CN109579781B - High-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device and method - Google Patents
High-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device and method Download PDFInfo
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Abstract
The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device and method; the device consists of a light source, a spectroscope, an image sensor, a collimating mirror, a reference liquid level and a cooperative target; the method divides a measuring beam into two beams of measuring light which are vertical to each other through a cooperative target, the measuring light beams return after being reflected by a fixed plane reflector and the cooperative target respectively, images of the measuring light beams are formed on an image sensor respectively, and a pitch angle, a yaw angle and a roll angle of the cooperative target relative to an optical axis are calculated by utilizing the positions of the two images, so that the method has the capability of detecting the space three-dimensional corner of a measured object; because the invention adopts the optical lever amplification principle for the roll angle, which is consistent with the measurement principle of the pitch angle and the yaw angle, the invention has the technical advantages of high precision and large working distance for the three-dimensional angle measurement, and further has the advantage of increasing the measurement precision under the same working distance or increasing the working distance under the same measurement precision; the liquid level of the reference liquid is used as a zero-degree reference for measuring the space absolute angle of the object, so that the capacity of measuring the space absolute angle is realized. In addition, the cooperative target designed by the invention has the technical advantages of simple structure and low manufacturing cost.
Description
Technical Field
The invention belongs to the technical field of precision measurement, and particularly relates to a high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device and method.
Background
In the technical field of precision measurement, the field of optical engineering, the field of advanced scientific experiments and the field of high-end precision equipment manufacturing, a large-working-range and high-precision auto-collimation three-dimensional absolute angle measurement technology under a large working distance is urgently needed. It supports the development of technical and instrumental equipment in the above mentioned fields.
In the field of precision measurement technology and instruments, the autocollimator is combined with the circular grating, and can perform any line angle measurement; the autocollimation technology is combined with the polyhedral prism, so that the surface angle measurement and the roundness measurement can be performed; the maximum working distance is from several meters to hundreds of meters; the resolution was from 0.1 to 0.001 arcsec.
In the fields of optical engineering and advanced scientific experiments, an autocollimator is combined with two-dimensional mutually perpendicular circular gratings, so that the spatial angle can be measured; the position reference is formed by two paths of autocollimators, and the measurement of a space three-dimensional angle can be carried out. The angular operation ranges from tens of arcseconds to tens of angular minutes.
In the field of manufacturing of advanced scientific experimental devices and high-end precision equipment, the autocollimator can be used for measuring the angular rotation precision of the advanced scientific experimental device and the high-end precision equipment on the basis of rotary motion, and measuring the spatial linear precision of a linear motion reference and the parallelism and perpendicularity of every two motion references.
The auto-collimation technology has the advantages of non-contact, high measurement precision, convenience in use and the like, and is widely applied to the fields.
As shown in fig. 1, the conventional autocollimator includes a light source 1, a transmissive collimating mirror 4, a beam splitter 2, and an image sensor 3; the light beam emitted by the light source 1 is collimated into parallel light beams by the transmission type collimating lens 4 and then enters the reflecting surface of the object 51 to be measured; the light beam reflected from the reflecting surface of the object 51 is imaged by the image sensor 3. In this configuration, the light beam reflected from the surface of the object 51 carries only the spatial angle information of two axes of the object. Due to the limitation of the condition, when the device is used for measuring the spatial angle information of the measured object, the device cannot measure the angle information of the measured object rotating around the optical axis direction, and only can measure the angle information of other two axes.
The improved autocollimator based on the grating technology and the image processing technology can measure the spatial three-dimensional angle information of the measured object, but has the following two problems:
firstly, the measuring principle of the roll angle around the optical axis direction is different from the measuring principle of the pitch angle and the yaw angle which are perpendicular to the optical axis of the traditional autocollimator, so that the measuring precision of the three-dimensional angle of a measured object space is different, and the measuring precision of the roll angle around the optical axis direction based on the image processing technology is lower by one order of magnitude than the pitch angle and the yaw angle which are perpendicular to the optical axis;
the second, improved autocollimator needs to use the diffracted light of the grating to measure the angle information of the rotation angle around the optical axis, and the diffracted light has a larger divergence angle. When the instrument is operated under a large working distance condition, the measuring light cannot be collected by the image sensor. The improved autocollimator does not have the capability of measuring the space three-dimensional angle of the measured object under the working condition of large working distance.
The conventional autocollimator cannot measure spatial three-dimensional angular information of an object. The two problems show that the improved auto-collimation instrument has the capability of measuring the space three-dimensional angle information of an object, but the measurement precision of the roll angle in the axial direction is lower; and does not have the capability of measuring three-dimensional angles under the condition of large working distance.
