CN106017361A - Array zero-setting high-frequency-response large-work-distance auto-collimation device and method - Google Patents
Array zero-setting high-frequency-response large-work-distance auto-collimation device and method Download PDFInfo
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- CN106017361A CN106017361A CN201610638876.8A CN201610638876A CN106017361A CN 106017361 A CN106017361 A CN 106017361A CN 201610638876 A CN201610638876 A CN 201610638876A CN 106017361 A CN106017361 A CN 106017361A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
Abstract
The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to an array zero-setting high-frequency-response large-work-distance auto-collimation device and method. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system; the method comprises the steps that the reflector is adjusted to enable reflected light beams to return to the image plane center of the feedback imaging system, and angle changes of the surface of a measured object are obtained through an angular deflection measurement device on the reflector; due to the fact that the reflector is additionally arranged on a traditional auto-collimation angle measurement system, the problem that reflected light of the measured object deviates from the measurement system, and consequently measurement cannot be carried out can be avoided, and then the technical advantage that the auto-collimation work range is remarkably widened at the same work distance, or the work distance is remarkably increased within the same auto-collimation work range is achieved; in addition, by means of specific design of the collimating mirror, the feedback imaging system, the reflector and the like, the array zero-setting high-frequency-response large-work-distance auto-collimation device and method further have the advantages of being simple in structure and low in manufacturing cost. Meanwhile, high measurement speed is achieved.
Description
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to array zeroing high frequency sound big working distance autocollimatic
Straight apparatus and method.
Background technology
In Technology of Precision Measurement field, optical engineering field, most advanced branches of science experiment field and high-end precision assembly manufacture field,
Urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It support above-mentioned art with
The development of instrument and equipment.
At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angular surveying；
Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured；Maximum functional distance is from several meters
To rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
Field is tested in optical engineering field and the most advanced branches of science, two Circular gratings combinations that Laser Autocollimator is the most vertical with bidimensional,
The measurement of space angle can be carried out；Formed position reference by two-way Laser Autocollimator, optical axis included angle or flat two-by-two can be carried out
The measurement of row.Angle working range tens rads to tens jiaos points.
Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure the most advanced branches of science real
Experiment device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line precision and two of linear motion benchmark
The depth of parallelism of two motion benchmark and perpendicularity.
Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, have extensively should in above-mentioned field
With.
Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system 6；
The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From
The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 table
The nearly backtracking of light beam of face reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This is the most former
The condition that road returns limits so that the following two aspect shortcomings of this system existence:
The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can cause
The entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and micro-angular surveying；
The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection optical axis with
Autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then causes
Auto-collimation and micro-angular surveying cannot be realized.
Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.
Summary of the invention
For two problems existing for tradition autocollimator, the invention discloses a kind of array zeroing high frequency sound big working distance autocollimatic
Straight apparatus and method, compared with tradition autocollimator, have and dramatically increase auto-collimation working range under identical operating distance, or
The technical advantage of operating distance is dramatically increased under identical auto-collimation working range.
The object of the present invention is achieved like this:
Array zeroing high frequency sound big working distance autocollimation, including light source, transmission-type collimating mirror, reflecting mirror and feed back into
As system, described reflecting mirror is provided with angle adjustment measurement apparatus；The light beam of light source outgoing, collimates through transmission-type collimating mirror
After becoming collimated light beam, then reflected by reflecting mirror, incide the surface of measured object；From the light beam of measured object surface reflection, then pass through
After reflecting mirror reflection, feedback imaging system gather imaging；
Described feedback imaging system is in following two form:
The first, be arranged between light source and transmission-type collimating mirror, including the first feedback spectroscope and be arranged on transmission-type collimation
The 4 quadrant detector of mirror focal plane and multiple single pixel light electric transducer, described single pixel light electric transducer becomes array distribution, four-quadrant
Limit detector had not only been positioned at array center, but also had been positioned on feedback imaging system optical axis；From the light beam of measured object surface reflection, then pass through
After reflecting mirror reflection, successively through transmission-type collimating mirror transmission, the first feedback dichroic mirror, by 4 quadrant detector or single picture
Element optical-electrical converter gathers imaging；
The second, it is arranged between transmission-type collimating mirror and reflecting mirror, including the first feedback spectroscope, the first feedback object lens and setting
At 4 quadrant detector and multiple single pixel light electric transducer of transmission-type focal plane of collimating mirror, described single pixel light electric transducer Cheng Zhen
Column distribution, 4 quadrant detector had not only been positioned at array center, but also had been positioned on feedback imaging system optical axis；From the reflection of measured object surface
Light beam, then through reflecting mirror reflect after, successively through first feed back dichroic mirror, first feedback object lens transmission, by four-quadrant
Detector or single pixel light electric transducer gather imaging；
Described angle adjustment measurement apparatus include arranging angular adjustment apparatus on the mirror, angular deflection measurement apparatus and
Universal drive shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measurement apparatus include the first reflecting mirror,
Second reflecting mirror, the first laser interferometer of corresponding first reflector position and the second laser of corresponding second reflector position
Interferometer；First driver, the first reflecting mirror and universal drive shaft point-blank, the second driver, the second reflecting mirror,
And universal drive shaft is point-blank, and the line of the first driver second driver vertical with the line of universal drive shaft and universal drive shaft.
