CN105180845A - High-precision roll angle interferometric measuring device based on blazed grating - Google Patents
High-precision roll angle interferometric measuring device based on blazed grating Download PDFInfo
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Abstract
The invention relates to a high-precision roll angle interferometric measuring device based on blazed gratings. The high-precision roll angle interferometric measuring device comprises a dual-frequency laser source, a blazed grating wedge-shaped plate moving along with a measured member, a light interference device and a phase detection device. The dual-frequency laser source outputs an incident light beam comprising two components of different frequencies and orthogonal linear polarization directions to the light interference device, the incident light beam is reflected twice through the blazed grating wedge-shaped plate under the action of the light interference device to form four measuring light beams in spatial parallel, the interference light beams are formed in the light interference device and output to the phase detection device, phase displacement of the measuring light beams is detected by the phase detection device, and a roll angle is determined according to the relationship between the phase displacement and a roll angle of the wedge-shaped plate. The high-precision roll angle interferometric measuring device has the advantages of high anti-interference capability, high measuring accuracy, simple optical structure, few optical component and angle measuring resolution capable of reaching sub-micro radian, and can meet different precision measurement requirements by adopting the gratings of different grating constants.
Description
Technical field
The present invention relates to a kind of photoelectric measurement technology, particularly a kind of High precision roll angle interferometric measuring means based on blazed grating.
Background technology
As the key equipment of field of manufacture of precision machinery, the accurate measurement of numerically-controlled machine and machining center geometric position is the basic guarantee of machining precision.Precise motion system, as a link vital in Precision Machining and field of precision measurement, directly affects the precision of processing work.Therefore the precision improving motion locating system has become the major tasks of instrument, lathe and even development of manufacturing.
In recent years, more and more higher to the accuracy requirement of ultraprecise displacement, in grating ruling worktable and various large-scale precision Scan orientation device, such as Scan orientation platform and large area scanning probe microscope etc., require to reach nanoscale to the kinematic accuracy of 6 degree of freedom, this just means and strictly must control the various angle errors in displacement movement process.Utilize existing various two-frequency laser interferometer more easily can complete the measurement of the angle of pitch and deflection angle, and roll angle error, it rotates around linear motion axis along with the while of straight ahead, and be generally perpendicular to detecting light beam, common angle measurement method cannot directly use.
Expert, the high-acruracy survey of scholar to roll angle expand all kinds of research, and obtain the measuring method much having certain practical value both at home and abroad for a long time.Mainly contain following a few class:
1. collimation laser mensuration.The locus of the method laser beam, as benchmark, detects the laser position caused by rolling of measured piece or the change in direction.A kind of is by the plane mirror [WeiGao.Measurementandcontrolofrollingofaprecisionmovingt able.ProceedingsoftheIEEEInternationalConferenceonIntell igentProcessingSystems.1997] isometric with stroke, utilize measured piece rolling to cause plane mirror rolling, make incident detection light after plane mirror to the change in location of detector to measure roll angle.Need when the method is measured to install in guide rail side one piece with the level crossing of guide rail equal length, be difficult to realization in reality.Another kind adopts parallel beam mensuration, the facula position translation at vertical movement axial plane of parallel beam that moving component rolling causes is detected in conjunction with position sensitive detectors such as 4 quadrant detectors, roll angle [JohnC.Tsai.Ratationandtranslationmeasurementwithphasesen sitivedetection is tried to achieve by triangulation calculation, United States Patent (USP): 6316779B1,2001; Feng Qibo etc. a kind of roll angle measurement method based on grating and device, China Patent No.: 101339012,2008].Belong to by straightness error indirect inspection roll angle, general to mix with pitching or Run-out error, and detection accuracy is subject to the Accuracy of the parallel beam depth of parallelism and position sensor.
2. laser polarization direction is reference measurement method.The method is mainly measure light with linearly polarized light, utilize the polarization such as wave plate or analyzer Sensitive Apparatus as senser element, the light intensity that detection rolling causes changes [Kuang Cuifang etc. based on roll angle measurement method and the device of quarter-wave plate, China Patent No.: 1687701A, 2005].Or with orthogonal circularly polarized light or elliptically polarized light for measuring light, by detect after as the wave plate of sensor signal phase change obtain roll angle [Yin Chunyong etc. roll angle measurement method and rolling angle measurement instrument thereof. China Patent No.: 01130893.1,2001].The feature of these methods needs to demarcate, and only within the scope of feature roll angle, have higher Measurement Resolution, non-linear domain is little.
