CN106017441B - A kind of big working distance autocollimation of portable high-accuracy laser and method - Google Patents

A kind of big working distance autocollimation of portable high-accuracy laser and method Download PDF

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Publication number
CN106017441B
CN106017441B CN201610639081.9A CN201610639081A CN106017441B CN 106017441 B CN106017441 B CN 106017441B CN 201610639081 A CN201610639081 A CN 201610639081A CN 106017441 B CN106017441 B CN 106017441B
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speculum
δ
step
driver
capacitance
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CN201610639081.9A
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CN106017441A (en
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谭欣然
朱凡
王超
谭久彬
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哈尔滨工业大学
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Abstract

The invention belongs to Technology of Precision Measurement field and optical engineering field, and in particular to a kind of big working distance autocollimation of portable high-accuracy laser and method;The device is made of light source, collimating mirror, speculum and feedback imaging system;This method makes the reflected beams return to feedback imaging system image plane center, recycles the angular deflection measuring device on speculum to obtain the angle change on measured object surface by adjusting speculum;Since the present invention adds speculum on traditional auto-collimation angle measurement system, therefore measured object reflected light can be avoided the problem that to deviate measuring system and lead to not measurement, and then there is the increase auto-collimation working range under identical operating distance, or increase the advantage of operating distance under identical auto-collimation working range;In addition, the specific design of collimating mirror, feedback imaging system, speculum etc., makes the present invention also have miniature portable, high certainty of measurement;Measuring environment stability can also be monitored at the same time;And the technical advantage quickly measured.

Description

A kind of big working distance autocollimation of portable high-accuracy laser and method

Technical field

The invention belongs to Technology of Precision Measurement field and optical engineering field, and in particular to a kind of portable high-accuracy laser Big working distance autocollimation and method.

Background technology

Manufacture and lead in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly In domain, active demand carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field The development of technology and instrument and equipment.

In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree Measurement;Laser auto-collimation technology is combined with polygon, can carry out face angular surveying and circular division measurement;Maximum functional distance From several meters to rice up to a hundred;Resolving power is from 0.1 rad to 0.001 rad.

In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional Grid combine, and can carry out the measurement of space angle;Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.

In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark Precision and the depth of parallelism and verticality for moving benchmark two-by-two.

Laser auto-collimation technology has the advantages that non-contact, high certainty of measurement, easy to use, has in above-mentioned field wide General application.

Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system 6;The light beam that light source 1 is emitted, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5;From The light beam of 5 reflective surface of measured object, imaging is gathered by feedback imaging system 6.Under this structure, only from 5 surface of measured object The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measurement.This Jin Yuan road The condition limitation of return so that there are following two aspects shortcoming for the system:

Firstth, 5 mirror surface normal of measurand cannot be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can Cause the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then lead to not realize that auto-collimation and micro- angle are surveyed Amount;

Secondth, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light Axis will result in the entrance pupil of the reflected beams deviation Laser Autocollimator optical system with autocollimator optical axis deviation minute angle, into And lead to not realize auto-collimation and micro- angular surveying.

Two above problem, makes traditional auto-collimation instrument to be limited under low-angle, small operating distance and uses.

The content of the invention

For two problems present in traditional autocollimator, the invention discloses a kind of big work of portable high-accuracy laser Make, away from autocollimation and method, compared with traditional autocollimator, to have and dramatically increase auto-collimation work under identical operating distance Make scope, or the technical advantage of operating distance is dramatically increased under identical auto-collimation working range.

