CN106225726B - The big working distance autocollimation of array zeroing high-precision laser and method - Google Patents
The big working distance autocollimation of array zeroing high-precision laser and method Download PDFInfo
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- CN106225726B CN106225726B CN201610638834.4A CN201610638834A CN106225726B CN 106225726 B CN106225726 B CN 106225726B CN 201610638834 A CN201610638834 A CN 201610638834A CN 106225726 B CN106225726 B CN 106225726B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to the big working distance autocollimation of array zeroing high-precision laser and method；The device is made of light source, collimating mirror, reflecting mirror and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on reflecting mirror is recycled to obtain the angle change on measured object surface by adjusting reflecting mirror；Since the present invention increases reflecting mirror on traditional auto-collimation angle measurement system, therefore it can be avoided the problem of measured object reflected light deviates measuring system and leads to not measurement, and then has and increase auto-collimation working range under identical operating distance, or increase the technical advantage of operating distance under identical auto-collimation working range；In addition, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., makes the present invention also simple, low manufacture cost with structure；Measurement environmental stability can also be monitored simultaneously；And the technical advantage of rapid survey.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to array zeroing high-precision laser is big
Working distance autocollimation and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, urgent need carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree
Measurement；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combination, can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From
The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object
The nearly backtracking of the light beam of reflection could be acquired by feedback imaging system 6 and is imaged, and then realize effectively measurement.This road Jin Yuan
The condition of return limits, so that there are following two aspects disadvantages for the system:
The first, the range of 5 mirror surface normal of measurand and Laser Autocollimator optical axis included angle cannot be too big, otherwise can
It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed
Amount；
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis and autocollimator optical axis deviation minute angle will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system, into
And lead to not realize auto-collimation and micro angle measurement.
Two above problem be limited to traditional auto-collimation instrument can only under low-angle, small operating distance and use.
Summary of the invention
For two problems present in traditional autocollimator, the invention discloses a kind of array zeroing high-precision laser is big
Working distance autocollimation and method have compared with traditional autocollimator and dramatically increase auto-collimation under identical operating distance
Working range, or dramatically increase under identical auto-collimation working range the technical advantage of operating distance.
The object of the present invention is achieved like this:
Array return to zero the big working distance autocollimation of high-precision laser, including light source, transmission-type collimating mirror, reflecting mirror, with
And imaging system is fed back, angled adjustment measuring device is set on the reflecting mirror；The light beam of light source outgoing, by transmission-type quasi
It after straight mirror is collimated into collimated light beam, then is reflected by reflecting mirror, is incident on the surface of measured object；From the light of measured object surface reflection
Beam after reflecting using reflecting mirror, is acquired by feedback imaging system and is imaged；
The feedback imaging system is one of following two form:
The first, it is arranged between light source and transmission-type collimating mirror, including the first feedback spectroscope and setting are in transmission-type
The 4 quadrant detector of focal plane of collimating mirror and multiple single pixel photoelectric converters, the single pixel photoelectric converter is at array point
Cloth, 4 quadrant detector be not only located at array center but also be located on feedback imaging system optical axis；From the light of measured object surface reflection
Beam after reflecting using reflecting mirror, is successively visited by the transmission of transmission-type collimating mirror, the first feedback spectroscope reflection, by four-quadrant
Survey device or the acquisition imaging of single pixel photoelectric converter；
The second, be arranged between transmission-type collimating mirror and reflecting mirror, including first feedback spectroscope, first feedback object lens and
The 4 quadrant detector and multiple single pixel photoelectric converters of transmission-type focal plane of collimating mirror, the single pixel photoelectric conversion are set
At array distribution, 4 quadrant detector had not only been located at array center but also had been located on feedback imaging system optical axis device；From measured object surface
The light beam of reflection, after being reflected using reflecting mirror, successively by first feedback spectroscope reflection, first feedback object lens transmission, by
4 quadrant detector or the acquisition imaging of single pixel photoelectric converter；
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror
It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measuring device includes first
Sheet metal, the second sheet metal, the first capacitor sensor of corresponding first sheet metal position and corresponding second sheet metal position
Second capacitance sensor；First driver, the first sheet metal and universal shaft point-blank, the second driver, the second gold medal
Belong to piece and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal
The line of axis；Angular deflection measuring device further includes total optical path autocollimator.
