CN108151666A - A kind of light path of dynamic realtime detection machine tool chief axis thermal deformation errors - Google Patents
A kind of light path of dynamic realtime detection machine tool chief axis thermal deformation errors Download PDFInfo
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- CN108151666A CN108151666A CN201810000777.6A CN201810000777A CN108151666A CN 108151666 A CN108151666 A CN 108151666A CN 201810000777 A CN201810000777 A CN 201810000777A CN 108151666 A CN108151666 A CN 108151666A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
Abstract
The present invention is a kind of light path of dynamic realtime detection machine tool chief axis thermal deformation errors.Including：Two-frequency laser, 33% spectroscope, 50% spectroscope, 3 semi-transparent semi-reflecting lens, 3 speculums, 6 detectors, turnover speculum and opal reflex reflection mirror.The crossed polarized light that laser is sent out is divided into three beams by 33% spectroscope and 50% spectroscope, three interference length-measuring sub-light roads being made of semi-transparent semi-reflecting lens, speculum, detector are respectively enterd, the measuring beam on each sub-light road is incident on different spaces angle on opal reflex reflection mirror.When opal reflex reflection mirror is mounted on machine tool chief axis, main shaft thermal deformation errors are the dynamic realtime variation for being reflected as opal reflex reflection mirror spatial position.Three sub- light paths can measure micro-displacement variation of the opal reflex reflection mirror on the direction of three, space, by can be calculated opal reflex reflection mirror spatial position change, so as to obtain main shaft thermal deformation errors amount.
Description
Technical field
The present invention relates to laser interferometry field more particularly to a kind of dynamic realtime detection machine tool chief axis thermal deformation errors
Light path.
Background technology
At present, the Thermal Error of machine tool chief axis is the principal element for influencing high-grade, digitally controlled machine tools overall precision.Statistics shows essence
Thermal deformation of machine tool error has accounted for the 40-70% of total mismachining tolerance in close process, among these caused by main shaft thermal deformation accidentally
Difference is one of maximum error source to be influenced on machine tool accuracy, and its influence increases with the raising of lathe precision again.How
Reducing the influence of Spindle thermal error has become one of key technology of high-grade, digitally controlled machine tools performance.
It is using heat error compensation technology, i.e., by machine tooling to reduce one of main method that Spindle thermal error influences
The Spindle thermal error generated in the process is detected, models, analyzes and compensates, so as to reach the final mesh for improving machining accuracy
, among these, the measurement of main shaft thermal deformation errors is important prerequisite.Thermal deformation errors measuring method is by whether contacted with main shaft can
It is divided into contact measurement and non-cpntact measurement.The Typical Representative of contact measuring method is ball bar method (DBB).It can using ball bar method
The Thermal Error and geometric error of main shaft are obtained simultaneously, can be obtained during one-shot measurement by identification and isolation technics required
Various errors.Must stop the speed of mainshaft when needing to contact with main shaft, therefore measuring, and carry out in a non-operative state, Wu Fashi
Existing dynamic real-time measurement.Noncontact measuring method mainly has capacitance sensor method and laser optical method, and capacitance sensor method utilizes electricity
The hypersensitivity that capacitance is adjusted the distance carries out thermal deformation errors measurement, can detect main shaft thermal deformation.It is sensed during using capacitance measurement
Device must be very close to main shaft, therefore also needs to carry out in a non-operative state during measurement, it is difficult to realize dynamic real-time measurement.Laser
Mensuration usually builds laser interferometer, and main shaft surface is positioned on main shaft or is attached to by sensing optical element, by main shaft radially
Change in optical path length amount is converted into axial variation to measure.The laser optical method of early stage is usually analytical measurement, is measured all
The process of error is very cumbersome, can measure the error of all directions simultaneously using the method that diagonal measures, and is surveyed so as to improve
Amount efficiency, but its shortcoming is that measurement data is less, is difficult to recognize the every error elements of separation sometimes.The measurement of laser interferance method
As a result it usually needs further to separate thermal error identification, also needs to sit sometimes simultaneously including Geometric error and thermal error
Other means auxiliary such as co-ordinate measuring machine could detach Thermal Error, therefore general laser interferance method is also difficult to survey in real time
Amount.On the other hand, the test environment of lathe is often there are microseismic activity and air agitation, and general laser interferance method is difficult to
Light channel structure altogether, system Ability of Resisting Disturbance is weak, thus limits the performance indicator of measurement.
