CN106017362B - A kind of big working distance autocollimation of portable high dynamic precision and method - Google Patents
A kind of big working distance autocollimation of portable high dynamic precision and method Download PDFInfo
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- CN106017362B CN106017362B CN201610639010.9A CN201610639010A CN106017362B CN 106017362 B CN106017362 B CN 106017362B CN 201610639010 A CN201610639010 A CN 201610639010A CN 106017362 B CN106017362 B CN 106017362B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to a kind of big working distance autocollimation of portable high dynamic precision and method；The device is made of light source, collimating mirror, reflecting mirror and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on reflecting mirror is recycled to obtain the angle change on measured object surface by adjusting reflecting mirror；Since the present invention increases reflecting mirror on traditional auto-collimation angle measurement system, therefore it can be avoided the problem of measured object reflected light deviates measuring system and leads to not measurement, and then has and increase auto-collimation working range under identical operating distance, or increase the advantage of operating distance under identical working range；In addition, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., making the present invention also has miniature portable, measurement accuracy high；It simultaneously being capable of monitored over time measured object assembling process；And the technical advantage of rapid survey.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to a kind of portable high dynamic precision
Big working distance autocollimation and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, urgent need carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree
Measurement；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combination, can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From
The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object
The nearly backtracking of the light beam of reflection could be acquired by feedback imaging system 6 and is imaged, and then realize effectively measurement.This road Jin Yuan
The condition of return limits, so that there are following two aspects disadvantages for the system:
The first, the range of 5 mirror surface normal of measurand and Laser Autocollimator optical axis included angle cannot be too big, otherwise can
It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed
Amount；
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis and autocollimator optical axis deviation minute angle will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system, into
And lead to not realize auto-collimation and micro angle measurement.
Two above problem be limited to traditional auto-collimation instrument can only under low-angle, small operating distance and use.
Summary of the invention
For two problems present in traditional autocollimator, the invention discloses a kind of portable big works of high dynamic precision
Make away from autocollimation and method, compared with traditional autocollimator, has and dramatically increase auto-collimation work under identical operating distance
Make range, or dramatically increases the technical advantage of operating distance under identical auto-collimation working range.
The object of the present invention is achieved like this:
A kind of big working distance autocollimation of portable high dynamic precision, including light source, reflective collimating mirror, reflecting mirror,
And imaging system is fed back, angled adjustment measuring device is set on the reflecting mirror；The light beam of light source outgoing, process are reflective
It after collimating mirror is collimated into collimated light beam, then is reflected by reflecting mirror, is incident on the surface of measured object；From the light of measured object surface reflection
Beam after reflecting using reflecting mirror, is acquired by feedback imaging system and is imaged；
The feedback imaging system is one of following two form:
The first, it is arranged between light source and reflective collimating mirror, including the first feedback spectroscope and setting are in reflective standard
Imaging sensor at straight mirror foci；From the light beam of measured object surface reflection, after being reflected using reflecting mirror, successively by reflection
The projection of formula collimating mirror, the first feedback spectroscope reflection acquire imaging by imaging sensor；It is vertical with optical axis on measured object surface
Under the conditions of, imaging sensor institute is at picture in image plane center position；
The second, be arranged between reflective collimating mirror and reflecting mirror, including first feedback spectroscope, first feedback object lens and
The imaging sensor of reflective collimating mirror focal point is set；From the light beam of measured object surface reflection, reflected using reflecting mirror
Afterwards, spectroscope reflection, the first feedback object lens transmission successively are fed back by first, imaging is acquired by imaging sensor；In measured object
Under conditions of surface is vertical with optical axis, imaging sensor institute is at picture in image plane center position；
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror
It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measuring device includes first
Sheet metal, the second sheet metal, the first reflecting mirror, the second reflecting mirror, corresponding first sheet metal position first capacitor sensor, with
And the second capacitance sensor of corresponding second sheet metal position, corresponding first reflector position first laser interferometer and
The second laser interferometer of corresponding second reflector position；First driver, the first sheet metal, the first reflecting mirror and universal
Axis point-blank, the second driver, the second sheet metal, the second reflecting mirror and universal shaft point-blank, and
The line of one driver vertical with the line of universal shaft the second driver and universal shaft.