The array zeroing high-precision laser realized on the above-mentioned array zeroing big working distance autocollimation of high-precision laser
Big working distance auto-collimation method, comprising the following steps:
Step a, bright light source is put, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step b；
The second, the point image position obtained is directly entered step b in 4 quadrant detector region；
Step b, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step c, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorBecome simultaneously by the angle that total optical path autocollimator obtains reflecting mirror
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The above-mentioned array zeroing big working distance autocollimation of high-precision laser, further includes Wavefront detecting system and wavefront compensation
System；
The Wavefront detecting system is one of following three kinds of situations: situation one including Wavefront detecting spectroscope and sky
Gas disturbance wave front detector, the Wavefront detecting spectroscope are arranged between reflecting mirror and measured object, air agitation Wavefront detecting
Device is arranged on the spectroscopical reflected light path of Wavefront detecting；Before situation two including Wavefront detecting spectroscope and reflecting mirror deformation waves
Detector, the Wavefront detecting spectroscope are arranged between reflecting mirror and measured object, and the setting of reflecting mirror deformation wave front detector exists
In the secondary reflection optical path of reflecting mirror；Situation three including Wavefront detecting spectroscope, air agitation wave front detector and reflecting mirror shape
Become wave front detector, the Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, and air agitation wave front detector is set
It sets on the spectroscopical reflected light path of Wavefront detecting, the secondary reflection optical path of reflecting mirror is arranged in reflecting mirror deformation wave front detector
On；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends
The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incident on Wavefront detecting spectroscope.
The array zeroing high-precision laser realized on the above-mentioned array zeroing big working distance autocollimation of high-precision laser
Big working distance auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance, f5 indicate a function；
Step e, bright light source is put, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step f；
The second, the point image position obtained is directly entered step f in 4 quadrant detector region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorBecome simultaneously by the angle that total optical path autocollimator obtains reflecting mirror
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The array zeroing high-precision laser realized on the above-mentioned array zeroing big working distance autocollimation of high-precision laser
Big working distance auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror deformation Wavefront detecting
Device；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and reflecting mirror deformation, f5 indicate a function；
Step e, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step f；
The second, the point image position obtained is directly entered step f in 4 quadrant detector region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe angle of reflecting mirror is obtained by total optical path autocollimator simultaneously
2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The array zeroing high-precision laser realized on the above-mentioned array zeroing big working distance autocollimation of high-precision laser
Big working distance auto-collimation method, it is desirable that Wavefront detecting system includes Wavefront detecting spectroscope, air agitation wave front detector simultaneously
With reflecting mirror deformation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance, f5
Indicate a function；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation, f5 indicate a function；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation,
F5 indicates a function；
Step e, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step f；
The second, the point image position obtained is directly entered step f in 4 quadrant detector region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe angle of reflecting mirror is obtained by total optical path autocollimator simultaneously
2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The utility model has the advantages that
Compared with traditional autocollimator, invention increases the angle of reflecting mirror and setting on the mirror to adjust measurement
Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions
In the case where shifting, measuring device is adjusted by angle and adjusts reflecting mirror posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition to this, the present invention also has following a few technical advantages:
