CN1719193A - Long distance bidimension photoelectric self collimating device for drift amount target feedback control and its method - Google Patents

Long distance bidimension photoelectric self collimating device for drift amount target feedback control and its method Download PDF

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CN1719193A
CN1719193A CN 200510089852 CN200510089852A CN1719193A CN 1719193 A CN1719193 A CN 1719193A CN 200510089852 CN200510089852 CN 200510089852 CN 200510089852 A CN200510089852 A CN 200510089852A CN 1719193 A CN1719193 A CN 1719193A
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angle
measuring
drift value
drift
light
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CN 200510089852
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Chinese (zh)
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CN1304880C (en
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谭久彬
敖磊
崔继文
赵维谦
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哈尔滨工业大学
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Abstract

The present invention relates to drifting quantity target feedback controlled long-distance 2-D photoelectric autocollimating equipment. Said equipment includes the components of 2-D photoelectric autocollimating light tube, computer, 2-D light beam deflection device and drifting quantity monitoring device, also includes light-splitted target detector. Besides, said invention also provides its measurement method.

Description

The long-distance 2 D photoelectric auto-collimation apparatus and method of drift amount target FEEDBACK CONTROL

Technical field

The invention belongs to exact instrument manufacturing and precision measurement field of measuring techniques, particularly a kind of length of the angle drift value based on drift amount target feedback control technology real-Time Compensation light beam is apart from high-precision two-dimensional photoelectric auto-collimation measurement mechanism and measuring method.

Background technology

Along with the updating and improve of measuring technique, the development of modernized high-acruracy survey technology and azimuth aiming tracker has proposed more and more higher requirement to low-angle measuring accuracy.Photoelectric auto-collimator is in the low-angle precision measurement, the high precision aiming has irreplaceable effect with the aspect, location, can be used as the ingredient of optical metrological instruments such as angular instrument, optical comparator, can be used for separately also that surveying instrument is used for optical measurement, aero-space instrument is debug and aspects such as military spacecraft attitude measurement.

In the high precision small angle measurement, laser beam is because advantages such as its good single direction, high brightness and high stabilities, often be used as measuring basis and be widely used in ultraprecise process equipment and the measuring equipment, many scientific research institutions develop the photoelectric auto-collimator that adopts LASER Light Source and high precision ccd image sensor to measure two dimension angular (1. Wu is beautiful. Laser Autocollimator. 08 phase of ray machine electrical information .1994: 11-13; Jiang this and, Chen Wenyi, Hu Wenfei, Hu Qingrong. the small angle measurement system that detects with laser alignment and CCD. laser and infrared .1998,28 (4): 233-234+243; 3. Lin Yu pond, Zhang Ping, Zhao Meirong, Hong Xin. the open-air semiconductor laser autocollimator that uses. the accurate manufacturing technology .2001 of aviation, 37 (3): 35-37; 4. open Yao Yu, Zhang Minghui, Qiao Yanfeng. a kind of high precision CCD laser auto-collimation Research on Measurement System. photoelectron laser .2003,14 (2): 168-170; 5. Ma Fulu, Zhang Zhi's profit, Zhou Zhaofa. based on single line array CCD linearity collimator of M type graduation silk. optical technology .2002,28 (3): 224-225+227).

Be better than 0.5 for uncertainty of measurement " photoelectric auto-collimator, measuring distance usually less than 6m (1. military Shanxi is mediate. the geometric sense Technology of Precision Measurement. the .1989 of publishing house of Harbin Institute of Technology September; 2. the German M  LLER-WEDEL ELCOMAT vario of company twin shaft autocollimator Chinese operation manual .2004; 3. Chinese shipbuilding industry the 6354th SZY-99 of Jiujiang Precision Measuring Technology Research Institute of research institute type digital display autocollimator Chinese operation manual .2004; 4. Britain Taylor Hobson company's T A51, DA20, DA400 type optical-autocollimator Chinese operation manual .2002).In the application scenario of long distance, the angle drift value of laser beam is the main source of photoelectric auto-collimator measuring error.Cause the main cause of beam drift to have: (1) laser resonant cavity internal reflector modification causes the angle drift of light beam; (2) randomized jitter of the big entraining air stream in the beam propagation approach causes the random perturbation of laser beam and bending of light that the atmospheric gradient change of refractive causes etc.Theoretical analysis shows: square being directly proportional of bending of light and distance, randomized jitter is directly proportional with 1.5 powers of distance.Increase along with distance, the randomized jitter of the big entraining air stream in the beam propagation approach causes the influence of the random perturbation of laser beam and the bending of light that the atmospheric gradient change of refractive causes to cause that the angle of light beam drifts about considerably beyond laser resonant cavity internal reflector modification, and it is just difficult more therefore to improve the collimation precision.In growing apart from laser collimation system, the interference that employing zone plate, phase board, binary optical device, double slit etc. produce and the space line of diffraction fringe are as datum line, utilize them to insensitive these characteristics of drift value, reach the purpose of collimation, typical method has Phase Plate Alignment in Large-scale Measurement method, binary optical collimation method, twin-beam compensation collimation method etc., and this class methods collimation precision is generally 10 -6Rad, promptly 0.2 " about magnitude.(1. ten thousand Deans. laser datum high-acruracy survey technology. the .1999 of National Defense Industry Press June; 2. square Zhong Yan, Yin Chunyong, Liang Jinwen. the research of high-precision laser collimation technique (one). aviation instrumentation technology .1997,17 (1): 3-6; 3. rich auspicious in, Wang Shipeng, Liu Xiaochun, Gong Zhiben. the experimental study of laser beam drift in the turbulent atmosphere. Chinese laser .2000,27 (11): 1011-1015; 4. Yang You hall, Ceng Lijiang, Yin Chunyong. the applied research of auto-adaptive noise removal technology in laser alignment. Chinese journal of scientific instrument .1995,16 (4): 370-374).