Meanwhile, the traditional autocollimator and the improved autocollimator do not have absolute reference as a zero point of angle measurement, so the traditional autocollimator and the improved autocollimator do not have absolute angle measurement capability.
Disclosure of Invention
Compared with the traditional auto-collimation measuring device, the device and the method have the technical advantages that the three-dimensional absolute angle around the three-axis rotation angle in the space of the measured object can be measured simultaneously under the conditions of the same measurement precision and the same working distance; compared with other auto-collimation three-dimensional angle measuring devices, the device has the technical advantages of high precision and large working distance in roll angle measurement around the optical axis direction under the condition of simultaneously measuring the three-dimensional angle around the three-axis rotation angle in the measured object space, and has the capability of measuring the three-dimensional absolute angle around the three-axis rotation angle in the measured object space.
The purpose of the invention is realized as follows:
a high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device comprises a light source, a spectroscope, an image sensor, a transmission type collimating mirror, a reference liquid level and a cooperative target; the light beam emitted by the light source is collimated into a parallel light beam by the transmission type collimating lens. One path of light passes through the spectroscope in the cooperative target and is incident on the plane reflector in the cooperative target, and the reflected light beam is collected and imaged by the image sensor after being transmitted by the spectroscope in the cooperative target; the other path is reflected by a spectroscope in the cooperative target and is incident on the liquid level of the reference liquid, and the reflected light beam is collected and imaged by an image sensor after being reflected by the spectroscope in the cooperative target;
the cooperative target comprises a spectroscope and a plane reflector, and is arranged on the measuring surface of the measured object; the liquid level of the reference liquid is independent of the cooperative target, is not connected with the cooperative target and the measured object, is fixed on the ground, and is parallel to the plane of the ground. When the measured object rotates in a three-dimensional space angle, the cooperative target rotates in the same three-dimensional space angle with the measured object, and the liquid level of the reference liquid and other parts of the measuring device do not move.
A high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring method realized on the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device comprises the following steps:
step a, pouring the reference liquid into a container fixed on the ground to form the liquid level of the reference liquid. Fixing the combined target on the surface of a measured object and above the liquid level of the reference liquid;
b, lighting a light source, adjusting the positions of the object to be measured and the combined target, enabling two light spots received by the image sensor to be positioned at the central position of the image sensor, enabling the lower surface of the combined target to be parallel to the liquid level of the reference liquid, fixing the object to be measured and the combined target, and defining the three-axis rotation angle as the reference zero degree;
step c, the combined target rotates three-dimensionally along with the object to be measured, the image sensor outputs displacement values of two light spots, the position of the first light spot from the center of the image sensor is decomposed into S1 and S2, and the position of the other light spot from the center of the image sensor is S3;
d, calculating beta and gamma according to the displacement S1 and S2 of the first light spot and the S1-f-tan (2 beta) and the S2-f-tan (2 gamma), wherein the beta and the gamma are absolute angles of clockwise rotation of the measured object around the y axis and the z axis;
e, calculating to obtain theta according to f · tan (theta) by using the displacement S3 of the other light spot and according to S3, where theta is an included angle between the return light of the light beam reflected by the beam splitter and the optical axis;
and f, calculating according to alpha-G (theta, beta and gamma), to obtain alpha, wherein alpha is an absolute angle of the object to be detected rotating clockwise around the x axis, and G represents a function. And finally, obtaining absolute angles alpha, beta and gamma of the measured object rotating clockwise around the axes x, y and z.
Has the advantages that:
compared with the traditional self-aligning angle measuring device, the plane mirror target is replaced by the cooperation target and the reference liquid level to serve as an object space three-dimensional corner detection unit, and the reference liquid level is used as a zero-degree reference for measuring the object space three-dimensional absolute angle. The structure is arranged to divide the measuring beam into two parts, wherein one part carries the absolute angle information of the pitch angle and the yaw angle of the measured object after being reflected by the plane reflector in the cooperative target, and the other part carries the absolute roll angle information of the measured object rotating around the optical axis direction after being reflected by the liquid level of the reference liquid. The two paths of measuring light are collected by the sensor, so that not only the information of the pitch angle and the absolute rotation angle of the yaw angle of the object is obtained, but also the absolute angle information of the roll angle of the object is obtained, and the instrument device has the three-dimensional absolute angle measuring capability of measuring the roll angle of the object, the pitch angle of the vertical optical axis and the absolute rotation angle of the yaw angle; the measuring principle of the absolute rotation angle of the roll angle is consistent with the principle of measuring the pitch angle and the yaw angle of the traditional autocollimator, and the measuring precision of the device is higher than that of a device adopting grating and image processing technology by using the amplification effect of an optical lever; the device does not generate diffraction light caused by grating diffraction effect, the angle deviation of the measured return light and the original light beam is small, and the device has larger working distance under the same measuring range. Therefore, compared with the traditional self-aligning angle measuring device, the device has the technical advantages that the angle measuring dimension is increased under the condition of the same working distance and the same measuring precision, and the absolute angle measurement is realized; compared with the improved autocollimator based on the grating technology and the image processing technology, the method has the technical advantages of large working distance, high precision and realization of absolute angle measurement under the same angle measurement dimension.