The portable array zeroing big work of high frequency sound realized on above-mentioned portable array zeroing high frequency sound big working distance autocollimation
Make away from auto-collimation method, comprise the following steps:
Step a, some bright light source, feed back imaging system images, if:
The first, the some image position obtained, in single pixel light electric transducer region, according to single pixel light electric transducer coordinate, obtains
Point, as deviation image plane center direction, utilizes the first driver and the second driver to adjust mirror angle, makes a picture return to four-quadrant
Detector region, enters step b；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step b；
Step b, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position Δ x after step a terminates
With Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector image plane center position
Put；
Step c, read the change in displacement Δ x1 that the first laser interferometer obtains, and the change in displacement that the second laser interferometer obtains
Δ x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Its
In, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent
4 functions.
Above-mentioned array zeroing high frequency sound big working distance autocollimation, also includes Wavefront detecting system and wavefront compensation system；
Described Wavefront detecting system is visited before including Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation waves
Survey at least one in device；Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation wave front detector
Being arranged on the spectroscopical reflected light path of Wavefront detecting, reflecting mirror deformation wave front detector is arranged on the secondary reflection light path of reflecting mirror
On；
Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator；Compensate light
The light beam of source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then is modulated by transmission liquid crystal spatial light modulator, enters
It is mapped on Wavefront detecting spectroscope.
The portable array zeroing big work of high frequency sound realized on above-mentioned portable array zeroing high frequency sound big working distance autocollimation
Make away from auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air disturbance；
Step e, some bright light source, feed back imaging system images, if:
The first, the some image position obtained, in single pixel light electric transducer region, according to single pixel light electric transducer coordinate, obtains
Point, as deviation image plane center direction, utilizes the first driver and the second driver to adjust mirror angle, makes a picture return to four-quadrant
Detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position Δ x after step a terminates
With Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector image plane center position
Put；
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the change in displacement that the second laser interferometer obtains
Δ x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Its
In, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent
4 functions.
The portable array zeroing big work of high frequency sound realized on above-mentioned portable array zeroing high frequency sound big working distance autocollimation
Make away from auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air disturbance
With reflecting mirror deformation；
Step e, feedback imaging system images, if:
The first, the some image position obtained, in single pixel light electric transducer region, according to single pixel light electric transducer coordinate, obtains
Point, as deviation image plane center direction, utilizes the first driver and the second driver to adjust mirror angle, makes a picture return to four-quadrant
Detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position Δ x after step a terminates
With Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector image plane center position
Put；
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the change in displacement that the second laser interferometer obtains
Δ x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Its
In, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent
4 functions.
The portable array zeroing big work of high frequency sound realized on above-mentioned portable array zeroing high frequency sound big working distance autocollimation
Make away from auto-collimation method, it is desirable to Wavefront detecting system includes Wavefront detecting spectroscope, air agitation wave front detector and reflection simultaneously
Mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, reflecting mirror deformation wave front detector respectively obtain GC and
Two groups of data of GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflection
The wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and reflecting mirror
Deformation；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation；
Step e, feedback imaging system images, if:
The first, the some image position obtained, in single pixel light electric transducer region, according to single pixel light electric transducer coordinate, obtains
Point, as deviation image plane center direction, utilizes the first driver and the second driver to adjust mirror angle, makes a picture return to four-quadrant
Detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position Δ x after step a terminates
With Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector image plane center position
Put；
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the change in displacement that the second laser interferometer obtains
Δ x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Its
In, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent
4 functions.