In the data acquisition process of 2 D photoelectric autocollimator, because the influence of beam drift, if adopt the Facula Center Location method then spot center that receiver receives is drifted about with beam drift; If adopt profile centralized positioning method, then owing to beam drift, the center of energy of the hot spot that receiver receives and the geometric center of profile do not overlap the skew that causes the profile center, directly produce the deviations at profile center.If this angle drift value is not revised or is compensated, with directly feeding back to the measurement of angle deviation that low-angle measurement result causes, cause the instrument data poor repeatability, stability is bad, even make spot drift arrive outside the reception visual field, influence the operate as normal of instrument.If will further improve measurement stability and measuring accuracy, only rely on the collimation precision that improves light beam self, all be to be difficult to realize on still being technological and manufacturing level from prior art.

Adopt the close-loop feedback control technology, be the measurement of angle deviation of eliminating or this angle drift value of compensation correction causes, realize that high-precision small angle measurement provides a kind of otherwise effective technique approach.In order to improve the directional stability of laser beam, many domestic and international experts and scholars are at different application scenarios at present, (1. Zhao Wei is modest to have proposed many laser alignment methods based on the close-loop feedback control technology, Tan Jiubin, Ma Hongwen, Zou Limin. drift value feedback control type laser alignment method. optics journal .2004,24 (3): 373-377; 2. in Da Ren, Zhang Zhiqiang, Xu Jiyu, Su Jiexian. the light path automatic compensating method that disturbs in the laser measurement. Chinese journal of scientific instrument .2003,24 (2): 123-126; 3. deep in the hall, Guo Yanzhen. improve a kind of method of laser alignment precision. oil instrument .1999,13 (6): 18-20; 4. Li Yan, Meng Xiangwang, Zhang Enyao. the big workpiece hole of a kind of new pattern laser scan-type-hole axiality measuring apparatus. laser and infrared .2000,30 (5): 280-282).

Though above-mentioned as can be known in actual applications measurement scheme has suppressed the angle drift value of light beam to a certain extent, above-mentioned measurement scheme only at be the application scenario of specific laser linear datum, control to as if the center of laser beam.And in the practical application of 2 D photoelectric autocollimator, especially in the application scenario of growing distance, requirement can also accurately measure the variable quantity of Bidimensional small angle in the angle drift value of introducing the FEEDBACK CONTROL laser beam, difficult point is that the object of FEEDBACK CONTROL is exactly the variable quantity of the Bidimensional small angle that need measure of 2 D photoelectric autocollimator, and the not intellectual of the object of control directly causes and can't introduce FEEDBACK CONTROL in the measuring process of 2 D photoelectric autocollimator.The angle drift value of light beam is not eliminated in measuring process, be blended at last and cause the measurement of angle deviation in the measurement result, cause photoelectric auto-collimator in the application of long distance, measurement stability and poor repeatability, uncertainty of measurement is difficult to further raising, limited the range of application of photoelectric auto-collimator greatly, this also is a unsolved major issue in the practical application of current photoelectric auto-collimator.

Summary of the invention

The objective of the invention is to overcome the deficiency that above-mentioned existing photoelectric auto-collimation instrument measurement method exists, a kind of long-distance 2 D photoelectric auto-collimation apparatus and method of drift amount target FEEDBACK CONTROL are provided, beam splitting type target detector separates in the measuring-signal that obtains its Bidimensional small angle variable quantity and feeds back to and the identical angle of measuring beam characteristic drift component feedback beam, monitor in real time by the be connected angle drift value of the drift value monitoring device diagonal angle drift component feedback beam formed of focusing objective len and 4 quadrant detector, the computing machine angle drift value that monitoring obtains according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, measuring beam is adjusted according to the opposite direction of angle drift value, inhibition and elimination are coupling in the angle drift value of the measuring beam in the measuring-signal, the angle measurement error that the angle drift value of dynamic compensation light beam causes, monitoring distance is long, the monitoring sensitivity height of diagonal angle drift value can significantly improve the measuring distance of 2 D photoelectric autocollimator, measurement stability and measuring accuracy.