A kind of portable high dynamic precision realized on the above-mentioned portable big working distance autocollimation of high dynamic precision
Big working distance auto-collimation method, comprising the following steps:
Step a, bright light source is put, imaging sensor imaging obtains a picture and deviates image plane center position Δ x and Δ y；
Step b, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step c, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe change in displacement Δ x1 that first laser interferometer obtains is read simultaneously,
And the change in displacement Δ x2 that second laser interferometer obtains, it is reconverted into 2 He of angle change Δ θ of reflecting mirrorAnd then
To the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=
F3 (Δ x1, Δ x2),Withf1、
F2, f3, f4, f51, f6 indicate 6 functions.
The above-mentioned big working distance autocollimation of portable high dynamic precision, further includes Wavefront detecting system and wavefront compensation system
System；
The Wavefront detecting system is one of following three kinds of situations: situation one including Wavefront detecting spectroscope and sky
Gas disturbance wave front detector, the Wavefront detecting spectroscope are arranged between reflecting mirror and measured object, air agitation Wavefront detecting
Device is arranged on the spectroscopical reflected light path of Wavefront detecting；Before situation two including Wavefront detecting spectroscope and reflecting mirror deformation waves
Detector, the Wavefront detecting spectroscope are arranged between reflecting mirror and measured object, and the setting of reflecting mirror deformation wave front detector exists
In the secondary reflection optical path of reflecting mirror；Situation three including Wavefront detecting spectroscope, air agitation wave front detector and reflecting mirror shape
Become wave front detector, the Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, and air agitation wave front detector is set
It sets on the spectroscopical reflected light path of Wavefront detecting, the secondary reflection optical path of reflecting mirror is arranged in reflecting mirror deformation wave front detector
On；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends
The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incident on Wavefront detecting spectroscope.
A kind of portable high dynamic precision realized on the above-mentioned portable big working distance autocollimation of high dynamic precision
Big working distance auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance, f5 indicate a function；
Step e, imaging sensor is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe change in displacement Δ x1 that first laser interferometer obtains is read simultaneously,
And the change in displacement Δ x2 that second laser interferometer obtains, it is reconverted into 2 He of angle change Δ θ of reflecting mirrorAnd then
To the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=
F3 (Δ x1, Δ x2),With
F1, f2, f3, f4, f51, f6 indicate 6 functions.
A kind of portable high dynamic precision realized on the above-mentioned portable big working distance autocollimation of high dynamic precision
Big working distance auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror deformation Wavefront detecting
Device；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and reflecting mirror deformation, f5 indicate a function；
Step e, imaging sensor is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe change in displacement Δ that first laser interferometer obtains is read simultaneously
The change in displacement Δ x2 that x1 and second laser interferometer obtain is reconverted into 2 He of angle change Δ θ of reflecting mirrorIn turn
Obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δθ2
=f3 (Δ x1, Δ x2),With
F1, f2, f3, f4, f51, f6 indicate 6 functions.
A kind of portable high dynamic precision realized on the above-mentioned portable big working distance autocollimation of high dynamic precision
Big working distance auto-collimation method, it is desirable that Wavefront detecting system includes Wavefront detecting spectroscope, air agitation wave front detector simultaneously
With reflecting mirror deformation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance, f5
Indicate a function；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation, f5 indicate a function；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation,
F5 indicates a function；
Step e, imaging sensor is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe change in displacement Δ x1 that first laser interferometer obtains is read simultaneously,
And the change in displacement Δ x2 that second laser interferometer obtains, it is reconverted into 2 He of angle change Δ θ of reflecting mirrorAnd then
To the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=
F3 (Δ x1, Δ x2),With
F1, f2, f3, f4, f51, f6 indicate 6 functions.