Beneficial effect:
Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement apparatus on the mirror be set,
This structure is arranged, it is possible to has bigger drift angle or there is the situation of relatively larger transverse displacement between measured object incident illumination and reflection light
Under, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also received by feedback imaging system,
And then be prevented effectively from measured object reflection light deviation measurement system and cause the problem that cannot measure, and then the present invention is had in phase
With dramatically increasing auto-collimation working range under operating distance, or under identical auto-collimation working range, dramatically increase the skill of operating distance
Art advantage.
In addition, the present invention also has following a few technical advantage:
The first, selective transmission formula collimating mirror, makes apparatus of the present invention simple in construction, and cost of manufacture is low, easy to use；
The second, select multiple single pixel light electric transducer and 4 quadrant detector collectively as feedback imaging system in image device,
Combine the advantage that multiple single pixel light electric transducer area is big and 4 quadrant detector position resolution is high；Wherein, Duo Gedan
Pixel light electric transducer combines, it can be ensured that in the case of measured object reflection light and incident illumination drift angle are relatively big, reflection light remains to
Enough enter the entrance pupil of optical system, without departing from range of receiving；On this basis, recycling reflecting mirror realizes reflection light quickly in fact
Shi Huiwei compensates, and is adjusted to reflection light 4 quadrant detector position, to differentiate according to the high position of 4 quadrant detector again
Rate advantage obtains higher angle-measurement accuracy；Therefore, multiple single pixel light electric transducers and 4 quadrant detector are combined,
Not only make auto-collimation working range of the present invention or operating distance greatly be extended, and be conducive to improving angle-measurement accuracy；
3rd, select laser interferometer as angular deflection measurement apparatus so that the present invention can (can in high sample frequency
Reach 2000Hz) under complete angular surveying, i.e. there is the highest measuring speed；If the first reflecting mirror and the second reflecting mirror use
Prism of corner cube, it is also possible to the optical characteristics utilizing prism of corner cube inclined for incident ray turnback to be returned, makes the angle of the present invention survey
Weight range is greatly enhanced, i.e. the present invention has very while high measurement speed, also has the technical advantage of wide-angle range；
4th, the present invention additionally uses techniques below: the first driver, the first reflecting mirror and universal drive shaft point-blank,
Point-blank, and the first driver is vertical with the line of universal drive shaft for second driver, the second reflecting mirror and universal drive shaft
Second driver and the line of universal drive shaft；The orthogonal two dimension of this two lines is arranged so that the data in different line directions
Non-interference, it is not necessary to decoupling computing, so can conveniently demarcate, simplify calculating process, improve measuring speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.
Fig. 2 is the first structural representation of array of the present invention zeroing high frequency sound big working distance autocollimation specific embodiment one.
Fig. 3 is the structural representation of angle adjustment measurement apparatus.
Fig. 4 is the second structural representation of array of the present invention zeroing high frequency sound big working distance autocollimation specific embodiment one.
Fig. 5 is the structural representation of array of the present invention zeroing high frequency sound big working distance autocollimation specific embodiment two.
Fig. 6 is the structural representation of array of the present invention zeroing high frequency sound big working distance autocollimation specific embodiment three.
Fig. 7 is the structural representation of array of the present invention zeroing high frequency sound big working distance autocollimation specific embodiment four.
In figure: 1 light source, 21 transmission-type collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivers, 412
Second driver, 425 first reflecting mirrors, 426 second reflecting mirrors, 427 first laser interferometer, 428 second laser interferometer,
43 universal drive shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens, 66 four-quadrants are visited
Survey device, 67 single pixel light electric transducers, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors,
73 reflecting mirror deformation wave front detectors, 8 wavefront compensation system, 81 compensatory lights, 82 compensation collimating mirror, 83 transmission liquid crystal
Spatial light modulator.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The present embodiment is array zeroing high frequency sound big working distance autocollimation embodiment.