The technical solution that the present invention adopts is: a kind of long-distance 2 D photoelectric auto-collimation device of drift amount target FEEDBACK CONTROL, comprise 2 D photoelectric autocollimation light pipe, computing machine, the two-dimentional light beam inflector assembly, with the drift value monitoring device, said 2 D photoelectric autocollimation light pipe is by the LASER Light Source of placing successively, graticule, spectroscope, ccd image sensor and collimator objective are formed, said drift value monitoring device is connected by focusing objective len and 4 quadrant detector and forms, said two-dimentional light beam inflector assembly is by drive power supply for piezoelectric ceramics, the piezoelectric ceramics shifter, two dimension micro-displacement work table and deflection mirror are formed, also comprise beam splitting type target detector, this beam splitting type target detector is between two-dimentional light beam inflector assembly and drift value monitoring device, beam splitting type target detector separates in the measuring-signal that obtains its Bidimensional small angle variable quantity and feeds back to and the identical angle of measuring beam characteristic drift component feedback beam, the angle drift value of drift value monitoring device diagonal angle drift component feedback beam is monitored in real time, the computing machine angle drift value that monitoring obtains according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, measuring beam is adjusted according to the opposite direction of angle drift value, suppressed to be coupling in the angle drift value of the measuring beam in the measuring-signal.

Beam splitting type target detector is made of half surface plating spectro-film of the inclination working surface of right-angle prism, and measuring beam is by the working surface incident of plating spectro-film.

Beam splitting type target detector is made of half surface plating spectro-film of the inclination working surface of prism of corner cube, and measuring beam is by the working surface incident of plating spectro-film.

Beam splitting type target detector is made of two pentagonal prisms staggered relatively, the working surface plating spectro-film of one of them pentagonal prism, and measuring beam is by the working surface incident of the pentagonal prism of plating spectro-film.

Beam splitting type target detector is made of two right-angle prisms staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism, and measuring beam is by the vertical working surface incident of the right-angle prism of plating spectro-film.

The present invention also provides a kind of long-distance 2 D photoelectric auto-collimation method of drift amount target FEEDBACK CONTROL, may further comprise the steps:

1. 2 D photoelectric autocollimation light pipe sends measuring beam;

2. beam splitting type target detector receives measuring beam and is separated into folded light beam and transmitted light beam;

3. folded light beam is received by ccd image sensor after obtaining the Bidimensional small angle variable quantity of beam splitting type target detector, becomes measuring-signal;

4. transmitted light beam is isolated and the identical angle of measuring beam characteristic drift component feedback beam, feeds back to the drift value monitoring device, and the line focus object lens are received by 4 quadrant detector, the angle drift value of monitoring angle of departure drift component feedback beam:

ϵ = arctan ( Δd f 0 )

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector, f 0Focal length for focusing objective len.

5. the angle drift value of the computing machine angle drift component feedback beam of monitoring out according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, makes measuring beam according to the opposite direction adjustment of angle drift value, and the adjustment amount size is:

φ=ε

Wherein: φ is the adjustment amount of two-dimentional light beam inflector assembly to the space angle of light beam, the angle drift value of the angle drift component feedback beam that ε monitors out for the drift value monitoring device.

6. adjust repeatedly according to step 3 and step 4, suppress and eliminate the angle drift value of the measuring beam that is coupling in the measuring-signal in real time, accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector by measuring-signal:

θ = d 1 2 f

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector, d 1For measuring-signal passes at ccd image

The variable quantity of the spot center position that forms on the sensor, f are the equivalent focal length of collimator objective.

The present invention has following characteristics and good result:

1. adopt novel beam splitting type target detector to improve optical measuring system, the angle drift value of light beam is separated from the Bidimensional small angle variable quantity of beam splitting type target detector, obtain in real time and the identical angle of measuring beam characteristic drift component feedback beam, feed back to the drift value monitoring device, monitor the angle drift value of angle of departure drift component feedback beam in real time by 4 quadrant detector, this is one of innovative point that is different from existing photoelectric auto-collimation measuring technique;

2. in design, the randomized jitter of the big entraining air stream in the beam propagation approach causes the influence of the random perturbation of laser beam and the bending of light that the atmospheric gradient change of refractive causes all will cause the angle drift of laser beam, the angle drift value of light beam changes in measuring beam and in the drift component feedback beam of angle simultaneously, computing machine is controlled the two-dimentional light beam inflector assembly in real time according to the angle drift value of the angle drift component feedback beam that the drift value monitoring device is monitored out, measuring beam is adjusted according to the opposite direction of angle drift value, can suppress and eliminate the angle drift value of the measuring beam that is coupling in the measuring-signal fully, this be different from existing photoelectric auto-collimation measuring technique innovative point two;

3. present design has been introduced the close-loop feedback control technology when accurately measuring the Bidimensional small angle variable quantity, in light path, add beam splitting type target detector, drift value monitoring device and two-dimentional light beam inflector assembly, the angle measurement error that angle drift value that can the dynamic compensation light beam causes, solved in the long distance applications occasion because the measurement stability that the angle drift value of light beam causes is poor, even the instrument that drifts about out receives the difficult problem of visual field, in the measuring distance that increases the 2 D photoelectric autocollimator, improved measurement stability, the long needs of measuring apart from high precision two-dimensional narrow angle have been satisfied, and distance is long more, precision is improved remarkable more, the reliability height, practical.