The utility model has the advantages that
Compared with traditional autocollimator, invention increases the angle of reflecting mirror and setting on the mirror to adjust measurement
Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions
In the case where shifting, measuring device is adjusted by angle and adjusts reflecting mirror posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition to this, the present invention also has following a few technical advantages:
The first, reflective collimating mirror, although increasing manufacture difficulty, improving cost of manufacture, this structure are selected
With the irreplaceable technical advantage of following three aspect: collimating mirror reflective first is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of measurement accuracy is more obvious；Third is to pass through plating
Membrane technology, the heat absorption that can be realized reflective collimating mirror are far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem
Raw, this not only enables whole system match high power light source, but also is also beneficial to guarantee the measuring precision；
The second, select imaging sensor as the image device in feedback imaging system, it is big using image area sensor
The characteristics of, it is ensured that under measured object reflected light and the biggish situation in incident light drift angle, reflected light still is able into optical system
Entrance pupil is matched without departing from range of receiving, then with reflecting mirror, reflected light quickly real-time return compensation is realized, so that of the invention
Auto-collimation working range or operating distance are greatly extended；
Third, selection capacitance sensor and laser interferometer are collectively as angular deflection measuring device, so that the present invention is not
Only sensory characteristic can be displaced using the superelevation of capacitance sensor and displacement of the lines is easily converted into angle within the scope of minute angle
The good characteristic of displacement allows the invention to have very high measurement smart under the conditions of low sample frequency (20Hz and following)
Degree, angle highest measurement resolving power can be increased to 0.0005 rad from 0.005 rad of traditional autocollimator, improve a quantity
Grade；And laser interferometer can also allow the invention to complete angle under high sample frequency (can reach 2000Hz)
Measurement has very high measuring speed；If the first reflecting mirror and the second reflecting mirror use prism of corner cube, angle can also be utilized
The optical characteristics that cone prism returns to incident ray deflection 180 degree, is greatly enhanced angle measurement range of the invention, i.e.,
While the present invention has very high measurement speed, also with the technical advantage of wide-angle range；The two combines, moreover it is possible to play pair
There is the measured object progress monitored over time that high-precision assembles demand；
4th, the present invention additionally uses following technology: the first driver, the first sheet metal, the first reflecting mirror and universal
Axis point-blank, the second driver, the second sheet metal, the second reflecting mirror and universal shaft point-blank, and
The line of one driver vertical with the line of universal shaft the second driver and universal shaft；The orthogonal two dimension of this two lines
Setting without decoupling operation, can facilitate calibration, simplification calculated so that the data in different lines direction are non-interference in this way
Journey improves measuring speed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the first structure of the portable big working distance autocollimation specific embodiment one of high dynamic precision of the present invention
Schematic diagram.
Fig. 3 is the structural schematic diagram of angle adjustment measuring device.
Fig. 4 is second of structure of the portable big working distance autocollimation specific embodiment one of high dynamic precision of the present invention
Schematic diagram.
Fig. 5 is the structural representation of the portable big working distance autocollimation specific embodiment two of high dynamic precision of the present invention
Figure.
Fig. 6 is the structural representation of the portable big working distance autocollimation specific embodiment three of high dynamic precision of the present invention
Figure.
Fig. 7 is the structural representation of the portable big working distance autocollimation specific embodiment four of high dynamic precision of the present invention
Figure.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angles adjust measuring device, 411 first drivers, 412
Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitor sensors, 424 second capacitance sensors,
425 first reflecting mirrors, 426 second reflecting mirrors, 427 first laser interferometers, 428 second laser interferometers, 43 universal shafts, 5 quilts
Survey object, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens, 65 imaging sensors, 7 Wavefront detecting systems
System, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflecting mirror deformation wave front detectors, 8 wavefront compensation systems
System, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is the big working distance autocollimation embodiment of portable high dynamic precision.
The big working distance autocollimation of portable high dynamic precision of the present embodiment, structural schematic diagram are as shown in Figure 2.It should be certainly
Collimator apparatus includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feedback imaging system 6, is arranged on the reflecting mirror 3
Angled adjustment measuring device 4；The light beam that light source 1 is emitted, after reflective collimating mirror 22 is collimated into collimated light beam, then by anti-
The reflection of mirror 3 is penetrated, the surface of measured object 5 is incident on；From the light beam of 5 surface reflection of measured object, after being reflected using reflecting mirror 3, by
Feed back the acquisition imaging of imaging system 6；
The feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope 61
With the imaging sensor 65 that reflective 22 focal point of collimating mirror is arranged in；From the light beam of 5 surface reflection of measured object, using reflection
After mirror 3 reflects, successively acquired by the projection of reflective collimating mirror 22, the first feedback spectroscope 61 reflection, by imaging sensor 65
Imaging；Under conditions of 5 surface of measured object is vertical with optical axis, 65 institute of imaging sensor is at picture in image plane center position；
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection measurement dress
It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measuring device
Including the first sheet metal 421, the second sheet metal 422, the first reflecting mirror 425, the second reflecting mirror 426, corresponding first sheet metal 421
The first capacitor sensor 423 of position and the second capacitance sensor 424 of corresponding second sheet metal, 422 position, corresponding first
The first laser interferometer 427 of 425 position of reflecting mirror and the second laser interferometer of corresponding second reflecting mirror, 426 position
428；Point-blank, second drives for first driver 411, the first sheet metal 421, the first reflecting mirror 425 and universal shaft 43
Move device 412, the second sheet metal 422, the second reflecting mirror 426 and universal shaft 43 point-blank, and the first driver
The line of 411 vertical with the line of universal shaft 43 second drivers 412 and universal shaft 43, as shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 is it is also an option that such as flowering structure: setting is being reflected
Between formula collimating mirror 22 and reflecting mirror 3, including the first feedback spectroscope 61, first feeds back object lens 63 and is arranged in reflective collimation
The imaging sensor 65 of 22 focal point of mirror；Successively pass through after being reflected using reflecting mirror 3 from the light beam of 5 surface reflection of measured object
First feedback spectroscope 61 reflection, the first feedback object lens 63 transmission are imaged by the acquisition of imaging sensor 65；On 5 surface of measured object
Under conditions of vertical with optical axis, 65 institute of imaging sensor is at picture in image plane center position；As shown in Figure 4.