To realize the accurate measurement of thermal deformation of machine tool spindle error, especially realize and the Thermal Error under its dynamic is surveyed in real time
Active demand is measured, accurate thermal deformation errors are provided for the modeling of high-grade, digitally controlled machine tools Spindle thermal error and predictive compensation research, this
Invention proposes a kind of Spindle thermal error dynamic real-time measurement light path based on three light path laser interference phase measurement of single light source to solve
The certainly above problem.
Invention content
The purpose of the present invention is overcome the deficiencies of the prior art and provide a kind of three path dual-frequency laser of single light source interference phase
Position optical path, causes measuring system to have good stability, the ginseng of three sub- each self-formings of optical interference circuit using laser interference light path
Its spatial position change can be reflected in real time under machine tool chief axis working condition by examining signal and measuring signal, you can measure its dynamic feelings
Thermal deformation errors under condition.The system anti-interference kinetic energy of dynamic real-time measurement and general laser interferance method can not be realized at present by solving
The problem of power is weak can realize the dynamic real-time measurement of thermal deformation of machine tool spindle error well.
The present invention technical solution be：
A kind of light path of dynamic realtime detection machine tool chief axis thermal deformation errors, including：Two-frequency laser (101), 33% point
Light microscopic (102), 50% spectroscope (103), the first semi-transparent semi-reflecting lens (104), the second semi-transparent semi-reflecting lens (105), third semi-transparent half
Anti- mirror (106), the first speculum (107), the second speculum (108), third speculum (109), the first detector (110a),
Two detectors (110b), third detector (111a), the 4th detector (111b), the 5th detector (112a), the 6th detector
(112b), turnover speculum (113), opal reflex reflection mirror (114).
It is characterized in that：By a pair of mutually orthogonal linearly polarized light of two-frequency laser (101) output, the light beam is by 33% point
Light microscopic (102) is divided into two parts.Wherein, the reflected beams enter by the first semi-transparent semi-reflecting lens (104), the first speculum (107), the
The interference length-measuring sub-light road I of one detector (110a), the second detector (110b) composition.In the sub-light road I, above-mentioned reflected light
Beam is divided into two parts after the first semi-transparent semi-reflecting lens (104), and reflective portion is formed by the first detector (110a) reception
The reference signal on sub-light road I, transmissive portion are incident to opal reflex reflection after the first speculum (107) reflection with some direction
Mirror (114) simultaneously reflexes to the first semi-transparent semi-reflecting lens (104), and be reflected off by its former road, is received by the second detector (110b)
Form the measuring signal on sub-light road I.The variation of the phase difference of the measuring signal and reference signal reflects opal reflex reflection mirror (114)
Along the displacement minor change of the incident direction.Light intensity phase is divided by 50% spectroscope (103) through 33% spectroscope (102) transmitted light
Deng two parts, wherein, the reflected beams enter by the second semi-transparent semi-reflecting lens (105), turnover speculum (113), the second speculum
(108), the interference length-measuring sub-light road II of third detector (111a), the 4th detector (111b) composition.In sub-light road II, on
It states the reflected beams and two parts is divided into after the second semi-transparent semi-reflecting lens (105), reflective portion is by third detector (111a)
The reference signal for forming sub-light road II is received, transmissive portion is after turnover speculum (113) and the second speculum (108) reflection
Opal reflex reflection mirror (114) is incident to some direction and the second semi-transparent semi-reflecting lens (105) are reflexed to, and anti-by it by its former road
It penetrates, the measuring signal on sub-light road II is formed by the reception of the 4th detector (111b).The phase difference of the measuring signal and reference signal
Variation reflects displacement minor change of the opal reflex reflection mirror (114) along the incident direction.It is transmitted from 50% spectroscope (103)
Light beam enter by third semi-transparent semi-reflecting lens (106), third speculum (109), the 5th detector (112a), the 6th detector
The interference length-measuring sub-light road III of (112b) composition.In sub-light road III, above-mentioned transmitted light beam passes through third semi-transparent semi-reflecting lens (106)
After be divided into two parts, reflective portion is formed the reference signal on sub-light road III, transmission by the reception of the 5th detector (112a)
Part is incident to opal reflex reflection mirror (114) with some direction after third speculum (109) reflection and is reflexed to by its former road
Third semi-transparent semi-reflecting lens (106), and be reflected off, the measuring signal on sub-light road III is formed by the reception of the 6th detector (112b).