Description of drawings

Fig. 1 is the structural representation of apparatus of the present invention;

Fig. 2 is that the beam splitting type target detector in apparatus of the present invention separates the structural representation that obtains with the identical angle of measuring beam characteristic drift component feedback beam when obtaining the Bidimensional small angle variable quantity;

Fig. 3 is the measuring principle figure of the angle drift value of the drift value monitoring device monitoring angle drift component feedback beam in apparatus of the present invention;

Fig. 4 is the two-dimentional light beam inflector assembly in apparatus of the present invention carries out real-time FEEDBACK CONTROL to the angle drift value of measuring beam a structural representation;

Fig. 5 is by the be connected structural representation of the drift value monitoring device formed of focusing objective len and 4 quadrant detector in apparatus of the present invention;

Fig. 6 (a) is that the beam splitting type target detector in apparatus of the present invention is made of half surface plating spectro-film of the inclination working surface of prism of corner cube, and measuring beam is by the structural representation of half working surface incident of plating spectro-film;

Fig. 6 (b) is that the beam splitting type target detector in apparatus of the present invention is made of two pentagonal prisms staggered relatively, the working surface plating spectro-film of one of them pentagonal prism, and measuring beam is by the structural representation of the working surface incident of the pentagonal prism of plating spectro-film;

Fig. 6 (c) is that the beam splitting type target detector in apparatus of the present invention is made of two right-angle prisms staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism, measuring beam is by the structural representation of the vertical working surface incident of the right-angle prism of plating spectro-film.

Embodiment

Below in conjunction with accompanying drawing long-distance 2 D photoelectric auto-collimation device and the measuring method based on the drift amount target feedback control technology of the present invention is described in detail:

As shown in Figure 1, the 2 D photoelectric autocollimation light pipe 1 be made up of LASER Light Source 2, graticule 3, spectroscope 4, ccd image sensor 5, collimator objective 6 of device of the present invention, the drift value monitoring device of being made up of 4 quadrant detector 8, focusing objective len 9 and deflection mirror 10 7, beam splitting type target detector 11, computing machine 12, two-dimentional light beam inflector assembly 17 of being made up of drive power supply for piezoelectric ceramics 13, piezoelectric ceramics shifter 14, two-dimentional micro-displacement work table 15 and deflection mirror 16 etc. constitute.

The path of its light is as follows:

The laser beam that the LASER Light Source 2 of 2 D photoelectric autocollimation light pipe 1 is sent illuminates the graticule 3 at the focus place that is positioned at collimator objective 6, through spectroscope 4 transmissions, after collimator objective 6 is assembled, through inciding the beam splitting type target detector 11 that is placed on the measured object after 17 reflections of two-dimentional light beam inflector assembly, beam splitting type target detector 11 is divided into two bundles with incident beam: after folded light beam is obtained the Bidimensional small angle variation of beam splitting type target detector 11, after 17 reflections of two-dimentional light beam inflector assembly, assemble by collimator objective 6, through imaging on the ccd image sensor 5 after spectroscope 4 reflections, become measuring-signal; Transmitted light beam becomes and the identical angle of measuring beam characteristic drift component feedback beam, feed back to drift value monitoring device 7, through deflection mirror 10 reflections, focusing objective len 9 focuses on 4 quadrant detector 8 receptions of back by the place, focal plane that is positioned at focusing objective len 9, the angle drift value of separation and monitoring angle of departure drift component feedback beam.Computing machine 12 is controlled two-dimentional light beam inflector assembly 17 in real time according to the angle drift value of the angle drift component feedback beam of monitoring out, carry out the adjustment of the space angle of light beam, make measuring beam according to the opposite direction adjustment of angle drift value, the step of monitoring repeatedly and adjusting can suppress and eliminate the angle drift value of the measuring beam that is coupling in the measuring-signal in real time.By Fig. 1 and Fig. 2, and, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector 11 by measuring-signal in conjunction with geometrical optics and optical autocollimating principle:

θ = d 1 2 f

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector 11, d 1The variable quantity of the spot center position that forms on ccd image sensor 5 for measuring-signal, f is the equivalent focal length of collimator objective 6.

Separate when obtaining the Bidimensional small angle variable quantity and obtain and the identical angle of measuring beam characteristic drift component feedback beam by beam splitting type target detector 11, and the measuring principle of being monitored by the angle drift value of drift value monitoring device 7 diagonal angle drift component feedback beam as shown in Figures 2 and 3, the photosurface of the 4 quadrant detector 8 of the angle drift value of monitoring angle drift component feedback beam is centered close to the focus place of focusing objective len 9 in the drift value monitoring device 7, when measuring beam produces angle drift value ε, angle drift component feedback beam focuses on the focal plane of focusing objective len 9 and produces displacement d, and the angle drift value of monitoring angle of departure drift component feedback beam thus is:

ϵ = arctan ( Δd f 0 )

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is the displacement that the focusing center of angle drift component feedback beam departs from the photosurface center of 4 quadrant detector 8, f 0Focal length for focusing objective len 9.