The object of the present invention is achieved like this:

A kind of big working distance autocollimation of portable high-accuracy laser, including light source, reflective collimating mirror, speculum, And imaging system is fed back, angled adjustment measuring device is set on the speculum;The light beam of light source outgoing, process are reflective After collimating mirror is collimated into collimated light beam, then reflected by speculum, incide the surface of measured object;From the light of measured object surface reflection Beam, then after speculum reflects, gathered and be imaged by feedback imaging system;

The feedback imaging system is one kind in following two forms:

Firstth, it is arranged between light source and reflective collimating mirror, including first feeds back spectroscope and be arranged on reflective standard Imaging sensor at straight mirror foci;From the light beam of measured object surface reflection, then after speculum reflects, successively by reflection The projection of formula collimating mirror, first feed back dichroic mirror, gather imaging by imaging sensor;It is vertical with optical axis on measured object surface Under the conditions of, imaging sensor institute is into a picture in image plane center position;

Secondth, be arranged between reflective collimating mirror and speculum, including first feedback spectroscope, first feedback object lens and It is arranged on the imaging sensor of reflective collimating mirror focal point;Reflected from the light beam of measured object surface reflection, then by speculum Afterwards, successively imaging is gathered by the first feedback dichroic mirror, the first feedback object lens transmission, by imaging sensor;In measured object Under conditions of surface is vertical with optical axis, imaging sensor institute is into a picture in image plane center position;

The angle adjustment measuring device includes setting angular adjustment apparatus, angular deflection measurement dress on the mirror Put and universal shaft, angular adjustment apparatus include the first driver and the second driver;Angular deflection measuring device includes first Sheet metal, the second sheet metal, the first capacitance sensor of corresponding first sheet metal position and corresponding second sheet metal position Second capacitance sensor;First driver, the first sheet metal and universal shaft point-blank, the second driver, the second gold medal Belong to piece and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal The line of axis;Angular deflection measuring device further includes common light path autocollimator.

A kind of portable high-accuracy laser realized on the big working distance autocollimation of above-mentioned portable high-accuracy laser Big working distance auto-collimation method, comprises the following steps:

Step a, bright light source is put, imaging sensor imaging, obtains a picture and deviate image plane center position Δ x and Δ y;

Step b, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is returned into a picture To image plane center position;

Step c, the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor are read C2, is reconverted into 1 Hes of angle change Δ θ of speculumThe angle of speculum is obtained by common light path autocollimator at the same time 2 Hes of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.

The above-mentioned big working distance autocollimation of portable high-accuracy laser, further includes Wavefront detecting system and wavefront compensation system System;

The Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and speculum deformation It is at least one in wave front detector;The Wavefront detecting spectroscope is arranged between speculum and measured object, air agitation ripple Preceding detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and speculum deformation wave front detector is arranged on the two of speculum In secondary reflection light path;

The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator;Mend The light beam of light source outgoing is repaid, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune System, is incided on Wavefront detecting spectroscope.

A kind of portable high-accuracy laser realized on the big working distance autocollimation of above-mentioned portable high-accuracy laser Big working distance auto-collimation method, it is desirable to which Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector;

Comprise the following steps:

Step a, reference substance of the surface perpendicular to optical axis direction is chosen;

Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector respectively obtains two groups of data of GA and GB;

Step c, G1=GA-GB, obtains wavefront variation caused by air agitation;

Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air Disturbance;

Step e, imaging sensor is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;

Step f, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is returned into a picture To image plane center position;

Step g, the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor are read C2, is reconverted into 1 Hes of angle change Δ θ of speculumThe angle for obtaining speculum by common light path autocollimator at the same time becomes Change 2 Hes of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.

A kind of portable high-accuracy laser realized on the big working distance autocollimation of above-mentioned portable high-accuracy laser Big working distance auto-collimation method, it is desirable to which Wavefront detecting system only includes Wavefront detecting spectroscope and speculum deformation Wavefront detecting Device;

Comprise the following steps:

Step a, reference substance of the surface perpendicular to optical axis direction is chosen;

Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Speculum deformation wave front detector respectively obtains two groups of data of GC and GD;

Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation;

Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air Disturbance and speculum deformation;

Step e, imaging sensor is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;

Step f, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is returned into a picture To image plane center position;

Step g, the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor are read C2, is reconverted into 1 Hes of angle change Δ θ of speculumThe angle for obtaining speculum by common light path autocollimator at the same time becomes Change 2 Hes of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.