It is small along the displacement of the incident direction that the variation of the phase difference of the measuring signal and reference signal reflects opal reflex reflection mirror (114)
Variation.When opal reflex reflection mirror (114) is on machine tool chief axis, it is inverse that the thermal deformation errors of machine tool chief axis are reflected as opal
The dynamic realtime variation of speculum (114) spatial position.Three interference length-measuring sub-light roads are adjusted to opal reflex reflection mirror (114)
Angle, make as far as possible between this three-beam two-by-two angle close to 90 °.Above three interference length-measuring sub-light road is measured respectively respectively to test oneself
The phase difference for measuring signal and reference signal changes, you can obtains opal reflex reflection mirror (114) in the incident direction of three, space
Micro-displacement changes, after space coordinate transformation and algorithm reduction, you can obtain the change of opal reflex reflection mirror (114) spatial position
Change, most can obtain main shaft thermal deformation errors amount after error identification and separation afterwards.
The present invention operation principle be：
Attached drawing 1 is please referred to, two-frequency laser (101) sends out a pair of with mutually orthogonal linear polarization light, 33% light splitting
The light beam that laser is sent out is divided into the comparable light of three beam intensities by mirror (102) and 50% spectroscope (103), from 33% spectroscope
(102) light beam that the light beam of reflection, the light beam of 50% spectroscope (103) reflection, 50% spectroscope (103) transmit respectively enters dry
It relates to and surveys eldest son's light path I, II and III.Sub-light road I is by the first semi-transparent semi-reflecting lens (104), the first speculum (107), the first detector
(110a), the second detector (110b) form；Sub-light road II is by the second semi-transparent semi-reflecting lens (105), turnover speculum (113), the
Two-mirror (108), third detector (111a), the 4th detector (111b) composition；Sub-light road III is by third semi-transparent semi-reflecting lens
(106), third speculum (109), the 5th detector (112a), the 6th detector (112b) composition.Opal reflex reflection mirror (114)
On machine tool chief axis, the measuring beam of three sub- light paths is incident on the opal reflex reflection mirror (114) with different spaces angle
On.By taking sub-light road I as an example, the light beam reflected from 33% spectroscope (102) is divided into two after the first semi-transparent semi-reflecting lens (104)
Point, reflective portion is formed the reference signal on sub-light road I by the first detector (110a) reception, and transmissive portion is through the first reflection
Opal reflex reflection mirror (114) is incident to some direction after mirror (107) reflection.The optical characteristics of opal reflex reflection mirror (114) makes
Outgoing beam is parallel with incident light, and emergent light returns to the first semi-transparent semi-reflecting lens after the first speculum (107) again secondary reflection
(104), it and is reflected off, the measuring signal on sub-light road I is formed by the second detector (110b) reception.The measuring signal and reference
The phase difference variation of signal reflects displacement minor change of the opal reflex reflection mirror (114) along the incident direction.Similarly, sub-light road
IIth, III by the respective measuring signal and the phase difference of reference signal measured by it, can obtain opal reflex reflection mirror (114) at it
Displacement minor change in respective incident direction.During main shaft rotary work, the axial direction of main shaft, radial heat distortion error synthesis embody
For the spatial position change of opal reflex reflection mirror (114), micro-displacement variation point of the spatial position change along three incident directions
Amount is measured respectively by three sub- light paths.After space coordinate transformation and algorithm reduction, you can obtain opal reflex reflection mirror (114)
Spatial position change most can obtain main shaft thermal deformation errors amount after error identification and separation afterwards.
