CN106225729B

CN106225729B - The big working distance autocollimation of portable combined zeroing high dynamic precision and method

Info

Publication number: CN106225729B
Application number: CN201610638879.1A
Authority: CN
Inventors: 谭欣然; 王超; 谭久彬
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2016-08-07
Filing date: 2016-08-07
Publication date: 2018-11-06
Anticipated expiration: 2036-08-07
Also published as: CN106225729A

Abstract

The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to the big working distance autocollimation of portable combined zeroing high dynamic precision and method；The device is made of light source, collimating mirror, speculum and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on speculum is recycled to obtain the angle change on measured object surface by adjusting speculum；Since the present invention increases speculum on traditional auto-collimation angle measurement system, therefore it can avoid the problem that measured object reflected light deviates measuring system and leads to not measure, and then have and increase auto-collimation working range under identical operating distance, or increase the advantage of operating distance under identical working range；In addition, the specific design of collimating mirror, feedback imaging system, speculum etc., makes the present invention also have miniature portable, high certainty of measurement；It simultaneously being capable of monitored over time measured object assembling process；And the technical advantage quickly measured.

Description

The big working distance autocollimation of portable combined zeroing high dynamic precision and method

Technical field

The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to portable combined zeroing high dynamic The big working distance autocollimation of precision and method.

Background technology

It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly In domain, active demand carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field The development of technology and instrument and equipment.

In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out arbitrary line angle degree It measures；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measures；Maximum functional distance From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.

In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional Grid combine, and can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.

In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark measures the space line of linear motion benchmark Precision and the depth of parallelism and verticality for moving benchmark two-by-two.

Laser auto-collimation technology has many advantages, such as non-contact, high certainty of measurement, easy to use, has in above-mentioned field wide General application.

Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system 6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object The nearly backtracking of light beam of reflection could be acquired by feedback imaging system 6 and be imaged, and then realize and effectively measure.This road Jin Yuan The condition of return limits so that there are following two aspects disadvantages for the system：

The first, 5 mirror surface normal of measurand cannot be too big with the range of Laser Autocollimator optical axis included angle, otherwise can It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed Amount；

The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light Axis will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system with autocollimator optical axis deviation minute angle, into And lead to not realize auto-collimation and micro- angle measurement.

Two above problem makes traditional auto-collimation instrument that can only be limited under low-angle, small operating distance and uses.

Invention content

For two problems present in traditional autocollimator, the invention discloses a kind of portable combined zeroing high dynamics The big working distance autocollimation of precision and method have and are dramatically increased under identical operating distance compared with traditional autocollimator Auto-collimation working range, or dramatically increase under identical auto-collimation working range the technical advantage of operating distance.

The object of the present invention is achieved like this：

The portable combined zeroing big working distance autocollimation of high dynamic precision, including light source, reflective collimating mirror, reflection Mirror and feedback imaging system, are arranged angled adjustment measuring device on the speculum；The light beam of light source outgoing, by anti- It after the formula collimating mirror of penetrating is collimated into collimated light beam, then is reflected by speculum, is incident on the surface of measured object；From measured object surface reflection Light beam, after being reflected using speculum, by feedback imaging system acquire be imaged；

The feedback imaging system is one kind in following two forms：

The first, feedback imaging system includes imaging sensor imaging system and 4 quadrant detector imaging system；

Described image sensor imaging system includes the first feedback spectroscope and is arranged in reflective collimating mirror focal point Imaging sensor；From the light beam of measured object surface reflection, after being reflected using speculum, successively thrown by reflective collimating mirror It penetrates, the first feedback spectroscope reflects, acquires imaging by imaging sensor；Under conditions of measured object surface is vertical with optical axis, figure Picture sensor institute is at picture in image plane center position；

Or

Described image sensor imaging system includes the first feedback spectroscope, the first feedback object lens and setting in the first feedback Imaging sensor at object focal point；From the light beam of measured object surface reflection, after being reflected using speculum, successively pass through first It feeds back spectroscope reflection, the first feedback object lens transmission, be imaged by imaging sensor acquisition；It is vertical with optical axis on measured object surface Under the conditions of, imaging sensor institute is at picture in image plane center position；

The 4 quadrant detector imaging system includes the second feedback spectroscope and is arranged in reflective collimating mirror focal point 4 quadrant detector；From the light beam of measured object surface reflection, after being reflected using speculum, successively pass through reflective collimating mirror Projection, the second feedback spectroscope reflection acquire imaging by 4 quadrant detector；In the measured object surface condition vertical with optical axis Under, 4 quadrant detector institute is at picture in image plane center position；