3. double-frequency laser interferometry method.Laser interferance method antijamming capability is strong, very high precision can be reached in displacement measurement, when utilizing it to carry out rolling angle measurement, need it is considered that how the roll angle in vertical axial plane is converted into axial change in optical path length, need the crosstalk eliminating other several degree of freedom simultaneously.Based on plate wedge measuring method [Zhang Zhuo etc. grating wedge-plate and apply the corner measuring apparatus of this flat board, China Patent No.: 200410013761.7,2004] rolling angle measurement on a large scale can be realized, but it adopts the working method of one piece of plate wedge, pitching and Run-out error are difficult to eliminate.Hou Wenmei proposes a kind of roll angle high precision measuring system [Hou Wenmei etc. based on plane differential interferometry, for measuring the laser interference system of micro roll angle, application number CN200910167309.9,2009], utilize wedge surface prism that roll angle is converted into the change of light path equally, utilize the plane reflection of wedge surface mirror to interfere measurement.In actual applications, the Installation and Debugging of wedge surface catoptron require higher.
Summary of the invention
The present invention be directed to the high-acruracy survey Problems existing of roll angle, propose a kind of High precision roll angle interferometric measuring means based on blazed grating, be the phase-modulation roll angle measurement method based on blazed grating reflection, heterodyne laser interference, realize High precision roll angle and measure; Meanwhile, there is compact conformation, be easy to integrated, facilitate the advantage of practical operation.
Technical scheme of the present invention is: a kind of High precision roll angle interferometric measuring means based on blazed grating, comprise two-frequency laser, optical interference means, the blazed grating plate wedge moved with measured piece and phase detection device, two-frequency laser exports the different and component incident beam that linear polarization is mutually orthogonal of two frequencies to optical interference means, two-frequency laser exports reference signal light beam to phase detection device simultaneously, incident beam is under the effect of interference device, through blazed grating plate wedge two secondary reflection, form the four bundle measuring beams that space is parallel, finally in optical interference means, form interfering beam outputs to phase detection device, phase detection device is according to the roll angle of the variable quantity determination measured piece of two frequency component phase differential in the measuring beam detected.
Described optical interference means comprises polarization spectroscope, right-angle prism, first quarter-wave plate, second quarter-wave plate and corner cube, described polarization spectroscope and right-angle prism glue together along a right-angle side, first quarter-wave plate is positioned at polarization spectroscope, between right-angle prism and blazed grating plate wedge, second quarter-wave plate is between polarization spectroscope and corner cube, described optical interference means receives incident light from polarization spectroscope first surface, through polarization spectroscope light splitting and right-angle prism reflection, form component transmitted light and component reflected light, from polarization spectroscope second exiting parallel, two-way light components is at the first quarter-wave plate, return under the effect of blazed grating plate wedge, through right-angle prism reflection and polarization light-dividing surface effect after, merge into three outgoing of a branch of light beam from polarization spectroscope, described combined light beam returns after the second quarter-wave plate after corner cube reflection, again incide polarization spectroscope through the second quarter-wave plate from polarization spectroscope the 3rd face, this incident light is on polarization light-dividing surface, outgoing frequency component reflected light, the frequency component of transmission becomes transmitted light after right-angle prism reflection, described transmitted light and reflected light and above-mentioned component transmitted light and component reflected light, form the four bundle measuring beams that the space of optical interference means output is parallel.
The centerline axis parallel of described polarization spectroscope, right-angle prism, the first quarter-wave plate and blazed grating plate wedge or be positioned at same straight line; The centerline axis parallel of described polarization spectroscope, the second quarter-wave plate and corner cube or be positioned at same straight line.
The light of described two-frequency laser outgoing is through the component transmitted light of polarization spectroscope outgoing, identical with through repeatedly acting on the transmitted light frequency become after right-angle prism again secondary reflection; And the light of two-frequency laser outgoing is through the component reflected light of polarization spectroscope outgoing, and through repeatedly acting on polarization light-dividing surface, the component reflected light frequency of outgoing is identical.