In addition, the invention has the following technical advantages:
the method comprises the following steps of firstly, selecting a combined target consisting of a spectroscope and a plane reflector, wherein the combined target has small volume and weight, and is arranged on the surface of a measured object without influencing the spatial three-dimensional angular motion of the measured object; and the liquid level of the reference liquid is used as a reflecting surface, so that compared with special targets in other auto-collimation three-dimensional angle measuring devices, the device is simple in structure and easy to process and manufacture.
Secondly, the liquid level of the reference liquid is selected as a third-dimensional angle sensing device, the structure is simple, and the sensing principle of the device is basically consistent with that of the device around two axes vertical to the optical axis, so that the rotation angles of the device around the optical axis and the other two axes vertical to the two axes of the optical axis keep high measurement accuracy of the same magnitude;
thirdly, the spectroscope in the invention is used as a part of the combined target to generate rotation of a space three-dimensional angle together with the measured object, so that the measurement precision of the absolute rotation angle (yaw angle) around one axis vertical to the optical axis is doubled.
Drawings
Fig. 1 is a schematic structural view of a conventional self-collimation angle measuring apparatus.
Fig. 2 is a schematic structural diagram of a first embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the present invention.
Fig. 3 is a schematic structural diagram of a second embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the present invention.
Fig. 4 is a schematic structural diagram of a third embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the present invention.
Fig. 5 is a schematic structural diagram of a fourth embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the present invention.
In the figure: the device comprises a light source 1, a spectroscope 2, an image sensor 3, a transmission collimating mirror 4, a cooperative target 5, a plane reflecting mirror 51, a spectroscope 52, a polarizing spectroscope 53, a dichroic mirror 54, a reference liquid level 6, a color image sensor 7RGB, a polarizing spectroscope 8, an image sensor 9, a polarizer 10, a red light source 11, a green light source 12, a dichroic mirror 13 and a spectroscope 14.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
The following describes in further detail specific embodiments of the present invention with reference to the accompanying drawings.
Detailed description of the preferred embodiment
The embodiment is an embodiment of a high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device.
The high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the embodiment has a schematic structural diagram as shown in fig. 2. The angle measuring device comprises a light source 1, a spectroscope 2, an image sensor 3, a transmission type collimating mirror 4, a cooperative target 5 (comprising a spectroscope 52 and a plane mirror 51) and a reference liquid level 6.
The light beam emitted by the light source 1 is collimated into parallel light beams by the transmission type collimating lens 4 and then is incident on the spectroscope 52 in the cooperative target 5; one path of light beam passing through the spectroscope 52 is reflected by the plane reflector 51 in the combined target 5, returns along the original path and is collected and imaged by the image sensor 3; and the other path of light beam is reflected by the spectroscope 52, then is incident on the surface of the liquid level 6 of the reference liquid, is reflected by the liquid level 6 of the reference liquid, returns along the original path, and is collected and imaged by the image sensor 3.
The spectroscope 2 is arranged between the light source 1 and the transmission type collimating mirror 4, and the image sensor 3 is arranged at the focal plane of the transmission type collimating mirror 4 and is conjugated with the position of the light source 1; two paths of light beams returning from the cooperative target 5 are transmitted by the transmission type collimating mirror 4 and reflected by the spectroscope 2 in sequence and are collected and imaged by the image sensor 3;
the cooperative target 5 includes a spectroscope 52 and a plane mirror 51, which is mounted to a measurement surface of an object to be measured; and the reference liquid level 6 is independent of the cooperative target, is not connected with the cooperative target 5 and the measured object, is fixed on the ground, and the reference liquid level 6 is parallel to the plane of the ground. When the measured object rotates in a three-dimensional angle, the cooperative target 5 rotates in the same three-dimensional angle with the measured object, and the liquid level 6 of the reference liquid and other parts of the measuring device do not move. The liquid level 6 of the reference liquid is used as a zero degree reference for measuring the spatial absolute angle of the object, when the measured object does not generate spatial three-dimensional angle rotation change, the spatial three-dimensional absolute angle of the measured object is zero, and the imaging point of the image sensor 3 is imaged at the center position of the image surface.