Or

The 4 quadrant detector imaging system includes that the second feedback spectroscope, the second feedback object lens and setting are anti-second Present the 4 quadrant detector at object focal point；From the light beam of measured object surface reflection, after being reflected using speculum, successively pass through Second feedback spectroscope reflection, the second feedback object lens transmission are imaged by 4 quadrant detector acquisition；In measured object surface and optical axis Under conditions of vertical, 4 quadrant detector institute is at picture in image plane center position；

The second, feedback imaging system includes the first feedback spectroscope and the imaging sensor and four-quadrant that are carried by guide rail Detector is limited, there are two stall positions altogether for the guide rail, and it is reflective that a stall position makes imaging sensor image plane center correspond to The focal position of collimating mirror, another stall position make 4 quadrant detector image plane center correspond to the focus position of reflective collimating mirror It sets；

Or

Feedback imaging system includes the first feedback spectroscope, the first feedback object lens and the image sensing carried by guide rail Device and 4 quadrant detector, for the guide rail altogether there are two stall position, a stall position makes imaging sensor image plane center position In the focal position of the first feedback object lens, another stall position makes 4 quadrant detector image plane center be located at the first feedback object lens Focal position；

The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measuring device includes first Sheet metal, the second sheet metal, the first speculum, the second speculum, corresponding first sheet metal position the first capacitance sensor, with And the second capacitance sensor of corresponding second sheet metal position, corresponding first reflector position first laser interferometer and The second laser interferometer of corresponding second reflector position；First driver, the first sheet metal, the first speculum and universal Axis point-blank, the second driver, the second sheet metal, the second speculum and universal shaft point-blank, and The line of one driver vertical with the line of universal shaft the second driver and universal shaft.

The portable combined tune realized on the above-mentioned portable combined zeroing big working distance autocollimation of high dynamic precision The big working distance auto-collimation method of zero high dynamic precision, includes the following steps：

Step a, bright light source is put, imaging sensor imaging deviates image plane center direction according to a picture, utilizes the first driver Mirror angle is adjusted with the second driver, a picture is made to return to imaging sensor image plane center region；

Step b, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture Face center；

Step c, the capacitance change, Δ C1 of the first capacitance sensor and the capacitance change, Δ of the second capacitance sensor are read C2 is reconverted into 1 Hes of angle change Δ θ of speculumRead the change in displacement Δ that first laser interferometer obtains simultaneously The change in displacement Δ x2 that x1 and second laser interferometer obtain is reconverted into 2 Hes of angle change Δ θ of speculumInto And obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2), Δ θ 2=f3 (Δ x1, Δ x2),Withf1、 F2, f3, f4 indicate 4 functions.

The above-mentioned portable combined zeroing big working distance autocollimation of high dynamic precision, further includes Wavefront detecting system and wave Precompensation system；

The Wavefront detecting system is one kind in following three kinds of situations：Situation one including Wavefront detecting spectroscope and sky Gas disturbance wave front detector, the Wavefront detecting spectroscope are arranged between speculum and measured object, air agitation Wavefront detecting Device is arranged on the spectroscopical reflected light path of Wavefront detecting；Before situation two including Wavefront detecting spectroscope and speculum deformation waves Detector, the Wavefront detecting spectroscope are arranged between speculum and measured object, and the setting of speculum deformation wave front detector exists In the secondary reflection light path of speculum；Situation three including Wavefront detecting spectroscope, air agitation wave front detector and speculum shape Become wave front detector, the Wavefront detecting spectroscope is arranged between speculum and measured object, and air agitation wave front detector is set It sets on the spectroscopical reflected light path of Wavefront detecting, the secondary reflection light path in speculum is arranged in speculum deformation wave front detector On；

The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune System, is incident on Wavefront detecting spectroscope.

The portable combined tune realized on the above-mentioned portable combined zeroing big working distance autocollimation of high dynamic precision The big working distance auto-collimation method of zero high dynamic precision, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation Wave front detector；

Include the following steps：

Step a, reference substance of the surface perpendicular to optical axis direction is chosen；

Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB obtains wavefront variation caused by air agitation；

Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air Disturbance, f5 indicate a function；

Step e, imaging sensor is imaged, and deviates image plane center direction according to a picture, the first driver and second is utilized to drive Dynamic device adjusts mirror angle, and a picture is made to return to imaging sensor image plane center region；

Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture Face center；

Step g, the capacitance change, Δ C1 of the first capacitance sensor and the capacitance change, Δ of the second capacitance sensor are read C2 is reconverted into 1 Hes of angle change Δ θ of speculumRead the change in displacement Δ that first laser interferometer obtains simultaneously The change in displacement Δ x2 that x1 and second laser interferometer obtain is reconverted into 2 Hes of angle change Δ θ of speculumInto And obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2), Δ θ 2=f3 (Δ x1, Δ x2),With F1, f2, f3, f4 indicate 4 functions.