Described phase detection device comprises analyzer, photodetector and phasometer, the frequency component orthogonal from two polarization directions the light beam of polarization spectroscope outgoing passes through analyzer, form interfering beam, photoelectric detector from analyzer interfering beam and produce electric measurement signal input phase meter, phasometer receive from analyzer electric measurement signal with carry out the electric reference signal of self-generated reference signal light beam, and calculating phase difference output, the change in optical path length that change and the rolling of blazed grating plate wedge of this phase differential cause is directly proportional.
Described blazed grating plate wedge is formed by two pieces of one side blazed grating wedge surface prism symmetry gummeds, and two inclined surfaces are processed with reflective blazed grating.
Relation between described roll angle and phase change A Φ:
ΔΦ＝(16πnDtanα/λ)·sinθ＝K·sinθ
N is the refractive index of glass plate wedge, D be space parallel four bundle measuring beams and the minimum place of blazed grating plate wedge thickness radial direction apart, λ is incident light beam wavelength, and α is the angle of wedge of blazed grating plate wedge, K is the angular magnification of measuring system, and θ is roll angle.
Beneficial effect of the present invention is: the High precision roll angle interferometric method and the device that the present invention is based on blazed grating, adopts the parallel four light beam variates of spatial frequency symmetry, realizes error separate, and antijamming capability is strong, and measuring accuracy is high; Optical texture is simple, and optical element is few, easy to operate, is conducive to on-the-spot test, and angle resolution can reach sub-micro radian, and measures requirement by adopting the grating of different grating constant can meet different accuracy.
Accompanying drawing explanation
Fig. 1 is the light path schematic diagram of the High precision roll angle interferometric measuring means that the present invention is based on blazed grating;
Fig. 2 is plate wedge light path schematic diagram of the present invention;
Fig. 3 is light beam change in location schematic diagram on plate wedge before and after rolling of the present invention;
Fig. 4 is the present invention's reflective blazed grating plate wedge schematic diagram.
Embodiment
As shown in Figure 1 based on the light path schematic diagram of the High precision roll angle interferometric measuring means of blazed grating, measurement mechanism comprises two-frequency laser 1, optical interference means 24, blazed grating plate wedge 5 and phase detection device 25.Wherein optical interference means 24 comprises polarization spectroscope 2, right-angle prism 3, first and second quarter-wave plate 4,6 and corner cube 7.Phase detection device 25 comprises analyzer 8, photodetector 9 and phasometer 10.Blazed grating plate wedge 5 is formed by two pieces of one side blazed grating wedge surface prism 5A and 5B symmetry gummeds, and its inclined surface 5-1 and 5-2 is processed with reflective blazed grating.
Lasing light emitter 1 adopts double-frequency laser.Lasing light emitter 1 one aspect provides the incident beam 14 of frequency stabilization to polarization spectroscope 2, this light beam includes the different and component that linear polarization is mutually orthogonal of two frequencies, also give the sine electricity reference signal 22 that phasometer 23 1 is stable, the frequency of this reference signal 22 equals the difference on the frequency of two components of lasing light emitter 1 simultaneously.
Polarization spectroscope 2 be positioned at lasing light emitter 1 produce in the light path of light beam 14.Light beam 14 is after the polarization light-dividing surface 11 of polarization spectroscope 2, and two frequency component one-components transmission that polarization direction is orthogonal, becomes light beam 15; Another component reflects, after the reflecting surface 12 of right-angle prism 3 reflects, become light beam 16.Light beam 15 and light beam 16 be parallel optical axis all, returns under the effect of quarter-wave plate 4, blazed grating plate wedge 5, after the effect of right-angle prism reflection and polarization light-dividing surface, merges into light beam 17 outgoing.Return after corner cube 7 reflects after quarter-wave plate 6, again become light beam 18 through quarter-wave plate 6 and incide polarization spectroscope 2.On polarization light-dividing surface 11, one of them frequency component is reflected as light beam 19, and the frequency component of transmission becomes light beam 20 after right-angle prism reflection.Return under the effect of quarter-wave plate 4, blazed grating plate wedge 5, and after right-angle prism 3 and polarization spectroscope 2 act on, become outgoing beam 21.
