CN107339941A - A kind of precise displacement monitoring system based on double-frequency laser interference principle - Google Patents
A kind of precise displacement monitoring system based on double-frequency laser interference principle Download PDFInfo
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- CN107339941A CN107339941A CN201710601334.8A CN201710601334A CN107339941A CN 107339941 A CN107339941 A CN 107339941A CN 201710601334 A CN201710601334 A CN 201710601334A CN 107339941 A CN107339941 A CN 107339941A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
Abstract
The invention belongs to field of optical measuring technologies, specially a kind of precise displacement monitoring system based on double-frequency laser interference principle.Present system includes two-frequency laser, one quarter-wave plate is set on the output light path of the laser, spectroscope is placed after wave plate, spectroscopical light splitting surface and laser output light path are in 45 ° of angles, two polarization spectroscopes with output light path in 45 ° of angles are placed respectively in spectroscopical two-way output light direction, one piece of fixed standard level crossing is placed in the reflection direction of polarization spectroscope, one piece is placed with output light path in 45 ° of speculum in transmission direction, one piece of convex lens is placed in speculum output light direction, the centre of sphere of the concave lens focus position in standard sphere, there is a detector respectively in the tossing about also for reflected light path of polarization spectroscope.The present invention uses two-way two-frequency laser interferometer, realizes the accurate positioning in real time to moving component, improves the measurement accuracy using optical three-coordinate method measurement revolving body geometry parameter.
Description
Technical field
The invention belongs to field of optical measuring technologies, and in particular to precise displacement monitoring system.
Background technology
At present, in terms of for the dimensional measurement of revolving body workpieces, mainly there are three coordinate measuring machine, contourgraph, optical 3-dimensional
E measurement technology etc..Although the measurement accuracy of optic probe can reach tens nanometer either Nano grade, in many feelings
Under condition, because positioning and monitoring accuracy are inadequate, the measurement accuracy often micron dimension, or even worse provided using the gauge head.For
Accurate or even ultraprecise measurement is realized, either three coordinates either optical three-dimensional measurement technology, is required for sensing measurement
Device is accurately positioned, that is, needs accurately to monitor the position of sensor.
At present in commercialization measuring system, more typical positioning monitoring system structure is as shown in figure 1, wherein, may move
Standard flat mirror 4 represents the relative movement of alignment system and Z-direction, and removable standard flat mirror 5 represents alignment system and X-axis
What the relative movement in direction, multi-wavelength interference gauge head 3 and multi-wavelength interference gauge head 1 measured respectively is measuring system in Z axis and X-axis
Displacement variable on direction.Multi-wavelength interference gauge head 6 passes through the change of the distance between monitoring and standard cylindrical mirror 9, Ke Yijian
Survey the bounce of gauge head 8 in the course of the work.Multi-wavelength interference gauge head 6 and multi-wavelength interference gauge head 8 keep it is concentric and with rotation
The rotary shaft of turntable 7 intersects.The change in displacement measured by gauge head 1,3,6, it is possible to achieve to the position of moving component 7 and 8
Real-time accurate monitoring.But such system needs the high standard cylindrical mirror of precision and 3 multi-wavelength interference gauge heads, into
This is higher.
Laser has the advantages that high intensity, high directivity, high monochromaticity and high coherence, two-frequency laser interferometer be then with
Optical maser wavelength is known length, utilizes a kind of general length measurement device of Michelson systematic survey displacement.Double-frequency laser is done
Interferometer has the advantages that wide-measuring range, high accuracy, high-resolution and high speed, can be by joining with other moving components
It is dynamic, the measurement of the parameters such as length, angle, linearity and perpendicularity can be completed, is had extensively in ultra precise measurement and detection field
General application.For example the demarcation of precision machine tool, the demarcation of high-precision sensor, and workbench of lithography machine are accurately positioned.
The content of the invention
It is an object of the invention to provide a kind of solution of accurate monitoring moving component change in location-be based on double-frequency laser
The precise displacement monitoring system of principle of interference, to realize accurate, the real-time monitoring to moving component displacement, improve moving component
Positioning precision.
The basic thought of the present invention is exactly after LASER Light Source plus lastblock spectroscope, two-way light is separated, respectively as two
The light source of individual two-frequency laser interferometer, realize the real-time location monitoring to moving component in both direction.
The technical solution of the present invention is as follows：
A kind of displacement monitor, including a two-frequency laser, on the output light path of the laser set one four/
One wave plate, one piece of spectroscope is placed after quarter-wave plate, spectroscopical light splitting surface is with laser output light path in 45 ° of folders
Angle, two polarization spectroscopes with output light path in 45 ° of angles is placed respectively in spectroscopical two-way output light direction, inclined
Spectroscopical reflection direction that shakes places one piece of fixed standard level crossing, and one piece is placed with output light path in 45 ° in transmission direction
Speculum, one piece of convex lens is placed in speculum output light direction, concave lens focus position is being polarized in the centre of sphere of standard sphere
Tossing about also for spectroscopical reflected light path has a detector respectively.It is shown in Figure 2.
The present invention realizes the accurate positioning in real time to moving component, carried due to having used two-way two-frequency laser interferometer
The measurement accuracy using optical three-coordinate method measurement revolving body geometry parameter is risen.
Brief description of the drawings
Fig. 1 is the accurate monitoring system structure diagram of existing displacement.
Fig. 2 is the accurate monitoring system structure diagram of displacement of the present invention.
