CN106017364A - High-accuracy laser large-working-distance auto-collimation device and method - Google Patents
High-accuracy laser large-working-distance auto-collimation device and method Download PDFInfo
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- CN106017364A CN106017364A CN201610639132.8A CN201610639132A CN106017364A CN 106017364 A CN106017364 A CN 106017364A CN 201610639132 A CN201610639132 A CN 201610639132A CN 106017364 A CN106017364 A CN 106017364A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
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Abstract
The invention belongs to the technical field of precise measuring and the field of optical engineering, and particularly relates to a high-accuracy laser large-working-distance auto-collimation device and method. The device is composed of a laser source, a collimation lens, a reflector and a feedback imaging system. The method includes the steps that the reflector is adjusted, a reflected laser beam returns to the center of the image surface of the feedback imaging system, and then angle changes of the surface of a measured object are obtained through an angle deflection measuring device on the reflector. As the reflector is additionally arranged on a traditional auto-collimation angle measuring system, the problem that as lasers reflected by a measured object deviate from the measuring system, measuring can not be carried out is solved, and then the technical advantage that the auto-collimation working range is expanded with the same working distance or the working distance is increased within the same auto-collimation working range is achieved; in addition, due to the specific design of the collimation lens, the feedback imaging system, the reflector and the like, the device and method have the advantages that the structure is simple, the manufacturing cost is low, the stability of the measuring environment can be monitored, and rapid measuring can be achieved.
Description
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to a kind of high-precision laser big working distance autocollimatic
Straight apparatus and method.
Background technology
In Technology of Precision Measurement field, optical engineering field, most advanced branches of science experiment field and high-end precision assembly manufacture field,
Urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It support above-mentioned art with
The development of instrument and equipment.
At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angular surveying；
Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured；Maximum functional distance is from several meters
To rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
Field is tested in optical engineering field and the most advanced branches of science, two Circular gratings combinations that Laser Autocollimator is the most vertical with bidimensional,
The measurement of space angle can be carried out；Formed position reference by two-way Laser Autocollimator, optical axis included angle or flat two-by-two can be carried out
The measurement of row.Angle working range tens rads to tens jiaos points.
Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure the most advanced branches of science real
Experiment device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line precision and two of linear motion benchmark
The depth of parallelism of two motion benchmark and perpendicularity.
Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, have extensively should in above-mentioned field
With.
Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system 6；
The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From
The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 table
The nearly backtracking of light beam of face reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This is the most former
The condition that road returns limits so that the following two aspect shortcomings of this system existence:
The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can cause
The entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and micro-angular surveying；
The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection optical axis with
Autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then causes
Auto-collimation and micro-angular surveying cannot be realized.
Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.
Summary of the invention
For two problems existing for tradition autocollimator, the invention discloses a kind of high-precision laser big working distance auto-collimation dress
Put and method, compared with tradition autocollimator, have under identical operating distance, dramatically increase auto-collimation working range, or in phase
With the technical advantage dramatically increasing operating distance under auto-collimation working range.