Quarter-wave plate 4 is at polarization spectroscope 2, between right-angle prism 3 and blazed grating plate wedge 5, and quarter-wave plate 6 is between polarization spectroscope 2 and corner cube 7.Its Main Function is, the linearly polarized light by quarter-wave plate 4 is converted to circularly polarized light or transfers the circularly polarized light by quarter-wave plate 4 for linearly polarized light to.
Corner cube 7 axis and polarization spectroscope axis being parallel, be preferably placed on same straight line.The emergent light of polarization spectroscope reflects back by corner cube, and reflected light 18 walks abreast with incident light 17, but is positioned at differing heights.Light beam 15,16,19,20 space after polarization beam splitter 11 light splitting is parallel to each other, and on the cross section of vertical optical axis, light beam 15,16,19,20 forms square or rectangle.
P component in incident beam 14 becomes light beam 15 through polarization light-dividing surface 11 transmission.Through blazed grating plate wedge 5 reflect and 2 times after quarter-wave plate 4 Returning beam be s light.Above-mentioned s light becomes a frequency component of light beam 17 after polarization light-dividing surface 11 reflects.Said frequencies component, when quarter-wave plate 6, corner cube 7 return, changes polarization state again, becomes the p light component of incident beam 18, after polarization light-dividing surface 11 transmission, become light beam 20 after right-angle prism 3 reflects.
S component in incident beam 14 reflects through polarization light-dividing surface 11, after the reflection of the face 12 of right-angle prism 3, become light beam 16.Through blazed grating plate wedge 5 reflect and 2 times after quarter-wave plate 4 Returning beam be p light.Above-mentioned p light becomes a frequency component of light beam 17 after the reflection of the face 12 of right-angle prism 3 after polarization light-dividing surface 11 transmission.Said frequencies component changes polarization state through quarter-wave plate 6, corner cube 7 when returning again, becomes the s light component of incident beam 18, after polarization light-dividing surface 11 reflects, become light beam 19.
From above-mentioned light path, light beam 15,20 frequency is identical, light beam 16 is identical with 19 frequencies.
Analyzer 8 vertical optical axis, its effect is that the frequency component from two polarization directions the light beam 21 of polarization spectroscope 2 outgoing are orthogonal is passed through, and forms interfering beam.
Photodetector 9 receives the light beam from analyzer 8 and produces electric measurement signal input phase meter 10, phasometer 10 is used for measuring the phase differential between above-mentioned electric measurement signal and aforementioned electric reference signal, and the change in optical path length that change and the rolling of blazed grating plate wedge 5 of this phase differential cause is directly proportional.
The concrete computation process of phase differential is described below with reference to Fig. 2 and Fig. 3.
As shown in Figure 2, light beam is relevant with the thickness that plate wedge is located in incidence at the light path of plate wedge, is namely determined by the radial distance D that beam distance plate wedge thickness is minimum.In Fig. 2, the optical path difference of two-beam in plate wedge can be expressed as:
Δl＝n·(D
1-D
2)·tan(α)(1)
In formula, n is glass refraction, D
1, D
2for the angle of wedge that the radial distance of two-beam, α are blazed grating plate wedge.
In interference system of the present invention, four bundle measuring beams are parallel in space, radial distance is D.The light beam diagonal angle distribution of two different frequency components.When blazed grating plate wedge because of the rolling of measured piece thereupon rolling time, the relation of measuring beam and blazed grating plate wedge is as shown in Figure 3.In Fig. 3, E, F, G, H are respectively the incidence point of four bundle measuring beams on plate wedge.E, H are the incidence point of same frequency measurement light, are set to f1; F, G are the incidence point of another frequency measurement light, are set to f2.Dotted line frame represents the blazed grating plate wedge before rolling, and solid box is then the blazed grating plate wedge after rolling θ.As shown in Figure 3, the incidence point thickness of light beam on plate wedge of frequency f 1 becomes large, and radial distance is increased to EE ' by EP, and the incidence point less thick of the light beam of frequency f 2 on plate wedge, radial distance is reduced to FF ' by FP.And both variable quantities are equal, for
ΔD＝D·(sinθ+cosθ-1)(2)
In formula, D is the radial distance of incident luminous point, θ is roll angle.