The structural representation that the angle drift value of 17 pairs of measuring beams of two-dimentional light beam inflector assembly carries out the real-time closed-loop FEEDBACK CONTROL as shown in Figure 4, in the close-loop feedback control system, in order to make two-dimentional light beam inflector assembly 17 reach very high driving resolution characteristic and to drive precision, employing is by drive power supply for piezoelectric ceramics 13, piezoelectric ceramics shifter 14, the two-dimentional light beam inflector assembly 17 that two dimension micro-displacement work table 15 and deflection mirror 16 are formed, the angle drift value of the computing machine 12 angle drift component feedback beam that 7 monitorings obtain according to the drift value monitoring device is controlled two-dimentional light beam inflector assembly 17 in real time, carry out the adjustment of the space angle of light beam, the adjustment amount size is:

φ=ε

Wherein: φ is the adjustment amount of the space angle of 17 pairs of light beams of two-dimentional light beam inflector assembly, and ε is the angle drift value of the 4 quadrant detector 8 angle drift component feedback beam of monitoring out; 12 pairs of measuring beams of computing machine are according to the opposite direction adjustment of angle drift value, two-dimentional light beam inflector assembly 17 corner resolving powers are better than 0.002 "; angle range is greater than 2 ", the step of monitoring repeatedly and adjusting, the angle drift value that can will be coupling in the measuring beam in the measuring-signal in real time is suppressed at 0.01 " in the scope, has guaranteed high-precision Bidimensional small angle measurement when improving 2 D photoelectric autocollimator measuring distance.

Referring to Fig. 5, the drift value monitoring device 7 in apparatus of the present invention can be connected by 4 quadrant detector 8 and focusing objective len 9 and form, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.

Referring to Fig. 6 (a), the beam splitting type target detector 11 in apparatus of the present invention can be made of half surface plating spectro-film of the inclination working surface of prism of corner cube 18, and measuring beam is by half working surface incident of plating spectro-film.

Referring to Fig. 6 (b), beam splitting type target detector 11 in apparatus of the present invention can be made of two pentagonal prisms 19 and 20 staggered relatively, the working surface plating spectro-film of one of them pentagonal prism 20, measuring beam is by the working surface incident of the pentagonal prism 20 of plating spectro-film.

Referring to Fig. 6 (c), beam splitting type target detector 11 in apparatus of the present invention is made of two right-angle prisms 21 and 22 staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism 22, measuring beam is by the vertical working surface incident of the right-angle prism 22 of plating spectro-film.

Describe method of the present invention below in detail:

The present invention also provides the measuring method based on the long-distance 2 D photoelectric auto-collimation device of drift amount target feedback control technology, and this measuring method may further comprise the steps:

1. at first drift value monitoring device 7 is adjusted, guarantee that the photosurface of 4 quadrant detector 8 is centered close to the focus place of focusing objective len 9, drift value monitoring device 7 should be connected with 2 D photoelectric autocollimation light pipe 1 after adjustment finished, then 2 D photoelectric autocollimation 1 is calibrated, the calibration finish the back use in drift value monitoring device 7 no longer adjust;

2. the laser beam that sends of the LASER Light Source 2 of 2 D photoelectric autocollimation 1 illuminates the graticule 3 on the focus that is positioned at collimator objective 6, through spectroscope 4 transmissions, after collimator objective 6 is assembled, through inciding the beam splitting type target detector 11 that is placed on the measured object after 17 reflections of two-dimentional light beam inflector assembly, beam splitting type target detector 11 is divided into two bundles with incident beam;

3. after folded light beam is obtained the Bidimensional small angle variation of beam splitting type target detector 11, assemble by collimator objective 6 through two-dimentional light beam inflector assembly 17 reflection backs, through imaging on the ccd image sensor 5 after spectroscope 4 reflections, become measuring-signal, the variable quantity of the spot center position that forms on ccd image sensor 5 is d 1

4. transmitted light beam becomes and the identical angle of measuring beam characteristic drift component feedback beam, feed back to drift value monitoring device 7, line focus object lens 9 focus on 4 quadrant detector 8 receptions of back by the place, focal plane that is positioned at focusing objective len 9, the angle drift value of monitoring angle of departure drift component feedback beam.When measuring beam produced angle drift value ε, angle drift component feedback beam focused on the focal plane of focusing objective len 9 and produces displacement d, and the angle drift value of monitoring angle of departure drift component feedback beam thus is:

ϵ = arctan ( Δd f 0 )

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector 8, f 0Focal length for focusing objective len 9.