A kind of portable high-accuracy laser realized on the big working distance autocollimation of above-mentioned portable high-accuracy laser Big working distance autocollimation method, it is desirable to Wavefront detecting system at the same time including Wavefront detecting spectroscope, air agitation wave front detector and Speculum deformation wave front detector;

Comprise the following steps:

Step a, reference substance of the surface perpendicular to optical axis direction is chosen;

Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector respectively obtains GC and GD two Group data;

Step c, G1=GA-GB, obtains wavefront variation caused by air agitation;G2=GC-GD, obtains air agitation and anti- Penetrate mirror deformation it is common caused by wavefront variation;G=G2-G1, obtains wavefront variation caused by speculum deformation;

Step d,

Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance;

Or

Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and Speculum deformation;

Or

Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation;

Step e, imaging sensor is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;

Step f, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is returned into a picture To image plane center position;

Step g, the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor are read C2, is reconverted into 1 Hes of angle change Δ θ of speculumThe angle for obtaining speculum by common light path autocollimator at the same time becomes Change 2 Hes of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.

Beneficial effect:

Compared with traditional autocollimator, invention increases speculum and angle on the mirror is set to adjust measurement Device, this structure setting, can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse position In the case of shifting, measuring device is adjusted by angle and adjusts speculum posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range Add the technical advantage of operating distance.

In addition, the present invention also has following several technical advantages:

Firstth, reflective collimating mirror, although adding manufacture difficulty, improving cost of manufacture, this structure are selected With the irreplaceable technical advantage of following three aspects:Collimating mirror reflective first is conducive to instrument miniaturization, makes portable Instrument;Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of its measurement accuracy is more obvious;3rd is to pass through plating Membrane technology, can realize that the heat absorption of reflective collimating mirror is far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem Raw, this not only enables whole system match high power light source, but also is also beneficial to ensure the measuring precision;

Secondth, imaging sensor is selected as the image device in feedback imaging system, it is big using image area sensor The characteristics of, it is ensured that in the case where measured object reflected light and incident light drift angle are larger, reflected light still is able into optical system Entrance pupil, is engaged without departing from range of receiving, then with speculum, realizes reflected light quickly real-time return compensation so that the present invention Auto-collimation working range or operating distance are greatly extended;

3rd, capacitance sensor and common light path autocollimator are selected collectively as angular deflection measuring device so that this hair It is bright can not only utilize capacitance sensor superelevation displacement sensory characteristic and displacement of the lines is easy to change in the range of minute angle For the good characteristic of angular displacement so that the present invention can have very high survey under the conditions of low sample frequency (20Hz and following) Accuracy of measurement, angle highest measurement resolving power can bring up to 0.0005 rad from 0.005 rad of traditional autocollimator, improve one The order of magnitude;And common light path autocollimator measurement accuracy can be utilized to be influenced small good characteristic by air ambient change so that The present invention can be under the unstable measuring environment of air ambient, it is ensured that measurement effectively carries out;The two is combined, moreover it is possible to plays prison Survey the effect of measuring environment stability;

4th, the present invention additionally uses following technology:First driver, the first sheet metal and universal shaft are straight at one On line, the second driver, the second sheet metal and universal shaft point-blank, and the company of the first driver and universal shaft The line of vertical second driver of line and universal shaft;The orthogonal two dimension setting of this two lines so that different line sides To data it is non-interference, without decoupling computing, so can conveniently demarcate, simplify calculating process, improve measuring speed.

Brief description of the drawings

Fig. 1 is the structure diagram of traditional auto-collimation angle measurement system.

Fig. 2 is the first structure of the big working distance autocollimation specific embodiment one of portable high-accuracy laser of the present invention Schematic diagram.

Fig. 3 is angular adjustment apparatus structure diagram in angle adjustment measuring device.

Fig. 4 is the structure diagram of the first structure of angular deflection measuring device in angle adjustment measuring device.

