CN106323197B - The big working distance autocollimation of portable array zeroing high-precision laser and method - Google Patents

The big working distance autocollimation of portable array zeroing high-precision laser and method Download PDF

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Publication number
CN106323197B
CN106323197B CN201610638787.3A CN201610638787A CN106323197B CN 106323197 B CN106323197 B CN 106323197B CN 201610638787 A CN201610638787 A CN 201610638787A CN 106323197 B CN106323197 B CN 106323197B
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reflecting mirror
driver
mirror
quadrant detector
detector
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CN106323197A (en
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谭欣然
王超
谭久彬
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Abstract

The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to the big working distance autocollimation of portable array zeroing high-precision laser and method;The device is made of light source, collimating mirror, reflecting mirror and feedback imaging system;This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on reflecting mirror is recycled to obtain the angle change on measured object surface by adjusting reflecting mirror;Since the present invention increases reflecting mirror on traditional auto-collimation angle measurement system, therefore it can be avoided the problem of measured object reflected light deviates measuring system and leads to not measurement, and then has and increase auto-collimation working range under identical operating distance, or increase the advantage of operating distance under identical working range;In addition, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., making the present invention also has miniature portable, measurement accuracy high;Measurement environmental stability can also be monitored simultaneously;And the technical advantage of rapid survey.

Description

The big working distance autocollimation of portable array zeroing high-precision laser and method
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to portable array zeroing high-precision The big working distance autocollimation of laser and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly In domain, urgent need carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree Measurement;Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement;Maximum functional distance From several meters to rice up to a hundred;Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional Grid combination, can carry out the measurement of space angle;Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field wide General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system 6;The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam;From The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object The nearly backtracking of the light beam of reflection could be acquired by feedback imaging system 6 and is imaged, and then realize effectively measurement.This road Jin Yuan The condition of return limits, so that there are following two aspects disadvantages for the system:
The first, the range of 5 mirror surface normal of measurand and Laser Autocollimator optical axis included angle cannot be too big, otherwise can It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed Amount;
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light Axis and autocollimator optical axis deviation minute angle will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system, into And lead to not realize auto-collimation and micro angle measurement.
Two above problem be limited to traditional auto-collimation instrument can only under low-angle, small operating distance and use.
Summary of the invention
For two problems present in traditional autocollimator, the invention discloses a kind of portable array zeroing high-precisions The big working distance autocollimation of laser and method have and dramatically increase under identical operating distance compared with traditional autocollimator Auto-collimation working range, or dramatically increase under identical auto-collimation working range the technical advantage of operating distance.
The object of the present invention is achieved like this:
The portable array zeroing big working distance autocollimation of high-precision laser, including light source, reflective collimating mirror, reflection Mirror and feedback imaging system, are arranged angled adjustment measuring device on the reflecting mirror;The light beam of light source outgoing, by anti- It after the formula collimating mirror of penetrating is collimated into collimated light beam, then is reflected by reflecting mirror, is incident on the surface of measured object;From measured object surface reflection Light beam, after being reflected using reflecting mirror, by feedback imaging system acquire be imaged;
The feedback imaging system is one of following two form:
The first, it is arranged between light source and reflective collimating mirror, including the first feedback spectroscope and setting are reflective The 4 quadrant detector of focal plane of collimating mirror and multiple single pixel photoelectric converters, the single pixel photoelectric converter is at array point Cloth, 4 quadrant detector be not only located at array center but also be located on feedback imaging system optical axis;From the light of measured object surface reflection Beam after reflecting using reflecting mirror, is successively visited by the transmission of reflective collimating mirror, the first feedback spectroscope reflection, by four-quadrant Survey device or the acquisition imaging of single pixel photoelectric converter;
The second, be arranged between reflective collimating mirror and reflecting mirror, including first feedback spectroscope, first feedback object lens and The 4 quadrant detector and multiple single pixel photoelectric converters of reflective focal plane of collimating mirror, the single pixel photoelectric conversion are set At array distribution, 4 quadrant detector had not only been located at array center but also had been located on feedback imaging system optical axis device;From measured object surface The light beam of reflection, after being reflected using reflecting mirror, successively by first feedback spectroscope reflection, first feedback object lens transmission, by 4 quadrant detector or the acquisition imaging of single pixel photoelectric converter;
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver;Angular deflection measuring device includes first Sheet metal, the second sheet metal, the first capacitor sensor of corresponding first sheet metal position and corresponding second sheet metal position Second capacitance sensor;First driver, the first sheet metal and universal shaft point-blank, the second driver, the second gold medal Belong to piece and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal The line of axis;Angular deflection measuring device further includes total optical path autocollimator.