5. the angle drift value of the computing machine 12 angle drift component feedback beam of monitoring out according to drift value monitoring device 7 is controlled two-dimentional light beam inflector assembly 17 in real time, in order to make two-dimentional light beam inflector assembly 17 reach very high driving resolution characteristic and to drive precision, employing is by drive power supply for piezoelectric ceramics 13, piezoelectric ceramics shifter 14, the two-dimentional light beam inflector assembly 17 that two dimension micro-displacement work table 15 and deflection mirror 16 are formed, computing machine 12 is controlled two-dimentional light beam inflector assembly 17 in real time according to the angle drift value of the angle drift component feedback beam that drift value monitoring device 7 is monitored out, carry out the adjustment of the space angle of light beam, the adjustment amount size is:

φ=ε

Wherein: φ is the adjustment amount of the space angle of 17 pairs of light beams of two-dimentional light beam inflector assembly, and ε is the angle drift value of the drift value monitoring device 7 angle drift component feedback beam of monitoring out;

6. according to step 4 and step 5,12 pairs of measuring beams of computing machine are according to the opposite direction adjustment of angle drift value, the angle drift value that suppresses measuring beam in real time, the angle drift value of the measuring beam that is coupled in the measuring-signal that ccd image sensor 5 receives has also obtained inhibition simultaneously, by Fig. 1 and Fig. 2, and, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector 11 by measuring-signal in conjunction with the autocollimation principle of geometrical optics and optics:

θ = d 1 2 f

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector 11, d 1The variable quantity of the spot center position that forms on ccd image sensor 5 for measuring-signal, f is the equivalent focal length of collimator objective 6.

As seen, after adopting novel beam splitting type target detector improvement optical measuring system and introducing the close-loop feedback control technology, separate when can guarantee to obtain the Bidimensional small angle variable quantity and obtain and the identical angle of measuring beam characteristic drift component feedback beam by beam splitting type target detector, and monitor by the angle drift value of drift value monitoring device diagonal angle drift component feedback beam, the angle drift value that computing machine is monitored out according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, measuring beam is adjusted according to the opposite direction of angle drift value, inhibition and elimination are coupling in the angle drift value of the measuring beam in the measuring-signal, the angle measurement error that angle drift value that can the dynamic compensation light beam causes, solved in the long distance applications occasion because the measurement stability that the angle drift value of light beam causes is poor, even the difficult problem of the visual field of the instrument that drifts about out, improved measurement stability in the measuring distance that increases the 2 D photoelectric autocollimator, high-precision Bidimensional small angle is measured thereby this measurement scheme has realized long distance.

Embodiment 1:

2 D photoelectric autocollimation as shown in Figure 1, beam splitting type target detector 11 is made of half surface plating spectro-film of the inclination working surface of right-angle prism, measuring beam is by the working surface incident of plating spectro-film, and drift value monitoring device 7 is connected by deflection mirror 10, focusing objective len 9 and 4 quadrant detector 8 and forms.At first drift value monitoring device 7 is adjusted, guarantee that the photosurface of 4 quadrant detector 8 is centered close to the focus place of focusing objective len 9, drift value monitoring device 7 should be connected with 2 D photoelectric autocollimation light pipe 1 after adjustment finished, then 2 D photoelectric autocollimation 1 is calibrated, the calibration finish the back use in drift value monitoring device 7 no longer adjust;

When measuring, the laser beam that the LASER Light Source 2 of 2 D photoelectric autocollimation light pipe 1 is sent illuminates the graticule 3 on the focus that is positioned at collimator objective 6, through spectroscope 4 transmissions, after collimator objective 6 is assembled, process is by drive power supply for piezoelectric ceramics 13, piezoelectric ceramics shifter 14, incide the beam splitting type target detector 11 that is placed on the measured object after two-dimentional light beam inflector assembly 17 reflections that two dimension micro-displacement work table 15 and deflection mirror 16 are formed, beam splitting type target detector 11 is divided into two bundles with incident beam: after folded light beam is obtained the Bidimensional small angle variation of beam splitting type target detector 11, assemble by collimator objective 6 through two-dimentional light beam inflector assembly 17 reflection backs, through imaging on the ccd image sensor 5 after spectroscope 4 reflections, become measuring-signal; Transmitted light beam becomes and the identical angle of measuring beam characteristic drift component feedback beam, feed back to drift value monitoring device 7, line focus object lens 9 focus on 4 quadrant detector 8 receptions of back by the place, focal plane that is positioned at focusing objective len 9, the angle drift value of monitoring angle of departure drift component feedback beam.When measuring beam produced angle drift value ε, angle drift component feedback beam focused on the focal plane of focusing objective len 9 and produces displacement d, and the angle drift value of monitoring angle of departure drift component feedback beam thus is:

ϵ = arctan ( Δd f 0 )

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector 8, f 0Focal length for focusing objective len 9.The real-time FEEDBACK CONTROL two-dimentional light beam of the angle drift value inflector assembly 17 of the angle drift component feedback beam that computing machine 12 is monitored out according to drift value monitoring device 7 carries out the adjustment of the space angle of light beam, and the adjustment amount size is:

φ=ε

Wherein: φ is the adjustment amount of the space angle of 17 pairs of light beams of two-dimentional light beam inflector assembly, and ε is the angle drift value of the drift value monitoring device 7 angle drift component feedback beam of monitoring out; 12 pairs of measuring beams of computing machine are according to the opposite direction adjustment of angle drift value, inhibition in real time and elimination are coupling in the angle drift value of the measuring beam in the measuring-signal, by Fig. 1 and Fig. 2, and, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector 11 by measuring-signal in conjunction with the autocollimation principle of geometrical optics and optics:

θ = d 1 2 f

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector 11, d 1The variable quantity of the spot center position that forms on ccd image sensor 5 for measuring-signal, f is the equivalent focal length of collimator objective 6.