Fig. 5 is the structure diagram of second of structure of angular deflection measuring device in angle adjustment measuring device.

Fig. 6 is second of structure of the big working distance autocollimation specific embodiment one of portable high-accuracy laser of the present invention Schematic diagram.

Fig. 7 is the structural representation of the big working distance autocollimation specific embodiment two of portable high-accuracy laser of the present invention Figure.

Fig. 8 is the structural representation of the big working distance autocollimation specific embodiment three of portable high-accuracy laser of the present invention Figure.

Fig. 9 is the structural representation of the big working distance autocollimation specific embodiment four of portable high-accuracy laser of the present invention Figure.

In figure:1 light source, 22 reflective collimating mirrors, 3 speculums, 4 angles adjustment measuring device, 411 first drivers, 412 Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitance sensors, 424 second capacitance sensors, 429 common light path autocollimators, 43 universal shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedbacks Object lens, 65 imaging sensors, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflections Mirror deformation wave front detector, 8 wavefront compensation systems, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal space light modulations Device.

Specific embodiment

The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.

Specific embodiment one

The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy laser.

The big working distance autocollimation of portable high-accuracy laser of the present embodiment, structure diagram are as shown in Figure 2.Should be certainly Collimator apparatus includes light source 1, reflective collimating mirror 22, speculum 3 and feedback imaging system 6, is set on the speculum 3 Angled adjustment measuring device 4;The light beam that light source 1 is emitted, after reflective collimating mirror 22 is collimated into collimated light beam, then by anti- Penetrate mirror 3 to reflect, incide the surface of measured object 5;From the light beam of 5 surface of measured object reflection, then after the reflection of speculum 3, by Feed back the collection imaging of imaging system 6;

The feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope 61 With the imaging sensor 65 for being arranged on reflective 22 focal point of collimating mirror;From the light beam of 5 surface of measured object reflection, then by reflection After mirror 3 reflects, successively projected by reflective collimating mirror 22, the first feedback spectroscope 61 is reflected, gathered by imaging sensor 65 Imaging;Under conditions of vertical with optical axis on 5 surface of measured object, the institute of imaging sensor 65 is into a picture in image plane center position;

The angle adjustment measuring device 4 includes angular adjustment apparatus, the angular deflection measurement dress being arranged on speculum 3 Put and universal shaft 43, angular adjustment apparatus include the first driver 411 and the second driver 412;Angular deflection measuring device Including the first sheet metal 421, the second sheet metal 422, corresponding first sheet metal, 421 position the first capacitance sensor 423 and Second capacitance sensor 424 of corresponding second sheet metal, 422 position;First driver 411, the first sheet metal 421 and universal Axis 43 point-blank, the second driver 412, the second sheet metal 422 and universal shaft 43 point-blank, and The line of one driver 411, second driver 412 vertical with the line of universal shaft 43 and universal shaft 43, as shown in Figure 3;Angle is inclined Turn measuring device and further include common light path autocollimator 429, the light path autocollimator 429 altogether may be mounted at appointing for speculum 3 Meaning one side, as shown in Figure 4 and Figure 5.

It should be noted that in the present embodiment, feedback imaging system 6 is it is also an option that such as lower structure:It is arranged on reflection Between formula collimating mirror 22 and speculum 3, including the first feedback spectroscope 61, first feeds back object lens 63 and is arranged on reflective collimation The imaging sensor 65 of 22 focal point of mirror;From the light beam of 5 surface of measured object reflection, then after the reflection of speculum 3, successively pass through First feedback spectroscope 61 reflects, the first feedback object lens 63 transmit, gather imaging by imaging sensor 65;On 5 surface of measured object Under conditions of vertical with optical axis, the institute of imaging sensor 65 is into a picture in image plane center position;As shown in Figure 6.

Specific embodiment two

The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy laser.