When roll angle is minute angle, above formula can be approximately
ΔD＝D·sinθ(3)
Consider each light beam back and forth through plate wedge 2 times, and the beam diameter of two frequencies is to distance differential variation, this is again Double deference measuring system simultaneously, so the system change in optical path length that the radial distance change of Δ D is introduced is:
ΔL＝2·4·n·ΔD·tan(α)＝8nDsinθtanα(4)
Carry out than phase time than counting mutually when measuring-signal and reference signal enter, the phase change A Φ that system change in optical path length Δ L introduces meets following relationship:
The relation between roll angle and phase change A Φ can be obtained thus:
ΔΦ＝(16πnDtanα/λ)·sinθ＝K·sinθ(6)
In above formula, n is the refractive index of blazed grating plate wedge, and D is parallel four bundle measuring beams and the radial distances at the minimum place of blazed grating plate wedge thickness in space, and λ is incident light beam wavelength, and α is the angle of wedge of blazed grating plate wedge.K is the angular magnification of measuring system.From above formula, when than count mutually obtain phase change A Φ time, can according to above formula certainty annuity roll angle θ.
The design of blazed grating plate wedge 5 is described below in conjunction with Fig. 4.The inclined surface of glass plate wedge is all processed with reflective blazed grating 5-1 and 5-2, described grating is that several are parallel to the score line of blazed grating plate wedge 5 central shaft 26 distribution.According to the principle of blazed grating, certain order diffraction Guang Yanyuan road can be made to return by grating constant design.In the present invention, light impinges perpendicularly on grating facet, makes the blazing angle of grating
equal the locking angle of plate wedge, now the angle of diffraction (relative to grating planar) of incident angle and m order diffraction light is equal, is
can obtain according to grating equation:
Adopt 1 order diffraction light, grating constant is the glass of the holographic grating of 400l/mm, refractive index n=1.61655, two-frequency laser central wavelength lambda=632.8nm, then can be regarded as to obtain the blazing angle of grating
As measuring beam spacing 2D=12mm, from formula (6), K=60527.When determining than the detection resolution counted mutually, K value is larger, and the Measurement Resolution of roll angle is higher.Adopt the ratio of 512 segmentations (resolution is 360 °/512) to count mutually, the rolling angle measurement resolution of this measuring system is about 0.04 " (0.2 microradian).
Therefore, compared with existing various roll angle detection method, the measurement of angle resolution of this inventive method and device can reach sub-micro radian equally, and by the design of grating constant, this measuring system can also reach higher resolution.Meanwhile, for reaching the resolution of sub-micro radian, the present invention to the machining precision of measurement mechanism and performance requirement low, grating constant only needs 400l/mm, as long as than counting resolution 0.7 ° mutually.And whole measuring system Common-path method, the dead journey of system drops to minimum, and the feature of frequency diagonal angle distribution can make measurement not affect by beat and pitch error, which ensure that the high-acruracy survey of roll angle.
Method and apparatus of the present invention is particularly suitable for the manufacture of high-accuracy lathe, three coordinate measuring machine and all kinds of large-scale Scan orientation device, detection and assessment of performance and error compensation etc., promotes the development that precision optical machinery manufactures process technology effectively.
Claims (7)
1. the High precision roll angle interferometric measuring means based on blazed grating, it is characterized in that, comprise two-frequency laser, optical interference means, the blazed grating plate wedge moved with measured piece and phase detection device, two-frequency laser exports the different and component incident beam that linear polarization is mutually orthogonal of two frequencies to optical interference means, two-frequency laser exports reference signal light beam to phase detection device simultaneously, incident beam is under the effect of interference device, through blazed grating plate wedge two secondary reflection, form the four bundle measuring beams that space is parallel, finally in optical interference means, form interfering beam outputs to phase detection device, phase detection device is according to the roll angle of the variable quantity determination measured piece of two frequency component phase differential in the measuring beam detected.