The first, selective transmission formula collimating mirror, keeps apparatus of the present invention structure simple, and low manufacture cost is easy to use；
The second, select multiple single pixel photoelectric converters and 4 quadrant detector collectively as in feedback imaging system at
As device, the advantage that multiple single pixel photoelectric converter areas are big and 4 quadrant detector position resolution is high is combined；Its
In, multiple single pixel photoelectric converters combine, it can be ensured that under measured object reflected light and the biggish situation in incident light drift angle,
Reflected light still is able to the entrance pupil into optical system, without departing from range of receiving；On this basis, reflecting mirror is recycled to realize instead
Light quickly real-time return compensation is penetrated, reflected light is adjusted to 4 quadrant detector position, and can be according to 4 quadrant detector
High position resolution advantage obtain higher angle-measurement accuracy；Therefore, by multiple single pixel photoelectric converters and four-quadrant
Limit detector combines, and not only makes auto-collimation working range or operating distance of the present invention greatly be extended, but also be conducive to
Improve angle-measurement accuracy；
Third, selection capacitance sensor and total optical path autocollimator are collectively as angular deflection measuring device, so that this hair
The bright superelevation that can not only utilize capacitance sensor is displaced sensory characteristic and displacement of the lines is easy to convert within the scope of minute angle
For the good characteristic of angular displacement, allow the invention to that there is very high survey under the conditions of low sample frequency (20Hz and following)
Accuracy of measurement, angle highest measurement resolving power can be increased to 0.0005 rad from 0.005 rad of traditional autocollimator, improve one
The order of magnitude；And small good characteristic can be influenced by air environment variation using optical path autocollimator measurement accuracy altogether, so that
The present invention can be under the unstable measurement environment of air environment, it is ensured that measurement effectively carries out；The two combines, moreover it is possible to play prison
The effect of measurement environmental stability；
4th, the present invention additionally uses following technology: the first driver, the first sheet metal and universal shaft are straight at one article
On line, the second driver, the second sheet metal and universal shaft point-blank, and the company of the first driver and universal shaft
The line of line vertical second driver and universal shaft；The orthogonal two dimension setting of this two lines, so that different line sides
To data it is non-interference, without decoupling operation, calibration can be facilitated in this way, simplify calculating process, improve measuring speed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the first knot of the array zeroing big working distance autocollimation specific embodiment one of high-precision laser of the present invention
Structure schematic diagram.
Fig. 3 is angular adjustment apparatus structural schematic diagram in angle adjustment measuring device.
Fig. 4 is the structural schematic diagram of the first structure of angular deflection measuring device in angle adjustment measuring device.
Fig. 5 is the structural schematic diagram of second of structure of angular deflection measuring device in angle adjustment measuring device.
Fig. 6 is second of knot of the array zeroing big working distance autocollimation specific embodiment one of high-precision laser of the present invention
Structure schematic diagram.
Fig. 7 is the structural representation of the array zeroing big working distance autocollimation specific embodiment two of high-precision laser of the present invention
Figure.
Fig. 8 is the structural representation of the array zeroing big working distance autocollimation specific embodiment three of high-precision laser of the present invention
Figure.
Fig. 9 is the structural representation of the array zeroing big working distance autocollimation specific embodiment four of high-precision laser of the present invention
Figure.
In figure: 1 light source, 21 transmission-type collimating mirrors, 3 reflecting mirrors, 4 angles adjust measuring device, 411 first drivers, 412
Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitor sensors, 424 second capacitance sensors,
429 traditional auto-collimation systems, 43 universal shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedbacks
Object lens, 66 4 quadrant detectors, 67 single pixel photoelectric converters, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air
Disturb wave front detector, 73 reflecting mirror deformation wave front detectors, 8 wavefront compensation systems, 81 compensatory lights, 82 compensation collimating mirrors,
83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is the array zeroing big working distance autocollimation embodiment of high-precision laser.