The big working distance autocollimation of portable high-accuracy laser of the present embodiment, structure diagram are as shown in Figure 7.Having On the basis of body embodiment one, the big working distance autocollimation of portable high-accuracy laser of the present embodiment is additionally provided with wavefront spy Examining system 7 and wavefront compensation system 8;

The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72;The wavefront Detection spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting On the reflected light path of mirror 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3;

The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space Device 83;The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Optical modulator 83 is modulated, and is incided on Wavefront detecting spectroscope 71.

Specific embodiment three

The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy laser.

The big working distance autocollimation of portable high-accuracy laser of the present embodiment, structure diagram are as shown in Figure 8.Having On the basis of body embodiment one, the big working distance autocollimation of portable high-accuracy laser of the present embodiment is additionally provided with wavefront spy Examining system 7 and wavefront compensation system 8;

The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and speculum deformation wave front detector 73;The ripple Preceding detection spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting point On the reflected light path of light microscopic 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3;

The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space Device 83;The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Optical modulator 83 is modulated, and is incided on Wavefront detecting spectroscope 71.

Specific embodiment four

The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy laser.

The big working distance autocollimation of portable high-accuracy laser of the present embodiment, structure diagram are as shown in Figure 9.Having On the basis of body embodiment one, the big working distance autocollimation of portable high-accuracy laser of the present embodiment is additionally provided with wavefront spy Examining system 7 and wavefront compensation system 8;

The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and speculum shape Become wave front detector 73;The Wavefront detecting spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wavefront is visited Survey device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, speculum deformation wave front detector 73 is arranged on speculum 3 Secondary reflection light path on;

The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space Device 83;The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Optical modulator 83 is modulated, and is incided on Wavefront detecting spectroscope 71.

For above autocollimation embodiment, also have need to illustrate at following 2 points:

Firstth, the first driver 411 and the second driver 412 in described angular adjustment apparatus, can both select to drive The stepper motor or motor servo driver of speed, and the higher piezoelectric ceramic actuator of driving precision can be selected, also Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator;Those skilled in the art can basis Actual needs is reasonably selected.

Secondth, in all of above autocollimation embodiment, angular deflection measuring device all only includes two pairs of sheet metals With the combination of capacitance sensor, this design acquiescence speculum 3 does not produce translation and makes during the work time;If examine Consider speculum 3 to produce translation at work and influence measurement accuracy, the 3rd pair of metal can be placed at 43 position of universal shaft The combination of piece and capacitance sensor, to offset the identical translation that three capacitance sensors produce, it is ensured that measurement accuracy.

Specific embodiment five

The present embodiment is realized on the big working distance autocollimation of portable high-accuracy laser described in specific embodiment one The big working distance auto-collimation embodiment of the method for portable high-accuracy laser.

The big working distance auto-collimation method of portable high-accuracy laser of the present embodiment, comprises the following steps:

Step a, bright light source 1 is put, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;

Step b, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65 Institute returns to image plane center position into a picture;

Step c, the capacitance change, Δ C1 of the first capacitance sensor 423, and the capacitance of the second capacitance sensor 424 are read Changes delta C2, is reconverted into 1 Hes of angle change Δ θ of speculum 3Reflected at the same time by common light path autocollimator 429 2 Hes of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.

The main innovative point of the present invention is the angle adjustment measurement dress for adding speculum 3 and being arranged on speculum 3 4 are put, this structure can have larger drift angle or the feelings there are relatively larger transverse displacement between 5 incident light of measured object and reflected light Under condition, 4 whole speculum posture of measuring device tune is adjusted by angle, makes reflected light backtracking and is connect by feedback imaging system 6 Receive, effectively avoid the problem that measured object reflected light deviates measuring system and leads to not measurement.