The measurement principle is as follows:
if the spatial three-dimensional absolute rotation angle of the measured object is measured, firstly, a spatial coordinate system of the three-dimensional rotation angle of the measured object needs to be defined: setting the optical axis direction as an x-axis, the normal direction to the liquid level 6 of the reference liquid as a y-axis and the outward direction vertical to the surface of the cooperation target 5 as a z-axis; and defining the spatial three-dimensional rotation angles of the measured object as alpha, beta and gamma which rotate around an x axis, a y axis and a z axis in the clockwise direction respectively. The cooperative target 5, including the spectroscope 52 and the plane mirror 51, is fixed on the surface of the object to be measured, so that the spatial three-dimensional angle change of the cooperative target 5 is the spatial three-dimensional angle change of the object to be measured.
Next, the reference liquid surface 6 is not connected to the cooperative target 5, and is fixed to the ground. If the reference liquid level 6 is used as a zero-degree reference for measuring the object space three-dimensional absolute angle, when the object to be measured does not rotate by the space three-dimensional angle, the space three-dimensional absolute angles a, β, and γ of the object to be measured are all 0 degree.
When an object to be measured rotates clockwise by angles alpha, beta and gamma around reference zero positions of an x axis, a y axis and a z axis respectively, so that spatial three-dimensional angle rotation is generated, light beams incident on the plane reflecting mirror 51 in the cooperative target are transmitted through the beam splitter 52, and the light beams reflected by the plane reflecting mirror 51 and the reference zero positions generate deflection of angles 2 beta and 2 gamma due to the fact that the plane mirror 51 rotates with the object to be measured by the spatial three-dimensional angle rotation. Consistent with the principle of the conventional autocollimator measurement, the light beam is converged on the image sensor 3, and the light beam spot and the central position of the image sensor generate displacements S1 and S2, respectively.
And satisfies the following relationship, S1 ═ f · tan (2 β), S2 ═ f · tan (2 γ), and f is the focal length of the transmissive collimator lens 4.
Therefore, the absolute angles β and γ of the rotation of the object 7 around the y-axis and the z-axis can be calculated according to the displacements S1 and S2 between the light spot on the image sensor 3 and the center position of the image sensor.
The light beam incident on the liquid level 6 of the reference liquid is reflected by the beam splitter 52, and since the beam splitter 52 rotates with the object to be measured in a three-dimensional angle, the light beam reflected by the liquid level 6 of the reference liquid is reflected by the beam splitter 52 and deflected at an angle θ with the optical axis, the light beam is converged on the image sensor 3, and the light beam spot and the central position of the image sensor generate a displacement S3.
And satisfies the following relationship, S3 ═ f · tan (θ), where f is the focal length of the transmissive collimator lens 4.
From the spatial geometry, θ ═ F (α, β, γ), similarly, α ═ G (θ, β, γ), F, G represent two functions, respectively.
Therefore, the spatial included angle theta between the light beam and the original light beam can be calculated according to the displacement S3 between the light spot on the image sensor 3 and the central position of the image sensor; then, according to the formula α ═ G (θ, β, γ) and the β and γ values obtained before, the angle α can be solved, so that the absolute angles α, β, and γ of the object 7 rotating around the x axis, the y axis, and the z axis are obtained, and the spatial three-dimensional absolute angle information of the object is obtained.
The embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring method comprises the following steps of:
step a, pouring the reference liquid into a container fixed on the ground to form a reference liquid level 6. Fixing the combined target 5 on the surface of the measured object to enable the combined target to be positioned above the liquid level 6 of the reference liquid;
b, lighting the light source 1, adjusting the positions of the object to be measured and the combined target 5, enabling the two light spots received by the image sensor 3 to be positioned at the central position of the image sensor, enabling the lower surface of the combined target 5 to be parallel to the liquid level 6 of the reference liquid, fixing the object to be measured and the combined target 5, and defining the three-axis rotation angle as a reference zero degree;
step c, the combined target 5 rotates in three dimensions along with the object to be measured, the image sensor 3 outputs displacement values of two light spots, wherein the distance from the first light spot to the center of the image sensor is divided into S1 and S2, and the distance from the other light spot to the center of the image sensor is S3;
d, calculating beta and gamma according to the displacement S1 and S2 of the first light spot and the S1-f-tan (2 beta) and the S2-f-tan (2 gamma), wherein the beta and the gamma are absolute angles of clockwise rotation of the measured object around the y axis and the z axis;
e, calculating to obtain theta according to f · tan (theta) by using the displacement S3 of the other light spot and according to S3, where theta is an included angle between the return light of the light beam reflected by the beam splitter and the optical axis;
and f, calculating according to alpha-G (theta, beta and gamma), to obtain alpha, wherein alpha is an absolute angle of the object to be detected rotating clockwise around the x axis, and G represents a function. And finally, obtaining absolute angles alpha, beta and gamma of the measured object rotating clockwise around the axes x, y and z.
Detailed description of the invention
The embodiment is an embodiment of a high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device.
The high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the embodiment has a schematic structural diagram as shown in fig. 3. On the basis of the first embodiment, the present embodiment replaces the beam splitter 52 in the cooperative target 5 with the polarizing beam splitter 53; a polarizing spectroscope 8 is added between the spectroscope 2 and the image sensor 3, and an image sensor 9 is arranged at the other emergent surface of the polarizing spectroscope 8; a polarizer 10 is added between the light source 1 and the spectroscope 2.
The embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring method comprises the following steps of:
step a, pouring the reference liquid into a container fixed on the ground to form a reference liquid level 6. Fixing the combined target 5 on the surface of the measured object to enable the combined target to be positioned above the liquid level 6 of the reference liquid;
b, lighting the light source 1, adjusting the positions of the object to be measured and the combined target 5, enabling the two light spots received by the image sensor 3 and the image sensor 9 to be positioned at the central position of the image sensor, enabling the lower surface of the combined target 5 to be parallel to the liquid level 6 of the reference liquid, fixing the object to be measured and the combined target 5, and defining the three-axis rotation angle as a reference zero degree;
c, observing the light spot brightness degree of the first image sensor 3 and the second image sensor 9, and adjusting the rotation angle of the polarizer 10 to enable the light intensity received by the two image sensors to be consistent;
d, the combined target 5 rotates in a three-dimensional mode along with the object to be measured, the image sensor 3 outputs displacement values of light spots of the light beams reflected by the plane reflector 51, the distance between the light spots and the center of the image sensor is divided into S1 and S2, the image sensor 9 outputs displacement values of light spots of the light beams reflected by the liquid level 6 of the reference liquid, and the distance between the light spots and the center of the image sensor is S3;
step e, calculating and obtaining β and γ according to S1 ═ f · tan (2 β) and S2 ═ f · tan (2 γ) by using the displacements S1, S2 of the light spot of the first image sensor 3, where β and γ are absolute angles of the measured object rotating clockwise around the y and z axes;
step f, calculating and obtaining theta according to f · tan (theta) as the result of S3 by using the displacement S3 of the light spot of the second image sensor 9, where theta is an included angle between the return light of one light beam reflected by the beam splitter and the optical axis;
and G, calculating according to the angle alpha (theta, beta, gamma), so as to obtain alpha, wherein the angle alpha is an angle of the object to be detected rotating clockwise around the x axis, and G represents a function. And finally, obtaining absolute angles alpha, beta and gamma of the measured object rotating clockwise around the axes x, y and z.
The innovation point of the invention is that the cooperation target 5 is formed by utilizing the polarization spectroscope 53, and the polarization spectroscope 8 is added at the measuring end. The structure gives different polarization to the two measuring beams through the polarizing beam splitter 53, and the two measuring beams are separated through the polarizing beam splitter 8 and are respectively received by the image sensor 3 and the image sensor 9. Therefore, the problem of identifying and distinguishing two light spots received by the image sensor is solved, the image processing program of the image sensor is simplified, and the requirements on the image processing software technology are reduced; meanwhile, the data processing speed is improved, and therefore the frequency response of the system is improved.
Secondly, the polarizer 10 is used for adjusting the light intensity of the light spots received by the image sensor 3 and the image sensor 9, the problem that the light intensity of the two measuring light beams cannot be adjusted due to the determination of light path elements is solved, and the problem that the light intensity of the light spots in the two paths is too weak or too strong to cause unmeasurable light spots is avoided.
Detailed description of the preferred embodiment
The embodiment is an embodiment of a high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device.