It is realized on the above-mentioned portable array zeroing big working distance autocollimation of high-precision laser portable The portable array zeroing big working distance auto-collimation method of high-precision laser, comprising the following steps:
Step a, bright light source is put, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate, It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture 4 quadrant detector region, enters step b;
The second, the point image position obtained is directly entered step b in 4 quadrant detector region;
Step b, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture Face center;
Step c, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe angle of reflecting mirror is obtained by total optical path autocollimator simultaneously 2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.
The above-mentioned portable array zeroing big working distance autocollimation of high-precision laser, further includes Wavefront detecting system and wave Precompensation system;
The Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation At least one of wave front detector;The Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation wave Preceding detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged in the two of reflecting mirror In secondary reflection optical path;
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator;It mends The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune System, is incident on Wavefront detecting spectroscope.
The portable array tune realized on the above-mentioned portable array zeroing big working distance autocollimation of high-precision laser The big working distance auto-collimation method of zero high-precision laser, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation Wave front detector;
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector respectively obtains two groups of data of GA and GB;
Step c, G1=GA-GB obtains wavefront variation caused by air agitation;
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air Disturbance;
Step e, bright light source is put, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate, It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture 4 quadrant detector region, enters step f;
The second, the point image position obtained is directly entered step f in 4 quadrant detector region;
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture Face center;
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorBecome simultaneously by the angle that total optical path autocollimator obtains reflecting mirror Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.
It is realized on the above-mentioned portable array zeroing big working distance autocollimation of high-precision laser portable The portable array zeroing big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system only includes Wavefront detecting light splitting Mirror and reflecting mirror deformation wave front detector;
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD;
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation;
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air Disturbance and reflecting mirror deformation;
Step e, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate, It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture 4 quadrant detector region, enters step f;
The second, the point image position obtained is directly entered step f in 4 quadrant detector region;
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture Face center;
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe angle of reflecting mirror is obtained by total optical path autocollimator simultaneously 2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.
The portable array tune realized on the above-mentioned portable array zeroing big working distance autocollimation of high-precision laser The big working distance auto-collimation method of zero high-precision laser, it is desirable that Wavefront detecting system includes that Wavefront detecting spectroscope, air are disturbed simultaneously Dynamic wave front detector and reflecting mirror deformation wave front detector;
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two Group data;
Step c, G1=GA-GB obtains wavefront variation caused by air agitation;G2=GC-GD obtains air agitation and anti- Penetrate mirror deformation it is common caused by wavefront variation;G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation;
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance, f5 Indicate a function;
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and Reflecting mirror deformation, f5 indicate a function;
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation, F5 indicates a function;
Step e, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate, It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture 4 quadrant detector region, enters step f;
The second, the point image position obtained is directly entered step f in 4 quadrant detector region;
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture Face center;
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorBecome simultaneously by the angle that total optical path autocollimator obtains reflecting mirror Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table Show 4 functions.
The utility model has the advantages that
Compared with traditional autocollimator, invention increases the angle of reflecting mirror and setting on the mirror to adjust measurement Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions In the case where shifting, measuring device is adjusted by angle and adjusts reflecting mirror posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range Add the technical advantage of operating distance.