The portable combined tune realized on the above-mentioned portable combined zeroing big working distance autocollimation of high dynamic precision The big working distance auto-collimation method of zero high dynamic precision, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and speculum shape Become wave front detector；

Include the following steps：

Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Speculum deformation wave front detector respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；

Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air Disturbance and speculum deformation, f5 indicate a function；

The portable combined tune realized on the above-mentioned portable combined zeroing big working distance autocollimation of high dynamic precision The big working distance auto-collimation method of zero high dynamic precision, it is desirable that Wavefront detecting system is disturbed including Wavefront detecting spectroscope, air simultaneously Dynamic wave front detector and speculum deformation wave front detector；

Include the following steps：

Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector respectively obtains GC and GD two Group data；

Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti- Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by speculum deformation；

Step d,

Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance, f5 Indicate a function；

Or

Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and Speculum deformation, f5 indicate a function；

Or

Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation, F5 indicates a function；

Advantageous effect：

Compared with traditional autocollimator, adjusts and measure invention increases the angle of speculum and setting on the mirror Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions In the case of shifting, measuring device is adjusted by angle and adjusts speculum posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measure, so that this Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range Add the technical advantage of operating distance.

In addition to this, the present invention also has following several technical advantages：

The first, reflective collimating mirror, although increasing manufacture difficulty, improving cost of manufacture, this structure are selected With the irreplaceable technical advantage of following three aspect：Collimating mirror reflective first is conducive to instrument miniaturization, makes portable Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of measurement accuracy is more apparent；Third is to pass through plating Membrane technology can realize that the heat absorption of reflective collimating mirror is far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem Raw, this not only enables whole system match high power light source, but also is also beneficial to ensure the measuring precision；

The second, select imaging sensor and 4 quadrant detector collectively as the image device in feedback imaging system, knot The advantage that image area sensor is big and 4 quadrant detector position resolution is high is closed；Wherein, imaging sensor can be true It protects in the case where measured object reflected light and incident light drift angle are larger, reflected light still is able to the entrance pupil into optical system, will not Beyond range of receiving；On this basis, it recycles speculum to realize reflected light quickly real-time return compensation, reflected light is adjusted to 4 quadrant detector position, and higher angle can be obtained according to the high position resolution advantage of 4 quadrant detector and surveyed Accuracy of measurement；Therefore, imaging sensor and 4 quadrant detector are combined, not only so that auto-collimation working range or work of the present invention Greatly extended as distance, and is conducive to improve angle-measurement accuracy；

Third, selection capacitance sensor and laser interferometer are collectively as angular deflection measuring device so that the present invention is not The superelevation displacement sensory characteristic of capacitance sensor can only be utilized and displacement of the lines is easily converted into angle within the scope of minute angle The good characteristic of displacement so that the present invention can have very high measurements smart under the conditions of low sample frequency (20Hz and following) Degree, angle highest measurement resolving power can be increased to 0.0005 rad from 0.005 rad of traditional autocollimator, improve a quantity Grade；And laser interferometer can also allow the invention to complete angle under high sample frequency (can reach 2000Hz) It measures, that is, there is very high measuring speed；If the first speculum and the second speculum use prism of corner cube, angle can also be utilized The optical characteristics that cone prism returns to incident ray deflection 180 degree, makes the angle measurement range of the present invention be greatly enhanced, i.e., While the present invention has very high measurement speed, also there is the technical advantage of wide-angle range；The two is combined, moreover it is possible to be played pair There is the measured object progress monitored over time that high-precision assembles demand；

4th, the present invention additionally uses following technology：First driver, the first sheet metal, the first speculum and universal Axis point-blank, the second driver, the second sheet metal, the second speculum and universal shaft point-blank, and The line of one driver vertical with the line of universal shaft the second driver and universal shaft；The orthogonal two dimension of this two lines Setting so that the data in different line directions are non-interference, without decoupling operation, calibration, simplification can be facilitated to calculate in this way Journey improves measuring speed.

Description of the drawings

Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.

Fig. 2 is the knot of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing high dynamic precision one Structure schematic diagram.

Fig. 3 is the structural schematic diagram of angle adjustment measuring device.

Fig. 4 is second of structural schematic diagram of imaging sensor imaging system.

Fig. 5 is second of structural schematic diagram of 4 quadrant detector imaging system.

Fig. 6 is the of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing high dynamic precision two A kind of structural schematic diagram.

Fig. 7 is the of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing high dynamic precision two Two kinds of structural schematic diagrams.

Fig. 8 is the knot of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing high dynamic precision three Structure schematic diagram.

Fig. 9 is the knot of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing high dynamic precision four Structure schematic diagram.