Specific embodiment two
The present embodiment is the big working distance autocollimation embodiment of portable high dynamic precision.
The big working distance autocollimation of portable high dynamic precision of the present embodiment, structural schematic diagram are as shown in Figure 5.Having
On the basis of body embodiment one, the big working distance autocollimation of portable high dynamic precision of the present embodiment is additionally provided with wavefront spy
Examining system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
It detects spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is the big working distance autocollimation embodiment of portable high dynamic precision.
The big working distance autocollimation of portable high dynamic precision of the present embodiment, structural schematic diagram are as shown in Figure 6.Having
On the basis of body embodiment one, the big working distance autocollimation of portable high dynamic precision of the present embodiment is additionally provided with wavefront spy
Examining system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；The wave
Preceding detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the big working distance autocollimation embodiment of portable high dynamic precision.
The big working distance autocollimation of portable high dynamic precision of the present embodiment, structural schematic diagram are as shown in Figure 7.Having
On the basis of body embodiment one, the big working distance autocollimation of portable high dynamic precision of the present embodiment is additionally provided with wavefront spy
Examining system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged in reflecting mirror 3
Secondary reflection optical path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, need to illustrate there are also following two points:
The first, the first driver 411 and the second driver 412 in the described angular adjustment apparatus, both can choose driving
The stepper motor or motor servo driver of fast speed, and can choose the driving higher piezoelectric ceramic actuator of precision, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
The second, in all of above autocollimation embodiment, angular deflection measuring device all only includes two pairs of sheet metals
The combination of combination and two pairs of plane mirrors and laser interferometer with capacitance sensor, this design are default reflecting mirrors 3
Translation is not generated during the work time and is made；If it is considered that reflecting mirror 3 generates translation at work and influences measurement essence
Degree, can place third to the combination of sheet metal and capacitance sensor and third to plane reflection at 43 position of universal shaft
The combination of mirror and laser interferometer, to offset the identical translation of three capacitance sensors and the generation of three laser interferometer, really
Protect measurement accuracy.
Specific embodiment five
The present embodiment is realized on the portable big working distance autocollimation of high dynamic precision described in specific embodiment one
The big working distance auto-collimation embodiment of the method for portable high dynamic precision.
The big working distance auto-collimation method of portable high dynamic precision of the present embodiment, comprising the following steps:
Step a, bright light source 1 is put, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step b, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step c, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3Read what first laser interferometer 427 obtained simultaneously
The change in displacement Δ x2 that change in displacement Δ x1 and second laser interferometer 428 obtain, the angle for being reconverted into reflecting mirror 3 become
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4, f51, f6 indicate 6 functions.
Main innovative point of the invention is the angle adjustment measurement dress for increasing reflecting mirror 3 and being arranged on reflecting mirror 3
4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement
Under condition, the whole reflecting mirror posture of measuring device tune 4 is adjusted by angle, makes reflected light backtracking and is connect by feedback imaging system 6
It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement.
However, the introducing of reflecting mirror 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance can not ignore the air agitation between reflecting mirror 3 and measured object 5 again, can also reduce system
Measurement accuracy.As it can be seen that just must take into account 3 face type error of reflecting mirror and reflecting mirror 3 to realize high-acruracy survey and be tested
Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment six, specific embodiment seven and specific
Embodiment eight.