The object of the present invention is achieved like this:
A kind of high-precision laser big working distance autocollimation, including light source, transmission-type collimating mirror, reflecting mirror and feed back into
As system, described reflecting mirror is provided with angle adjustment measurement apparatus；The light beam of light source outgoing, collimates through transmission-type collimating mirror
After becoming collimated light beam, then reflected by reflecting mirror, incide the surface of measured object；From the light beam of measured object surface reflection, then pass through
After reflecting mirror reflection, feedback imaging system gather imaging；
Described feedback imaging system is the one in following two form:
The first, it is arranged between light source and transmission-type collimating mirror, including the first feedback spectroscope with to be arranged on transmission-type collimating mirror burnt
Imageing sensor at Dian；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively collimate through transmission-type
Mirror projection, first feedback dichroic mirror, gathered imaging by imageing sensor；Under conditions of measured object surface is vertical with optical axis,
Imageing sensor is become a picture in image plane center position；
The second, it is arranged between transmission-type collimating mirror and reflecting mirror, including the first feedback spectroscope, the first feedback object lens and setting
Imageing sensor at transmission-type collimation mirror foci；From the light beam of measured object surface reflection, then after reflecting mirror reflects, first
After through first feed back dichroic mirror, first feedback object lens transmission, gathered imaging by imageing sensor；Measured object surface with
Under conditions of optical axis is vertical, imageing sensor is become a picture in image plane center position；
Described angle adjustment measurement apparatus include arranging angular adjustment apparatus on the mirror, angular deflection measurement apparatus and
Universal drive shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measurement apparatus include the first sheet metal,
Second sheet metal, the first capacitance sensor of corresponding first sheet metal position and the second electric capacity of corresponding second sheet metal position
Sensor；First driver, the first sheet metal and universal drive shaft point-blank, the second driver, the second sheet metal,
And universal drive shaft is point-blank, and the line of the first driver second driver vertical with the line of universal drive shaft and universal drive shaft；
Angular deflection measurement apparatus also includes common light path autocollimator.
A kind of high-precision laser big working distance auto-collimation method realized on above-mentioned high-precision laser big working distance autocollimation,
Comprise the following steps:
Step a, some bright light source, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step b, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return to picture
Center, face；
Step c, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorObtained angle changes delta θ 2 of reflecting mirror by common light path autocollimator simultaneously
WithAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
Above-mentioned high-precision laser big working distance autocollimation, also includes Wavefront detecting system and wavefront compensation system；
Described Wavefront detecting system is visited before including Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation waves
Survey at least one in device；Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation wave front detector
Being arranged on the spectroscopical reflected light path of Wavefront detecting, reflecting mirror deformation wave front detector is arranged on the secondary reflection light path of reflecting mirror
On；
Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator；Compensate light
The light beam of source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then is modulated by transmission liquid crystal spatial light modulator, enters
It is mapped on Wavefront detecting spectroscope.
A kind of high-precision laser big working distance auto-collimation method realized on above-mentioned high-precision laser big working distance autocollimation,
Require that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air disturbance；
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return to image planes
Center；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorObtained angle changes delta θ 2 of reflecting mirror by common light path autocollimator simultaneously
WithAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
A kind of high-precision laser big working distance auto-collimation method realized on above-mentioned high-precision laser big working distance autocollimation,
Require that Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air disturbance
With reflecting mirror deformation；
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return to image planes
Center；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorObtained angle changes delta θ 2 of reflecting mirror by common light path autocollimator simultaneously
WithAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
A kind of high-precision laser big working distance auto-collimation method realized on above-mentioned high-precision laser big working distance autocollimation,
Require that Wavefront detecting system includes Wavefront detecting spectroscope, air agitation wave front detector and reflecting mirror deformation wave front detector simultaneously；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, reflecting mirror deformation wave front detector respectively obtain GC and
Two groups of data of GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflection
The wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and reflecting mirror
Deformation；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation；
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return to image planes
Center；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorObtained angle changes delta θ 2 of reflecting mirror by common light path autocollimator simultaneously
WithAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
Beneficial effect:
Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement apparatus on the mirror be set,
This structure is arranged, it is possible to has bigger drift angle or there is the situation of relatively larger transverse displacement between measured object incident illumination and reflection light
Under, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also received by feedback imaging system,
And then be prevented effectively from measured object reflection light deviation measurement system and cause the problem that cannot measure, and then the present invention is had in phase
With dramatically increasing auto-collimation working range under operating distance, or under identical auto-collimation working range, dramatically increase the skill of operating distance
Art advantage.