Figure 10 is the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing high dynamic precision five Structural schematic diagram.

In figure：1 light source, 22 reflective collimating mirrors, 3 speculums, 4 angles adjustment measuring device, 411 first drivers, 412 Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitance sensors, 424 second capacitance sensors, 425 first speculums, 426 second speculums, 427 first laser interferometers, 428 second laser interferometers, 43 universal shafts, 5 quilts Survey object, 6 feedback imaging systems, 61 first feedback spectroscopes, 62 second feedback spectroscopes, 63 first feedback object lens, 64 second are instead Present object lens, 65 imaging sensors, 66 4 quadrant detectors, 68 guide rails, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 skies Gas disturbance wave front detector, 73 speculum deformation wave front detectors, 8 wavefront compensation systems, 81 compensatory lights, 82 compensation collimations Mirror, 83 transmission liquid crystal spatial light modulators.

Specific embodiment

The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.

Specific embodiment one

The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high dynamic precision.

The portable combined zeroing big working distance autocollimation of high dynamic precision of the present embodiment, structural schematic diagram such as Fig. 2 It is shown.The autocollimation includes light source 1, reflective collimating mirror 22, speculum 3 and feedback imaging system 6, the reflection Angled adjustment measuring device 4 is set on mirror 3；The light beam that light source 1 is emitted, collimated light beam is collimated by reflective collimating mirror 22 Afterwards, then by speculum 3 it reflects, is incident on the surface of measured object 5；From the light beam of 5 surface reflection of measured object, using speculum 3 After reflection, is acquired and be imaged by feedback imaging system 6；

The feedback imaging system 6 includes imaging sensor imaging system and 4 quadrant detector imaging system；

Described image sensor imaging system includes the first feedback spectroscope 61 and is arranged in 21 focus of transmission-type collimating mirror The imaging sensor 65 at place；From the light beam of 5 surface reflection of measured object, after being reflected using speculum 3, successively pass through transmission-type quasi The straight projection of mirror 21, the first feedback spectroscope 61 reflection are imaged by the acquisition of imaging sensor 65；It hangs down on 5 surface of measured object and optical axis Under conditions of straight, 65 institute of imaging sensor is at picture in image plane center position；

The 4 quadrant detector imaging device includes that the second feedback spectroscope 62, second feeds back object lens 64 and setting the The 4 quadrant detector 66 of two feedback 64 focal points of object lens；From the light beam of 5 surface reflection of measured object, reflected using speculum 3 Afterwards, successively pass through second feed back the reflection of spectroscope 62, the second feedback object lens 64 transmission, acquire imaging by 4 quadrant detector 66； Under conditions of 5 surface of measured object is vertical with optical axis, 66 institute of 4 quadrant detector is at picture in image plane center position；

The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on speculum 3, angular deflection measurement dress It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measuring device Including the first sheet metal 421, the second sheet metal 422, the first speculum 425, the second speculum 426, corresponding first sheet metal 421 Second capacitance sensor 424 of 422 position of the first capacitance sensor 423 of position and corresponding second sheet metal, corresponding first The second laser interferometer of 426 position of the first laser interferometer 427 of 425 position of speculum and corresponding second speculum 428；Point-blank, second drives for first driver 411, the first sheet metal 421, the first speculum 425 and universal shaft 43 Move device 412, the second sheet metal 422, the second speculum 426 and universal shaft 43 point-blank, and the first driver The line of 411 second drivers vertical with the line of universal shaft 43 412 and universal shaft 43, as shown in Figure 3.

It should be noted that：

The first, in the present embodiment, imaging sensor imaging system is also an option that such as lower structure：Including the first feedback point Light microscopic 61, first feeds back object lens 63 and the imaging sensor 65 in the first feedback 63 focal point of object lens is arranged；From 5 surface of measured object The light beam of reflection, it is successively saturating by the first feedback spectroscope 61 reflection, the first feedback object lens 63 after being reflected using speculum 3 It penetrates, imaging is acquired by imaging sensor 65；Under conditions of 5 surface of measured object is vertical with optical axis, 65 institute of imaging sensor is at point As in image plane center position；As shown in figure 4, in the figure, 4 quadrant detector imaging system is omitted.

The second, in the present embodiment, 4 quadrant detector imaging system is also an option that such as lower structure：Including the second feedback Spectroscope 62 and the 4 quadrant detector 66 in 21 focal point of transmission-type collimating mirror is set；From the light beam of 5 surface reflection of measured object, After being reflected using speculum 3, successively pass through the projection of transmission-type collimating mirror 21, the second feedback spectroscope 62 reflection, by four-quadrant The acquisition imaging of detector 66；Under conditions of 5 surface of measured object is vertical with optical axis, 66 institute of 4 quadrant detector is at picture in image planes Center；As shown in figure 5, in the figure, imaging sensor imaging system is omitted.