In addition to this, the present invention also has following a few technical advantages:
The first, reflective collimating mirror, although increasing manufacture difficulty, improving cost of manufacture, this structure are selected With the irreplaceable technical advantage of following three aspect: collimating mirror reflective first is conducive to instrument miniaturization, makes portable Instrument;Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of measurement accuracy is more obvious;Third is to pass through plating Membrane technology, the heat absorption that can be realized reflective collimating mirror are far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem Raw, this not only enables whole system match high power light source, but also is also beneficial to guarantee the measuring precision;
The second, select multiple single pixel photoelectric converters and 4 quadrant detector collectively as in feedback imaging system at As device, the advantage that multiple single pixel photoelectric converter areas are big and 4 quadrant detector position resolution is high is combined;Its In, multiple single pixel photoelectric converters combine, it can be ensured that under measured object reflected light and the biggish situation in incident light drift angle, Reflected light still is able to the entrance pupil into optical system, without departing from range of receiving;On this basis, reflecting mirror is recycled to realize instead Light quickly real-time return compensation is penetrated, reflected light is adjusted to 4 quadrant detector position, and can be according to 4 quadrant detector High position resolution advantage obtain higher angle-measurement accuracy;Therefore, by multiple single pixel photoelectric converters and four-quadrant Limit detector combines, and not only makes auto-collimation working range or operating distance of the present invention greatly be extended, but also be conducive to Improve angle-measurement accuracy;
Third, selection capacitance sensor and total optical path autocollimator are collectively as angular deflection measuring device, so that this hair The bright superelevation that can not only utilize capacitance sensor is displaced sensory characteristic and displacement of the lines is easy to convert within the scope of minute angle For the good characteristic of angular displacement, allow the invention to that there is very high survey under the conditions of low sample frequency (20Hz and following) Accuracy of measurement, angle highest measurement resolving power can be increased to 0.0005 rad from 0.005 rad of traditional autocollimator, improve one The order of magnitude;And small good characteristic can be influenced by air environment variation using optical path autocollimator measurement accuracy altogether, so that The present invention can be under the unstable measurement environment of air environment, it is ensured that measurement effectively carries out;The two combines, moreover it is possible to play prison The effect of measurement environmental stability;
4th, the present invention additionally uses following technology: the first driver, the first sheet metal and universal shaft are straight at one article On line, the second driver, the second sheet metal and universal shaft point-blank, and the company of the first driver and universal shaft The line of line vertical second driver and universal shaft;The orthogonal two dimension setting of this two lines, so that different line sides To data it is non-interference, without decoupling operation, calibration can be facilitated in this way, simplify calculating process, improve measuring speed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the of the present invention portable array zeroing big working distance autocollimation specific embodiment one of high-precision laser A kind of structural schematic diagram.
Fig. 3 is angular adjustment apparatus structural schematic diagram in angle adjustment measuring device.
Fig. 4 is the structural schematic diagram of the first structure of angular deflection measuring device in angle adjustment measuring device.
Fig. 5 is the structural schematic diagram of second of structure of angular deflection measuring device in angle adjustment measuring device.
Fig. 6 is the of the present invention portable array zeroing big working distance autocollimation specific embodiment one of high-precision laser Two kinds of structural schematic diagrams.
Fig. 7 is the knot of the portable array zeroing big working distance autocollimation specific embodiment two of high-precision laser of the present invention Structure schematic diagram.
Fig. 8 is the knot of the portable array zeroing big working distance autocollimation specific embodiment three of high-precision laser of the present invention Structure schematic diagram.
Fig. 9 is the knot of the portable array zeroing big working distance autocollimation specific embodiment four of high-precision laser of the present invention Structure schematic diagram.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angles adjust measuring device, 411 first drivers, 412 Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitor sensors, 424 second capacitance sensors, 429 traditional auto-collimation systems, 43 universal shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedbacks Object lens, 66 4 quadrant detectors, 67 single pixel photoelectric converters, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air Disturb wave front detector, 73 reflecting mirror deformation wave front detectors, 8 wavefront compensation systems, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high-precision laser.