In the present embodiment, beam splitting type target detector 11 is made of half surface plating spectro-film of the inclination working surface of the right-angle prism of length of side a=b=c=85mm, measuring beam is by the working surface incident of plating spectro-film, the splitting ratio of the spectro-film that is plated is: T/R=50/50@632.8nm, drift value monitoring device 7 is connected by deflection mirror 10, focusing objective len 9 and 4 quadrant detector 8 and forms, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.Deflection mirror 10 constitutes for plane mirror plating highly reflecting films, and plane mirror 10 diameters are Φ 50mm, highly reflecting films reflectivity factor: R 〉=99%@632.8nm; The focal length of focusing objective len 9 is f=150mm, and bore is D=50mm; 4 quadrant detector 8 is selected the S1557 type 4 quadrant detector of the loose company in Japanese shore, single quadrant photosurface area 0.2mm for use 2Two-dimentional light beam inflector assembly 17 is made up of drive power supply for piezoelectric ceramics 13, piezoelectric ceramics shifter 14, two-dimentional micro-displacement work table 15 and deflection mirror 16, the important technological parameters of drive power supply for piezoelectric ceramics 13 is: input voltage range is ± 6V, output voltage range is ± 600V, the minimum resolving power of output voltage is 0.226V, nonlinearity erron is less than 0.8%, and stability error is less than 0.01%; Piezoelectric ceramics shifter 14 select for use Chinese Academy of Sciences's Chengdu photoelectricity the telescopic piezoelectric ceramic driver, flexible scope is :-6 μ m~+ 6 μ m; Two dimension micro-displacement work table 15 adopts the two-dimension flexible hinge work bench of no mechanical gear train; Deflection mirror 16 constitutes for plane mirror plating highly reflecting films, plane mirror 10 diameters are Φ 50mm, highly reflecting films reflectivity factor: R 〉=99%@632.8nm, the corner resolving power of two-dimentional light beam inflector assembly 17 is better than 0.002 "; angle range is greater than 10 ", the step of monitoring repeatedly and adjusting, can be in real time the angle drift value of measuring beam be suppressed at 0.01 " in the scope; experimental result shows; this 2 D photoelectric autocollimation reaches 0.01 in measurement resolution ", measuring distance is under the situation of 20m, and measurement stability is better than 0.05 "/h; uncertainty of measurement is better than 0.05 ", has realized longly measuring apart from high precision two-dimensional narrow angle.

Embodiment 2:

2 D photoelectric autocollimation as shown in Figure 1, here, as shown in Figure 5, drift value monitoring device 7 is made up of focusing objective len 9 and 4 quadrant detector 8,4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9, beam splitting type target detector 11 is made of half surface plating spectro-film of the inclination working surface of right-angle prism, and measuring beam is by the working surface incident of plating spectro-film.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 3:

2 D photoelectric autocollimation as shown in Figure 1, drift value monitoring device 7 is made up of deflection mirror 10, focusing objective len 9 and 4 quadrant detector 8, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.Shown in Fig. 6 (a), beam splitting type target detector 11 is made of half surface plating spectro-film of the inclination working surface of prism of corner cube 18, and measuring beam is by half working surface incident of plating spectro-film.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 4:

2 D photoelectric autocollimation as shown in Figure 1, as shown in Figure 5, drift value monitoring device 7 is made up of focusing objective len 9 and 4 quadrant detector 8, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.Shown in Fig. 6 (a), beam splitting type target detector 11 is made of half surface plating spectro-film of the inclination working surface of prism of corner cube 18, and measuring beam is by half working surface incident of plating spectro-film.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 5:

2 D photoelectric autocollimation as shown in Figure 1, drift value monitoring device 7 is made up of deflection mirror 10, focusing objective len 9 and 4 quadrant detector 8, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.Shown in Fig. 6 (b), beam splitting type target detector 11 is made of two pentagonal prisms 19 and 20 staggered relatively, the working surface plating spectro-film of one of them pentagonal prism 20, and measuring beam is by the working surface incident of the pentagonal prism of plating spectro-film.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 6:

2 D photoelectric autocollimation as shown in Figure 1, as shown in Figure 5, drift value monitoring device 7 is made up of focusing objective len 9 and 4 quadrant detector 8, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.Shown in Fig. 6 (b), beam splitting type target detector 11 is made of two pentagonal prisms 19 and 20 staggered relatively, the working surface plating spectro-film of one of them pentagonal prism 20, and measuring beam is by the working surface incident of the pentagonal prism of plating spectro-film.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 7:

2 D photoelectric autocollimation as shown in Figure 1, drift value monitoring device 7 is made up of deflection mirror 10, focusing objective len 9 and 4 quadrant detector 8, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.Shown in Fig. 6 (c), beam splitting type target detector 11 is made of two right-angle prisms 21 and 22 staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism 22, measuring beam is by the vertical working surface incident of the right-angle prism 22 of plating spectro-film.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 8:

2 D photoelectric autocollimation as shown in Figure 1, as shown in Figure 5, drift value monitoring device 7 is made up of focusing objective len 9 and 4 quadrant detector 8, and 4 quadrant detector 8 is positioned at the place, focal plane of focusing objective len 9.Shown in Fig. 6 (c), beam splitting type target detector 11 is made of two right-angle prisms 21 and 22 staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism 22, measuring beam is by the vertical working surface incident of the right-angle prism 22 of plating spectro-film.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 2-8 has identical experimental result with embodiment 1, promptly reach 0.01 in measurement resolution ", measuring distance is under the situation of 20m, measurement stability is better than 0.05 "/h, uncertainty of measurement is better than 0.05 ", realized longly measuring apart from high precision two-dimensional narrow angle.