Advantage of the present invention compared with former technology is that the measurement of Thermal Error uses non-contacting optical measurement means,
Machine tool chief axis may be at rotation status when modulation light path element is not required in measurement process, therefore being measured, can be under Mobile state
Real-time measurement；Three sub- light paths is used to measure same opal reflex reflection mirror (114) simultaneously with different incidence angles, it can be measured
Spatial position change, which contains the axially and radially Thermal Error of main shaft simultaneously, thus one-shot measurement process can be simultaneously
Measure the radial and axial error of main shaft；Measuring system is built using double frequency Common-path method thought, it is system stability, anti-interference
Ability is strong.Signal processing uses phase measurement mode, avoids the labyrinth and intensity modulation of angle and length scanning mode
Unstability, high certainty of measurement.
Description of the drawings
Attached drawing 1 detects the schematic diagram of the light path of machine tool chief axis thermal deformation errors for a kind of dynamic realtime of the present invention.
Specific embodiment
Attached drawing 1 is please referred to, light path element includes：Two-frequency laser (101)：Select the transversal zeeman double-frequency that frequency difference is 3MHz
He-Ne lasers can send out a pair of linearly polarized light for polarizing mutually orthogonal wavelength as 633nm, i.e., contain p, s in light beam simultaneously
Polarized component；33% spectroscope (102)：Material is k9 glass and is coated with the light splitting deielectric-coating of 33% reflectivity；50% spectroscope
(103), the first semi-transparent semi-reflecting lens (104), the second semi-transparent semi-reflecting lens (105), third semi-transparent semi-reflecting lens (106)：Material is k9 glass
Glass and it is coated with semi-transparent semi-reflecting film；First speculum (107), the second speculum (108), third speculum (109), turnover speculum
(113)：Material is k9 glass and is coated with the silverskin of high reflectance；First detector (110a), the second detector (110b), third
Detector (111a), the 4th detector (111b), the 5th detector (112a), the 6th detector (112b)：Select Universal photoelectric
Detector, central detector wavelength are 633nm；Opal reflex reflection mirror (114)；By two packaged lens bonding of centre of sphere coincidence
Into diameter is respectively Ф 60mm and Ф 100mm, and material is k9 glass.
The light beam exported by two-frequency laser (101) is divided into two parts by 33% spectroscope (102).Wherein, the reflected beams
Into by the first semi-transparent semi-reflecting lens (104), the first speculum (107), the first detector (110a), the second detector (110b) group
Into interference length-measuring sub-light road I.In the sub-light road I, above-mentioned the reflected beams are divided into after the first semi-transparent semi-reflecting lens (104)
Two parts, reflective portion form reference signal by the first detector (110a) reception, and transmissive portion is through the first speculum
(107) opal reflex reflection mirror (114) is incident to some direction after reflecting, the optical characteristics of opal reflex reflection mirror (114) is used
Irradiating light beam is parallel with incident light, and emergent light returns to the first semi-transparent semi-reflecting lens (104) after the first speculum (107) again secondary reflection,
And be reflected off, measuring signal is formed by the second detector (110b) reception.Measure the phase of the measuring signal and reference signal
Difference variation can obtain displacement minor change of the opal reflex reflection mirror (114) along the incident direction.It is saturating through 33% spectroscope (102)
It penetrates light and the equal two parts of light intensity is divided by 50% spectroscope (103), wherein, the reflected beams enter by the second semi-transparent semi-reflecting lens
(105), turnover speculum (113), the second speculum (108), third detector (111a), the 4th detector (111b) form
Interference length-measuring sub-light road II.Transmitted light beam enters by third semi-transparent semi-reflecting lens (106), third speculum (109), the 5th detector
The interference length-measuring sub-light road III of (112a), the 6th detector (112b) composition.The operation principle on sub-light road II, III and sub-light road I
Similar, similarly, sub-light road II, III can obtain opal by respective measuring signal and the phase difference of reference signal measured by it
Displacement minor change of the reflex reflection mirror (114) on its respectively incident direction.Opal reflex reflection mirror (114) is mounted on a rotating speed
For on 3000 revs/min of machine tool chief axis, during main shaft rotary work, the axial direction of main shaft, radial heat distortion error synthesis are presented as
The spatial position change of opal reflex reflection mirror (114).It is incident on the angle of opal reflex reflection mirror (114) in adjustment sub-light road I, II and III
Degree makes its angle between any two close to 90 °.Three sub- light paths respectively phase difference of measuring signal and reference signal is measured respectively
Variation, you can obtain micro-displacement variation of the opal reflex reflection mirror (114) in the incident direction of three, space, become by space coordinate
Change and algorithm reduction after, you can obtain opal reflex reflection mirror (114) spatial position change, most afterwards can after error identification and separation
Obtain main shaft thermal deformation errors amount.