Embodiment
Please referring initially to Fig. 2, the precise displacement monitoring device structure based on double-frequency laser interference principle that Fig. 2 is the present invention is shown
It is intended to.This positioning monitoring system contains a two-frequency laser 7 and a fiber coupling colimated light system 1, two-frequency laser
Caused laser is the left-handed and extreme radiant of circle of two kinds of frequencies of dextrorotation, by a quarter-wave plate 2, can produce polarization
Two vertical bunch polarised lights of direction.On output light path set a spectroscope 3, the spectroscopical light splitting surface and laser it is defeated
Go out light path in 45 °.Light source can produce two-beam by spectroscope, respectively as transmitted light path orientation measurement light path and reflected light path
The light source of orientation measurement light path.Because both sides light path is full symmetric, labor is carried out to transmitted light path direction light path.
One polarization spectroscope 4 is set on output light path, and light splitting surface is in 45 ° with output light path.Because polarization direction is different,
Different polarization direction light separates, and is split up into two beam frequencies and isf 1 Withf 2 Two-beam.Light is wherein measured along dichroic mirror direction
Advance, the standard flat mirror 5 by relative motion, the light being reflected back generates Δ due to Doppler effectfFrequency shift (FS), warp
Cross light splitting surface and enter photodetector 12.Reference light advances along spectroscope transmission direction, and one piece is placed instead in light path direction of advance
Mirror is penetrated, speculum is in 45 ° with light path, and one piece of convex lens 14 is placed on optical path direction, and the focus of convex lens is in standard ball 15
The centre of sphere, reference light is irradiated on standard sphere and returned along original optical path, and being reflected into photoelectricity by the light splitting surface of polarization spectroscope 4 visits
Survey device 12. similarly, detector 13 can also collect corresponding information.
Due to the frequency response characteristic of photodetector, photodetector 12,13 can collect frequency for (f 1 - f 2
± Δf ) signal, wherein frequency variation ΔfIt can be calculated by Doppler shift formula and motion criteria speculum 5
Speed of related movementνRelational expression.Calculating the integration of run duration and movement velocity, can to obtain gauge head 16 relative
In the displacement variable of standard reflection mirror 5, by decoupling to the information in photodetector 12, gauge head 16 can be obtained in Z
Bounce on direction of principal axis.Similarly, photodetector 13 can obtain gauge head 16 relative to standard reflection mirror 8 in the X-axis direction
Displacement and the bounce of gauge head 16 at work in the X-axis.
Relative to the positioning monitoring system of the motor element of commercialization in Fig. 1, the present invention only needs two measured interference lights
Road, two photodetectors, in the case where not reducing measurement accuracy, has saved cost.For being accurately positioned for moving component
Provide good solution.
Claims (1)
1. a kind of precise displacement monitoring system based on double-frequency laser interference principle, it is characterised in that including a double-frequency laser
Device, a quarter-wave plate is set on the output light path of the laser, one piece of spectroscope is placed after quarter-wave plate,
Spectroscopical light splitting surface and laser output light path are in 45 ° of angles, are placed respectively in spectroscopical two-way output light direction
Two polarization spectroscopes with output light path in 45 ° of angles, place one piece of fixed standard in the reflection direction of polarization spectroscope and put down
Face mirror, one piece is placed with output light path in 45 ° of speculum in transmission direction, one piece of convex lens is placed in speculum output light direction
There is a spy mirror, concave lens focus position in the centre of sphere of standard sphere respectively in the tossing about also for reflected light path of polarization spectroscope
Survey device.
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| CN201710601334.8A CN107339941A (en) | 2017-07-21 | 2017-07-21 | A kind of precise displacement monitoring system based on double-frequency laser interference principle |
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| CN201710601334.8A CN107339941A (en) | 2017-07-21 | 2017-07-21 | A kind of precise displacement monitoring system based on double-frequency laser interference principle |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108180844A (en) * | 2017-12-21 | 2018-06-19 | 复旦大学 | A kind of multiple degrees of freedom precise displacement monitoring system based on double-frequency laser interference principle |
| CN109059777A (en) * | 2018-08-08 | 2018-12-21 | 中国十七冶集团有限公司 | A kind of method of fully-automatic laser interference displacement observation |
| CN110501063A (en) * | 2019-07-27 | 2019-11-26 | 复旦大学 | A kind of high-precision measuring method of high frequency standing wave distribution of amplitudes |
| JP2020165667A (en) * | 2019-03-28 | 2020-10-08 | 株式会社東京精密 | Shape measuring apparatus and control method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108180844A (en) * | 2017-12-21 | 2018-06-19 | 复旦大学 | A kind of multiple degrees of freedom precise displacement monitoring system based on double-frequency laser interference principle |
| CN109059777A (en) * | 2018-08-08 | 2018-12-21 | 中国十七冶集团有限公司 | A kind of method of fully-automatic laser interference displacement observation |
| JP2020165667A (en) * | 2019-03-28 | 2020-10-08 | 株式会社東京精密 | Shape measuring apparatus and control method thereof |
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| CN110501063A (en) * | 2019-07-27 | 2019-11-26 | 复旦大学 | A kind of high-precision measuring method of high frequency standing wave distribution of amplitudes |
| CN110501063B (en) * | 2019-07-27 | 2021-06-04 | 复旦大学 | High-precision measurement method for high-frequency standing wave amplitude distribution |
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Application publication date: 20171110 |