The array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram are as shown in Figure 2.It should
Autocollimation includes light source 1, transmission-type collimating mirror 21, reflecting mirror 3 and feedback imaging system 6, is set on the reflecting mirror 3
It is equipped with angle adjustment measuring device 4；The light beam that light source 1 is emitted, after transmission-type collimating mirror 21 is collimated into collimated light beam, then by
Reflecting mirror 3 reflects, and is incident on the surface of measured object 5；From the light beam of 5 surface reflection of measured object, after being reflected using reflecting mirror 3,
It is acquired and is imaged by feedback imaging system 6；
The feedback imaging system 6 is arranged between light source 1 and transmission-type collimating mirror 21, including the first feedback spectroscope
61 and the 4 quadrant detector 66 and multiple single pixel photoelectric converters 67 of 21 focal plane of transmission-type collimating mirror are set, it is described
At array distribution, 4 quadrant detector 66 had not only been located at array center but also had been located at feedback imaging system 6 single pixel photoelectric converter 67
On optical axis；It is successively saturating by transmission-type collimating mirror 21 after being reflected using reflecting mirror 3 from the light beam of 5 surface reflection of measured object
It penetrates, the first feedback spectroscope 61 reflects, by 4 quadrant detector 66 or the acquisition imaging of single pixel photoelectric converter 67；
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection measurement dress
It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measuring device
Including the first sheet metal 421, the second sheet metal 422, corresponding first sheet metal, 421 position first capacitor sensor 423 and
Second capacitance sensor 424 of corresponding second sheet metal, 422 position；First driver 411, the first sheet metal 421 and universal
Axis 43 point-blank, the second driver 412, the second sheet metal 422 and universal shaft 43 point-blank, and
The line of one driver 411 vertical with the line of universal shaft 43 second driver 412 and universal shaft 43, as shown in Figure 3；Angle is inclined
Turning measuring device further includes total optical path autocollimator 429, and the optical path autocollimator 429 altogether may be mounted at appointing for reflecting mirror 3
Meaning one side, as shown in Figure 4 and Figure 5.
It should be noted that in the present embodiment, feedback imaging system 6 is it is also an option that such as flowering structure: setting is transmiting
Between formula collimating mirror 21 and reflecting mirror 3, including the first feedback spectroscope 61, first feeds back object lens 63 and setting and collimates in transmission-type
The 4 quadrant detector 66 of 21 focal plane of mirror and multiple single pixel photoelectric converters 67, the single pixel photoelectric converter 67 is at array
Distribution, 4 quadrant detector 66 be not only located at array center but also be located on feedback 6 optical axis of imaging system；From 5 surface reflection of measured object
Light beam, using reflecting mirror 3 reflect after, successively by first feedback spectroscope 61 reflection, first feedback object lens 63 transmission, by
4 quadrant detector 66 or the acquisition imaging of single pixel photoelectric converter 67；As shown in Figure 6.
Specific embodiment two
The present embodiment is the array zeroing big working distance autocollimation embodiment of high-precision laser.
The array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram are as shown in Figure 7.?
On the basis of specific embodiment one, the array zeroing big working distance autocollimation of high-precision laser of the present embodiment is additionally provided with wave
Preceding detection system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
It detects spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is the array zeroing big working distance autocollimation embodiment of high-precision laser.
The array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram are as shown in Figure 8.?
On the basis of specific embodiment one, the array zeroing big working distance autocollimation of high-precision laser of the present embodiment is additionally provided with wave
Preceding detection system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；The wave
Preceding detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the array zeroing big working distance autocollimation embodiment of high-precision laser.
The array zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram are as shown in Figure 9.?
On the basis of specific embodiment one, the array zeroing big working distance autocollimation of high-precision laser of the present embodiment is additionally provided with wave
Preceding detection system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged in reflecting mirror 3
Secondary reflection optical path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, need to illustrate there are also following three points:
The first, the first driver 411 and the second driver 412 in the described angular adjustment apparatus, both can choose driving
The stepper motor or motor servo driver of fast speed, and can choose the driving higher piezoelectric ceramic actuator of precision, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
The second, the described transmission-type collimating mirror 21 can choose binary optical lenses, and logical ordinary optical lens are compared, binary optical
It is thinner to learn lens, is conducive to system compact, while binary optical lenses collimation is more preferable, is conducive to improve systematic survey essence
Degree.