Specific embodiment six
The present embodiment is realized on the portable big working distance autocollimation of high dynamic precision described in specific embodiment two
The big working distance auto-collimation embodiment of the method for portable high dynamic precision.
The big working distance auto-collimation method of portable high dynamic precision of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, compensated
Air agitation, f5 indicate a function；
Step e, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3Read what first laser interferometer 427 obtained simultaneously
The change in displacement Δ x2 that change in displacement Δ x1 and second laser interferometer 428 obtain, the angle for being reconverted into reflecting mirror 3 become
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4, f51, f6 indicate 6 functions.
The method for implementing the present embodiment on the device of specific embodiment two, can utilize air agitation wave front detector 72
Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation
The high-acruracy survey of influence.
Specific embodiment seven
The present embodiment is realized on the portable big working distance autocollimation of high dynamic precision described in specific embodiment three
The big working distance auto-collimation embodiment of the method for portable high dynamic precision.
The big working distance auto-collimation method of portable high dynamic precision of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, reflecting mirror deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, compensated
Air agitation and reflecting mirror deformation, f5 indicate a function；
Step e, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3Read what first laser interferometer 427 obtained simultaneously
The change in displacement Δ x2 that change in displacement Δ x1 and second laser interferometer 428 obtain, the angle for being reconverted into reflecting mirror 3 become
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4, f51, f6 indicate 6 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is realized on the portable big working distance autocollimation of high dynamic precision described in specific embodiment four
The big working distance auto-collimation embodiment of the method for portable high dynamic precision.
The big working distance auto-collimation method of portable high dynamic precision of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, make-up air is disturbed
Dynamic, f5 indicates a function；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, make-up air is disturbed
Dynamic and reflecting mirror deformation, f5 indicate a function；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G), lights compensatory light 81, compensatory reflex mirror shape
Become, f5 indicates a function；
Step e, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3Read what first laser interferometer 427 obtained simultaneously
The change in displacement Δ x2 that change in displacement Δ x1 and second laser interferometer 428 obtain, the angle for being reconverted into reflecting mirror 3 become
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4, f51, f6 indicate 6 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize air agitation wave front detector 72
Air agitation and reflecting mirror deformation are separately separated with reflecting mirror deformation wave front detector 73, and then selectively to air
Disturbance carries out separate compensation, separate compensation is carried out to reflecting mirror deformation or carries out whole benefit to air agitation and reflecting mirror deformation
It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and reflecting mirror deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and reflecting mirror deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while reflecting mirror processing quality is carried out
Effective evaluation.
Claims (4)
1. a kind of big working distance autocollimation of portable high dynamic precision, which is characterized in that including light source (1), reflective standard
Angled adjustment measuring device is arranged on the reflecting mirror (3) in straight mirror (22), reflecting mirror (3) and feedback imaging system (6)
(4)；The light beam of light source (1) outgoing reflects after reflective collimating mirror (22) is collimated into collimated light beam, then by reflecting mirror (3),
It is incident on the surface of measured object (5)；From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, by feeding back
Imaging system (6) acquisition imaging；
The feedback imaging system (6) is one of following two form:
The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) and setting are anti-
Penetrate the imaging sensor (65) of formula collimating mirror (22) focal point；From the light beam of measured object (5) surface reflection, using reflecting mirror
(3) after reflecting, successively by reflective collimating mirror (22) transmission, the first feedback spectroscope (61) reflection, by imaging sensor
(65) acquisition imaging；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute is at picture in image planes
Heart position；
The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first are instead
Object lens (63) and setting are presented in the imaging sensor (65) of reflective collimating mirror (22) focal point；From measured object (5) surface reflection
Light beam, using reflecting mirror (3) reflection after, successively by first feedback spectroscope (61) reflection, first feedback object lens (63)
Transmission acquires imaging by imaging sensor (65)；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor
(65) institute is at picture in image plane center position；
Angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection measurement dress
It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed
Measure device include the first sheet metal (421), it is the second sheet metal (422), the first reflecting mirror (425), the second reflecting mirror (426), right
Answer the first sheet metal (421) position first capacitor sensor (423) and corresponding second sheet metal (422) position second
Capacitance sensor (424), the first laser interferometer (427) of corresponding first reflecting mirror (425) position and corresponding second reflection
The second laser interferometer (428) of mirror (426) position；First driver (411), the first sheet metal (421), the first reflecting mirror
(425) and universal shaft (43) point-blank, the second driver (412), the second sheet metal (422), the second reflecting mirror
(426) and universal shaft (43) point-blank, and the first driver (411) vertical with the line of universal shaft (43)
The line of two drivers (412) and universal shaft (43)；
It further include Wavefront detecting system (7) and wavefront compensation system (8)；The Wavefront detecting system (7) is following three kinds of situations
One of: situation one including Wavefront detecting spectroscope (71) and air agitation wave front detector (72)；Situation two including wave
Preceding detection spectroscope (71) and reflecting mirror deformation wave front detector (73)；Situation three including Wavefront detecting spectroscope (71), air
Disturb wave front detector (72) and reflecting mirror deformation wave front detector (73)；Wavefront detecting spectroscope (71) setting is being reflected
Between mirror (3) and measured object (5), the reflected light path in Wavefront detecting spectroscope (71) is arranged in air agitation wave front detector (72)
On, reflecting mirror deformation wave front detector (73) is arranged in the secondary reflection optical path of reflecting mirror (3)；
The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune
Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type
LCD space light modulator (83) modulation, is incident on Wavefront detecting spectroscope (71).