In addition, the present invention also has following a few technical advantage:
The first, selective transmission formula collimating mirror, makes apparatus of the present invention simple in construction, and cost of manufacture is low, easy to use；
The second, select imageing sensor as the image device in feedback imaging system, utilize the feature that image area sensor is big,
Guarantee that reflection light still is able to enter the entrance pupil of optical system, will not in the case of measured object reflection light and incident illumination drift angle are relatively big
Beyond range of receiving, then match with reflecting mirror, it is achieved reflection light quickly return compensation in real time so that auto-collimation of the present invention works
Scope or operating distance are greatly extended；
3rd, select capacitance sensor and be total to light path autocollimator collectively as angular deflection measurement apparatus so that the present invention is not only
Can utilize capacitance sensor superelevation displacement sensory characteristic and in the range of minute angle displacement of the lines be easily converted into angular displacement
Good characteristic so that the present invention can have the highest certainty of measurement, angle under the conditions of low sample frequency (20Hz and following)
Degree highest measurement resolving power can bring up to 0.0005 rad from 0.005 rad of tradition autocollimator, improves an order of magnitude；And
And common light path autocollimator certainty of measurement can be utilized to be affected little good characteristic by air ambient change so that the present invention can be
Under the measurement environment that air ambient is unstable, it is ensured that measure and effectively carry out；The two combines, moreover it is possible to play monitoring measurement environment steady
Act on qualitatively；
4th, the present invention additionally uses techniques below: the first driver, the first sheet metal and universal drive shaft point-blank,
Point-blank, and the first driver is vertical with the line of universal drive shaft for second driver, the second sheet metal and universal drive shaft
Second driver and the line of universal drive shaft；The orthogonal two dimension of this two lines is arranged so that the data in different line directions
Non-interference, it is not necessary to decoupling computing, so can conveniently demarcate, simplify calculating process, improve measuring speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.
Fig. 2 is the first structural representation of high-precision laser of the present invention big working distance autocollimation specific embodiment one.
Fig. 3 is angular adjustment apparatus structural representation in angle adjustment measurement apparatus.
Fig. 4 is the structural representation of the first structure of angular deflection measurement apparatus in angle adjustment measurement apparatus.
Fig. 5 is the structural representation of angular deflection measurement apparatus the second structure in angle adjustment measurement apparatus.
Fig. 6 is the second structural representation of high-precision laser of the present invention big working distance autocollimation specific embodiment one.
Fig. 7 is the structural representation of high-precision laser of the present invention big working distance autocollimation specific embodiment two.
Fig. 8 is the structural representation of high-precision laser of the present invention big working distance autocollimation specific embodiment three.
Fig. 9 is the structural representation of high-precision laser of the present invention big working distance autocollimation specific embodiment four.
In figure: 1 light source, 21 transmission-type collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivers, 412
Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitance sensors, 424 second capacitance sensors,
429 tradition auto-collimation systems, 43 universal drive shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first
Feedback object lens, 65 imageing sensors, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors,
73 reflecting mirror deformation wave front detectors, 8 wavefront compensation system, 81 compensatory lights, 82 compensation collimating mirror, 83 transmission liquid crystal
Spatial light modulator.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The present embodiment is high-precision laser big working distance autocollimation embodiment.
The high-precision laser big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 2.This autocollimation bag
Include light source 1, transmission-type collimating mirror 21, reflecting mirror 3 and feedback imaging system 6, described reflecting mirror 3 is provided with angle and adjusts
Whole measurement apparatus 4；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, then by reflecting mirror 3
Reflection, incides the surface of measured object 5；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, by instead
Feedback imaging system 6 gathers imaging；
Described feedback imaging system 6 is arranged between light source 1 and transmission-type collimating mirror 21, including the first feedback spectroscope 61 He
It is arranged on the imageing sensor 65 of transmission-type collimating mirror 21 focal point；From the light beam of measured object 5 surface reflection, then through reflection
After mirror 3 reflection, successively project through transmission-type collimating mirror 21, the first feedback spectroscope 61 reflects, is adopted by imageing sensor 65
Collection imaging；Under conditions of measured object 5 surface is vertical with optical axis, imageing sensor 65 is become a little as in image plane center position；
Angular adjustment apparatus that described angle adjustment measurement apparatus 4 includes being arranged on reflecting mirror 3, angular deflection measurement apparatus,
And universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measurement apparatus bag
Include first sheet metal the 421, second sheet metal 422, the first capacitance sensor 423 of corresponding first sheet metal 421 position and
Second capacitance sensor 424 of corresponding second sheet metal 422 position；First driver the 411, first sheet metal 421, Yi Jiwan
To axle 43 point-blank, second driver the 412, second sheet metal 422 and universal drive shaft 43 point-blank, and
And first line of driver 411 second driver 412 vertical with the line of universal drive shaft 43 and universal drive shaft 43, as shown in Figure 3；
Angular deflection measurement apparatus also includes that common light path autocollimator 429, described light path autocollimator 429 altogether may be mounted at reflecting mirror 3
Any one side, as shown in Figure 4 and Figure 5.