However, the introducing of speculum 3, its face type error can be delivered in final result, reduce the measurement accuracy of system;Together When, the increase of operating distance causes the air agitation between speculum 3 and measured object 5 can not ignore again, can also reduce system Measurement accuracy.As it can be seen that to realize high-acruracy survey, 3 face type error of speculum and speculum 3 are just must take into account with being tested Influence of the air agitation to measurement result between thing 5, for this reason, devising specific embodiment six, specific embodiment seven and specific

Embodiment eight.

Specific embodiment six

The present embodiment is realized on the big working distance autocollimation of portable high-accuracy laser described in specific embodiment two The big working distance auto-collimation embodiment of the method for portable high-accuracy laser.

The big working distance auto-collimation method of portable high-accuracy laser of the present embodiment, comprises the following steps:

Step a, reference substance of the surface perpendicular to optical axis direction is chosen;

Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB;

Step c, G1=GA-GB, obtains wavefront variation caused by air agitation;

Step d, according to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated Air agitation;

Step e, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;

Step f, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65 Institute returns to image plane center position into a picture;

Step g, the capacitance change, Δ C1 of the first capacitance sensor 423, and the capacitance of the second capacitance sensor 424 are read Changes delta C2, is reconverted into 1 Hes of angle change Δ θ of speculum 3Reflected at the same time by common light path autocollimator 429 2 Hes of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.

Implement the method for the present embodiment on the device of specific embodiment two, air agitation wave front detector 72 can be utilized Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, is finally realized without air agitation The high-acruracy survey of influence.

Specific embodiment seven

The present embodiment is realized on the big working distance autocollimation of portable high-accuracy laser described in specific embodiment three The big working distance auto-collimation embodiment of the method for portable high-accuracy laser.

The big working distance auto-collimation method of portable high-accuracy laser of the present embodiment, comprises the following steps:

Step a, reference substance of the surface perpendicular to optical axis direction is chosen;

Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, speculum deformation wave front detector 73 respectively obtain two groups of data of GC and GD;

Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation;

Step d, according to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated Air agitation and speculum deformation;

Step e, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;

Step f, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65 Institute returns to image plane center position into a picture;

Step g, the capacitance change, Δ C1 of the first capacitance sensor 423, and the capacitance of the second capacitance sensor 424 are read Changes delta C2, is reconverted into 1 Hes of angle change Δ θ of speculum 3Reflected at the same time by common light path autocollimator 429 2 Hes of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.

Implement the method for the present embodiment on the device of specific embodiment three, speculum deformation wave front detector can be utilized Air agitation and speculum deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and speculum Deformation carries out entire compensation, finally realizes the high-acruracy survey without air agitation and speculum influence of crust deformation.

Specific embodiment eight

The present embodiment is realized on the big working distance autocollimation of portable high-accuracy laser described in specific embodiment four The big working distance auto-collimation embodiment of the method for portable high-accuracy laser.

The big working distance auto-collimation method of portable high-accuracy laser of the present embodiment, comprises the following steps:

Step a, reference substance of the surface perpendicular to optical axis direction is chosen;

Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and speculum deformation wave front detector 73 respectively obtains GC With two groups of data of GD;

Step c, G1=GA-GB, obtains wavefront variation caused by air agitation;G2=GC-GD, obtains air agitation and anti- Penetrate mirror deformation it is common caused by wavefront variation;G=G2-G1, obtains wavefront variation caused by speculum deformation;

Step d,

According to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed It is dynamic;

Or

According to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed Dynamic and speculum deformation;

Or

According to 83 parameter of f5 (G) adjustment transmission liquid crystals spatial light modulator, compensatory light 81, compensatory reflex mirror shape are lighted Become;

Step e, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;

Step f, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65 Institute returns to image plane center position into a picture;

Step g, the capacitance change, Δ C1 of the first capacitance sensor 423, and the capacitance of the second capacitance sensor 424 are read Changes delta C2, is reconverted into 1 Hes of angle change Δ θ of speculum 3Reflected at the same time by common light path autocollimator 429 2 Hes of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.