Third, in all of above autocollimation embodiment, angular deflection measuring device all only includes two pairs of sheet metals
With the combination of capacitance sensor, this design default reflecting mirror 3 does not generate translation during the work time and makes；If examined
Consider reflecting mirror 3 to generate translation at work and influence measurement accuracy, third can be placed at 43 position of universal shaft to metal
The combination of piece and capacitance sensor, to offset the identical translation that three capacitance sensors generate, it is ensured that measurement accuracy.
Specific embodiment five
The present embodiment is real on the zeroing big working distance autocollimation of high-precision laser of the array described in specific embodiment one
The existing array zeroing big working distance auto-collimation embodiment of the method for high-precision laser.
The array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, bright light source 1 is put, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step b；
The second, the point image position obtained is directly entered step b in 66 region of 4 quadrant detector；
Step b, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step c, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously
Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1
(Δ C1, Δ C2),With
F1, f2, f3, f4 indicate 4 functions.
Main innovative point of the invention is the angle adjustment measurement dress for increasing reflecting mirror 3 and being arranged on reflecting mirror 3
4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement
Under condition, the whole reflecting mirror posture of measuring device tune 4 is adjusted by angle, makes reflected light backtracking and is connect by feedback imaging system 6
It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement.
However, the introducing of reflecting mirror 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance can not ignore the air agitation between reflecting mirror 3 and measured object 5 again, can also reduce system
Measurement accuracy.As it can be seen that just must take into account 3 face type error of reflecting mirror and reflecting mirror 3 to realize high-acruracy survey and be tested
Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment six, specific embodiment seven and specific
Embodiment eight.
Specific embodiment six
The present embodiment is real on the zeroing big working distance autocollimation of high-precision laser of the array described in specific embodiment two
The existing array zeroing big working distance auto-collimation embodiment of the method for high-precision laser.
The array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, compensated
Air agitation, f5 indicate a function；
Step e, bright light source 1 is put, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f；
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously
Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1
(Δ C1, Δ C2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment two, can utilize air agitation wave front detector 72
Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation
The high-acruracy survey of influence.
Specific embodiment seven
The present embodiment is real on the zeroing big working distance autocollimation of high-precision laser of the array described in specific embodiment three
The existing array zeroing big working distance auto-collimation embodiment of the method for high-precision laser.
The array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, reflecting mirror deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, compensated
Air agitation and reflecting mirror deformation, f5 indicate a function；
Step e, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f；
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously
Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1
(Δ C1, Δ C2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is real on the zeroing big working distance autocollimation of high-precision laser of the array described in specific embodiment four
The existing array zeroing big working distance auto-collimation embodiment of the method for high-precision laser.
The array zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, make-up air is disturbed
Dynamic, f5 indicates a function；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, make-up air is disturbed
Dynamic and reflecting mirror deformation, f5 indicate a function；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G), lights compensatory light 81, compensatory reflex mirror shape
Become, f5 indicates a function；
Step e, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f；
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously
Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1
(Δ C1, Δ C2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize air agitation wave front detector 72
Air agitation and reflecting mirror deformation are separately separated with reflecting mirror deformation wave front detector 73, and then selectively to air
Disturbance carries out separate compensation, separate compensation is carried out to reflecting mirror deformation or carries out whole benefit to air agitation and reflecting mirror deformation
It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and reflecting mirror deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and reflecting mirror deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while reflecting mirror processing quality is carried out
Effective evaluation.