The high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the embodiment has a schematic structural diagram as shown in fig. 4. On the basis of the first embodiment, the present embodiment replaces the dichroic mirror 52 in the cooperative target 5 with the dichroic mirror 54; the image sensor 3 is changed to an RGB color image sensor 7; the light source 1 is replaced by a red light source 11 and a green light source 12, and a spectroscope 14 is added between the spectroscope 2 and the red light source 11 and the green light source 12.
The embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring method comprises the following steps of:
step a, pouring the reference liquid into a container fixed on the ground to form a reference liquid level 6. Fixing the combined target 5 on the surface of the measured object to enable the combined target to be positioned above the liquid level 6 of the reference liquid;
b, lightening a red light source 11 and a green light source 12, adjusting the positions of the object to be measured and the combined target 5, enabling two red and green light spots received by an RGB color image sensor 7 to be positioned at the center position of the image sensor, enabling the lower surface of the combined target 5 to be parallel to the liquid level 6 of the reference liquid, fixing the object to be measured and the combined target 5, and defining the three-axis rotation angle as the reference zero degree;
step c, the combined target 5 rotates three-dimensionally along with the object to be measured, the RGB color image sensor 7 outputs the displacement value of the red light spot of the light beam reflected by the plane reflector 51, wherein the distance between the light spot and the center of the image sensor is divided into S1 and S2, and simultaneously the RGB color image sensor 7 outputs the displacement value of the green light spot of the light beam reflected by the liquid level 6 of the reference liquid, wherein the distance between the light spot and the center of the image sensor is S3;
d, calculating beta and gamma according to the displacements S1 and S2 of the red light spot and the displacements S1-f-tan (2 beta) and S2-f-tan (2 gamma), wherein the beta and the gamma are absolute angles of clockwise rotation of the measured object around the y axis and the z axis;
e, calculating and obtaining theta according to f · tan (theta) as the result of the displacement S3 of the green light spot and S3, where theta is an included angle between the return light of the light beam reflected by the beam splitter and the optical axis;
and f, calculating according to alpha-G (theta, beta and gamma), to obtain alpha, wherein alpha is the angle of the object to be detected rotating clockwise around the x axis, and G represents a function. And finally, obtaining absolute angles alpha, beta and gamma of the measured object rotating clockwise around the axes x, y and z.
The innovation of the present invention is that the cooperative target 5 is composed by using the dichroic mirror 54. The structure endows two paths of measuring beams with different wavelength properties through a dichroic mirror, and simultaneously receives green and red light beam light spots by taking an RGB color image sensor as a sensor. Therefore, the problem of identifying and distinguishing two light spots received by the image sensor is solved, the image processing program of the image sensor is simplified, and the requirements on the image processing software technology are reduced; meanwhile, the data processing speed is improved, and therefore the frequency response of the system is improved.
Detailed description of the invention
The embodiment is an embodiment of a high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device.
The high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device of the embodiment has a schematic structural diagram as shown in fig. 5. On the basis of the third specific embodiment, this embodiment replaces the RGB color image sensor 7 with the dichroic mirror 13, the image sensor 3, and the image sensor 9;
the embodiment of the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring method comprises the following steps of:
step a, pouring the reference liquid into a container fixed on the ground to form a reference liquid level 6. Fixing the combined target 5 on the surface of the measured object to enable the combined target to be positioned above the liquid level 6 of the reference liquid;
b, lightening a red light source 11 and a green light source 12, adjusting the positions of the object to be measured and the combined target 5, enabling two red and green light spots received by an image sensor 3 and an image sensor 9 to be positioned at the center position of the image sensor, enabling the lower surface of the combined target 5 to be parallel to the liquid level 6 of the reference liquid, fixing the object to be measured and the combined target 5, and defining the three-axis rotation angle as the reference zero degree;
step c, the combined target 5 rotates in three dimensions along with the object to be measured, the image sensor 3 outputs the displacement value of the red light spot of the light beam reflected by the plane reflector 51, wherein the distance between the light spot and the center of the image sensor is divided into S1 and S2, the image sensor 9 outputs the displacement value of the green light spot of the light beam reflected by the liquid level 6 of the reference liquid, and the distance between the light spot and the center of the image sensor is S3;
step d, calculating and obtaining β and γ according to S1 ═ f · tan (2 β) and S2 ═ f · tan (2 γ) by using the displacements S1 and S2 of the light spot acquired by the first image sensor 3, where β and γ are absolute angles of clockwise rotation of the measured object around the y and z axes;
step e, calculating to obtain θ according to S3 ═ f · tan (θ) by using the displacement S3 of the light spot acquired by the second image sensor 9, where θ is an included angle between the return light of the light beam reflected by the beam splitter and the optical axis;
and f, calculating according to alpha-G (theta, beta and gamma), to obtain alpha, wherein alpha is the angle of the object to be detected rotating clockwise around the x axis, and G represents a function. And finally, obtaining absolute angles alpha, beta and gamma of the measured object rotating clockwise around the axes x, y and z.