It should be noted that in the present embodiment, feedback imaging system 6 can also select following structure: is arranged on transmission-type quasi
Straight between mirror 21 and reflecting mirror 3, feed back object lens 63 including the first feedback spectroscope 61, first and be arranged on transmission-type collimating mirror
The imageing sensor 65 of 21 focal point；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, successively pass through
First feedback spectroscope 61 reflect, first feedback object lens 63 transmission, gathered imaging by imageing sensor 65；At measured object 5 table
Under conditions of face is vertical with optical axis, imageing sensor 65 is become a little as in image plane center position；As shown in Figure 6.
Specific embodiment two
The present embodiment is high-precision laser big working distance autocollimation embodiment.
The high-precision laser big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 7.At specific embodiment one
On the basis of, the high-precision laser big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation
System 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；Described Wavefront detecting
Spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting spectroscope
On the reflected light path of 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulator
83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is high-precision laser big working distance autocollimation embodiment.
The high-precision laser big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 8.At specific embodiment one
On the basis of, the high-precision laser big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation
System 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；Described wavefront is visited
Surveying spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, air agitation wave front detector 72 is arranged on Wavefront detecting light splitting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulator
83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is high-precision laser big working distance autocollimation embodiment.
The high-precision laser big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 9.At specific embodiment one
On the basis of, the high-precision laser big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation
System 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror deformation waves
Front detector 73；Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, air agitation Wavefront detecting
Device 72 is arranged on the reflected light path of Wavefront detecting spectroscope 71, and reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3
In secondary reflection light path；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulator
83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, also following three points needs to illustrate:
The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select actuating speed
Motor or motor servo driver faster, can select again the piezoelectric ceramic actuator driving precision higher, it is also possible to will
Motor or motor servo driver are used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can be according to actual needs
Rationally select.
The second, described transmission-type collimating mirror 21 can select binary optical lenses, and logical ordinary optical lens are compared, and binary optical is saturating
Mirror is thinner, beneficially system compact, and binary optical lenses collimation is more preferable simultaneously, is conducive to improving the measuring precision.
3rd, in all above autocollimation embodiment, angular deflection measurement apparatus all only includes two pairs of sheet metals and electric capacity
The combination of sensor, this design acquiescence reflecting mirror 3 does not the most produce translation and makes；If it is considered that it is anti-
Penetrate mirror 3 to produce translation at work and affect certainty of measurement, the 3rd pair of sheet metal and electric capacity can be placed in universal drive shaft 43 position
The combination of sensor, to offset the identical translation that three capacitance sensors produce, it is ensured that certainty of measurement.
Specific embodiment five
The present embodiment is that the high-precision laser realized on the big working distance autocollimation of high-precision laser described in specific embodiment one is big
Working distance auto-collimation embodiment of the method.
The high-precision laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, some bright light source 1, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step b, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 institute
Become point as returning to image plane center position；
Step c, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 becomes
Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror 3Reflected by common light path autocollimator 429 simultaneously
Angle changes delta θ 2 He of mirror 3And then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein,
Δ θ 1=f1 (Δ C1, Δ C2),With
F1, f2, f3, f4 represent 4 functions.
