextrorotation and left circularly polarized light pass through plane reflection respectively It after mirror 9 and plane mirror 10 reflect, is incident on high incisure density grating with Littrow angle, when high incisure density grating is mobile When, the diffraction light of displacement information is carried by backtracking, respectively after quarter-wave plate, right-circularly polarized light becomes S light, It is reflected by polarization splitting prism 4 and 5, left circularly polarized light becomes P light, transmits by polarization splitting prism 4 and 5, final weight The exit facet in polarization splitting prism 4 and 5 is closed, is received through a (not shown) in two receivers.Two receiver alternatings Work.
Relative position by reading head and measurement grating is mobile, the long stroke measurement of Lai Shixian pattern displacement.In this hair In bright one embodiment, specifically, when reading head is located at the position of Fig. 2, dextrorotation and left-handed that polarization splitting prism 5 projects Circularly polarized light after plane mirror 9 and plane mirror 10 reflect, is incident on high incisure density light respectively with Littrow angle On grid 1, one of reception of two receivers carries the light information of displacement information backtracking, at this point, polarization spectro rib Dextrorotation that mirror 4 projects and left circularly polarized light after plane mirror 9 and plane mirror 10 reflect, can not be mapped to respectively It measures on grating.When measurement grating is moved along grating vector direction, dextrorotation and left circularly polarized light that polarization spectroscope 5 projects Respectively after plane mirror 9 and plane mirror 10 reflect, it can not be incident on measurement grating, and polarization spectro rib at this time Dextrorotation that mirror 4 projects and left circularly polarized light after plane mirror 9 and plane mirror 10 reflect, are incident on measurement respectively On grating, the another one of two receivers receive the light information for carrying displacement information backtracking.
Referring to Fig. 3, it is based on above-mentioned measuring system, pattern displacement measurement method provided in an embodiment of the present invention, including such as Lower step:
The double-frequency laser of the cross-polarization issued by two-frequency laser (not shown) is turned back mirror 3 by beam splitter prism 2 and 90 ° It is divided into parallel two-beam;
The two-beam is incident on polarization splitting prism 4 and polarization splitting prism 5 respectively, is incident on two polarization splitting prisms 4 and 5 light is by two polarization splitting prism beam splitting, and wherein P light transmission, S light reflect;
One block of quarter-wave plate 8 and 6 is fixed respectively in the transmission direction and reflection direction of polarization splitting prism 5;Equally, One block of quarter-wave plate 7 and one block of quarter-wave plate are also fixed respectively (not in the transmission direction of polarization spectroscope 4 and reflection Draw), the light of polarization splitting prism 4 and 5 is incident on by the beam splitting of polarization splitting prism 4 and 5, wherein P light transmission, S light reflect, P light becomes right-circularly polarized light after quarter-wave plate, and S light becomes left circularly polarized light.
The dextrorotation and left circularly polarized light are respectively after plane mirror 9 and plane mirror 10 reflect, Yi Lite It is incident on high incisure density grating at sieve angle;
When measurement grating is moved along grating vector direction, the diffraction light of displacement information is carried by backtracking, is passed through respectively After quarter-wave plate, right-circularly polarized light becomes S light, reflects by polarization splitting prism 4 and 5, and left circularly polarized light becomes P Light is transmitted by polarization splitting prism 4 and 5, the final exit facet being overlapped in polarization splitting prism 4 and 5, through two receivers (not shown) receives.Two receivers work alternatively, and realize long stroke displacement measurement.
The following detailed description of in measurement grating moving process, there are three types of situations altogether:
1, the measurement light through polarization splitting prism 4 does not impinge on high incisure density grating 1, through polarization splitting prism 5 measurement light is incident on high incisure density grating 1, in this case by the measurement light for passing through polarization splitting prism 5 Carry out displacement measurement.
2, the measurement light through polarization splitting prism 5 does not impinge on high incisure density grating 1, through polarization splitting prism 4 measurement light is incident on high incisure density grating 1, in this case by the measurement light for passing through polarization splitting prism 4 Carry out displacement measurement.
3, by the measurement light co-incident of polarization splitting prism 4 and polarization splitting prism 5 to high incisure density grating 1 On, at this moment, two groups of measurement light can be carried out displacement measurement, and realize two by follow-up data processing system (not shown) Group measurement data is mutually linked, guarantee wherein one group of measuring beam cannot the used time, another group of measuring beam can continue to measure.
The above described specific embodiments of the present invention are not intended to limit the scope of the present invention..Any basis Any other various changes and modifications made by technical concept of the invention should be included in the guarantor of the claims in the present invention It protects in range.