The improvement of the embodiment is that the first image sensor 3 and the second image sensor 9 are used for replacing the RGB color image sensor 7, and the dichroic mirror 13 is used for distinguishing two paths of red light and green light measuring beams with different wavelength components, so that the problem of distinguishing and distinguishing two light spots received by the image sensor is solved, the image processing program of the image sensor is simplified, and the requirements on the image processing software technology are reduced; meanwhile, the data processing speed is improved, and therefore the frequency response of the system is improved.
Claims (4)
1. The high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device is characterized by comprising a light source (1), a first spectroscope (2), a first image sensor (3), a transmission type collimator lens (4), a cooperation target (5) and a reference liquid level (6), wherein the cooperation target (5) consists of a plane reflector (51) and a second spectroscope (52); the light beam emitted by the light source (1) is collimated into parallel light beams by the transmission type collimating lens (4), and then is incident on the second spectroscope (52) in the cooperative target (5); one path of light beam penetrating through the second spectroscope (52) is reflected by a plane reflector (51) in the combined target (5), returns along the original path and is collected and imaged by the first image sensor (3); the other path of light beam is reflected by a second beam splitter (52), then is incident on the surface of the liquid level (6) of the reference liquid, is reflected by the liquid level (6) of the reference liquid, returns along the original path, and is collected and imaged by a first image sensor (3);
the first spectroscope (2) is arranged between the light source (1) and the transmission type collimating mirror (4), and the first image sensor (3) is arranged at the focal plane of the transmission type collimating mirror (4) and is conjugated with the position of the light source (1);
the cooperative target (5) includes a second spectroscope (52) and a planar mirror (51) mounted to a measurement surface of an object to be measured; the liquid level (6) of the reference liquid is independent of the cooperative target (5), is not connected with the cooperative target (5) and the object to be detected, is fixed on the ground, and the liquid level (6) of the reference liquid is parallel to the plane of the ground; when the measured object rotates in a three-dimensional space angle, the cooperative target (5) rotates in the same three-dimensional space angle along with the measured object, and the liquid level (6) of the reference liquid and other parts of the measuring device do not move; when the measured object does not rotate in a spatial three-dimensional angle, point images formed by the first image sensor (3) are all located at the center of an image plane, and the spatial three-dimensional absolute angle is zero;
the device also comprises a first polarization spectroscope (53), a second polarization spectroscope (8), a second image sensor (9) and a polarizer (10);
the first polarization beam splitter (53) is arranged in front of the plane reflector (51) to split the measuring beam into two beams of measuring light with mutually vertical polarization states;
the polarizer (10) enables the light source (1) to be linearly polarized and divided into two beams of measuring light by the first polarization spectroscope (53); the polarization direction of one measuring light beam reflected by the first polarization beam splitter (53) is just vertical to the polarization direction of the second measuring light beam transmitted by the first polarization beam splitter (53);
the first image sensor (3) and the second image sensor (9) are positioned at the focal plane of the transmission type collimating mirror (4) and conjugate with the light source (1).
2. A high precision large working distance auto-collimation three-dimensional absolute angle measuring device according to claim 1, characterized by further comprising a first dichroic mirror (54), an RGB color image sensor (7), a red light source (11), a green light source (12) and a third dichroic mirror (14);
the first dichroic mirror (54) is arranged in front of the plane reflecting mirror (51) to divide the measuring light beam into two measuring lights with different light wave wavelengths; the third spectroscope (14) is arranged among the red light source (11), the green light source (12) and the first spectroscope (2) and combines the red light source (11) and the green light source (12);
the RGB color image sensor (7) is positioned at the focal plane of the transmission type collimating mirror (4) and is conjugated with the red light source (11) and the green light source (12);
or
The RGB color image sensor (7) is exchangeable for a second dichroic mirror (13), a first image sensor (3) and a second image sensor (9); the first image sensor (3) and the second image sensor (9) are both positioned at the focal plane of the transmission type collimating mirror (4), and the positions of the first image sensor and the second image sensor are conjugated with the red light source (11) and the green light source (12).