Specific embodiment two

The portable combined zeroing big working distance autocollimation of high dynamic precision of the present embodiment, with specific embodiment one Difference is to feed back the structure of imaging system 6；The structure that the present embodiment feeds back imaging system 6 is one in following two forms Kind：

The first, feedback imaging system 6 includes the first imaging sensor 65 for feeding back spectroscope 61 and being carried by guide rail 68 With 4 quadrant detector 66, as shown in Figure 6；For the guide rail 68 altogether there are two stall position, a stall position makes image sensing 65 image plane center of device corresponds to the focal position of reflective collimating mirror 22, another stall position makes in 66 image planes of 4 quadrant detector The heart corresponds to the focal position of reflective collimating mirror 22；

The second, feedback imaging system 6 includes that the first feedback spectroscope 61, first feeds back object lens 63 and held by guide rail 68 The imaging sensor 65 and 4 quadrant detector 66 of load, as shown in Figure 7；There are two stall positions altogether for the guide rail 68, and one is stopped Position makes 65 image plane center of imaging sensor be located at the focal positions of the first feedback object lens 63, another stall position makes four-quadrant Limit the focal position that 66 image plane center of detector is located at the first feedback object lens 63.

Specific embodiment three

The portable combined zeroing big working distance autocollimation of high dynamic precision of the present embodiment, structural schematic diagram such as Fig. 8 It is shown.On the basis of specific embodiment one, the portable combined zeroing big working distance auto-collimation of high dynamic precision of the present embodiment Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；

The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront It detects spectroscope 71 to be arranged between speculum 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting On the reflected light path of mirror 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；

The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.

Specific embodiment four

The portable combined zeroing big working distance autocollimation of high dynamic precision of the present embodiment, structural schematic diagram such as Fig. 9 It is shown.On the basis of specific embodiment one, the portable combined zeroing big working distance auto-collimation of high dynamic precision of the present embodiment Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；

The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and speculum deformation wave front detector 73；The wave Preceding detection spectroscope 71 is arranged between speculum 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point On the reflected light path of light microscopic 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；

Specific embodiment five

The portable combined zeroing big working distance autocollimation of high dynamic precision of the present embodiment, structural schematic diagram such as Figure 10 It is shown.On the basis of specific embodiment one, the portable combined zeroing big working distance auto-collimation of high dynamic precision of the present embodiment Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；

The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and speculum shape Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wavefront is visited It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, speculum deformation wave front detector 73 is arranged in speculum 3 Secondary reflection light path on；

For the above autocollimation embodiment, also following three points need to illustrate：

The first, the first driver 411 in the described angular adjustment apparatus and the second driver 412 can both select to drive The stepper motor or motor servo driver of speed, and the driving higher piezoelectric ceramic actuator of precision can be selected, also Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis Actual needs is reasonably selected.

Although second, specific embodiment three, specific embodiment four and specific embodiment five are all in specific embodiment Wavefront detecting system 7 and wavefront compensation system 8 are set on the basis of one, but wavefront is set on the basis of specific embodiment two Detection system 7 and wavefront compensation system 8, also set up.Those skilled in the art can in conjunction with specific embodiments a system with Easily wavefront is arranged on the basis of specific embodiment two in these three by the difference between system described in specific embodiment two The system building of detection system 7 and wavefront compensation system 8 comes out, therefore is no longer described in detail here.

Third, in all of above autocollimation embodiment, angular deflection measuring device all only includes two pairs of sheet metals The combination of combination and two pairs of plane mirrors and laser interferometer with capacitance sensor, this design are acquiescence speculums 3 Translation is not generated during the work time and is made；If it is considered that speculum 3 generates translation and influences to measure essence at work Degree, can place third to the combination of sheet metal and capacitance sensor and third to plane reflection at 43 position of universal shaft The combination of mirror and laser interferometer, to offset the identical translation of three capacitance sensors and the generation of three laser interferometer, really Protect measurement accuracy.

Specific embodiment six

The present embodiment is the big working distance auto-collimation dress of the portable combined zeroing high dynamic precision described in specific embodiment one Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high dynamic precision of realization.

The portable combined zeroing big working distance auto-collimation method of high dynamic precision of the present embodiment, includes the following steps：

Step a, bright light source 1 is put, imaging sensor 65 is imaged, and is deviateed image plane center direction according to a picture, is utilized first to drive 411 and second driver 412 of dynamic device adjusts 3 angle of speculum, and a picture is made to return to 65 image plane center region of imaging sensor；

Step b, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a The heart position Δ x and Δ y adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant Limit 66 image plane center position of detector；

Step c, the capacitance change, Δ C1 of the first capacitance sensor 423 and the capacitance of the second capacitance sensor 424 are read Changes delta C2 is reconverted into 1 Hes of angle change Δ θ of speculum 3Read the position that first laser interferometer 427 obtains simultaneously The change in displacement Δ x2 that changes delta x1 and second laser interferometer 428 obtain is moved, the angle change of speculum 3 is reconverted into 2 Hes of Δ θAnd then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 indicate 4 functions.