Claims (5)

1. the pattern displacement measurement method of a kind of long stroke, high-acruracy survey, which comprises the steps of:
Light is divided into two bundles by beam splitter prism and 90 ° of mirrors of turning back by the double-frequency laser that two-frequency laser issues cross-polarization;
The two-beam is incident on two polarization splitting prisms respectively, is incident on the light of two polarization splitting prisms by two polarization spectros Prism beam splitting, wherein P light transmission, S light reflect;
After four quarter-wave plates, P light becomes right-circularly polarized light for the P light and S light, and S light becomes Left-hand circular polarization Light;
The dextrorotation and left circularly polarized light after the reflection of two plane mirrors, are incident on measurement grating respectively with Littrow angle On;
The measurement grating is moved along grating vector direction, is carried the diffraction light of displacement information by backtracking, is passed through four respectively After/mono- wave plate, right-circularly polarized light becomes S light, reflects by two polarization splitting prisms, and left circularly polarized light becomes P light, It is transmitted by two polarization splitting prisms, the final exit facet being overlapped in two polarization splitting prisms is received through two receivers, described Two receivers work alternatively, and realize long stroke displacement measurement;
It specifically includes: if being mapped on the measurement grating through any one group of measurement illumination in two polarization splitting prism, and Another set measurement light is not irradiated on the measurement grating, then is irradiated to the measurement grating so that the receiver is received On one group of measurement light carry out displacement measurement;
If being irradiated on the measurement grating through two groups of measurement light in two polarization splitting prism, described in arbitrarily organizing It measures light and carries out displacement measurement, and being mutually linked for two groups of measurement data is realized by follow-up data processing system, to guarantee it In one group of measuring beam cannot be used for measurement when, continue to measure by another group of measurement light;The measurement grating includes three The high incisure density grating that triangle disposition is laid, the left end positioned at the high incisure density grating of upside is carried on positioned at left side The high incisure density grating right end, right end is carried on the left end of the high incisure density grating positioned at right side, and every In the lap of two high incisure density gratings, slot is corresponding with slot, and ridge is corresponding with ridge.
2. the method for pattern displacement as described in claim 1 measurement, which is characterized in that the three high incisure density grating is Three identical high incisure density gratings.
3. the method for pattern displacement measurement as claimed in claim 2, which is characterized in that two-frequency laser, beam splitter prism, 90 ° It turns back mirror, two polarization splitting prisms, four quarter-wave plates, two plane mirrors and two receivers constitute reading head.
4. the method for pattern displacement measurement as described in claim 1, which is characterized in that the cross-polarization that two-frequency laser issues Double-frequency laser parallel two-beam is divided by beam splitter prism and 90 ° of mirrors of turning back, be incident on two polarization splitting prisms respectively.
5. the method for pattern displacement measurement as described in claim 1, which is characterized in that in the transmission side of a polarization splitting prism To two blocks of quarter-wave plates are fixed respectively with reflection direction, equally, in the transmission direction and reflection of another polarization splitting prism Also two blocks of quarter-wave plates are fixed respectively.
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CN108444389A (en) * 2017-12-26 2018-08-24 中国科学院长春光学精密机械与物理研究所 A kind of production method of Chinese character pin-shaped displacement measurement grating
CN109632010B (en) * 2019-01-23 2020-07-17 中国科学院长春光学精密机械与物理研究所 Displacement and angle synchronous measurement method

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