The array zeroing high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 2.This auto-collimation fills
Put and include light source 1, transmission-type collimating mirror 21, reflecting mirror 3 and feedback imaging system 6, described reflecting mirror 3 is provided with angle
Degree adjusts measurement apparatus 4；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, then by reflecting
Mirror 3 reflects, and incides the surface of measured object 5；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects,
Imaging is gathered by feedback imaging system 6；
Described feedback imaging system 6 is arranged between light source 1 and transmission-type collimating mirror 21, including the first feedback spectroscope 61,
And it is arranged on 4 quadrant detector 66 and multiple single pixel light electric transducer 67, described single picture of transmission-type collimating mirror 21 focal plane
Element optical-electrical converter 67 becomes array distribution, and 4 quadrant detector 66 had not only been positioned at array center, but also has been positioned at feedback imaging system 6 light
On axle；From measured object 5 surface reflection light beam, then through reflecting mirror 3 reflect after, successively through transmission-type collimating mirror 21 transmission,
First feedback spectroscope 61 reflects, is gathered imaging by 4 quadrant detector 66 or single pixel light electric transducer 67；
Angular adjustment apparatus that described angle adjustment measurement apparatus 4 includes being arranged on reflecting mirror 3, angular deflection measurement apparatus,
And universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measurement apparatus bag
Include first reflecting mirror the 425, second reflecting mirror 426, the first laser interferometer 427 of corresponding first reflecting mirror 425 position and
Second laser interferometer 428 of corresponding second reflecting mirror 426 position；First driver the 411, first reflecting mirror 425, Yi Jiwan
To axle 43 point-blank, second driver the 412, second reflecting mirror 426 and universal drive shaft 43 point-blank, and
And first line of driver 411 second driver 412 vertical with the line of universal drive shaft 43 and universal drive shaft 43；As shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 can also select following structure: is arranged on transmission-type quasi
Straight between mirror 21 and reflecting mirror 3, feed back object lens 63 including the first feedback spectroscope 61, first and be arranged on transmission-type collimating mirror
The 4 quadrant detector 66 of 21 focal planes and multiple single pixel light electric transducer 67, described single pixel light electric transducer 67 becomes array to divide
Cloth, 4 quadrant detector 66 had not only been positioned at array center, but also had been positioned on feedback imaging system 6 optical axis；Reflect from measured object 5 surface
Light beam, then through reflecting mirror 3 reflect after, successively through first feedback spectroscope 61 reflect, first feedback object lens 63 transmission,
Imaging is gathered by 4 quadrant detector 66 or single pixel light electric transducer 67；As shown in Figure 4.
Specific embodiment two
The present embodiment is array zeroing high frequency sound big working distance autocollimation embodiment.
The array zeroing high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 5.It is being embodied as
On the basis of example one, the array zeroing high frequency sound big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 He
Wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；Described Wavefront detecting
Spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting spectroscope
On the reflected light path of 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulator
83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is array zeroing high frequency sound big working distance autocollimation embodiment.
The array zeroing high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 6.It is being embodied as
On the basis of example one, the array zeroing high frequency sound big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 He
Wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；Described wavefront is visited
Surveying spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, air agitation wave front detector 72 is arranged on Wavefront detecting light splitting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulator
83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is array zeroing high frequency sound big working distance autocollimation embodiment.
The array zeroing high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 7.It is being embodied as
On the basis of example one, the array zeroing high frequency sound big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 He
Wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror deformation waves
Front detector 73；Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, air agitation Wavefront detecting
Device 72 is arranged on the reflected light path of Wavefront detecting spectroscope 71, and reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3
In secondary reflection light path；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulator
83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, also following three points needs to illustrate:
The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select actuating speed
Motor or motor servo driver faster, can select again the piezoelectric ceramic actuator driving precision higher, it is also possible to will
Motor or motor servo driver are used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can be according to actual needs
Rationally select.
The second, described transmission-type collimating mirror 21 can select binary optical lenses, and logical ordinary optical lens are compared, and binary optical is saturating
Mirror is thinner, beneficially system compact, and binary optical lenses collimation is more preferable simultaneously, is conducive to improving the measuring precision.
3rd, in all above autocollimation embodiment, angular deflection measurement apparatus all only include two pairs of plane mirrors and
The combination of laser interferometer, this design acquiescence reflecting mirror 3 does not the most produce translation and makes；If it is considered that
Produce translation at work to reflecting mirror 3 and affect certainty of measurement, the 3rd pair of plane reflection can be placed in universal drive shaft 43 position
Mirror and the combination of laser interferometer, to offset the identical translation that three laser interferometer produce, it is ensured that certainty of measurement.
Specific embodiment five
The present embodiment is the array zeroing realized on array zeroing high frequency sound big working distance autocollimation described in specific embodiment one
High frequency sound big working distance auto-collimation embodiment of the method.