The main innovative point of the present invention is the angle adjustment measurement apparatus 4 adding reflecting mirror 3 and being arranged on reflecting mirror 3,
In the case of this structure can have bigger drift angle or there is relatively larger transverse displacement between measured object 5 incident illumination and reflection light,
Adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and received by feedback imaging system 6, having
The problem that effect is avoided measured object reflection light to deviate measurement system and caused measuring.
But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system；Meanwhile,
The increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce the measurement of system
Precision.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 and measured object
The air agitation impact on measurement result between 5, to this end, devise specific embodiment six, specific embodiment seven and concrete
Embodiment eight.
Specific embodiment six
The present embodiment is that the high-precision laser realized on the big working distance autocollimation of high-precision laser described in specific embodiment two is big
Working distance auto-collimation embodiment of the method.
The high-precision laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector 72 respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, make-up air
Disturbance；
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 institute
Become point as returning to image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 becomes
Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror 3Reflected by common light path autocollimator 429 simultaneously
Angle changes delta θ 2 He of mirror 3And then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein,
Δ θ 1=f1 (Δ C1, Δ C2),With
F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment two, it is possible to utilize air agitation wave front detector 72 by air
Disturbance separates, and then utilizes wavefront compensation system 8 to compensate air agitation, and final realization is without air agitation impact
High-acruracy survey.
Specific embodiment seven
The present embodiment is that the high-precision laser realized on the big working distance autocollimation of high-precision laser described in specific embodiment three is big
Working distance auto-collimation embodiment of the method.
The high-precision laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, make-up air
Disturbance and reflecting mirror deformation；
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 institute
Become point as returning to image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 becomes
Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror 3Reflected by common light path autocollimator 429 simultaneously
Angle changes delta θ 2 He of mirror 3And then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein,
Δ θ 1=f1 (Δ C1, Δ C2),With
F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize reflecting mirror deformation wave front detector 73 by sky
Gas disturbance and reflecting mirror deformation carry out overall separation, and then utilize wavefront compensation system 8 to carry out air agitation with reflecting mirror deformation
Entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is that the high-precision laser realized on the big working distance autocollimation of high-precision laser described in specific embodiment four is big
Working distance auto-collimation embodiment of the method.
The high-precision laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains
Two groups of data of GC and GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflection
The wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air disturbance and
Reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror deformation；
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 institute
Become point as returning to image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 becomes
Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror 3Reflected by common light path autocollimator 429 simultaneously
Angle changes delta θ 2 He of mirror 3And then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein,
Δ θ 1=f1 (Δ C1, Δ C2),With
F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize air agitation wave front detector 72 and reflection
Air agitation and reflecting mirror deformation are separately separated by mirror deformation wave front detector 73, and then optionally carry out air agitation
Separate compensation, reflecting mirror deformation is carried out separate compensation or air agitation and reflecting mirror deformation are carried out entire compensation, finally real
Now without air agitation or no-mirror deformation or without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to every a part of right
The size that affects of result is individually assessed, and can not only find out in air agitation and reflecting mirror deformation, and who is to affect certainty of measurement
Principal contradiction, and mirror deformation individually can be assessed, reflecting mirror crudy be carried out effective evaluation simultaneously.