The portable array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Fig. 2 It is shown.The autocollimation includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feedback imaging system 6, the reflection Angled adjustment measuring device 4 is set on mirror 3;The light beam that light source 1 is emitted, is collimated into collimated light beam by reflective collimating mirror 22 Afterwards, then by reflecting mirror 3 it reflects, is incident on the surface of measured object 5;From the light beam of 5 surface reflection of measured object, using reflecting mirror 3 After reflection, is acquired and be imaged by feedback imaging system 6;
The feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope 61 and the 4 quadrant detector 66 and multiple single pixel photoelectric converters 67 of reflective 22 focal plane of collimating mirror are set, it is described At array distribution, 4 quadrant detector 66 had not only been located at array center but also had been located at feedback imaging system 6 single pixel photoelectric converter 67 On optical axis;From the light beam of 5 surface reflection of measured object, after being reflected using reflecting mirror 3, thoroughly by reflective collimating mirror 22 successively It penetrates, the first feedback spectroscope 61 reflects, by 4 quadrant detector 66 or the acquisition imaging of single pixel photoelectric converter 67;
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection measurement dress It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412;Angular deflection measuring device Including the first sheet metal 421, the second sheet metal 422, corresponding first sheet metal, 421 position first capacitor sensor 423 and Second capacitance sensor 424 of corresponding second sheet metal, 422 position;First driver 411, the first sheet metal 421 and universal Axis 43 point-blank, the second driver 412, the second sheet metal 422 and universal shaft 43 point-blank, and The line of one driver 411 vertical with the line of universal shaft 43 second driver 412 and universal shaft 43, as shown in Figure 3;Angle is inclined Turning measuring device further includes total optical path autocollimator 429, and the optical path autocollimator 429 altogether may be mounted at appointing for reflecting mirror 3 Meaning one side, as shown in Figure 4 and Figure 5.
It should be noted that in the present embodiment, feedback imaging system 6 is it is also an option that such as flowering structure: setting is being reflected Between formula collimating mirror 22 and reflecting mirror 3, including the first feedback spectroscope 61, first feeds back object lens 63 and is arranged in reflective collimation The 4 quadrant detector 66 of 22 focal plane of mirror and multiple single pixel photoelectric converters 67, the single pixel photoelectric converter 67 is at array Distribution, 4 quadrant detector 66 be not only located at array center but also be located on feedback 6 optical axis of imaging system;From 5 surface reflection of measured object Light beam, using reflecting mirror 3 reflect after, successively by first feedback spectroscope 61 reflection, first feedback object lens 63 transmission, by 4 quadrant detector 66 or the acquisition imaging of single pixel photoelectric converter 67;As shown in Figure 6.
Specific embodiment two
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high-precision laser.
The portable array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Fig. 7 It is shown.On the basis of specific embodiment one, the portable array zeroing big working distance auto-collimation of high-precision laser of the present embodiment Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8;
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72;The wavefront It detects spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3;
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space Device 83;The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high-precision laser.
The portable array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Fig. 8 It is shown.On the basis of specific embodiment one, the portable array zeroing big working distance auto-collimation of high-precision laser of the present embodiment Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8;
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73;The wave Preceding detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3;
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space Device 83;The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high-precision laser.
The portable array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Fig. 9 It is shown.On the basis of specific embodiment one, the portable array zeroing big working distance auto-collimation of high-precision laser of the present embodiment Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8;
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape Become wave front detector 73;The Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged in reflecting mirror 3 Secondary reflection optical path on;
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space Device 83;The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, need to illustrate there are also following two points:
The first, the first driver 411 and the second driver 412 in the described angular adjustment apparatus, both can choose driving The stepper motor or motor servo driver of fast speed, and can choose the driving higher piezoelectric ceramic actuator of precision, also Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator;Those skilled in the art can basis Actual needs is reasonably selected.
The second, in all of above autocollimation embodiment, angular deflection measuring device all only includes two pairs of sheet metals With the combination of capacitance sensor, this design default reflecting mirror 3 does not generate translation during the work time and makes;If examined Consider reflecting mirror 3 to generate translation at work and influence measurement accuracy, third can be placed at 43 position of universal shaft to metal The combination of piece and capacitance sensor, to offset the identical translation that three capacitance sensors generate, it is ensured that measurement accuracy.