It should be noted that if the present embodiment is the method realized in two described device of specific embodiment, After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position, So that 66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then make 4 quadrant detector 66 carry out at Picture.

The main innovative point of the present invention is that increasing speculum 3 and the angle being arranged on speculum 3 adjustment measures dress 4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement Under condition, measuring device 4 is adjusted by angle and adjusts speculum posture, makes reflected light backtracking and is connect by feedback imaging system 6 It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measure.

However, the introducing of speculum 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together When, the increase of operating distance makes the air agitation between speculum 3 and measured object 5 can not ignore again, can also reduce system Measurement accuracy.As it can be seen that realize high-acruracy survey, it just must take into account 3 face type error of speculum and speculum 3 and be tested Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment seven, specific embodiment eight and specific

Embodiment nine.

Specific embodiment seven

The present embodiment is the big working distance auto-collimation dress of the portable combined zeroing high dynamic precision described in specific embodiment three Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high dynamic precision of realization.

Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；

Step c, G1=GA-GB obtains wavefront variation caused by air agitation；

Step d, according to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated Air agitation, f5 indicate a function；

Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the Two drivers 412 adjust 3 angle of speculum, and a picture is made to return to 65 image plane center region of imaging sensor；

Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e The heart position Δ x and Δ y adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant Limit 66 image plane center position of detector；

Step g, the capacitance change, Δ C1 of the first capacitance sensor 423 and the capacitance of the second capacitance sensor 424 are read Changes delta C2 is reconverted into 1 Hes of angle change Δ θ of speculum 3Read what first laser interferometer 427 obtained simultaneously The change in displacement Δ x2 that change in displacement Δ x1 and second laser interferometer 428 obtain, the angle for being reconverted into speculum 3 become Change 2 Hes of Δ θAnd then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 indicate 4 functions.

The method for implementing the present embodiment on the device of specific embodiment three, can utilize air agitation wave front detector 72 Air agitation is detached, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation The high-acruracy survey of influence.

Specific embodiment eight

The present embodiment is the big working distance auto-collimation dress of the portable combined zeroing high dynamic precision described in specific embodiment four Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high dynamic precision of realization.

Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, speculum deformation wave front detector 73 respectively obtain two groups of data of GC and GD；

Step d, according to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated Air agitation and speculum deformation, f5 indicate a function；

Step g, the capacitance change, Δ C1 of the first capacitance sensor 423 and the capacitance of the second capacitance sensor 424 are read Changes delta C2 is reconverted into 1 Hes of angle change Δ θ of speculum 3Read the position that first laser interferometer 427 obtains simultaneously The change in displacement Δ x2 that changes delta x1 and second laser interferometer 428 obtain is moved, the angle change of speculum 3 is reconverted into 2 Hes of Δ θAnd then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 indicate 4 functions.

The method for implementing the present embodiment on the device of specific embodiment four, can utilize speculum deformation wave front detector Air agitation and speculum deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and speculum Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and speculum influence of crust deformation.

Specific embodiment nine

The present embodiment is the big working distance auto-collimation dress of the portable combined zeroing high dynamic precision described in specific embodiment five Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high dynamic precision of realization.

Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and speculum deformation wave front detector 73 respectively obtains GC With two groups of data of GD；

Step d,

According to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed Dynamic, f5 indicates a function；

Or

According to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed Dynamic and speculum deformation, f5 indicate a function；

Or

According to 83 parameter of f5 (G) adjustment transmission liquid crystals spatial light modulator, compensatory light 81, compensatory reflex mirror shape are lighted Become, f5 indicates a function；

The method for implementing the present embodiment on the device of specific embodiment five, can utilize air agitation wave front detector 72 Air agitation and speculum deformation are separately separated with speculum deformation wave front detector 73, and then selectively to air Disturbance carries out separate compensation, separate compensation is carried out to speculum deformation or carries out whole benefit to air agitation and speculum deformation It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and speculum influence of crust deformation Amount.

The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and speculum deformation Influence size of the part to result is individually assessed, and can not only be found out in air agitation and speculum deformation, who is to influence The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while speculum processing quality is carried out Effective evaluation.

It should also be noted that, if specific embodiment three, specific embodiment four and specific embodiment five are based on tool Body embodiment two and the device built, then in specific embodiment seven, specific embodiment eight and specific embodiment nine, After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position, So that 66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then make 4 quadrant detector 66 carry out at Picture.