Implement the method for the present embodiment on the device of specific embodiment four, air agitation wave front detector 72 can be utilized Air agitation and speculum deformation are separately separated with speculum deformation wave front detector 73, and then optionally to air Disturbance carries out separate compensation, separate compensation is carried out to speculum deformation or carries out overall benefit to air agitation and speculum deformation Repay, finally realize that the high accuracy without air agitation or no-mirror deformation or without air agitation and speculum influence of crust deformation is surveyed Amount.

The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and speculum deformation Influence size of the part to result is individually assessed, and can not only be found out in air agitation and speculum deformation, who is to influence The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while speculum processing quality is carried out Effective evaluation.

Claims (6)

1. a kind of big working distance autocollimation of portable high-accuracy laser, it is characterised in that including light source (1), reflective standard Straight mirror (22), speculum (3) and feedback imaging system (6), set angled adjustment measuring device on the speculum (3) (4);The light beam of light source (1) outgoing, reflects after reflective collimating mirror (22) is collimated into collimated light beam, then by speculum (3), Incide the surface of measured object (5);From the light beam of measured object (5) surface reflection, then after speculum (3) reflection, by feeding back Imaging system (6) collection imaging;
The feedback imaging system (6) is one kind in following two forms:
Firstth, it is arranged between light source (1) and reflective collimating mirror (22), including first feeds back spectroscope (61) and be arranged on anti- Penetrate the imaging sensor (65) of formula collimating mirror (22) focal point;From the light beam of measured object (5) surface reflection, then by speculum (3) after reflecting, successively by reflective collimating mirror (22) projection, the first feedback spectroscope (61) reflection, by imaging sensor (65) collection imaging;Under conditions of vertical with optical axis on measured object (5) surface, imaging sensor (65) institute is into a picture in image planes Heart position;
Secondth, it is arranged between reflective collimating mirror (22) and speculum (3), including it is the first feedback spectroscope (61), first anti- Feedback object lens (63) and the imaging sensor (65) for being arranged on reflective collimating mirror (22) focal point;Reflected from measured object (5) surface Light beam, then by speculum (3) reflection after, successively by first feedback spectroscope (61) reflection, first feedback object lens (63) Transmit, imaging is gathered by imaging sensor (65);Under conditions of vertical with optical axis on measured object (5) surface, imaging sensor (65) institute into a picture in image plane center position;
The angle adjustment measuring device (4) includes angular adjustment apparatus, the angular deflection measurement dress being arranged on speculum (3) Put and universal shaft (43), angular adjustment apparatus include the first driver (411) and the second driver (412);Angular deflection is surveyed Measuring device includes the first sheet metal (421), the second sheet metal (422), the first capacitance biography of corresponding first sheet metal (421) position Sensor (423) and second capacitance sensor (424) of corresponding second sheet metal (422) position;First driver (411), One sheet metal (421) and universal shaft (43) point-blank, the second driver (412), the second sheet metal (422) and Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43) (412) with the line of universal shaft (43);Angular deflection measuring device further includes common light path autocollimator (429).
2. the big working distance autocollimation of portable high-accuracy laser according to claim 1, it is characterised in that further include Wavefront detecting system (7) and wavefront compensation system (8);
The Wavefront detecting system (7) is including Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and instead Penetrate at least one in mirror deformation wave front detector (73);The Wavefront detecting spectroscope (71) is arranged on speculum (3) and quilt Survey between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), speculum Deformation wave front detector (73) is arranged in the secondary reflection light path of speculum (3);
The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed;The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and is incided on Wavefront detecting spectroscope (71).
3. it is a kind of realized on the big working distance autocollimation of portable high-accuracy laser described in claim 1 it is portable high-precision Spend the big working distance auto-collimation method of laser, it is characterised in that comprise the following steps:
Step a, bright light source (1) is put, imaging sensor (65) imaging, obtains a picture and deviate image plane center position Δ x and Δ y;
Step b, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor (65) institute returns to image plane center position into a picture;