Claims (5)
1. a kind of light path of dynamic realtime detection machine tool chief axis thermal deformation errors, including：Two-frequency laser (101), 33% light splitting
Mirror (102), 50% spectroscope (103), the first semi-transparent semi-reflecting lens (104), the second semi-transparent semi-reflecting lens (105), third are semi-transparent semi-reflecting
Mirror (106), the first speculum (107), the second speculum (108), third speculum (109), the first detector (110a), second
Detector (110b), third detector (111a), the 4th detector (111b), the 5th detector (112a), the 6th detector
(112b), turnover speculum (113), opal reflex reflection mirror (114), it is characterised in that：
By a pair of mutually orthogonal linearly polarized light of two-frequency laser (101) output, which is divided into two by 33% spectroscope (102)
Part, the reflected beams enter by the first semi-transparent semi-reflecting lens (104), the first speculum (107), the first detector (110a), second
The interference length-measuring sub-light road I of detector (110b) composition；In the sub-light road I, above-mentioned the reflected beams are semi-transparent semi-reflecting by first
Two parts are divided into after mirror (104), reflective portion is formed the reference signal on sub-light road I by the first detector (110a) reception,
Its transmissive portion is incident to opal reflex reflection mirror (114) and by its former road after the first speculum (107) reflection with some direction
The first semi-transparent semi-reflecting lens (104) are reflexed to, and are reflected off, the measurement on sub-light road I is formed by the second detector (110b) reception
It is small along the displacement of the incident direction that the phase difference variation of signal, the measuring signal and reference signal reflects opal reflex reflection mirror
Variation；
The equal two parts of light intensity are divided by 50% spectroscope (103) through 33% spectroscope (102) transmitted light, wherein, reflected light
Beam enter by the second semi-transparent semi-reflecting lens (105), turnover speculum (113), the second speculum (108), third detector (111a),
The interference length-measuring sub-light road II of 4th detector (111b) composition, in sub-light road II, above-mentioned the reflected beams are semi-transparent by second
Two parts are divided into after semi-reflective mirror (105), reflective portion is formed the reference on sub-light road II by third detector (111a) reception
Signal, it is inverse that transmissive portion is incident to opal after turnover speculum (113) and the second speculum (108) reflection with some direction
Speculum (114) simultaneously reflexes to the second semi-transparent semi-reflecting lens (105), and be reflected off by its former road, by the 4th detector (111b)
The measuring signal for forming sub-light road II is received, the phase difference variation of the measuring signal and reference signal reflects opal reflex reflection mirror
(114) along the displacement minor change of the incident direction；
The light beam transmitted from 50% spectroscope (103) enters by third semi-transparent semi-reflecting lens (106), third speculum (109), the
The interference length-measuring sub-light road III of five detectors (112a), the 6th detector (112b) composition, in sub-light road III, above-mentioned transmitted light
Beam is divided into two parts after third semi-transparent semi-reflecting lens (106), and reflective portion is formed by the reception of the 5th detector (112a)
The reference signal on sub-light road III, it is converse that transmissive portion is incident to opal after third speculum (109) reflection with some direction
It penetrates mirror (114) and third semi-transparent semi-reflecting lens (106) is reflexed to, and be reflected off by its former road, connect by the 6th detector (112b)
The measuring signal for forming sub-light road III is received, the phase difference variation of the measuring signal and reference signal reflects opal reflex reflection mirror
(114) along the displacement minor change of the incident direction；
When opal reflex reflection mirror (114) is on machine tool chief axis, it is inverse that the thermal deformation errors of machine tool chief axis are reflected as opal
The dynamic realtime variation of speculum (114) spatial position, measures above three interference length-measuring sub-light road respectively measuring signal respectively
Change with the phase difference of reference signal, you can obtain micro-displacement of the opal reflex reflection mirror (114) in the incident direction of three, space
Variation, after space coordinate transformation and algorithm reduction, you can obtain opal reflex reflection mirror (114) spatial position change, finally
It can obtain main shaft thermal deformation errors amount after error identification and separation.