Claims

The big working distance autocollimation of high dynamic precision 1. portable combined returns to zero, which is characterized in that including light source (1), reflection Angled adjustment measurement is arranged on the speculum (3) for formula collimating mirror (22), speculum (3) and feedback imaging system (6) Device (4)；The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then by speculum (3) Reflection, is incident on the surface of measured object (5)；From the light beam of measured object (5) surface reflection, after being reflected using speculum (3), by It feeds back imaging system (6) and acquires imaging；

The feedback imaging system (6) is one kind in following two forms：

The first, feedback imaging system (6) includes imaging sensor imaging system and 4 quadrant detector imaging system；

Described image sensor imaging system includes the first feedback spectroscope (61) and is arranged in reflective collimating mirror (22) focus The imaging sensor (65) at place；From the light beam of measured object (5) surface reflection, after being reflected using speculum (3), successively pass through anti- Penetrate formula collimating mirror (22) projection, the first feedback spectroscope (61) reflects, acquires imaging by imaging sensor (65)；In measured object (5) under conditions of surface is vertical with optical axis, imaging sensor (65) institute is at picture in image plane center position；

Or

Described image sensor imaging system includes the first feedback spectroscope (61), the first feedback object lens (63) and is arranged first Feed back the imaging sensor (65) of object lens (63) focal point；From the light beam of measured object (5) surface reflection, using speculum (3) After reflection, successively pass through the first feedback spectroscope (61) reflection, the first feedback object lens (63) are transmitted, adopted by imaging sensor (65) Collection imaging；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute is at picture in image plane center position It sets；

The 4 quadrant detector imaging system includes the second feedback spectroscope (62) and setting in reflective collimating mirror (22) coke 4 quadrant detector (66) at point；It is successively passed through after being reflected using speculum (3) from the light beam of measured object (5) surface reflection Cross reflective collimating mirror (22) projection, the second feedback spectroscope (62) reflects, acquires imaging by 4 quadrant detector (66)；In quilt Under conditions of survey object (5) surface is vertical with optical axis, 4 quadrant detector (66) institute is at picture in image plane center position；

Or

The 4 quadrant detector imaging system includes the second feedback spectroscope (62), the second feedback object lens (64) and is arranged the The 4 quadrant detector (66) of two feedback object lens (64) focal points；From the light beam of measured object (5) surface reflection, using speculum (3) after reflecting, successively pass through the second feedback spectroscope (62) reflection, the second feedback object lens (64) transmit, by 4 quadrant detector (66) acquisition imaging；Under conditions of measured object (5) surface is vertical with optical axis, 4 quadrant detector (66) institute is at picture in image planes Center；

The second, feedback imaging system (6) includes the first feedback spectroscope (61) and the imaging sensor by guide rail (68) carrying (65) it is total to there are two stall position with 4 quadrant detector (66), the guide rail (68), a stall position makes imaging sensor (65) image plane center corresponds to the focal position of reflective collimating mirror (22), another stall position make 4 quadrant detector (66) as Face center corresponds to the focal position of reflective collimating mirror (22)；

Or

Imaging system (6) is fed back to include the first feedback spectroscope (61), the first feedback object lens (63) and carried by guide rail (68) Imaging sensor (65) and 4 quadrant detector (66), the guide rail (68) is altogether there are two stall position, a stall position Imaging sensor (65) image plane center is set to be located at the focal position of the first feedback object lens (63), another stall position makes four-quadrant Detector (66) image plane center is located at the focal position of the first feedback object lens (63)；

The angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on speculum (3), angular deflection measurement dress It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Measure device include the first sheet metal (421), it is the second sheet metal (422), the first speculum (425), the second speculum (426), right Answer the first sheet metal (421) position the first capacitance sensor (423) and corresponding second sheet metal (422) position second Capacitance sensor (424), the first laser interferometer (427) of corresponding first speculum (425) position and corresponding second reflection The second laser interferometer (428) of mirror (426) position；First driver (411), the first sheet metal (421), the first speculum (425) and universal shaft (43) point-blank, the second driver (412), the second sheet metal (422), the second speculum (426) and universal shaft (43) point-blank, and the first driver (411) vertical with the line of universal shaft (43) The line of two drivers (412) and universal shaft (43).
The big working distance autocollimation of high dynamic precision 2. portable combined according to claim 1 returns to zero, feature exist In further including Wavefront detecting system (7) and wavefront compensation system (8)；