The array zeroing high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, some bright light source 1, feed back imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67 coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make
Point, as returning to 4 quadrant detector 66 region, enters step b；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step b；
Step b, 4 quadrant detector 66 imaging, obtain some picture deviation 4 quadrant detector 66 image plane center after step a terminates
Position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step c, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 obtains
Change in displacement Δ x2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain the angle change on measured object 5 surface
Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
The main innovative point of the present invention is the angle adjustment measurement apparatus 4 adding reflecting mirror 3 and being arranged on reflecting mirror 3,
In the case of this structure can have bigger drift angle or there is relatively larger transverse displacement between measured object 5 incident illumination and reflection light,
Adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and received by feedback imaging system 6, having
The problem that effect is avoided measured object reflection light to deviate measurement system and caused measuring.
But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system；Meanwhile,
The increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce the measurement of system
Precision.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 and measured object
The air agitation impact on measurement result between 5, to this end, devise specific embodiment six, specific embodiment seven and concrete
Embodiment eight.
Specific embodiment six
The present embodiment is the array zeroing realized on array zeroing high frequency sound big working distance autocollimation described in specific embodiment two
High frequency sound big working distance auto-collimation embodiment of the method.
The array zeroing high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector 72 respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, make-up air
Disturbance；
Step e, some bright light source 1, feed back imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67 coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make
Point, as returning to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture deviation 4 quadrant detector 66 image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make a picture return to four-quadrant
Detector 66 image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 obtains
Change in displacement Δ x2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain the angle change on measured object 5 surface
Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment two, it is possible to utilize air agitation wave front detector 72 by air
Disturbance separates, and then utilizes wavefront compensation system 8 to compensate air agitation, and final realization is without air agitation impact
High-acruracy survey.
Specific embodiment seven
The present embodiment is the array zeroing realized on array zeroing high frequency sound big working distance autocollimation described in specific embodiment three
High frequency sound big working distance auto-collimation embodiment of the method.
The array zeroing high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, make-up air
Disturbance and reflecting mirror deformation；
Step e, feedback imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67 coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make
Point, as returning to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture deviation 4 quadrant detector 66 image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make a picture return to four-quadrant
Detector 66 image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 obtains
Change in displacement Δ x2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain the angle change on measured object 5 surface
Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize reflecting mirror deformation wave front detector 73 by sky
Gas disturbance and reflecting mirror deformation carry out overall separation, and then utilize wavefront compensation system 8 to carry out air agitation with reflecting mirror deformation
Entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is the array zeroing realized on array zeroing high frequency sound big working distance autocollimation described in specific embodiment four
High frequency sound big working distance auto-collimation embodiment of the method.
The array zeroing high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains
Two groups of data of GC and GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflection
The wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air disturbance and
Reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror deformation；
Step e, feedback imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67 coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make
Point, as returning to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture deviation 4 quadrant detector 66 image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make a picture return to four-quadrant
Detector 66 image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 obtains
Change in displacement Δ x2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain the angle change on measured object 5 surface
Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize air agitation wave front detector 72 and reflection
Air agitation and reflecting mirror deformation are separately separated by mirror deformation wave front detector 73, and then optionally carry out air agitation
Separate compensation, reflecting mirror deformation is carried out separate compensation or air agitation and reflecting mirror deformation are carried out entire compensation, finally real
Now without air agitation or no-mirror deformation or without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to every a part of right
The size that affects of result is individually assessed, and can not only find out in air agitation and reflecting mirror deformation, and who is to affect certainty of measurement
Principal contradiction, and mirror deformation individually can be assessed, reflecting mirror crudy be carried out effective evaluation simultaneously.