3. A high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring method implemented on the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device as claimed in claim 1, characterized by comprising the following steps:
step a, pouring reference liquid into a container fixed on the ground to form a reference liquid level (6); fixing the combined target (5) on the surface of the measured object to enable the combined target to be positioned above the liquid level (6) of the reference liquid;
b, lighting the light source (1), adjusting the positions of the object to be measured and the combined target (5), enabling two light spots received by the first image sensor (3) and the second image sensor (9) to be positioned at the center positions of the image sensors, enabling the lower surface of the combined target (5) to be parallel to the liquid level (6) of the reference liquid, fixing the object to be measured and the combined target (5), and defining the rotation angle of three shafts as zero degree of reference at the moment;
c, observing the light spot brightness degree of the first image sensor (3) and the second image sensor (9), and adjusting the rotation angle of the polarizer (10) to enable the light intensity received by the two image sensors to be consistent;
d, the combined target (5) rotates in a three-dimensional space along with the object to be measured, the first image sensor (3) outputs displacement values of light spots of the light beam reflected by the plane reflector (51), the distance between the light spots and the center of the first image sensor is divided into S1 and S2, the second image sensor (9) outputs displacement values of the light spots of the light beam reflected by the liquid level (6) of the reference liquid, and the distance between the light spots and the center of the second image sensor is S3;
step e, calculating beta and gamma according to S1 and S2 by using the displacements S1 and S2 of the light spot of the first image sensor (3), wherein the beta and the gamma are absolute angles of the measured object rotating clockwise around the y axis and the z axis;
step f, calculating and obtaining theta according to the displacement S3 of the light spot of the second image sensor (9) and f · tan (theta) after S3 is adopted, wherein theta is an included angle between the return light of the light beam reflected by the first polarizing beam splitter and the optical axis;
step G, calculating according to alpha ═ G (theta, beta, gamma) to obtain alpha, wherein alpha is an angle of clockwise rotation of the object to be detected around an x axis, and G represents a function; and finally, obtaining absolute angles alpha, beta and gamma of the measured object rotating clockwise around the axes x, y and z.
4. A high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring method implemented on the high-precision large-working-distance auto-collimation three-dimensional absolute angle measuring device as claimed in claim 2, characterized by comprising the following steps:
step a, pouring reference liquid into a container fixed on the ground to form a reference liquid level (6); fixing the combined target (5) on the surface of the measured object to enable the combined target to be positioned above the liquid level (6) of the reference liquid;
b, lightening a red light source (11) and a green light source (12), adjusting the positions of the object to be measured and the combined target (5), enabling two red and green light spots received by an RGB color image sensor (7) to be positioned at the center position of the image sensor, enabling the lower surface of the combined target (5) to be parallel to the liquid level (6) of the reference liquid, fixing the object to be measured and the combined target (5), and defining the three-axis rotation angle as the reference zero degree;
c, the combined target (5) rotates in a three-dimensional mode along with the measured object, the RGB color image sensor (7) outputs the displacement value of the red light spot of the light beam reflected by the plane reflector (51), the distance between the red light spot and the center of the image sensor is divided into S1 and S2, meanwhile, the RGB color image sensor (7) outputs the displacement value of the green light spot of the light beam reflected by the liquid level (6) of the reference liquid, and the distance between the green light spot and the center of the image sensor is S3;
or
Step c, the measured object of the combined target (5) generates spatial three-dimensional rotation, the first image sensor (3) outputs the displacement value of the red light spot of the light beam reflected by the plane reflector (51), wherein the distance between the red light spot and the center of the first image sensor is decomposed into S1 and S2, the second image sensor (9) outputs the displacement value of the green light spot of the light beam reflected by the fixed plane reflector (6), and the distance between the green light spot and the center of the second image sensor is S3;
d, calculating beta and gamma according to the displacements S1 and S2 of the red light spot and the displacements S1-f-tan (2 beta) and S2-f-tan (2 gamma), wherein the beta and the gamma are absolute angles of clockwise rotation of the measured object around the y axis and the z axis;
e, calculating to obtain theta according to f · tan (theta) after S3 by using the displacement S3 of the green light spot, wherein theta is an included angle between the return light of the light beam reflected by the first dichroic mirror and the optical axis;
step f, calculating alpha according to alpha ═ G (theta, beta, gamma), wherein alpha is an angle of the object to be detected rotating clockwise around the x axis, and G represents a function; and finally, obtaining absolute angles alpha, beta and gamma of the measured object rotating clockwise around the axes x, y and z.
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