Claims (4)
- The big working distance autocollimation of high-precision laser 1. array returns to zero, which is characterized in that collimated including light source (1), transmission-type Mirror (21), reflecting mirror (3) and feedback imaging system (6), are arranged angled adjustment measuring device on the reflecting mirror (3) (4)；The light beam of light source (1) outgoing reflects after transmission-type collimating mirror (21) is collimated into collimated light beam, then by reflecting mirror (3), It is incident on the surface of measured object (5)；From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, by feeding back Imaging system (6) acquisition imaging；The feedback imaging system (6) is one of following two form:The first, it is arranged between light source (1) and transmission-type collimating mirror (21), including the first feedback spectroscope (61) and setting In the 4 quadrant detector (66) and multiple single pixel photoelectric converters (67) of transmission-type collimating mirror (21) focal plane, the single pixel Photoelectric converter (67) had not only been located at array center but also had been located at feedback imaging system (6) at array distribution, 4 quadrant detector (66) On optical axis；Successively pass through transmission-type collimating mirror after reflecting mirror (3) reflection from the light beam of measured object (5) surface reflection (21) transmission, the first feedback spectroscope (61) are reflected, are acquired by 4 quadrant detector (66) or single pixel photoelectric converter (67) Imaging；The second, it is arranged between transmission-type collimating mirror (21) and reflecting mirror (3), including the first feedback spectroscope (61), first are instead It presents object lens (63) and the 4 quadrant detector (66) in transmission-type collimating mirror (21) focal plane and multiple single pixel photoelectric conversions is set Device (67), the single pixel photoelectric converter (67) are not only located at array center but also position at array distribution, 4 quadrant detector (66) In on feedback imaging system (6) optical axis；From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, successively By the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by 4 quadrant detector (66) or single pixel light Electric transducer (67) acquisition imaging；Angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection measurement dress It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Measure the first capacitor biography that device includes the first sheet metal (421), the second sheet metal (422), corresponding first sheet metal (421) position Sensor (423) and second capacitance sensor (424) of corresponding second sheet metal (422) position；First driver (411), One sheet metal (421) and universal shaft (43) point-blank, the second driver (412), the second sheet metal (422) and Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43) (412) with the line of universal shaft (43)；Angular deflection measuring device further includes total optical path autocollimator (429)；It further include wavefront Detection system (7) and wavefront compensation system (8)；The Wavefront detecting system (7) is one of following three kinds of situations: situation one including Wavefront detecting spectroscope (71) and Air agitation wave front detector (72)；Situation two including Wavefront detecting spectroscope (71) and reflecting mirror deformation wave front detector (73)；Situation three including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation Wavefront detecting Device (73)；The Wavefront detecting spectroscope (71) is arranged between reflecting mirror (3) and measured object (5), air agitation Wavefront detecting Device (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), and reflecting mirror deformation wave front detector (73) setting is being reflected In the secondary reflection optical path of mirror (3)；The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) modulation, is incident on Wavefront detecting spectroscope (71).
- 2. the array zeroing realized on the zeroing big working distance autocollimation of high-precision laser of the array described in claim 1 is high-precision Spend the big working distance auto-collimation method of laser, it is desirable that Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air are disturbed Dynamic wave front detector (72)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lighted compensatory light (81), compensated Air agitation；F5 indicates 1 function；Step e, feedback imaging system (6) imaging, if:The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 indicate 4 functions.
- 3. the array zeroing realized on the zeroing big working distance autocollimation of high-precision laser of the array described in claim 1 is high-precision Spend the big working distance auto-collimation method of laser, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror Deformation wave front detector (73)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lighted compensatory light (81), compensated Air agitation and reflecting mirror deformation；F5 indicates 1 function；Step e, feedback imaging system (6) imaging, if:The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 indicate 4 functions.
- 4. the array zeroing realized on the zeroing big working distance autocollimation of high-precision laser of the array described in claim 1 is high-precision Spend the big working distance auto-collimation method of laser, it is desirable that Wavefront detecting system (7) is disturbed including Wavefront detecting spectroscope (71), air simultaneously Dynamic wave front detector (72) and reflecting mirror deformation wave front detector (73)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and reflecting mirror Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；Step d,Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed It is dynamic；F5 indicates 1 function；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and reflecting mirror deformation；F5 indicates 1 function；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), is lighted compensatory light (81), compensatory reflex mirror shape Become；F5 indicates 1 function；Step e, feedback imaging system (6) imaging, if:The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 indicate 4 functions.
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