2. that realizes on a kind of portable big working distance autocollimation of high dynamic precision described in claim 1 is portable high dynamic
The big working distance auto-collimation method of state precision, it is desirable that Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air are disturbed
Dynamic wave front detector (72)；
Characterized by comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lighted compensatory light (81), compensated
Air agitation, f5 indicate 1 function；
Step e, imaging sensor (65) is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, reflecting mirror (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)First laser interferometer (427) is read simultaneously to obtain
Change in displacement Δ x1 and the obtained change in displacement Δ x2 of second laser interferometer (428), be reconverted into the angle of reflecting mirror (3)
Spend 2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ
C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4, f51 and f6 indicate 6 functions.
3. that realizes on a kind of portable big working distance autocollimation of high dynamic precision described in claim 1 is portable high dynamic
The big working distance auto-collimation method of state precision, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror
Deformation wave front detector (73)；
Characterized by comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lighted compensatory light (81), compensated
Air agitation and reflecting mirror deformation, f5 indicate 1 function；
Step e, imaging sensor (65) is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, reflecting mirror (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitance variations of the second capacitance sensor (424) are read
Δ C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)The position that first laser interferometer (427) obtains is read simultaneously
The change in displacement Δ x2 that changes delta x1 and second laser interferometer (428) obtain is moved, the angle for being reconverted into reflecting mirror (3) becomes
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4, f51 and f6 indicate 6 functions.
4. that realizes on a kind of portable big working distance autocollimation of high dynamic precision described in claim 1 is portable high dynamic
The big working distance auto-collimation method of state precision, it is desirable that Wavefront detecting system (7) is disturbed including Wavefront detecting spectroscope (71), air simultaneously
Dynamic wave front detector (72) and reflecting mirror deformation wave front detector (73)；
Characterized by comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains
Two groups of data of GC and GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and reflecting mirror
Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed
Dynamic, f5 indicates 1 function；
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed
Dynamic and reflecting mirror deformation, f5 indicate 1 function；
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), is lighted compensatory light (81), compensatory reflex mirror shape
Become, f5 indicates 1 function；
Step e, imaging sensor (65) is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, reflecting mirror (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 and the second capacitance sensor (424) of first capacitor sensor (423) are read
Capacitance change, Δ C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)First laser interferometer is read simultaneously
(427) the change in displacement Δ x2 that the change in displacement Δ x1 and second laser interferometer (428) obtained is obtained, is reconverted into
2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein,
Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4, f51 and f6 indicate 6 letters
Number.
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| JPS60205522A (en) * | 1984-03-30 | 1985-10-17 | Nippon Kogaku Kk <Nikon> | Collimator objective lens |
| US9068952B2 (en) * | 2009-09-02 | 2015-06-30 | Kla-Tencor Corporation | Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system |
| CN202471018U (en) * | 2011-12-09 | 2012-10-03 | 中国科学院西安光学精密机械研究所 | Large-caliber plane mirror surface shape detecting device |
| CN204535672U (en) * | 2015-01-30 | 2015-08-05 | 成都创为联动科技有限公司 | Autocollimator |
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