Specific embodiment five
The present embodiment is the portable big working distance auto-collimation dress of array zeroing high-precision laser described in specific embodiment one Set the portable array zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, bright light source 1 is put, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67 Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror Degree, makes a picture return to 66 region of 4 quadrant detector, enters step b;
The second, the point image position obtained is directly entered step b in 66 region of 4 quadrant detector;
Step b, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant Limit 66 image plane center position of detector;
Step c, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
Main innovative point of the invention is the angle adjustment measurement dress for increasing reflecting mirror 3 and being arranged on reflecting mirror 3 4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement Under condition, the whole reflecting mirror posture of measuring device tune 4 is adjusted by angle, makes reflected light backtracking and is connect by feedback imaging system 6 It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement.
However, the introducing of reflecting mirror 3, face type error can be transmitted in final result, reduce the measurement accuracy of system;Together When, the increase of operating distance can not ignore the air agitation between reflecting mirror 3 and measured object 5 again, can also reduce system Measurement accuracy.As it can be seen that just must take into account 3 face type error of reflecting mirror and reflecting mirror 3 to realize high-acruracy survey and be tested Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment six, specific embodiment seven and specific Embodiment eight.
Specific embodiment six
The present embodiment is the portable big working distance auto-collimation dress of array zeroing high-precision laser described in specific embodiment two Set the portable array zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB;
Step c, G1=GA-GB obtains wavefront variation caused by air agitation;
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, compensated Air agitation;
Step e, bright light source 1 is put, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67 Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f;
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector;
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant Limit 66 image plane center position of detector;
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment two, can utilize air agitation wave front detector 72 Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation The high-acruracy survey of influence.
Specific embodiment seven
The present embodiment is the portable big working distance auto-collimation dress of array zeroing high-precision laser described in specific embodiment three Set the portable array zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, reflecting mirror deformation wave front detector 73 respectively obtain two groups of data of GC and GD;
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation;
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, compensated Air agitation and reflecting mirror deformation;
Step e, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67 Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f;
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector;
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant Limit 66 image plane center position of detector;
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize reflecting mirror deformation wave front detector Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and reflecting mirror Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is the portable big working distance auto-collimation dress of array zeroing high-precision laser described in specific embodiment four Set the portable array zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC With two groups of data of GD;
Step c, G1=GA-GB obtains wavefront variation caused by air agitation;G2=GC-GD obtains air agitation and anti- Penetrate mirror deformation it is common caused by wavefront variation;G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation;
Step d,
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, make-up air is disturbed It is dynamic;
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, make-up air is disturbed Dynamic and reflecting mirror deformation;
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G), lights compensatory light 81, compensatory reflex mirror shape Become;
Step e, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67 Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f;
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector;
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant Limit 66 image plane center position of detector;
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize air agitation wave front detector 72 Air agitation and reflecting mirror deformation are separately separated with reflecting mirror deformation wave front detector 73, and then selectively to air Disturbance carries out separate compensation, separate compensation is carried out to reflecting mirror deformation or carries out whole benefit to air agitation and reflecting mirror deformation It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and reflecting mirror influence of crust deformation Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and reflecting mirror deformation Influence size of the part to result is individually assessed, and can not only be found out in air agitation and reflecting mirror deformation, who is to influence The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while reflecting mirror processing quality is carried out Effective evaluation.