Below in conjunction with the accompanying drawings the specific embodiment of the present invention and test effect are described; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change of carrying out on claim of the present invention basis all is protection scope of the present invention.

Claims (7)

1. the long-distance 2 D photoelectric auto-collimation device of a drift amount target FEEDBACK CONTROL, comprise 2 D photoelectric autocollimation light pipe, computing machine, the two-dimentional light beam inflector assembly, with the drift value monitoring device, said 2 D photoelectric autocollimation light pipe is by the LASER Light Source of placing successively, graticule, spectroscope, ccd image sensor and collimator objective are formed, said drift value monitoring device is connected by focusing objective len and 4 quadrant detector and forms, said two-dimentional light beam inflector assembly is by drive power supply for piezoelectric ceramics, the piezoelectric ceramics shifter, two dimension micro-displacement work table and deflection mirror are formed, it is characterized in that also comprising beam splitting type target detector, this beam splitting type target detector is between two-dimentional light beam inflector assembly and drift value monitoring device, beam splitting type target detector separates in the measuring-signal that obtains its Bidimensional small angle variable quantity and feeds back to and the identical angle of measuring beam characteristic drift component feedback beam, the angle drift value of drift value monitoring device diagonal angle drift component feedback beam is monitored in real time, the computing machine angle drift value that monitoring obtains according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, measuring beam is adjusted according to the opposite direction of angle drift value, suppressed to be coupling in the angle drift value of the measuring beam in the measuring-signal.
2. device according to claim 1 is characterized in that said beam splitting type target detector is made of half surface plating spectro-film of the inclination working surface of right-angle prism, and measuring beam is by the working surface incident of plating spectro-film.
3. device according to claim 1 is characterized in that said beam splitting type target detector is made of half surface plating spectro-film of the inclination working surface of prism of corner cube, and measuring beam is by the working surface incident of plating spectro-film.
4. device according to claim 1, it is characterized in that said beam splitting type target detector is made of two pentagonal prisms staggered relatively, the working surface plating spectro-film of one of them pentagonal prism, measuring beam is by the working surface incident of the pentagonal prism of plating spectro-film.
5. device according to claim 1, it is characterized in that said beam splitting type target detector is made of two right-angle prisms staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism, measuring beam is by the vertical working surface incident of the right-angle prism of plating spectro-film.
6. according to any described device among the claim 1-5, it is characterized in that said drift value monitoring device is connected by deflection mirror, focusing objective len and 4 quadrant detector to form, 4 quadrant detector is positioned at the place, focal plane of focusing objective len.
7. the long-distance 2 D photoelectric auto-collimation method of a drift amount target FEEDBACK CONTROL is characterized in that said method may further comprise the steps:
(1). 2 D photoelectric autocollimation light pipe sends measuring beam;
(2). beam splitting type target detector receives measuring beam and is separated into folded light beam and transmitted light beam;
(3). folded light beam is received by ccd image sensor after obtaining the Bidimensional small angle variable quantity of beam splitting type target detector, becomes measuring-signal;
(4). transmitted light beam is isolated and the identical angle of measuring beam characteristic drift component feedback beam, feeds back to the drift value monitoring device, and the line focus object lens are received by 4 quadrant detector, the angle drift value of monitoring angle of departure drift component feedback beam:
ϵ = arctan ( Δd f 0 )
Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector, f 0Focal length for focusing objective len.
(5). computing machine is controlled the two-dimentional light beam inflector assembly in real time according to the angle drift value of the angle drift component feedback beam that the drift value monitoring device is monitored out, makes measuring beam according to the opposite direction adjustment of angle drift value, and the adjustment amount size is:
φ=ε
Wherein: φ is the adjustment amount of two-dimentional light beam inflector assembly to the space angle of light beam, the angle drift value of the angle drift component feedback beam that ε monitors out for the drift value monitoring device.
(6). adjust repeatedly according to step 3 and step 4, suppress and eliminate the angle drift value of the measuring beam that is coupling in the measuring-signal in real time, accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector by measuring-signal:
θ = d 1 2 f
Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector, d 1The variable quantity of the spot center position that forms on ccd image sensor for measuring-signal, f is the equivalent focal length of collimator objective.
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CN111076699A (en) * 2019-12-04 2020-04-28 中国科学院西安光学精密机械研究所 Different-surface space angle measuring device and method for photoelectric detection equipment
CN111076699B (en) * 2019-12-04 2020-12-25 中国科学院西安光学精密机械研究所 Different-surface space angle measuring device and method for photoelectric detection equipment

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