Claims (6)
1. a high-precision laser big working distance autocollimation, it is characterised in that include light source (1), transmission-type collimating mirror (21),
Reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment measurement apparatus (4)；Light
The light beam of source (1) outgoing, after transmission-type collimating mirror (21) is collimated into collimated light beam, then is reflected by reflecting mirror (3),
Incide the surface of measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by
Feedback imaging system (6) gathers imaging；
Described feedback imaging system (6) is the one in following two form:
The first, it is arranged between light source (1) and transmission-type collimating mirror (21), including the first feedback spectroscope (61) and setting
Imageing sensor (65) at transmission-type collimating mirror (21) focal point；From the light beam of measured object (5) surface reflection, then pass through
After reflecting mirror (3) reflection, successively reflect, by scheming through transmission-type collimating mirror (21) projection, the first feedback spectroscope (61)
As sensor (65) gathers imaging；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) is become
Point is as in image plane center position；
The second, be arranged between transmission-type collimating mirror (21) and reflecting mirror (3), including the first feedback spectroscope (61),
One feeds back object lens (63) and is arranged on the imageing sensor (65) of transmission-type collimating mirror (21) focal point；From measured object (5)
The light beam of surface reflection, then after reflecting mirror (3) reflects, successively through the first feedback spectroscope (61) reflection, first anti-
Present object lens (63) transmission, gathered imaging by imageing sensor (65)；Under conditions of measured object (5) surface is vertical with optical axis,
Imageing sensor (65) is become a little as in image plane center position；
Described angle adjustment measurement apparatus (4) includes that the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection are measured
Device and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angle
Deflection measurement apparatus include the first sheet metal (421), the second sheet metal (422), the of corresponding first sheet metal (421) position
Second capacitance sensor (424) of one capacitance sensor (423) and corresponding second sheet metal (422) position；First drives
Device (411), the first sheet metal (421) and universal drive shaft (43) point-blank, the second driver (412), second
Sheet metal (422) and universal drive shaft (43) point-blank, and the first driver (411) and universal drive shaft (43)
Vertical second driver of line (412) and the line of universal drive shaft (43)；Angular deflection measurement apparatus also includes common light path auto-collimation
Instrument (429).
High-precision laser the most according to claim 1 big working distance autocollimation, it is characterised in that also include that wavefront is visited
Examining system (7) and wavefront compensation system (8)；
Described Wavefront detecting system (7) include Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and
At least one in reflecting mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3)
And between measured object (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71),
Reflecting mirror deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；
Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light
Manipulator (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by
Transmission liquid crystal spatial light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).
3. the portable high-accuracy realized on portable high-accuracy laser big working distance autocollimation described in claim 1
Laser big working distance auto-collimation method, it is characterised in that comprise the following steps:
Step a, some bright light source (1), imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step b, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make image pass
Sensor (65) is become a little as returning to image plane center position；
Step c, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the second capacitance sensor (424)
Capacitance change, Δ C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Simultaneously by common light path autocollimator (429)
Obtain angle changes delta θ 2 He of reflecting mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；
Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent 4 functions.
4. the portable high-accuracy realized on portable high-accuracy laser big working distance autocollimation described in claim 2
Laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air agitation
Wave front detector (72)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), mend
Repay air agitation；
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make image pass
Sensor (65) is become a little as returning to image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the second capacitance sensor (424)
Capacitance change, Δ C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Simultaneously by common light path autocollimator (429)
Obtain angle changes delta θ 2 He of reflecting mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；
Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent 4 functions.
5. the portable high-accuracy realized on portable high-accuracy laser big working distance autocollimation described in claim 2
Laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror shape
Become wave front detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), mend
Repay air agitation and reflecting mirror deformation；
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make image pass
Sensor (65) is become a little as returning to image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the second capacitance sensor (424)
Capacitance change, Δ C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Simultaneously by common light path autocollimator (429)
Obtain angle changes delta θ 2 He of reflecting mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；
Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent 4 functions.
6. the portable high-accuracy realized on portable high-accuracy laser big working distance autocollimation described in claim 2
Laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes that Wavefront detecting spectroscope (71), air are disturbed simultaneously
Dynamic wave front detector (72) and reflecting mirror deformation wave front detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, reflecting mirror deformation wave front detector (73)
Respectively obtain two groups of data of GC and GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflection
The wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror
Deformation；
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make image pass
Sensor (65) is become a little as returning to image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the second capacitance sensor (424)
Capacitance change, Δ C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Simultaneously by common light path autocollimator (429)
Obtain angle changes delta θ 2 He of reflecting mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；
Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent 4 functions.
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