Claims (6)
1. array zeroing high frequency sound big working distance autocollimation, it is characterised in that include light source (1), transmission-type collimating mirror (21),
Reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment measurement apparatus (4)；Light
The light beam of source (1) outgoing, after transmission-type collimating mirror (21) is collimated into collimated light beam, then is reflected by reflecting mirror (3),
Incide the surface of measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by
Feedback imaging system (6) gathers imaging；
Described feedback imaging system (6) is in following two form:
The first, be arranged between light source (1) and transmission-type collimating mirror (21), including the first feedback spectroscope (61) and
It is arranged on the 4 quadrant detector (66) of transmission-type collimating mirror (21) focal plane and multiple single pixel light electric transducer (67), described
Single pixel light electric transducer (67) becomes array distribution, and 4 quadrant detector (66) had not only been positioned at array center, and but also had been positioned at and feeds back into
As on system (6) optical axis；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively pass through
Transmission-type collimating mirror (21) transmission, the first feedback spectroscope (61) are reflected, by 4 quadrant detector (66) or single pixel light
Electric transducer (67) gathers imaging；
The second, be arranged between transmission-type collimating mirror (21) and reflecting mirror (3), including the first feedback spectroscope (61),
One feeds back object lens (63) and is arranged on the 4 quadrant detector (66) of transmission-type collimating mirror (21) focal plane and multiple single pixel light
Electric transducer (67), described single pixel light electric transducer (67) becomes array distribution, and 4 quadrant detector (66) had both been positioned at array
Center, again be positioned at feedback imaging system (6) optical axis on；From the light beam of measured object (5) surface reflection, then through reflecting mirror (3)
After reflection, successively through first feedback spectroscope (61) reflection, first feedback object lens (63) transmission, by 4 quadrant detector
Or single pixel light electric transducer (67) gathers imaging (66)；
Described angle adjustment measurement apparatus (4) includes that the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection are measured
Device and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angle
Deflection measurement apparatus include the first reflecting mirror (425), the second reflecting mirror (426), the of corresponding first reflecting mirror (425) position
Second laser interferometer (428) of one laser interferometer (427) and corresponding second reflecting mirror (426) position；First drives
Device (411), the first reflecting mirror (425) and universal drive shaft (43) point-blank, the second driver (412), second
Reflecting mirror (426) and universal drive shaft (43) point-blank, and the first driver (411) and universal drive shaft (43)
Vertical second driver of line (412) and the line of universal drive shaft (43).
Array the most according to claim 1 zeroing high frequency sound big working distance autocollimation, it is characterised in that also include ripple
Front detection system (7) and wavefront compensation system (8)；
Described Wavefront detecting system (7) include Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and
At least one in reflecting mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3)
And between measured object (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71),
Reflecting mirror deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；
Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light
Manipulator (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by
Transmission liquid crystal spatial light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).
3. the portable array realized on portable array zeroing high frequency sound big working distance autocollimation described in claim 1 is adjusted
Zero high frequency sound big working distance auto-collimation method, it is characterised in that comprise the following steps:
Step a, some bright light source (1), feed back imaging system (6) imaging, if:
The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67)
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflection
Mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step b；
The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step b；
Step b, 4 quadrant detector (66) imaging, obtain after step a terminates point as deviation 4 quadrant detector (66) as
Center, face Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle,
A picture is made to return to 4 quadrant detector (66) image plane center position；
Step c, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 obtained, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain measured object (5) table
Angle changes delta α in face and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
4. the portable array realized on portable array zeroing high frequency sound big working distance autocollimation described in claim 2 is adjusted
Zero high frequency sound big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air
Disturbance wave front detector (72)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), mend
Repay air agitation；
Step e, some bright light source (1), feed back imaging system (6) imaging, if:
The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67)
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflection
Mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；
The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；
Step f, 4 quadrant detector (66) imaging, obtain some picture deviation 4 quadrant detector (66) image planes after step a terminates
Center Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes
Point is as returning to 4 quadrant detector (66) image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 obtained, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain measured object (5) table
Angle changes delta α in face and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
5. the portable array realized on portable array zeroing high frequency sound big working distance autocollimation described in claim 2 is adjusted
Zero high frequency sound big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflection
Mirror deformation wave front detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), mend
Repay air agitation and reflecting mirror deformation；
Step e, feedback imaging system (6) imaging, if:
The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67)
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflection
Mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；
The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；
Step f, 4 quadrant detector (66) imaging, obtain some picture deviation 4 quadrant detector (66) image planes after step a terminates
Center Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes
Point is as returning to 4 quadrant detector (66) image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 obtained, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain measured object (5) table
Angle changes delta α in face and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
6. the portable array realized on portable array zeroing high frequency sound big working distance autocollimation described in claim 2 is adjusted
Zero high frequency sound big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes Wavefront detecting spectroscope (71), sky simultaneously
Gas disturbance wave front detector (72) and reflecting mirror deformation wave front detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, reflecting mirror deformation wave front detector (73)
Respectively obtain two groups of data of GC and GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflection
The wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror
Deformation；
Step e, feedback imaging system (6) imaging, if:
The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67)
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflection
Mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；
The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；
Step f, 4 quadrant detector (66) imaging, obtain some picture deviation 4 quadrant detector (66) image planes after step a terminates
Center Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes
Point is as returning to 4 quadrant detector (66) image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 obtained, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain measured object (5) table
Angle changes delta α in face and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
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