2. according to claim 1 based on the High precision roll angle interferometric measuring means of blazed grating, it is characterized in that, described optical interference means comprises polarization spectroscope, right-angle prism, first quarter-wave plate, second quarter-wave plate and corner cube, described polarization spectroscope and right-angle prism glue together along a right-angle side, first quarter-wave plate is positioned at polarization spectroscope, between right-angle prism and blazed grating plate wedge, second quarter-wave plate is between polarization spectroscope and corner cube, described optical interference means receives incident light (14) from polarization spectroscope first surface, through polarization spectroscope light splitting and right-angle prism reflection, form component transmitted light (15) and component reflected light (16), from polarization spectroscope second exiting parallel, two-way light components is at the first quarter-wave plate, return under the effect of blazed grating plate wedge, through right-angle prism reflection and polarization light-dividing surface effect after, merge into a branch of light beam from polarization spectroscope the 3rd outgoing, described combined light beam returns after the second quarter-wave plate after corner cube reflection, again incide polarization spectroscope through the second quarter-wave plate from polarization spectroscope the 3rd face, this incident light is on polarization light-dividing surface, outgoing frequency component reflected light (19), the frequency component of transmission becomes transmitted light (20) after right-angle prism reflection, described transmitted light (20) and reflected light (19) and above-mentioned component transmitted light (15) and component reflected light (16), form the four bundle measuring beams that the space of optical interference means output is parallel.
3. according to claim 2 based on the High precision roll angle interferometric measuring means of blazed grating, it is characterized in that, the centerline axis parallel of described polarization spectroscope, right-angle prism, the first quarter-wave plate and blazed grating plate wedge or be positioned at same straight line; The centerline axis parallel of described polarization spectroscope, the second quarter-wave plate and corner cube or be positioned at same straight line.
4. according to Claims 2 or 3 based on the High precision roll angle interferometric measuring means of blazed grating, it is characterized in that, the light of described two-frequency laser outgoing is through the component transmitted light (15) of polarization spectroscope outgoing, identical with through repeatedly acting on transmitted light (20) frequency become after right-angle prism again secondary reflection; And the light of two-frequency laser outgoing is through the component reflected light (16) of polarization spectroscope outgoing, and through repeatedly acting on polarization light-dividing surface, component reflected light (19) frequency of outgoing is identical.
5. according to claim 1 or 2 based on the High precision roll angle interferometric measuring means of blazed grating, it is characterized in that, described phase detection device comprises analyzer, photodetector and phasometer, the frequency component orthogonal from two polarization directions the light beam of polarization spectroscope outgoing passes through analyzer, form interfering beam, photoelectric detector from analyzer interfering beam and produce electric measurement signal input phase meter, phasometer receive from analyzer electric measurement signal with carry out the electric reference signal of self-generated reference signal light beam, and calculate phase difference output, the change in optical path length that change and the rolling of blazed grating plate wedge of this phase differential cause is directly proportional.
6. according to claim 5 based on the High precision roll angle interferometric measuring means of blazed grating, it is characterized in that, described blazed grating plate wedge is formed by two pieces of one side blazed grating wedge surface prism symmetry gummeds, and two inclined surfaces (5-1) and (5-2) are processed with reflective blazed grating.
7., according to claim 6 based on the High precision roll angle interferometric measuring means of blazed grating, it is characterized in that, the relation between described roll angle and phase change A Φ:
ΔΦ＝(16πnDtanα/λ)·sinθ＝K·sinθ
N is the refractive index of glass plate wedge, D be space parallel four bundle measuring beams and the minimum place of blazed grating plate wedge thickness radial direction apart, λ is incident light beam wavelength, and α is the angle of wedge of blazed grating plate wedge, K is the angular magnification of measuring system, and θ is roll angle.
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| CN105674917A (en) * | 2016-03-10 | 2016-06-15 | 中国科学院高能物理研究所 | Combined type reflector grating heterodyne interference roll angle measuring device and method |
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| CN107102317A (en) * | 2017-06-20 | 2017-08-29 | 北醒（北京）光子科技有限公司 | A kind of device for measuring angular resolution |
| CN107917680A (en) * | 2017-11-07 | 2018-04-17 | 南京航空航天大学 | Minute angle method for quickly identifying based on balzed grating, |
| CN108489424A (en) * | 2018-04-13 | 2018-09-04 | 上海理工大学 | Laser interference system for roll angle and straight line degree measurement |
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