2. the light path of dynamic realtime detection machine tool chief axis thermal deformation errors as described in claim 1, it is characterised in that：It is described double
Frequency laser (101), which sends out a pair, has mutually orthogonal linear polarization light, i.e. light beam contains two polarized components of p, s.
3. the light path of dynamic realtime detection machine tool chief axis thermal deformation errors as described in claim 1, it is characterised in that：It is described
The effect of 33% spectroscope (102) and 50% spectroscope (103) is that the light beam that laser is sent out is divided into three beam intensities is equal
Light, three-beam respectively enter each interference length-measuring sub-light road I, II, III.
4. the light path of dynamic realtime detection machine tool chief axis thermal deformation errors as described in claim 1, it is characterised in that：It is described each
Interference length-measuring sub-light road changes to obtain opal reflex reflection mirror by measuring the phase difference of its measuring signal and reference signal
(114) the micro-displacement variation in respective incident direction.
5. the light path of dynamic realtime detection machine tool chief axis thermal deformation errors as described in claim 1, it is characterised in that：Opal is inverse
Speculum (114) is that three the common of interference length-measuring sub-light road measure sensing element, and on machine tool chief axis, three interference
The measuring beam for surveying eldest son's light path is incident on different spaces angle on opal reflex reflection mirror (114).
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141868A (en) * | 2018-10-11 | 2019-01-04 | 合肥工业大学 | The measuring device and measuring method of precision bearing system error motion |
| CN110057323A (en) * | 2019-04-08 | 2019-07-26 | 上海机电工程研究所 | Turntable Intersection and verticality measurement device and method |
| CN112504154A (en) * | 2020-11-02 | 2021-03-16 | 南京信息工程大学滨江学院 | Large-size support structure deformation measuring device and measuring method based on optical path |
| CN113124768A (en) * | 2021-03-24 | 2021-07-16 | 广东电网能源发展有限公司 | Embrace pole structure and warp detection device and embrace pole |
| CN113997121A (en) * | 2021-12-10 | 2022-02-01 | 深圳市锐邦德精密部件有限公司 | Numerical control lathe main shaft offset detection mechanism |
| CN114850970A (en) * | 2022-06-09 | 2022-08-05 | 宁波大学 | Method for identifying geometric error and thermal error of rotating shaft based on cutting of disc-shaped workpiece |
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2018
- 2018-01-02 CN CN201810000777.6A patent/CN108151666A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141868A (en) * | 2018-10-11 | 2019-01-04 | 合肥工业大学 | The measuring device and measuring method of precision bearing system error motion |
| CN110057323A (en) * | 2019-04-08 | 2019-07-26 | 上海机电工程研究所 | Turntable Intersection and verticality measurement device and method |
| CN112504154A (en) * | 2020-11-02 | 2021-03-16 | 南京信息工程大学滨江学院 | Large-size support structure deformation measuring device and measuring method based on optical path |
| CN112504154B (en) * | 2020-11-02 | 2022-06-03 | 南京信息工程大学滨江学院 | Large-size support structure deformation measuring device and measuring method based on optical path |
| CN113124768A (en) * | 2021-03-24 | 2021-07-16 | 广东电网能源发展有限公司 | Embrace pole structure and warp detection device and embrace pole |
| CN113124768B (en) * | 2021-03-24 | 2022-11-01 | 广东电网能源发展有限公司 | Embrace pole structure and warp detection device and embrace pole |
| CN113997121A (en) * | 2021-12-10 | 2022-02-01 | 深圳市锐邦德精密部件有限公司 | Numerical control lathe main shaft offset detection mechanism |
| CN113997121B (en) * | 2021-12-10 | 2024-04-19 | 深圳市锐邦德精密部件有限公司 | Numerical control lathe main shaft offset detection mechanism |
| CN114850970A (en) * | 2022-06-09 | 2022-08-05 | 宁波大学 | Method for identifying geometric error and thermal error of rotating shaft based on cutting of disc-shaped workpiece |
| CN114850970B (en) * | 2022-06-09 | 2023-03-21 | 宁波大学 | Method for identifying geometric error and thermal error of rotating shaft based on cutting of disc-shaped workpiece |
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Application publication date: 20180612 |