The Wavefront detecting system (7) is one kind in following three kinds of situations：Situation one including Wavefront detecting spectroscope (71) and Air agitation wave front detector (72), the Wavefront detecting spectroscope (71) are arranged between speculum (3) and measured object (5), Air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71)；Situation two including wavefront are visited Spectroscope (71) and speculum deformation wave front detector (73) are surveyed, the Wavefront detecting spectroscope (71) is arranged in speculum (3) Between measured object (5), speculum deformation wave front detector (73) is arranged in the secondary reflection light path of speculum (3)；Situation Three, including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and speculum deformation wave front detector (73), institute It states Wavefront detecting spectroscope (71) to be arranged between speculum (3) and measured object (5), air agitation wave front detector (72) setting On the reflected light path of Wavefront detecting spectroscope (71), speculum deformation wave front detector (73) is arranged the two of speculum (3) In secondary reflection light path；

The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and is incident on Wavefront detecting spectroscope (71).
3. being realized on the portable combined zeroing big working distance autocollimation of high dynamic precision described in claim 1 portable The combination zeroing big working distance auto-collimation method of high dynamic precision, which is characterized in that include the following steps：

Step a, point bright light source (1), imaging sensor (65) imaging deviate image plane center direction according to a picture, utilize first to drive Dynamic device (411) and the second driver (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center Region；

Step b, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step a The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；

Step c, the capacitance change, Δ C1 of the first capacitance sensor (423) and the capacitance of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 Hes of angle change Δ θ of speculum (3)Simultaneously first laser interferometer (427) is read to obtain Change in displacement Δ x1 and the obtained change in displacement Δ x2 of second laser interferometer (428), be reconverted into speculum (3) 2 Hes of angle change Δ θAnd then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4, f51, f6 indicate 6 functions.
4. being realized on the portable combined zeroing big working distance autocollimation of high dynamic precision described in claim 2 portable The combination zeroing big working distance auto-collimation method of high dynamic precision, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72)；

It is characterized by comprising the following steps：

Step a, reference substance of the surface perpendicular to optical axis direction is chosen；

Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB obtains wavefront variation caused by air agitation；

Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), compensated Air agitation, f5 (G1) indicate one using the G1 obtained in step c as the function of parameter；

Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；

Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；

Step g, the capacitance change, Δ C1 of the first capacitance sensor (423) and the capacitance of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 Hes of angle change Δ θ of speculum (3)Simultaneously first laser interferometer (427) is read to obtain Change in displacement Δ x1 and the obtained change in displacement Δ x2 of second laser interferometer (428), be reconverted into speculum (3) 2 Hes of angle change Δ θAnd then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4, f51, f6 indicate 6 functions.
5. being realized on the portable combined zeroing big working distance autocollimation of high dynamic precision described in claim 2 portable The combination zeroing big working distance auto-collimation method of high dynamic precision, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and speculum deformation wave front detector (73)；

It is characterized by comprising the following steps：

Step a, reference substance of the surface perpendicular to optical axis direction is chosen；

Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Speculum deformation wave front detector (73) respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；

Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), compensated Air agitation and speculum deformation, f5 (G2) indicate one using the G2 obtained in step c as the function of parameter；

Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；

Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；

Step g, the capacitance change, Δ C1 of the first capacitance sensor (423) and the capacitance of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 Hes of angle change Δ θ of speculum (3)First laser interferometer (427) is read simultaneously to obtain The change in displacement Δ x2 that the change in displacement Δ x1 and second laser interferometer (428) arrived is obtained, is reconverted into speculum (3) 2 Hes of angle change Δ θAnd then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4, f51, f6 indicate 6 functions.
6. being realized on the portable combined zeroing big working distance autocollimation of high dynamic precision described in claim 2 portable Combination zeroing the big working distance auto-collimation method of high dynamic precision, it is desirable that Wavefront detecting system (7) at the same include Wavefront detecting light splitting Mirror (71), air agitation wave front detector (72) and speculum deformation wave front detector (73)；

It is characterized by comprising the following steps：

Step a, reference substance of the surface perpendicular to optical axis direction is chosen；

Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；

Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and speculum Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by speculum deformation；

Step d,

Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed Dynamic, f5 (G1) indicates one using the G1 obtained in step c as the function of parameter；

Or

Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and speculum deformation, f5 (G2) indicate one using the G2 obtained in step c as the function of parameter；

Or

Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), lights compensatory light (81), compensatory reflex mirror shape Become, f5 (G) indicates one using the G obtained in step c as the function of parameter；

Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；

Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；

Step g, the capacitance change, Δ C1 of the first capacitance sensor (423) and the capacitance of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 Hes of angle change Δ θ of speculum (3)First laser interferometer (427) is read simultaneously to obtain The change in displacement Δ x2 that the change in displacement Δ x1 and second laser interferometer (428) arrived is obtained, is reconverted into speculum (3) 2 Hes of angle change Δ θAnd then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δs C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4, f51, f6 indicate 6 functions.