Claims (4)

  1. The big working distance autocollimation of high-precision laser 1. portable array returns to zero, which is characterized in that including light source (1), reflection Angled adjustment is arranged on the reflecting mirror (3) and measures for formula collimating mirror (22), reflecting mirror (3) and feedback imaging system (6) Device (4);The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then by reflecting mirror (3) Reflection, is incident on the surface of measured object (5);From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, by Feed back imaging system (6) acquisition imaging;
    The feedback imaging system (6) is one of following two form:
    The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) and setting In the 4 quadrant detector (66) and multiple single pixel photoelectric converters (67) of reflective collimating mirror (22) focal plane, the single pixel Photoelectric converter (67) had not only been located at array center but also had been located at feedback imaging system (6) at array distribution, 4 quadrant detector (66) On optical axis;Successively pass through reflective collimating mirror after reflecting mirror (3) reflection from the light beam of measured object (5) surface reflection (22) transmission, the first feedback spectroscope (61) are reflected, are acquired by 4 quadrant detector (66) or single pixel photoelectric converter (67) Imaging;
    The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first are instead It presents object lens (63) and the 4 quadrant detector (66) in reflective collimating mirror (22) focal plane and multiple single pixel photoelectric conversions is set Device (67), the single pixel photoelectric converter (67) are not only located at array center but also position at array distribution, 4 quadrant detector (66) In on feedback imaging system (6) optical axis;From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, successively By the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by 4 quadrant detector (66) or single pixel light Electric transducer (67) acquisition imaging;
    Angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection measurement dress It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412);Angular deflection is surveyed Measure the first capacitor biography that device includes the first sheet metal (421), the second sheet metal (422), corresponding first sheet metal (421) position Sensor (423) and second capacitance sensor (424) of corresponding second sheet metal (422) position;First driver (411), One sheet metal (421) and universal shaft (43) point-blank, the second driver (412), the second sheet metal (422) and Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43) (412) with the line of universal shaft (43);Angular deflection measuring device further includes total optical path autocollimator (429);
    It further include Wavefront detecting system (7) and wavefront compensation system (8);
    The Wavefront detecting system (7) is one of following three kinds of situations: situation one including Wavefront detecting spectroscope (71) and Air agitation wave front detector (72);Situation two including Wavefront detecting spectroscope (71) and reflecting mirror deformation wave front detector (73);Situation three including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation Wavefront detecting Device (73);The Wavefront detecting spectroscope (71) is arranged between reflecting mirror (3) and measured object (5), air agitation Wavefront detecting Device (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), and reflecting mirror deformation wave front detector (73) setting is being reflected In the secondary reflection optical path of mirror (3);
    The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed;The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) modulation, is incident on Wavefront detecting spectroscope (71).
  2. 2. being realized on the portable array zeroing big working distance autocollimation of high-precision laser described in claim 1 portable The array zeroing big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72);
    Characterized by comprising the following steps:
    Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
    Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB;
    Step c, G1=GA-GB obtains wavefront variation caused by air agitation;
    Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lighted compensatory light (81), compensated Air agitation, f5 indicate 1 function;
    Step e, feedback imaging system (6) imaging, if:
    The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f;
    The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region;
    Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position;
    Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 indicate 4 functions.
  3. 3. being realized on the portable array zeroing big working distance autocollimation of high-precision laser described in claim 1 portable The array zeroing big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror deformation wave front detector (73);
    Characterized by comprising the following steps:
    Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
    Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD;
    Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation;
    Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lighted compensatory light (81), compensated Air agitation and reflecting mirror deformation, f5 indicate 1 function;
    Step e, feedback imaging system (6) imaging, if:
    The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f;
    The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region;
    Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position;
    Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 indicate 4 functions.
  4. 4. being realized on the portable array zeroing big working distance autocollimation of high-precision laser described in claim 1 portable The array zeroing big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system (7) includes that Wavefront detecting is divided simultaneously Mirror (71), air agitation wave front detector (72) and reflecting mirror deformation wave front detector (73);
    Characterized by comprising the following steps:
    Step a, surface is chosen perpendicular to the reference substance of optical axis direction;
    Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD;
    Step c, G1=GA-GB obtains wavefront variation caused by air agitation;G2=GC-GD obtains air agitation and reflecting mirror Wavefront variation caused by deformation is common;G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation;
    Step d,
    Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed Dynamic, f5 indicates 1 function;
    Or
    Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and reflecting mirror deformation, f5 indicate 1 function;
    Or
    Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), is lighted compensatory light (81), compensatory reflex mirror shape Become, f5 indicates 1 function;
    Step e, feedback imaging system (6) imaging, if:
    The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f;
    The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region;
    Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position;
    Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface;Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 indicate 4 functions.
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