Step c, the capacitance change, Δ C1 of the first capacitance sensor (423), and the capacitance of the second capacitance sensor (424) are read Changes delta C2, is reconverted into 1 Hes of angle change Δ θ of speculum (3)Obtained at the same time by common light path autocollimator (429) 2 Hes of angle change Δ θ of speculum (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface;Wherein, Δ θ 1= F1 (Δ C1, Δ C2), With F1, f2, f3, f4 represent 4 functions.
4. it is a kind of realized on the big working distance autocollimation of portable high-accuracy laser described in claim 2 it is portable high-precision Spend the big working distance auto-collimation method of laser, it is desirable to which Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air is disturbed Dynamic wave front detector (72);
It is characterised in that it includes following steps:
Step a, reference substance of the surface perpendicular to optical axis direction is chosen;
Step b, bright light source (1) is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB;
Step c, G1=GA-GB, obtains wavefront variation caused by air agitation;
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), compensated Air agitation;
Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;
Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor (65) institute returns to image plane center position into a picture;
Step g, the capacitance change, Δ C1 of the first capacitance sensor (423), and the capacitance variations of the second capacitance sensor (424) are read Δ C2, is reconverted into 1 Hes of angle change Δ θ of speculum (3)Speculum is obtained by common light path autocollimator (429) at the same time (3) 2 Hes of angle change Δ θAnd then obtain the angle change Δ α and Δ β on measured object (5) surface;Wherein, Δ θ 1=f1 (Δs C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.
5. it is a kind of realized on the big working distance autocollimation of portable high-accuracy laser described in claim 2 it is portable high-precision Spend the big working distance auto-collimation method of laser, it is desirable to which Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and speculum Deformation wave front detector (73);
It is characterised in that it includes following steps:
Step a, reference substance of the surface perpendicular to optical axis direction is chosen;
Step b, bright light source (1) is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Speculum deformation wave front detector (73) respectively obtains two groups of data of GC and GD;
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation;
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), compensated Air agitation and speculum deformation;
Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;
Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor (65) institute returns to image plane center position into a picture;
Step g, the capacitance change, Δ C1 of the first capacitance sensor (423), and the capacitance variations of the second capacitance sensor (424) are read Δ C2, is reconverted into 1 Hes of angle change Δ θ of speculum (3)Speculum is obtained by common light path autocollimator (429) at the same time (3) angle change Δ θ 2 and Δ φ 2, and then obtain the angle change Δ α and Δ β on measured object (5) surface;Wherein, Δ θ 1=f1 (Δs C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.
6. it is a kind of realized on the big working distance autocollimation of portable high-accuracy laser described in claim 2 it is portable high-precision Spend the big working distance auto-collimation method of laser, it is desirable to Wavefront detecting system (7) while disturbed including Wavefront detecting spectroscope (71), air Dynamic wave front detector (72) and speculum deformation wave front detector (73);
It is characterised in that it includes following steps:
Step a, reference substance of the surface perpendicular to optical axis direction is chosen;
Step b, bright light source (1) is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector (73) respectively obtains Two groups of data of GC and GD;
Step c, G1=GA-GB, obtains wavefront variation caused by air agitation;G2=GC-GD, obtains air agitation and speculum Wavefront variation caused by deformation is common;G=G2-G1, obtains wavefront variation caused by speculum deformation;
Step d,
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed It is dynamic;
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and speculum deformation;
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), lights compensatory light (81), compensatory reflex mirror shape Become;
Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y;
Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor (65) institute returns to image plane center position into a picture;
Step g, the capacitance change, Δ C1 of the first capacitance sensor (423) is read, and the capacitance of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into 1 Hes of angle change Δ θ of speculum (3)Reflected at the same time by common light path autocollimator (429) 2 Hes of angle change Δ θ of mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface;Wherein, Δ θ 1=f1 (Δs C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.
CN201610639081.9A 2016-08-07 2016-08-07 A kind of big working distance autocollimation of portable high-accuracy laser and method CN106017441B (en)

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